Virgo_ST/VirgoSimulator/Config/_ioDefineVirgo.xml

<?xml version='1.0'?>
<IO_DEFINE xmlns:xsi='http://www.w3.org/2001/XMLSchema-instance' xmlns:xsd='http://www.w3.org/2001/XMLSchema'>

	<!--文件根据Virgo Alpha IO list V1.52 XH IP 061120.xlsx生成-->
	<!--生成时间：07/02/2020 12:24:37-->
	<Dig_In>
		<DI_ITEM Index="0" Name="DI_Lid_Closed" Device="" Addr="w20.00" Note="Interlock-HW" />
		<DI_ITEM Index="1" Name="DI_PM_ATM_SW" Device="" Addr="w20.01" Note="Interlock-PLC" />
		<DI_ITEM Index="2" Name="DI_PM_VAC_SW" Device="9.5T" Addr="w20.02" Note="Interlock-HW" />
		<DI_ITEM Index="3" Name="DI_Cooling_Water_Flow_SW" Device="" Addr="w20.03" Note="Interlock-HW" />
    <DI_ITEM Index="4" Name="DI_LE_OT_SW_Alarm" Device="" Addr="w20.04" Note="1=OK， 0=alarm" />
		<DI_ITEM Index="5" Name="DI_Water_Leak" Device="" Addr="w20.05" Note="1=OK， 0=alarm" />
		<DI_ITEM Index="6" Name="DI_Slit_Door_Open_Pos" Device="" Addr="w20.06" Note="Interlock-HW" />
		<DI_ITEM Index="7" Name="DI_Slit_Door_Close_Pos" Device="" Addr="w20.07" Note="Interlock-HW" />
		<DI_ITEM Index="8" Name="DI_Lift_Pin_Up" Device="" Addr="w20.08" Note="1=on,0=off" />
		<DI_ITEM Index="9" Name="DI_Lift_Pin_Down" Device="" Addr="w20.09" Note="1=on,0=off" />
    <DI_ITEM Index="10" Name="DI_Guide_Pin_Small_Lifter_Up_Pos" Device="" Addr="w20.10" />
    <DI_ITEM Index="11" Name="DI_Guide_Pin_Small_Lifter_Down_Pos" Device="" Addr="w20.11" />
		<DI_ITEM Index="12" Name="DI_Guide_Pin_Medium_Lifter_Up_Pos" Device="" Addr="w20.12" />
		<DI_ITEM Index="13" Name="DI_Guide_Pin_Medium_Lifter_Down_Pos" Device="" Addr="w20.13" />
		<DI_ITEM Index="14" Name="DI_ARM_Not_Extend_to_PM" Device="" Addr="w20.14" Note="Interlock-PLC" />
		<DI_ITEM Index="15" Name="DI_Generator_Hardware_Interlock" Device="" Addr="w20.15" Note="1=rf interlock ok,0=rf interlock off" />
		<DI_ITEM Index="16" Name="DI_Generator_Power_Status" Device="" Addr="w21.00" Note="1=on,0=off" />
		<DI_ITEM Index="17" Name="DI_Coolant_Inlet_TC_Broken_Alarm" Device="" Addr="w21.01" />
		<DI_ITEM Index="18" Name="DI_Coolant_Outlet_TC_Broken_Alarm" Device="" Addr="w21.02" />
		<DI_ITEM Index="19" Name="DI_Substrate_Control_TC_Broken_Alarm" Device="" Addr="w21.03" Note="0=OK,1=alarm" />
		<DI_ITEM Index="20" Name="DI_Substrate_Monitor_TC_Broken_Alarm" Device="" Addr="w21.04" Note="0=OK,1=alarm" />
		<DI_ITEM Index="21" Name="DI_Substrate_Heater_On_FB" Device="" Addr="w21.05" Note="0=OFF,1=ON" />
		<DI_ITEM Index="22" Name="DI_CDA_Pressure" Device="" Addr="w21.06" />
		<DI_ITEM Index="23" Name="" />
		<DI_ITEM Index="24" Name="DI_SourceFan1" Device="" Addr="w21.08" />
		<DI_ITEM Index="25" Name="DI_SourceFan2" Device="" Addr="w21.09" />
		<DI_ITEM Index="26" Name="" />
		<DI_ITEM Index="27" Name="" />
		<DI_ITEM Index="28" Name="" />
    <DI_ITEM Index="29" Name="DI_GB_Pressure_SW_Alarm" Device="" Addr="w21.13" Note="0=OK，1=Warning" />
    <DI_ITEM Index="30" Name="DI_GB_Door_SW_Alarm" Device="" Addr="w21.14" Note="0=OK，1=Warning" />
    <DI_ITEM Index="31" Name="" />
    <DI_ITEM Index="32" Name="" />
    <DI_ITEM Index="33" Name="" />
    <DI_ITEM Index="34" Name="" />
    <DI_ITEM Index="35" Name="" />
    <DI_ITEM Index="36" Name="DI_Substrate_TC_Deviation_out_of_range" Device="" Addr="w22.04" Note="0=OK，1=alarm" />
    <DI_ITEM Index="37" Name="DI_Foreline_TC_Deviation_out_of_range" Device="" Addr="w22.05" Note="0=OK，1=alarm" />
		<DI_ITEM Index="38" Name="DI_Foreline_Control_TC_Broken_Alarm" Device="" Addr="w22.06" Note="0=OK，1=alarm" />
		<DI_ITEM Index="39" Name="DI_Foreline_Monitor_TC_Broken_Alarm" Device="" Addr="w22.07" Note="0=OK，1=alarm" />
		<DI_ITEM Index="40" Name="DI_Foreline_Heater_On_FB" Device="" Addr="w22.08" Note="0=OFF,1=ON" />
		<DI_ITEM Index="41" Name="" />
		<DI_ITEM Index="42" Name="" />
		<DI_ITEM Index="43" Name="DI_EFEM_Side_Panel_Closed" Device="" Addr="w22.11" Note="Interlock-HW" />
		<DI_ITEM Index="44" Name="" />
		<DI_ITEM Index="45" Name="DI_Fast_Pumping_SW" Device="" Addr="w22.13" />
		<DI_ITEM Index="46" Name="" />
		<DI_ITEM Index="47" Name="" />
		<DI_ITEM Index="48" Name="DI_MFC1_Pressure" Device="" Addr="w23.00" />
		<DI_ITEM Index="49" Name="DI_MFC2_Pressure" Device="" Addr="w23.01" />
		<DI_ITEM Index="50" Name="DI_MFC3_Pressure" Device="" Addr="w23.02" />
		<DI_ITEM Index="51" Name="DI_MFC4_Pressure" Device="" Addr="w23.03" />
		<DI_ITEM Index="52" Name="DI_MFC5_Pressure" Device="" Addr="w23.04" />
    <DI_ITEM Index="53" Name="DI_N2_Pressure" Device="" Addr="w23.05"  />
    <DI_ITEM Index="54" Name="DI_Process_pressure_Alarm" Addr="w23.06" />
    <DI_ITEM Index="55" Name="DI_Chamber_pressure_Alarm" Addr="w23.07" />
    <DI_ITEM Index="56" Name="DI_Foreline_pressure_Alarm" Addr="w23.08" />
		<DI_ITEM Index="57" Name="" />
		<DI_ITEM Index="58" Name="" />
		<DI_ITEM Index="59" Name="" />

		<DI_ITEM Index="60" Name="" Device="" Addr="w23.12" />
		<DI_ITEM Index="61" Name="" Device="" Addr="w23.13" />
		<DI_ITEM Index="62" Name="" Device="" Addr="w23.14" />
		<DI_ITEM Index="63" Name="" Device="" Addr="w23.15"  />
		<DI_ITEM Index="64" Name="" Addr="w24.00" />
		<DI_ITEM Index="65" Name="" Addr="w24.01" />
		<DI_ITEM Index="66" Name="" Addr="w24.02" />
		<DI_ITEM Index="67" Name="DI_CHB_Wall_TC_Deviation_out_of_range" Addr="w24.03"  />
		<DI_ITEM Index="68" Name="DI_Grid_TC_Broken_Alarm" Addr="w24.04"  />
		<DI_ITEM Index="69" Name="DI_CHB_Wall_Control_TC_Broken_Alarm" Addr="w24.05"  />

		<DI_ITEM Index="70" Name="DI_CHB_Wall_Monitor_TC_Broken_Alarm" Device="" Addr="w24.06" />
		<DI_ITEM Index="71" Name="DI_CHB_Wall_Heater_On_FB" Device="" Addr="w24.07" />
		<DI_ITEM Index="72" Name="" Device="" Addr="w24.08" />
		<DI_ITEM Index="73" Name="" Device="" Addr="w24.09"  />
		<DI_ITEM Index="74" Name="DI_Dry_Pump_Running" Device="" Addr="w24.10" Note="1=on,0=off" />
		<DI_ITEM Index="75" Name="DI_Pump_Alarm" Device="" Addr="w24.11" Note="1=on,0=off" />
		<DI_ITEM Index="76" Name="DI_Pump_Remote_Status" Device="" Addr="w24.12" Note="1=on,0=off" />
		<DI_ITEM Index="77" Name="DI_Booster_Pump_Running" Device=""  Addr="w24.13" Note="1=on,0=off"/>
		<DI_ITEM Index="78" Name="" />
		<DI_ITEM Index="79" Name="" />

		<DI_ITEM Index="80" Name="" Device="" Addr="w25.00" />
		<DI_ITEM Index="81" Name="" Device="" Addr="w25.01" />
		<DI_ITEM Index="82" Name="" Device="" Addr="w25.02" />
		<DI_ITEM Index="83" Name="" Device="" Addr="w25.03"  />
		<DI_ITEM Index="84" Name="" Addr="w25.04" />
		<DI_ITEM Index="85" Name="" Addr="w25.05" />
		<DI_ITEM Index="86" Name="" Addr="w25.06" />
		<DI_ITEM Index="87" Name="" />
		<DI_ITEM Index="88" Name="" />
		<DI_ITEM Index="89" Name="" />
    <DI_ITEM Index="90" Name="" />
    <DI_ITEM Index="91" Name="" />
    <DI_ITEM Index="92" Name="" />
    <DI_ITEM Index="93" Name="" />
    <DI_ITEM Index="94" Name="" />
    <DI_ITEM Index="95" Name="" />
    <DI_ITEM Index="96" Name="" />
    <DI_ITEM Index="97" Name="" />
    <DI_ITEM Index="98" Name="" />
    <DI_ITEM Index="99" Name="" />
    <DI_ITEM Index="100" Name="DI_Foreline_Heat_PID_AT_Star_Fb" Device=""  Addr="w26.04" Note="" />
    <DI_ITEM Index="101" Name="DI_Foreline_Heat_PID_AT_Stop_Fb" Device=""  Addr="w26.05" Note="" />
    <DI_ITEM Index="102" Name="DI_Substrate_Heat_PID_AT_Star_Fb" Device=""  Addr="w26.06" Note="" />
    <DI_ITEM Index="103" Name="DI_Substrate_Heat_PID_AT_Stop_Fb" Device=""  Addr="w26.07" Note="" />
    <DI_ITEM Index="104" Name="DI_CHB_Heat_PID_AT_Star_Fb" Addr="w26.08" Note="1=On, 0=Off" />
    <DI_ITEM Index="105" Name="DI_CHB_Heat_PID_AT_Stop_Fb" Addr="w26.09" Note="1=On, 0=Off" />

    <DI_ITEM Index="106" Name="DI_Foreline_Heat_PID_AT_Running" Addr="w26.10" Note="1=On, 0=Off" />
    <DI_ITEM Index="107" Name="DI_Foreline_Heat_PID_AT_Finished" Addr="w26.11" Note="1=On, 0=Off" />
    <DI_ITEM Index="108" Name="DI_Substrate_Heat_PID_AT_Running" Addr="w26.12" Note="1=On, 0=Off" />
    <DI_ITEM Index="109" Name="DI_Substrate_Heat_PID_AT_Finished" Addr="w26.13" Note="1=On, 0=Off" />
    <DI_ITEM Index="110" Name="DI_CHB_Heat_PID_AT_Running" Addr="w26.14" Note="1=On, 0=Off" />
    <DI_ITEM Index="111" Name="DI_CHB_Heat_PID_AT_Finished" Addr="w26.15" Note="1=On, 0=Off" />
	</Dig_In>
	<Dig_Out>
		<DO_ITEM Index="0" Name="DO_Soft_Pumping_Valve" Device="" Addr="w0.00" />
		<DO_ITEM Index="1" Name="DO_Fast_Pumping_Valve" Device="" Addr="w0.01" />
		<DO_ITEM Index="2" Name="" />
		<DO_ITEM Index="3" Name="" />
		<DO_ITEM Index="4" Name="DO_Slit_Door_Open" Device="" Addr="w0.04" />
		<DO_ITEM Index="5" Name="DO_Slit_Door_Close" Device="" Addr="w0.05" Note="Interlock-HW" />
		<DO_ITEM Index="6" Name="DO_Lift_Pin_Up" Device="" Addr="w0.06" />
		<DO_ITEM Index="7" Name="DO_Lift_Pin_Down" Device="" Addr="w0.07" />
    <DO_ITEM Index="8" Name="DO_Guide_Pin_Small_Lifter_Up" Device="" Addr="w0.08" />
    <DO_ITEM Index="9" Name="DO_Guide_Pin_Small_Lifter_Down" Device="" Addr="w0.09" />
		<DO_ITEM Index="10" Name="DO_Guide_Pin_Medium_Lifter_Up" Device="" Addr="w0.10" />
		<DO_ITEM Index="11" Name="DO_Guide_Pin_Medium_Lifter_Down" Device="" Addr="w0.11" />
    <DO_ITEM Index="12" Name="" />
    <DO_ITEM Index="13" Name="" />
		<DO_ITEM Index="14" Name="DO_MFC1_Valve" Device="" Addr="w0.14" />
		<DO_ITEM Index="15" Name="DO_MFC2_Valve" Device="" Addr="w0.15" />
		<DO_ITEM Index="16" Name="DO_MFC3_Valve" Device="" Addr="w1.00" />
		<DO_ITEM Index="17" Name="DO_MFC4_Valve" Device="" Addr="w1.01" />
		<DO_ITEM Index="18" Name="DO_MFC5_Valve" Device="" Addr="w1.02" />
		<DO_ITEM Index="19" Name="" />
		<DO_ITEM Index="20" Name="" />
		<DO_ITEM Index="21" Name="" />
		<DO_ITEM Index="22" Name="" />
		<DO_ITEM Index="23" Name="DO_Chamber_purge_valve" Device="" Addr="w1.07" />
		<DO_ITEM Index="24" Name="DO_Chamber_vent_valve" Device="" Addr="w1.08" />
		<DO_ITEM Index="25" Name="DO_Process_gas_final_valve" Device="" Addr="w1.09" />
		<DO_ITEM Index="26" Name="" />
		<DO_ITEM Index="27" Name="" />
		<DO_ITEM Index="28" Name="" />
		<DO_ITEM Index="29" Name="" />
		<DO_ITEM Index="30" Name="" />
		<DO_ITEM Index="31" Name="" />
		<DO_ITEM Index="32" Name="DO_Reset_Signal" Device="" Addr="w2.00" Note="Reset RFG" />
		<DO_ITEM Index="33" Name="" />
		<DO_ITEM Index="34" Name="" />
		<DO_ITEM Index="35" Name="DO_Forline_Heater_Enable" Device="" Addr="w2.03" />
		<DO_ITEM Index="36" Name="DO_Forline_Heater_On" Device="" Addr="w2.04" />
		<DO_ITEM Index="37" Name="DO_Substrate_Heater_On" Device="" Addr="w2.05" Note="Interlock-HW" />
		<DO_ITEM Index="38" Name="" />
		<DO_ITEM Index="39" Name="" />
    <DO_ITEM Index="40" Name="" />
    <DO_ITEM Index="41" Name="" />
		<DO_ITEM Index="42" Name="DO_Generator_Power_ON" Device="" Addr="w2.10" Note="Generator" />
		<DO_ITEM Index="43" Name="" />
		<DO_ITEM Index="44" Name="" />
		<DO_ITEM Index="45" Name="" />
		<DO_ITEM Index="46" Name="" />
		<DO_ITEM Index="47" Name="DO_CHB_Wall_Heater_On"  Device="" Addr="w2.15" Note="Heater On==1,Heater Off ==0" />
		<DO_ITEM Index="48" Name="DO_Pump_Run" Device="" Addr="w3.00" Note="DI-64做反馈信号，启动条件：DI-65为0，DI-66为1"/>
		<DO_ITEM Index="49" Name="DO_Pump_Stop" Device="" Addr="w3.01" Note="DI-64做反馈信号" />
		<DO_ITEM Index="50" Name="" />
		<DO_ITEM Index="51" Name="" />
		<DO_ITEM Index="52" Name="" />
		<DO_ITEM Index="53" Name="" />
		<DO_ITEM Index="54" Name="" />
		<DO_ITEM Index="55" Name="" />
		<DO_ITEM Index="56" Name="" />
		<DO_ITEM Index="57" Name="" />
		<DO_ITEM Index="58" Name="" />
		<DO_ITEM Index="59" Name="" />
    <DO_ITEM Index="60" Name="" />
    <DO_ITEM Index="61" Name="" />
    <DO_ITEM Index="62" Name="" />
    <DO_ITEM Index="63" Name="" />
    <DO_ITEM Index="64" Name="" />
    <DO_ITEM Index="65" Name="" />
    <DO_ITEM Index="66" Name="" />
    <DO_ITEM Index="67" Name="" />
    <DO_ITEM Index="68" Name="" />
    <DO_ITEM Index="69" Name="" />
    <DO_ITEM Index="70" Name="" />
    <DO_ITEM Index="71" Name="" />
    <DO_ITEM Index="72" Name="" />
    <DO_ITEM Index="73" Name="" />
    <DO_ITEM Index="74" Name="" />
    <DO_ITEM Index="75" Name="" />
    <DO_ITEM Index="76" Name="" />
    <DO_ITEM Index="77" Name="" />
    <DO_ITEM Index="78" Name="" />
    <DO_ITEM Index="79" Name="" />
    <DO_ITEM Index="80" Name="" />
    <DO_ITEM Index="81" Name="" />
    <DO_ITEM Index="82" Name="" />
    <DO_ITEM Index="83" Name="" />
    <DO_ITEM Index="84" Name="" />
    <DO_ITEM Index="85" Name="" />
    <DO_ITEM Index="86" Name="" />
    <DO_ITEM Index="87" Name="" />
    <DO_ITEM Index="88" Name="" />
    <DO_ITEM Index="89" Name="" />
    <DO_ITEM Index="90" Name="" />
    <DO_ITEM Index="91" Name="" />
    <DO_ITEM Index="92" Name="" />
    <DO_ITEM Index="93" Name="" />
    <DO_ITEM Index="94" Name="" />
    <DO_ITEM Index="95" Name="" />
    <DO_ITEM Index="96" Name="" />
    <DO_ITEM Index="97" Name="" />
    <DO_ITEM Index="98" Name="" />
    <DO_ITEM Index="99" Name="" />
    <DO_ITEM Index="100" Name="DO_Foreline_Heat_PID_AT_Star" Device="" Addr="w6.04" Note="DI-100为1，将DO-100置0" />
    <DO_ITEM Index="101" Name="DO_Foreline_Heat_PID_AT_Stop" Device="" Addr="w6.05" Note="DI-101为1，将DO-101置0" />
    <DO_ITEM Index="102" Name="DO_Substrate_Heat_PID_AT_Star" Device="" Addr="w6.06" Note="DI-102为1，将DO-102置0" />
    <DO_ITEM Index="103" Name="DO_Substrate_Heat_PID_AT_Stop" Device="" Addr="w6.07" Note="DI-103为1，将DO-103置0" />
    <DO_ITEM Index="104" Name="DO_CHB_Heat_PID_AT_Star" Device="" Addr="w6.08" Note="DI-104为1，将DO-104置0" />
    <DO_ITEM Index="105" Name="DO_CHB_Heat_PID_AT_Stop" Device="" Addr="w6.09" Note="DI-105为1，将DO-105置0" />
	</Dig_Out>
	<Ana_Out>
		<AO_ITEM Index="0" Name="AO_Generator_Power_Setpoint" BufferOffset="0" Device="" Addr="d1000" Note="0-6000W" />
		<AO_ITEM Index="1" Name="" />
		<AO_ITEM Index="2" Name="AO_MFC1_Flow_Setpoint" BufferOffset="4" Device="" Addr="d1004" Note="MFC" />
		<AO_ITEM Index="3" Name="AO_MFC2_Flow_Setpoint" BufferOffset="6" Device="" Addr="d1006" Note="MFC" />
		<AO_ITEM Index="4" Name="AO_MFC3_Flow_Setpoint" BufferOffset="8" Device="" Addr="d1008" Note="MFC" />
		<AO_ITEM Index="5" Name="AO_MFC4_Flow_Setpoint" BufferOffset="10" Device="" Addr="d1010" Note="MFC" />
		<AO_ITEM Index="6" Name="AO_MFC5_Flow_Setpoint" BufferOffset="12" Device="" Addr="d1012" Note="MFC" />
		<AO_ITEM Index="7" Name="AO_Throttle_Valve_Work_Mode" BufferOffset="14" Device="" Addr="d1014" Note="Throttle valve only" />
		<AO_ITEM Index="8" Name="AO_Throttle_Valve_Pressure_Setpoint" BufferOffset="16" Device="" Addr="d1016" />
		<AO_ITEM Index="9" Name="AO_Throttle_Valve_Position_Setpoint" BufferOffset="18" Device="" Addr="d1018" />
		<AO_ITEM Index="10" Name="" />
		<AO_ITEM Index="11" Name="AO_Substrate_Temperature_Setpoint" BufferOffset="22" Device="" Addr="d1022" Note="基座设定温度" />
		<AO_ITEM Index="12" Name="AO_Foreline_Temperature_Setpoint" BufferOffset="24" Device="" Addr="d1024" Note="前级管道设定温度" />
		<AO_ITEM Index="13" Name="AO_Heartbeat" BufferOffset="26" Device="" Addr="d1026" Note="Check 通讯" />
		<AO_ITEM Index="14" Name="AO_CHB_Wall_Temperature_Setpoint"  BufferOffset="28" Device="" Addr="d1028" Note="CHB Wall设定温度" />
		<AO_ITEM Index="15" Name="AO_CHB_Wall_Temp_Limit_Setpoint"  BufferOffset="30" Device="" Addr="d1030" Note="CHB Wall限制温度" />
		<AO_ITEM Index="16" Name="" />
		<AO_ITEM Index="17" Name="" />
		<AO_ITEM Index="18" Name="" />
		<AO_ITEM Index="19" Name="" />
		<AO_ITEM Index="20" Name="AO_Substrate_Temp_Limit_Setpoint" BufferOffset="40" Device="" Addr="d1040" Note="Temp Limit" />
		<AO_ITEM Index="21" Name="AO_Foreline_Temp_Limit_Setpoint" BufferOffset="42" Device="" Addr="d1042" Note="Temp Limit" />
		<AO_ITEM Index="22" Name="AO_Process_Pressure_Offset_Value" BufferOffset="44" Device="" Addr="d1044" Note="0-20" />
		<AO_ITEM Index="23" Name="" />
		<AO_ITEM Index="24" Name="" />
		<AO_ITEM Index="25" Name="AO_BaisRF_Enable" BufferOffset="50" Device="" Addr="d1050" Note="0=Substrate heater mode ,1=Bais RF mode" />
		<AO_ITEM Index="26" Name="AO_Pump_IO_CTRL_Enable" BufferOffset="52" Addr="d1052" Note="0=Comm CTRL ,1=IO CTRL" />
		<AO_ITEM Index="27" Name="" />
		<AO_ITEM Index="28" Name="" />
		<AO_ITEM Index="29" Name="" />
		<AO_ITEM Index="30" Name="" />
		<AO_ITEM Index="31" Name="" />
		<AO_ITEM Index="32" Name="" />
		<AO_ITEM Index="33" Name="" />
		<AO_ITEM Index="34" Name="" />
		<AO_ITEM Index="35" Name="" />
		<AO_ITEM Index="36" Name="" />
		<AO_ITEM Index="37" Name="" />
		<AO_ITEM Index="38" Name="" />
		<AO_ITEM Index="39" Name="" />
		<AO_ITEM Index="40" Name="" />
		<AO_ITEM Index="41" Name="" />
		<AO_ITEM Index="42" Name="" />
		<AO_ITEM Index="43" Name="" />
		<AO_ITEM Index="44" Name="" />
		<AO_ITEM Index="45" Name="" />
		<AO_ITEM Index="46" Name="" />
		<AO_ITEM Index="47" Name="" />
		<AO_ITEM Index="48" Name="" />
		<AO_ITEM Index="49" Name="" />
	</Ana_Out>
	<Ana_In>
		<AI_ITEM Index="0" Name="AI_Process_pressure" BufferOffset="0" Device="" Addr="d2000" Note="Process pressure" />
		<AI_ITEM Index="1" Name="AI_Chamber_pressure" BufferOffset="2" Device="" Addr="d2002" />
		<AI_ITEM Index="2" Name="AI_Foreline_pressure" BufferOffset="4" Device="" Addr="d2004" />
		<AI_ITEM Index="3" Name="" />
		<AI_ITEM Index="4" Name="AI_MFC1_Flow" BufferOffset="8" Device="" Addr="d2008" Note="MFC" />
		<AI_ITEM Index="5" Name="AI_MFC2_Flow" BufferOffset="10" Device="" Addr="d2010" Note="MFC" />
		<AI_ITEM Index="6" Name="AI_MFC3_Flow" BufferOffset="12" Device="" Addr="d2012" Note="MFC" />
		<AI_ITEM Index="7" Name="AI_MFC4_Flow" BufferOffset="14" Device="" Addr="d2014" Note="MFC" />
		<AI_ITEM Index="8" Name="AI_MFC5_Flow" BufferOffset="16" Device="" Addr="d2016" Note="MFC" />
    <AI_ITEM Index="9" Name="AI_Coolant_Inlet_Temp" BufferOffset="18" Device="" Addr="d2018" Note="Chiller" />
    <AI_ITEM Index="10" Name="AI_Coolant_Outlet_Temp" BufferOffset="20" Device="" Addr="d2020" Note="Chiller" />
		<AI_ITEM Index="11" Name="AI_Substrate_Control_TC_Temp" BufferOffset="22" Device="" Addr="d2022" Note="TC temp" />
		<AI_ITEM Index="12" Name="AI_Substrate_Monitor_TC_Temp" BufferOffset="24" Device="" Addr="d2024" Note="TC temp" />
		<AI_ITEM Index="13" Name="" />
		<AI_ITEM Index="14" Name="AI_Throttle_Valve_Real_Position" BufferOffset="28" Device="" Addr="d2028" Note="Throttle valve only" />
		<AI_ITEM Index="15" Name="AI_Throttle_Valve_Real_Pressure" BufferOffset="30" Device="" Addr="d2030" />
		<AI_ITEM Index="16" Name="AI_Throttle_Valve_State" BufferOffset="32" Device="" Addr="d2032" />
		<AI_ITEM Index="17" Name="" />
		<AI_ITEM Index="18" Name="AI_Heartbeat_FB" BufferOffset="36" Device="" Addr="d2036" />
		<AI_ITEM Index="19" Name="" />
		<AI_ITEM Index="20" Name="" />
		<AI_ITEM Index="21" Name="AI_Second" BufferOffset="42" Device="" Addr="d2042" />
		<AI_ITEM Index="22" Name="AI_Minute" BufferOffset="44" Device="" Addr="d2044" />
		<AI_ITEM Index="23" Name="AI_Time" BufferOffset="46" Device="" Addr="d2046" />
		<AI_ITEM Index="24" Name="AI_Day" BufferOffset="48" Device="" Addr="d2048" />
		<AI_ITEM Index="25" Name="AI_Month" BufferOffset="50" Device="" Addr="d2050" />
		<AI_ITEM Index="26" Name="AI_Year" BufferOffset="52" Device="" Addr="d2052" />
		<AI_ITEM Index="27" Name="" />
		<AI_ITEM Index="28" Name="" />
		<AI_ITEM Index="29" Name="" />
		<AI_ITEM Index="30" Name="AI_Foreline_Control_TC_Temp" BufferOffset="60" Device="" Addr="d2060" Note="TC temp" />
		<AI_ITEM Index="31" Name="AI_Foreline_Monitor_TC_Temp" BufferOffset="62" Device="" Addr="d2062" Note="TC temp" />
		<AI_ITEM Index="32" Name="" />
		<AI_ITEM Index="33" Name="" />
		<AI_ITEM Index="34" Name="" />
		<AI_ITEM Index="35" Name="AI_Grid_TC_Temp" BufferOffset="70" Device="" Addr="d2070" Note="TC temp" />
		<AI_ITEM Index="36" Name="AI_CHB_Wall_Control_TC_Temp" BufferOffset="72" Device="" Addr="d2072" Note="TC temp" />
		<AI_ITEM Index="37" Name="AI_CHB_Wall_Monitor_TC_Temp" BufferOffset="74" Device="" Addr="d2074" Note="TC temp" />
		<AI_ITEM Index="38" Name="" />
		<AI_ITEM Index="39" Name="" />
		<AI_ITEM Index="40" Name="" />
		<AI_ITEM Index="41" Name="" />
		<AI_ITEM Index="42" Name="AI_Generator_Forward_Power" BufferOffset="84" Device="" Addr="d2084" Note="ICP Souce/RPS" />
		<AI_ITEM Index="43" Name="AI_Generator_Reflect_Power" BufferOffset="86" Device="" Addr="d2086" />
		<AI_ITEM Index="44" Name="" />
		<AI_ITEM Index="45" Name="" />
		<AI_ITEM Index="46" Name="" />
		<AI_ITEM Index="47" Name="" />
		<AI_ITEM Index="48" Name="" />
		<AI_ITEM Index="49" Name="" />
	</Ana_In>
</IO_DEFINE>