Init All Running Start Stop Pause Resume Select Recipe Current: Set Select Magazine Ack. Err. System TM PM Ready To Load Pump State RF State Process Chamber Transfer Platform OK Cancel Left Right Up Down Set Set Current Move Test Status Pos.(mm) Servo On No Origin With Origin Alarm Pulse On Speed(mm/s) ON OFF Home Reset Stop Move Brake Relay Left Right Up Down Acceleration Deceleration Start Frequency Default Servo Speed Default Manual Speed Servo On Timeout(s) Move Timeout(s) Reset Alarm Timeout(s) Home Timeout(s) Origin Speed(mm/s) CCW Limit Position(mm) CW Limit Position(mm) Acc/Dec Time(ms) No interference position(mm) Transfer Platform Timeout Config UpDown Cylinder Move Time(s) LeftRight Cylinder Move Time(s) Box Arrive Timeout(s) Material Arrive Timeout(s) Entrance Stick Timeout(s) Exit Stick Timeout(s) ATM Cycle Mode Check safe interlock before run System: Contactor: EMO: User Login User Name: Password: Login Exit Event: Reset Buzzer Off Version: Login: Role: Logout LSI: Chamber Mode: Chamber Status: Process Status: Platform Mode: Platform Status: System Mode: System Status: RailIn: PM: RailOut: LSO: Load Station In Status: Clear Error Position: Push Bar In Rail In Stop Pin: Roller: Roll Stop PM Push Bar Chamber Rail Out Load Station Out System Magazine Type Current: Set Recipe Auto Running Init All Start MaterialBox Entrance Lot Scan Recipe Data Log Total Cycle Recipe Scan Start Next Step Stop Front Door: RF Door: CDA Pressure Sensor: Pump Inlet Outlet Vent Precursor Door: Back Door: Process Status Parameters Feedback Set Point Total Process Time(s) Step No Step Time Chamber Pressure(mTorr) TV Mode TV Position(%) TV Pressure(mTorr) Booster Pressure(mTorr) Booster Speed(%) Step Mode Electrode Temp.(℃) Heater Temp.(℃) RF Time(s) RF Mode RF Power(w) Reflect Power(w) Pulsing Frequency(Hz) Pulsing DC(%) RF Match Position C1 RF Match Position C2 Vapor MFC1(sccm) Vapor MFC2(sccm) Electrode Temp(c) Heater Temp(c) Operation Manual Auto Online Offline Process Done Working Mode Manual Operation Base Pressure(mT) Pump Down Limit(s) Pump Time(s) E.Critical Temp.(℃) Pump Gas Cooling RF Purge Vent ChamberStatus Open Lid Close Lid Add... Rename Save As... Delete Current: Push Bar In Position Motor(mm) Left(mm) Right(mm) Push Bar Chamber Load Station In Slot 1(mm) Total Layer Pitch(mm) Chamber(mm) Load Station Out Product Width(mm) Product Length(mm) Product Margin(mm) Floor Space(mm) Slot Number Job Start Time Job Stop Time Processed Count LS-IN Motor Initial place(mm) LS-IN Motor work place(mm) PB-CHB Motor Initial place(mm) PB-CHB Motor push-in place(mm) PB-CHB Motor push-out place R1 product type code R2 product type code R3 product type code R4 product type code Process Configuration Vent Time Limit(s) Purge Pump Time Limit(s) Purge Pump Pressure(mTor) Purge Time Limit(s) Purge Pressure(mTor) Purge Cycle Count Purge Time(s) Electrode Temperature Alarm Range(℃) Electrode Temperature Alarm Time(s) Electrode Temperature Default Critical Value(℃) Gas Flow Pressure Alarm Time(s) Gas Flow Pressure Alarm Range(mTor) RF Power Alarm Range(w) RF Power Alarm Time(s) RF Reflect Power Alarm Range(w) RF Reflect Power Alarm Time(s) Vent Time(s) Set Save Config As... Load Config Set All Pump Valve Close Delay Time(s) RF Match Running Mode RF Match Position C1 RF Match Position C2 RF Match Mode In Auto Run Process Gas Enable Display Name N2 Scale(sccm) Scale Factor Flow Alarm Range(sccm) Flow Alarm Time(s) Enable Flow Alarm Pressure(MPa) Pressure Min(MPa) Pressure Max(MPa) Pressure Warning Time(s) Pressure Alarm Time(s) Set Gas 1 Gas 2 Gas 3 Gas 4 Gas 5 N2 CDA Pulsing Function Power Range(w) Enable Barcode Enable Manual Select Recipe Left TC As Control TC TC Max Difference(℃) Vacuum System Independent Pressure Control Dry Pump Dry Pump Setting Cooling Water Flow N2 Pressure Pressure Control Feedback(slm|℃) Min(slm|℃) Max(slm|℃) Warning Time(s) Alarm Time(s) Device Control Test Mode Cooling System Configuration Statistics RF On Time Pump On Time Last PM Time From Last PM Reset Total PM Interval(Days) Total Processed Material Count Total Batch Count Account Management Add Edit Password Role Delete Current User Only display enabled user No. Login Name Enabled Name Role Department Last Login Telephone Mailbox Description Title Company Create Save Role must be selected Account "{0}" update succeeded! "{0}" update failed, {1} ResetPassword Account "{0}" reset password: reset password succeeded reset password failed, Input New: Reinput: Current Login User Account Management Delete user "{0}"? Delete user "{0}" succeeded。 Delete "{0}" failed! {1} registered user count: enabled user count: Are you sure to delete "{0}" role? Save succeeded! Failed! RecipeList Current Recipe: Reload Save New Recipe Import Recipe New Folder Export Recipe Delete Recipe Export Recipe as Excel Save as Rename Recipe Rename Folder Delete Folder save current recipe? {0} {0} load recipe file failed! Recipe Editor {0} export to excel file failed! succeeded export '{0}' to {1} Excel file (.xls)|*.xls {0} failed to export recipe file! Recipe file (.rcp)|*.rcp rename '{0}' failed! {0} failed to rename recipe file! rename "{0}" to: There exist error in the recipe, continue save the file? save recipe failed! Reload recipe will lost current modification, are you sure you will reload the recipe? Input Recipe Name Save as '{0}' Failed! {0} SaveAs recipe failed! Input Folder Name {0} new folder failed! create recipe file '{0}' failed! create recipe file '{0}' exception! Are your sure you want to delete the folder "{0}"? All the files and foldes under this folder will be deleted. {0} failed to delete the folder! rename the folder from "{0}" to rename folder failed! {0} failed to modify recipe folder! Import file: import recipe and rename "{0}" failed! {0} failed to import recipe file! are you sure you want to delete recipe "{0}"? {0} delete recipe exception! Liquid Level: Standing Time: Name Set Real Alarm Range Alarm Time Enable Alarm Precursor Temp Precursor Container Temp Vapor Line Temp Pumping Line Temp Precursor High Limit Precursor Low Limit Vapor Pressure Container Vacuum Pressure Maintenance Control Tank Pump Status: Pumping Container Pump Vapor line Pump Precursor Feed Leak Check Configuration Pump Down Time(m) Leak Check Time(s) Leak Check Mode Status Leak Check Abort Delete Date Start Pressure Stop Pressure Leak Rate(mt/min) Check Mode Pressure RF Match RF Power On/Off RF Power (w) Match Mode C1 Setting (%) C2 Setting (%) ON OFF Query condition Time Range Recipe Run Query Data Log History List Recipe Name End Time Start Time Running result Lot Data Charting Transfer Platform Operation Status Initialize Abort Auto Running Auto Mode Manual Mode Alarm Mode Auto Manual Auto Run ClearMaterial Auto Stop Select Recipe Upload Run Transfer Stop Transfer Start Stop Total Slot Slot Pitch(mm) LS In Slot 1 Position(mm) LS Out Slot 1 Position(mm) Push Bar In Push Position(mm) Push Bar Chamber Load Position(mm) Push Bar Chamber Unload Position(mm) LS In State Rail In State PB CHB State Rail Out State LS Out State Load Station In Ready To Unload Current Slot Target Slot Change Slot Number Chamber Feeded Unloaded Wait Load Wait Unload OpenChamber CloseChamber Wait Box Load Station Out EMO Button Safe Door Front Door Back Door Chamber Close Ask discharge front Ask discharge back Ask Feed front Ask Receive back