Virgo_ST/VirgoRT/Modules/PMs/VentRountine.cs

using Aitex.Core.RT.Routine;
using Aitex.Core.RT.SCCore;
using VirgoRT.Devices;

namespace VirgoRT.Modules.PMs
{
    class VentRoutine : PMRoutineBase, IRoutine
    {
        private enum VentSequence
        {
            kCloseValves,
            kOpenSoftVentValve,
            kOpenFastVentValve,
            kVentToPrecision,
            kVentDelay,
            kCloseVentValve,
            kEnd,
            kCheckLidSignal,
            kCheckSlitDoor,
            kCheckThrottleValveStatus,
            kCheckN2,
            kOpenProcessValve,
            kOpenN2Supply,
            kCheckChamberPressure,
            kCheckATM
        }

        private int _ventTime;
        private int _ventTimeDelay = 1;  //执行Vent程序时(自动或手动Vent)，先关闭PV2，延时2秒后打开PV3。
        private int _checkATMTimeout = 90;

        public VentRoutine(JetPM chamber) : base(chamber)
        {
            Name = "vent";
            bUINotify = true;
        }

        public Result Start(params object[] objs)
        {
            // 预检查
            if (CheckLid() == Result.RUN &&
                CheckSlitDoor() == Result.RUN &&
                CheckCDA() == Result.RUN)
            {
                Reset();

                _chamber.CloseValves();

                //_PressureTrip1 = SC.GetValue<int>($"{Module}.Pump.PressureTrip1") * 1000;
                _ventTime = (int)SC.GetValue<double>($"{Module}.VentTime");
                _checkATMTimeout = SC.GetValue<int>($"{Module}.CheckATMTimeout");
                _ventTimeDelay = SC.GetValue<int>($"{Module}.VentTimeDelay");

                Notify("开始");
                return Result.RUN;
            }

            return Result.FAIL;
        }

        public Result Monitor()
        {
            try
            {
                //CheckThrottleValveFullOpen((int)VentSequence.kCheckThrottleValveStatus);

                // 开阀
                //OpenValve((int)VentSequence.kOpenSoftVentValve, ValveType.PURGE, true);
                SetValve((int)VentSequence.kOpenProcessValve, ValveType.PROCESS, true);

                // 监控压力
                //CheckPressure((int)VentSequence.kCheckChamberPressure, _PressureTrip1, true, 30);

                // 开阀
                SetValve((int)VentSequence.kOpenFastVentValve, ValveType.FAST_VENT, true);

                CheckATM2((int)VentSequence.kCheckATM, true, _checkATMTimeout);

                // delay 3 seconds
                TimeDelay((int)VentSequence.kVentDelay, _ventTimeDelay);

                // 结束并关闭所有阀
                CloseAllValve((int)VentSequence.kCloseValves, 0);

                End((int)VentSequence.kEnd);
            }
            catch (RoutineBreakException)
            {
                return Result.RUN;
            }
            catch (RoutineFaildException)
            {
                //_chamber.OpenValve(ValveType.N2_SUPPLY, false);
                _chamber.SetValveOnOff(ValveType.FAST_VENT, false);
                _chamber.SetValveOnOff(ValveType.PURGE, false);
                _chamber.SetValveOnOff(ValveType.PROCESS, false);

                Notify("出错");
                return Result.FAIL;
            }
            catch (System.Exception ex)
            {
                Stop(ex.Message);
                return Result.FAIL;
            }

            Notify("结束");
            return Result.DONE;
        }

        public override void Abort()
        {
            _chamber.CloseValves();
        }
    }
}