JetPlasma
/
Virgo_ST


			
				
					
						
						
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							<?xml version="1.0" encoding="utf-16"?>
<SystemConfig xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" xmlns:xsd="http://www.w3.org/2001/XMLSchema">
  <DataElements>

    <DataElement displayName="TV Position"  cn="PMA.蝶阀位置反馈值" en="" dbName="IO32.PMA.AI_Throttle_Valve_Real_Position" isPressureAxis="false"/>
    <DataElement displayName="TV Position SP"  cn="PMA.蝶阀位置设定值" en="" dbName="IO32.PMA.AO_Throttle_Valve_Position_Setpoint" isPressureAxis="false"/>
    <DataElement displayName="TV Pressure"  cn="PMA.蝶阀压力反馈值" en="" dbName="IO32.PMA.AI_Throttle_Valve_Real_Pressure" isPressureAxis="false"/>
    <DataElement displayName="TV Pressure SP"  cn="PMA.蝶阀压力设定值" en="" dbName="IO32.PMA.AO_Throttle_Valve_Pressure_Setpoint" isPressureAxis="false"/>

    <DataElement displayName="RF Power SP"  cn="PMA.源射频功率设定值" en="" dbName="PMA.Rf.PowerSetPoint" isPressureAxis=""/>
    <DataElement displayName="RF Forward Power" cn="PMA.源射频输出功率" en=""  dbName="PMA.Rf.ForwardPower" isPressureAxis=""/>
    <DataElement displayName="RF Reflect Power" cn="PMA.源射频反射功率" en=""  dbName="PMA.Rf.ReflectPower" isPressureAxis=""/>

    <DataElement displayName="Substrate Temperature" cn="PMA.Substrate温度反馈值" en=""  dbName="PMA.IoHeater.HeaterChamber.ControlTcFeedback" isPressureAxis=""/>
    <DataElement displayName="Substrate Temperature SP" cn="PMA.Substrate温度设定值" en=""  dbName="PMA.IoHeater.HeaterChamber.ControlTcSetPointView" isPressureAxis=""/>

	  <DataElement displayName="Gas1 MFC"  cn="PMA.Gas1 MFC流量" en="" dbName="PMA.IoMfc.MfcGas1.FeedBack" isPressureAxis=""/>
    <DataElement displayName="Gas1 MFC SP"  cn="PMA.Gas1 MFC设定值" en="" dbName="PMA.IoMfc.MfcGas1.SetPoint" isPressureAxis=""/>

    <DataElement displayName="Gas2 MFC" cn="PMA.Gas2 MFC流量" en=""  dbName="PMA.IoMfc.MfcGas2.FeedBack" isPressureAxis=""/>
    <DataElement displayName="Gas2 MFC SP" cn="PMA.Gas2 MFC设定值" en=""  dbName="PMA.IoMfc.MfcGas2.SetPoint" isPressureAxis=""/>
    
    <DataElement displayName="Gas3 MFC" cn="PMA.Gas3 MFC流量" en=""  dbName="PMA.IoMfc.MfcGas3.FeedBack" isPressureAxis=""/>
    <DataElement displayName="Gas3 MFC SP" cn="PMA.Gas3 MFC设定值" en=""  dbName="PMA.IoMfc.MfcGas3.SetPoint" isPressureAxis=""/>

    <DataElement displayName="Gas4 MFC" cn="PMA.Gas4 MFC流量" en=""  dbName="PMA.IoMfc.MfcGas4.FeedBack" isPressureAxis=""/>
    <DataElement displayName="Gas4 MFC SP" cn="PMA.Gas4 MFC设定值" en=""  dbName="PMA.IoMfc.MfcGas4.SetPoint" isPressureAxis=""/>

    <DataElement displayName="Gas5 MFC" cn="PMA.Gas5 MFC流量" en=""  dbName="PMA.IoMfc.MfcGas5.FeedBack" isPressureAxis=""/>
    <DataElement displayName="Gas5 MFC SP" cn="PMA.Gas5 MFC设定值" en=""  dbName="PMA.IoMfc.MfcGas5.SetPoint" isPressureAxis=""/>

  </DataElements>
</SystemConfig>