Virgo_Mask/VirgoUI/Models/PMs/PmOverviewViewModel.cs

using System;
using System.Collections.Generic;
using System.Collections.ObjectModel;
using System.Linq;
using System.Windows;
using System.Windows.Media;
using Aitex.Core.Common;
using Aitex.Core.Common.DeviceData;
using Aitex.Core.Util;
using Aitex.Core.Utilities;

using Caliburn.Micro;
using MECF.Framework.Common.DataCenter;
using MECF.Framework.Common.Equipment;
using MECF.Framework.Common.OperationCenter;
using MECF.Framework.Common.RecipeCenter;
using OpenSEMI.ClientBase;
using VirgoCommon;
using VirgoUI.Client.Models.Recipe;
using VirgoUI.Client.Models.Sys;
using Ax = Aitex.Core.Common;

namespace VirgoUI.Client.Models.PMs
{
    public class PmOverviewViewModel : ModuleUiViewModelBase, ISupportMultipleSystem
    {
        private object[] _oldmfc = new object[5] { 0.0, 0.0, 0.0, 0.0, 0.0 };

        //public Ax.WaferInfo PMWafer { get; set; }

        //private Ax.WaferSize _PMWaferType = Ax.WaferSize.WS6;

        //public Ax.WaferSize PMWaferType
        //{
        //    get
        //    {
        //        return _PMWaferType;
        //    }
        //    set
        //    {
        //        _PMWaferType = value;
        //        NotifyOfPropertyChange("PMWaferType");
        //    }
        //}

        private int _BottomPinStatus = 0;

        public int BottomPinStatus
        {
            get
            {
                return _BottomPinStatus;
            }
            set
            {
                _BottomPinStatus = value;
                NotifyOfPropertyChange("BottomPinStatus");
            }
        }

        public int WaferLength1
        {
            get
            {
                Ax.WaferInfo wafer = ChamberWafer == null ? new Ax.WaferInfo() : ChamberWafer[0];
                if (wafer.IsEmpty)
                    return 0;
                
                switch (wafer.Size)
                {
                    case Ax.WaferSize.WS3: return 85;
                    case Ax.WaferSize.WS8: return 125;
                    default: return 145;
                }
            }
        }

        private int _MidPinStatus = 0;

        public int MidPinStatus
        {
            get
            {
                return _MidPinStatus;
            }
            set
            {
                _MidPinStatus = value;
                NotifyOfPropertyChange("MidPinStatus");
            }
        }

        private int _TopPinStatus = 0;

        public int TopPinStatus
        {
            get
            {
                return _TopPinStatus;
            }
            set
            {
                _TopPinStatus = value;
                NotifyOfPropertyChange("TopPinStatus");
            }
        }

        private int _CoverStatus = 0;

        public int CoverStatus
        {
            get
            {
                return _CoverStatus;
            }
            set
            {
                _CoverStatus = value;
                NotifyOfPropertyChange("CoverStatus");
            }
        }

        //private int _ChamberStatus;

        //public int ChamberStatus
        //{
        //    get { return _ChamberStatus; }
        //    set
        //    {
        //        _ChamberStatus = value;
        //        NotifyOfPropertyChange("ChamberStatus");
        //    }
        //}

        private List<PMParameter> _PMParameters;

        public List<PMParameter> PMParameters
        {
            get
            {
                return _PMParameters;
            }
            set
            {
                _PMParameters = value;
                NotifyOfPropertyChange("PMParameters");
            }
        }

        private List<PMParameter> _Temperatures;

        public List<PMParameter> Temperatures
        {
            get
            {
                return _Temperatures;
            }
            set
            {
                _Temperatures = value;
                NotifyOfPropertyChange("Temperatures");
            }
        }

        private List<GaslineItem> _Gaslines;

        public List<GaslineItem> Gaslines
        {
            get
            {
                return _Gaslines;
            }
            set
            {
                _Gaslines = value;
                NotifyOfPropertyChange("Gaslines");
            }
        }

        

        [Subscription("EPD.IsConnected")]
        public bool IsEPDConnected
        {
            get;
            set;
        }

        [Subscription("EPD.ChannelStatus")]
        public string EPDStatus
        {
            get;
            set;
        }
 
        public Visibility EPDVisibility
        {
            get;
            set;
        }

        [Subscription("EnableBiasRF")]
        public bool EnableBiasRF
        {
            get;
            set;
        }

        [Subscription("IoThrottleValve.ThrottleValve.ProcessPressureOffset")]
        public double ProcessPressureOffset
        {
            get;
            set;
        }

        [Subscription("IoMfc.MfcGas1.IsEnable")]
        public bool MfcGas1Enable
        {
            get;
            set;
        }

        [Subscription("IoMfc.MfcGas2.IsEnable")]
        public bool MfcGas2Enable
        {
            get;
            set;
        }

        [Subscription("IoMfc.MfcGas3.IsEnable")]
        public bool MfcGas3Enable
        {
            get;
            set;
        }

        [Subscription("IoMfc.MfcGas4.IsEnable")]
        public bool MfcGas4Enable
        {
            get;
            set;
        }

        [Subscription("IoMfc.MfcGas5.IsEnable")]
        public bool MfcGas5Enable
        {
            get;
            set;
        }

        [Subscription("ModuleWaferList")]
        public Ax.WaferInfo[] ChamberWafer
        {
            get;
            set;
        }

        [Subscription("SlitDoor.DeviceData")]
        public AITCylinderData SlitDoorData
        {
            get;
            set;
        }

        [Subscription("LiftPin.DeviceData")]
        public AITCylinderData LiftPinData
        {
            get;
            set;
        }

        [Subscription("TriStateLiftPin.PinPosition")]
        public int TriStateLiftPinPosition { get; set; }

        [Subscription("TriStateLiftPin2.PinPosition")]
        public int GroupTriStateLiftPinPosition { get; set; }

        [Subscription("TriStateLiftPin4.PinPosition")]
        public int DGroupTriStateLiftPinPosition { get; set; }

        private int _PinPosition;
        public int PinPosition
        {
            get
            {
                return _PinPosition;
            }
            set
            {
                _PinPosition = value;
                NotifyOfPropertyChange("PinPosition");
            }
        }

        [Subscription("TriStateLiftPin.ManualStopState")]
        public bool TriStateLiftPinManualStopState { get; set; }

        [Subscription("TriStateLiftPin2.ManualStopState")]
        public bool GroupTriStateLiftPinManualStopState { get; set; }

        [Subscription("TriStateLiftPin4.ManualStopState")]
        public bool DGroupTriStateLiftPinManualStopState { get; set; }

        private bool _ManualStopState;
        public bool ManualStopState
        {
            get
            {
                return _ManualStopState;
            }
            set
            {
                _ManualStopState = value;
                NotifyOfPropertyChange("ManualStopState");
            }
        }

        [Subscription("TriStateLiftPin.ManualUpState")]
        public bool TriStateLiftPinManualUpState { get; set; }
        [Subscription("TriStateLiftPin2.ManualUpState")]
        public bool GroupTriStateLiftPinManualUpState { get; set; }
        [Subscription("TriStateLiftPin4.ManualUpState")]
        public bool DGroupTriStateLiftPinManualUpState { get; set; }

        public bool _ManualUpState;
        public bool ManualUpState
        {
            get
            {
                return _ManualUpState;
            }
            set
            {
                _ManualUpState = value;
                NotifyOfPropertyChange("ManualUpState");
            }
        }

        [Subscription("TriStateLiftPin.ManualDownState")]
        public bool TriStateLiftPinManualDownState { get; set; }
        [Subscription("TriStateLiftPin2.ManualDownState")]
        public bool GroupTriStateLiftPinManualDownState { get; set; }
        [Subscription("TriStateLiftPin4.ManualDownState")]
        public bool DGroupTriStateLiftPinManualDownState { get; set; }

        private bool _ManualDownState;
        public bool ManualDownState
        {
            get
            {
                return _ManualDownState;
            }
            set
            {
                _ManualDownState = value;
                NotifyOfPropertyChange("ManualDownState");
            }
        }

        [Subscription("SmallPin.DeviceData")]
        public AITCylinderData UpperPinData
        {
            get;
            set;
        }

        [Subscription("MediumPin.DeviceData")]
        public AITCylinderData LowerPinData
        {
            get;
            set;
        }

        [Subscription("Lid.DeviceData")]
        public AITCylinderData LidData
        {
            get;
            set;
        }
        [Subscription("LidLocker.DeviceData")]
        public AITCylinderData LidLockerData
        {
            get;
            set;
        }
        [Subscription("IsOnline")]
        public bool IsOnline { get; set; }

        [Subscription("LeakRate")]
        public double LeakRate { get; set; }

        [Subscription("IsCDAOK")]
        public bool IsCDAOK { get; set; }

        [Subscription("IsArmNotExtend")]
        public bool IsArmNotExtend { get; set; }

        [Subscription(VirgoDevice.ValveMfc1)]
        public AITValveData GP1Valve
        {
            get;
            set;
        }

        [Subscription(VirgoDevice.ValveMfc2)]
        public AITValveData GP2Valve
        {
            get;
            set;
        }

        [Subscription(VirgoDevice.ValveMfc3)]
        public AITValveData GP3Valve
        {
            get;
            set;
        }

        [Subscription(VirgoDevice.ValveMfc4)]
        public AITValveData GP4Valve
        {
            get;
            set;
        }

        [Subscription(VirgoDevice.ValveMfc5)]
        public AITValveData GP5Valve
        {
            get;
            set;
        }

        [Subscription(VirgoDevice.ValveChamberPurge)]
        public AITValveData ChamberPurgeValve
        {
            get;
            set;
        }

        [Subscription(VirgoDevice.ValveChamberPurge)]
        public AITValveData SoftVentVlv { get; set; }

        [Subscription(VirgoDevice.ValveFastVent)]
        public AITValveData FastVentVlv { get; set; }

        [Subscription(VirgoDevice.ValveSoftPumping)]
        public AITValveData SoftPumpVlv { get; set; }

        [Subscription(VirgoDevice.ValveFastPumping)]
        public AITValveData FastPumpVlv { get; set; }

        [Subscription(VirgoDevice.ValveN2Supply)]
        public AITValveData N2SupplyVlv { get; set; }

        [Subscription(VirgoDevice.ValveProcess)]
        public AITValveData ProcessVlv { get; set; }

        [Subscription("SensorATMSwitch")]
        public AITSensorData SensorATMSwitch { get; set; }

        [Subscription("N2PressureOk")]
        public AITSensorData N2PressureOk { get; set; }

        [Subscription("SensorVacSwitch")]
        public AITSensorData SensorVacSwitch { get; set; }

        [Subscription("SensorWaterFlowOk")]
        public AITSensorData SensorWaterFlowOk { get; set; }
        
        [Subscription("SensorCDAPressureOk")]
        public AITSensorData SensorCDAPressureOk { get; set; }

        [Subscription("SensorCDAPressureOk2")]
        public AITSensorData SensorCDAPressureOk2 { get; set; }

        [Subscription("SourceFan1")]
        public AITSensorData SourceFan1 { get; set; }

        [Subscription("SensorWaterLeakOk")]
        public AITSensorData SensorWaterLeakOk { get; set; }

        [Subscription("SensorArmNotExtend")]
        public AITSensorData SensorArmNotExtend { get; set; }


        [Subscription("TriStateLiftPin.CurrentValue")]
        public float TriStateLiftPinCurrentValue { get; set; }

        public void TriStateLiftPinStop()
        {
            InvokeClient.Instance.Service.DoOperation($"{SystemName}.{_servoLiftPinName}.Stop");
        }

        public void TriStateLiftPinUp()
        {
            InvokeClient.Instance.Service.DoOperation($"{SystemName}.{_servoLiftPinName}.Up");
        }

        public void TriStateLiftPinDown()
        {
            InvokeClient.Instance.Service.DoOperation($"{SystemName}.{_servoLiftPinName}.Down");
        }

        private AITMfcData _mfc1;

        [Subscription(VirgoDevice.MfcGas1)]
        public AITMfcData GP1Mfc
        {
            get
            {
                return _mfc1;
            }
            set
            {
                _mfc1 = value;
                if (IsAutoMode && MfcGas1Enable)
                {
                    PMParameters.Find(x => x.Name == $"{SystemName}.IoMfc.MfcGas1.FeedBack").Setpoint = _mfc1.SetPoint.ToString("F1");
                }
            }
        }

        private AITMfcData _mfc2;

        [Subscription(VirgoDevice.MfcGas2)]
        public AITMfcData GP2Mfc
        {
            get
            {
                return _mfc2;
            }
            set
            {
                _mfc2 = value;
                if (IsAutoMode && MfcGas2Enable)
                {
                    PMParameters.Find(x => x.Name == $"{SystemName}.IoMfc.MfcGas2.FeedBack").Setpoint = _mfc2.SetPoint.ToString("F1");
                }
            }
        }

        private AITMfcData _mfc3;

        [Subscription(VirgoDevice.MfcGas3)]
        public AITMfcData GP3Mfc
        {
            get
            {
                return _mfc3;
            }
            set
            {
                _mfc3 = value;
                if (IsAutoMode && MfcGas3Enable/* && _Gaslines.Count > 2*/)
                {
                    PMParameters.Find(x => x.Name == $"{SystemName}.IoMfc.MfcGas3.FeedBack").Setpoint = _mfc3.SetPoint.ToString("F1");
                }
            }
        }

        private AITMfcData _mfc4;

        [Subscription(VirgoDevice.MfcGas4)]
        public AITMfcData GP4Mfc
        {
            get
            {
                return _mfc4;
            }
            set
            {
                _mfc4 = value;
                if (IsAutoMode && MfcGas4Enable/* && _Gaslines.Count > 3*/)
                {
                    PMParameters.Find(x => x.Name == $"{SystemName}.IoMfc.MfcGas4.FeedBack").Setpoint = _mfc4.SetPoint.ToString("F1");
                }
            }
        }

        private AITMfcData _mfc5;

        [Subscription(VirgoDevice.MfcGas5)]
        public AITMfcData GP5Mfc
        {
            get
            {
                return _mfc5;
            }
            set
            {
                _mfc5 = value;
                if (IsAutoMode && MfcGas5Enable/* && _Gaslines.Count > 4*/)
                {
                    PMParameters.Find(x => x.Name == $"{SystemName}.IoMfc.MfcGas5.FeedBack").Setpoint = _mfc5.SetPoint.ToString("F1");
                }
            }
        }

        [Subscription("Chiller.DeviceData")]
        public AITChillerData ChillerData { get; set; }

        [Subscription("HeaterChamber.DeviceData")]
        public AITHeaterData HeaterChamber { get; set; }

        [Subscription("ForelineHeater.DeviceData")]
        public AITHeaterData ForelineHeater { get; set; }

        [Subscription("WallHeater.DeviceData")]
        public AITHeaterData WallHeater { get; set; }

        [Subscription("GridHeater.DeviceData")]
        public AITHeaterData GridHeater { get; set; }

        [Subscription(VirgoDevice.ProcessGauge)]
        public AITPressureMeterData ProcessGauge { get; set; }

        [Subscription(VirgoDevice.PressureGauge)]
        public AITPressureMeterData PressureGauge { get; set; }

        [Subscription(VirgoDevice.ForelineGauge)]
        public AITPressureMeterData ForelineGauge { get; set; }

        private AITRfData _rf;
        [Subscription("Rf.DeviceData")]
        public AITRfData Rf
        {
            get
            {
                return _rf;
            }
            set
            {
                _rf = value;

                if (IsAutoMode)
                {
                    PMParameters.Find(x => x.Name == $"{SystemName}.Rf.PowerOnTime").Setpoint = "";
                    PMParameters.Find(x => x.Name == $"{SystemName}.Rf.ForwardPower").Setpoint = _rf.PowerSetPoint.ToString("F0");

                    RfDutySetPoint = _rf.DutySetPoint.ToString("F0");
                    NotifyOfPropertyChange("RfDutySetPoint");

                    RfFrequencySetPoint = _rf.FrequencySetPoint.ToString("F0");
                    NotifyOfPropertyChange("RfFrequencySetPoint");

                    RfModeSetPoint = _rf.WorkMode == (int)RfMode.ContinuousWaveMode ? "Continuous" : "Pulsing";
                    NotifyOfPropertyChange("RfModeSetPoint");

                   
                }
            }
        }

        private AITRfData _rfBias;
        [Subscription("BiasRf.DeviceData")]
        public AITRfData RfBias
        {
            get
            {
                return _rfBias;
            }
            set
            {
                _rfBias = value;

                if (IsAutoMode)
                {
                    PMParameters.Find(x => x.Name == $"{SystemName}.BiasMatch.MatchProcessMode").Setpoint = _rfBias.MatchPresetMode == (int)BiasRfMatchMode.Preset ? "Preset" : "Hold";
                    PMParameters.Find(x => x.Name == $"{SystemName}.BiasMatch.C1").Setpoint = _rfBias.MatchPositionC1SetPoint.ToString("F1");
                    PMParameters.Find(x => x.Name == $"{SystemName}.BiasMatch.C2").Setpoint = _rfBias.MatchPositionC2SetPoint.ToString("F1");
                    PMParameters.Find(x => x.Name == $"{SystemName}.BiasRf.ForwardPower").Setpoint = _rfBias.PowerSetPoint.ToString("F0");

                    RfMatchProcessModeSetPoint = _rf.TritonMatchProcessModeDisplay;
                    InvokePropertyChanged("RfMatchProcessModeSetPoint");
                }
            }
        }

        private AITRfMatchData _match;
        [Subscription("Match.DeviceData")]
        public AITRfMatchData Match
        {
            get
            {
                return _match;
            }
            set
            {
                _match = value;

                RfMatchPositionC1SetPoint = _match.TunePosition1.ToString("F0");
                NotifyOfPropertyChange("RfMatchPositionC1SetPoint");

                RfMatchPositionC2SetPoint = _match.TunePosition2.ToString("F0");
                NotifyOfPropertyChange("RfMatchPositionC2SetPoint");
            }
        }

        [Subscription("MainPump.DeviceData")]
        public AITPumpData MainPumpData { get; set; }

        private AITThrottleValveData _tv;

        [Subscription(VirgoDevice.ThrottleValve)]
        public AITThrottleValveData Tv
        {
            get
            {
                return _tv;
            }
            set
            {
                _tv = value;

                if (IsAutoMode)
                {
                    PMParameters.Find(x => x.Name == $"{SystemName}.IoThrottleValve.ThrottleValve.TVMode").Setpoint = _tv.Mode == (int)PressureCtrlMode.TVPressureCtrl ? "Pressure"
                                                                                                                    : _tv.Mode == (int)PressureCtrlMode.TVPositionCtrl ? "Position" : "Undefined";
                    PMParameters.Find(x => x.Name == $"{SystemName}.IoThrottleValve.ThrottleValve.TVMode").Feedback = _tv.Mode == (int)PressureCtrlMode.TVPressureCtrl ? "Pressure"
                                                                                                                   : _tv.Mode == (int)PressureCtrlMode.TVPositionCtrl ? "Position" : "Undefined";
                    PMParameters.Find(x => x.Name == $"{SystemName}.IoThrottleValve.ThrottleValve.TVPosition").Setpoint = _tv.PositionSetPoint.ToString("F0");
                    PMParameters.Find(x => x.Name == $"{SystemName}.IoThrottleValve.ThrottleValve.TVPressure").Setpoint = _tv.PressureSetPoint.ToString("F0");

                    ThrottleValveModeSetPoint = _tv.TextMode;
                    NotifyOfPropertyChange("ThrottleValveModeSetPoint");

                    ThrottleValvePositionSetPoint = _tv.PositionSetPoint.ToString("F0");
                    NotifyOfPropertyChange("ThrottleValvePositionSetPoint");

                    ThrottleValvePressureSetPoint = _tv.PressureSetPoint.ToString("F0");
                    NotifyOfPropertyChange("ThrottleValvePressureSetPoint");
                }
            }
        }

        public double TvHeight { get; set; }

        public Visibility TvVisible { get; set; }

        private AITSensorData _chamberDoorLid = new AITSensorData();

        [Subscription(VirgoDevice.ChamberLid)]
        public AITSensorData ChamberDoorLid
        {
            get
            {
                return _chamberDoorLid;
            }
            set
            {
                _chamberDoorLid = value;
            }
        }

        private bool _isAutoMode;
        private R_TRIG _trigChangeToAuto = new R_TRIG();

        [Subscription(StateData.IsAutoMode)]
        public bool IsAutoMode
        {
            get
            {
                return _isAutoMode;
            }
            set
            {
                _isAutoMode = value;

                _trigChangeToAuto.CLK = _isAutoMode;

                if (_trigChangeToAuto.Q)
                {
                    RfTimeSetPoint = "";
                    NotifyOfPropertyChange("RfTimeSetPoint");

                    RfModeSetPoint = "";
                    NotifyOfPropertyChange("RfModeSetPoint");

                    PMParameters.Find(x => x.Name == $"{SystemName}.Rf.ForwardPower").Setpoint = "";

                    RfFrequencySetPoint = "";
                    NotifyOfPropertyChange("RfFrequencySetPoint");

                    RfDutySetPoint = "";
                    NotifyOfPropertyChange("RfDutySetPoint");

                    RfMatchProcessModeSetPoint = "";
                    InvokePropertyChanged("RfMatchProcessModeSetPoint");

                    RfMatchPositionC1SetPoint = "";
                    NotifyOfPropertyChange("RfMatchPositionC1SetPoint");

                    RfMatchPositionC2SetPoint = "";
                    NotifyOfPropertyChange("RfMatchPositionC2SetPoint");

                    for (int i = 1; i <= 5; i++)    //GasLine 跳号Enable
                    {
                        if ((bool)QueryDataClient.Instance.Service.GetConfig($"{SystemName}.MfcGas{i}.Enable"))
                        {
                            PMParameters.Find(x => x.Name == $"{SystemName}.IoMfc.MfcGas{i}.FeedBack").Setpoint = "";
                        }
                    }

                    //PMParameters.Find(x => x.Name == $"{SystemName}.IoMfc.MfcGas1.FeedBack").Setpoint = "";
                    //PMParameters.Find(x => x.Name == $"{SystemName}.IoMfc.MfcGas2.FeedBack").Setpoint = "";
                    //PMParameters.Find(x => x.Name == $"{SystemName}.IoMfc.MfcGas3.FeedBack").Setpoint = "";

                    //if (_Gaslines.Count > 3)
                    //    PMParameters.Find(x => x.Name == $"{SystemName}.IoMfc.MfcGas4.FeedBack").Setpoint = "";
                    //if (_Gaslines.Count > 4)
                    //    PMParameters.Find(x => x.Name == $"{SystemName}.IoMfc.MfcGas5.FeedBack").Setpoint = "";

                    ElectrodeTemperatureSetPoint = "";
                    NotifyOfPropertyChange("ElectrodeTemperatureSetPoint");

                    StepModeSetPoint = "";
                    NotifyOfPropertyChange("StepModeSetPoint");
                }
            }
        }

        public bool IsManualMode
        {
            get
            {
                return !IsAutoMode;
            }
        }

        public bool IsRFEnabled
        {
            get
            {
                return IsManualMode && IsGasFlowing || IsRfPowering;
            }
        }

        //public bool IsMatchPositionInputEnabled
        //{
        //    get
        //    {
        //        if (Rf != null && Match.TuneMode1 == EnumRfMatchTuneMode.Auto)
        //            return false;
        //        return IsManualMode;
        //    }
        //}

        [Subscription(StateData.RecipeStepNo)]
        public int RecipeStepNo
        {
            get;
            set;
        }

        private int _recipeStepMode;

        [Subscription(StateData.RecipeStepMode)]
        public int RecipeStepMode
        {
            get
            {
                return _recipeStepMode;
            }
            set
            {
                _recipeStepMode = value;

                if (IsAutoMode)
                {
                    switch (_recipeStepMode)
                    {
                    //case (int)EndByCondition.EndByHeatUp:
                    //    StepModeSetPoint = "Heat Up";
                    //    break;
                    //case (int)EndByCondition.EndByRfTime:
                    //    StepModeSetPoint = "RF Time";
                    //    break;
                    default:
                        StepModeSetPoint = "Step Time";
                        break;
                    }
                    NotifyOfPropertyChange("StepModeSetPoint");
                }
            }
        }

        [Subscription(StateData.RecipeProcessTime)]
        public string RecipeProcessTime
        {
            get;
            set;
        }

        [Subscription(StateData.PumpTime)]
        public string PumpTime
        {
            get;
            set;
        }

        [Subscription(StateData.PMState)]
        public int PMStatus { get; set; }

        [Subscription(StateData.IsPumpingOkForProcess)]
        public bool IsPumpingOkForProcess
        {
            get;
            set;
        }

        [Subscription(StateData.IsCoolingOkForProcess)]
        public bool IsCoolingOkForProcess
        {
            get;
            set;
        }

        [Subscription(StateData.IsGasFlowingOkForProcess)]
        public bool IsGasFlowingOkForProcess
        {
            get;
            set;
        }

        [Subscription(StateData.DataLogName)]
        public string DataLogName
        {
            get;
            set;
        }

        [Subscription(StateData.TotalCycle)]
        public int TotalCycle
        {
            get;
            set;
        }

        [Subscription(StateData.SmallWafer)]
        public int SmallWafer { get; set; }

        [Subscription(StateData.MidWafer)]
        public int MidWafer { get; set; }

        [Subscription(StateData.BigWafer)]
        public int BigWafer { get; set; }

        public string TvText
        {
            get
            {
                //if (Tv == null || !SCLocal.PressureControlConfig.EnableThrottleValve)
                return "";

                //return string.Format("{0}%", Tv.PositionFeedback.ToString("F0"));
            }
        }

        public string TvTextBackground
        {
            get
            {
                if (Tv == null)
                    return "Transparent";

                if (Tv.State != 1)
                    return "Red";

                return "Green";
            }
        }

        public string PmOperationMode
        {
            get
            {
                return IsAutoMode ? "Auto" : "Manual";
            }
        }

        public string PmOnlineMode
        {
            get
            {
                return IsOnline ? "Online" : "Offline";
            }
        }
        public bool IsOnlineButtonEnabled
        {
            get { return !IsOnline; }
        }
        public bool IsOfflineButtonEnabled
        {
            get { return IsOnline; }
        }

        [IgnorePropertyChange]
        public bool BasePressureSetPointSaved { get; set; }

        [IgnorePropertyChange]
        public bool PumpLimitSetPointSaved { get; set; }

        public double ElectrodeTemperatureFeedback
        {
            get
            {
                return 0;

                //return SCLocal.CoolingConfig.EnableElectrodeTcLeftAsControlTc ? (ElectrodeLeftThermalCouple!= null ? ElectrodeLeftThermalCouple.FeedBack :0) :
                //    (ElectrodeRightThermalCouple!=null ? ElectrodeRightThermalCouple.FeedBack : 0);
            }
        }

        public int WaferLength
        {
            get
            {
                Ax.WaferInfo wafer = ChamberWafer==null ? new Ax.WaferInfo() : ChamberWafer[0];
                if (wafer.IsEmpty)
                    return 0;

                switch (wafer.Size)
                {
                    case Ax.WaferSize.WS3: return 85;
                    case Ax.WaferSize.WS4: return 125;
                    default: return 145;
                }
            }
        }

        public bool IsHeaterButtonEnable
        {
            get
            {
                if (SystemName == "PMB")
                {
                    if ((bool)QueryDataClient.Instance.Service.GetConfig($"PMA.Chiller.EnableChiller") && (bool)QueryDataClient.Instance.Service.GetConfig($"PMB.Chiller.ChillerSameWithPMA"))
                    {
                        return false;
                    }
                    else
                        return IsManualMode;
                }
                else
                    return IsManualMode;
            }
        }

        public string HeaterButtonContent
        {
            get
            {
                if ((bool)QueryDataClient.Instance.Service.GetConfig($"PMA.Chiller.EnableChiller"))
                {
                    if (SystemName == "PMB")
                    {
                        if ((bool)QueryDataClient.Instance.Service.GetConfig($"PMB.Chiller.ChillerSameWithPMA"))
                        {
                            return "Temperature Set";
                        }
                        else
                        {
                            if ((bool)QueryDataClient.Instance.Service.GetConfig($"PMB.Chiller.EnableChiller"))
                            {
                                return "Temperature Set";
                            }
                            else
                            {
                                return "Substrate Heating";
                            }
                        }
                    }
                    else
                    {
                        return "Temperature Set";
                    }
                }
                else
                    return "Substrate Heating";
            }
        }
        //public string WaferSize
        //{
        //    get
        //    {
        //        Ax.WaferInfo wafer = ChamberWafer == null ? new Ax.WaferInfo() : ChamberWafer[0];
        //        if (wafer.IsEmpty)
        //            return "";

        //        switch (wafer.Size)
        //        {
        //            case Ax.WaferSize.WS3: return SmallWafer.ToString();
        //            case Ax.WaferSize.WS4: return MidWafer.ToString();
        //            default: return BigWafer.ToString();
        //        }
        //    }
        //}

        public bool IsSmallPinVisible
        {
            get { return (int)QueryDataClient.Instance.Service.GetConfig($"{SystemName}.LiftPinMode") == 1; }
        }

        public bool IsMidPinVisible
        {
            get { return (int)QueryDataClient.Instance.Service.GetConfig($"{SystemName}.LiftPinMode") == 1; }
        }

        public bool IsLiftPinVisible
        {
            get { return true; }
        }

        public bool IsLiftPinUp
        {
            get
            {
                return PinPosition == 3;
            }
        }
        public bool IsLiftPinMiddle
        {
            get
            {
                return PinPosition == 2;
            }
        }
        public bool IsLiftPinHome
        {
            get
            {
                return PinPosition == 0;
            }
        }

        public bool EnableLiftPinUp
        {
            get { return !IsAutoMode && !IsLiftPinUp; }
        }
        public bool EnableLiftPinMiddle
        {
            get { return !IsAutoMode && !IsLiftPinMiddle; }
        }
        public bool EnableLiftPinHome
        {
            get { return !IsAutoMode && !IsLiftPinHome; }
        }
        public bool EnableLock
        {
            get { return LidLockerData != null && !LidLockerData.OpenSetPoint; }
        }
        public bool IsLiftPinDown
        {
            get
            {
                return PinPosition == 1;
            }
        }
        public bool EnableLiftPinDown
        {
            get { return !IsAutoMode && !IsLiftPinDown; }
        }
        public bool EnableUnlock
        {
            get { return LidLockerData != null && !LidLockerData.CloseSetPoint; }
        }
        public bool IsUpperPinUp
        {
            get { return UpperPinData != null && UpperPinData.OpenFeedback; }
        }

        public bool EnableUpperPinUp
        {
            get { return !IsAutoMode && UpperPinData != null && !UpperPinData.OpenFeedback; }
        }
        public bool IsUpperPinDown
        {
            get { return UpperPinData != null && UpperPinData.CloseFeedback; }
        }
        public bool EnableUpperPinDown
        {
            get { return !IsAutoMode && UpperPinData != null && !UpperPinData.CloseFeedback; }
        }
        public bool EnableLiftPinManualMove
        {
            get { return !IsAutoMode; }
        }

        public bool IsLowerPinUp
        {
            get { return LowerPinData != null && LowerPinData.OpenFeedback; }
        }

        public bool EnableLowerPinUp
        {
            get { return !IsAutoMode && LowerPinData != null && !LowerPinData.OpenFeedback; }
        }
        public bool IsLowerPinDown
        {
            get { return LowerPinData != null && LowerPinData.CloseFeedback; }
        }
        public bool EnableLowerPinDown
        {
            get { return !IsAutoMode && LowerPinData != null && !LowerPinData.CloseFeedback; }
        }

        public bool IsLidOpen
        {
            get { return LidData != null && !LidData.CloseFeedback; }
        }
        public bool EnableCloseLid
        {
            get
            {
                return LidData != null && !LidData.CloseFeedback;
            }
        }
        public bool EnableOpenLid
        {
            get
            {
                return LidData != null && LidData.CloseFeedback;
            }
        }

        public bool IsSlitValveOpen
        {
            get { return SlitDoorData != null && SlitDoorData.OpenFeedback; }
        }

        public bool IsSlitValveClose
        {
            get { return !IsSlitValveOpen; }
        }

        public bool EnableCloseSlitValve
        {
            get
            {
                return !IsAutoMode && SlitDoorData != null && !SlitDoorData.CloseFeedback;
            }
        }
        public bool EnableOpenSlitValve
        {
            get
            {
                return !IsAutoMode && SlitDoorData != null && SlitDoorData.CloseFeedback;
            }
        }

        public bool EnableRfTimeSetPoint
        {
            get
            {
                return IsManualMode;
            }
        }

        //public bool IsEnableCloseLid
        //{
        //    get
        //    {
        //        return !ChamberDoorLid.IsClose && !IsAutoMode;
        //    }
        //}

        public bool IsLeftTcAsControlTc
        {
            get
            {
                return true;//SCLocal.CoolingConfig.EnableElectrodeTcLeftAsControlTc;
            }
        }

        public bool IsRightTcAsControlTc
        {
            get
            {
                return !IsLeftTcAsControlTc;
            }
        }

        public bool IsEnableRecipeScan
        {
            get
            {
                return IsAutoMode && !IsProcessing;
            }
        }

        public bool IsEnableLotScan
        {
            get
            {
                return IsAutoMode && !IsProcessing;
            }
        }

        public bool IsEnableSelectRecipe
        {
            get
            {
                return IsAutoMode && !IsProcessing;
            }
        }

        public bool IsEnableStartRecipe
        {
            get
            {
                return IsAutoMode && !string.IsNullOrEmpty(SelectedRecipeName) && !IsProcessing;
            }
        }

        public bool IsEnableNextStep
        {
            get
            {
                return IsAutoMode && IsProcessing;
            }
        }

        public bool IsEnableStopRecipe
        {
            get
            {
                return IsAutoMode && IsProcessing;
            }
        }

        public bool IsBarcodeEnabled
        {
            get;
            set;
        }

        public bool IsRfPowerOn
        {
            get
            {
                return Rf != null && Rf.IsRfOn;
            }
        }

        public bool IsBiasRfPowerOn
        {
            get
            {
                return RfBias != null && RfBias.IsRfOn;
            }
        }

        public bool IsBiasMatchPowerOn
        {
            get
            {
                return RfBias != null && RfBias.IsRfOn && RfBias.IsMatchOn;
            }
        }

        public bool IsBiasRfVisible
        {
            get
            {
                return (bool)QueryDataClient.Instance.Service.GetConfig($"{SystemName}.BiasRf.EnableBiasRF");
            }
        }

        public bool IsBiasMatchVisible
        {
            get
            {
                return (bool)QueryDataClient.Instance.Service.GetConfig($"{SystemName}.BiasMatch.EnableBiasMatch");
            }
        }

        public bool IsChillerVisibility
        {
            get
            {
                return (bool)QueryDataClient.Instance.Service.GetConfig($"{SystemName}.Chiller.EnableChiller");
            }
        }

        public bool IsHeaterVisibility
        {
            get
            {
                return !IsChillerVisibility;
            }
        }

        public bool IsMatchPositionInputEnabled
        {
            get
            {
                if (Rf != null && RfMatchProcessModeSetPoint != "Preset")
                    return false;
                return IsManualMode;
            }
        }

        public bool IsChillerEnable
        {
            get
            {
                if (SystemName == "PMB")
                {
                    if ((bool)QueryDataClient.Instance.Service.GetConfig($"{SystemName}.Chiller.ChillerSameWithPMA"))
                    {
                        return false;
                    }
                    else
                    {
                        return (bool)QueryDataClient.Instance.Service.GetConfig($"{SystemName}.Chiller.EnableChiller");
                    }
                }
                else
                {
                    return (bool)QueryDataClient.Instance.Service.GetConfig($"{SystemName}.Chiller.EnableChiller");
                }
            }
        }

        public bool IsHeaterEnable
        {
            get
            {
                return IsHeaterVisibility;
            }
        }

        public bool SensorValue
        {
            get
            {
                return false;
            }
        }

        public bool IsManualButtonEnabled
        {
            get
            {
                return IsAutoMode;
            }
        }

        public bool IsAutoButtonEnabled
        {
            get
            {
                return !IsAutoMode;
            }
        }

        public bool IsPumping
        {
            get
            {
                return (PMState)PMStatus == PMState.Pumping;
            }
        }

        public bool IsStartPumping
        {
            get
            {
                return (PMState)PMStatus == PMState.LaunchingPump;
            }
        }

        public bool enableServiceControl
        {
            get
            {
                return Permission == 3;
            }
        }

        public string RecipeStepNoDisplay
        {
            get
            {
                return (PMState)PMStatus == PMState.Processing ? RecipeStepNo.ToString() : "--";
            }
        }

        public string RecipeStepModeDisplay
        {
            get
            {
                if ((PMState)PMStatus != PMState.Processing)
                    return "--";
                switch (RecipeStepMode)
                {
                //case (int)EndByCondition.EndByHeatUp:
                //    return "Heat Up Mode";
                //case (int)EndByCondition.EndByRfTime:
                //    return "RF Time Mode";
                default:
                    return "Step Time Mode";
                }
            }
        }

        private string _pumpButtonBackground = "#376092";

        public string PumpButtonBackground
        {
            get
            {
                if (IsPumping)
                {
                    _pumpButtonBackground = _pumpButtonBackground == "#95B3D7" ? "Blue" : "#95B3D7";
                    return _pumpButtonBackground;
                }

                if (IsPumpingOkForProcess)
                    return "#00C900";

                return "#376092";
            }
        }

        public bool IsGasFlowing
        {
            get
            {
                return (PMState)PMStatus == PMState.GasFlowing;
            }
        }

        private string _gasFlowButtonBackground = "CadetBlue";

        public string GasFlowButtonBackground
        {
            get
            {
                if (IsGasFlowing)
                {
                    _gasFlowButtonBackground = _gasFlowButtonBackground == "#95B3D7" ? "Blue" : "#95B3D7";
                    return _gasFlowButtonBackground;
                }

                if (IsGasFlowingOkForProcess)
                    return "#00C900";

                return "CadetBlue";
            }
        }

        public bool IsCooling
        {
            get
            {
                return true;//ElectrodeCoolingWaterValve!=null && ElectrodeCoolingWaterValve.IsOpen;
            }
        }

        private string _coolingButtonBackground = "CadetBlue";

        public string CoolingButtonBackground
        {
            get
            {
                if (IsCooling)
                {
                    _coolingButtonBackground = _coolingButtonBackground == "#95B3D7" ? "Blue" : "#95B3D7";
                    return _coolingButtonBackground;
                }

                if (IsCoolingOkForProcess)
                    return "#00C900";

                return "CadetBlue";
            }
        }

        public bool IsRfPowering
        {
            get
            {
                return (PMState)PMStatus == PMState.RfPowering;
            }
        }

        public bool IsLeakCheck
        {
            get
            {
                return (PMState)PMStatus == PMState.LeakCheck;
            }
        }

        private string _rfPowerButtonBackground = "CadetBlue";

        public string RfPowerButtonBackground
        {
            get
            {
                if (IsRfPowering)
                {
                    _rfPowerButtonBackground = _rfPowerButtonBackground == "#95B3D7" ? "Blue" : "#95B3D7";
                    return _rfPowerButtonBackground;
                }

                return "CadetBlue";
            }
        }

        public bool IsCyclePurging => (PMState)PMStatus == PMState.Purge;

        private string _cyclePurgeButtonBackground = "CadetBlue";

        public string CyclePurgeButtonBackground
        {
            get
            {
                if (IsCyclePurging)
                {
                    _cyclePurgeButtonBackground = _cyclePurgeButtonBackground == "#95B3D7" ? "Blue" : "#95B3D7";
                    return _cyclePurgeButtonBackground;
                }

                return "CadetBlue";
            }
        }

        public bool IsVenting
        {
            get
            {
                return (PMState)PMStatus == PMState.Venting;
            }
        }

        private string _ventButtonBackground = "CadetBlue";

        public string VentButtonBackground
        {
            get
            {
                if (IsVenting)
                {
                    _ventButtonBackground = _ventButtonBackground == "#95B3D7" ? "Blue" : "#95B3D7";
                    return _ventButtonBackground;
                }

                return "CadetBlue";
            }
        }

        public bool IsProcessing
        {
            get
            {
                return (PMState)PMStatus == PMState.PreProcess || (PMState)PMStatus == PMState.Processing || (PMState)PMStatus == PMState.PostProcess;
            }
        }

        public Visibility RfPowerOnChamberVisibility
        {
            get
            {
                return IsRfPowerOn ? Visibility.Visible : Visibility.Hidden;
            }
        }

        public Visibility BiasRfPowerOnChamberVisibility
        {
            get
            {
                if (!IsBiasRfVisible)
                    return RfPowerOnChamberVisibility;
                return IsBiasRfPowerOn ? Visibility.Visible : Visibility.Hidden;
            }
        }

        public Visibility BoostPumpVisibility
        {
            get;
            set;
        }

        public bool IsRfPowerOnEnabled
        {
            get
            {
                return !IsRfPowerOn;
            }
        }

        public bool IsRfPowerOffEnabled
        {
            get
            {
                return IsRfPowerOn;
            }
        }

        public string ChamberStatus
        {
            get
            {
                return $"{(PMState)PMStatus}";
            }
        }

        public Brush ChamberStatusBkColor
        {
            get
            {
                switch ((PMState)PMStatus)
                {
                case PMState.Error:
                    return Brushes.Red;
                case PMState.Idle:
                    return Brushes.LightGray;
                default:
                    return Brushes.LightGreen;
                }
                //return Brushes.Transparent;
            }
        }

        public Brush ChamberStatusForeColor
        {
            get
            {
                if (true)
                    return Brushes.Black;
                //else if (false)
                //    return Brushes.LightGreen;
                //return Brushes.Red;
            }
        }

        public Brush PMOnlineColor
        {
            get
            {
                if (IsOnline)
                    return Brushes.LimeGreen;
                return Brushes.Transparent;
            }
        }

        public double RfReflectPower
        {
            get;
            set;
        }

        public double RfForwardPower
        {
            get;
            set;
        }

        public object[] RfPowerOnCommandParameter
        {
            get
            {
                return new object[] { VirgoDevice.Rf.ToString(), AITRfOperation.SetPowerOnOff.ToString(), "true" };
            }
        }

        public object[] RfPowerOffCommandParameter
        {
            get
            {
                return new object[] { VirgoDevice.Rf.ToString(), AITRfOperation.SetPowerOnOff.ToString(), "false" };
            }
        }

        public double LotBarcodeHeight
        {
            get
            {
                return IsBarcodeEnabled ? 35 : 0;
            }
        }

        public double DataLogHeight
        {
            get
            {
                return IsBarcodeEnabled ? 0 : 35;
            }
        }

        public double RecipeBarcodeHeight
        {
            get
            {
                return IsBarcodeEnabled ? 35 : 0;
            }
        }

        public string RecipeBarcodeInputText
        {
            get;
            set;
        }

        public int RecipeBarcodeLength
        {
            get;
            set;
        }

        public int LotBarcodeLength
        {
            get;
            set;
        }

        public int LotBarcodeMaxCount
        {
            get;
            set;
        }

        [IgnorePropertyChange]
        public string BasePressureSetPoint
        {
            get;
            set;
        }

        [IgnorePropertyChange]
        public string PumpLimitSetPoint
        {
            get;
            set;
        }

        [IgnorePropertyChange]
        public string ManualProcessElectrodeCriticalTemperatureSetPoint
        {
            get;
            set;
        }

        private string _stepModeSetPoint = "";

        [IgnorePropertyChange]
        public string StepModeSetPoint
        {
            get
            {
                return _stepModeSetPoint;
            }
            set
            {
                _stepModeSetPoint = value;
            }
        }

        [IgnorePropertyChange]
        public string ElectrodeTemperatureSetPoint
        {
            get;
            set;
        }

        [IgnorePropertyChange]
        public string ThrottleValveModeSetPoint
        {
            get;
            set;
        }

        [IgnorePropertyChange]
        public string ThrottleValvePositionSetPoint
        {
            get;
            set;
        }

        [IgnorePropertyChange]
        public string ThrottleValvePressureSetPoint
        {
            get;
            set;
        }

        [IgnorePropertyChange]
        public string BoostPumpPressureSetPoint
        {
            get;
            set;
        }

        [IgnorePropertyChange]
        public string RfTimeSetPoint
        {
            get;
            set;
        }

        private string _rfModeSetPoint;

        [IgnorePropertyChange]
        public string RfModeSetPoint
        {
            get
            {
                return _rfModeSetPoint;
            }
            set
            {
                _rfModeSetPoint = value;
            }
        }

        [IgnorePropertyChange]
        public string RfFrequencySetPoint
        {
            get;
            set;
        }

        [IgnorePropertyChange]
        public string RfDutySetPoint
        {
            get;
            set;
        }

        [IgnorePropertyChange]
        public string RfMatchProcessModeSetPoint
        {
            get;
            set;
        }

        [IgnorePropertyChange]
        public string RfMatchPositionC1SetPoint
        {
            get;
            set;
        }

        [IgnorePropertyChange]
        public string RfMatchPositionC2SetPoint
        {
            get;
            set;
        }

        private string _selectedRecipeName;
        [Subscription("RecipeName")]
        public string SelectedRecipeName
        {
            get
            {
                return _selectedRecipeName;
            }
            set
            {
                if (string.IsNullOrEmpty(value))
                    return;
                _selectedRecipeName = value;
                if (IsAutoMode)
                {
                    InvokePropertyChanged("SelectedRecipeName");
                }
            }
        }

        [Subscription("ProcessStatus")]
        public string ProcessStatus
        {
            get;
            set;
        }

        [Subscription("RecipeStepTimeElapsed")]
        public string RecipeStepTimeElapsed
        {
            get;
            set;
        }

        [Subscription("RecipeStepTimeSetPoint")]
        public string RecipeStepTimeSetPoint
        {
            get;
            set;
        }

        [Subscription("RecipeSteps")]
        public string RecipeSteps
        {
            get;
            set;
        }

        private string _recipeStepRfTimeSetPoint;
        [Subscription("RecipeStepRfTimeSetPoint")]
        public string RecipeStepRfTimeSetPoint
        {
            get
            {
                return _recipeStepRfTimeSetPoint;
            }
            set
            {
                _recipeStepRfTimeSetPoint = value;
                if (IsAutoMode)
                {
                    RfTimeSetPoint = _recipeStepRfTimeSetPoint;
                    InvokePropertyChanged("RfTimeSetPoint");
                }
            }
        }
        //public string RecipeStatusBackground
        //{
        //    get
        //    {
        //        return IsProcessing ? "Green" : "Blue";
        //    }
        //}

        public ObservableCollection<string> RFModeItems
        {
            get;
            set;
        }

        public bool IsRFModeSelectable
        {
            get;
            set;
        }

        public bool IsFullControlPermission
        {
            get;
            set;
        }

        public bool EnableDeviceControl
        {
            get
            {
                return IsFullControlPermission;
            }
        }
        public Visibility WallHeaterVisibility { get; set; }

        public Visibility GridHeaterVisibility { get; set; }
        public Ax.WaferSize SmallPinWaferSize { get; set; }
        public Ax.WaferSize MediumPinWaferSize { get; set; }
        public Ax.WaferSize BigPinWaferSize { get; set; }

        public string SmallPinUpText { get; set; }
        public string SmallPinDownText { get; set; }
        public string MediumPinUpText { get; set; }
        public string MediumPinDownText { get; set; }

        public int SmallPinHeight { get; set; }
        public int MediumPinHeight { get; set; }

        private int MenuPermission;
        private int _servoLiftPinMode;
        private string _servoLiftPinName;

        public PmOverviewViewModel()
        {
            BasePressureSetPointSaved = true;
            PumpLimitSetPointSaved = true;
        }

        protected override void Poll()
        {
            base.Poll();
            PinPosition = _servoLiftPinMode == 1 ? TriStateLiftPinPosition : _servoLiftPinMode == 2 ? GroupTriStateLiftPinPosition: DGroupTriStateLiftPinPosition;
            ManualStopState = _servoLiftPinMode == 1 ? TriStateLiftPinManualStopState : _servoLiftPinMode == 2 ? GroupTriStateLiftPinManualStopState: DGroupTriStateLiftPinManualStopState;
            ManualUpState = _servoLiftPinMode == 1 ? TriStateLiftPinManualUpState : _servoLiftPinMode == 2 ? GroupTriStateLiftPinManualUpState: DGroupTriStateLiftPinManualUpState;
            ManualDownState = _servoLiftPinMode == 1 ? TriStateLiftPinManualDownState : _servoLiftPinMode == 2 ? GroupTriStateLiftPinManualDownState: DGroupTriStateLiftPinManualDownState;
        }

        protected override void OnActivate()
        {
            base.OnActivate();

            _servoLiftPinMode = (int)QueryDataClient.Instance.Service.GetConfig($"{SystemName}.LiftPinMode");
            _servoLiftPinName = _servoLiftPinMode == 1 ? "TriStateLiftPin" : _servoLiftPinMode == 2 ? "TriStateLiftPin2" : _servoLiftPinMode == 4 ? "TriStateLiftPin4" : "";

            BasePressureSetPoint = QueryDataClient.Instance.Service.GetConfig($"{SystemName}.Pump.PumpBasePressure").ToString();
            PumpLimitSetPoint = ((float)(double)QueryDataClient.Instance.Service.GetConfig($"{SystemName}.Pump.PumpTimeLimit")).ToString();

            SmallPinWaferSize = MapWaferSize((int)QueryDataClient.Instance.Service.GetConfig($"System.SmallWafer"));
            MediumPinWaferSize = MapWaferSize((int)QueryDataClient.Instance.Service.GetConfig($"System.MidWafer"));
            BigPinWaferSize = MapWaferSize((int)QueryDataClient.Instance.Service.GetConfig($"System.BigWafer"));

            SmallPinUpText = $"{SmallPinWaferSize} Pin Up";
            SmallPinDownText = $"{SmallPinWaferSize} Pin Down";
            MediumPinUpText = $"{MediumPinWaferSize} Pin Up";
            MediumPinDownText = $"{MediumPinWaferSize} Pin Down";

            SmallPinHeight = (int)QueryDataClient.Instance.Service.GetConfig($"{SystemName}.LiftPinMode") == 0 ? 0 : 32;
            MediumPinHeight = (int)QueryDataClient.Instance.Service.GetConfig($"{SystemName}.LiftPinMode") == 0 ? 0 : 32;

            WallHeaterVisibility = ((bool)QueryDataClient.Instance.Service.GetConfig($"{SystemName}.EnableWallHeater")) ? Visibility.Visible : Visibility.Hidden;

            GridHeaterVisibility = ((bool)QueryDataClient.Instance.Service.GetConfig($"{SystemName}.EnableGridHeater")) ? Visibility.Visible : Visibility.Hidden;


            EPDVisibility = (bool) QueryDataClient.Instance.Service.GetConfig($"System.SetUp.EPDInstalled") && (bool)QueryDataClient.Instance.Service.GetConfig($"{SystemName}.EPD.IsEnabled")
                ? Visibility.Visible
                : Visibility.Hidden;
        }

        private Ax.WaferSize MapWaferSize(int value)
        {
            switch (value)
            {
                case 3: return Ax.WaferSize.WS3;
                case 4: return Ax.WaferSize.WS4;
                case 6: return Ax.WaferSize.WS6;
                case 8: return Ax.WaferSize.WS8;
            }

            return Ax.WaferSize.WS0;
        }

        protected override void OnDeactivate(bool close)
        {
            base.OnDeactivate(close);
        }

        protected override void OnInitialize()
        {
            base.OnInitialize();

            InitGasLine();

            InitParameterList(SystemName);

            foreach (var pmParameter in PMParameters)
            {
                Subscribe(pmParameter.Name);
            }
        }

        private void InitGasLine()
        {
            Gaslines = new List<GaslineItem>();

            for (int i = 1; i <= 5; i++)    //GasLine 跳号Enable
            {
                if ((bool)QueryDataClient.Instance.Service.GetConfig($"{SystemName}.MfcGas{i}.Enable"))
                {
                    var gasName = QueryDataClient.Instance.Service.GetConfig($"{SystemName}.MfcGas{i}.GasName");
                    var gasscale = QueryDataClient.Instance.Service.GetConfig($"{SystemName}.MfcGas{i}.MfcN2Scale");
                    Gaslines.Add(new GaslineItem
                    {
                        Index = (byte)i,
                        Display = $"MfcGas{i} " + gasName.ToString() + " " + gasscale.ToString() + " sccm",
                        ValveName = $"{SystemName}.ValveMfc{i}",
                        MfcName = $"{SystemName}.MfcGas{i}"
                    });
                }
            }

            //int count = 0;
            //for (int i = 1; i <= 5; i++)
            //{
            //    if ((bool)QueryDataClient.Instance.Service.GetConfig($"{SystemName}.MfcGas{i}.Enable")) count++;
            //}
            //for (byte index = 1; index <= count; index++)
            //{
            //    var gasName = QueryDataClient.Instance.Service.GetConfig($"{SystemName}.MfcGas{index}.GasName");
            //    Gaslines.Add(new GaslineItem
            //    {
            //        Index = index,
            //        Display = gasName.ToString(),
            //        ValveName = $"{SystemName}.ValveMfc{index}",
            //        MfcName = $"{SystemName}.MfcGas{index}"
            //    });
            //}
        }

        public List<PMParameter> InitParameterList(string pmID)
        {
            PMParameters = new List<PMParameter>();

            // 工艺时间
            PMParameters.Add(new PMParameter
            {
                Name = $"{pmID}.RecipeProcessTime", Display = "Process Time (s)", Type = ParameterType.Share, Feedback = "00:00:00"
            });

            // 工艺步数
            PMParameters.Add(new PMParameter
            {
                Name = $"{pmID}.StepNo",
                Display = "Process Step",
                Type = ParameterType.Share,
                Feedback = "0",
                Setpoint = ""
            });

            // 工艺每一步运行时间
            PMParameters.Add(new PMParameter
            {
                Name = $"{pmID}.RecipeStepTimeElapsed",
                Display = "Time elapsed (s)",
                Type = ParameterType.Default,
                Feedback = "0",
                Setpoint = "",
                SetpointEnabled = false
            });

            // process gauge
            PMParameters.Add(new PMParameter
            {
                Name = $"{pmID}.ProcessGauge.Value",
                Display = "Process Pressure(mTorr)",
                Type = ParameterType.Share,
                Feedback = "0",
                SetpointEnabled = false
            });

            // pressure gauge
            //PMParameters.Add(new PMParameter
            //{
            //    Name = $"{pmID}.PressureGauge.Value", Display = "腔体压力(mTorr)",
            //    Type = ParameterType.Share, Feedback = "0", SetpointEnabled = false
            //});
            
            // foreline gauge

            // 蝶阀运作模式
            PMParameters.Add(new PMParameter
            {
                Name            = $"{pmID}.IoThrottleValve.ThrottleValve.TVMode",
                Display         = "TVMode",
                Type            = ParameterType.DropDownList,
                SetpointEnabled = true,
                Selections      = new List<string> { "Position", "Pressure" },
                Setpoint        = "Pressure",
                Feedback        = "Pressure"
            });

            // 蝶阀位置
            PMParameters.Add(new PMParameter
            {
                Name = $"{pmID}.IoThrottleValve.ThrottleValve.TVPosition", Display = "TVPosition (%)",
                Type = ParameterType.Default, Feedback = "0", Setpoint = "", SetpointEnabled = true
            });

            // 蝶阀压力
            PMParameters.Add(new PMParameter
            {
                Name = $"{pmID}.IoThrottleValve.ThrottleValve.TVPressure", Display = "TVPressure (mTorr)",
                Type = ParameterType.Default, Feedback = "0", Setpoint = "", SetpointEnabled = true
            });

            // 底座温度
            PMParameters.Add(new PMParameter
            {
                Name = $"{pmID}.IoTemperatureCtrl.TemperatureControl.SubstrateTemperature",
                Display = HeaterButtonContent== "Substrate Heating" ? "LE TEMP (℃)": "Chiller TEMP(℃)",
                Type = ParameterType.Default,
                Feedback = "0",
                Setpoint = "",
                SetpointEnabled = true
            });

            // 射频时间
            PMParameters.Add(new PMParameter
            {
                Name = $"{pmID}.Rf.PowerOnTime", Display = "RF Time (s)", Type = ParameterType.Default,
                Feedback = "0", Setpoint = "", SetpointEnabled = true
            });

            //para = new PMParameter() { Display = "RF Mode", Type = ParameterType.DropDownList, Feedback = "Manual", SetpointEnabled = true };
            //para.Selections = new List<string>() { "Manual", "Auto" };
            //paras.Add(para);

            // 设定功率
            PMParameters.Add(new PMParameter
            {
                Name = $"{pmID}.Rf.ForwardPower", Display = "Source ForwardPower (w)", Type = ParameterType.Default,
                Feedback = "", Setpoint = "", SetpointEnabled = true
            });

            // ReflectPower
            PMParameters.Add(new PMParameter
            {
                Name = $"{pmID}.Rf.ReflectPower",
                Display = "Source ReflectPower (w)",
                Type = ParameterType.Share,
                Setpoint = ""
            });

            //// Match C1
            //PMParameters.Add(new PMParameter
            //{
            //    Name =$"{pmID}.Match.TunePosition1", Display = "Match C1 (%)", Type = ParameterType.Default, Feedback = "", Setpoint = "",
            //    SetpointEnabled = true
            //});

            //// Match C2
            //PMParameters.Add(new PMParameter
            //{
            //    Name = $"{pmID}.Match.TunePosition2", Display = "Match C2 (%)", Type = ParameterType.Default, Feedback = "", Setpoint = "",
            //    SetpointEnabled = true
            //});

            // Match C1
            PMParameters.Add(new PMParameter()
            {
                Name = $"{pmID}.Match.TunePosition1",
                Display = "Source Match C1(%)",
                Type = ParameterType.Share,
                Setpoint = ""
            });

            // Match C2
            PMParameters.Add(new PMParameter()
            {
                Name = $"{pmID}.Match.TunePosition2",
                Display = "Source Match C2(%)",
                Type = ParameterType.Share,
                Setpoint = ""
            });

            // Vpp
            PMParameters.Add(new PMParameter()
            {
                Name = $"{pmID}.Match.VPP",
                Display = "Source Vpp", Type = ParameterType.Share, Setpoint = ""
            });

            if ((bool)QueryDataClient.Instance.Service.GetConfig($"{pmID}.BiasRf.EnableBiasRF"))
            {
                // 设定功率
                PMParameters.Add(new PMParameter
                {
                    Name = $"{pmID}.BiasRf.ForwardPower",
                    Display = "Bias ForwardPower(w)",
                    Type = ParameterType.Default,
                    Feedback = "",
                    Setpoint = "",
                    SetpointEnabled = true
                });

                // ReflectPower
                PMParameters.Add(new PMParameter
                {
                    Name = $"{pmID}.BiasRf.ReflectPower",
                    Display = "Bias ReflectPower(w)",
                    Type = ParameterType.Share,
                    Setpoint = ""
                });

                // Match Mode
                PMParameters.Add(new PMParameter
                {
                    Name = $"{pmID}.BiasMatch.MatchProcessMode",
                    Display = "Bias Match Mode",
                    Type = ParameterType.DropDownList,
                    SetpointEnabled = true,
                    Selections = new List<string> { "Preset", "Hold" },
                    Setpoint = "Preset",
                    Feedback = "Preset"
                });

                // Match C1
                PMParameters.Add(new PMParameter
                {
                    Name = $"{pmID}.BiasMatch.C1",
                    Display = "Bias Match C1(%)",
                    Type = ParameterType.Default,
                    Feedback = "0",
                    Setpoint = "",
                    SetpointEnabled = true
                });

                // Match C2
                PMParameters.Add(new PMParameter
                {
                    Name = $"{pmID}.BiasMatch.C2",
                    Display = "Bias Match C2(%)",
                    Type = ParameterType.Default,
                    Feedback = "0",
                    Setpoint = "",
                    SetpointEnabled = true
                });

                // Vpp
                PMParameters.Add(new PMParameter()
                {
                    Name = $"{pmID}.BiasMatch.VPP",
                    Display = "Bias Vpp",
                    Type = ParameterType.Share,
                    Setpoint = ""
                });
            }

            // 气体
            foreach (var gas in Gaslines)
            {
                PMParameters.Add(new PMParameter
                {
                    Name = $"{pmID}.IoMfc.MfcGas{gas.Index}.FeedBack",
                    Display = $"{gas.Display} (sccm)",
                    Type = ParameterType.Default,
                    Feedback = "0",
                    Setpoint = "0",
                    SetpointEnabled = true
                });
            }

            return PMParameters;
        }

        public void SelectRecipe()
        {
            if (MenuPermission != 3) return;
            if (!Enum.TryParse(SystemName, out ModuleName mod))
                return;

            RecipeSequenceSelectDialogViewModel dialog = new RecipeSequenceSelectDialogViewModel();
            dialog.DisplayName = "Select Recipe";

            dialog.Files = new ObservableCollection<FileNode>(RecipeSequenceTreeBuilder.GetFiles(RecipeClient.Instance.Service.GetRecipes(mod, false).ToList()));

            WindowManager wm = new WindowManager();
            bool? bret = wm.ShowDialog(dialog);
            if ((bool)bret)
            {
                SelectedRecipeName = dialog.DialogResult;
            }
        }

        public void UnLoad()
        {
        }

        public void Start()
        {
            if (MenuPermission != 3) return;
            if (string.IsNullOrWhiteSpace(this.SelectedRecipeName))
            {
                DialogBox.ShowError("Choose recipe");
                return;
            }
            InvokeClient.Instance.Service.DoOperation($"{SystemName}.{RtOperation.RunRecipe}", $"{SystemName}\\{this.SelectedRecipeName}");
        }

        public void NextStep()
        {
            if (MenuPermission != 3) return;
            if (MessageBox.Show("Next step?", "JetPlasma", MessageBoxButton.YesNo) == MessageBoxResult.Yes)
            {
                InvokeClient.Instance.Service.DoOperation($"{SystemName}.{RtOperation.SkipCurrentStep}");
            }
        }

        public void Stop()
        {
            if (MenuPermission != 3) return;
            if (MessageBox.Show("Stop process?", "JetPlasma", MessageBoxButton.YesNo) == MessageBoxResult.Yes)
            {
                InvokeClient.Instance.Service.DoOperation($"{SystemName}.{RtOperation.AbortRecipe}");
            }
        }

        public void SetManual()
        {
            if (MenuPermission != 3) return;
            InvokeClient.Instance.Service.DoOperation($"{SystemName}.PmManual");
        }

        public void SetAuto()
        {
            if (MenuPermission != 3) return;
            InvokeClient.Instance.Service.DoOperation($"{SystemName}.PmAuto");
        }

        public void SetOnline()
        {
            if (MenuPermission != 3) return;
            InvokeClient.Instance.Service.DoOperation($"{SystemName}.PmOnline");
        }

        public void SetInit()
        {
            if (MenuPermission != 3) return;
            InvokeClient.Instance.Service.DoOperation($"{SystemName}.Home");
        }

        public void AbortPM()
        {
            if (MenuPermission != 3) return;
            InvokeClient.Instance.Service.DoOperation($"{SystemName}.Abort");
        }

        public void SetOffline()
        {
            if (MenuPermission != 3) return;
            InvokeClient.Instance.Service.DoOperation($"{SystemName}.PmOffline");
        }

        public void UnlockLid()
        {
            if (MenuPermission != 3) return;
            InvokeClient.Instance.Service.DoOperation($"{SystemName}.UnlockLid");
        }

        public void LockLid()
        {
            if (MenuPermission != 3) return;
            InvokeClient.Instance.Service.DoOperation($"{SystemName}.LockLid");
        }

        public void OpenSlitValve()
        {
            if (MenuPermission != 3) return;
            if (!IsCDAOK)
            {
                DialogBox.ShowWarning("CDA Pressure Error");
                return;
            }
            if (!IsArmNotExtend)
            {
                DialogBox.ShowWarning("Arm Is Not Extend Error");
                return;
            }
            InvokeClient.Instance.Service.DoOperation($"{SystemName}.SlitDoor.Open");
        }

        public void CloseSlitValve()
        {
            if (MenuPermission != 3) return;
            if (!IsCDAOK)
            {
                DialogBox.ShowWarning("CDA Pressure Error");
                return;
            }
            if (!IsArmNotExtend)
            {
                DialogBox.ShowWarning("Arm Is Not Extend Error");
                return;
            }
            InvokeClient.Instance.Service.DoOperation($"{SystemName}.SlitDoor.Close");
        }

        protected override void InvokeAfterUpdateProperty(Dictionary<string, object> data)
        {
            MenuPermission = ClientApp.Instance.GetPermission($"Overview{SystemName}");
            foreach (var pmParameter in PMParameters)
            {
                string paraName = pmParameter.Name;

                if (!data.ContainsKey(paraName))
                    continue;

                pmParameter.Feedback = $"{data[paraName]:N0}";

                if (paraName == $"{SystemName}.BiasMatch.MatchProcessMode")
                {
                    pmParameter.Feedback = (int)data[paraName] == 1 ? "Preset" : "Hold";
                }
                if (paraName == $"{SystemName}.BiasMatch.C1")
                {
                    pmParameter.Feedback = $"{data[paraName]:N1}";
                }
                if (paraName == $"{SystemName}.BiasMatch.C2")
                {
                    pmParameter.Feedback = $"{data[paraName]:N1}";
                }
                if (paraName == $"{SystemName}.ProcessGauge.Value")
                {
                    pmParameter.Feedback = $"{data[paraName]:N1}";
                }
                if (paraName == $"{SystemName}.IoThrottleValve.ThrottleValve.TVMode")
                {
                    pmParameter.Feedback = pmParameter.Setpoint;
                }
                if (paraName == $"{SystemName}.IoThrottleValve.ThrottleValve.TVPressure")
                {
                    if (Convert.ToDouble(data[paraName]) <= 0.0)
                    {
                        pmParameter.Feedback = "0.0";
                    }
                    else
                    {
                        pmParameter.Feedback = $"{(Convert.ToDouble(data[paraName]) + ProcessPressureOffset):N1}";
                    }
                }
                if (paraName == $"{SystemName}.Rf.PowerOnTime")
                {
                    pmParameter.Feedback = $"{data[$"{SystemName}.Rf.PowerOnTime"]}";
                }
                if (paraName == $"{SystemName}.Match.TunePosition1"|| paraName == $"{SystemName}.Match.TunePosition2")
                {
                    pmParameter.Feedback = $"{data[paraName]:N2}";
                }
                if (paraName == $"{SystemName}.StepTime")
                {
                    pmParameter.Feedback = $"{data[$"{SystemName}.RecipeStepTimeElapsed"]:N0}";
                    pmParameter.Setpoint = $"{data[$"{SystemName}.RecipeStepTimeSetPoint"]:N0}";
                }
                if (paraName == $"{SystemName}.StepNo")
                {
                    pmParameter.Setpoint = $"{data[$"{SystemName}.RecipeSteps"]:N0}";
                }
                if (paraName == $"{SystemName}.RecipeStepTimeElapsed")
                {
                    pmParameter.Setpoint = $"{data[$"{SystemName}.RecipeStepTimeSetPoint"]:N0}";
                }
                if (paraName == ($"{SystemName}.IoTemperatureCtrl.TemperatureControl.SubstrateTemperature"))
                {
                    if(IsAutoMode)
                    {
                        pmParameter.Setpoint = string.Format("{0:N1}", ((AITHeaterData)data[$"{SystemName}.HeaterChamber.DeviceData"]).SetPoint);
                    }
                    pmParameter.Feedback = string.Format("{0:N1}", ((AITHeaterData)data[$"{SystemName}.HeaterChamber.DeviceData"]).FeedBack);
                }
            }

            foreach (var gasLine in Gaslines)
            {
                if (data.ContainsKey(gasLine.ValveName))
                {
                    gasLine.ValveData = (AITValveData)data[gasLine.ValveName];
                    gasLine.NotifyOfPropertyChange("ValveData");
                }
                if (data.ContainsKey(gasLine.MfcName))
                {
                    gasLine.MfcData = (AITMfcData)data[gasLine.MfcName];
                    gasLine.Display = gasLine.MfcData.DeviceName + " " + gasLine.MfcData.DisplayName + " " + gasLine.MfcData.Scale + " " + gasLine.MfcData.Unit;
                    PMParameters.Find(x => x.Name == $"{SystemName}.IoMfc.MfcGas{gasLine.Index}.FeedBack").Display = gasLine.Display;
                    PMParameters.Find(x => x.Name == $"{SystemName}.IoMfc.MfcGas{gasLine.Index}.FeedBack").NotifyOfPropertyChange("Display");
                    gasLine.NotifyOfPropertyChange("MfcData");
                }
            }

            //if (PMParameters.Find(x => x.Name == $"{SystemName}.BiasMatch.MatchProcessMode").Setpoint == "Hold")
            //{
            //    PMParameters.Find(x => x.Name == $"{SystemName}.BiasMatch.C1").Setpoint = "";
            //    PMParameters.Find(x => x.Name == $"{SystemName}.BiasMatch.C2").Setpoint = "";
            //}

        }

        public void DoStartPump()
        {
            if (MenuPermission != 3) return;
            if (IsStartPumping)
            {
                InvokeClient.Instance.Service.DoOperation($"{SystemName}.{RtOperation.Abort}");
                return;
            }
            InvokeClient.Instance.Service.DoOperation($"{SystemName}.StartPump");

        }

        // Pumpdown
        public void DoPump()
        {
            if (MenuPermission != 3) return;
            if (IsPumping)
            {
                InvokeClient.Instance.Service.DoOperation($"{SystemName}.{RtOperation.Abort}");
                return;
            }

            if (IsPumpingOkForProcess)
            {
                InvokeClient.Instance.Service.DoOperation($"{SystemName}.StopPump");
                return;
            }

            // 设置底压
            double basePressure = string.IsNullOrEmpty(BasePressureSetPoint) ? 0 : Convert.ToDouble(BasePressureSetPoint);

            if (basePressure <= 0.01 || basePressure >= 1000)
            {
                MessageBox.Show($"Basic pressure setpoint {basePressure} invalid，between 0 end 1000(mtorr)");
                return;
            }

            double pumpLimit = string.IsNullOrEmpty(PumpLimitSetPoint) ? 0 : Convert.ToDouble(PumpLimitSetPoint);

            if (pumpLimit <= 0.01 || pumpLimit >= 1200)
            {
                MessageBox.Show($"Pump limit between 0 end 1200，current value {pumpLimit}");
                return;
            }

            InvokeClient.Instance.Service.DoOperation("System.SetConfig", $"{SystemName}.Pump.PumpBasePressure", basePressure.ToString());

            InvokeClient.Instance.Service.DoOperation("System.SetConfig", $"{SystemName}.Pump.PumpTimeLimit", pumpLimit.ToString());

            InvokeClient.Instance.Service.DoOperation($"{SystemName}.Pump");

            // pump down 过程中tv 全开
            var tvMode = PMParameters.Find(x => x.Name == $"{SystemName}.IoThrottleValve.ThrottleValve.TVMode");
            tvMode.Feedback = "Position";

            PumpLimitSetPointSaved = true;
            BasePressureSetPointSaved = true;

            NotifyOfPropertyChange(nameof(PumpLimitSetPointSaved));
            NotifyOfPropertyChange(nameof(BasePressureSetPointSaved));
        }

        private void MoveGuidePin(MovementPosition pos)
        {
            switch (pos)
            {
            case MovementPosition.Down:
                BottomPinStatus = 1;
                TopPinStatus = 0;
                MidPinStatus = 0;
                break;
            case MovementPosition.Up:
                BottomPinStatus = 0;
                TopPinStatus = 1;
                MidPinStatus = 0;
                break;
            case MovementPosition.Middle:
                BottomPinStatus = 0;
                TopPinStatus = 0;
                MidPinStatus = 1;
                break;
            default:
                break;
            }
        }

        public void Purge()
        {
            if (MenuPermission != 3) return;
            if (IsCyclePurging)
            {
                InvokeClient.Instance.Service.DoOperation($"{SystemName}.StopPurge");
            }
            else
            {
                InvokeClient.Instance.Service.DoOperation($"{SystemName}.Purge");
            }
        }

        public void LeakCheck()
        {
            if (!IsLeakCheck)
            {
                InvokeClient.Instance.Service.DoOperation($"{SystemName}.LeakCheck");
            }
        }

        public void Vent()
        {
            if (MenuPermission != 3) return;
            //OverviewPMProvider.Instance.Vent("PM1");
            if (!IsVenting)
            {
                InvokeClient.Instance.Service.DoOperation($"{SystemName}.Vent");
                return;
            }
            InvokeClient.Instance.Service.DoOperation($"{SystemName}.{RtOperation.Abort}");
        }

        /// <summary>
        /// 流气
        /// </summary>
        public void Gas()
        {
            if (MenuPermission != 3) return;
            if (!this.HandleThrottleValve())
                return;

            //GasLine 跳号Enable
            object[] mfc = new object[5];
            string[] mfcSetPoint = new string[5];

            for (int i = 0; i < 5; i++)
            {
                if ((bool)QueryDataClient.Instance.Service.GetConfig($"{SystemName}.MfcGas{i + 1}.Enable"))
                {
                    mfcSetPoint[i] = PMParameters.Find(x => x.Name == $"{SystemName}.IoMfc.MfcGas{i + 1}.FeedBack").Setpoint;
                    if (string.IsNullOrWhiteSpace(mfcSetPoint[i]))
                    {
                        DialogBox.ShowError("Please input gas flow value");
                        return;
                    }
                }
                mfc[i] = Convert.ToDouble(string.IsNullOrEmpty(mfcSetPoint[i]) ? "0.0" : mfcSetPoint[i]);
            }

            //object[] mfc = new object[Gaslines.Count];
            //string[] mfcSetPoint = new string[Gaslines.Count];

            //for (int index = 0; index < Gaslines.Count; index++)
            //{
            //    mfcSetPoint[index] = PMParameters.Find(x => x.Name == $"{SystemName}.IoMfc.MfcGas{index + 1}.FeedBack").Setpoint;
            //    if (string.IsNullOrWhiteSpace(mfcSetPoint[index]))
            //    {
            //        DialogBox.ShowError("请输入气体流量值");
            //        return;
            //    }
            //    mfc[index] = Convert.ToDouble(string.IsNullOrEmpty(mfcSetPoint[index]) ? "0.0" : mfcSetPoint[index]);
            //}

            if ((IsGasFlowing 
                && (Math.Abs((double)mfc[0] - (double)_oldmfc[0]) < 0.01) 
                && (Math.Abs((double)mfc[1] - (double)_oldmfc[1]) < 0.01) 
                && (Math.Abs((double)mfc[2] - (double)_oldmfc[2])) < 0.01)
                || (IsGasFlowing && (Math.Abs((double)mfc[0]) <= 0.01 && Math.Abs((double)mfc[1]) <= 0.01 && Math.Abs((double)mfc[2]) <= 0.01)))
            {
                InvokeClient.Instance.Service.DoOperation($"{SystemName}.{RtOperation.Abort}");
                return;
            }

            _oldmfc = mfc;
            InvokeClient.Instance.Service.DoOperation($"{SystemName}.{RtOperation.GasFlow}", mfc);
        }

        /// <summary>
        /// 处理蝶阀
        /// </summary>
        /// <returns></returns>
        private bool HandleThrottleValve()
        {
            var tvMode = PMParameters.Find(x => x.Name == $"{SystemName}.IoThrottleValve.ThrottleValve.TVMode");
            string tvModeSp = "TV" + tvMode.Setpoint + "Ctrl";

            if (!Enum.TryParse(tvModeSp, out PressureCtrlMode ctrlMode))
            {
                MessageBox.Show("Select the mode of Throttle valve");
                return false;
            }

            switch (ctrlMode)
            {
            case PressureCtrlMode.TVPressureCtrl:
                string tvPressureSP = PMParameters.Find(x => x.Name == $"{SystemName}.IoThrottleValve.ThrottleValve.TVPressure").Setpoint;
                if (string.IsNullOrWhiteSpace(tvPressureSP))
                {
                    DialogBox.ShowError("Please input TV pressure value");
                    return false;
                }

                double pressure = Convert.ToDouble(tvPressureSP);
                if (pressure < 0 || pressure > 756000)
                {
                    DialogBox.ShowError($"TV pressure {pressure} invalid，between 0 end 756000");
                    return false;
                }

                InvokeClient.Instance.Service.DoOperation($"{SystemName}.{VirgoDevice.ThrottleValve}.{AITThrottleValveOperation.SetPressure}", pressure);
                break;
            case PressureCtrlMode.TVPositionCtrl:
                string tvPositionSP = PMParameters.Find(x => x.Name == $"{SystemName}.IoThrottleValve.ThrottleValve.TVPosition").Setpoint;
                if (string.IsNullOrWhiteSpace(tvPositionSP))
                {
                    DialogBox.ShowError("Please input TV Position value");
                    return false;
                }

                double position = Convert.ToDouble(tvPositionSP);
                if (position < 0 || position > 100)
                {
                    DialogBox.ShowError($"TV Position {position} invalid，between 0 end 100");
                    return false;
                }

                InvokeClient.Instance.Service.DoOperation($"{SystemName}.{VirgoDevice.ThrottleValve}.{AITThrottleValveOperation.SetPosition}", position);
                break;
            default:
                break;
            }

            tvMode.Feedback = tvMode.Setpoint;
            return true;
        }

        public void Heat()
        {
            var para_temp = PMParameters.Find(x => x.Name == $"{SystemName}.IoTemperatureCtrl.TemperatureControl.SubstrateTemperature");
            var temp = para_temp.Setpoint;
            if (double.TryParse(temp, out double dt))
            {
                InvokeClient.Instance.Service.DoOperation($"{SystemName}.{RtOperation.Heat}", dt);
            }
            else
            {
                DialogBox.ShowError("Set TEMP invalid");
            }
        }

        // RF Power
        public void RF()
        {
            if (MenuPermission != 3) return;
            double rf_sp = 0;
            double rf_sp_bias = 0;
            double match1_sp = 0.0f;
            double match2_sp = 0.0f;
            double rf_time = 0;
            string rfPowerSetPointBias = "";
            BiasRfMatchMode matchMode = BiasRfMatchMode.Preset;

            if (IsRfPowering)
            {
                InvokeClient.Instance.Service.DoOperation($"{SystemName}.{RtOperation.Abort}");

                return;
            }

            // 源射频功率
            string rfPowerSetPoint = PMParameters.Find(x => x.Name == $"{SystemName}.Rf.ForwardPower").Setpoint;
            if (string.IsNullOrWhiteSpace(rfPowerSetPoint))
            {
                DialogBox.ShowWarning("Input RF power set value first");
                return;
            }

            // 源射频时间
            string sRFTime = PMParameters.Find(x => x.Name == $"{SystemName}.Rf.PowerOnTime").Setpoint;
            if (string.IsNullOrWhiteSpace(sRFTime))
            {
                DialogBox.ShowError("Input RF power time");
                return;
            }

            // 偏压射频功率
            if ((bool)QueryDataClient.Instance.Service.GetConfig($"{SystemName}.BiasRf.EnableBiasRF"))
            {
                rfPowerSetPointBias = PMParameters.Find(x => x.Name == $"{SystemName}.BiasRf.ForwardPower").Setpoint;
                if (string.IsNullOrWhiteSpace(rfPowerSetPointBias))
                {
                    DialogBox.ShowWarning("Input Bias RF power set value first");
                    return;
                }

                rf_sp_bias = Convert.ToDouble(rfPowerSetPointBias);

                if ((bool)QueryDataClient.Instance.Service.GetConfig($"{SystemName}.BiasMatch.EnableBiasMatch"))
                {
                    var MatchMode = PMParameters.Find(x => x.Name == $"{SystemName}.BiasMatch.MatchProcessMode");

                    if (!Enum.TryParse(MatchMode.Setpoint, out matchMode))
                    {
                        MessageBox.Show("Select the mode of Throttle valve");
                        return;
                    }

                    if (matchMode == BiasRfMatchMode.Preset)
                    {
                        PMParameters.Find(x => x.Name == $"{SystemName}.BiasMatch.MatchProcessMode").Feedback = "Preset";
                        // Match C1
                        string rfMatchC1SetPoint = PMParameters.Find(x => x.Name == $"{SystemName}.BiasMatch.C1").Setpoint;
                        if (string.IsNullOrWhiteSpace(rfMatchC1SetPoint))
                        {
                            DialogBox.ShowWarning("Input Match C1 set value first");
                            return;
                        }

                        // Match C2
                        string rfMatchC2SetPoint = PMParameters.Find(x => x.Name == $"{SystemName}.BiasMatch.C2").Setpoint;
                        if (string.IsNullOrWhiteSpace(rfMatchC2SetPoint))
                        {
                            DialogBox.ShowWarning("Input Match C2 set value first");
                            return;
                        }

                        match1_sp = Convert.ToDouble(rfMatchC1SetPoint);
                        match2_sp = Convert.ToDouble(rfMatchC2SetPoint);
                    }
                    else if (matchMode == BiasRfMatchMode.Hold)
                    {
                        //PMParameters.Find(x => x.Name == $"{SystemName}.BiasMatch.MatchProcessMode").Feedback = "Hold";
                    }
                }
            }
          

             rf_sp = Convert.ToDouble(rfPowerSetPoint);
             rf_time = Convert.ToDouble(sRFTime);
            InvokeClient.Instance.Service.DoOperation($"{SystemName}.{RtOperation.RfPower}", rf_sp, rf_sp_bias, rf_time, (int)matchMode, match1_sp, match2_sp);
        }

        // Lift pin method
        public void MoveLiftPinSetState(string name)
        {
            if (MenuPermission != 3) return;
            if (!IsCDAOK)
            {
                DialogBox.ShowWarning("CDA Pressure Error");
                return;
            }
            InvokeClient.Instance.Service.DoOperation($"{SystemName}.{_servoLiftPinName}.SetState",name);
        }

        public void MoveLiftPinHome(string name)
        {
            if (MenuPermission != 3) return;
            if (!IsCDAOK)
            {
                DialogBox.ShowWarning("CDA Pressure Error");
                return;
            }
            InvokeClient.Instance.Service.DoOperation($"{SystemName}.{_servoLiftPinName}.Home",name);
        }

        public void MoveLiftPinDown()
        {
            if (MenuPermission != 3) return;
            if (!IsCDAOK)
            {
                DialogBox.ShowWarning("CDA Pressure Error");
                return;
            }
            InvokeClient.Instance.Service.DoOperation($"{SystemName}.LiftPin.Close");
        }

        // Guide pin method
        public void MovePin3Up()
        {
            if (MenuPermission != 3) return;
            if (!IsCDAOK)
            {
                DialogBox.ShowWarning("CDA Pressure Error");
                return;
            }
            InvokeClient.Instance.Service.DoOperation($"{SystemName}.{RtOperation.MoveGuidePin}", WaferSize.WS3, 2);
        }

        public void MovePin3Down()
        {
            if (MenuPermission != 3) return;
            if (!IsCDAOK)
            {
                DialogBox.ShowWarning("CDA Pressure Error");
                return;
            }
            InvokeClient.Instance.Service.DoOperation($"{SystemName}.{RtOperation.MoveGuidePin}", WaferSize.WS3, 1);
        }

        public void MovePin4Up()
        {
            if (MenuPermission != 3) return;
            if (!IsCDAOK)
            {
                DialogBox.ShowWarning("CDA Pressure Error");
                return;
            }
            InvokeClient.Instance.Service.DoOperation($"{SystemName}.{RtOperation.MoveGuidePin}", WaferSize.WS4, 2);
        }

        public void MovePin4Down()
        {
            if (MenuPermission != 3) return;
            if (!IsCDAOK)
            {
                DialogBox.ShowWarning("CDA Pressure Error");
                return;
            }
            InvokeClient.Instance.Service.DoOperation($"{SystemName}.{RtOperation.MoveGuidePin}", WaferSize.WS4, 1);
        }
    }
}