Virgo_ST/VirgoRT/Modules/PMs/PumpDownRoutine.cs

using System;
using Aitex.Core.RT.Event;
using Aitex.Core.RT.Routine;
using Aitex.Core.RT.SCCore;
using VirgoRT.Devices;

namespace VirgoRT.Modules.PMs
{
    class PumpDownRoutine : PMRoutineBase, IRoutine
    {
        private enum PumpSequence
        {
            kCheckLidSignal,
            kCheckSlitDoor,
            kCheckDryPumpStatus,
            kCloseValves,
            kOpenPumpingValve,
            kDelay,
            kCheckVAC,
            kCheckForelinePressure,
            kCheckThrottleValveStatus,
            kCheckATM,
            kOpenSoftPumpValve,
            kCloseSoftPumpValve,
            kFastPumpValve,
            kCloseFastPumpValve,
            kCheckChamberPressure,
            kCheckVACSignal,
            kEnd
        }

        private int _basePressure;
        private int _pumpValveDelay;
        private double _pumpTimeLimit;
        private readonly uint FORELINE_TARGET = 500;

        public PumpDownRoutine(JetPM chamber) : base(chamber)
        {
            Name = "PumpDown";
            bUINotify = true;
        }

        public void Terminate()
        {
        }

        public Result Start(params object[] objs)
        {
            // 预检查，必须关盖子
            if (CheckLid() == Result.RUN &&
                CheckSlitDoor() == Result.RUN)
                //&& CheckDryPump() == Result.RUN)
            {
                Reset();

                //关闭所有阀门
                _chamber.CloseValves();

                //_PressureTrip1 = SC.GetValue<int>($"{Module}.Pump.PressureTrip1") * 1000;
                _basePressure = (objs.Length == 1) ? Convert.ToInt32(objs[0]) : SC.GetValue<int>($"{Module}.Pump.PumpBasePressure");
                _pumpTimeLimit = SC.GetValue<double>($"{Module}.Pump.PumpTimeLimit");
                _pumpValveDelay = SC.GetValue<int>($"{Module}.Pump.PumpValveDelay");

                Notify("开始");
                return Result.RUN;
            }

            return Result.FAIL;
        }

        public Result Monitor()
        {
            try
            {
                CheckForeline((int)PumpSequence.kCheckForelinePressure, FORELINE_TARGET, 15);

                // open pumping valve
                SetValve((int)PumpSequence.kOpenSoftPumpValve, ValveType.SOFT_PUMP, true);

                CheckThrottleValveFullOpen((int)PumpSequence.kCheckThrottleValveStatus);

                TimeDelay((int)PumpSequence.kDelay, _pumpValveDelay);

                SetValve((int)PumpSequence.kFastPumpValve, ValveType.FAST_PUMP, true);

                SetValve((int)PumpSequence.kCloseFastPumpValve, ValveType.SOFT_PUMP, false);

                CheckATM2((int)PumpSequence.kCheckATM, false, 30);

                //CheckPressure((int)PumpSequence.kCheckChamberPressure, _PressureTrip1, false, 50);

                //OpenValve((int)PumpSequence.kCloseSoftPumpValve, ValveType.SOFT_PUMP, false);

                //检查VAC
                CheckVAC((int)PumpSequence.kCheckVACSignal, 90);

                CheckPressure((int)PumpSequence.kCheckVAC, _basePressure, false, (int)_pumpTimeLimit);

                End((int)PumpSequence.kEnd);
            }
            catch (RoutineBreakException)
            {
                return Result.RUN;
            }
            catch (RoutineFaildException)
            {
                Stop("出错");
                return Result.FAIL;
            }
            catch (Exception ex)
            {
                Stop(ex.Message);
                return Result.FAIL;
            }
            Notify("结束");
            return Result.DONE;
        }

        public override void Abort()
        {
            _chamber.CloseValves();
        }
    }
}