Init All
Running
Start
Stop
Pause
Resume
Select Recipe
Current:
Set
Select Magazine
Ack. Err.
System
TM
PM
Ready To Load
Pump State
RF State
Process Chamber
Transfer Platform
OK
Cancel
Left
Right
Up
Down
Set
Set Current
Move Test
Status
Pos.(mm)
Servo On
No Origin
With Origin
Alarm
Pulse On
Speed(mm/s)
ON
OFF
Home
Reset
Stop
Move
Brake Relay
Left
Right
Up
Down
Acceleration
Deceleration
Start Frequency
Default Servo Speed
Default Manual Speed
Servo On Timeout(s)
Move Timeout(s)
Reset Alarm Timeout(s)
Home Timeout(s)
Origin Speed(mm/s)
CCW Limit Position(mm)
CW Limit Position(mm)
Acc/Dec Time(ms)
No interference position(mm)
Transfer Platform Timeout Config
UpDown Cylinder Move Time(s)
LeftRight Cylinder Move Time(s)
Box Arrive Timeout(s)
Material Arrive Timeout(s)
Entrance Stick Timeout(s)
Exit Stick Timeout(s)
ATM Cycle Mode
Check safe interlock before run
System:
Contactor:
EMO:
User Login
User Name:
Password:
Login
Exit
Event:
Reset
Buzzer Off
Version:
Login:
Role:
Logout
LSI:
Chamber Mode:
Chamber Status:
Process Status:
Platform Mode:
Platform Status:
System Mode:
System Status:
RailIn:
PM:
RailOut:
LSO:
Load Station In
Status:
Clear Error
Position:
Push Bar In
Rail In
Stop Pin:
Roller:
Roll
Stop
PM
Push Bar Chamber
Rail Out
Load Station Out
System Magazine Type
Current:
Set
Recipe
Auto Running
Init All
Start
MaterialBox
Entrance
Lot Scan
Recipe
Data Log
Total Cycle
Recipe Scan
Start
Next Step
Stop
Front Door:
RF Door:
CDA Pressure Sensor:
Pump
Inlet
Outlet
Vent
Precursor Door:
Back Door:
Process Status
Parameters
Feedback
Set Point
Total Process Time(s)
Step No
Step Time
Chamber Pressure(mTorr)
TV Mode
TV Position(%)
TV Pressure(mTorr)
Booster Pressure(mTorr)
Booster Speed(%)
Step Mode
Electrode Temp.(℃)
Heater Temp.(℃)
RF Time(s)
RF Mode
RF Power(w)
Reflect Power(w)
Pulsing Frequency(Hz)
Pulsing DC(%)
RF Match Position C1
RF Match Position C2
Vapor MFC1(sccm)
Vapor MFC2(sccm)
Electrode Temp(c)
Heater Temp(c)
Operation
Manual
Auto
Online
Offline
Process Done
Working Mode
Manual Operation
Base Pressure(mT)
Pump Down Limit(s)
Pump Time(s)
E.Critical Temp.(℃)
Pump
Gas
Cooling
RF
Purge
Vent
ChamberStatus
Open Lid
Close Lid
Add...
Rename
Save As...
Delete
Current:
Push Bar In Position
Motor(mm)
Left(mm)
Right(mm)
Push Bar Chamber
Load Station In
Slot 1(mm)
Total Layer
Pitch(mm)
Chamber(mm)
Load Station Out
Product Width(mm)
Product Length(mm)
Product Margin(mm)
Floor Space(mm)
Slot Number
Job Start Time
Job Stop Time
Processed Count
LS-IN Motor Initial place(mm)
LS-IN Motor work place(mm)
PB-CHB Motor Initial place(mm)
PB-CHB Motor push-in place(mm)
PB-CHB Motor push-out place
R1 product type code
R2 product type code
R3 product type code
R4 product type code
Process Configuration
Vent Time Limit(s)
Purge Pump Time Limit(s)
Purge Pump Pressure(mTor)
Purge Time Limit(s)
Purge Pressure(mTor)
Purge Cycle Count
Purge Time(s)
Electrode Temperature Alarm Range(℃)
Electrode Temperature Alarm Time(s)
Electrode Temperature Default Critical Value(℃)
Gas Flow Pressure Alarm Time(s)
Gas Flow Pressure Alarm Range(mTor)
RF Power Alarm Range(w)
RF Power Alarm Time(s)
RF Reflect Power Alarm Range(w)
RF Reflect Power Alarm Time(s)
Vent Time(s)
Set
Save Config As...
Load Config
Set All
Pump Valve Close Delay Time(s)
RF Match Running Mode
RF Match Position C1
RF Match Position C2
RF Match Mode In Auto Run Process
Gas
Enable
Display Name
N2 Scale(sccm)
Scale Factor
Flow Alarm Range(sccm)
Flow Alarm Time(s)
Enable Flow Alarm
Pressure(MPa)
Pressure Min(MPa)
Pressure Max(MPa)
Pressure Warning Time(s)
Pressure Alarm Time(s)
Set
Gas 1
Gas 2
Gas 3
Gas 4
Gas 5
N2
CDA
Pulsing Function
Power Range(w)
Enable Barcode
Enable Manual Select Recipe
Left TC As Control TC
TC Max Difference(℃)
Vacuum System
Independent Pressure Control
Dry Pump
Dry Pump Setting
Cooling Water Flow
N2 Pressure
Pressure Control
Feedback(slm|℃)
Min(slm|℃)
Max(slm|℃)
Warning Time(s)
Alarm Time(s)
Device Control
Test Mode
Cooling System Configuration
Statistics
RF On Time
Pump On Time
Last PM Time
From Last PM
Reset
Total
PM Interval(Days)
Total Processed Material Count
Total Batch Count
Account Management
Add
Edit
Password
Role
Delete
Current User
Only display enabled user
No.
Login Name
Enabled
Name
Role
Department
Last Login
Telephone
Mailbox
Description
Title
Company
Create
Save
Role must be selected
Account
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{1}
ResetPassword
Account "{0}" reset password:
reset password succeeded
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Input New:
Reinput:
Current Login User Account Management
Delete user "{0}"?
Delete user "{0}" succeeded。
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{1}
registered user count:
enabled user count:
Are you sure to delete "{0}" role?
Save succeeded!
Failed!
RecipeList
Current Recipe:
Reload
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Import Recipe
New Folder
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Rename Folder
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Recipe Editor
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Excel file (.xls)|*.xls
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Recipe file (.rcp)|*.rcp
rename
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failed to rename recipe file!
rename "{0}" to:
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create recipe file
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create recipe file
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exception!
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All the files and foldes under this folder will be deleted.
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rename the folder from "{0}" to
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Import file:
import recipe and rename
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failed to import recipe file!
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delete recipe exception!
Liquid Level:
Standing Time:
Name
Set
Real
Alarm Range
Alarm Time
Enable Alarm
Precursor Temp
Precursor Container Temp
Vapor Line Temp
Pumping Line Temp
Precursor High Limit
Precursor Low Limit
Vapor Pressure
Container Vacuum Pressure
Maintenance Control
Tank Pump
Status:
Pumping
Container Pump
Vapor line Pump
Precursor Feed
Leak Check Configuration
Pump Down Time(m)
Leak Check Time(s)
Leak Check Mode
Status
Leak Check
Abort
Delete
Date
Start Pressure
Stop Pressure
Leak Rate(mt/min)
Check Mode
Pressure
RF Match
RF Power On/Off
RF Power (w)
Match Mode
C1 Setting (%)
C2 Setting (%)
ON
OFF
Query condition
Time Range
Recipe Run
Query
Data Log History List
Recipe Name
End Time
Start Time
Running result
Lot
Data Charting
Transfer Platform Operation
Status
Initialize
Abort
Auto Running
Auto Mode
Manual Mode
Alarm Mode
Auto
Manual
Auto Run
ClearMaterial
Auto Stop
Select Recipe
Upload
Run Transfer
Stop Transfer
Start
Stop
Total Slot
Slot Pitch(mm)
LS In Slot 1 Position(mm)
LS Out Slot 1 Position(mm)
Push Bar In Push Position(mm)
Push Bar Chamber Load Position(mm)
Push Bar Chamber Unload Position(mm)
LS In State
Rail In State
PB CHB State
Rail Out State
LS Out State
Load Station In
Ready To Unload
Current Slot
Target Slot
Change Slot Number
Chamber
Feeded
Unloaded
Wait Load
Wait Unload
OpenChamber
CloseChamber
Wait Box
Load Station Out
EMO Button
Safe Door
Front Door
Back Door
Chamber Close
Ask discharge front
Ask discharge back
Ask Feed front
Ask Receive back