using Aitex.Core.RT.DataCenter; using Aitex.Core.RT.IOCore; using Aitex.Core.RT.Log; using Aitex.Core.Util; using MECF.Framework.Common.Equipment; using MECF.Framework.Simulator.Core.Driver; using System; using System.Collections.Generic; using VirgoSimulator.Devices; namespace VirgoSimulator.Instances { public class SimulatorSystem : Singleton { private PeriodicJob _thread; private Random _rd = new Random(); private RD_TRIG _trigATM = new RD_TRIG(); private RD_TRIG _trigVAC = new RD_TRIG(); private readonly float ATM_THRESHOLD = 750000; private readonly float ATM_PRESSURE = 760000; private readonly uint VAC_SW_PRESSURE = 9500; private readonly uint PROCESS_GAUGE = 10000; private Dictionary _MockDevices = new Dictionary(); public SimulatorSystem() { //_MockDevices.Add(ModuleName.PMB, new SkyPumpMock()); //_MockDevices.Add(ModuleName.PMB, new AdTecGeneratorMock()); //_MockDevices.Add(ModuleName.PMB, new AdTecMatchMock()); // TODO } ~SimulatorSystem() { _thread?.Stop(); } public void Initialize() { SetDefaultValue(ModuleName.PMA); SetDefaultValue(ModuleName.PMB); Singleton.Instance.Initialize(false); _thread = new PeriodicJob(500, OnMonitor, nameof(SimulatorSystem), true); } private void SetDefaultValue(ModuleName mod) { // chamber IO.DI[$"{mod}.DI_Lid_Closed"].Value = true; IO.DI[$"{mod}.DI_PM_ATM_SW"].Value = true; IO.DI[$"{mod}.DI_CDA_Pressure"].Value = true; IO.DI[$"{mod}.DI_SourceFan1"].Value = true; IO.DI[$"{mod}.DI_SourceFan2"].Value = true; IO.DI[$"{mod}.DI_Cooling_Water_Flow_SW"].Value = true; IO.DI[$"{mod}.DI_Coolant_Inlet_TC_Broken_Alarm"].Value = false; IO.DI[$"{mod}.DI_Coolant_Outlet_TC_Broken_Alarm"].Value = false; IO.DI[$"{mod}.DI_Water_Leak"].Value = true; IO.DI[$"{mod}.DI_ARM_Not_Extend_to_PM"].Value = true; IO.DI[$"{mod}.DI_MFC1_Pressure"].Value = true; IO.DI[$"{mod}.DI_MFC2_Pressure"].Value = true; IO.DI[$"{mod}.DI_MFC3_Pressure"].Value = true; IO.DI[$"{mod}.DI_MFC4_Pressure"].Value = true; IO.DI[$"{mod}.DI_MFC5_Pressure"].Value = true; IO.DI[$"{mod}.DI_EFEM_Side_Panel_Closed"].Value = true; IO.DI[$"{mod}.DI_Generator_Hardware_Interlock"].Value = true; IO.DI[$"{mod}.DI_N2_Pressure"].Value = true; // slit door IO.DI[$"{mod}.DI_Slit_Door_Open_Pos"].Value = false; IO.DI[$"{mod}.DI_Slit_Door_Close_Pos"].Value = true; // lift pin IO.DI[$"{mod}.DI_Lift_Pin_Up"].Value = false; IO.DI[$"{mod}.DI_Lift_Pin_Down"].Value = true; // IO.DI[$"{mod}.DI_LE_OT_SW_Alarm"].Value = false; IO.DI[$"{mod}.DI_GB_Door_SW_Alarm"].Value = false; IO.DI[$"{mod}.DI_GB_Pressure_SW_Alarm"].Value = false; //Guide pin IO.DI[$"{mod}.DI_Guide_Pin_Small_Lifter_Up_Pos"].Value = false; IO.DI[$"{mod}.DI_Guide_Pin_Small_Lifter_Down_Pos"].Value = true; IO.DI[$"{mod}.DI_Guide_Pin_Medium_Lifter_Up_Pos"].Value = false; IO.DI[$"{mod}.DI_Guide_Pin_Medium_Lifter_Down_Pos"].Value = true; IO.DI[$"{mod}.DI_Dry_Pump_Running"].Value = false; IO.DI[$"{mod}.DI_Pump_Remote_Status"].Value = true; IO.DI[$"{mod}.DI_Pump_Alarm"].Value = false; // pressure SetAiValue($"{mod}.AI_Foreline_pressure", 5000); SetAiValue($"{mod}.AI_Chamber_pressure", ATM_PRESSURE); SetAiValue($"{mod}.AI_Process_pressure", PROCESS_GAUGE); //SetAiValue($"{mod}.AI_Throttle_Valve_State", 1); IO.AI[$"{mod}.AI_Throttle_Valve_State"].Value = 1; IO.AI[$"{mod}.AI_Throttle_Valve_Real_Position"].Value = 10; // Temperature SetAiValue($"{mod}.AI_Substrate_Control_TC_Temp", 28); SetAiValue($"{mod}.AI_Substrate_Monitor_TC_Temp", 27); SetAiValue($"{mod}.AI_Foreline_Control_TC_Temp", 28); SetAiValue($"{mod}.AI_Foreline_Monitor_TC_Temp", 27); SetAiValue($"{mod}.AI_Coolant_Inlet_Temp", 28); if (mod == ModuleName.PMA) { SetAiValue($"{mod}.AI_Coolant_Outlet_Temp", 29); } else if (mod == ModuleName.PMB) { SetAiValue($"{mod}.AI_Coolant_Outlet_Temp", 30); } // Datetime SetAiValue($"{mod}.AI_Year", DateTime.Today.Year); SetAiValue($"{mod}.AI_Month", DateTime.Today.Month); SetAiValue($"{mod}.AI_Day", DateTime.Today.Day); } private bool OnMonitor() { try { // PMA MonitorSlitDoor(ModuleName.PMA); MonitorPin(ModuleName.PMA); MonitorPressure(ModuleName.PMA); MonitorTemperature(ModuleName.PMA); MonitorGas(ModuleName.PMA); MonitorRF(ModuleName.PMA); ChangeTime(ModuleName.PMA); MonitorIOPumpCtrl(ModuleName.PMA); // PMB MonitorSlitDoor(ModuleName.PMB); MonitorPin(ModuleName.PMB); MonitorPressure(ModuleName.PMB); MonitorTemperature(ModuleName.PMB); MonitorGas(ModuleName.PMB); MonitorRF(ModuleName.PMB); ChangeTime(ModuleName.PMB); MonitorIOPumpCtrl(ModuleName.PMB); } catch (Exception e) { LOG.Write(e); } return true; } private void ChangeTime(ModuleName mod) { // Heartbeat with PLC SetAiValue($"{mod}.AI_Heartbeat_FB", GetAoValue($"{mod}.AO_Heartbeat")); SetAiValue($"{mod}.AI_Time", DateTime.Now.Hour); SetAiValue($"{mod}.AI_Minute", DateTime.Now.Minute); SetAiValue($"{mod}.AI_Second", DateTime.Now.Second); } void MonitorSlitDoor(ModuleName mod) { // slit door open if (IO.DO[$"{mod}.DO_Slit_Door_Open"].Value) { IO.DI[$"{mod}.DI_Slit_Door_Open_Pos"].Value = true; IO.DI[$"{mod}.DI_Slit_Door_Close_Pos"].Value = false; } // slit door close if (IO.DO[$"{mod}.DO_Slit_Door_Close"].Value) { IO.DI[$"{mod}.DI_Slit_Door_Open_Pos"].Value = false; IO.DI[$"{mod}.DI_Slit_Door_Close_Pos"].Value = true; } } void MonitorPin(ModuleName mod) { // lift pin up if (IO.DO[$"{mod}.DO_Lift_Pin_Up"].Value != IO.DO[$"{mod}.DO_Lift_Pin_Down"].Value) { IO.DI[$"{mod}.DI_Lift_Pin_Up"].Value = IO.DO[$"{mod}.DO_Lift_Pin_Up"].Value; IO.DI[$"{mod}.DI_Lift_Pin_Down"].Value = IO.DO[$"{mod}.DO_Lift_Pin_Down"].Value; } // upper guide pin up if (IO.DO[$"{mod}.DO_Guide_Pin_Small_Lifter_Up"].Value) { IO.DI[$"{mod}.DI_Guide_Pin_Small_Lifter_Up_Pos"].Value = true; IO.DI[$"{mod}.DI_Guide_Pin_Small_Lifter_Down_Pos"].Value = false; } // upper guide pin down if (IO.DO[$"{mod}.DO_Guide_Pin_Small_Lifter_Down"].Value) { IO.DI[$"{mod}.DI_Guide_Pin_Small_Lifter_Up_Pos"].Value = false; IO.DI[$"{mod}.DI_Guide_Pin_Small_Lifter_Down_Pos"].Value = true; } // lower guide pin up if (IO.DO[$"{mod}.DO_Guide_Pin_Medium_Lifter_Up"].Value) { IO.DI[$"{mod}.DI_Guide_Pin_Medium_Lifter_Up_Pos"].Value = true; IO.DI[$"{mod}.DI_Guide_Pin_Medium_Lifter_Down_Pos"].Value = false; } // lower guide pin down if (IO.DO[$"{mod}.DO_Guide_Pin_Medium_Lifter_Down"].Value) { IO.DI[$"{mod}.DI_Guide_Pin_Medium_Lifter_Up_Pos"].Value = false; IO.DI[$"{mod}.DI_Guide_Pin_Medium_Lifter_Down_Pos"].Value = true; } } void MonitorPressure(ModuleName mod) { // pressure string sAI_Foreline = "AI_Foreline_pressure"; // Foreline if (SkyPumpMockPMA._simPumpStatus == SkyPumpMockPMA.SimPumpStatus.Open || EdwardsPumpMockPMA._simPumpStatus == EdwardsPumpMockPMA.SimEdwardsPumpStatus.Open) { SetAiValue($"{mod}.{sAI_Foreline}", GetAiValue($"{mod}.{sAI_Foreline}") - _rd.Next(500, 600)); } else { SetAiValue($"{mod}.{sAI_Foreline}", GetAiValue($"{mod}.{sAI_Foreline}") + _rd.Next(500, 600)); } // PLC 模拟量范围[0,4000], 电压[0, 10V], 压力[0, 760Torr] string sAI_ChamberPressure = "AI_Chamber_pressure"; string sAI_ProcessPressure = "AI_Process_pressure"; //float chamber_pressure = GetMockChamberPressure(mod); //float process_pressure = GetAiValue($"{mod}.AI_Process_pressure"); // soft pump & fast pump DOAccessor fast_pump_vlv = IO.DO[$"{mod}.DO_Fast_Pumping_Valve"]; DOAccessor soft_pump_vlv = IO.DO[$"{mod}.DO_Soft_Pumping_Valve"]; if (fast_pump_vlv.Value || soft_pump_vlv.Value) { if (fast_pump_vlv.Value && soft_pump_vlv.Value) { float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}"); float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}"); if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000) { SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - 30000); //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150); } else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000) { getAiValue_ProcessPressure = getAiValue_ChamberPressure; SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 1500); SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 1500); } //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(15000, 16000)); //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(150, 160)); } else if (fast_pump_vlv.Value) { float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}"); float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}"); if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000) { SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - 25000); //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150); } else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000) { getAiValue_ProcessPressure = getAiValue_ChamberPressure; SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 1300); SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 1300); } //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(12000, 13000)); //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(120, 130)); } else if (soft_pump_vlv.Value) { float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}"); float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}"); if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000) { SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - 22000); //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150); } else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000) { getAiValue_ProcessPressure = getAiValue_ChamberPressure; SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 1100); SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 1100); } //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(13000, 14000)); //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(100, 110)); } } // fast vent & purge DOAccessor vent_vlv = IO.DO[$"{mod}.DO_Chamber_vent_valve"]; DOAccessor purge_vlv = IO.DO[$"{mod}.DO_Chamber_purge_valve"]; if (vent_vlv.Value || purge_vlv.Value) { if (vent_vlv.Value && purge_vlv.Value) { float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}"); float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}"); if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000) { SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 30000); //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150); } else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000) { getAiValue_ProcessPressure = getAiValue_ChamberPressure; SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1500); SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1500); } //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + _rd.Next(45000, 50000)); //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + _rd.Next(150, 160)); } else if (vent_vlv.Value) { float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}"); float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}"); if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000) { SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 25000); //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150); } else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000) { getAiValue_ProcessPressure = getAiValue_ChamberPressure; SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1300); SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1300); } //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + _rd.Next(25000, 30000)); //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + _rd.Next(130, 150)); } else if (purge_vlv.Value) { float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}"); float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}"); if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000) { SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 30000); //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150); } else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000) { getAiValue_ProcessPressure = getAiValue_ChamberPressure; SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 3100); SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 3100); } //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + _rd.Next(15000, 20000)); //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + _rd.Next(100, 120)); } } // 压力值越界,复位 float chamber_pressure1 = GetAiValue($"{mod}.{sAI_ChamberPressure}"); if (chamber_pressure1 > ATM_PRESSURE) { SetAiValue($"{mod}.AI_Chamber_pressure", ATM_PRESSURE); } else if (chamber_pressure1 < 20) { SetAiValue($"{mod}.AI_Chamber_pressure", 20); } float process_pressure1 = GetAiValue($"{mod}.{sAI_ProcessPressure}"); if (process_pressure1 > PROCESS_GAUGE) { SetAiValue($"{mod}.AI_Process_pressure", PROCESS_GAUGE); } else if (process_pressure1 < 20) { SetAiValue($"{mod}.AI_Process_pressure", 20); } float foreline_pressure = GetAiValue($"{mod}.{sAI_Foreline}"); if (foreline_pressure > 10000) { SetAiValue($"{mod}.AI_Foreline_pressure", 10000); } else if (foreline_pressure < 150) { SetAiValue($"{mod}.AI_Foreline_pressure", 150); } // 模拟压力计漂移 //int p1 = (int)GetMockChamberPressure(mod); //int new_p1 = _rd.Next(p1 - 2, p1 + 2); //SetAiValue($"{mod}.AI_Chamber_pressure", new_p1); //int p2 = (int)GetAiValue($"{mod}.AI_Foreline_pressure"); //int new_p2 = _rd.Next(p2 - 1, p2 + 1); //SetAiValue($"{mod}.AI_Foreline_pressure", new_p2); //int p3 = (int)GetAiValue($"{mod}.AI_Process_pressure"); //int new_p3 = _rd.Next(p3 - 1, p3 + 1); //SetAiValue($"{mod}.AI_Process_pressure", new_p3); // 根据当前压力值设定信号 //float chamber_pressure2 = GetMockChamberPressure(mod); // ATM switch IO.DI[$"{mod}.DI_PM_ATM_SW"].Value = GetAiValue($"{mod}.{sAI_ChamberPressure}") > ATM_THRESHOLD; // VAC switch IO.DI[$"{mod}.DI_PM_VAC_SW"].Value = GetAiValue($"{mod}.{sAI_ChamberPressure}") < VAC_SW_PRESSURE; // Throttle valve //var pos_sp = IO.AO[$"{mod}.AO_Throttle_Valve_Pressure_Setpoint"].Value; //var mock_pos_fb = _rd.Next(pos_sp - 2, pos_sp + 2); ////IO.AI[$"{mod}.AI_Throttle_Valve_Real_Pressure"].Value = (short)mock_pos_fb; //SetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure", mock_pos_fb); // 压力值 if (GetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure") < GetAoValue($"{mod}.AO_Throttle_Valve_Pressure_Setpoint")) { short increase = (short)_rd.Next(20, 30); SetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure", GetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure") + increase); if (GetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure") > GetAoValue($"{mod}.AO_Throttle_Valve_Pressure_Setpoint")) { SetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure", GetAoValue($"{mod}.AO_Throttle_Valve_Pressure_Setpoint")); } } else { short increase = (short)_rd.Next(20, 30); SetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure", GetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure") - increase); if (GetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure") < GetAoValue($"{mod}.AO_Throttle_Valve_Pressure_Setpoint")) { SetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure", GetAoValue($"{mod}.AO_Throttle_Valve_Pressure_Setpoint")); } } // 位置值 if (GetAiValue($"{mod}.AI_Throttle_Valve_Real_Position") < GetAoValue($"{mod}.AO_Throttle_Valve_Position_Setpoint")) { short increase = (short)_rd.Next(20, 30); SetAiValue($"{mod}.AI_Throttle_Valve_Real_Position", GetAiValue($"{mod}.AI_Throttle_Valve_Real_Position") + increase); if (GetAiValue($"{mod}.AI_Throttle_Valve_Real_Position") > GetAoValue($"{mod}.AO_Throttle_Valve_Position_Setpoint")) { SetAiValue($"{mod}.AI_Throttle_Valve_Real_Position", GetAoValue($"{mod}.AO_Throttle_Valve_Position_Setpoint")); } } else { short increase = (short)_rd.Next(20, 30); SetAiValue($"{mod}.AI_Throttle_Valve_Real_Position", GetAiValue($"{mod}.AI_Throttle_Valve_Real_Position") - increase); if (GetAiValue($"{mod}.AI_Throttle_Valve_Real_Position") < GetAoValue($"{mod}.AO_Throttle_Valve_Position_Setpoint")) { SetAiValue($"{mod}.AI_Throttle_Valve_Real_Position", GetAoValue($"{mod}.AO_Throttle_Valve_Position_Setpoint")); } } } //float GetMockChamberPressure(ModuleName mod) //{ // return GetAiValue($"{mod}.AI_Chamber_pressure"); //} //void SetMockChamberPressure(ModuleName mod, float val) //{ // SetAiValue($"{mod}.AI_Chamber_pressure", val); //} void SetAiValue(string name, float value) { byte[] flow = BitConverter.GetBytes(value); short high1 = BitConverter.ToInt16(flow, 0); short low1 = BitConverter.ToInt16(flow, 2); IO.AI[name].Buffer[IO.AI[name].Index] = BitConverter.ToInt16(flow, 0); IO.AI[name].Buffer[IO.AI[name].Index + 1] = BitConverter.ToInt16(flow, 2); byte[] high = BitConverter.GetBytes(IO.AI[name].Buffer[IO.AI[name].Index]); byte[] low = BitConverter.GetBytes(IO.AI[name].Buffer[IO.AI[name].Index + 1]); float readback = BitConverter.ToSingle(new[] { high[0], high[1], low[0], low[1] }, 0); } float GetAiValue(string name) { byte[] high = BitConverter.GetBytes(IO.AI[name].Buffer[IO.AI[name].Index]); byte[] low = BitConverter.GetBytes(IO.AI[name].Buffer[IO.AI[name].Index + 1]); float flow = BitConverter.ToSingle(new[] { high[0], high[1], low[0], low[1] }, 0); return flow; } float GetAoValue(string name) { byte[] high = BitConverter.GetBytes(IO.AO[name].Buffer[IO.AO[name].Index]); byte[] low = BitConverter.GetBytes(IO.AO[name].Buffer[IO.AO[name].Index + 1]); float flow = BitConverter.ToSingle(new[] { high[0], high[1], low[0], low[1] }, 0); return flow; } void MonitorTemperature(ModuleName mod) { IO.DI[$"{mod}.DI_Substrate_Heater_On_FB"].Value = IO.DO[$"{mod}.DO_Substrate_Heater_On"].Value; IO.DI[$"{mod}.DI_Foreline_Heater_On_FB"].Value = IO.DO[$"{mod}.DO_Forline_Heater_On"].Value; IO.DI[$"{mod}.DI_CHB_Wall_Heater_On_FB"].Value = IO.DO[$"{mod}.DO_CHB_Wall_Heater_On"].Value; IO.DI[$"{mod}.DI_Foreline_TC_Deviation_out_of_range"].Value = false; IO.DI[$"{mod}.DI_Substrate_TC_Deviation_out_of_range"].Value = false; // 底座 if (IO.DO[$"{mod}.DO_Substrate_Heater_On"].Value && GetAiValue($"{mod}.AI_Substrate_Control_TC_Temp") < GetAoValue($"{mod}.AO_Substrate_Temperature_Setpoint")) { SetAiValue($"{mod}.AI_Substrate_Control_TC_Temp", GetAiValue($"{mod}.AI_Substrate_Control_TC_Temp") + _rd.Next(1, 2)); SetAiValue($"{mod}.AI_Substrate_Monitor_TC_Temp", GetAiValue($"{mod}.AI_Substrate_Monitor_TC_Temp") + _rd.Next(1, 2)); } else if (IO.DO[$"{mod}.DO_Substrate_Heater_On"].Value && GetAiValue($"{mod}.AI_Substrate_Control_TC_Temp") > GetAoValue($"{mod}.AO_Substrate_Temperature_Setpoint")) { SetAiValue($"{mod}.AI_Substrate_Control_TC_Temp", GetAiValue($"{mod}.AI_Substrate_Control_TC_Temp") - _rd.Next(1, 2)); SetAiValue($"{mod}.AI_Substrate_Monitor_TC_Temp", GetAiValue($"{mod}.AI_Substrate_Monitor_TC_Temp") - _rd.Next(1, 2)); } // Foreline if (IO.DO[$"{mod}.DO_Forline_Heater_On"].Value && GetAiValue($"{mod}.AI_Foreline_Control_TC_Temp") < GetAoValue($"{mod}.AO_Foreline_Temperature_Setpoint")) { SetAiValue($"{mod}.AI_Foreline_Control_TC_Temp", GetAiValue($"{mod}.AI_Foreline_Control_TC_Temp") + _rd.Next(1, 2)); SetAiValue($"{mod}.AI_Foreline_Monitor_TC_Temp", GetAiValue($"{mod}.AI_Foreline_Monitor_TC_Temp") + _rd.Next(1, 2)); } else if (IO.DO[$"{mod}.DO_Forline_Heater_On"].Value && GetAiValue($"{mod}.AI_Foreline_Control_TC_Temp") > GetAoValue($"{mod}.AO_Foreline_Temperature_Setpoint")) { SetAiValue($"{mod}.AI_Foreline_Control_TC_Temp", GetAiValue($"{mod}.AI_Foreline_Control_TC_Temp") - _rd.Next(1, 2)); SetAiValue($"{mod}.AI_Foreline_Monitor_TC_Temp", GetAiValue($"{mod}.AI_Foreline_Monitor_TC_Temp") - _rd.Next(1, 2)); } // Wall if (IO.DO[$"{mod}.DO_CHB_Wall_Heater_On"].Value && GetAiValue($"{mod}.AI_CHB_Wall_Control_TC_Temp") < GetAoValue($"{mod}.AO_CHB_Wall_Temperature_Setpoint")) { SetAiValue($"{mod}.AI_CHB_Wall_Control_TC_Temp", GetAiValue($"{mod}.AI_CHB_Wall_Control_TC_Temp") + _rd.Next(1, 2)); SetAiValue($"{mod}.AI_CHB_Wall_Monitor_TC_Temp", GetAiValue($"{mod}.AI_CHB_Wall_Monitor_TC_Temp") + _rd.Next(1, 2)); } else if (IO.DO[$"{mod}.DO_CHB_Wall_Heater_On"].Value && GetAiValue($"{mod}.AI_Substrate_Control_TC_Temp") > GetAoValue($"{mod}.AO_CHB_Wall_Temperature_Setpoint")) { SetAiValue($"{mod}.AI_CHB_Wall_Control_TC_Temp", GetAiValue($"{mod}.AI_CHB_Wall_Control_TC_Temp") - _rd.Next(1, 2)); SetAiValue($"{mod}.AI_CHB_Wall_Monitor_TC_Temp", GetAiValue($"{mod}.AI_CHB_Wall_Monitor_TC_Temp") - _rd.Next(1, 2)); } } void MonitorGas(ModuleName mod) { // gas this.SimulateMFC(ModuleName.PMA, 1); this.SimulateMFC(ModuleName.PMA, 2); this.SimulateMFC(ModuleName.PMA, 3); this.SimulateMFC(ModuleName.PMA, 4); this.SimulateMFC(ModuleName.PMA, 5); this.SimulateMFC(ModuleName.PMB, 1); this.SimulateMFC(ModuleName.PMB, 2); this.SimulateMFC(ModuleName.PMB, 3); this.SimulateMFC(ModuleName.PMB, 4); this.SimulateMFC(ModuleName.PMB, 5); } private void SimulateMFC(ModuleName mod, byte gasNum) { var sp = GetAoValue($"{mod}.AO_MFC{gasNum}_Flow_Setpoint"); if (gasNum == 3) { sp = Math.Max(0, sp - 1500); } var mock_fb = _rd.Next((int)sp - 3, (int)sp + 3) + _rd.NextDouble(); SetAiValue($"{mod}.AI_MFC{gasNum}_Flow", (float)mock_fb); } void MonitorRF(ModuleName mod) { // RF generator var sp = GetAoValue($"{mod}.AO_Generator_Power_Setpoint"); var mock_fb = _rd.Next((int)sp - 3, (int)sp + 3) + _rd.NextDouble(); //var mock_sp = _rd.Next(sp - 3, sp + 3); SetAiValue($"{mod}.AI_Generator_Forward_Power", (float)mock_fb); //IO.DI[$"{mod}.DI_Generator_Power_Status"].Value = IO.DO[$"{mod}.DO_Generator_Power_ON"].Value; } void MonitorIOPumpCtrl(ModuleName mod) { if (IO.DO[$"{mod}.DO_Pump_Run"].Value) IO.DI[$"{mod}.DI_Dry_Pump_Running"].Value = true; if (IO.DO[$"{mod}.DO_Pump_Stop"].Value) IO.DI[$"{mod}.DI_Dry_Pump_Running"].Value = false; } public void Terminate() { _thread.Stop(); } } }