添加多点补偿功能

VirgoRT/Config/System.sccfg

@@ -152,6 +152,10 @@
 		<config default="false" name="EnableWallHeater" nameView="Enable Chamber Wall Heater" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
 		<config default="false" name="EnableGridHeater" nameView="Enable Chamber Grid Heater" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
 		<config default="5" name="RecipeToleranceIgnoreTime" nameView="Ignore Time Before Check Recipe Step Tolerance" description="" max="60" min="0" paramter="" tag="" unit="s" type="Integer" />
+		<config default="30" name="SubstrateTemperatureTCTMDiff" nameView="Substrate Temperature TC TM Diff" description="" max="500" min="1" paramter="" tag="" unit="" type="Integer" visible="true"/>
+		<config default="30" name="ForelineTemperatureTCTMDiff" nameView="Foreline Temperature TC TM Diff" description="" max="500" min="1" paramter="" tag="" unit="" type="Integer" visible="true"/>
+		<config default="30" name="CHBWallTemperatureTCTMDiff" nameView="CHB Wall Temperature TC TM Diff" description="" max="500" min="1" paramter="" tag="" unit="" type="Integer" visible="true"/>
+
 
 		<configs name="MFCVerification" nameView="MFC Verification" >
 			<config default="7500" name="ChamberVolume" nameView="Chamber Volume" max="100000" min="0" paramter="" tag="" unit="mL"  visible="false" type="Double" />
@@ -176,6 +180,24 @@
 			<config default="true" name="EnableToleranceAlarm" nameView="Enable Tolerance Alarm" description="Enable Tolerance Alarm" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
 			<config default="20" name="ToleranceAlarmRange" nameView="Tolerance Alarm Range" description="Tolerance Alarm Range" max="200" min="0" paramter="" tag="" unit="℃" type="Integer" />
 			<config default="60" name="ToleranceAlarmTime" nameView="Tolerance Alarm Time" description="Tolerance Alarm Time" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
+			<config default="15" name="TempOffsetPoint_1" nameView="Temp Offset Point 1" description="温度补偿点 1" unit="degree" type="Integer" max="40" min="15" visible="true"/>
+			<config default="0" name="OffsetValue_1" nameView="Offset Value 1" description="补偿值 1" unit="degree" type="Double" max="5" min="-5" visible="true"/>
+			<config default="15" name="TempOffsetPoint_2" nameView="Temp Offset Point 2" description="温度补偿点 2" unit="degree" type="Integer" max="40" min="15" visible="true"/>
+			<config default="0" name="OffsetValue_2" nameView="Offset Value 2" description="补偿值 2" unit="degree" type="Double" max="5" min="-5" visible="true"/>
+			<config default="15" name="TempOffsetPoint_3" nameView="Temp Offset Point 3" description="温度补偿点 3" unit="degree" type="Integer" max="40" min="15" visible="true"/>
+			<config default="0" name="OffsetValue_3" nameView="Offset Value 3" description="补偿值 3" unit="degree" type="Double" max="5" min="-5" visible="true"/>
+			<config default="15" name="TempOffsetPoint_4" nameView="Temp Offset Point 4" description="温度补偿点 4" unit="degree" type="Integer" max="40" min="15" visible="true"/>
+			<config default="0" name="OffsetValue_4" nameView="Offset Value 4" description="补偿值 4" unit="degree" type="Double" max="5" min="-5" visible="true"/>
+			<config default="15" name="TempOffsetPoint_5" nameView="Temp Offset Point 5" description="温度补偿点 5" unit="degree" type="Integer" max="40" min="15" visible="true"/>
+			<config default="0" name="OffsetValue_5" nameView="Offset Value 5" description="补偿值 5" unit="degree" type="Double" max="5" min="-5" visible="true"/>
+			<config default="15" name="TempOffsetPoint_6" nameView="Temp Offset Point 6" description="温度补偿点 6" unit="degree" type="Integer" max="40" min="15" visible="true"/>
+			<config default="0" name="OffsetValue_6" nameView="Offset Value 6" description="补偿值 6" unit="degree" type="Double" max="5" min="-5" visible="true"/>
+			<config default="15" name="TempOffsetPoint_7" nameView="Temp Offset Point 7" description="温度补偿点 7" unit="degree" type="Integer" max="40" min="15" visible="true"/>
+			<config default="0" name="OffsetValue_7" nameView="Offset Value 7" description="补偿值 7" unit="degree" type="Double" max="5" min="-5" visible="true"/>
+			<config default="15" name="TempOffsetPoint_8" nameView="Temp Offset Point 8" description="温度补偿点 8" unit="degree" type="Integer" max="40" min="15" visible="true"/>
+			<config default="0" name="OffsetValue_8" nameView="Offset Value 8" description="补偿值 8" unit="degree" type="Double" max="5" min="-5" visible="true"/>
+			<config default="15" name="TempOffsetPoint_9" nameView="Temp Offset Point 9" description="温度补偿点 9" unit="degree" type="Integer" max="40" min="15" visible="true"/>
+			<config default="0" name="OffsetValue_9" nameView="Offset Value 9" description="补偿值 9" unit="degree" type="Double" max="5" min="-5" visible="true"/>
 		</configs>
 				<configs name="GridChiller" nameView="Grid Chiller" >
 			<config default="true" name="EnableChiller" nameView="Enable Chiller" description="enable chiller or not" max="1" min="0" tag="" unit="" type="Bool" />
@@ -539,6 +561,9 @@
 		<config default="false" name="EnableGridHeater" nameView="Enable Chamber Grid Heater" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
 
 		<config default="5" name="RecipeToleranceIgnoreTime" nameView="Ignore Time Before Check Recipe Step Tolerance" description="" max="60" min="0" paramter="" tag="" unit="s" type="Integer" />
+		<config default="30" name="SubstrateTemperatureTCTMDiff" nameView="Substrate Temperature TC TM Diff" description="" max="500" min="1" paramter="" tag="" unit="" type="Integer" visible="true"/>
+		<config default="30" name="ForelineTemperatureTCTMDiff" nameView="Foreline Temperature TC TM Diff" description="" max="500" min="1" paramter="" tag="" unit="" type="Integer" visible="true"/>
+		<config default="30" name="CHBWallTemperatureTCTMDiff" nameView="CHB Wall Temperature TC TM Diff" description="" max="500" min="1" paramter="" tag="" unit="" type="Integer" visible="true"/>
 
 		<configs name="MFCVerification" nameView="MFC Verification" >
 			<config default="7500" name="ChamberVolume" nameView="Chamber Volume" max="100000" min="0" paramter="" tag="" unit="mL"  visible="false" type="Double" />
@@ -563,6 +588,24 @@
 			<config default="true" name="EnableToleranceAlarm" nameView="Enable Tolerance Alarm" description="Enable Tolerance Alarm" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
 			<config default="20" name="ToleranceAlarmRange" nameView="Tolerance Alarm Range" description="Tolerance Alarm Range" max="200" min="0" paramter="" tag="" unit="℃" type="Integer" />
 			<config default="60" name="ToleranceAlarmTime" nameView="Tolerance Alarm Time" description="Tolerance Alarm Time" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
+			<config default="15" name="TempOffsetPoint_1" nameView="Temp Offset Point 1" description="温度补偿点 1" unit="degree" type="Integer" max="40" min="15" visible="true"/>
+			<config default="0" name="OffsetValue_1" nameView="Offset Value 1" description="补偿值 1" unit="degree" type="Double" max="5" min="-5" visible="true"/>
+			<config default="15" name="TempOffsetPoint_2" nameView="Temp Offset Point 2" description="温度补偿点 2" unit="degree" type="Integer" max="40" min="15" visible="true"/>
+			<config default="0" name="OffsetValue_2" nameView="Offset Value 2" description="补偿值 2" unit="degree" type="Double" max="5" min="-5" visible="true"/>
+			<config default="15" name="TempOffsetPoint_3" nameView="Temp Offset Point 3" description="温度补偿点 3" unit="degree" type="Integer" max="40" min="15" visible="true"/>
+			<config default="0" name="OffsetValue_3" nameView="Offset Value 3" description="补偿值 3" unit="degree" type="Double" max="5" min="-5" visible="true"/>
+			<config default="15" name="TempOffsetPoint_4" nameView="Temp Offset Point 4" description="温度补偿点 4" unit="degree" type="Integer" max="40" min="15" visible="true"/>
+			<config default="0" name="OffsetValue_4" nameView="Offset Value 4" description="补偿值 4" unit="degree" type="Double" max="5" min="-5" visible="true"/>
+			<config default="15" name="TempOffsetPoint_5" nameView="Temp Offset Point 5" description="温度补偿点 5" unit="degree" type="Integer" max="40" min="15" visible="true"/>
+			<config default="0" name="OffsetValue_5" nameView="Offset Value 5" description="补偿值 5" unit="degree" type="Double" max="5" min="-5" visible="true"/>
+			<config default="15" name="TempOffsetPoint_6" nameView="Temp Offset Point 6" description="温度补偿点 6" unit="degree" type="Integer" max="40" min="15" visible="true"/>
+			<config default="0" name="OffsetValue_6" nameView="Offset Value 6" description="补偿值 6" unit="degree" type="Double" max="5" min="-5" visible="true"/>
+			<config default="15" name="TempOffsetPoint_7" nameView="Temp Offset Point 7" description="温度补偿点 7" unit="degree" type="Integer" max="40" min="15" visible="true"/>
+			<config default="0" name="OffsetValue_7" nameView="Offset Value 7" description="补偿值 7" unit="degree" type="Double" max="5" min="-5" visible="true"/>
+			<config default="15" name="TempOffsetPoint_8" nameView="Temp Offset Point 8" description="温度补偿点 8" unit="degree" type="Integer" max="40" min="15" visible="true"/>
+			<config default="0" name="OffsetValue_8" nameView="Offset Value 8" description="补偿值 8" unit="degree" type="Double" max="5" min="-5" visible="true"/>
+			<config default="15" name="TempOffsetPoint_9" nameView="Temp Offset Point 9" description="温度补偿点 9" unit="degree" type="Integer" max="40" min="15" visible="true"/>
+			<config default="0" name="OffsetValue_9" nameView="Offset Value 9" description="补偿值 9" unit="degree" type="Double" max="5" min="-5" visible="true"/>
 		</configs>
 		<configs name="GridChiller" nameView="Grid Chiller" >
 			<config default="true" name="EnableChiller" nameView="Enable Chiller" description="enable chiller or not" max="1" min="0" tag="" unit="" type="Bool" />