Virgo_ST/VirgoRT/Modules/PMs/PMRoutineBase.cs

using System;
using Aitex.Core.Equipment.SusceptorDefine;
using Aitex.Core.RT.Event;
using Aitex.Core.RT.Routine;
using Aitex.Core.RT.SCCore;
using MECF.Framework.Common.DBCore;
using VirgoCommon;

//using Virgo.Common;
using VirgoRT.Devices;

namespace VirgoRT.Modules.PMs
{
    public enum MonitorStepState
    {
        Continue,
        Failed,
        Break,
    }

    class PMRoutineBase : ModuleRoutine
    {
        // ----------------------------Fields--------------------------
        //
        //private SCConfigItem scOpenGasValveTimeout = null;
        private int dOpenGasValveTimeout = 1;  //1S
        //private SCConfigItem scCloseGasValveTimeout = null;
        public int dCloseGasValveTimeout = 2;  //2s
        //private SCConfigItem scOpenCloseSlitValveTimeout = null;
        protected int valveOpenCloseTimeout = 2;  //2s
        protected int _PressureTrip1 = 80;
        protected bool bUINotify;
        protected readonly JetPM _chamber;

        // --------------------------Properties------------------------
        //
        public string Display { get; set; }
        public string WaferID { get; set; }

        // Constructor
        protected PMRoutineBase(JetPM chamber)
        {
            this.Module = chamber.Module.ToString();

            _chamber = chamber;
            bUINotify = true;

            dOpenGasValveTimeout = SC.GetValue<int>($"{Module}.OpenGasValveTimeout");

            dCloseGasValveTimeout = SC.GetValue<int>($"{Module}.TimeLimitOfCloseGasValve");

            valveOpenCloseTimeout = SC.GetValue<int>($"{Module}.OpenCloseSlitValveTimeout");
        }

        public Result CheckLid()
        {
            if (!_chamber.IsLidClosed)
            {
                this.Stop("Chamber 盖子必须关");
                return Result.FAIL;
            }
            return Result.RUN;
        }

        protected Result CheckSlitDoor()
        {
            if (!_chamber.IsSlitDoorClosed)
            {
                Stop("传送门必须关");
                return Result.FAIL;
            }
            return Result.RUN;
        }

        protected Result CheckDryPump()
        {
            if (!_chamber.IsPumpRunning)
            {
                Stop("泵没有启动");
                return Result.FAIL;
            }
            if (_chamber.HasPumpError)
            {
                Stop("泵状态有错误");
                return Result.FAIL;
            }
            return Result.RUN;
        }

        public void CheckThrottleValveFullOpen(int id)
        {
            bool execute()
            {
                Notify("完全打开蝶阀");
                _chamber.FullOpenTV();
                return true;
            }

            bool? Check1()
            {
                if (_chamber.TVPosition >= 98)
                {
                    Notify("蝶阀已经完全打开");
                    return true;
                }

                return false;
            }

            Tuple<bool, Result> ret = ExecuteAndWait(id, execute, Check1, 20 * 1000);

            if (ret.Item1)
            {
                if (ret.Item2 == Result.FAIL)
                {
                    Stop("无法打开蝶阀");
                    throw new RoutineFaildException();
                }

                if (ret.Item2 == Result.TIMEOUT)
                {
                    Stop("启动蝶阀超时");
                    throw new RoutineFaildException();
                }
                throw new RoutineBreakException();
            }
        }

        protected Result CheckCDA()
        {
            if (!_chamber.IsCDA_OK)
            {
                Stop("CDA 压力信号不正确");
                return Result.FAIL;
            }
            return Result.RUN;
        }

        protected void CloseAllValve(int id, int time)
        {
            bool execute()
            {
                Notify("关闭所有的阀门");
                _chamber.CloseValves();
                return true;
            }

            Tuple<bool, Result> ret = ExecuteAndWait(id, execute, () => true, time * 1000);

            if (ret.Item1)
            {
                if (ret.Item2 == Result.FAIL)
                {
                    throw new RoutineFaildException();
                }

                if (ret.Item2 == Result.TIMEOUT)
                {
                    throw new RoutineFaildException();
                }

                throw new RoutineBreakException();
            }
        }

        protected void SetValve(int id, ValveType vlv, bool bOpen)
        {
            bool exec()
            {
                _chamber.SetValveOnOff(vlv, bOpen);
                Notify($"{(bOpen ? "打开" : "关闭")} {vlv} 阀");
                return true;
            }

            bool? Check1()
            {
                if (vlv == ValveType.FAST_PUMP && bOpen)
                    return _chamber.IsFastPumpOpened;
                else if (vlv == ValveType.FAST_PUMP && !bOpen)
                    return !_chamber.IsFastPumpOpened;
                else if (vlv == ValveType.SOFT_PUMP && bOpen)
                    return _chamber.IsSoftPumpOpened;
                else if (vlv == ValveType.SOFT_PUMP && !bOpen)
                    return !_chamber.IsSoftPumpOpened;
                else
                    return true;
            }

            var res = ExecuteAndWait(id, exec, Check1, 500);
            if (res.Item1)
            {
                throw new RoutineBreakException();
            }
        }

        protected void CheckATM2(int id, bool on, int time)
        {
            bool? check()
            {
                //if (!_chamber.IsATM)
                //{
                //    Notify("ATM is OFF");
                //}
                return on ? _chamber.IsATM : !_chamber.IsATM;
            }

            Tuple<bool, Result> ret = ExecuteAndWait(id, () =>
            {
                Notify($"等待 ATM 信号 {(on ? "ON" : "OFF")}");
                return true;
            }, check, time * 1000);

            if (ret.Item1)
            {
                if (ret.Item2 == Result.FAIL || ret.Item2 == Result.TIMEOUT)
                {
                    Stop($"ATM 信号仍然 {(_chamber.IsATM ? "ON" : "OFF")}");
                    throw new RoutineFaildException();
                }

                throw new RoutineBreakException();
            }
        }

        protected void CheckPressure(int id, int targetPressure, bool morethan, int time)
        {
            bool? Check1()
            {
                bool res = morethan ? _chamber.ChamberPressure > targetPressure : _chamber.ChamberPressure < targetPressure;
                if (res)
                {
                    Notify($"压力已经到达 {targetPressure:N} mTorr");
                }
                return res;
            }

            Tuple<bool, Result> ret = ExecuteAndWait(id, () =>
            {
                Notify($"等待压力{(morethan ? "上升" : "下降")} 到 {targetPressure:N} mTorr");
                return true;
            }, Check1, time * 1000);

            if (ret.Item1)
            {
                if (ret.Item2 == Result.FAIL)
                {
                    Stop($"当前压力 [{_chamber.ChamberPressure}], 无法到达 [{targetPressure}]");
                    throw new RoutineFaildException();
                }

                if (ret.Item2 == Result.TIMEOUT)
                {
                    Stop($"检测压力超时, 当前压力 [{_chamber.ChamberPressure*0.001:F2}] Torr");
                    throw new RoutineFaildException();
                }
                throw new RoutineBreakException();
            }
        }

        protected void CheckForeline(int id, uint target, int time)
        {
            bool Func()
            {
                Notify($"Check foreline pressure, 目标 {target} mTorr");
                return true;
            }

            bool? Check1()
            {
                return _chamber.ForelinePressure < target;
            }

            Tuple<bool, Result> ret = ExecuteAndWait(id, Func, Check1, time * 1000);

            if (ret.Item1)
            {
                if (ret.Item2 == Result.FAIL)
                {
                    throw new RoutineFaildException();
                }

                if (ret.Item2 == Result.TIMEOUT)
                {
                    Stop($"检查Foreline 压力超时, 当前Foreline 压力值 {_chamber.ForelinePressure}");
                    throw new RoutineFaildException();
                }
                throw new RoutineBreakException();
            }
        }

        protected void CheckVAC(int id, double targetPressure, int time)
        {
            bool? Check1()
            {
                if (_chamber.ChamberPressure < targetPressure)
                {
                    Notify($"Pump below [{targetPressure}]");
                    return true;
                }

                return false;
            }

            Tuple<bool, Result> ret = ExecuteAndWait(id, () => true, Check1, time * 1000);

            if (ret.Item1)
            {
                if (ret.Item2 == Result.FAIL)
                {
                    throw new RoutineFaildException();
                }

                if (ret.Item2 == Result.TIMEOUT) //timeout
                {
                    //Warning($"Can not pump to base pressure {target} in {time} seconds");

                    throw new RoutineFaildException();
                }
                throw new RoutineBreakException();
            }
        }

        protected void CheckVAC(int id, int time)
        {
            Tuple<bool, Result> ret = ExecuteAndWait(id, () => true, () => _chamber.IsVAC, time * 1000);

            if (ret.Item1)
            {
                if (ret.Item2 == Result.FAIL)
                {
                    Stop("VAC真空信号 NOT ON");
                    throw new RoutineFaildException();
                }

                if (Result.TIMEOUT == ret.Item2)
                {
                    Stop($"VAC 真空信号超时, 当前压力 {_chamber.ChamberPressure}");
                    throw new RoutineFaildException();
                }
                throw new RoutineBreakException();
            }
        }

        public void SetLiftPinUpDown(int id, bool isUp, int timeout)
        {
            Tuple<bool, Result> ret = ExecuteAndWait(id, () =>
            {
                Notify($"设置 lift pin {_chamber.Name} " + (isUp ? "升" : "降"));
                if (!_chamber.SetLiftPin(isUp ? MovementPosition.Up : MovementPosition.Down, out string reason))
                {
                    Stop(reason);
                    return false;
                }
                return true;
            }, () => isUp ? _chamber.CheckLiftUp() : _chamber.CheckLiftDown(), timeout * 1000);

            if (ret.Item1)
            {
                if (ret.Item2 == Result.FAIL)
                {
                    throw new RoutineFaildException();
                }
                else if (ret.Item2 == Result.TIMEOUT) //timeout
                {
                    Stop($"无法 {(isUp ? "Up" : "Down")} lift pin in {timeout} seconds");
                    throw new RoutineFaildException();
                }
                else
                    throw new RoutineBreakException();
            }
        }

        protected void End(int id)
        {
            bool Func()
            {
                double duration_min = counter.GetElapseTime();
                TimeSpan ts = TimeSpan.FromMilliseconds(duration_min);

                string info = $"完成 in {ts.Minutes} minutes {ts.Seconds} seconds";
                Notify(info);

                //if (bUINotify)
                //    EV.PostPopDialogMessage(EventLevel.Information, Name, $"{Module} {info} Finished");

                return true;
            }

            Tuple<bool, Result> ret = Execute(id, Func);
        }

        public virtual void Abort()
        {
            _chamber.GeneratorPowerOn(false);
            _chamber.GeneratorBiasPowerOn(false);
            _chamber.StopAllGases();
            //ProcessDataRecorder.UpdateStatus(RecipeRunGuid.ToString(), SusceptorStatus.Failed.ToString(), Module);
        }

        /// <summary>
        /// 
        /// </summary>
        /// <param name="stepId"></param>
        /// <param name="delayTime">单位：秒</param>
        public void CloseValve(int stepId, float delayTime)
        {
            bool Func()
            {
                Notify("Vent End Close Vent Valve");

                _chamber.SetValveOnOff(ValveType.PURGE, false);
                _chamber.SetValveOnOff(ValveType.FAST_VENT, false);
                _chamber.SetValveOnOff(ValveType.PROCESS, false);
                //_chamber.OpenValve(ValveType.SOFT_PUMP, true);
                //_chamber.OpenValve(ValveType.FAST_PUMP, true);

                return true;
            }

            Tuple<bool, Result> ret = Delay(stepId, Func, delayTime * 1000);

            if (ret.Item1)
            {
                if (ret.Item2 == Result.FAIL)
                {
                    throw new RoutineFaildException();
                }

                throw new RoutineBreakException();
            }
        }
 
        protected void StartLoop(int id, string name, int count, Action<string> notify, Action<string> error)
        {
            bool Func()
            {
                Notify($"{name} 循环 {LoopCounter + 1}");
                return true;
            }

            Tuple<bool, Result> ret = Loop(id, Func, count);

            if (ret.Item1)
            {
                if (ret.Item2 == Result.FAIL)
                    throw new RoutineFaildException();
            }
        }

        protected void EndLoop(int id, Action<string> notify, Action<string> error)
        {
            Tuple<bool, Result> ret = EndLoop(id, () => true);

            if (ret.Item1)
            {
                if (ret.Item2 == Result.FAIL)
                    throw new RoutineFaildException();

                throw new RoutineBreakException();
            }
        }

        protected void CyclePump(int id, int target, int timeLimit, bool isStopPumpOnceDone)
        {
            bool Func()
            {
                Notify($"Pumping to {target} mTorr");

                _chamber.SetValveOnOff(ValveType.PROCESS, false);
                _chamber.SetValveOnOff(ValveType.PURGE, false);
                _chamber.SetValveOnOff(ValveType.FAST_VENT, false);
                _chamber.SetValveOnOff(ValveType.FAST_PUMP, true);

                return true;
            }

            bool? Check1()
            {
                if (_chamber.ChamberPressure < target)
                {
                    if (isStopPumpOnceDone)
                    {
                        _chamber.SetValveOnOff(ValveType.FAST_PUMP, false);
                    }
                    return true;
                }
                return true;
            }

            Tuple<bool, Result> ret = ExecuteAndWait(id, Func, Check1, timeLimit * 1000);

            if (ret.Item1)
            {
                if (ret.Item2 == Result.FAIL)
                {
                    throw new RoutineFaildException();
                }

                if (ret.Item2 == Result.TIMEOUT)
                {
                    Stop($"Pump 压力无法到达 {target} in time {timeLimit}");

                    throw new RoutineFaildException();
                }
                throw new RoutineBreakException();
            }
        }

        protected void CycleVent(int id, int target, int timeLimit, bool isStopVentOnceDone)
        {
            bool Func()
            {
                Notify($"Venting to {target} mTorr");

                _chamber.SetValveOnOff(ValveType.FAST_PUMP, false);
                _chamber.SetValveOnOff(ValveType.PROCESS, true);
                _chamber.SetValveOnOff(ValveType.PURGE, true);

                return true;
            }

            bool? Check1()
            {
                if (_chamber.ChamberPressurePressure > target)
                {
                    if (isStopVentOnceDone)
                    {
                        _chamber.SetValveOnOff(ValveType.PROCESS, false);
                        _chamber.SetValveOnOff(ValveType.PURGE, false);
                        _chamber.SetValveOnOff(ValveType.FAST_VENT, false);
                    }
                    return true;
                }
                return false;
            }

            Tuple<bool, Result> ret = ExecuteAndWait(id, Func, Check1, timeLimit * 1000);

            if (ret.Item1)
            {
                if (ret.Item2 == Result.FAIL)
                {
                    throw new RoutineFaildException();
                }

                if (ret.Item2 == Result.TIMEOUT) //timeout
                {
                    Stop($"Purge 压力无法到达 {target} in purge time {timeLimit}");

                    if (isStopVentOnceDone)
                    {
                        _chamber.SetValveOnOff(ValveType.PROCESS, false);
                        _chamber.SetValveOnOff(ValveType.PURGE, false);
                        _chamber.SetValveOnOff(ValveType.FAST_VENT, false);
                    }

                    throw new RoutineFaildException();
                }
                throw new RoutineBreakException();
            }
        }

        protected void CheckSubstrateTemp(int id, double target, int time, double tolerance)
        {
            bool Func()
            {
                if (_chamber.SubstrateTempFB > target)
                {
                    Notify($"当前温度{_chamber.SubstrateTempFB} ℃, 大于目标 {target.ToString()} ℃");
                    //return true;
                }
                _chamber.HeatSubstrate(target);
                Notify($"检查底座温度值,当前温度{_chamber.SubstrateTempFB} ℃, 目标 {target.ToString()} ℃");
                return true;
            }

            bool? Check1()
            {
                if (Math.Abs( target) <= 0.1)
                    return true;

                if (Math.Abs(_chamber.SubstrateTempFB - target) <= tolerance) 
                    return true;
                  
                return false;
            }

            Tuple<bool, Result> ret = ExecuteAndWait(id, Func, Check1, time * 1000);

            if (ret.Item1)
            {
                if (ret.Item2 == Result.FAIL)
                {
                    throw new RoutineFaildException();
                }

                if (ret.Item2 == Result.TIMEOUT)
                {
                    Stop($"检查底座温度超时, 当前底座温度值 {_chamber.SubstrateTempFB}");
                    throw new RoutineFaildException();
                }
                throw new RoutineBreakException();
            }
        }

        protected void CheckCoolantTemp(int id, double target, double offset, int time, double tolerance)
        {
            bool Func()
            {
                if (_chamber.CoolantOutletTempFB > target)
                {
                    Notify($"水冷当前温度{_chamber.CoolantOutletTempFB} ℃, 大于目标 {target.ToString()} ℃");
                    //return true;
                }
                _chamber.HeatChiller(target, offset);
                Notify($"检查水冷温度值,当前温度{_chamber.CoolantOutletTempFB} ℃, 目标 {target.ToString()} ℃");
                return true;
            }

            bool? Check1()
            {
                if (!_chamber.CheckChillerStatus())
                    return false;
 
                return Math.Abs(_chamber.CoolantOutletTempFB - target) <= tolerance;
            }

            Tuple<bool, Result> ret = ExecuteAndWait(id, Func, Check1, time * 1000);

            if (ret.Item1)
            {
                if (ret.Item2 == Result.FAIL)
                {
                    throw new RoutineFaildException();
                }

                if (ret.Item2 == Result.TIMEOUT)
                {
                    if (!_chamber.CheckChillerStatus())
                    {
                        Stop($"Chiller not connected or in error");
                    }
                    else
                    {
                        Stop($"检查水冷温度超时, 当前水冷温度值 {_chamber.CoolantOutletTempFB}");
                    }
                    
                    throw new RoutineFaildException();
                }
                throw new RoutineBreakException();
            }
        }

        protected void SetSlitDoor(int id, bool isOpen, int timeout)
        {
            Tuple<bool, Result> ret = ExecuteAndWait(id, () =>
            {
                Notify($"设置传送门 {_chamber.Name} " + (isOpen ? "开" : "关"));

                _chamber.SetSlitDoor(isOpen, out _);
                return true;
            }, () => isOpen ? _chamber.CheckSlitDoorOpen() : _chamber.CheckSlitDoorClose(), timeout * 1000);

            if (ret.Item1)
            {
                if (ret.Item2 == Result.FAIL)
                {
                    throw new RoutineFaildException();
                }
                else if (ret.Item2 == Result.TIMEOUT) //timeout
                {
                    Stop($"无法 {(isOpen ? "开" : "关")} 传送门 in {timeout} seconds");
                    throw new RoutineFaildException();
                }
                else
                    throw new RoutineBreakException();
            }
        }

    }
}