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- using System.Collections.Generic;
- namespace MECF.Framework.RT.EquipmentLibrary.HardwareUnits.LoadPorts.TDK
- {
- public enum CommandType
- {
- SET, // Initialization setting command
- MOD, // Operation mode setting command
- GET, // Status acquisition command
- FIN, // Normal reception command
- MOV, // Operation command
- EVT, // Start/Stop event report command
- RST, // Resend initialization setting command comman
- RFN, // Resend normal reception command
- RMV, // Resend operation command
- }
- public enum RespType
- {
- NAK, // Initialization setting command
- ACK, // Operation mode setting command
- INF, // Status acquisition command
- ABS, // Normal reception command
- }
- public enum Indicator
- {
- LOAD = 0x01,
- UNLOAD = 0x02,
- OPACCESS = 0x03,
- PRESENCE = 0x04,
- PLACEMENT = 0x05,
- ALARM = 0x06,
- STATUS1 = 0x07,
- STATUS2 = 0x08,
- OPACCESS2 = 0x9,
- }
- //public enum IndicatorState
- //{
- // ON,
- // BLINK,
- // OFF,
- //}
- public enum Mode
- {
- ONMGV, //Changes to the online mode
- MENTE,
- }
- public enum QueryType
- {
- STATE, //Checks the status.
- VERSN, //Checks the version.
- LEDST, //Reports the indicator status.
- MAPDT, //Wafer search data (descending order)
- MAPRD, //Wafer search data (ascending order)
- WFCNT, //Wafer quantity check
- FSBxx //Checks whether the FOSB Mode is ON/OFF
- }
- public enum EvtType
- {
- EVTON, //Starts reporting all events.(FOUP events is excluded)
- EVTOF, //Stops reporting all events. (FOUP events is excluded)
- FPEON, //Starts reporting FOUP events.
- FPEOF, //Stops reporting FOUP events.
- }
- public enum MovType
- {
- ORGSH, //Moves the FOUP to the initial position.
- ABORG, //Aborts the operation and moves the FOUP to the initial position.
- CLOAD, //Loads the FOUP (transfers the FOUP to the process unit).
- CLDDK, //Loads the FOUP (same as CLOAD) to the point where the system is ready to open the door.
- CLDYD, //Clamps the FOUP and moves the FOUP to the Y-axis docking position.
- CLDOP, //Continues loading the FOUP after CLDDK.
- CLDMP, //Maps and loads the FOUP.
- CLMPO, //Continues mapping and loading the FOUP after CLDDK.
- CULOD, //Unloads the FOUP (at the ejection position).
- CULDK, //Closes the door (same as CULOD).
- CUDCL, //Undocks the FOUP (while being clamped) after CULDK.
- CUDNC, //Unloads the FOUP after CULDK.
- CULYD, //Unloads the FOUP to the docking status.
- CULFC, //Unloads the FOUP to the point where the system can release (unclamp) the FOUP.
- CUDMP, //Maps and unloads the FOUP from the loaded status.
- CUMDK, //Maps the FOUP and closes the door from the loaded status.
- CUMFC, //Maps the FOUP to the before-unclamp status from the loaded status.
- MAPDO, //Maps the FOUP while being loaded.
- REMAP, //Resumes the interrupted mapping.
- PODOP, //FOUP clamp: Open
- PODCL, //FOUP clamp: Close
- VACON, //Vacuum on
- VACOF, //Vacuum off
- DOROP, //Latch key: Open (Unlatches the FOUP door.)
- DORCL, //Latch key: Close (Latches the FOUP door.)
- MAPOP, //Mapper arm: Open
- MAPCL, //Mapper arm: Close
- ZDRUP, //Move to Z-axis up position (door open position)
- ZDRDW, //Move to Z-axis down position (transport unit handover possible position)
- ZDRMP, //Lower to Z-axis mapping end position and conduct mapping
- ZMPST, //Move the mapper to the start position
- YWAIT, //Move to Y-axis undock position
- YDOOR, //Move to Y-axis dock position
- DORBK, //Move to door open position
- DORFW, //Move to door close position
- RETRY, //Retry during recoverable error
- STOP_, //Immediate stop and command abort
- PAUSE, //Immediate stop
- ABORT, //Command abort
- RESUM, //Resume operation
- }
- public class ErrorCode
- {
- private Dictionary<string, string> dict = new Dictionary<string, string>
- {
- {"02","Z-axis position: NG (Down)"},
- {"42","Z-axis position: NG (Up)"},
- {"04","Y-axis position: NG (Dock)"},
- {"44","Y-axis position: NG (Undock)"},
- {"07","Wafer protrusion"},
- {"47","Grass wafer protrusion (Option)"},
- {"08","Door forward/backward position: NG(Open)"},
- {"48","Door forward/backward position: NG(Close)"},
- {"F2","FOUP door close error."},
- {"09","Mapper arm position: NG (Open)"},
- {"49","Mapper arm position: NG (Close)"},
-
- {"11","Mapper stopper position: NG (On)"},
- {"51","Mapper stopper position: NG (Off)"},
- {"12","Mapping end position: NG"},
-
- {"61","FOUP clamp open error (Up)"},
- {"21","FOUP clamp open error (Back)"},
- {"62","FOUP clamp open error (Down)"},
- {"22","FOUP clamp close error (Front)"},
- {"63","FOUP clamp close error (Middle)"},
- {"23","Latch key open error"},
- {"24","Latch key close error"},
-
- {"25","Vacuum on error"},
- {"26","Vacuum off error"},
- {"27","Main air error "},
- {"A1","Normal position error at FOUP open"},
- {"A2","Normal position error at FOUP close"},
- {"A3","Mapper storage error when Z-axis lowered"},
- {"A4","Parallel signal error from upper machine"},
- {"FD","Interlock relay failure"},
- {"FE","Communication failure"},
- {"FF","Obstacle detection sensor failure"},
- {"FC","Fan operation error"},
- {"EE","Mapping mechanical(Adjustment) error"},
- {"EF","Mapping mechanical(Sensor) error"},
- {"F1","Door detection error during dock"},
- {"31","Door detection error except dock"},
- };
- public ErrorCode()
- {
- }
- public string Code2Msg(string code)
- {
- if (dict.ContainsKey(code))
- {
- return string.Format("Code:{0},Message:{1}", code, dict[code]);
- }
- return code;
- }
- }
- /*
- public enum LoadportCassetteState
- {
- None, //Load sensor/Position sensor: All OFF
- Normal, //Load sensor/Position sensor: All ON
- Absent, //Load sensor: ON, Position sensor: 1 or 2: ON
- Unknown,//Load sensor: ON, Position sensor: All OFF
- //or Load sensor: OFF, Except Position sensor: All OFF
- }
- public enum FoupDoorState
- {
- Open,
- Close,
- Unknown,
- }
- public enum FoupClampState
- {
- Open,
- Close,
- Unknown,
- }
- */
- }
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