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Virgo_ST
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VirgoSetup
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Packages
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VirgoUI
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Config
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SystemConfigB.default.xml

SystemConfigB.default.xml 15 KB
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  1. <?xml version="1.0" encoding="utf-16"?>
    2. 

  2. <SystemConfig xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" xmlns:xsd="http://www.w3.org/2001/XMLSchema">
    3. 

  3. 	<DataElements>
    4. 

  4. 

  5. 		<DataElement displayName="TV Position"  cn="PMA.蝶阀位置反馈值" en="" dbName="IO32.PMA.AI_Throttle_Valve_Real_Position" isPressureAxis="false"/>
    6. 

  6. 		<DataElement displayName="TV Position SP"  cn="PMA.蝶阀位置设定值" en="" dbName="IO32.PMA.AO_Throttle_Valve_Position_Setpoint" isPressureAxis="false"/>
    7. 

  7. 		<DataElement displayName="TV Pressure"  cn="PMA.蝶阀压力反馈值" en="" dbName="IO32.PMA.AI_Throttle_Valve_Real_Pressure" isPressureAxis="false"/>
    8. 

  8. 		<DataElement displayName="TV Pressure SP"  cn="PMA.蝶阀压力设定值" en="" dbName="IO32.PMA.AO_Throttle_Valve_Pressure_Setpoint" isPressureAxis="false"/>
    9. 

  9. 

  10. 		<DataElement displayName="RF Power SP"  cn="PMA.源射频功率设定值" en="" dbName="PMA.Rf.PowerSetPoint" isPressureAxis=""/>
    11. 

  11. 		<DataElement displayName="RF Forward Power" cn="PMA.源射频输出功率" en=""  dbName="PMA.Rf.ForwardPower" isPressureAxis=""/>
    12. 

  12. 		<DataElement displayName="RF Reflect Power" cn="PMA.源射频反射功率" en=""  dbName="PMA.Rf.ReflectPower" isPressureAxis=""/>
    13. 

  13. 

  14. 		<DataElement displayName="BiasRf Power SP"  cn="PMA.偏压射频功率设定值" en="" dbName="PMA.BiasRf.PowerSetPoint" isPressureAxis=""/>
    15. 

  15. 		<DataElement displayName="BiasRf Forward Power" cn="PMA.偏压射频输出功率" en=""  dbName="PMA.BiasRf.ForwardPower" isPressureAxis=""/>
    16. 

  16. 		<DataElement displayName="BiasRf Reflect Power" cn="PMA.偏压射频反射功率" en=""  dbName="PMA.BiasRf.ReflectPower" isPressureAxis=""/>
    17. 

  17. 		<DataElement displayName="BiasMatch C1" cn="PMA.偏压匹配器C1值" en=""  dbName="PMA.BiasMatch.C1" isPressureAxis=""/>
    18. 

  18. 		<DataElement displayName="BiasMatch C2" cn="PMA.偏压匹配器C2值" en=""  dbName="PMA.BiasMatch.C2" isPressureAxis=""/>
    19. 

  19. 		<DataElement displayName="BiasMatch VPP" cn="PMA.偏压匹配器VPP值" en=""  dbName="PMA.BiasMatch.VPP" isPressureAxis=""/>
    20. 

  20. 

  21. 		<DataElement displayName="Substrate Temperature" cn="PMA.Substrate温度反馈值" en=""  dbName="PMA.IoHeater.HeaterChamber.ControlTcFeedback" isPressureAxis=""/>
    22. 

  22. 		<DataElement displayName="Substrate Temperature SP" cn="PMA.Substrate温度设定值" en=""  dbName="PMA.IoHeater.HeaterChamber.ControlTcSetPointView" isPressureAxis=""/>
    23. 

  23. 

  24. 		<DataElement displayName="Chiller Inlet Temperature" cn="PMA.Chiller进口温度反馈值" en=""  dbName="PMA.IoHeater.HeaterChamber.CoolantInletTempFeedback" isPressureAxis=""/>
    25. 

  25. 		<DataElement displayName="Chiller Outlet Temperature" cn="PMA.Chiller出口温度反馈值" en=""  dbName="PMA.IoHeater.HeaterChamber.CoolantOutletTempFeedback" isPressureAxis=""/>
    26. 

  26. 

  27. 		<DataElement displayName="Chiller Temperature SP" cn="PMA.Chiller温度设定值" en=""  dbName="PMA.Chiller.ControlTcSetPoint" isPressureAxis=""/>
    28. 

  28. 

  29. 		<DataElement displayName="Gas1 MFC"  cn="PMA.Gas1 MFC流量" en="" dbName="PMA.IoMfc.MfcGas1.FeedBack" isPressureAxis=""/>
    30. 

  30. 		<DataElement displayName="Gas1 MFC SP"  cn="PMA.Gas1 MFC设定值" en="" dbName="PMA.IoMfc.MfcGas1.SetPoint" isPressureAxis=""/>
    31. 

  31. 

  32. 		<DataElement displayName="Gas2 MFC" cn="PMA.Gas2 MFC流量" en=""  dbName="PMA.IoMfc.MfcGas2.FeedBack" isPressureAxis=""/>
    33. 

  33. 		<DataElement displayName="Gas2 MFC SP" cn="PMA.Gas2 MFC设定值" en=""  dbName="PMA.IoMfc.MfcGas2.SetPoint" isPressureAxis=""/>
    34. 

  34. 

  35. 		<DataElement displayName="Gas3 MFC" cn="PMA.Gas3 MFC流量" en=""  dbName="PMA.IoMfc.MfcGas3.FeedBack" isPressureAxis=""/>
    36. 

  36. 		<DataElement displayName="Gas3 MFC SP" cn="PMA.Gas3 MFC设定值" en=""  dbName="PMA.IoMfc.MfcGas3.SetPoint" isPressureAxis=""/>
    37. 

  37. 

  38. 		<DataElement displayName="Gas4 MFC" cn="PMA.Gas4 MFC流量" en=""  dbName="PMA.IoMfc.MfcGas4.FeedBack" isPressureAxis=""/>
    39. 

  39. 		<DataElement displayName="Gas4 MFC SP" cn="PMA.Gas4 MFC设定值" en=""  dbName="PMA.IoMfc.MfcGas4.SetPoint" isPressureAxis=""/>
    40. 

  40. 

  41. 		<DataElement displayName="Gas5 MFC" cn="PMA.Gas5 MFC流量" en=""  dbName="PMA.IoMfc.MfcGas5.FeedBack" isPressureAxis=""/>
    42. 

  42. 		<DataElement displayName="Gas5 MFC SP" cn="PMA.Gas5 MFC设定值" en=""  dbName="PMA.IoMfc.MfcGas5.SetPoint" isPressureAxis=""/>
    43. 

  43. 

  44. 		<DataElement displayName="TV Position"  cn="PMB.蝶阀位置反馈值" en="" dbName="IO32.PMB.AI_Throttle_Valve_Real_Position" isPressureAxis="false"/>
    45. 

  45. 		<DataElement displayName="TV Position SP"  cn="PMB.蝶阀位置设定值" en="" dbName="IO32.PMB.AO_Throttle_Valve_Position_Setpoint" isPressureAxis="false"/>
    46. 

  46. 		<DataElement displayName="TV Pressure"  cn="PMB.蝶阀压力反馈值" en="" dbName="IO32.PMB.AI_Throttle_Valve_Real_Pressure" isPressureAxis="false"/>
    47. 

  47. 		<DataElement displayName="TV Pressure SP"  cn="PMB.蝶阀压力设定值" en="" dbName="IO32.PMB.AO_Throttle_Valve_Pressure_Setpoint" isPressureAxis="false"/>
    48. 

  48. 

  49. 		<DataElement displayName="RF Power SP"  cn="PMB.源射频功率设定值" en="" dbName="PMB.Rf.PowerSetPoint" isPressureAxis=""/>
    50. 

  50. 		<DataElement displayName="RF Forward Power" cn="PMB.源射频输出功率" en=""  dbName="PMB.Rf.ForwardPower" isPressureAxis=""/>
    51. 

  51. 		<DataElement displayName="RF Reflect Power" cn="PMB.源射频反射功率" en=""  dbName="PMB.Rf.ReflectPower" isPressureAxis=""/>
    52. 

  52. 

  53. 		<DataElement displayName="BiasRf Power SP"  cn="PMB.偏压射频功率设定值" en="" dbName="PMB.BiasRf.PowerSetPoint" isPressureAxis=""/>
    54. 

  54. 		<DataElement displayName="BiasRf Forward Power" cn="PMB.偏压射频输出功率" en=""  dbName="PMB.BiasRf.ForwardPower" isPressureAxis=""/>
    55. 

  55. 		<DataElement displayName="BiasRf Reflect Power" cn="PMB.偏压射频反射功率" en=""  dbName="PMB.BiasRf.ReflectPower" isPressureAxis=""/>
    56. 

  56. 		<DataElement displayName="BiasMatch C1" cn="PMB.偏压匹配器C1值" en=""  dbName="PMB.BiasMatch.C1" isPressureAxis=""/>
    57. 

  57. 		<DataElement displayName="BiasMatch C2" cn="PMB.偏压匹配器C2值" en=""  dbName="PMB.BiasMatch.C2" isPressureAxis=""/>
    58. 

  58. 		<DataElement displayName="BiasMatch VPP" cn="PMB.偏压匹配器VPP值" en=""  dbName="PMB.BiasMatch.VPP" isPressureAxis=""/>
    59. 

  59. 

  60. 		<DataElement displayName="Substrate Temperature" cn="PMB.Substrate温度反馈值" en=""  dbName="PMB.IoHeater.HeaterChamber.ControlTcFeedback" isPressureAxis=""/>
    61. 

  61. 		<DataElement displayName="Substrate Temperature SP" cn="PMB.Substrate温度设定值" en=""  dbName="PMB.IoHeater.HeaterChamber.ControlTcSetPointView" isPressureAxis=""/>
    62. 

  62. 

  63. 		<DataElement displayName="Chiller Inlet Temperature" cn="PMB.Chiller进口温度反馈值" en=""  dbName="PMB.IoHeater.HeaterChamber.CoolantInletTempFeedback" isPressureAxis=""/>
    64. 

  64. 		<DataElement displayName="Chiller Outlet Temperature" cn="PMB.Chiller出口温度反馈值" en=""  dbName="PMB.IoHeater.HeaterChamber.CoolantOutletTempFeedback" isPressureAxis=""/>
    65. 

  65. 

  66. 		<DataElement displayName="Chiller Temperature SP" cn="PMB.Chiller温度设定值" en=""  dbName="PMB.Chiller.ControlTcSetPoint" isPressureAxis=""/>
    67. 

  67. 

  68. 		<DataElement displayName="Gas1 MFC"  cn="PMB.Gas1 MFC流量" en="" dbName="PMB.IoMfc.MfcGas1.FeedBack" isPressureAxis=""/>
    69. 

  69. 		<DataElement displayName="Gas1 MFC SP"  cn="PMB.Gas1 MFC设定值" en="" dbName="PMB.IoMfc.MfcGas1.SetPoint" isPressureAxis=""/>
    70. 

  70. 

  71. 		<DataElement displayName="Gas2 MFC" cn="PMB.Gas2 MFC流量" en=""  dbName="PMB.IoMfc.MfcGas2.FeedBack" isPressureAxis=""/>
    72. 

  72. 		<DataElement displayName="Gas2 MFC SP" cn="PMB.Gas2 MFC设定值" en=""  dbName="PMB.IoMfc.MfcGas2.SetPoint" isPressureAxis=""/>
    73. 

  73. 

  74. 		<DataElement displayName="Gas3 MFC" cn="PMB.Gas3 MFC流量" en=""  dbName="PMB.IoMfc.MfcGas3.FeedBack" isPressureAxis=""/>
    75. 

  75. 		<DataElement displayName="Gas3 MFC SP" cn="PMB.Gas3 MFC设定值" en=""  dbName="PMB.IoMfc.MfcGas3.SetPoint" isPressureAxis=""/>
    76. 

  76. 

  77. 		<DataElement displayName="Gas4 MFC" cn="PMB.Gas4 MFC流量" en=""  dbName="PMB.IoMfc.MfcGas4.FeedBack" isPressureAxis=""/>
    78. 

  78. 		<DataElement displayName="Gas4 MFC SP" cn="PMB.Gas4 MFC设定值" en=""  dbName="PMB.IoMfc.MfcGas4.SetPoint" isPressureAxis=""/>
    79. 

  79. 

  80. 		<DataElement displayName="Gas5 MFC" cn="PMB.Gas5 MFC流量" en=""  dbName="PMB.IoMfc.MfcGas5.FeedBack" isPressureAxis=""/>
    81. 

  81. 		<DataElement displayName="Gas5 MFC SP" cn="PMB.Gas5 MFC设定值" en=""  dbName="PMB.IoMfc.MfcGas5.SetPoint" isPressureAxis=""/>
    82. 

  82. 

  83. 	</DataElements>
    84. 

  84. </SystemConfig>
    85.