EfemSimulator.cs 12 KB

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  1. using System;
  2. using System.Text.RegularExpressions;
  3. using System.Threading;
  4. using System.Threading.Tasks;
  5. using Aitex.Core.UI.Control;
  6. using MECF.Framework.Simulator.Core.Driver;
  7. using Aitex.Core.Util;
  8. using VirgoCommon;
  9. namespace VirgoSimulator.Devices
  10. {
  11. class EfemSimulatorServer : SocketDeviceSimulator
  12. {
  13. private const string CMD_PATTERN = "^MOV|^SET|^GET";
  14. private const string SCMD = @"(?<=\:)(.*?)(?=\/)";
  15. private const string SFOUP = @"(?<=P)(\d{1})(?=[\;\/])";
  16. private const string ACK = "ACK";
  17. private string[] _slotMap = new string[25];
  18. private PeriodicJob _HwThread;
  19. private bool _bCommReady;
  20. private bool _isDoorOpen;
  21. private bool _isPlaced;
  22. public int WaferSize = 3;
  23. public string SlotMap
  24. {
  25. get { return string.Join("", _slotMap); }
  26. }
  27. public bool _isVacuumError { get; set; }
  28. public bool _isAirError { get; set; }
  29. public bool _isFlowError { get; set; }
  30. public bool _isLeak { get; set; }
  31. public bool _isMaintain { get; set; }
  32. public bool _isWaferPresent { get; set; }
  33. public bool _isMaintainDoorOpen { get; private set; }
  34. public bool _isProtrude1 { get; set; }
  35. public bool _isProtrude2 { get; set; }
  36. public EfemSimulatorServer() : base(13001, -1, "\r", ' ')
  37. {
  38. for (int i = 0; i < _slotMap.Length; i++)
  39. _slotMap[i] = "0";
  40. _HwThread = new PeriodicJob(5000, OnSendEvent, "EfemHardware", true);
  41. }
  42. private bool OnSendEvent()
  43. {
  44. if (!_bCommReady)
  45. {
  46. OnWriteMessage("INF:READY/COMM;");
  47. }
  48. return true;
  49. }
  50. protected override void ProcessUnsplitMessage(string str)
  51. {
  52. if (!_bCommReady && str.Contains("ACK:READY/COMM"))
  53. {
  54. _bCommReady = true;
  55. }
  56. if (!Regex.IsMatch(str, CMD_PATTERN))
  57. return;
  58. // 发送ACK 表示收到
  59. string ack = Regex.Replace(str, CMD_PATTERN, ACK);
  60. if(!str.Contains("SIGSTAT"))
  61. OnWriteMessage(ack);
  62. // 处理INF
  63. var a = OnWork(ack);
  64. }
  65. internal void SetCassetteDoor(bool doorOpen)
  66. {
  67. if (doorOpen != _isDoorOpen)
  68. {
  69. _isDoorOpen = doorOpen;
  70. SendSystemData();
  71. }
  72. }
  73. internal void SetMaintain(bool maintain)
  74. {
  75. if (maintain != _isMaintain)
  76. {
  77. _isMaintain = maintain;
  78. SendSystemData();
  79. }
  80. }
  81. internal void SetProtrude1(bool protrude)
  82. {
  83. if (protrude != _isProtrude1)
  84. {
  85. _isProtrude1 = protrude;
  86. SendLP1Data();
  87. }
  88. }
  89. internal void SetProtrude2(bool protrude)
  90. {
  91. if (protrude != _isProtrude2)
  92. {
  93. _isProtrude2 = protrude;
  94. SendLP2Data();
  95. }
  96. }
  97. private async Task OnWork(string strACK)
  98. {
  99. // match basic
  100. Match m1 = Regex.Match(strACK, SCMD);
  101. // get mock delay time
  102. string sBasic = m1.Groups[1].Value;
  103. if (string.IsNullOrEmpty(sBasic))
  104. return;
  105. EfemOperation op = EfemConstant.ToOperation(sBasic);
  106. ushort millionSec = this.SimuOperationTime(op);
  107. // Sleep
  108. await Task.Run(() => Thread.Sleep(millionSec));
  109. // build the INF string
  110. string strINF = string.Empty;
  111. switch (EfemConstant.ToOperation(sBasic))
  112. {
  113. case EfemOperation.GetWaferInfo:
  114. strINF = strACK.Replace(ACK, "INF");
  115. strINF = strINF.TrimEnd(';');
  116. strINF += "/1111111111111110001111111;";
  117. break;
  118. case EfemOperation.Home:
  119. //string s1 = "EVT:SIGSTAT/P1/00000381/00000000;\rEVT:SIGSTAT/P2/00000381/00000000;\rEVT:SIGSTAT/System/0000FFF7/00000004;\r";
  120. //strINF = s1 + strACK.Replace(ACK, "INF");
  121. SendSystemData();
  122. SendLP1Data();
  123. SendLP2Data();
  124. strINF = strACK.Replace(ACK, "INF");
  125. break;
  126. case EfemOperation.Map:
  127. Match m2 = Regex.Match(strACK, SFOUP);
  128. if (m2.Success)
  129. {
  130. string map = string.Join("", _slotMap);
  131. string s2 = $"EVT:MAPDT/P{m2.Groups[1].Value}/{map};\r";
  132. strINF = s2 + strACK.Replace(ACK, "INF");
  133. }
  134. break;
  135. case EfemOperation.SigStatus:
  136. {
  137. if(strACK.Contains("P1"))
  138. {
  139. uint data = GetLP1Data1();
  140. string msg = $"ACK:SIGSTAT/P1/{data:X8}/00000000;\r";
  141. OnWriteMessage(msg);
  142. msg = $"INF:SIGSTAT/P1/{data:X8}/00000000;\r";
  143. OnWriteMessage(msg);
  144. return;
  145. }
  146. if (strACK.Contains("P2"))
  147. {
  148. uint data = GetLP2Data1();
  149. string msg = $"ACK:SIGSTAT/P2/{data:X8}/00000000;\r";
  150. OnWriteMessage(msg);
  151. msg = $"INF:SIGSTAT/P2/{data:X8}/00000000;\r";
  152. OnWriteMessage(msg);
  153. return;
  154. }
  155. break;
  156. }
  157. case EfemOperation.Align:
  158. case EfemOperation.Pick:
  159. case EfemOperation.Place:
  160. case EfemOperation.Orgsh:
  161. case EfemOperation.Light:
  162. default:
  163. strINF = strACK.Replace(ACK, "INF");
  164. break;
  165. }
  166. OnWriteMessage(strINF);
  167. }
  168. private void SendLP1Data()
  169. {
  170. uint data = GetLP1Data1();
  171. string msg = $"EVT:SIGSTAT/P1/{data:X8}/00000000;";
  172. OnWriteMessage(msg);
  173. }
  174. private void SendLP2Data()
  175. {
  176. uint data = GetLP2Data1();
  177. string msg = $"EVT:SIGSTAT/P2/{data:X8}/00000000;";
  178. OnWriteMessage(msg);
  179. }
  180. private void SendSystemData()
  181. {
  182. uint data = GetSystemData1();
  183. string msg = $"EVT:SIGSTAT/System/{data:X8}/00000000;";
  184. OnWriteMessage(msg);
  185. }
  186. private ushort SimuOperationTime(EfemOperation op)
  187. {
  188. ushort sec = 0;
  189. switch (op)
  190. {
  191. case EfemOperation.Map:
  192. case EfemOperation.GetWaferInfo:
  193. case EfemOperation.Align:
  194. sec = 300;
  195. break;
  196. case EfemOperation.Pick:
  197. case EfemOperation.Place:
  198. case EfemOperation.Orgsh:
  199. sec = 400;
  200. break;
  201. case EfemOperation.Light:
  202. case EfemOperation.SigStatus:
  203. sec = 200;
  204. break;
  205. default:
  206. sec = 100;
  207. break;
  208. }
  209. return sec;
  210. }
  211. public void PlaceCarrier1()
  212. {
  213. _isPlaced = true;
  214. SendLP1Data();
  215. }
  216. public void RemoveCarrier1()
  217. {
  218. _isPlaced = false;
  219. SendLP1Data();
  220. }
  221. public void PlaceCarrier2()
  222. {
  223. _isPlaced = true;
  224. SendLP2Data();
  225. }
  226. public void RemoveCarrier2()
  227. {
  228. _isPlaced = false;
  229. SendLP2Data();
  230. }
  231. public void ClearWafer()
  232. {
  233. for (int i = 0; i < _slotMap.Length; i++)
  234. {
  235. _slotMap[i] = "0";
  236. }
  237. }
  238. public void SetAllWafer()
  239. {
  240. for (int i = 0; i < _slotMap.Length; i++)
  241. {
  242. _slotMap[i] = "1";
  243. }
  244. }
  245. public void SetUpWafer()
  246. {
  247. for (int i = 0; i < _slotMap.Length; i++)
  248. {
  249. _slotMap[i] = i > 15 ? "1" : "0";
  250. }
  251. }
  252. public void SetLowWafer()
  253. {
  254. for (int i = 0; i < _slotMap.Length; i++)
  255. {
  256. _slotMap[i] = i < 10 ? "1" : "0";
  257. }
  258. }
  259. public void RandomWafer()
  260. {
  261. Random _rd = new Random();
  262. for (int i = 0; i < _slotMap.Length; i++)
  263. {
  264. _slotMap[i] = (i % 9).ToString();// _rd.Next(0, 10) < 6 ? "0" : "1";
  265. }
  266. }
  267. private uint GetLP1Data1()
  268. {
  269. uint data1 = 0x0u;
  270. data1 |= (_isPlaced ? 0x00000001u : 0x0);
  271. data1 |= (!_isPlaced ? 0x00000002u : 0x0);
  272. switch (WaferSize)
  273. {
  274. case 3:
  275. //data1 |= 0x00000040u;
  276. data1 |= 0x00000080u;
  277. data1 |= 0x00000100u;
  278. break;
  279. case 4:
  280. data1 |= 0x00000040u;
  281. //data1 |= 0x00000080u;
  282. data1 |= 0x00000100u;
  283. break;
  284. case 6:
  285. data1 |= 0x00000040u;
  286. data1 |= 0x00000080u;
  287. //data1 |= 0x00000100u;
  288. break;
  289. }
  290. data1 |= (!_isProtrude1) ? 0x00000200u : 0x0;
  291. return data1;
  292. }
  293. private uint GetLP2Data1()
  294. {
  295. uint data1 = 0x0u;
  296. data1 |= (_isPlaced ? 0x00000001u : 0x0);
  297. data1 |= (!_isPlaced ? 0x00000002u : 0x0);
  298. switch (WaferSize)
  299. {
  300. case 3:
  301. //data1 |= 0x00000040u;
  302. data1 |= 0x00000080u;
  303. data1 |= 0x00000100u;
  304. break;
  305. case 4:
  306. data1 |= 0x00000040u;
  307. //data1 |= 0x00000080u;
  308. data1 |= 0x00000100u;
  309. break;
  310. case 6:
  311. data1 |= 0x00000040u;
  312. data1 |= 0x00000080u;
  313. //data1 |= 0x00000100u;
  314. break;
  315. }
  316. data1 |= (!_isProtrude2) ? 0x00000200u : 0x0;
  317. return data1;
  318. }
  319. private uint GetSystemData1()
  320. {
  321. uint data1 = 0x0u;
  322. //0:
  323. data1 |= (!_isVacuumError ? 0x00000001u : 0x0);
  324. //1
  325. data1 |= (!_isVacuumError ? 0x00000002u : 0x0);
  326. //2:
  327. data1 |= (!_isAirError ? 0x00000004u : 0x0);
  328. //4 Flow gauge Sensor Warning
  329. data1 |= (!_isFlowError ? 0x00000010u : 0x0);
  330. //5 Leakage Sensor Warning
  331. data1 |= (!_isLeak ? 0x00000020u : 0x0);
  332. //6:Door switch Door close
  333. data1 |= (!_isMaintainDoorOpen ? 0x00000040u : 0x0);
  334. //7 Drive power Normal
  335. data1 |= 0x00000080u;
  336. //8 Differential pressure sensor setting 1 Normal
  337. data1 |= 0x00000100u;
  338. //9 Differential pressure sensor setting 1 Normal
  339. data1 |= 0x00000200u;
  340. //10 Ionizer alarm Normal
  341. data1 |= 0x00000400u;
  342. //11 FFU alarm Normal
  343. data1 |= 0x00000800u;
  344. //12 Area sensor(Reserved) Not blocked
  345. data1 |= 0x00001000u;
  346. //13 Mode switch RUN
  347. data1 |= (!_isMaintain ? 0x00002000u : 0x0);
  348. //14 Robot Wafer Present No presence
  349. data1 |= (!_isWaferPresent ? 0x00004000u : 0x0);
  350. //15 Cassette Door Door Closed
  351. data1 |= (!_isDoorOpen ? 0x00008000u : 0x0);
  352. return data1;
  353. }
  354. }
  355. }