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- using System;
- using Aitex.Core.RT.Routine;
- using Aitex.Core.RT.SCCore;
- using VirgoRT.Devices;
- namespace VirgoRT.Modules.PMs
- {
- class TemperatureControlRoutine : PMRoutineBase, IRoutine
- {
- private enum TCSequence
- {
- kCheckTemperature,
- kEnd
- }
- private int _checkSubstrateTempTimeout = 60;
- private double _TargetTemp = 0.0f;
- private double _OffsetTemp = 0.0f;
- private double _tolerance;
- public TemperatureControlRoutine(JetPM chamber) : base(chamber)
- {
- Name = "PreHeat";
- bUINotify = true;
- }
- public void Terminate()
- {
- }
- public Result Start(params object[] objs)
- {
- try
- {
- Reset();
- _TargetTemp = (double)objs[0];
- _checkSubstrateTempTimeout = SC.GetValue<int>($"{Module}.CheckSubstrateTempTimeout");
- _tolerance = SC.GetValue<double>($"System.MaxTemperatureToleranceToTarget");
- _OffsetTemp = SC.GetValue<double>($"{Module}.Chiller.ChillerTemperatureOffset");
- Notify($"开始, 目标 {_TargetTemp} ℃, 偏移值 { _OffsetTemp} ℃");
- return Result.RUN;
- }
- catch
- {
- return Result.FAIL;
- }
- }
- public Result Monitor()
- {
- try
- {
- if (SC.GetValue<bool>($"{Module}.Chiller.EnableChiller"))
- {
- CheckCoolantTemp((int)TCSequence.kCheckTemperature, _TargetTemp, _OffsetTemp, _checkSubstrateTempTimeout, _tolerance);
- }
- else
- {
- CheckSubstrateTemp((int)TCSequence.kCheckTemperature, _TargetTemp, _checkSubstrateTempTimeout, _tolerance);
- }
- End((int)TCSequence.kEnd);
- }
- catch (RoutineBreakException)
- {
- return Result.RUN;
- }
- catch (RoutineFaildException)
- {
- Notify("出错 ");
- return Result.FAIL;
- }
- catch (System.Exception ex)
- {
- Stop(ex.Message);
- return Result.FAIL;
- }
- Notify("结束");
- return Result.DONE;
- }
- public override void Abort() { }
- }
- }
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