{"text_format":"3","workbook":"xls","n_sheets":5,"sheets":["Revision","DI-DO"," interlock -HW"," interlock-SW","Sheet1"],"not_rendered":{"images":1},"read":"whole","date_system":"1900","formulas":"cached_only"}

{"sheet":"Revision","index":0,"n_rows":5,"n_cols":6,"rows_kept":5,"merged":[[0,0,0,6],[1,0,1,6],[2,0,2,1],[2,2,2,6],[3,0,3,1],[3,2,3,3],[3,5,3,6],[4,0,14,6]],"flags":["formulas_cached_only"]}
["上海稷以科技有限公司\nSHANGHAI JETPLASMA CO.,LTD\n上海市闵行区莲花南路2899号\nNo.2899, Lianhua Road(s.), Minhang District, Shanghai\nTel: 021-34125995   Web: www.jetplasma.com"]
["EE BOM修改记录"]
["System Model",null,"JET 1LP EFEM"]
["Revision",null,"V1.0",null,"Date","2022-11-15"]
["\n1、1LP配置作如下修改：\nDI-55~DI-63 功能修改,变更为Open CST检测信号。\nDI-37\\DI-49\\DI-51功能取消；\nDO-40 ROB PAUSE 功能取消 ，DO-51 Robot Safety to LP2功能取消。\nDI-11~DI-28功能备用。\nDO-13~DO-30功能备用。\n新增DI-38 CST door CLOSED信号。\n新增DO-52 LEAK\\DO-53 CDA状态to PM功能。"]

{"sheet":"DI-DO","index":1,"n_rows":65,"n_cols":16,"rows_kept":65,"flags":["formulas_cached_only"]}
["DI","ID","CONNECT","Name","Note","Postion (NO Power)","Location","Logic Note","#.DO","ID","CONNECT","Name","EV No.","Note","Location","Logic Note"]
["DI-00","DI-00",null,"Water Leak SW",null,null,"w20.00","1=OK，0=warning","DO-00","DO-00",null,"Yellow light",null,null,"w0.00","valve on==1,valve off ==0"]
["DI-01","DI-01",null,"Water Flow SW",null,null,"w20.01","1=OK，0=war ning","DO-01","DO-01",null,"Green light",null,null,"w0.01","valve on==1,valve off ==0"]
["DI-02","DI-02",null,"Grating Sensor IN1","可选项 TRUTH / FALSE",null,"w20.02","1=OK，0=alarm，Interlock","DO-02","DO-02",null,"Red light",null,null,"w0.02","valve on==1,valve off ==0"]
["DI-03","DI-03",null,"SPARE",null,null,"w20.03",null,"DO-03","DO-03",null,"Bule light",null,null,"w0.03","valve on==1,valve off ==0"]
["DI-04","DI-04",null,"SPARE",null,null,"w20.04",null,"DO-04","DO-04",null,"Buzzer1",null,null,"w0.04","valve on==1,valve off ==0"]
["DI-05","DI-05",null,"C1_Lift Pin Up_Sensor",null,null,"w20.05","1=on,0=off","DO-05","DO-05",null,"Buzzer2",null,null,"w0.05","valve on==1,valve off ==0"]
["DI-06","DI-06",null,"C1_Lift Pin Down_Sensor",null,null,"w20.06","1=on,0=off","DO-06","DO-06",null,"SPARE",null,null,"w0.06"]
["DI-07","DI-07",null,"C1_Guide Pin Small Up_Sensor",null,null,"w20.07","1=on,0=off","DO-07","DO-07",null,"C1_Lift Pin Up_SV","EV01/U",null,"w0.07","LF PIN UP- Cooling SV-1"]
["DI-08","DI-10",null,"C1_Guide Pin Small Down_Sensor",null,null,"w20.08","1=on,0=off","DO-08","DO-10",null,"C1_Lift Pin Down_SV","EV01/D",null,"w0.08","LF PIN DN- Cooling SV-1"]
["DI-09","DI-11",null,"C1_Guide Pin Medium Up_Sensor",null,null,"w20.09","1=on,0=off","DO-09","DO-11",null,"C1_Guide Pin Small Up_SV","EV02/U",null,"w0.09","SPARE"]
["DI-10","DI-12",null,"C1_Guide Pin Medium Down_Sensor",null,null,"w20.10","1=on,0=off","DO-10","DO-12",null,"C1_Guide Pin Small  Down_SV","EV02/D",null,"w0.10","SPARE"]
["DI-11","DI-13",null,"C2_Lift Pin Up_Sensor","SPARE",null,"w20.11","1=on,0=off","DO-11","DO-13",null,"C1_Guide Pin Medium Up_SV","EV03/U",null,"w0.11","SPARE"]
["DI-12","DI-14",null,"C2_Lift Pin Down_Sensor","SPARE",null,"w20.12","1=on,0=off","DO-12","DO-14",null,"C1_Guide Pin Medium Down_SV","EV03/D",null,"w0.12","SPARE"]
["DI-13","DI-15",null,"C2_Guide Pin Small Up_Sensor","SPARE",null,"w20.13","1=on,0=off","DO-13","DO-15",null,"C2_Lift Pin Up_SV","EV04/U","SPARE","w0.13","LF PIN UP- Cooling SV-2"]
["DI-14","DI-16",null,"C2_Guide Pin Small Down_Sensor","SPARE",null,"w20.14","1=on,0=off","DO-14","DO-16",null,"C2_Lift Pin Down_SV","EV04/D","SPARE","w0.14","LF PIN DN- Cooling SV-2"]
["DI-15","DI-17",null,"C2_Guide Pin Medium Up_Sensor","SPARE",null,"w20.15","1=on,0=off","DO-15","DO-17",null,"C2_Guide Pin Small Up_SV","EV05/U","SPARE","w0.15","SPARE"]
["DI-16","DI-20",null,"C2_Guide Pin Medium Down_Sensor","SPARE",null,"w21.00","1=on,0=off","DO-16","DO-20",null,"C2_Guide Pin Small Down_SV","EV05/D","SPARE","w1.00","SPARE"]
["DI-17","DI-21",null,"A1_Lift Pin Up_Sensor","SPARE",null,"w21.01","1=on,0=off","DO-17","DO-21",null,"C2_Guide Pin Medium Up_SV","EV06/U","SPARE","w1.01","SPARE"]
["DI-18","DI-22",null,"A1_Lift Pin Down_Sensor","SPARE",null,"w21.02","1=on,0=off","DO-18","DO-22",null,"C2_Guide Pin Medium Down_SV","EV06/D","SPARE","w1.02","SPARE"]
["DI-19","DI-23",null,"A1_Guide Pin Small Up_Sensor","SPARE",null,"w21.03","1=on,0=off","DO-19","DO-23",null,"A1_Lift Pin Up_SV","EV07/U","SPARE","w1.03","LF PIN UP- Aligner SV-1"]
["DI-20","DI-24",null,"A1_Guide Pin Small Down_Sensor","SPARE",null,"w21.04","1=on,0=off","DO-20","DO-24",null,"A1_Lift Pin Down_SV","EV07/D","SPARE","w1.04","LF PIN DN- Aligner SV-1"]
["DI-21","DI-25",null,"A1_Guide Pin Medium Up_Sensor","SPARE",null,"w21.05","1=on,0=off","DO-21","DO-25",null,"A1_Guide Pin Small Up_SV","EV08/U","SPARE","w1.05","SPARE"]
["DI-22","DI-26",null,"A1_Guide Pin Medium Down_Sensor","SPARE",null,"w21.06","1=on,0=off","DO-22","DO-26",null,"A1_Guide Pin Small Down_SV","EV08/D","SPARE","w1.06","SPARE"]
["DI-23","DI-27",null,"A2_Lift Pin Up_Sensor","SPARE",null,"w21.07","1=on,0=off","DO-23","DO-27",null,"A1_Guide Pin Medium Up_SV","EV09/U","SPARE","w1.07","SPARE"]
["DI-24","DI-30",null,"A2_Lift Pin Down_Sensor","SPARE",null,"w21.08","1=on,0=off","DO-24","DO-30",null,"A1_Guide Pin Medium Down_SV","EV09/D","SPARE","w1.08","SPARE"]
["DI-25","DI-31",null,"A2_Guide  Pin Small Up_Sensor","SPARE",null,"w21.09","1=on,0=off","DO-25","DO-31",null,"A2_Lift Pin Up_SV","EV10/U","SPARE","w1.09","LF PIN UP- Aligner SV-2"]
["DI-26","DI-32",null,"A2_Guide Pin Small Down_Sensor","SPARE",null,"w21.10","1=on,0=off","DO-26","DO-32",null,"A2_Lift Pin Down_SV","EV10/D","SPARE","w1.10","LF PIN DN- Aligner SV-2"]
["DI-27","DI-33",null,"A2_Guide Pin Medium Up_Sensor","SPARE",null,"w21.11","1=on,0=off","DO-27","DO-33",null,"A2_Guide Pin Small Up_SV","EV11/U","SPARE","w1.11","SPARE"]
["DI-28","DI-34",null,"A2_Guide Pin Medium Down_Sensor","SPARE",null,"w21.12","1=on,0=off","DO-28","DO-34",null,"A2_Guide Pin Small Down_SV","EV11/D","SPARE","w1.12","SPARE"]
["DI-29","DI-35",null,"SPARE",null,null,"w21.13",null,"DO-29","DO-35",null,"A2_Guide Pin Medium Up_SV","EV12/U","SPARE","w1.13","SPARE"]
["DI-30","DI-36",null,"FFU alarm",null,null,"w21.14","1=OK，0=warning","DO-30","DO-36",null,"A2_Guide Pin Medium Down_SV","EV12/D","SPARE","w1.14","SPARE"]
["DI-31","DI-37",null,"CDA Pressure SW",null,null,"w21.15","1=OK，0=alarm","DO-31","DO-37",null,"SPARE",null,null,"w1.15"]
["DI-32","DI-40",null,"VAC Pressure SW",null,null,"w22.00","1=OK，0=alarm","DO-32","DO-40",null,"SPARE",null,null,"w2.00"]
["DI-33","DI-41",null,"ION CDA  Pressure SW",null,null,"w22.01","1=OK，0=warning","DO-33","DO-41",null,"SPARE",null,null,"w2.01"]
["DI-34","DI-42",null,"ION Alarm SIGNAL",null,null,"w22.02","1=OK，0=warning；DO-34ON 即ION STOP 时不做报警","DO-34","DO-42",null,"Ionizer Interrupt",null,null,"w2.02","stop Ionizer working"]
["DI-35","DI-43",null,"EFEM Side Door  OPEN","0 / 1 可取反",null,"w22.03","0=OK，1=alarm,Interlock-HW","DO-35","DO-43",null,"SPARE",null,null,"w2.03"]
["DI-36","DI-44",null,"PMA System Interlock (Door Open OPEN)",null,null,"w22.04","1=OK，0=alarm,Interlock TO RB IN","DO-36","DO-44",null,"SPARE",null,null,"w2.04"]
["DI-37","DI-45",null,"PMB System Interlock (Door Open OPEN)","SPARE",null,"w22.05","1=OK，0=alarm,Interlock TO RB IN","DO-37","DO-45",null,"SPARE",null,null,"w2.05"]
["DI-38","DI-46",null,"CST Door Closed",null,null,"w22.06","1=OK，0=warnig,Interlock TO RB IN","DO-38","DO-46",null,"SPARE",null,null,"w2.06"]
["DI-39","DI-47",null,"RUN Mode","0 / 1 可取反",null,"w22.07","1=on,0=off","DO-39","DO-47",null,"SPARE",null,null,"w2.07"]
["DI-40","DI-50",null,"EFEM Power ON",null,null,"w22.08","1=on,0=off","DO-40","DO-50",null,"Pause/Resume to Robot  (ON PAUSE)",null,"SPARE","w2.08"]
["DI-41","DI-51",null,"SPARE",null,null,"w22.09",null,"DO-41","DO-51",null,"SPARE",null,null,"w2.09"]
["DI-42","DI-52",null,"SPARE",null,null,"w22.10",null,"DO-42","DO-52",null,"SPARE",null,null,"w2.10"]
["DI-43","DI-53",null,"Robot   EMS  to EFEM",null,null,"w22.11","1=Normal,0=alarm","DO-43","DO-53",null,"SPARE",null,null,"w2.11"]
["DI-44","DI-54",null,"SPARE",null,null,"w22.12","1=OK，0=alarm","DO-44","DO-54",null,"SPARE",null,null,"w2.12"]
["DI-45","DI-55",null,"Robot Teaching Mode to EFEM","机器人示教器使用中",null,"w22.13","1=on,0=off。ON时，若人员操作软件控制robot需warning。","DO-45","DO-55",null,"SPARE",null,null,"w2.13"]
["DI-46","DI-56",null,"SPARE",null,null,"w22.14","1=on,0=off","DO-46","DO-56",null,"SPARE",null,null,"w2.14"]
["DI-47","DI-57",null,"SPARE",null,null,"w22.15","1=on,0=off","DO-47","DO-57",null,"SPARE",null,null,"w2.15"]
["DI-48","DI-60",null,"RB Not Extend to PM",null,null,"w23.00","1=on,0=off","DO-48","DO-60",null,"SPARE",null,null,"w3.00"]
["DI-49","DI-61",null,"RB Not Extend to PMB","SPARE",null,"w23.01","1=on,0=off","DO-49","DO-61",null,"SPARE",null,null,"w3.01"]
["DI-50","DI-62",null,"RB Not Extend to LP",null,null,"w23.02","1=on,0=off","DO-50","DO-62",null,"Robot Safety to LP",null,null,"w3.02","DI50为1，判断无异常突片报警时，置1"]
["DI-51","DI-63",null,"RB Not Extend to LP2","SPARE",null,"w23.03","1=on,0=off","DO-51","DO-63",null,"Robot Safety to LP2",null,null,"w3.03"]
["DI-52","DI-64",null,"SPARE",null,null,"w23.04","1=on,0=off","DO-52","DO-64",null,"Water Leak OK to PM",null,null,"w3.04","Water Leak OK to PM"]
["DI-53","DI-65",null,"SPARE",null,null,"w23.05","1=on,0=off","DO-53","DO-65",null,"CDA PRESSURE OK to PM",null,null,"w3.05","CDA PRESSURE OK to PM"]
["DI-54","DI-66",null,"SPARE",null,null,"w23.06",null,"DO-54","DO-66",null,"SPARE",null,null,"w3.06"]
["DI-55","DI-67",null,"Small Size Present_Sensor",null,null,"w23.07","1=on,0=off","DO-55","DO-67",null,"SPARE",null,null,"w3.07"]
["DI-56","DI-70",null,"Small Wafer Protrusion1",null,null,"w23.08","1=on,0=off","DO-56","DO-70",null,"SPARE",null,null,"w3.08"]
["DI-57","DI-71",null,"Small Wafer Protrusion2",null,null,"w23.09","1=on,0=off","DO-57","DO-71",null,"SPARE",null,null,"w3.09"]
["DI-58","DI-72",null,"Medium  Size Present_Sensor",null,null,"w23.10",null,"DO-58","DO-72",null,"SPARE",null,null,"w3.10"]
["DI-59","DI-73",null,"Medium Wafer Protrusion1",null,null,"w23.11",null,"DO-59","DO-73",null,"SPARE",null,null,"w3.11"]
["DI-60","DI-74",null,"Medium  Wafer Protrusion2",null,null,"w23.12","1=on,0=off","DO-60","DO-74",null,"SPARE",null,null,"w3.12"]
["DI-61","DI-75",null,"Big Size Present_Sensor",null,null,"w23.13","1=on,0=off","DO-61","DO-75",null,"SPARE",null,null,"w3.13"]
["DI-62","DI-76",null,"Big Wafer Protrusion1",null,null,"w23.14","1=on,0=off","DO-62","DO-76",null,"SPARE",null,null,"w3.14"]
["DI-63","DI-77",null,"Big Wafer Protrusion2",null,null,"w23.15",null,"DO-63","DO-77",null,"SPARE",null,null,"w3.15"]

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["CONDITION"]
["INTERLOCK",null,null,"EFEM to Robot",{"$nulls":4},"EFEM to PMA","EFEM to PMB","EFEM to LP1","EFEM to LP2"]
[{"$nulls":3},"Main Power OFF","Safety to LP1","Safety to LP2","Safety to PMA","Safety to PMB","PMA Safety to \nclose door","PMA Safety to \nclose door"," LP1 Interlock DI"," LP2 Interlock DI"]
["EFEM DI",null,"EFEM Side Panel Closed","T1","T1","T1","T1","T1","T1","T1"]
["EFEM DI",null,"Grating Sensor IN1 (NO USE )",{"$nulls":7},"T1","T1"]
["PMA to EFEM",null," PMA System Interlock (slit door open)",{"$nulls":3},"T2"]
["PMB to EFEM",null," PMB System Interlock (slit door open)",{"$nulls":4},"T2"]
["LP1 to EFEM",null,"LP DOOR1  OPEN",null,"T2",null,"T2"]
["LP1 to EFEM",null,"LP1 POD PRESENT",null,"T3",null,"T3"]
["LP1 to EFEM",null,"LP1 READY",null,"T4",null,"T4"]
["LP2 to EFEM",null,"LP DOOR2  OPEN",null,null,"T2",null,"T2"]
["LP2 to EFEM",null,"LP2 POD PRESENT",null,null,"T3",null,"T3"]
["LP2 to EFEM",null,"LP2 READY",null,null,"T4",null,"T4"]
["RB to EFEM",null,"RB Not Extend PMA",{"$nulls":5},"T2"]
["RB to EFEM",null,"RB Not Extend PMB",{"$nulls":6},"T2"]
["RB to EFEM",null,"RB Not Extend LP1",{"$nulls":7},"T2"]
["RB to EFEM",null,"RB Not Extend LP2",{"$nulls":8},"T2"]
["Logic",null,null,"If T1=1, it is enable","If T1*T2*T3*T4=1 it is enable","If T1*T2*T3*T4=1 it is enable","If T1*T2=1 it is enable","If T1*T2=1 it is enable","If T1*T2=1 it is enable","If T1*T2=1 it is enable","If T1=0orT2=0, \nLP1 Cannot Move","If T1=0orT2=0, \nLP2 Cannot Move"]

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["CONDITION"]
["INTERLOCK",null,null,"EFEM to Robot"]
["SIGNALS","ADDRESS","FUNTION","Safety to LP\n(DO-50)"]
["LP1 to EFEM","DI-55~DI-63","CST Wafer NOT  Protrusion","T1"]
["EFEM DI","DI-02","Grating Sensor ON","T2"]
["Logic",null,null,"If T1*T2=1 it is enable"]

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[]
[]
[]
[]
[]
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[{"$nulls":3},80,"GND",null,30,"GND","GROUD"]
[{"$nulls":3},81,"GND",null,31,"GND","GROUD"]
[{"$nulls":3},82,"GND",null,32,"GND","GROUD"]
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[{"$nulls":3},85,"DI-50",null,35,"DO-18","C2_Guide Pin Medium Down_SV"]
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[{"$nulls":3},93,"DI-58",null,43,"DO-26","SPARE"]
[{"$nulls":3},94,"DI-59",null,44,"DO-27","SPARE"]
[{"$nulls":3},95,"DI-60",null,45,"DO-28","SPARE"]
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[{"$nulls":3},97,"DI-62",null,47,"DO-30","SPARE"]
[{"$nulls":3},98,"DI-63",null,48,"DO-31","SPARE"]
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[{"$nulls":6},56,"GND","GROUD"]
[{"$nulls":6},57,"DO-32","SPARE"]
[{"$nulls":6},58,"DO-33","SPARE"]
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[{"$nulls":6},60,"DO-35","SPARE"]
[{"$nulls":6},61,"DO-36","SPARE"]
[{"$nulls":6},62,"DO-37","SPARE"]
[{"$nulls":6},63,"DO-38","SPARE"]
[{"$nulls":6},64,"DO-39","SPARE"]
[{"$nulls":6},65,"DO-40","SPARE"]
[{"$nulls":6},66,"DO-41","SPARE"]
[{"$nulls":6},67,"DO-42","SPARE"]
[{"$nulls":6},68,"DO-43","SPARE"]
[{"$nulls":6},69,"DO-44","SPARE"]
[{"$nulls":6},70,"DO-45","SPARE"]
[{"$nulls":6},71,"DO-46","SPARE"]
[{"$nulls":6},72,"DO-47","SPARE"]
[{"$nulls":6},73,"PCOM2","PCOM45"]
[{"$nulls":6},74,"PCOM2","PCOM45"]
[{"$nulls":6},75,"N.C","N.C"]
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[{"$nulls":6},78,"GND","GROUD"]
[{"$nulls":6},79,"GND","GROUD"]
[{"$nulls":6},80,"GND","GROUD"]
[{"$nulls":6},81,"GND","GROUD"]
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[{"$nulls":6},83,"DO-48","SPARE"]
[{"$nulls":6},84,"DO-49","SPARE"]
[{"$nulls":6},85,"DO-50","Safety to LP"]
[{"$nulls":6},86,"DO-51","SPARE"]
[{"$nulls":6},87,"DO-52","Water Leak OK TO PM"]
[{"$nulls":6},88,"DO-53","CDA PRESS OK TO PM"]
[{"$nulls":6},89,"DO-54","SPARE"]
[{"$nulls":6},90,"DO-55","SPARE"]
[{"$nulls":6},91,"DO-56","SPARE"]
[{"$nulls":6},92,"DO-57","SPARE"]
[{"$nulls":6},93,"DO-58","SPARE"]
[{"$nulls":6},94,"DO-59","SPARE"]
[{"$nulls":6},95,"DO-60","SPARE"]
[{"$nulls":6},96,"DO-61","SPARE"]
[{"$nulls":6},97,"DO-62","SPARE"]
[{"$nulls":6},98,"DO-63","SPARE"]
[{"$nulls":6},99,"PCOM3","PCOM67"]
[{"$nulls":6},100,"PCOM3","PCOM67"]
[{"$nulls":6},76,"N.C","N.C"]