123456789101112131415161718192021222324252627282930313233343536373839404142434445464748495051525354555657585960616263646566676869707172737475767778798081828384858687888990919293949596979899100101102103104105106107108109110111112113114115116117118119120121122123124125126127128129130131132133134135136137138139140141142143144145146147148149150151152153154155156157158159160161162163164165166167168169170171172173174175176177178179180181182183184185186187188189190191192193194195196197198199200201202203204205206207208209210211212213214215216217218219220221222223224225226227228229230231232233234235236237238239240241242243244245246247248249250251252253254255256257258259260261262263264265266267268269270271272273274275276277278279280281282283284285286287288289290291292293294295296297298299300301302303304305306307308309310311312313314315316317318319320321322323324325326327328329330331332333334335336337338339340341342343344345346347348349350351352353354355356357358359360361362363364365366367368369370371372373374375376377378379380381382383384385386387388389390391392393394395396397398399400401402403404405406407408409410411412413414415416417418419420421422423424425426427428429430431432433434435436437438439440441442443444445446447448449450451452453454455456457458459460461462463464465466467468469470471472473474475476477478479480481482483484485486487488489490491492493494495496497498499500501502503504505506507508509510511512513514515516517518519520521522523524525526527528529530531532533534535536537538539540541542543544545546547548549550551552553554555556557558559560561562563564565566567568569570571572573574575576577578579580581582583584585586587588589590591592593594595596597598599600601602603604605606607608609610611612613614615616617618619620621622623624625626627628629630631632633634635636637638639640641642643644645646647648649650651652653654655656657658659660661662663664665666667668669670671672673674675676677678679680681682683684685686687688689690691692693694695696697698699700701702703704705706707708709710711712713714715716717718719720721722723724725726727728729730731732733734735736737738739740741742743744745746747748749750751752753754755756757758759760761762763764765766767768769770771772773774775776777778779780781782783784785786787788789790791792793794795796797798799800801802803804805806807808809810811812813814815816817818819820821822823824825826827828829830831832833834835836837838839840841842843844845846847848849850851852853854855856857858859860861862863864865866867868869870871872873874875876877878879880881882883884885886887888889890891892893894895896897898899900901902903904905906907908909910911912913914915916917918919920921922923924925926927928929930931 |
- using System;
- using System.Collections.Generic;
- using Aitex.Core.Common;
- using Aitex.Core.RT.DataCenter;
- using Aitex.Core.RT.Event;
- using Aitex.Core.RT.Fsm;
- using Aitex.Core.RT.OperationCenter;
- using Aitex.Core.RT.Routine;
- using Aitex.Core.RT.SCCore;
- using Aitex.Core.Util;
- using MECF.Framework.Common.Equipment;
- using MECF.Framework.Common.SubstrateTrackings;
- using VirgoCommon;
- using VirgoRT.HostWrapper;
- using VirgoRT.Instances;
- using VirgoRT.Module;
- namespace VirgoRT.Modules
- {
- class RouteManager : Entity, IEntity
- {
- public enum MSG
- {
- MoveWafer,
- ReturnWafer,
- HomeUnit,
- PauseAuto,
- ResumeAuto,
- Stop,
- StartCycle,
- HOME,
- RESET,
- ABORT,
- ERROR,
- SetAutoMode,
- SetManualMode,
- ResetIdleCleanTime,
- ResetIdlePurgeTime,
- CreateJob,
- PauseJob,
- ResumeJob,
- StartJob,
- StopJob,
- AbortJob,
- JobDone,
- CassetteLeave, //For unload light control off afer job done
- Map,
- ReturnAllWafer,
- }
- //public LoadPortEntity LP1 { get; private set; }
- //public LoadPortEntity LP2 { get; private set; }
- //public CoolingStorageEntity Aligner { get; private set; }
- public EfemEntity EFEM { get; private set; }
- public PMEntity PMA { get; private set; }
- public PMEntity PMB { get; private set; }
- //routine
- public bool IsAutoIdle
- {
- get
- {
- return fsm.State == (int)RtState.AutoIdle;
- }
- }
- public bool IsAutoMode
- {
- get
- {
- return fsm.State == (int)RtState.AutoRunning || fsm.State == (int)RtState.AutoIdle;
- }
- }
- public string Name { get; set; }
- public bool IsInit
- {
- get { return fsm.State == (int)RtState.Init; }
- }
- public bool IsIdle
- {
- get { return fsm.State == (int)RtState.Idle; }
- }
- public bool IsAlarm
- {
- get { return fsm.State == (int)RtState.Error; }
- }
- public bool IsEntityError
- {
- get
- {
- return (EFEM?.IsError ?? false)
- || (PMA?.IsError ?? false)
- || (PMB?.IsError ?? false);
- }
- }
- public bool IsRunning
- {
- get
- {
- return !IsInit && !IsAlarm && !IsIdle;
- }
- }
- private ManualTransfer _manualTransfer;
- private AutoTransfer _auto = null;
- private ReturnAllWafer _returnWafer;
- private HomeAll _homeAll = new HomeAll();
- private bool _isWaitUnload;
-
- public RouteManager()
- {
- Name = "System";
- //LP1 = new LoadPortEntity(ModuleName.LP1);
- //LP2 = new LoadPortEntity(ModuleName.LP2);
- //Aligner = new CoolingStorageEntity(ModuleName.Aligner);
- EFEM = new EfemEntity();
- if (SC.GetValue<bool>("System.PMAIsInstalled"))
- PMA = new PMEntity(ModuleName.PMA);
- if (SC.GetValue<bool>("System.PMBIsInstalled"))
- PMB = new PMEntity(ModuleName.PMB);
- fsm = new StateMachine<RouteManager>(Name, (int)RtState.Init, 50);
- BuildTransitionTable();
- SubscribeDataVariable();
- SubscribeOperation();
- Running = true;
- }
- private void BuildTransitionTable()
- {
- EnterExitTransition<RtState, FSM_MSG>(RtState.AutoRunning, fEnterAutoRunning, FSM_MSG.NONE, fExitAutoTransfer);
- EnterExitTransition<RtState, FSM_MSG>(RtState.Transfer, null, FSM_MSG.NONE, fExitTransfer);
- EnterExitTransition<RtState, FSM_MSG>(RtState.Idle, fEnterIdle, FSM_MSG.NONE, fExitIdle);
- EnterExitTransition<RtState, FSM_MSG>(RtState.ReturnWafer, null, FSM_MSG.NONE, FsmExitReturnWafer);
- //Init sequence
- Transition(RtState.Init, MSG.HOME, FsmStartHome, RtState.Initializing);
- Transition(RtState.Idle, MSG.HOME, FsmStartHome, RtState.Initializing);
- Transition(RtState.Error, MSG.HOME, FsmStartHome, RtState.Initializing);
- // EnterExitTransition<RtState, FSM_MSG>(RtState.Initializing, fStartInit, FSM_MSG.NONE, null);
- Transition(RtState.Initializing, FSM_MSG.TIMER, FsmMonitorHome, RtState.Idle);
- Transition(RtState.Initializing, MSG.ERROR, fError, RtState.Error);
- Transition(RtState.Initializing, MSG.ABORT, FsmAbort, RtState.Init);
- //Reset
- AnyStateTransition(MSG.RESET, fStartReset, RtState.Idle);
- AnyStateTransition(MSG.ERROR, fError, RtState.Error);
- AnyStateTransition((int)FSM_MSG.ALARM, fError, (int)RtState.Error);
- //Unload cassette
- AnyStateTransition(MSG.CassetteLeave, fCassetteLeave, FSM_STATE.SAME);
- //Auto/manual
- Transition(RtState.Idle, MSG.SetAutoMode, fStartAutoTransfer, RtState.AutoIdle);
- Transition(RtState.AutoRunning, FSM_MSG.TIMER, fAutoTransfer, RtState.Idle);
- Transition(RtState.AutoRunning, MSG.ABORT, fAbortAutoTransfer, RtState.Idle);
- //Transition(RtState.AutoRunning, MSG.SetManualMode, FsmStartSetManualMode, RtState.Idle);
- Transition(RtState.AutoRunning, MSG.JobDone, fJobDone, RtState.AutoIdle);
- //Transition(RtState.AutoRunning, MSG.CassetteLeave, fCassetteLeave, RtState.AutoRunning); //For unload light control off afer job done
- Transition(RtState.AutoRunning, MSG.CreateJob, FsmCreateJob, RtState.AutoRunning);
- Transition(RtState.AutoRunning, MSG.StartJob, FsmStartJob, RtState.AutoRunning);
- Transition(RtState.AutoRunning, MSG.PauseJob, FsmPauseJob, RtState.AutoRunning);
- Transition(RtState.AutoRunning, MSG.ResumeJob, FsmResumeJob, RtState.AutoRunning);
- Transition(RtState.AutoRunning, MSG.StopJob, FsmStopJob, RtState.AutoRunning);
- Transition(RtState.AutoRunning, MSG.AbortJob, FsmAbortJob, RtState.AutoRunning);
- Transition(RtState.AutoRunning, MSG.Map, FsmMap, RtState.AutoRunning);
- Transition(RtState.AutoRunning, MSG.ResetIdleCleanTime, FsmResetIdleCleanTime, RtState.AutoRunning);
- Transition(RtState.AutoRunning, MSG.ResetIdlePurgeTime, FsmResetIdlePurgeTime, RtState.AutoRunning);
- Transition(RtState.AutoIdle, FSM_MSG.TIMER, FsmMonitorAutoIdle, RtState.AutoIdle);
- Transition(RtState.AutoIdle, MSG.SetManualMode, FsmStartSetManualMode, RtState.Idle);
- Transition(RtState.AutoIdle, MSG.CreateJob, FsmCreateJob, RtState.AutoIdle);
- Transition(RtState.AutoIdle, MSG.StartJob, FsmStartJob, RtState.AutoRunning);
- Transition(RtState.AutoIdle, MSG.PauseJob, FsmPauseJob, RtState.AutoIdle);
- Transition(RtState.AutoIdle, MSG.ResumeJob, FsmResumeJob, RtState.AutoIdle);
- Transition(RtState.AutoIdle, MSG.StopJob, FsmStopJob, RtState.AutoIdle);
- Transition(RtState.AutoIdle, MSG.AbortJob, FsmAbortJob, RtState.AutoIdle);
- Transition(RtState.AutoIdle, MSG.Map, FsmMap, RtState.AutoIdle);
- //Transition(RtState.AutoIdle, MSG.CassetteLeave, fCassetteLeave, RtState.AutoIdle); //For unload light control off afer job done
- Transition(RtState.AutoIdle, MSG.ResetIdleCleanTime, FsmResetIdleCleanTime, RtState.AutoIdle);
- Transition(RtState.AutoIdle, MSG.ResetIdlePurgeTime, FsmResetIdlePurgeTime, RtState.AutoIdle);
- //Transfer
- Transition(RtState.Idle, MSG.MoveWafer, fStartTransfer, RtState.Transfer);
- Transition(RtState.Transfer, FSM_MSG.TIMER, fTransfer, RtState.Idle);
- Transition(RtState.Transfer, MSG.ABORT, FsmAbort, RtState.Idle);
- //Return Wafer
- Transition(RtState.Idle, MSG.ReturnAllWafer, FsmStartReturnWafer, RtState.ReturnWafer);
- Transition(RtState.ReturnWafer, FSM_MSG.TIMER, FsmMonitorReturnWafer, RtState.Idle);
- Transition(RtState.ReturnWafer, MSG.ABORT, FsmAbort, RtState.Idle);
- }
- void SubscribeDataVariable()
- {
- DATA.Subscribe("Rt.Status", () => ((RtState)fsm.State).ToString());
- DATA.Subscribe(ModuleName.System.ToString(), "AlarmEvent", EV.GetAlarmEvent);
- DATA.Subscribe("System.IsAutoMode", () => IsAutoMode);
- DATA.Subscribe("System.IsIdle", () => IsIdle || IsInit || IsAutoIdle);
- DATA.Subscribe("System.IsAlarm", () => IsAlarm || IsEntityError);
- DATA.Subscribe("System.IsBusy", () => IsRunning);
- DATA.Subscribe("System.IsWaitUnload", () => _isWaitUnload && IsAutoMode);
- DATA.Subscribe("System.IsConnectedWithHost", () => Singleton<FaManager>.Instance.IsConnected);
- DATA.Subscribe("EquipmentMode", () => IsAutoMode ? 0 : 1, SubscriptionAttribute.FLAG.IgnoreSaveDB);
- DATA.Subscribe("EquipmentStatus", () =>
- {
- //"0 = Uninit
- //1 = Idle
- //2 = Running
- //3 = Error
- //4 = Pause
- //"
- if (IsInit) return 0;
- if (IsIdle||fsm.State == (int)RtState.AutoIdle) return 1;
- if (IsAlarm) return 3;
-
- return 2;
- }, SubscriptionAttribute.FLAG.IgnoreSaveDB);
- }
- void SubscribeOperation()
- {
- OP.Subscribe("CreateWafer", InvokeCreateWafer);
- OP.Subscribe("DeleteWafer", InvokeDeleteWafer);
- OP.Subscribe("ReturnWafer", InvokeReturnWafer);
- OP.Subscribe("System.ReturnAllWafer", (string cmd, object[] args) =>
- {
- return CheckToPostMessage((int)MSG.ReturnAllWafer, args[0], args[1]);
- });
- OP.Subscribe("System.MoveWafer", (string cmd, object[] args) =>
- {
- if (!Enum.TryParse((string)args[0], out ModuleName source))
- {
- EV.PostWarningLog(Name, $"Parameter source {(string)args[0]} not valid");
- return false;
- }
- if (!Enum.TryParse((string)args[2], out ModuleName destination))
- {
- EV.PostWarningLog(Name, $"Parameter destination {(string)args[1]} not valid");
- return false;
- }
- return CheckToPostMessage((int)MSG.MoveWafer,
- source, (int)args[1],
- destination, (int)args[3],
- (bool)args[4], (int)args[5],
- (bool)args[6], (int)args[7], (string)args[8]);
- });
- OP.Subscribe("System.HomeAll", (string cmd, object[] args) =>
- {
- return CheckToPostMessage((int)MSG.HOME);
- });
- OP.Subscribe("System.Abort", (string cmd, object[] args) =>
- {
- return CheckToPostMessage((int)MSG.ABORT);
- });
- OP.Subscribe("System.Reset", (string cmd, object[] args) =>
- {
- return CheckToPostMessage((int)MSG.RESET);
- });
- OP.Subscribe("System.SetAutoMode", (string cmd, object[] args) =>
- {
- return CheckToPostMessage((int)MSG.SetAutoMode);
- });
- OP.Subscribe("System.SetManualMode", (string cmd, object[] args) =>
- {
- return CheckToPostMessage((int)MSG.SetManualMode);
- });
- OP.Subscribe("System.CreateJob", (string cmd, object[] args) =>
- {
- return CheckToPostMessage((int)MSG.CreateJob, args[0]);
- });
- OP.Subscribe("System.StartJob", (string cmd, object[] args) =>
- {
- return CheckToPostMessage((int)MSG.StartJob, args[0]);
- });
- OP.Subscribe("System.PauseJob", (string cmd, object[] args) =>
- {
- return CheckToPostMessage((int)MSG.PauseJob, args[0]);
- });
- OP.Subscribe("System.ResumeJob", (string cmd, object[] args) =>
- {
- return CheckToPostMessage((int)MSG.ResumeJob, args[0]);
- });
- OP.Subscribe("System.StopJob", (string cmd, object[] args) =>
- {
- return CheckToPostMessage((int)MSG.StopJob, args[0]);
- });
- OP.Subscribe("System.AbortJob", (string cmd, object[] args) =>
- {
- return CheckToPostMessage((int)MSG.AbortJob, args[0]);
- });
- OP.Subscribe("LP1.Map", (string cmd, object[] args) =>
- {
- if (IsAutoMode)
- {
- return CheckToPostMessage((int)MSG.Map, ModuleName.LP1.ToString());
- }
- return EFEM.InvokeMap(ModuleName.LP1.ToString())!= (int)FSM_MSG.NONE;
- });
- OP.Subscribe("LP2.Map", (string cmd, object[] args) =>
- {
- if (IsAutoMode)
- {
- return CheckToPostMessage((int)MSG.Map, ModuleName.LP2.ToString());
- }
- return EFEM.InvokeMap(ModuleName.LP2.ToString()) != (int)FSM_MSG.NONE;
- });
- OP.Subscribe(RtOperation.SetConfig.ToString(), (name, args) =>
- {
- string sc_key = args[0] as string;
- if (!string.IsNullOrWhiteSpace(sc_key) && args.Length > 1)
- {
- SC.SetItemValue(sc_key, args[1]);
- }
- return true;
- });
- OP.Subscribe("System.ResetIdleCleanTime", (string cmd, object[] args) =>
- {
- return CheckToPostMessage((int)MSG.ResetIdleCleanTime, args[0]);
- });
- OP.Subscribe("System.ResetIdlePurgeTime", (string cmd, object[] args) =>
- {
- return CheckToPostMessage((int)MSG.ResetIdlePurgeTime, args[0]);
- });
- OP.Subscribe("System.SetWaferSize", (string cmd, object[] args) =>
- {
- string module = (string)args[0];
- string size = (string)args[1];
- switch (size)
- {
- case "3":
- WaferManager.Instance.UpdateWaferSize(ModuleHelper.Converter(module), 0, WaferSize.WS3);
- break;
- case "4":
- WaferManager.Instance.UpdateWaferSize(ModuleHelper.Converter(module), 0, WaferSize.WS4);
- break;
- case "6":
- WaferManager.Instance.UpdateWaferSize(ModuleHelper.Converter(module), 0, WaferSize.WS6);
- break;
- default:
- EV.PostWarningLog("System", $"wafer size {size} not valid");
- break;
- }
- return true;
- });
- OP.Subscribe("System.CassetteLeave", (string cmd, object[] args) =>
- {
- return CheckToPostMessage((int)MSG.CassetteLeave);
- });
- }
- public bool CheckToPostMessage(int msg, params object[] args)
- {
- if (!fsm.FindTransition(fsm.State, msg))
- {
- EV.PostWarningLog(Name, $"{Name} is in { (RtState)fsm.State} state,can not do {(MSG)msg}");
- return false;
- }
- fsm.PostMsg(msg, args);
- return true;
- }
- public bool Check(int msg, out string reason, params object[] args)
- {
- if (!fsm.FindTransition(fsm.State, msg))
- {
- reason = String.Format("{0} is in {1} state,can not do {2}", Name, (RtState)fsm.State, (MSG)msg);
- return false;
- }
- if (msg == (int)MSG.StartCycle)
- {
- if (!IsAutoMode)
- {
- reason = String.Format("can not do {0}, isn't auto mode.", msg.ToString());
- return false;
- }
- }
- reason = "";
- return true;
- }
- protected override bool Init()
- {
- _manualTransfer = new ManualTransfer();
- Singleton<EventManager>.Instance.OnAlarmEvent += Instance_OnAlarmEvent;
- EFEM.Initialize();
- //Aligner.Initialize();
- //LP1.Initialize();
- //LP2.Initialize();
- PMA?.Initialize();
- PMB?.Initialize();
- _auto = new AutoTransfer();
- _returnWafer = new ReturnAllWafer();
- return true;
- }
- private void Instance_OnAlarmEvent(EventItem obj)
- {
- FSM_MSG msg = FSM_MSG.NONE;
- if (obj.Level == EventLevel.Warning)
- msg = FSM_MSG.WARNING;
- else if (obj.Level == EventLevel.Alarm)
- msg = FSM_MSG.ALARM;
- switch (obj.Source)
- {
- case "PMA":
- PMA?.PostMsg(msg, obj.Id, obj.Description);
- break;
- case "PMB":
- PMB?.PostMsg(msg, obj.Id, obj.Description);
- break;
- case "EFEM":
- EFEM?.PostMsg(msg, obj.Id, obj.Description);
- break;
- //case "System":
- // PostMsg(msg, obj.Id, obj.Description);
- // break;
- }
- }
- protected override void Term()
- {
- PMA?.Terminate();
- PMB?.Terminate();
- //LP2.Terminate();
- //LP1.Terminate();
- EFEM.Terminate();
- }
- #region Init
- private bool FsmStartHome(object[] objs)
- {
- return _homeAll.Start() == Result.RUN;
- }
- private bool FsmMonitorHome(object[] objs)
- {
- Result ret = _homeAll.Monitor();
- if (ret == Result.DONE)
- {
- _homeAll.Clear();
- return true;
- }
- if (ret == Result.FAIL)
- {
- _homeAll.Clear();
- PostMsg(MSG.ERROR);
- }
- return false;
- }
- private bool fError(object[] objs)
- {
- if (fsm.State == (int)RtState.Transfer)
- {
- _manualTransfer.Clear();
- }
- //EFEM.PostMsg(EfemEntity.MSG.LED, LightType.RED, LightStatus.ON);
- //EFEM.PostMsg(EfemEntity.MSG.LED, LightType.YELLOW, LightStatus.OFF);
- //EFEM.PostMsg(EfemEntity.MSG.LED, LightType.GREEN, LightStatus.OFF);
- //EFEM.PostMsg(EfemEntity.MSG.LED, LightType.BLUE, LightStatus.OFF);
- //EFEM.PostMsg(EfemEntity.MSG.LED, LightType.BUZZER1, LightStatus.ON);
- return true;
- }
- private bool fEnterIdle(object[] param)
- {
- //EFEM.PostMsg(EfemEntity.MSG.LED, LightType.RED, LightStatus.OFF);
- //EFEM.PostMsg(EfemEntity.MSG.LED, LightType.YELLOW, LightStatus.ON);
- //EFEM.PostMsg(EfemEntity.MSG.LED, LightType.GREEN, LightStatus.OFF);
- //EFEM.PostMsg(EfemEntity.MSG.LED, LightType.BLUE, LightStatus.OFF);
- //EFEM.PostMsg(EfemEntity.MSG.LED, LightType.BUZZER1, LightStatus.OFF);
-
- return true;
- }
- private bool fExitIdle(object[] param)
- {
- return true;
- }
- #endregion Init
- #region AutoTransfer
- private bool FsmMonitorAutoIdle(object[] param)
- {
- Result ret = _auto.Monitor();
- if (!_auto.CheckAllJobDone())
- {
- return false;
- }
- _isWaitUnload = (bool)DATA.Poll("LP1.NotifyJobDone") || (bool)DATA.Poll("LP2.NotifyJobDone");
- return ret == Result.DONE;
- }
- private bool FsmStartSetManualMode(object[] objs)
- {
- if (_auto.HasJobRunning)
- {
- EV.PostWarningLog("System", "Can not change to manual mode, abort running job first");
- return false;
- }
- return true;
- }
- private bool fStartAutoTransfer(object[] objs)
- {
- Result ret = _auto.Start(objs);
- return ret == Result.RUN;
- }
- private bool fAutoTransfer(object[] objs)
- {
- Result ret = _auto.Monitor();
-
- if (_auto.CheckJobJustDone(out string jobInfo))
- {
- EV.PostPopDialogMessage(EventLevel.InformationNoDelay, "Job complete", jobInfo);
- }
- if (_auto.CheckAllJobDone())
- {
- if (!CheckToPostMessage((int)MSG.JobDone))
- return false;
- }
- _isWaitUnload = (bool)DATA.Poll("LP1.NotifyJobDone") || (bool)DATA.Poll("LP2.NotifyJobDone");
- return ret == Result.DONE;
- }
- private bool fEnterAutoRunning(object[] objs)
- {
- //EFEM.PostMsg(EfemEntity.MSG.LED, LightType.RED, LightStatus.OFF);
- //EFEM.PostMsg(EfemEntity.MSG.LED, LightType.GREEN, LightStatus.ON);
- //EFEM.PostMsg(EfemEntity.MSG.LED, LightType.YELLOW, LightStatus.OFF);
- //EFEM.PostMsg(EfemEntity.MSG.LED, LightType.BLUE, LightStatus.OFF);
- //EFEM.PostMsg(EfemEntity.MSG.LED, LightType.BUZZER1, LightStatus.OFF);
- return true;
- }
- private bool fExitAutoTransfer(object[] objs)
- {
- _auto.Clear();
- return true;
- }
- private bool fJobDone(object[] objs)
- {
- //Unload light control on
- //EFEM.PostMsg(EfemEntity.MSG.LED, LightType.RED, LightStatus.OFF);
- //EFEM.PostMsg(EfemEntity.MSG.LED, LightType.GREEN, LightStatus.BLINK);
- //EFEM.PostMsg(EfemEntity.MSG.LED, LightType.YELLOW, LightStatus.OFF);
- //EFEM.PostMsg(EfemEntity.MSG.LED, LightType.BLUE, LightStatus.OFF);
- //EFEM.PostMsg(EfemEntity.MSG.LED, LightType.BUZZER1, LightStatus.OFF);
- _isWaitUnload = true;
- return true;
- }
- private bool fCassetteLeave(object[] objs)
- {
- //Unload light control off,light as idle & autoidle mode
- //EFEM.PostMsg(EfemEntity.MSG.LED, LightType.RED, LightStatus.OFF);
- //EFEM.PostMsg(EfemEntity.MSG.LED, LightType.GREEN, LightStatus.OFF);
- //EFEM.PostMsg(EfemEntity.MSG.LED, LightType.YELLOW, LightStatus.ON);
- //EFEM.PostMsg(EfemEntity.MSG.LED, LightType.BLUE, LightStatus.OFF);
- //EFEM.PostMsg(EfemEntity.MSG.LED, LightType.BUZZER1, LightStatus.OFF);
- _isWaitUnload = false;
- return true;
- }
- private bool fAbortAutoTransfer(object[] objs)
- {
- _auto.Clear();
- return true;
- }
- #endregion AutoTransfer
- #region return wafer
- private bool FsmStartReturnWafer(object[] objs)
- {
- Result ret = _returnWafer.Start(objs);
- if (ret == Result.FAIL || ret == Result.DONE)
- return false;
- return ret == Result.RUN;
- }
- private bool FsmMonitorReturnWafer(object[] objs)
- {
- Result ret = _returnWafer.Monitor(objs);
- if (ret == Result.FAIL)
- {
- PostMsg(MSG.ERROR);
- return false;
- }
- return ret == Result.DONE;
- }
- private bool FsmExitReturnWafer(object[] objs)
- {
- _returnWafer.Clear();
- return true;
- }
- #endregion cycle
- #region Transfer
- private bool fStartTransfer(object[] objs)
- {
- Result ret = _manualTransfer.Start(objs);
- if (ret == Result.FAIL || ret == Result.DONE)
- return false;
- return ret == Result.RUN;
- }
- private bool fTransfer(object[] objs)
- {
- Result ret = _manualTransfer.Monitor(objs);
- if (ret == Result.FAIL)
- {
- PostMsg(MSG.ERROR);
- return false;
- }
- return ret == Result.DONE;
- }
- private bool fExitTransfer(object[] objs)
- {
- _manualTransfer.Clear();
- return true;
- }
-
- #endregion Transfer
- #region reset
- private bool fStartReset(object[] objs)
- {
- //LP1.InvokeReset();
- //LP2.InvokeReset();
- //Aligner.InvokeReset();
- EFEM.InvokeReset();
- PMA?.InvokeReset();
- PMB?.InvokeReset();
- Singleton<DeviceEntity>.Instance.PostMsg(DeviceEntity.MSG.RESET);
- Singleton<FaManager>.Instance.ClearAlarm(null);
- if (fsm.State == (int)RtState.Error)
- return true;
- return false;
- }
- #endregion reset
- private bool FsmMap(object[] param)
- {
- _auto.Map((string)param[0]);
- return true;
- }
- public bool CheckRecipeUsedInJob(string pathName)
- {
- if (!IsAutoMode)
- return false;
- return _auto.CheckRecipeUsedInJob(pathName);
- }
- public bool CheckSequenceUsedInJob(string pathName)
- {
- if (!IsAutoMode)
- return false;
- return _auto.CheckSequenceUsedInJob(pathName);
- }
- private bool FsmCreateJob(object[] param)
- {
- _auto.CreateJob((Dictionary<string, object>)param[0]);
- return true;
- }
- private bool FsmAbortJob(object[] param)
- {
- _auto.AbortJob((string)param[0]);
- return true;
- }
- private bool FsmStopJob(object[] param)
- {
- _auto.StopJob((string)param[0]);
- return true;
- }
- private bool FsmResumeJob(object[] param)
- {
- _auto.ResumeJob((string)param[0]);
- return true;
- }
- private bool FsmPauseJob(object[] param)
- {
- _auto.PauseJob((string)param[0]);
- return true;
- }
- private bool FsmStartJob(object[] param)
- {
- _auto.StartJob((string)param[0]);
- return true;
- }
- private bool FsmAbort(object[] param)
- {
- if (fsm.State == (int)RtState.Transfer)
- {
- _manualTransfer.Clear();
- }
- if (fsm.State == (int)RtState.AutoRunning)
- {
- _auto.Clear();
- }
- if (fsm.State == (int)RtState.ReturnWafer)
- {
- _returnWafer.Clear();
- }
- return true;
- }
- private bool FsmResetIdlePurgeTime(object[] param)
- {
- _auto.ResetIdlePurgeTime((string)param[0]);
- return true;
- }
- private bool FsmResetIdleCleanTime(object[] param)
- {
- _auto.ResetIdleCleanTime((string)param[0]);
- return true;
- }
- private bool InvokeReturnWafer(string arg1, object[] args)
- {
- ModuleName target = ModuleHelper.Converter(args[0].ToString());
- int slot = (int)args[1];
- if (ModuleHelper.IsLoadPort(target))
- {
- EV.PostInfoLog("System", string.Format("Wafer already at LoadPort {0} {1}, return operation is not valid", target.ToString(), slot + 1));
- return false;
- }
- if (!WaferManager.Instance.IsWaferSlotLocationValid(target, slot))
- {
- EV.PostWarningLog("System", string.Format("Invalid position,{0},{1}", target.ToString(), slot.ToString()));
- return false;
- }
- WaferInfo wafer = WaferManager.Instance.GetWafer(target, slot);
- if (wafer.IsEmpty)
- {
- EV.PostInfoLog("System", string.Format("No wafer at {0} {1}, return operation is not valid", target.ToString(), slot + 1));
- return false;
- }
-
- return CheckToPostMessage((int)MSG.MoveWafer,
- target, slot,
- (ModuleName)wafer.OriginStation, wafer.OriginSlot,
- false, 0, false, 0 , "Blade1");
- }
- private bool InvokeDeleteWafer(string arg1, object[] args)
- {
- ModuleName chamber = ModuleHelper.Converter(args[0].ToString());
- int slot = (int)args[1];
- if (WaferManager.Instance.IsWaferSlotLocationValid(chamber, slot))
- {
- if (WaferManager.Instance.CheckHasWafer(chamber, slot))
- {
- WaferManager.Instance.DeleteWafer(chamber, slot);
- EV.PostMessage(ModuleName.System.ToString(), EventEnum.WaferDelete, chamber.ToString(), slot + 1);
- }
- else
- {
- EV.PostInfoLog("System", string.Format("No wafer at {0} {1}, delete not valid", chamber.ToString(), slot + 1));
- }
- }
- else
- {
- EV.PostWarningLog("System", string.Format("Invalid position,{0},{1}", chamber.ToString(), slot.ToString()));
- return false;
- }
- return true;
- }
- private bool InvokeCreateWafer(string arg1, object[] args)
- {
- ModuleName chamber = ModuleHelper.Converter(args[0].ToString());
- int slot = (int)args[1];
- WaferStatus state = WaferStatus.Normal;
- if (WaferManager.Instance.IsWaferSlotLocationValid(chamber, slot))
- {
- if (WaferManager.Instance.CheckHasWafer(chamber, slot))
- {
- EV.PostInfoLog("System", string.Format("{0} slot {1} already has wafer.create wafer is not valid", chamber, slot));
- }
- else if (WaferManager.Instance.CreateWafer(chamber, slot, state) != null)
- {
- EV.PostMessage(ModuleName.System.ToString(), EventEnum.WaferCreate, chamber.ToString(), slot + 1, state.ToString());
- }
- }
- else
- {
- EV.PostWarningLog("System", string.Format("Invalid position,{0},{1}", chamber.ToString(), slot.ToString()));
- return false;
- }
- return true;
- }
- }
- }
|