Virgo_Mask/VirgoSimulator/Config/_ioDefineVirgo_R.xml

<?xml version='1.0'?>
<IO_DEFINE xmlns:xsi='http://www.w3.org/2001/XMLSchema-instance' xmlns:xsd='http://www.w3.org/2001/XMLSchema'>
  <Dig_In>
    <DI_ITEM Index="0" Name="DI_Lid_Closed" Device="" Addr="w20.00" Note="Interlock-HW" />
    <DI_ITEM Index="1" Name="DI_PM_ATM_SW" Device="" Addr="w20.01" Note="Interlock-PLC"/>
    <DI_ITEM Index="2" Name="DI_PM_VAC_SW" Device="9.5T" Addr="w20.02" Note="Interlock-HW"/>
    <DI_ITEM Index="3" Name="DI_CDA_Pressure" Device="" Addr="w20.03" />
    <DI_ITEM Index="4" Name="" />
    <DI_ITEM Index="5" Name="DI_Water_Leak" Device="" Addr="w20.05" Note="1=OK， 0=alarm" />
    <DI_ITEM Index="6" Name="DI_Cooling_Water_Flow_SW" Device="" Addr="w20.06" />
    <DI_ITEM Index="7" Name="" />
    <DI_ITEM Index="8" Name="DI_N2_Pressure" Device="" Addr="w20.08" />
    <DI_ITEM Index="9" Name="DI_MFC1_Pressure" Device="" Addr="w20.09" />
    <DI_ITEM Index="10" Name="DI_MFC2_Pressure" Device="" Addr="w20.10" />
    <DI_ITEM Index="11" Name="DI_MFC3_Pressure" Device="" Addr="w20.11" />
    <DI_ITEM Index="12" Name="DI_MFC4_Pressure" Device="" Addr="w20.12" />
    <DI_ITEM Index="13" Name="DI_MFC5_Pressure" Device="" Addr="w20.13" />
    <DI_ITEM Index="14" Name="" />
    <DI_ITEM Index="15" Name="" />
    <DI_ITEM Index="16" Name="DI_Slit_Door_Open_Pos" Device="" Addr="w21.00" Note="Interlock-HW" />
    <DI_ITEM Index="17" Name="DI_Slit_Door_Close_Pos" Device="" Addr="w21.01" Note="Interlock-HW"/>
    <DI_ITEM Index="18" Name="" />
    <DI_ITEM Index="19" Name="" />
    <DI_ITEM Index="20" Name="" />
    <DI_ITEM Index="21" Name="" />
    <DI_ITEM Index="22" Name="DI_GB_Door_SW_Alarm" Device="" Addr="w21.06" />
    <DI_ITEM Index="23" Name="DI_GB_Pressure_SW_Alarm" Device="" Addr="w21.07" />
    <DI_ITEM Index="24" Name="DI_SRF_Match_Interlock_OK" Device="" Addr="w21.08" />
    <DI_ITEM Index="25" Name="DI_BRF_Match_Interlock_OK" Device="" Addr="w21.09" />
    <DI_ITEM Index="26" Name="DI_RF_Interlock_OK" Device="" Addr="w21.10" />
    <DI_ITEM Index="27" Name="" />
    <DI_ITEM Index="28" Name="DI_Source_Fans_Running" Device="" Addr="w21.12" />
    <DI_ITEM Index="29" Name="DI_RF_Cover_Closed" Device="" Addr="w21.13" />
    <DI_ITEM Index="30" Name="DI_CHBW_OT_SW" Device="" Addr="w21.14" />
    <DI_ITEM Index="31" Name="DI_LE_OT_SW_Alarm" Device="" Addr="w21.15" />
    <DI_ITEM Index="32" Name="DI_Lift_Home_SW" Device="" Addr="w22.00" />
    <DI_ITEM Index="33" Name="DI_Lift_Up_Limit_SW" Device="" Addr="w22.01" />
    <DI_ITEM Index="34" Name="DI_Lift_Down_Limit_SW" Device="" Addr="w22.02" />
    <DI_ITEM Index="35" Name="DI_Lift_Servo1_Brake_ON" Device="" Addr="w22.03" />
    <DI_ITEM Index="36" Name="DI_Lift_Servo2_Brake_ON" Device="" Addr="w22.04" />
    <DI_ITEM Index="37" Name="DI_Lift_Servo3_Brake_ON" Device="" Addr="w22.05" />
    <DI_ITEM Index="38" Name="DI_Lift_Servo4_Brake_ON" Device="" Addr="w22.06" />
    <DI_ITEM Index="39" Name="DI_Lift_Servo_FSTP" Device="" Addr="w22.07" />
    <DI_ITEM Index="40" Name="DI_Lift_Servo1_Alarm" Device="" Addr="w22.08" />
    <DI_ITEM Index="41" Name="" />
    <DI_ITEM Index="42" Name="DI_Lift_Servo2_Alarm" Device="" Addr="w22.10" />
    <DI_ITEM Index="43" Name="" />
    <DI_ITEM Index="44" Name="DI_Lift_Servo3_Alarm" Device="" Addr="w22.12" />
    <DI_ITEM Index="45" Name="" />
    <DI_ITEM Index="46" Name="DI_Lift_Servo4_Alarm" Device="" Addr="w22.14" />
    <DI_ITEM Index="47" Name="" />
    <DI_ITEM Index="48" Name="DI_EFEM_Side_Panel_Closed" Device="" Addr="w23.00" Note="Interlock-HW"/>
    <DI_ITEM Index="49" Name="DI_ARM_Not_Extend_to_PM" Device="" Addr="w23.01" Note="Interlock-PLC"/>
    <DI_ITEM Index="50" Name="" />
    <DI_ITEM Index="51" Name="" />
    <DI_ITEM Index="52" Name="" />
    <DI_ITEM Index="53" Name="" />
    <DI_ITEM Index="54" Name="" />
    <DI_ITEM Index="55" Name="" />
    <DI_ITEM Index="56" Name="DI_Control_Box_Fans_Running" Device="" Addr="w23.08" />
    <DI_ITEM Index="57" Name="" />
    <DI_ITEM Index="58" Name="" />
    <DI_ITEM Index="59" Name="DI_AC_RACK_Fans_Running" Device="" Addr="w23.11" />
    <DI_ITEM Index="60" Name="DI_AC_RACK_Smoke_Detect_SW" Device="" Addr="w23.12" />
    <DI_ITEM Index="61" Name="DI_AC_RACK_Main_Power_ON" Device="" Addr="w23.13" />
    <DI_ITEM Index="62" Name="" />
    <DI_ITEM Index="63" Name="" />
    <DI_ITEM Index="64" Name="DI_CHB_Wall_Heater_On_FB" Device="" Addr="w24.00" />
    <DI_ITEM Index="65" Name="DI_Foreline_Heater_On_FB" Device="" Addr="w24.01" />
    <DI_ITEM Index="66" Name="DI_Substrate_Heater_On_FB"  Device="" Addr="w24.02" />
    <DI_ITEM Index="67" Name="" />
    <DI_ITEM Index="68" Name="DI_Process_pressure_Alarm" Device="" Addr="w24.04" />
    <DI_ITEM Index="69" Name="DI_Chamber_pressure_Alarm" Device="" Addr="w24.05" />
    <DI_ITEM Index="70" Name="DI_Foreline_pressure_Alarm" Device="" Addr="w24.06" />
    <DI_ITEM Index="71" Name="DI_Foreline_TC_Deviation_out_of_range" Device="" Addr="w24.07" />
    <DI_ITEM Index="72" Name="DI_Foreline_Control_TC_Broken_Alarm" Device="" Addr="w24.08" />
    <DI_ITEM Index="73" Name="DI_Foreline_Monitor_TC_Broken_Alarm" Device="" Addr="w24.09" />
    <DI_ITEM Index="74" Name="DI_CHB_Wall_TC_Deviation_out_of_range" Device="" Addr="w24.10" />
    <DI_ITEM Index="75" Name="DI_CHB_Wall_Control_TC_Broken_Alarm" Device="" Addr="w24.11" />
    <DI_ITEM Index="76" Name="DI_CHB_Wall_Monitor_TC_Broken_Alarm" Device="" Addr="w24.12" />
    <DI_ITEM Index="77" Name="DI_Grid_TC_Broken_Alarm" Device="" Addr="w24.13" />
    <DI_ITEM Index="78" Name="DI_Coolant_Inlet_TC_Broken_Alarm" Device="" Addr="w24.14" />
    <DI_ITEM Index="79" Name="DI_Coolant_Outlet_TC_Broken_Alarm" Device="" Addr="w24.15" />
    <DI_ITEM Index="80" Name="DI_Substrate_Control_TC_Broken_Alarm" Device="" Addr="w25.00" />
    <DI_ITEM Index="81" Name="DI_Substrate_Monitor_TC_Broken_Alarm" Device="" Addr="w25.01" />
    <DI_ITEM Index="82" Name="DI_Substrate_TC_Deviation_out_of_range" Device="" Addr="w25.02" />
    <DI_ITEM Index="83" Name="" />
    <DI_ITEM Index="84" Name="" />
    <DI_ITEM Index="85" Name="" />
    <DI_ITEM Index="86" Name="" />
    <DI_ITEM Index="87" Name="" />
    <DI_ITEM Index="88" Name="" />
    <DI_ITEM Index="89" Name="" />
    <DI_ITEM Index="90" Name="" />
    <DI_ITEM Index="91" Name="" />
    <DI_ITEM Index="92" Name="" />
    <DI_ITEM Index="93" Name="" />
    <DI_ITEM Index="94" Name="" />
    <DI_ITEM Index="95" Name="" />
    <DI_ITEM Index="96" Name="DI_Water_Inlet_Valve_open__FB" Device="" Addr="w26.00" />
    <DI_ITEM Index="97" Name="" />
    <DI_ITEM Index="98" Name="" />
    <DI_ITEM Index="99" Name="" />
    <DI_ITEM Index="100" Name="DI_CHB_Wall_Heat_PID_AT_Star_FB" Device="" Addr="w26.04" />
    <DI_ITEM Index="101" Name="DI_CHB_Wall_Heat_PID_AT_Stop_FB" Device="" Addr="w26.05" />
    <DI_ITEM Index="102" Name="DI_Foreline_Heat_PID_AT_Star_FB" Device="" Addr="w26.06" />
    <DI_ITEM Index="103" Name="DI_Foreline_Heat_PID_AT_Stop_FB" Device="" Addr="w26.07" />
    <DI_ITEM Index="104" Name="DI_Substrate_Heat_PID_AT_Star_FB" Device="" Addr="w26.08" />
    <DI_ITEM Index="105" Name="DI_Substrate_Heat_PID_AT_Stop_FB" Device="" Addr="w26.09" />
    <DI_ITEM Index="106" Name="" />
    <DI_ITEM Index="107" Name="" />
    <DI_ITEM Index="108" Name="" />
    <DI_ITEM Index="109" Name="" />
    <DI_ITEM Index="110" Name="" />
    <DI_ITEM Index="111" Name="" />
    <DI_ITEM Index="112" Name="" />
    <DI_ITEM Index="113" Name="" />
    <DI_ITEM Index="114" Name="" />
    <DI_ITEM Index="115" Name="" />
    <DI_ITEM Index="116" Name="DI_CHB_Wall_Heat_PID_AT_Running" Device="" Addr="w27.04" />
    <DI_ITEM Index="117" Name="DI_CHB_Wall_Heat_PID_AT_Finished" Device="" Addr="w27.05" />
    <DI_ITEM Index="118" Name="DI_Foreline_Heat_PID_AT_Running" Device="" Addr="w27.06" />
    <DI_ITEM Index="119" Name="DI_Foreline_Heat_PID_AT_Finished" Device="" Addr="w27.07" />
    <DI_ITEM Index="120" Name="DI_Substrate_Heat_PID_AT_Running" Device="" Addr="w27.08" />
    <DI_ITEM Index="121" Name="DI_Substrate_Heat_PID_AT_Finished" Device="" Addr="w27.09" />
    <DI_ITEM Index="122" Name="" />
    <DI_ITEM Index="123" Name="" />
    <DI_ITEM Index="124" Name="" />
    <DI_ITEM Index="125" Name="" />
    <DI_ITEM Index="126" Name="" />
    <DI_ITEM Index="127" Name="" />
    <DI_ITEM Index="128" Name="DI_Lift_Servo_with_origin" Device="" Addr="w28.00" />
    <DI_ITEM Index="129" Name="DI_Lift_Servo_Servo_on" Device="" Addr="w28.01" />
    <DI_ITEM Index="130" Name="DI_Lift_Servo_ORG_fail_alarm" Device="" Addr="w28.02" />
    <DI_ITEM Index="131" Name="DI_Lift_Servo_ABS_fail_alarm" Device="" Addr="w28.03" />
    <DI_ITEM Index="132" Name="DI_Lift_Servo_Over_software_Limit_alarm" Device="" Addr="w28.04" />
    <DI_ITEM Index="133" Name="DI_Lift_Servo_Go_Position1_Complete" Device="" Addr="w28.05" />
    <DI_ITEM Index="134" Name="DI_Lift_Servo_Go_Position2_Complete" Device="" Addr="w28.06" />
    <DI_ITEM Index="135" Name="DI_Lift_Servo_Go_Position3_Complete" Device="" Addr="w28.07" />
    <DI_ITEM Index="136" Name="DI_Lift_Servo_Go_Position4_Complete" Device="" Addr="w28.08" />
    <DI_ITEM Index="137" Name="" />
    <DI_ITEM Index="138" Name="DI_Lift_Servo_Busy" Device="" Addr="w28.10" />
    <DI_ITEM Index="139" Name="DI_MPE_CPU_Communication_Alarm" Device="" Addr="w28.11" />
    <DI_ITEM Index="140" Name="" />
    <DI_ITEM Index="141" Name="" />
    <DI_ITEM Index="142" Name="" />
    <DI_ITEM Index="143" Name="" />
    <DI_ITEM Index="144" Name="DI_Lift_Servo1_with_Origin" Device="" Addr="w29.00" />
    <DI_ITEM Index="145" Name="DI_Lift_Servo2_with_Origin" Device="" Addr="w29.01" />
    <DI_ITEM Index="146" Name="DI_Lift_Servo3_with_Origin" Device="" Addr="w29.02" />
    <DI_ITEM Index="147" Name="DI_Lift_Servo4_with_Origin" Device="" Addr="w29.03" />
    <DI_ITEM Index="148" Name="" />
    <DI_ITEM Index="149" Name="" />
    <DI_ITEM Index="150" Name="DI_MPE_CPU_Battery_Alarm" Device="" Addr="w29.06" />
    <DI_ITEM Index="151" Name="DI_MPE_CPU_OT_Warning" Device="" Addr="w29.07" />
    <DI_ITEM Index="152" Name="DI_MPE_CPU_Error" Device="" Addr="w29.08" />
    <DI_ITEM Index="153" Name="" />
    <DI_ITEM Index="154" Name="" />
    <DI_ITEM Index="155" Name="" />
    <DI_ITEM Index="156" Name="" />
    <DI_ITEM Index="157" Name="" />
    <!--
    
    <DI_ITEM Index="8" Name="DI_Lift_Pin_Up" Device="" Addr="w20.08" Note="1=on,0=off" />
    <DI_ITEM Index="9" Name="DI_Lift_Pin_Down" Device="" Addr="w20.09" Note="1=on,0=off" />

    <DI_ITEM Index="15" Name="DI_Generator_Hardware_Interlock" Device="" Addr="w20.15" Note="1=rf interlock ok,0=rf interlock off" />
    <DI_ITEM Index="16" Name="DI_Generator_Power_Status" Device="" Addr="w21.00" Note="1=on,0=off" />
    <DI_ITEM Index="17" Name="DI_Coolant_Inlet_TC_Broken_Alarm" Device="" Addr="w21.01" />
    <DI_ITEM Index="18" Name="DI_Coolant_Outlet_TC_Broken_Alarm" Device="" Addr="w21.02" />
    <DI_ITEM Index="45" Name="DI_Fast_Pumping_SW" Device="" Addr="w22.13" />

    <DI_ITEM Index="74" Name="DI_Dry_Pump_Running" Device="" Addr="w24.10" Note="1=on,0=off" />
    <DI_ITEM Index="75" Name="DI_Pump_Alarm" Device="" Addr="w24.11" Note="1=on,0=off" />
    <DI_ITEM Index="76" Name="DI_Pump_Remote_Status" Device="" Addr="w24.12" Note="1=on,0=off" />
    <DI_ITEM Index="77" Name="DI_Booster_Pump_Running" Device=""  Addr="w24.13" Note="1=on,0=off"/>
    -->
  </Dig_In>
  <Dig_Out>
    <DO_ITEM Index="0" Name="DO_Chamber_purge_valve" Device="GEV1" Addr="w0.00" />
    <DO_ITEM Index="1" Name="DO_Chamber_vent_valve" Device="GEV2" Addr="w0.01" />
    <DO_ITEM Index="2" Name="DO_Process_gas_final_valve" Device="EV1" Addr="w0.02" />
    <DO_ITEM Index="3" Name="DO_Soft_Pumping_Valve" Device="EV2" Addr="w0.03" />
    <DO_ITEM Index="4" Name="DO_Fast_Pumping_Valve" Device="EV3" Addr="w0.04" />
    <DO_ITEM Index="5" Name="" />
    <DO_ITEM Index="6" Name="" />
    <DO_ITEM Index="7" Name="DO_VAT_Close" Device="" Addr="w0.07" />
    <DO_ITEM Index="8" Name="DO_VAT_Pres_Mode" Device="" Addr="w0.08" />
    <DO_ITEM Index="9" Name="DO_MFC1_Valve" Device="GEV3" Addr="w0.09" />
    <DO_ITEM Index="10" Name="DO_MFC2_Valve" Device="GEV4" Addr="w0.10" />
    <DO_ITEM Index="11" Name="DO_MFC3_Valve" Device="GEV5" Addr="w0.11" />
    <DO_ITEM Index="12" Name="DO_MFC4_Valve" Device="GEV6" Addr="w0.12" />
    <DO_ITEM Index="13" Name="DO_MFC5_Valve" Device="GEV7" Addr="w0.13" />
    <DO_ITEM Index="14" Name="" />
    <DO_ITEM Index="15" Name="" />
    <DO_ITEM Index="16" Name="DO_Slit_Door_Open" Device="EV4.1" Addr="w1.00" />
    <DO_ITEM Index="17" Name="DO_Slit_Door_Close" Device="EV4.2" Addr="w1.01" />
    <DO_ITEM Index="18" Name="" />
    <DO_ITEM Index="19" Name="" />
    <DO_ITEM Index="20" Name="" />
    <DO_ITEM Index="21" Name="" />
    <DO_ITEM Index="22" Name="" />
    <DO_ITEM Index="23" Name="DO_Water_Valve_On" Device="EV7" Addr="w1.07" />
    <DO_ITEM Index="24" Name="" />
    <DO_ITEM Index="25" Name="" />
    <DO_ITEM Index="26" Name="" />
    <DO_ITEM Index="27" Name="" />
    <DO_ITEM Index="28" Name="" />
    <DO_ITEM Index="29" Name="DO_Substrate_Heater_On" Device="" Addr="w1.13" />
    <DO_ITEM Index="30" Name="DO_Forline_Heater_On" Device="" Addr="w1.14" />
    <DO_ITEM Index="31" Name="DO_CHB_Wall_Heater_On" Device="" Addr="w1.15" />
    <DO_ITEM Index="32" Name="" Device="" Addr="w2.00" />
    <DO_ITEM Index="33" Name="" Device="" Addr="w2.01" />
    <DO_ITEM Index="34" Name="" Device="" Addr="w2.02" />
    <DO_ITEM Index="35" Name="" Device="" Addr="w2.03" />
    <DO_ITEM Index="36" Name="" Device="" Addr="w2.04" />
    <DO_ITEM Index="37" Name="" Device="" Addr="w2.05" />
    <DO_ITEM Index="38" Name="" Device="" Addr="w2.06" />
    <DO_ITEM Index="39" Name="" Device="" Addr="w2.07" />
    <DO_ITEM Index="40" Name="" Device="" Addr="w2.08" />
    <DO_ITEM Index="41" Name="" Device="" Addr="w2.09" />
    <DO_ITEM Index="42" Name="" Device="" Addr="w2.10" />
    <DO_ITEM Index="43" Name="" Device="" Addr="w2.11" />
    <DO_ITEM Index="44" Name="" Device="" Addr="w2.12" />
    <DO_ITEM Index="45" Name="" Device="" Addr="w2.13" />
    <DO_ITEM Index="46" Name="" Device="" Addr="w2.14" />
    <DO_ITEM Index="47" Name="" Device="" Addr="w2.15" />
    <DO_ITEM Index="48" Name="" Device="" Addr="w3.00" />
    <DO_ITEM Index="49" Name="" Device="" Addr="w3.01" />
    <DO_ITEM Index="50" Name="" Device="" Addr="w3.02" />
    <DO_ITEM Index="51" Name="" Device="" Addr="w3.03" />
    <DO_ITEM Index="52" Name="" Device="" Addr="w3.04" />
    <DO_ITEM Index="53" Name="" Device="" Addr="w3.05" />
    <DO_ITEM Index="54" Name="" Device="" Addr="w3.06" />
    <DO_ITEM Index="55" Name="" Device="" Addr="w3.07" />
    <DO_ITEM Index="56" Name="" Device="" Addr="w3.08" />
    <DO_ITEM Index="57" Name="" Device="" Addr="w3.09" />
    <DO_ITEM Index="58" Name="" Device="" Addr="w3.10" />
    <DO_ITEM Index="59" Name="" Device="" Addr="w3.11" />
    <DO_ITEM Index="60" Name="" Device="" Addr="w3.12" />
    <DO_ITEM Index="61" Name="" Device="" Addr="w3.13" />
    <DO_ITEM Index="62" Name="" Device="" Addr="w3.14" />
    <DO_ITEM Index="63" Name="" Device="" Addr="w3.15" />
    <DO_ITEM Index="64" Name="DO_CHB_Wall_Heat_PID_AT_Star" Device="" Addr="w4.00" />
    <DO_ITEM Index="65" Name="DO_CHB_Wall_Heat_PID_AT_Stop" Device="" Addr="w4.01" />
    <DO_ITEM Index="66" Name="DO_Foreline_Heat_PID_AT_Start" Device="" Addr="w4.02" />
    <DO_ITEM Index="67" Name="DO_Foreline_Heat_PID_AT_Stop" Device="" Addr="w4.03" />
    <DO_ITEM Index="68" Name="DO_Substrate_Heat_PID_AT_Start" Device="" Addr="w4.04" />
    <DO_ITEM Index="69" Name="DO_Substrate_Heat_PID_AT_Stop" Device="" Addr="w4.05" />
    <DO_ITEM Index="70" Name="" />
    <DO_ITEM Index="71" Name="" />
    <DO_ITEM Index="72" Name="" />
    <DO_ITEM Index="73" Name="" />
    <DO_ITEM Index="74" Name="" />
    <DO_ITEM Index="75" Name="" />
    <DO_ITEM Index="76" Name="" />
    <DO_ITEM Index="77" Name="" />
    <DO_ITEM Index="78" Name="" />
    <DO_ITEM Index="79" Name="" />
    <DO_ITEM Index="80" Name="" />
    <DO_ITEM Index="81" Name="" />
    <DO_ITEM Index="82" Name="" />
    <DO_ITEM Index="83" Name="" />
    <DO_ITEM Index="84" Name="" />
    <DO_ITEM Index="85" Name="" />
    <DO_ITEM Index="86" Name="" />
    <DO_ITEM Index="87" Name="" />
    <DO_ITEM Index="88" Name="" />
    <DO_ITEM Index="89" Name="" />
    <DO_ITEM Index="90" Name="" />
    <DO_ITEM Index="91" Name="" />
    <DO_ITEM Index="92" Name="" />
    <DO_ITEM Index="93" Name="" />
    <DO_ITEM Index="94" Name="" />
    <DO_ITEM Index="95" Name="" />
    <DO_ITEM Index="96" Name="DO_Reset_Signal" Device="" Addr="w6.00" />
    <DO_ITEM Index="97" Name="" />
    <DO_ITEM Index="98" Name="" />
    <DO_ITEM Index="99" Name="" />
    <DO_ITEM Index="100" Name="" />
    <DO_ITEM Index="101" Name="" />
    <DO_ITEM Index="102" Name="" />
    <DO_ITEM Index="103" Name="" />
    <DO_ITEM Index="104" Name="" />
    <DO_ITEM Index="105" Name="" />
    <DO_ITEM Index="106" Name="" />
    <DO_ITEM Index="107" Name="" />
    <DO_ITEM Index="108" Name="" />
    <DO_ITEM Index="109" Name="" />
    <DO_ITEM Index="110" Name="" />
    <DO_ITEM Index="111" Name="" />
    <DO_ITEM Index="112" Name="" />
    <DO_ITEM Index="113" Name="" />
    <DO_ITEM Index="114" Name="" />
    <DO_ITEM Index="115" Name="" />
    <DO_ITEM Index="116" Name="" />
    <DO_ITEM Index="117" Name="" />
    <DO_ITEM Index="118" Name="" />
    <DO_ITEM Index="119" Name="" />
    <DO_ITEM Index="120" Name="" />
    <DO_ITEM Index="121" Name="" />
    <DO_ITEM Index="122" Name="" />
    <DO_ITEM Index="123" Name="" />
    <DO_ITEM Index="124" Name="" />
    <DO_ITEM Index="125" Name="" />
    <DO_ITEM Index="126" Name="" />
    <DO_ITEM Index="127" Name="" />
    <DO_ITEM Index="128" Name="DO_Lift_Servo_Origin" Device="" Addr="w8.00" />
    <DO_ITEM Index="129" Name="" />
    <DO_ITEM Index="130" Name="DO_Lift_Servo_Manual_UP" Device="" Addr="w8.02" />
    <DO_ITEM Index="131" Name="DO_Lift_Servo_Manual_DOWN" Device="" Addr="w8.03" />
    <DO_ITEM Index="132" Name="DO_Lift_Servo_Stop" Device="" Addr="w8.04" />
    <DO_ITEM Index="133" Name="DO_Lift_Servo_Go_Position1" Device="" Addr="w8.05" />
    <DO_ITEM Index="134" Name="DO_Lift_Servo_Go_Position2" Device="" Addr="w8.06" />
    <DO_ITEM Index="135" Name="DO_Lift_Servo_Go_Position3" Device="" Addr="w8.07" />
    <DO_ITEM Index="136" Name="DO_Lift_Servo_Go_Position4" Device="" Addr="w8.08" />
    <DO_ITEM Index="137" Name="" />
    <DO_ITEM Index="138" Name="" />
    <DO_ITEM Index="139" Name="" />
    <DO_ITEM Index="140" Name="" />
    <DO_ITEM Index="141" Name="" />
    <DO_ITEM Index="142" Name="" />
    <DO_ITEM Index="143" Name="" />
    <DO_ITEM Index="144" Name="DO_Lift_Servo1_Jog_UP" Device="" Addr="w9.00" />
    <DO_ITEM Index="145" Name="DO_Lift_Servo1_Jog_DOWN" Device="" Addr="w9.01" />
    <DO_ITEM Index="146" Name="DO_Lift_Servo1_Stop" Device="" Addr="w9.02" />
    <DO_ITEM Index="147" Name="DO_Lift_Servo1_Step_UP" Device="" Addr="w9.03" />
    <DO_ITEM Index="148" Name="DO_Lift_Servo1_Step_DOWN" Device="" Addr="w9.04" />
    <DO_ITEM Index="149" Name="" />
    <DO_ITEM Index="150" Name="" />
    <DO_ITEM Index="151" Name="" />
    <DO_ITEM Index="152" Name="DO_Lift_Servo2_Jog_UP" Device="" Addr="w9.08" />
    <DO_ITEM Index="153" Name="DO_Lift_Servo2_Jog_DOWN" Device="" Addr="w9.09" />
    <DO_ITEM Index="154" Name="DO_Lift_Servo2_Stop" Device="" Addr="w9.10" />
    <DO_ITEM Index="155" Name="DO_Lift_Servo2_Step_UP" Device="" Addr="w9.11" />
    <DO_ITEM Index="156" Name="DO_Lift_Servo2_Step_DOWN" Device="" Addr="w9.12" />
    <DO_ITEM Index="157" Name="" />
    <!--
    <DO_ITEM Index="6" Name="DO_Lift_Pin_Up" Device="" Addr="w0.06" />
    <DO_ITEM Index="7" Name="DO_Lift_Pin_Down" Device="" Addr="w0.07" />
    <DO_ITEM Index="35" Name="DO_Forline_Heater_Enable" Device="" Addr="w2.03" />
    <DO_ITEM Index="42" Name="DO_Generator_Power_ON" Device="" Addr="w2.10" Note="Generator" />
    <DO_ITEM Index="48" Name="DO_Pump_Run" Device="" Addr="w3.00" Note="DI-64做反馈信号，启动条件：DI-65为0，DI-66为1"/>
    <DO_ITEM Index="49" Name="DO_Pump_Stop" Device="" Addr="w3.01" Note="DI-64做反馈信号" />
    <DO_ITEM Index="59" Name="" />-->
  </Dig_Out>
  <Ana_Out>
    <AO_ITEM Index="0" Name="AO_MFC1_Flow_Setpoint" BufferOffset="0" Device="" Addr="d1000" Note="MFC1" />
    <AO_ITEM Index="1" Name="AO_MFC2_Flow_Setpoint" BufferOffset="2" Device="" Addr="d1002" Note="MFC2" />
    <AO_ITEM Index="2" Name="AO_MFC3_Flow_Setpoint" BufferOffset="4" Device="" Addr="d1004" Note="MFC3" />
    <AO_ITEM Index="3" Name="AO_MFC4_Flow_Setpoint" BufferOffset="6" Device="" Addr="d1006" Note="MFC4" />
    <AO_ITEM Index="4" Name="AO_MFC5_Flow_Setpoint" BufferOffset="8" Device="" Addr="d1008" Note="MFC5" />
    <AO_ITEM Index="5" Name="" />
    <AO_ITEM Index="6" Name="" />
    <AO_ITEM Index="7" Name="" />
    <AO_ITEM Index="8" Name="" />
    <AO_ITEM Index="9" Name="" />
    <AO_ITEM Index="10" Name="" />
    <AO_ITEM Index="11" Name="" />
    <AO_ITEM Index="12" Name="AO_Throttle_Valve_Work_Mode" BufferOffset="24" Device="" Addr="d1024" Note="Throttle valve only" />
    <AO_ITEM Index="13" Name="AO_Throttle_Valve_Pressure_Setpoint" BufferOffset="26" Device="" Addr="d1026" />
    <AO_ITEM Index="14" Name="AO_Throttle_Valve_Position_Setpoint" BufferOffset="28" Device="" Addr="d1028" />
    <AO_ITEM Index="15" Name="" />
    <AO_ITEM Index="16" Name="" />
    <AO_ITEM Index="17" Name="" />
    <AO_ITEM Index="18" Name="AO_Heartbeat" BufferOffset="36" Device=""  Addr="d1036" Note="From PC to PLC" />
    <AO_ITEM Index="19" Name="" />
    <AO_ITEM Index="20" Name="" />
    <AO_ITEM Index="21" Name="AO_BaisRF_Enable" BufferOffset="42" Device="" Addr="d1042" Note="下电极加热或双射频配置切换" />
    <AO_ITEM Index="22" Name="AO_Grid_TC_Enable" BufferOffset="44" Device="" Addr="d1044" Note="1=Grid TC" />
    <AO_ITEM Index="23" Name="" />
    <AO_ITEM Index="24" Name="" />
    <AO_ITEM Index="25" Name="" />
    <AO_ITEM Index="26" Name="" />
    <AO_ITEM Index="27" Name="AO_CHB_Wall_Temperature_Setpoint" BufferOffset="54" Device="" Addr="d1054" Note="腔体壁加热设定温度" />
    <AO_ITEM Index="28" Name="AO_CHB_Wall_Temp_Limit_Setpoint" BufferOffset="56" Device="" Addr="d1056" Note="腔体壁加热最大温度" />
    <AO_ITEM Index="29" Name="" />
    <AO_ITEM Index="30" Name="AO_Foreline_Temperature_Setpoint" BufferOffset="60" Device="" Addr="d1060" Note="前级管道加热设定温度" />
    <AO_ITEM Index="31" Name="AO_Foreline_Temp_Limit_Setpoint" BufferOffset="62" Device="" Addr="d1062" Note="前级管道加热最大温度" />
    <AO_ITEM Index="32" Name="AO_Substrate_Temperature_Setpoint" BufferOffset="64" Device="" Addr="d1064" Note="CHB下电极加热设定温度" />
    <AO_ITEM Index="33" Name="AO_Substrate_Temp_Limit_Setpoint" BufferOffset="66" Device="" Addr="d1066" Note="CHB下电极加热最大温度" />
    <AO_ITEM Index="34" Name="" />
    <AO_ITEM Index="35" Name="" />
    <AO_ITEM Index="36" Name="" />
    <AO_ITEM Index="37" Name="" />
    <AO_ITEM Index="38" Name="" />
    <AO_ITEM Index="39" Name="" />
    <AO_ITEM Index="40" Name="AO_Lift_Servo_Auto_Speed" BufferOffset="80" Device="" Addr="d1080" />
    <AO_ITEM Index="41" Name="AO_Lift_Servo_Manual_Speed" BufferOffset="82" Device="" Addr="d1082" />
    <AO_ITEM Index="42" Name="AO_Lift_Servo_CCW_Limit_Position" BufferOffset="84" Device="" Addr="d1084" />
    <AO_ITEM Index="43" Name="AO_Lift_Servo_CW_Limit_Position" BufferOffset="86" Device="" Addr="d1086" />
    <AO_ITEM Index="44" Name="AO_Lift_Servo_Position1" BufferOffset="88" Device="" Addr="d1088" />
    <AO_ITEM Index="45" Name="AO_Lift_Servo_Position2" BufferOffset="90" Device="" Addr="d1090" />
    <AO_ITEM Index="46" Name="AO_Lift_Servo_Position3" BufferOffset="92" Device="" Addr="d1092" />
    <AO_ITEM Index="47" Name="AO_Lift_Servo_Position4" BufferOffset="94" Device="" Addr="d1094" />
    <AO_ITEM Index="48" Name="AO_Lift_Servo_Position5" BufferOffset="96" Device="" Addr="d1096" Note="spare" />
    <AO_ITEM Index="49" Name="" />
    <AO_ITEM Index="50" Name="AO_Lift_Servo_Step_Distance" BufferOffset="100" Device="" Addr="d1100" />
    <AO_ITEM Index="51" Name="" />
    <AO_ITEM Index="52" Name="" />
    <AO_ITEM Index="53" Name="AO_Lift_Servo_Work_Mode" BufferOffset="106" Device="" Addr="d1106" />
    <AO_ITEM Index="54" Name="AO_Lift_Servo_Single_Axis_Manual_Speed " BufferOffset="108" Device="" Addr="d1108" />
    <AO_ITEM Index="55" Name="AO_Lift_Servo_Origin_Offset" BufferOffset="110" Device="" Addr="d1110" />
    <AO_ITEM Index="56" Name="AO_Lift_Servo_ACC_DEC_Time" BufferOffset="112" Device="" Addr="d1112" />
    <AO_ITEM Index="57" Name="" />
    <AO_ITEM Index="58" Name="" />
    <AO_ITEM Index="59" Name="" />
    <AO_ITEM Index="60" Name="" />
    <!--<AO_ITEM Index="0" Name="AO_Generator_Power_Setpoint" BufferOffset="0" Device="" Addr="d1000" Note="0-6000W" />
    <AO_ITEM Index="22" Name="AO_Process_Pressure_Offset_Value" BufferOffset="44" Device="" Addr="d1044" Note="0-20" />
    <AO_ITEM Index="25" Name="" BufferOffset="50" Device="" Addr="d1050" Note="0=Substrate heater mode ,1=Bais RF mode" />
    <AO_ITEM Index="26" Name="AO_Pump_IO_CTRL_Enable" BufferOffset="52" Addr="d1052" Note="0=Comm CTRL ,1=IO CTRL" />
    <AO_ITEM Index="49" Name="" />-->
  </Ana_Out>
  <Ana_In>
    <AI_ITEM Index="0" Name="AI_Process_pressure" BufferOffset="0" Device="" Addr="d2000" />
    <AI_ITEM Index="1" Name="AI_Chamber_pressure" BufferOffset="2" Device="" Addr="d2002" />
    <AI_ITEM Index="2" Name="AI_Foreline_pressure" BufferOffset="4" Device="" Addr="d2004" />
    <AI_ITEM Index="3" Name="" />
    <AI_ITEM Index="4" Name="AI_MFC1_Flow" BufferOffset="8" Device="" Addr="d2008" Note="MFC1" />
    <AI_ITEM Index="5" Name="AI_MFC2_Flow" BufferOffset="10" Device="" Addr="d2010" Note="MFC2" />
    <AI_ITEM Index="6" Name="AI_MFC3_Flow" BufferOffset="12" Device="" Addr="d2012" Note="MFC3" />
    <AI_ITEM Index="7" Name="AI_MFC4_Flow" BufferOffset="14" Device="" Addr="d2014" Note="MFC4" />
    <AI_ITEM Index="8" Name="AI_MFC5_Flow" BufferOffset="16" Device="" Addr="d2016" Note="MFC5" />
    <AI_ITEM Index="9" Name="" />
    <AI_ITEM Index="10" Name="" />
    <AI_ITEM Index="11" Name="" />
    <AI_ITEM Index="12" Name="" />
    <AI_ITEM Index="13" Name="" />
    <AI_ITEM Index="14" Name="AI_Throttle_Valve_Real_Position" BufferOffset="28" Device="" Addr="d2028" Note="Throttle valve FB" />
    <AI_ITEM Index="15" Name="AI_Throttle_Valve_Real_Pressure" BufferOffset="30" Device="" Addr="d2030" Note="Throttle valve FB" />
    <AI_ITEM Index="16" Name="" />
    <AI_ITEM Index="17" Name="" />
    <AI_ITEM Index="18" Name="AI_Heartbeat_FB" BufferOffset="36" Device="" Addr="d2036" Note="From PLC to PC" />
    <AI_ITEM Index="19" Name="" />
    <AI_ITEM Index="20" Name="" />
    <AI_ITEM Index="21" Name="AI_Second" BufferOffset="42" Device="" Addr="d2042" />
    <AI_ITEM Index="22" Name="AI_Minute" BufferOffset="44" Device="" Addr="d2044" />
    <AI_ITEM Index="23" Name="AI_Time" BufferOffset="46" Device="" Addr="d2046" />
    <AI_ITEM Index="24" Name="AI_Day" BufferOffset="48" Device="" Addr="d2048" />
    <AI_ITEM Index="25" Name="AI_Month" BufferOffset="50" Device="" Addr="d2050" />
    <AI_ITEM Index="26" Name="AI_Year" BufferOffset="52" Device="" Addr="d2052" />
    <AI_ITEM Index="27" Name="" />
    <AI_ITEM Index="28" Name="AI_CHB_Wall_Control_TC_Temp" BufferOffset="56" Device="" Addr="d2056" Note="Chamber Wall Heater" />
    <AI_ITEM Index="29" Name="AI_CHB_Wall_Monitor_TC_Temp" BufferOffset="58" Device="" Addr="d2058" />
    <AI_ITEM Index="30" Name="AI_Grid_TC_Temp" Device="" BufferOffset="60" Addr="d2060" Note="SPARE" />
    <AI_ITEM Index="31" Name="" />
    <AI_ITEM Index="32" Name="AI_Foreline_Control_TC_Temp" BufferOffset="64" Device="" Addr="d2064" Note="Foreline heater" />
    <AI_ITEM Index="33" Name="AI_Foreline_Monitor_TC_Temp" BufferOffset="66" Device="" Addr="d2066" />
    <AI_ITEM Index="34" Name="AI_Substrate_Control_TC_Temp" BufferOffset="68" Device="" Addr="d2068" Note="Substrate 或Coolant只有1组数据有效" />
    <AI_ITEM Index="35" Name="AI_Substrate_Monitor_TC_Temp" BufferOffset="70" Device="" Addr="d2070" />
    <AI_ITEM Index="36" Name="AI_Coolant_Inlet_Temp" BufferOffset="72" Device="" Addr="d2072" />
    <AI_ITEM Index="37" Name="AI_Coolant_Outlet_Temp" BufferOffset="74" Device="" Addr="d2074" />
    <AI_ITEM Index="38" Name="" />
    <AI_ITEM Index="39" Name="" />
    <AI_ITEM Index="40" Name="AI_Lift_Servo_Current_Position" BufferOffset="80" Device="" Addr="d2080" />
    <AI_ITEM Index="41" Name="AI_Lift_Servo_Motor1_Current_Position" BufferOffset="82" Device="" Addr="d2082" />
    <AI_ITEM Index="42" Name="AI_Lift_Servo_Motor2_Current_Position" BufferOffset="84" Device="" Addr="d2084" />
    <AI_ITEM Index="43" Name="AI_Lift_Servo_Motor3_Current_Position" BufferOffset="86" Device="" Addr="d2086" />
    <AI_ITEM Index="44" Name="AI_Lift_Servo_Motor4_Current_Position" BufferOffset="88" Device="" Addr="d2088" />
    <AI_ITEM Index="45" Name="AI_Lift_Servo1_Alarm_Code" BufferOffset="90" Device="" Addr="d2090" />
    <AI_ITEM Index="46" Name="AI_Lift_Servo2_Alarm_Code" BufferOffset="92" Device="" Addr="d2092" />
    <AI_ITEM Index="47" Name="AI_Lift_Servo3_Alarm_Code" BufferOffset="94" Device="" Addr="d2094" />
    <AI_ITEM Index="48" Name="AI_Lift_Servo4_Alarm_Code" BufferOffset="96" Device="" Addr="d2096" />
    <AI_ITEM Index="49" Name="AI_Lift_Servo_SVR_Alarm_Code" BufferOffset="98" Device="" Addr="d2098" />
    <AI_ITEM Index="50" Name="AI_Lift_Servo1_Warning_Code" BufferOffset="100" Device="" Addr="d2100" />
    <AI_ITEM Index="51" Name="AI_Lift_Servo2_Warning_Code" BufferOffset="102" Device="" Addr="d2102" />
    <AI_ITEM Index="52" Name="AI_Lift_Servo3_Warning_Code" BufferOffset="104" Device="" Addr="d2104" />
    <AI_ITEM Index="53" Name="AI_Lift_Servo4_Warning_Code" BufferOffset="106" Device="" Addr="d2106" />
    <AI_ITEM Index="54" Name="AI_Lift_Servo_SVR_Warning_Code" BufferOffset="108" Device="" Addr="d2108" />
    <AI_ITEM Index="55" Name="AI_Lift_Servo_Current_Speed" BufferOffset="110" Device="" Addr="d2110" />
    <AI_ITEM Index="56" Name="" />
    <!--
    <AI_ITEM Index="16" Name="AI_Throttle_Valve_State" BufferOffset="32" Device="" Addr="d2032" />
    <AI_ITEM Index="42" Name="AI_Generator_Forward_Power" BufferOffset="84" Device="" Addr="d2084" Note="ICP Souce/RPS" />
    <AI_ITEM Index="43" Name="AI_Generator_Reflect_Power" BufferOffset="86" Device="" Addr="d2086" />
    <AI_ITEM Index="49" Name="" />-->
  </Ana_In>
</IO_DEFINE>