using System; using System.Collections.Generic; using Aitex.Core.Common; using Aitex.Core.Common.DeviceData; using Aitex.Core.RT.DataCenter; using Aitex.Core.RT.Device; using Aitex.Core.RT.Device.Unit; using Aitex.Core.RT.Event; using Aitex.Core.RT.SCCore; using Aitex.Core.Util; using Aitex.Sorter.Common; using MECF.Framework.Common.Device.Bases; using MECF.Framework.Common.Equipment; using MECF.Framework.Common.Schedulers; using MECF.Framework.Common.SubstrateTrackings; using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.PMs; using VirgoCommon; using VirgoRT.Devices.IODevices; using VirgoRT.Instances; using VirgoRT.Module; using VirgoRT.Modules; namespace VirgoRT.Devices { enum ValveType { PROCESS, FAST_PUMP, SOFT_PUMP, FAST_VENT, PURGE, Mfc1, Mfc2, Mfc3, Mfc4, Mfc5 } class JetPM : PM { // ----------------------------Fields-------------------------- // private readonly IoLid _Lid; //private readonly IoCylinder _LidLocker; private readonly IoMessage _Messager; private readonly IoSensor _ATM_sw; private readonly IoSensor _VAC_sw; private readonly IoSensor _WLK_sw; private readonly IoSensor _CDAPressure; private readonly IoSensor _CoolantInletTC; private readonly IoSensor _CoolantOutletTC; private readonly IoSensor _ArmNotExtend; private readonly IoSensor _N2Pressure_sw; private readonly IoSensor _RFG_Interlock; private readonly IoPressureControl _pressureController; private readonly IoHeater _SubstrateTC; private readonly IoHeater _ForelineTC; private readonly IoValve _SoftPumpValve; private readonly IoValve _FastPumpValve; private readonly IoValve _ProcessValve; private readonly IoValve _PurgeValve; private readonly IoValve _FastVentValve; private readonly IoValve _Mfc1Valve; private readonly IoValve _Mfc2Valve; private readonly IoValve _Mfc3Valve; private readonly IoValve _Mfc4Valve; private readonly IoValve _Mfc5Valve; //private readonly IoValve _N2SupplyValve; private readonly IoCylinder _slitDoor; private readonly IoCylinder _LiftPin; private readonly IoCylinder _PinSmall; // 3' private readonly IoCylinder _PinMedium; // 4' private readonly RfPowerBase _Generator; private readonly RfPowerBase _GeneratorBias; private readonly RfMatchBase _Match; private readonly PumpBase _MainPump; private readonly ChillerBase _Chiller; private readonly IoGasStick[] _gasLines; private readonly ChillerBase _gridChiller; private readonly IoHeater _gridHeater; private readonly R_TRIG _trigBasePressure = new R_TRIG(); private readonly R_TRIG _trigBaseTemperature = new R_TRIG(); private readonly R_TRIG _trigWaterFlowCloseChiller = new R_TRIG(); private double BasePressure; private double BaseTemperature; private bool EnableBiasRF = false; private int _bigWafer = 0; private int _midWafer = 0; private int _smallWafer = 0; private int gasCount = 0; private bool _smallGuidePinEnable; private bool _mediumGuidePinEnable; private MovementPosition _smallGuidePinDummyPos = MovementPosition.Down; private MovementPosition _mediumGuidePinDummyPos = MovementPosition.Down; // --------------------------Properties------------------------ // public new ModuleName Module { get; } // 门的状态 public bool IsSlitDoorClosed => !_slitDoor.ONFeedback && _slitDoor.OFFFeedback; public bool IsArmNotExtend => _ArmNotExtend.Value; // 盖子的状态 public bool IsLidClosed => _Lid.OFFFeedback; // 盖子的锁 //public bool IsLidLocked => !_LidLocker.ONSetPoint && _LidLocker.OFFSetPoint; public MovementPosition LiftPinPosition { get { MovementPosition pos = MovementPosition.Unknown; if (_LiftPin.ONFeedback && !_LiftPin.OFFFeedback) { pos = MovementPosition.Up; } else if (!_LiftPin.ONFeedback && _LiftPin.OFFFeedback) { pos = MovementPosition.Down; } return pos; } } public MovementPosition SmallPosition { get { if (!_smallGuidePinEnable) return _smallGuidePinDummyPos; if (_smallWafer == 0) return MovementPosition.Down; MovementPosition res = MovementPosition.Unknown; if (_PinSmall.ONFeedback && !_PinSmall.OFFFeedback) { res = MovementPosition.Up; } else if (_PinSmall.OFFFeedback && !_PinSmall.ONFeedback) { res = MovementPosition.Down; } return res; } } public MovementPosition MediumPosition { get { if (!_mediumGuidePinEnable) return _mediumGuidePinDummyPos; if (_midWafer == 0) return MovementPosition.Down; MovementPosition res = MovementPosition.Unknown; if (_PinMedium.ONFeedback && !_PinMedium.OFFFeedback) { res = MovementPosition.Up; } else if (_PinMedium.OFFFeedback && !_PinMedium.ONFeedback) { res = MovementPosition.Down; } return res; } } public override bool IsError { get { if (SC.GetValue($"{Module}.BiasRf.EnableBiasRF")) { return _MainPump.IsError || _Generator.IsError || _GeneratorBias.IsError; } else { return _MainPump.IsError || _Generator.IsError; } } } public override bool IsIdle { get; } // 腔体压力 public bool IsPressureToleranceEnabled { get => _pressureController.EnableTolerance; set => _pressureController.EnableTolerance = value; } public override double ChamberPressure => _pressureController.ProcessGauge.Value; public override double ChamberPressurePressure => _pressureController.PressureGauge.Value; public double ForelinePressure => _pressureController.ForelineGauge.Value; public PressureCtrlMode PressureMode => _pressureController.ThrottleValve.PressureMode; public double TargetPressure => _pressureController.TargetPressure; // 压力信号 public bool IsATM => _ATM_sw.Value; public bool IsVAC => _VAC_sw.Value; public bool IsWLK => _WLK_sw.Value; public bool IsRFGInterlockOn => _RFG_Interlock.Value; // 温度 public float SubstrateTempSP => _SubstrateTC.ControlTcSetPoint; public float SubstrateTempFB => _SubstrateTC.ControlTcFeedback; public float CoolantInletTempFB => _SubstrateTC.CoolantInletTcFeedback; public float CoolantOutletTempFB => _SubstrateTC.CoolantOutletTcFeedback; // Pump 状态 public bool IsPumpRunning => _MainPump.IsRunning; public bool IsFastPumpOpened => _FastPumpValve.Status; public bool IsSoftPumpOpened => _SoftPumpValve.Status; public bool IsMfc1ValveOpened => _Mfc1Valve.Status; public bool IsMfc2ValveOpened => _Mfc2Valve.Status; public bool IsMfc3ValveOpened => _Mfc3Valve.Status; public bool IsMfc4ValveOpened => _Mfc4Valve.Status; public bool IsMfc5ValveOpened => _Mfc5Valve.Status; public bool HasPumpError => _MainPump.IsError || !_MainPump.IsRunning; public bool IsCDA_OK => _CDAPressure.Value; public bool IsCoolantInletTC_OK => _CoolantInletTC.Value; public bool IsCoolantOutletTC_OK => _CoolantOutletTC.Value; // 蝶阀位置 public float TVPosition => _pressureController.ThrottleValve.PositionFeedback; // 腔体压力.end // 射频 public float ForwardPower => _Generator.ForwardPower; public bool IsGeneratorON => _Generator.IsPowerOn; public float GeneratorSetpoint => _Generator.PowerSetPoint; // Bias射频 public float ForwardPowerBias => _GeneratorBias.ForwardPower; public bool IsGeneratorONBias => _GeneratorBias.IsPowerOn; public float GeneratorSetpointBias => _GeneratorBias.PowerSetPoint; public float CTune => _GeneratorBias.CTune; public float CLoad => _GeneratorBias.CLoad; public int VPP => _GeneratorBias.VPP; // 流气 public double TotalGasSetpoint { get { double sum = 0; foreach (var gas in _gasLines) { sum += gas.FlowSP; } return sum; } } public bool HasGasOutOfRange { get { foreach (var gas in _gasLines) { if (!gas.IsOutOfRange) return false; } return true; } } // --------------------------Constructor----------------------- // public JetPM(ModuleName mod) : base(mod.ToString()) { Module = mod; _smallGuidePinEnable = SC.GetValue($"System.SmallGuidePinEnable"); _mediumGuidePinEnable = SC.GetValue($"System.MediumGuidePinEnable"); BasePressure = SC.GetValue($"{mod}.ChamberBasePressureThreshold"); BaseTemperature = SC.GetValue($"{mod}.ChamberBaseTemperatureThreshold"); _smallWafer = SC.GetValue($"System.SmallWafer"); _midWafer = SC.GetValue($"System.MidWafer"); _bigWafer = SC.GetValue($"System.BigWafer"); EnableBiasRF = SC.GetValue($"{Module}.BiasRf.EnableBiasRF"); for (int i = 1; i <= 5; i++) { if (SC.GetValue($"{Module}.MfcGas{i}.Enable")) gasCount++; } //_gasLines = new IoGasStick[gasCount]; _gasLines = new IoGasStick[5]; //for (int index = 0; index < gasCount; index++) //{ // _gasLines[index] = DEVICE.GetDevice($"{Module}.GasStick{index + 1}"); //} for (int index = 0; index < 5; index++) { _gasLines[index] = DEVICE.GetDevice($"{Module}.GasStick{index + 1}"); } _Lid = DEVICE.GetDevice($"{Module}.{VirgoDevice.Lid}"); //_LidLocker = DEVICE.GetDevice($"{Module}.{VirgoDevice.LidLocker}"); _Messager = DEVICE.GetDevice($"{Module}.Messager"); _ATM_sw = DEVICE.GetDevice($"{Module}.SensorATMSwitch"); _N2Pressure_sw = DEVICE.GetDevice($"{Module}.N2PressureOk"); _VAC_sw = DEVICE.GetDevice($"{Module}.SensorVacSwitch"); _WLK_sw = DEVICE.GetDevice($"{Module}.SensorWaterLeakOk"); _CDAPressure = DEVICE.GetDevice($"{Module}.SensorCDAPressureOk"); _CoolantInletTC = DEVICE.GetDevice($"{Module}.SensorCoolantInletTCOK"); _CoolantOutletTC = DEVICE.GetDevice($"{Module}.SensorCoolantOutletTCOK"); _ArmNotExtend = DEVICE.GetDevice($"{Module}.SensorArmNotExtend"); _RFG_Interlock = DEVICE.GetDevice($"{Module}.GeneratorInterlock"); _pressureController = DEVICE.GetDevice($"{Module}.{VirgoDevice.PressureControl}"); _SubstrateTC = DEVICE.GetDevice($"{Module}.HeaterChamber"); _ForelineTC = DEVICE.GetDevice($"{Module}.ForelineHeater"); _SoftPumpValve = DEVICE.GetDevice($"{Module}.{VirgoDevice.ValveSoftPumping}"); _FastPumpValve = DEVICE.GetDevice($"{Module}.{VirgoDevice.ValveFastPumping}"); _ProcessValve = DEVICE.GetDevice($"{Module}.{VirgoDevice.ValveProcess}"); _FastVentValve = DEVICE.GetDevice($"{Module}.{VirgoDevice.ValveFastVent}"); _PurgeValve = DEVICE.GetDevice($"{Module}.{VirgoDevice.ValveChamberPurge}"); _Mfc1Valve = DEVICE.GetDevice($"{Module}.{VirgoDevice.ValveMfc1}"); _Mfc2Valve = DEVICE.GetDevice($"{Module}.{VirgoDevice.ValveMfc2}"); _Mfc3Valve = DEVICE.GetDevice($"{Module}.{VirgoDevice.ValveMfc3}"); _Mfc4Valve = DEVICE.GetDevice($"{Module}.{VirgoDevice.ValveMfc4}"); _Mfc5Valve = DEVICE.GetDevice($"{Module}.{VirgoDevice.ValveMfc5}"); _slitDoor = DEVICE.GetDevice($"{Module}.{VirgoDevice.SlitDoor}"); _LiftPin = DEVICE.GetDevice($"{Module}.{VirgoDevice.LiftPin}"); _PinSmall = DEVICE.GetDevice($"{Module}.{VirgoDevice.SmallPin}"); _PinMedium = DEVICE.GetDevice($"{Module}.{VirgoDevice.MediumPin}"); _Generator = DEVICE.GetDevice($"{Module}.{VirgoDevice.Rf}"); _GeneratorBias = DEVICE.GetDevice($"{Module}.{VirgoDevice.BiasRf}"); _MainPump = DEVICE.GetDevice($"{Module}.{VirgoDevice.MainPump}"); _Chiller = DEVICE.GetDevice($"{Module}.{VirgoDevice.Chiller}"); _gridChiller = DEVICE.GetDevice($"{Module}.GridChiller"); _gridHeater = DEVICE.GetDevice($"{Module}.GridHeater"); _gridHeater.Controller = (IoHeaterController)_gridChiller; // RS223 AdTec Generator if (SC.GetValue($"{mod}.Rf.CommunicationType") == (int)CommunicationType.RS232 && SC.GetValue($"{mod}.Rf.MFG") == (int)GeneratorMFG.AdTec) { _Generator = DEVICE.GetDevice($"{Module}.{VirgoDevice.Rf}"); } if (SC.GetValue($"{mod}.DryPump.MFG") == (int)DryPumpMFG.Kashiyama) { _MainPump = DEVICE.GetDevice($"{Module}.{VirgoDevice.MainPump}"); } // Ethernet Comet Generator Bias if (SC.GetValue($"{mod}.BiasRf.EnableBiasRF") && SC.GetValue($"{mod}.BiasRf.CommunicationType") == (int)CommunicationType.Ethernet && SC.GetValue($"{mod}.BiasRf.MFG") == (int)GeneratorMFG.Comet) { _GeneratorBias = DEVICE.GetDevice($"{Module}.{VirgoDevice.BiasRf}"); } // RS223 AdTec Generator Bias if (SC.GetValue($"{mod}.BiasRf.EnableBiasRF") && SC.GetValue($"{mod}.BiasRf.CommunicationType") == (int)CommunicationType.RS232 && SC.GetValue($"{mod}.BiasRf.MFG") == (int)GeneratorMFG.AdTec) { _GeneratorBias = DEVICE.GetDevice($"{Module}.{VirgoDevice.BiasRf}"); } // RS232 AdTec match if (SC.GetValue($"{mod}.match.CommunicationType") == (int)CommunicationType.RS232 && SC.GetValue($"{mod}.match.MFG") == (int)MatchMFG.AdTec) { _Match = DEVICE.GetDevice($"{Module}.{VirgoDevice.Match}"); } // RS232 Dry pump, SKY if (SC.GetValue($"{mod}.DryPump.CommunicationType") == (int)CommunicationType.RS232) { if (SC.GetValue($"{mod}.DryPump.MFG") == (int)DryPumpMFG.SKY) { _MainPump = DEVICE.GetDevice($"{Module}.{VirgoDevice.MainPump}"); } else if (SC.GetValue($"{mod}.DryPump.MFG") == (int)DryPumpMFG.Edwards) { _MainPump = DEVICE.GetDevice($"{Module}.{VirgoDevice.MainPump}"); } } if (SC.GetValue($"{mod}.Chiller.EnableChiller") && SC.GetValue($"{mod}.Chiller.CommunicationType") == (int)CommunicationType.RS232 && SC.GetValue($"{mod}.Chiller.MFG") == (int)ChillerMFG.SMC) { _Chiller = DEVICE.GetDevice($"{Module}.{VirgoDevice.Chiller}"); } System.Diagnostics.Debug.Assert(null != _Generator); System.Diagnostics.Debug.Assert(null != _MainPump); if (SC.GetValue($"{Module}.BiasRf.EnableBiasRF")) { System.Diagnostics.Debug.Assert(null != _GeneratorBias); } WaferManager.Instance.SubscribeLocation(Module, 1); } public override bool Initialize() { base.Initialize(); DATA.Subscribe($"{Name}.IoTemperatureCtrl.TemperatureControl.SubstrateTemperature", () => SubstrateTempFB); DATA.Subscribe($"{Module}.WaferSize", () => WaferManager.Instance.GetWafer(Module, 0).Size.ToString()); DATA.Subscribe($"{Module}.EnableBiasRF", () => EnableBiasRF); return true; } // -----------------------------Method------------------------- // public override void Home() { // 与yp讨论过,PM 初始化不需要 SetLiftPin(MovementPosition.Down, out _); //SetSlitDoor(false, out _); if (WaferManager.Instance.CheckNoWafer(Module, 0)) { SetGuidePinSmall(MovementPosition.Down); SetGuidePinMedium(MovementPosition.Down); } if (IsSlitDoorClosed) { SetSlitDoor(false, out _); } else if (!IsSlitDoorClosed) { SetSlitDoor(false, out _); } else if (_slitDoor.State == CylinderState.Error) { SetSlitDoor(true, out _); } if (SC.GetValue($"{Module}.BiasRf.EnableBiasRF")) { _Messager.SetMessager(1); //Virgo B } else { _Messager.SetMessager(0); //Virgo A } } public void SetSlitDoor(bool open, out string reason) { reason = string.Empty; // [XIAHUAN]: 只在关门的时候检查arm not extend if (!open && !IsArmNotExtend) { EV.PostAlarmLog(Module.ToString(), "Arm Not Extend 信号不满足"); return; } _slitDoor.SetCylinder(open, out reason); } public override bool CheckWaterLeak() { return _WLK_sw.Value; } public override bool CheckCDAOK() { return _CDAPressure.Value; } public override bool CheckCoolantInletTCOK() { return _CoolantInletTC.Value; } public override bool CheckCoolantOutletTCOK() { return _CoolantOutletTC.Value; } public override bool CheckArmExtendOK() { return _ArmNotExtend.Value; } public override bool CheckAtm() { return _ATM_sw.Value && ChamberPressure > 700000; } public override bool CheckVacuum() { return _VAC_sw.Value && ChamberPressure < 100; } public bool CheckSlitDoorOpen() { return _slitDoor.State == CylinderState.Open; } public bool CheckSlitDoorClose() { return _slitDoor.State == CylinderState.Close; } public bool CheckLiftUp() { return _LiftPin.State == CylinderState.Open; } public bool CheckLiftDown() { return _LiftPin.State == CylinderState.Close; } public void StartPump(bool on) { //_pressureController.StartPump(on); _MainPump?.SetPumpOnOff(on); } public void SetValveOnOff(ValveType vlvType, bool on) { switch (vlvType) { case ValveType.PROCESS: _ProcessValve.TurnValve(on, out _); break; case ValveType.FAST_PUMP: _FastPumpValve.TurnValve(on, out _); break; case ValveType.SOFT_PUMP: _SoftPumpValve.TurnValve(on, out _); break; case ValveType.FAST_VENT: _FastVentValve.TurnValve(on, out _); break; case ValveType.PURGE: _PurgeValve.TurnValve(on, out _); break; case ValveType.Mfc1: _Mfc1Valve.TurnValve(on, out _); break; case ValveType.Mfc2: _Mfc2Valve.TurnValve(on, out _); break; case ValveType.Mfc3: _Mfc3Valve.TurnValve(on, out _); break; case ValveType.Mfc4: _Mfc4Valve.TurnValve(on, out _); break; case ValveType.Mfc5: _Mfc5Valve.TurnValve(on, out _); break; default: throw new ArgumentOutOfRangeException($"Argument error {vlvType}-{on}"); } } public void CheckPressureStability() { IsPressureToleranceEnabled = true; } public override void Monitor() { foreach (var gas in _gasLines) { gas.Monitor(); } _trigBasePressure.CLK = ChamberPressurePressure >= BasePressure; if (SC.GetValue($"{Module}.Chiller.EnableChiller")) { _trigBaseTemperature.CLK = CoolantOutletTempFB >= BaseTemperature; } else { _trigBaseTemperature.CLK = SubstrateTempFB >= BaseTemperature; } if (_trigBasePressure.Q) EV.PostMessage(Module.ToString(), EventEnum.DefaultAlarm, "PM pressure out of tolerance"); if (_trigBaseTemperature.Q) EV.PostMessage(Module.ToString(), EventEnum.DefaultAlarm, "PM temperature out of tolerance"); _trigWaterFlowCloseChiller.CLK = SC.GetValue($"{Module}.Chiller.EnableChiller") && !CheckWaterLeak() && _Chiller != null && _Chiller.IsRunning; if (_trigWaterFlowCloseChiller.Q) { Aitex.Core.RT.Log.LOG.Info("Turn off chiller by water leak"); _Chiller.SetChillerOnOff(false); } } public void CloseValves() { _SoftPumpValve.TurnValve(false, out _); _FastPumpValve.TurnValve(false, out _); _ProcessValve.TurnValve(false, out _); _PurgeValve.TurnValve(false, out _); _FastVentValve.TurnValve(false, out _); _PurgeValve.TurnValve(false, out _); _Mfc1Valve.TurnValve(false, out _); _Mfc2Valve.TurnValve(false, out _); _Mfc3Valve.TurnValve(false, out _); _Mfc4Valve.TurnValve(false, out _); _Mfc5Valve.TurnValve(false, out _); foreach (var stick in _gasLines) { stick.Stop(); } } public bool FlowGas(int gasNum, double val) { if (_gasLines.Length <= gasNum) return false; _gasLines[gasNum].Flow(val); return true; } public void StopAllGases() { foreach (var line in _gasLines) { line.Stop(); } } public bool SetLiftPin(MovementPosition dirt, out string reason) { reason = string.Empty; switch (dirt) { case MovementPosition.Down: return _LiftPin.SetCylinder(false, out reason); case MovementPosition.Up: return _LiftPin.SetCylinder(true, out reason); case MovementPosition.Left: case MovementPosition.Right: case MovementPosition.Middle: throw new ArgumentException("Movement argument error"); } return true; } public void SetGuidePin(WaferSize ws, MovementPosition dirt) { if (ws == WaferSize.WS3) SetGuidePinSmall(dirt); else if (ws == WaferSize.WS4) SetGuidePinMedium(dirt); } public void PrepareGuidePinForPlace(WaferSize ws) { if (ws == WaferSize.WS3) { SetGuidePinSmall(MovementPosition.Up); SetGuidePinMedium(MovementPosition.Down); } else if (ws == WaferSize.WS4) { SetGuidePinSmall(MovementPosition.Down); SetGuidePinMedium(MovementPosition.Up); } else if (ws == WaferSize.WS6) { SetGuidePinSmall(MovementPosition.Down); SetGuidePinMedium(MovementPosition.Down); } } public bool CheckGuidePinIsReadyForTransfer(WaferSize ws) { if (ws == WaferSize.WS3) { return SmallPosition == MovementPosition.Up && MediumPosition == MovementPosition.Down; } else if (ws == WaferSize.WS4) { return SmallPosition == MovementPosition.Down && MediumPosition == MovementPosition.Up; } else if (ws == WaferSize.WS6) { return SmallPosition == MovementPosition.Down && MediumPosition == MovementPosition.Down; } //else if (ws == WaferSize.WS8) //{ // return SmallPosition == MovementPosition.Down && MediumPosition == MovementPosition.Down; //} else return false; } private void SetGuidePinSmall(MovementPosition dirt) { if (_smallGuidePinEnable) { EV.PostInfoLog(Module.ToString(), $"set small pin {dirt}, smallWafer={_smallWafer}"); switch (dirt) { case MovementPosition.Down: if (_smallWafer != 0) _PinSmall?.SetCylinder(false, out _); break; case MovementPosition.Up: if (_smallWafer != 0) _PinSmall?.SetCylinder(true, out _); break; default: throw new ArgumentException("Movement argument error"); } } else { _smallGuidePinDummyPos = dirt; } } private void SetGuidePinMedium(MovementPosition dirt) { if(_mediumGuidePinEnable) { EV.PostInfoLog(Module.ToString(), $"set medium pin {dirt}, midWafer={_midWafer}"); switch (dirt) { case MovementPosition.Down: if (_midWafer != 0) _PinMedium?.SetCylinder(false, out _); break; case MovementPosition.Up: if (_midWafer != 0) _PinMedium?.SetCylinder(true, out _); break; default: throw new ArgumentException("Movement argument error"); } } else { _mediumGuidePinDummyPos = dirt; } } public void SetGeneratorCommunicationMode(int mode) { _Generator?.SetCommunicationMode(mode); } public bool GeneratorPowerOn(bool on) { if (_Generator == null) return false; if (on && !IsRFGInterlockOn) { EV.PostAlarmLog(Module.ToString(), "射频电源 Interlock条件不满足"); return false; } return _Generator.SetPowerOnOff(on, out _); } public bool GeneratorSetpower(float val) { if (_Generator == null) return false; if (Math.Abs(val) > 0.01) _Generator.SetPower((ushort)val); return true; } public bool GeneratorBiasPowerOn(bool on) { if (_GeneratorBias == null) return false; if (on && !IsRFGInterlockOn) { EV.PostAlarmLog(Module.ToString(), "Bias射频电源 Interlock条件不满足"); return false; } return _GeneratorBias.SetPowerOnOff(on, out _); } public bool GeneratorBiasSetpower(float val) { if (_GeneratorBias == null) return false; if (Math.Abs(val) > 0.01) _GeneratorBias.SetPower((ushort)val); return true; } public bool GeneratorBiasSetMatchMode(bool val) { if (_GeneratorBias == null) return false; string reason = string.Empty; _GeneratorBias.SetMatchingAutoMode(val, out reason); return true; } public bool SetMatchPosition(float c1, float c2) { if (_Match == null) return false; string reason = string.Empty; _Match.SetMatchPosition(c1, c2, out reason); return true; } public bool SetBiasMatchPosition(float c1, float c2) { if (_GeneratorBias == null) return false; string reason = string.Empty; _GeneratorBias.SetMatchPosition(c1, c2, out reason); return true; } public void FullOpenTV() { _pressureController.FullOpenThrottleValve(); } public void HeatSubstrate(double val) { _SubstrateTC?.RampTemp((float)val); _SubstrateTC?.TurnOnOff(true); } public void HeatChiller(double value, double offset) { _Chiller?.SetChillerTemp((float)value, (float)offset); _Chiller?.SetChillerOnOff(true); } public bool CheckChillerStatus() { return _Chiller != null && _Chiller.IsRunning && !_Chiller.IsError; } public void HeatForeline(double val) { _ForelineTC?.RampTemp((float)val); } public override bool CheckEnableTransfer(EnumTransferType type) { if (type == EnumTransferType.Pick) { return _slitDoor.State == CylinderState.Open && _LiftPin.State == CylinderState.Open; } if (type == EnumTransferType.Place) { return _slitDoor.State == CylinderState.Open && _LiftPin.State == CylinderState.Close; } return false; } public bool CheckEnableTransfer(EnumTransferType type, WaferSize waferSize) { bool guidePinIsOk = CheckGuidePinIsReadyForTransfer(waferSize); bool pressureIsOk = CheckSlitDoorOpen() || IsATM; if (type == EnumTransferType.Pick) { return _LiftPin.State == CylinderState.Open && pressureIsOk && CheckGuidePinIsReadyForTransfer(waferSize); } if (type == EnumTransferType.Place) { return _LiftPin.State == CylinderState.Close && pressureIsOk && CheckGuidePinIsReadyForTransfer(waferSize); } return false; } public override void TransferHandoff(EnumTransferType type) { switch (type) { case EnumTransferType.Pick: SetLiftPin(MovementPosition.Up, out _); break; case EnumTransferType.Place: SetLiftPin(MovementPosition.Down, out _); break; case EnumTransferType.Extend: break; case EnumTransferType.Retract: break; default: break; } } public override void Reset() { _trigBasePressure.RST = true; _trigBaseTemperature.RST = true; } } /// /// PM Action /// abstract class PmActionBase : ActionBase { protected internal JetPM _chamber; protected PmActionBase(ModuleName mod, JetPM pm) : base(mod) { _chamber = pm; } } class PinAction : PmActionBase { public MovementPosition Pos { get; } public bool IsWaferTransfered { get; } public PMEntity PmEntity { get; set; } private Hand _blade; private bool _isPick; private bool _delay; public PinAction(ModuleName mod, JetPM pm, MovementPosition pos, bool isTransferWafer, Hand blade, bool isPick, bool isDelay) : base(mod, pm) { this.Pos = pos; IsWaferTransfered = isTransferWafer; _blade = blade; _isPick = isPick; _delay = isDelay; } public override void Execute() { if (Module == ModuleName.PMA) PmEntity = Singleton.Instance.PMA; else if (Module == ModuleName.PMB) PmEntity = Singleton.Instance.PMB; if (PmEntity != null) { EV.PostInfoLog(Module.ToString(), $"开始执行 Delayrecorder"); PmEntity.PostMsg(PMEntity.MSG.MoveLiftPin, Pos, ID, _isPick, _delay); } } public override void OnPostWork(string data = null) { if (IsWaferTransfered) { if (Pos == MovementPosition.Up) { WaferManager.Instance.WaferMoved(ModuleName.EfemRobot, _blade==Hand.Blade1 ? 0 : 1, Module, 0); } else { WaferManager.Instance.WaferMoved(Module, 0, ModuleName.EfemRobot, _blade == Hand.Blade1 ? 0 : 1); } } } } class SlitDoorAction : PmActionBase { public PMEntity PmEntity { get; set; } private bool _isOpen; public SlitDoorAction(ModuleName mod, JetPM pm, bool isOpen ) : base(mod, pm) { _isOpen = isOpen; } public override void Execute() { if (Module == ModuleName.PMA) PmEntity = Singleton.Instance.PMA; else if (Module == ModuleName.PMB) PmEntity = Singleton.Instance.PMB; if (PmEntity != null) { if (_isOpen) { PmEntity.PostMsg(PMEntity.MSG.OpenSlitDoor, ID ); } else { PmEntity.PostMsg(PMEntity.MSG.CloseSlitDoor, ID); } } } public override void OnPostWork(string data = null) { } } }