Virgo_Mask/VirgoSimulator/Config/_ioDefineVirgo.xml

<?xml version='1.0'?>
<IO_DEFINE xmlns:xsi='http://www.w3.org/2001/XMLSchema-instance' xmlns:xsd='http://www.w3.org/2001/XMLSchema'>
  <Dig_In>
    <DI_ITEM Index="0" Name="DI_Lid_Closed" Device="" Addr="w20.00" Note="Interlock-HW" />
    <DI_ITEM Index="1" Name="DI_PM_ATM_SW" Device="" Addr="w20.01" Note="Interlock-PLC" />
    <DI_ITEM Index="2" Name="DI_PM_VAC_SW" Device="9.5T" Addr="w20.02" Note="Interlock-HW" />
    <DI_ITEM Index="3" Name="DI_Cooling_Water_Flow_SW" Device="" Addr="w20.03" Note="Interlock-HW" />
    <DI_ITEM Index="4" Name="DI_LE_OT_SW_Alarm" Device="" Addr="w20.04" Note="1=OK， 0=alarm" />
    <DI_ITEM Index="5" Name="DI_Water_Leak" Device="" Addr="w20.05" Note="1=OK， 0=alarm" />
    <DI_ITEM Index="6" Name="DI_Slit_Door_Open_Pos" Device="" Addr="w20.06" Note="Interlock-HW" />
    <DI_ITEM Index="7" Name="DI_Slit_Door_Close_Pos" Device="" Addr="w20.07" Note="Interlock-HW" />
    <DI_ITEM Index="8" Name="DI_Lift_Pin_Up" Device="" Addr="w20.08" Note="1=on,0=off" />
    <DI_ITEM Index="9" Name="DI_Lift_Pin_Down" Device="" Addr="w20.09" Note="1=on,0=off" />
    <DI_ITEM Index="10" Name="DI_Guide_Pin_Small_Lifter_Up_Pos" Device="" Addr="w20.10" />
    <DI_ITEM Index="11" Name="DI_Guide_Pin_Small_Lifter_Down_Pos" Device="" Addr="w20.11" />
    <DI_ITEM Index="12" Name="DI_Guide_Pin_Medium_Lifter_Up_Pos" Device="" Addr="w20.12" />
    <DI_ITEM Index="13" Name="DI_Guide_Pin_Medium_Lifter_Down_Pos" Device="" Addr="w20.13" />
    <DI_ITEM Index="14" Name="DI_ARM_Not_Extend_to_PM" Device="" Addr="w20.14" Note="Interlock-PLC" />
    <DI_ITEM Index="15" Name="DI_Generator_Hardware_Interlock" Device="" Addr="w20.15" Note="1=rf interlock ok,0=rf interlock off" />
    <DI_ITEM Index="16" Name="" />
    <DI_ITEM Index="17" Name="DI_Coolant_Inlet_TC_Broken_Alarm" Device="" Addr="w21.01" />
    <DI_ITEM Index="18" Name="DI_Coolant_Outlet_TC_Broken_Alarm" Device="" Addr="w21.02" />
    <DI_ITEM Index="19" Name="DI_Substrate_Control_TC_Broken_Alarm" Device="" Addr="w21.03" Note="0=OK,1=alarm" />
    <DI_ITEM Index="20" Name="DI_Substrate_Monitor_TC_Broken_Alarm" Device="" Addr="w21.04" Note="0=OK,1=alarm" />
    <DI_ITEM Index="21" Name="DI_Substrate_Heater_On_FB" Device="" Addr="w21.05" Note="0=OFF,1=ON" />
    <DI_ITEM Index="22" Name="DI_CDA_Pressure" Device="" Addr="w21.06" />
    <DI_ITEM Index="23" Name="DI_CDA_Pressure_Switch_Out_2" Device="" Addr="W21.07" />
    <DI_ITEM Index="24" Name="DI_SourceFan1" Device="" Addr="w21.08" />
    <DI_ITEM Index="25" Name="DI_CTRL_Box_Fans_Running" Device="" Addr="W21.09" />
    <DI_ITEM Index="26" Name="DI_Source_Match_Interlock" Device="" Addr="W21.10"/>
    <DI_ITEM Index="27" Name="DI_Bais_Match_Interlock" Device="" Addr="W21.11"/>
    <DI_ITEM Index="28" Name="" />
    <DI_ITEM Index="29" Name="DI_GB_Interlock_Alarm" Device="" Addr="w21.13" Note="0=OK，1=Warning" />
    <DI_ITEM Index="30" Name="DI_GB_Pressure_Interlock" Device="" Addr="W21.14" />
    <DI_ITEM Index="31" Name="DI_CHB_Wall_OT_Switch_Alarm" Device="" Addr="W21.15"/>
    <DI_ITEM Index="32" Name="DI_SRF_Water_Flow_Switch" Device="" Addr="W22.00" />
    <DI_ITEM Index="33" Name="DI_Factory_Scrubber_SYS_Normal" Device="" Addr="W22.01" />
    <DI_ITEM Index="34" Name="" />
    <DI_ITEM Index="35" Name="" />
    <DI_ITEM Index="36" Name="DI_Substrate_TC_Deviation_out_of_range" Device="" Addr="w22.04" Note="0=OK，1=alarm" />
    <DI_ITEM Index="37" Name="DI_Foreline_TC_Deviation_out_of_range" Device="" Addr="w22.05" Note="0=OK，1=alarm" />
    <DI_ITEM Index="38" Name="DI_Foreline_Control_TC_Broken_Alarm" Device="" Addr="w22.06" Note="0=OK，1=alarm" />
    <DI_ITEM Index="39" Name="DI_Foreline_Monitor_TC_Broken_Alarm" Device="" Addr="w22.07" Note="0=OK，1=alarm" />
    <DI_ITEM Index="40" Name="DI_Foreline_Heater_On_FB" Device="" Addr="w22.08" Note="0=OFF,1=ON" />
    <DI_ITEM Index="41" Name="" />
    <DI_ITEM Index="42" Name="" />
    <DI_ITEM Index="43" Name="DI_EFEM_Side_Panel_Closed" Device="" Addr="w22.11" Note="Interlock-HW" />
    <DI_ITEM Index="44" Name="DI_ACR_Fans_Running" Device="" Addr="W22.12"/>
    <DI_ITEM Index="45" Name="DI_ACR_Smoke_Monitoring" Device="" Addr="w22.13" />
    <DI_ITEM Index="46" Name="DI_ACR_Power_On" Device="" Addr="W22.14"/>
    <DI_ITEM Index="47" Name="" />
    <DI_ITEM Index="48" Name="DI_MFC1_Pressure" Device="" Addr="w23.00" />
    <DI_ITEM Index="49" Name="DI_MFC2_Pressure" Device="" Addr="w23.01" />
    <DI_ITEM Index="50" Name="DI_MFC3_Pressure" Device="" Addr="w23.02" />
    <DI_ITEM Index="51" Name="DI_MFC4_Pressure" Device="" Addr="w23.03" />
    <DI_ITEM Index="52" Name="DI_MFC5_Pressure" Device="" Addr="w23.04" />
    <DI_ITEM Index="53" Name="DI_N2_Pressure" Device="" Addr="w23.05"  />
    <DI_ITEM Index="54" Name="DI_Process_pressure_Alarm" Addr="w23.06" />
    <DI_ITEM Index="55" Name="DI_Chamber_pressure_Alarm" Addr="w23.07" />
    <DI_ITEM Index="56" Name="DI_Foreline_pressure_Alarm" Addr="w23.08" />
    <DI_ITEM Index="57" Name="" />
    <DI_ITEM Index="58" Name="" />
    <DI_ITEM Index="59" Name="" />
    <DI_ITEM Index="60" Name="" />
    <DI_ITEM Index="61" Name="" />
    <DI_ITEM Index="62" Name="" />
    <DI_ITEM Index="63" Name="" />
    <DI_ITEM Index="64" Name="" />
    <DI_ITEM Index="65" Name="" />
    <DI_ITEM Index="66" Name="" />
    <DI_ITEM Index="67" Name="" />
    <DI_ITEM Index="68" Name="" />
    <DI_ITEM Index="69" Name="" />
    <DI_ITEM Index="70" Name="" />
    <DI_ITEM Index="71" Name="" />
    <DI_ITEM Index="72" Name="" />
    <DI_ITEM Index="73" Name="" />
    <DI_ITEM Index="74" Name="" />
    <DI_ITEM Index="75" Name="" />
    <DI_ITEM Index="76" Name="" />
    <DI_ITEM Index="77" Name="" />
    <DI_ITEM Index="78" Name="" />
    <DI_ITEM Index="79" Name="" />
    <DI_ITEM Index="80" Name="DI_Lift_Servo_with_origin" Addr="w25.00"/>
    <DI_ITEM Index="81" Name="DI_Lift_Servo_on" Addr="w25.01" />
    <DI_ITEM Index="82" Name="DI_Lift_Servo_origin_Sensor" Addr="w25.02" />
    <DI_ITEM Index="83" Name="Lift_Servo_up_Position_Sensor" Addr="w25.03" Note="0=OK， 1=alarm     Interlock-PLC"/>
    <DI_ITEM Index="84" Name="DI_Lift_Servo_CCW_limit_Sensor_alarm" Addr="w25.04" Note="0=OK， 1=alarm     Interlock-PLC"/>
    <DI_ITEM Index="85" Name="DI_Lift_Servo_alarm" Addr="w25.05" Note="0=OK， 1=alarm     Interlock-PLC"/>
    <DI_ITEM Index="86" Name="DI_Lift_Servo_ORG_fail_alarm" Addr="w25.06" Note="0=OK， 1=alarm     Interlock-PLC"/>
    <DI_ITEM Index="87" Name="DI_Lift_Servo_ABS_fail_alarm" Addr="w25.07" Note="0=OK， 1=alarm     Interlock-PLC"/>
    <DI_ITEM Index="88" Name="DI_Lift_Servo_Over_software_Limit_alarm" Addr="w25.08" Note="0=OK， 1=alarm     Interlock-PLC"/>
    <DI_ITEM Index="89" Name="DI_Lift_Servo_Go_Position1_Complete" Addr="w25.09" Note="定位到位置1完成"/>
    <DI_ITEM Index="90" Name="DI_Lift_Servo_Go_Position2_Complete" Addr="w25.10" Note="定位到位置2完成"/>
    <DI_ITEM Index="91" Name="DI_Lift_Servo_Go_Position3_Complete" Addr="w25.11" Note="定位到位置3完成"/>
    <DI_ITEM Index="92" Name="DI_Lift_Servo_origin_Finished"  Addr="w25.12" Note="原点已建立"/>
    <DI_ITEM Index="93" Name="DI_Lift_Servo_Go_Position4_Complete" Addr="W25.13" Device=""  Note="Lift Servo到位置4，定位完成" />
    <DI_ITEM Index="94" Name="DI_Lift_Servo_Go_Position5_Complete" Addr="W25.14" Device=""  Note="Lift Servo到位置5，定位完成" />
    <DI_ITEM Index="95" Name="DI_Lift_Servo_Pos_Module_Alarm" Addr="W25.15" Device=""  Note="0=Normal， 1=Alarm     Interlock-PLC" />
    <DI_ITEM Index="96" Name="DI_Lift_Servo_Over_Software_Limit_Alarm" Addr="W26.00" Device=""  Note="0=Normal， 1=Alarm     Interlock-PLC" />
    <DI_ITEM Index="97" Name="" />
    <DI_ITEM Index="98" Name="" />
    <DI_ITEM Index="99" Name="DI_YAS_Servo_Controler_COMM_Alarm" Addr="W26.03" Device=""  Note="0=OK，1=Alarm  安川PLC与欧姆龙PLC通讯正常" />
    <DI_ITEM Index="100" Name="DI_YAS_Servo_Controler_Battery_Low_Alarm" Addr="W26.04" Device=""  Note="0=OK，1=Alarm  安川伺服控制器电池电压低报警" />
    <DI_ITEM Index="101" Name="DI_Lift_Servo_Origin_Sensor" Addr="W26.05" Device=""  Note="1=On,0=Off    Lift Servo 原点开关（NO)" />
    <DI_ITEM Index="102" Name="DI_Lift_Servo_Up_Limit_Sensor" Addr="W26.06" Device=""  Note="1=On,0=Off    Lift Servo 上极限开关(NC)" />
    <DI_ITEM Index="103" Name="DI_Lift_Servo_Down_Limit_Sensor" Addr="W26.07" Device=""  Note="1=On,0=Off    Lift Servo 下极限开关(NC)" />
    <DI_ITEM Index="104" Name="DI_Lift_Virtual_Servo_On" Addr="W26.08" Device=""  Note="1=On,0=Off    虚拟轴伺服On" />
    <DI_ITEM Index="105" Name="DI_Lift_Virtual_Servo_Origin_Complete" Addr="W26.09" Device=""  Note="1=On,0=Off    虚拟轴伺服回原点完成" />
    <DI_ITEM Index="106" Name="DI_Lift_Virtual_Servo_Busying" Addr="W26.10" Device=""  Note="1=On,0=Off    虚拟轴伺服运行中" />
    <DI_ITEM Index="107" Name="DI_Lift_Servo_Group_Go_Pos_1_Complete" Addr="W26.11" Device="" />
    <DI_ITEM Index="108" Name="DI_Lift_Servo_Group_Go_Pos_2_Complete" Addr="W26.12" Device="" />
    <DI_ITEM Index="109" Name="DI_Lift_Servo_Group_Go_Pos_3_Complete" Addr="W26.13" Device="" />
    <DI_ITEM Index="110" Name="DI_Lift_Servo_Group_Go_Pos_4_Complete" Addr="W26.14" Device="" />
    <DI_ITEM Index="111" Name="DI_Lift_Servo_Group_Go_Pos_5_Complete" Addr="W26.15" Device="" />
    <DI_ITEM Index="112" Name="" />
    <DI_ITEM Index="113" Name="" />
    <DI_ITEM Index="114" Name="DI_Lift_Servo_1_Servo_On" Addr="W27.02" Device=""  Note="1=On,0=Off    伺服-1ON" />
    <DI_ITEM Index="115" Name="DI_Lift_Servo_1_Servo_Origin_Complete" Addr="W27.03" Device=""  Note="1=On,0=Off    伺服-1回原点完成" />
    <DI_ITEM Index="116" Name="DI_Lift_Servo_1_Servo_Busying" Addr="W27.04" Device=""  Note="1=On,0=Off    伺服-1伺服运行中" />
    <DI_ITEM Index="117" Name="DI_Lift_Servo_1_Braker_Open" Addr="W27.05" Device=""  Note="1=On,0=Off    伺服-1抱闸已打开" />
    <DI_ITEM Index="118" Name="DI_Lift_Servo_1_L_Servo_Driver_Alarm" Addr="W27.06" Device=""  Note="0=Normal， 1=Alarm  伺服驱动-1器报警" />
    <DI_ITEM Index="119" Name="DI_Lift_Servo_1_L_Servo_Driver_Warning" Addr="W27.07" Device=""  Note="0=Normal， 1=Alarm  伺服驱动-1器警告" />
    <DI_ITEM Index="120" Name="DI_Lift_Servo_1_Search_ORG_Fail_Alarm" Addr="W27.08" Device=""  Note="0=Normal， 1=Alarm  伺服-1回原点失败报警" />
    <DI_ITEM Index="121" Name="DI_Lift_Servo_1_ABS_Fail_Alarm" Addr="W27.09" Device=""  Note="0=Normal， 1=Alarm  伺服-1定位失败报警" />
    <DI_ITEM Index="122" Name="DI_Lift_Servo_1_Up_Limit_Alarm" Addr="W27.10" Device=""  Note="0=Normal， 1=Alarm  伺服驱动-1运行中，触发上极限报警" />
    <DI_ITEM Index="123" Name="DI_Lift_Servo_1_Down_Limit_Alarm" Addr="W27.11" Device=""  Note="0=Normal， 1=Alarm  伺服驱动-1运行中，触发下极限报警" />
    <DI_ITEM Index="124" Name="DI_Lift_Servo_1_Over_Software_Alarm" Addr="W27.12" Device=""  Note="0=Normal， 1=Alarm  伺服驱动-1设置软限位超出报警" />
    <DI_ITEM Index="125" Name="" />
    <DI_ITEM Index="126" Name="" />
    <DI_ITEM Index="127" Name="" />
    <DI_ITEM Index="128" Name="DI_Lift_Servo_Group_Go_Pos_Origin_Complete" Addr="W28.00" Device=""  Note=""/>
    <DI_ITEM Index="129" Name="" />
    <DI_ITEM Index="130" Name="DI_Lift_Servo_2_Servo_On" Addr="W28.02" Device=""  Note="1=On,0=Off    伺服-1ON" />
    <DI_ITEM Index="131" Name="DI_Lift_Servo_2_Servo_Origin_Complete" Addr="W28.03" Device=""  Note="1=On,0=Off    伺服-1回原点完成" />
    <DI_ITEM Index="132" Name="DI_Lift_Servo_2_Servo_Busying" Addr="W28.04" Device=""  Note="1=On,0=Off    伺服-1伺服运行中" />
    <DI_ITEM Index="133" Name="DI_Lift_Servo_2_Braker_Open" Addr="W28.05" Device=""  Note="1=On,0=Off    伺服-1抱闸已打开" />
    <DI_ITEM Index="134" Name="DI_Lift_Servo_2_L_Servo_Driver_Alarm" Addr="W28.06" Device=""  Note="0=Normal， 1=Alarm  伺服驱动-1器报警" />
    <DI_ITEM Index="135" Name="DI_Lift_Servo_2_L_Servo_Driver_Warning" Addr="W28.07" Device=""  Note="0=Normal， 1=Alarm  伺服驱动-1器警告" />
    <DI_ITEM Index="136" Name="DI_Lift_Servo_2_Search_ORG_Fail_Alarm" Addr="W28.08" Device=""  Note="0=Normal， 1=Alarm  伺服-1回原点失败报警" />
    <DI_ITEM Index="137" Name="DI_Lift_Servo_2_ABS_Fail_Alarm" Addr="W28.09" Device=""  Note="0=Normal， 1=Alarm  伺服-1定位失败报警" />
    <DI_ITEM Index="138" Name="DI_Lift_Servo_2_Up_Limit_Alarm" Addr="W28.10" Device=""  Note="0=Normal， 1=Alarm  伺服驱动-1运行中，触发上极限报警" />
    <DI_ITEM Index="139" Name="DI_Lift_Servo_2_Down_Limit_Alarm" Addr="W28.11" Device=""  Note="0=Normal， 1=Alarm  伺服驱动-1运行中，触发下极限报警" />
    <DI_ITEM Index="140" Name="DI_Lift_Servo_2_Over_Software_Alarm" Addr="W28.12" Device=""  Note="0=Normal， 1=Alarm  伺服驱动-1设置软限位超出报警" />
    <DI_ITEM Index="141" Name="" />
    <DI_ITEM Index="142" Name="" />
    <DI_ITEM Index="143" Name="DI_Lift_Servo_Group_Current_Pos_DIff_Alarm" Addr="W28.15" Device=""  Note="0=Normal， 1=Alarm" />
    <DI_ITEM Index="144" Name="DI_Substrate_Heat_PID_AT_Star_FB" Addr="W29.00" Device="" />
    <DI_ITEM Index="145" Name="DI_Substrate_Heat_PID_AT_Stop_FB" Addr="W29.01" Device="" />
    <DI_ITEM Index="146" Name="DI_CHB_Heat_PID_AT_Star_FB" Addr="W29.02" Device="" />
    <DI_ITEM Index="147" Name="DI_CHB_Heat_PID_AT_Stop_FB" Addr="W29.03" Device="" />
    <DI_ITEM Index="148" Name="DI_Foreline_Heat_PID_AT_Star_FB" Addr="W29.04" Device="" />
    <DI_ITEM Index="149" Name="DI_Foreline_Heat_PID_AT_Stop_FB" Addr="W29.05" Device="" />
    <DI_ITEM Index="150" Name="" />
    <DI_ITEM Index="151" Name="" />
    <DI_ITEM Index="152" Name="DI_Substrate_Heat_PID_AT_Running" Addr="W29.08" Device="" />
    <DI_ITEM Index="153" Name="DI_Substrate_Heat_PID_AT_Finished" Addr="W29.09" Device="" />
    <DI_ITEM Index="154" Name="DI_CHB_Heat_PID_AT_Running" Addr="W29.10" Device="" />
    <DI_ITEM Index="155" Name="DI_CHB_Heat_PID_AT_Finished" Addr="W29.11" Device="" />
    <DI_ITEM Index="156" Name="DI_Foreline_Heat_PID_AT_Running" Addr="W29.12" Device="" />
    <DI_ITEM Index="157" Name="DI_Foreline_Heat_PID_AT_Finished" Addr="W29.13" Device="" />
    <DI_ITEM Index="158" Name="" />
    <DI_ITEM Index="159" Name="" />
  </Dig_In>
  <Dig_Out>
    <DO_ITEM Index="0" Name="DO_Soft_Pumping_Valve" Device="" Addr="w0.00" />
    <DO_ITEM Index="1" Name="DO_Fast_Pumping_Valve" Device="" Addr="w0.01" />
    <DO_ITEM Index="2" Name="" />
    <DO_ITEM Index="3" Name="" />
    <DO_ITEM Index="4" Name="DO_Slit_Door_Open" Device="" Addr="w0.04" />
    <DO_ITEM Index="5" Name="DO_Slit_Door_Close" Device="" Addr="w0.05" Note="Interlock-HW" />
    <DO_ITEM Index="6" Name="DO_Lift_Pin_Up" Device="" Addr="w0.06" />
    <DO_ITEM Index="7" Name="DO_Lift_Pin_Down" Device="" Addr="w0.07" />
    <DO_ITEM Index="8" Name="DO_Guide_Pin_Small_Lifter_Up" Device="" Addr="w0.08" />
    <DO_ITEM Index="9" Name="DO_Guide_Pin_Small_Lifter_Down" Device="" Addr="w0.09" />
    <DO_ITEM Index="10" Name="DO_Guide_Pin_Medium_Lifter_Up" Device="" Addr="w0.10" />
    <DO_ITEM Index="11" Name="DO_Guide_Pin_Medium_Lifter_Down" Device="" Addr="w0.11" />
    <DO_ITEM Index="12" Name="" />
    <DO_ITEM Index="13" Name="" />
    <DO_ITEM Index="14" Name="DO_MFC1_Valve" Device="" Addr="w0.14" />
    <DO_ITEM Index="15" Name="DO_MFC2_Valve" Device="" Addr="w0.15" />
    <DO_ITEM Index="16" Name="DO_MFC3_Valve" Device="" Addr="w1.00" />
    <DO_ITEM Index="17" Name="DO_MFC4_Valve" Device="" Addr="w1.01" />
    <DO_ITEM Index="18" Name="DO_MFC5_Valve" Device="" Addr="w1.02" />
    <DO_ITEM Index="19" Name="" />
    <DO_ITEM Index="20" Name="" />
    <DO_ITEM Index="21" Name="" />
    <DO_ITEM Index="22" Name="" />
    <DO_ITEM Index="23" Name="DO_Chamber_purge_valve" Device="" Addr="w1.07" />
    <DO_ITEM Index="24" Name="DO_Chamber_vent_valve" Device="" Addr="w1.08" />
    <DO_ITEM Index="25" Name="DO_Process_gas_final_valve" Device="" Addr="w1.09" />
    <DO_ITEM Index="26" Name="DO_EV5_Water_Valve" Device="" Addr="W1.10"/>
    <DO_ITEM Index="27" Name="" />
    <DO_ITEM Index="28" Name="" />
    <DO_ITEM Index="29" Name="" />
    <DO_ITEM Index="30" Name="" />
    <DO_ITEM Index="31" Name="" />
    <DO_ITEM Index="32" Name="DO_Reset_Signal" Device="" Addr="w2.00" Note="Reset RFG" />
    <DO_ITEM Index="33" Name="" />
    <DO_ITEM Index="34" Name="" />
    <DO_ITEM Index="35" Name="DO_Forline_Heater_Enable" Device="" Addr="w2.03" />
    <DO_ITEM Index="36" Name="DO_Forline_Heater_On" Device="" Addr="w2.04" />
    <DO_ITEM Index="37" Name="DO_Substrate_Heater_On" Device="" Addr="w2.05" Note="Interlock-HW" />
    <DO_ITEM Index="38" Name="" />
    <DO_ITEM Index="39" Name="" />
    <DO_ITEM Index="40" Name="DO_Substrate_Heat_PID_AT_Star" Addr="W2.08" Device=""  Note="DI-144为1，将DO-40置0" />
    <DO_ITEM Index="41" Name="DO_Substrate_Heat_PID_AT_Stop" Addr="W2.09" Device=""  Note="DI-145为1，将DO-41置0" />
    <DO_ITEM Index="42" Name="DO_CHB_Heat_PID_AT_Star" Addr="W2.10" Device=""  Note="DI-146为1，将DO-42置0" />
    <DO_ITEM Index="43" Name="DO_CHB_Heat_PID_AT_Stop" Addr="W2.11" Device=""  Note="DI-147为1，将DO-43置0" />
    <DO_ITEM Index="44" Name="DO_Foreline_Heat_PID_AT_Star" Addr="W2.12" Device=""  Note="DI-148为1，将DO-44置0" />
    <DO_ITEM Index="45" Name="DO_Foreline_Heat_PID_AT_Stop" Addr="W2.13" Device=""  Note="DI-149为1，将DO-45置0" />
    <DO_ITEM Index="46" Name="" />
    <DO_ITEM Index="47" Name="DO_CHB_Wall_Heater_On" Addr="w2.15"/>
    <DO_ITEM Index="48" Name="" />
    <DO_ITEM Index="49" Name="" />
    <DO_ITEM Index="50" Name="" />
    <DO_ITEM Index="51" Name="" />
    <DO_ITEM Index="52" Name="DO_Arm_Extend_Enable" Addr="w3.04" Note="允许EFEM Rorbot Arm伸入PM腔体内，带逻辑"/>
    <DO_ITEM Index="53" Name="" />
    <DO_ITEM Index="54" Name="" />
    <DO_ITEM Index="55" Name="" />
    <DO_ITEM Index="56" Name="DO_Lift_Servo_Go_Position1" Addr="w3.08" Note="有需求才置On,到达位置后或者停止置Off，反馈信号DI-89"/>
    <DO_ITEM Index="57" Name="DO_Lift_Servo_Go_Position2" Addr="w3.09" Note="有需求才置On,到达位置后或者停止置Off，反馈信号DI-90" />
    <DO_ITEM Index="58" Name="DO_Lift_Servo_Go_Position3" Addr="w3.10" Note="有需求才置On,到达位置后或者停止置Off，反馈信号DI-91" />
    <DO_ITEM Index="59" Name="DO_Lift_Servo_origin"       Addr="w3.11" Note="有自动手动需求时置on;,DI-80标志位上升沿或者需要停止置Off" />
    <DO_ITEM Index="60" Name="DO_Lift_Servo_stop"         Addr="w3.12" Note="有需求置1，一定时间后置off" />
    <DO_ITEM Index="61" Name="DO_Lift_Servo_manaul_UP"       Addr="w3.13" Note="切换型按钮，按住置1，再按置off，非手动模式下强制置off" />
    <DO_ITEM Index="62" Name="DO_Lift_Servo_manaul_DOWN"       Addr="w3.14" Note="切换型按钮，按住置1，再按置off，非手动模式下强制置off" />
    <DO_ITEM Index="63" Name="" />
    <DO_ITEM Index="64" Name="" />
    <DO_ITEM Index="65" Name="" />
    <DO_ITEM Index="66" Name="" />
    <DO_ITEM Index="67" Name="" />
    <DO_ITEM Index="68" Name="" />
    <DO_ITEM Index="69" Name="" />
    <DO_ITEM Index="70" Name="" />
    <DO_ITEM Index="71" Name="" />
    <DO_ITEM Index="72" Name="" />
    <DO_ITEM Index="73" Name="" />
    <DO_ITEM Index="74" Name="" />
    <DO_ITEM Index="75" Name="" />
    <DO_ITEM Index="76" Name="" />
    <DO_ITEM Index="77" Name="" />
    <DO_ITEM Index="78" Name="" />
    <DO_ITEM Index="79" Name="" />
    <DO_ITEM Index="80" Name="DO_Lift_Servo_Group_Origin" Addr="W5.00" Device=""  Note="回原点完成，反馈DI-105" />
    <DO_ITEM Index="81" Name="" />
    <DO_ITEM Index="82" Name="DO_Lift_Servo_Group_Manual_Up" Addr="W5.02" Device=""  Note="切换型按钮，非手动模式下强制置off" />
    <DO_ITEM Index="83" Name="DO_Lift_Servo_Group_Manual_Down" Addr="W5.03" Device=""  Note="切换型按钮，非手动模式下强制置off" />
    <DO_ITEM Index="84" Name="DO_Lift_Servo_Group_Stop" Addr="W5.04" Device=""  Note="LIFT SERVO立即停止，放弃执行动作" />
    <DO_ITEM Index="85" Name="DO_Lift_Servo_Group_Go_Position1" Addr="W5.05" Device=""  Note="到达位置后,PLC反馈信号DI-107" />
    <DO_ITEM Index="86" Name="DO_Lift_Servo_Group_Go_Position2" Addr="W5.06" Device=""  Note="到达位置后,PLC反馈信号DI-108" />
    <DO_ITEM Index="87" Name="DO_Lift_Servo_Group_Go_Position3" Addr="W5.07" Device=""  Note="到达位置后,PLC反馈信号DI-109" />
    <DO_ITEM Index="88" Name="DO_Lift_Servo_Group_Go_Position4" Addr="W5.08" Device=""  Note="到达位置后,PLC反馈信号DI-110" />
    <DO_ITEM Index="89" Name="DO_Lift_Servo_Group_Go_Position5" Addr="W5.09" Device=""  Note="到达位置后,PLC反馈信号DI-111" />
    <DO_ITEM Index="90" Name="" />
    <DO_ITEM Index="91" Name="" />
    <DO_ITEM Index="92" Name="" />
    <DO_ITEM Index="93" Name="" />
    <DO_ITEM Index="94" Name="" />
    <DO_ITEM Index="95" Name="" />
    <DO_ITEM Index="96" Name="DO_Lift_Servo-1_Manual_Up" Addr="W6.00" Device="" />
    <DO_ITEM Index="97" Name="DO_Lift_Servo-1_Manual_Down" Addr="W6.01" Device="" />
    <DO_ITEM Index="98" Name="DO_Lift_Servo-1_Stop" Addr="W6.02" Device="" />
    <DO_ITEM Index="99" Name="DO_Lift_Servo-1_Step_Up" Addr="W6.03" Device="" />
    <DO_ITEM Index="100" Name="DO_Lift_Servo-1_Step_Down" Addr="W6.04" Device="" />
    <DO_ITEM Index="101" Name="" />
    <DO_ITEM Index="102" Name="" />
    <DO_ITEM Index="103" Name="" />
    <DO_ITEM Index="104" Name="" />
    <DO_ITEM Index="105" Name="" />
    <DO_ITEM Index="106" Name="" />
    <DO_ITEM Index="107" Name="" />
    <DO_ITEM Index="108" Name="" />
    <DO_ITEM Index="109" Name="" />
    <DO_ITEM Index="110" Name="" />
    <DO_ITEM Index="111" Name="" />
    <DO_ITEM Index="112" Name="DO_Lift_Servo-2_Manual_Up" Addr="W7.00" Device="" />
    <DO_ITEM Index="113" Name="DO_Lift_Servo-2_Manual_Down" Addr="W7.01" Device="" />
    <DO_ITEM Index="114" Name="DO_Lift_Servo-2_Stop" Addr="W7.02" Device="" />
    <DO_ITEM Index="115" Name="DO_Lift_Servo-2_Step_Up" Addr="W7.03" Device="" />
    <DO_ITEM Index="116" Name="DO_Lift_Servo-2_Step_Down" Addr="W7.04" Device="" />
    <DO_ITEM Index="117" Name="" />
    <DO_ITEM Index="118" Name="" />
    <DO_ITEM Index="119" Name="" />
    <DO_ITEM Index="120" Name="" />
    <DO_ITEM Index="121" Name="" />
    <DO_ITEM Index="122" Name="" />
    <DO_ITEM Index="123" Name="" />
    <DO_ITEM Index="124" Name="" />
    <DO_ITEM Index="125" Name="" />
    <DO_ITEM Index="126" Name="" />
    <DO_ITEM Index="127" Name="" />
    <DO_ITEM Index="128" Name="" />
    <DO_ITEM Index="129" Name="" />
    <DO_ITEM Index="130" Name="" />
    <DO_ITEM Index="131" Name="" />
    <DO_ITEM Index="132" Name="" />
    <DO_ITEM Index="133" Name="" />
    <DO_ITEM Index="134" Name="" />
    <DO_ITEM Index="135" Name="" />
    <DO_ITEM Index="136" Name="" />
    <DO_ITEM Index="137" Name="" />
    <DO_ITEM Index="138" Name="" />
    <DO_ITEM Index="139" Name="" />
    <DO_ITEM Index="140" Name="" />
    <DO_ITEM Index="141" Name="" />
    <DO_ITEM Index="142" Name="" />
    <DO_ITEM Index="143" Name="" />
  </Dig_Out>
  <Ana_Out>
    <AO_ITEM Index="0" Name="AO_Generator_Power_Setpoint" BufferOffset="0" Device="" Addr="d1000" Note="0-6000W" />
    <AO_ITEM Index="1" Name="" />
    <AO_ITEM Index="2" Name="AO_MFC1_Flow_Setpoint" BufferOffset="4" Device="" Addr="d1004" Note="MFC" />
    <AO_ITEM Index="3" Name="AO_MFC2_Flow_Setpoint" BufferOffset="6" Device="" Addr="d1006" Note="MFC" />
    <AO_ITEM Index="4" Name="AO_MFC3_Flow_Setpoint" BufferOffset="8" Device="" Addr="d1008" Note="MFC" />
    <AO_ITEM Index="5" Name="AO_MFC4_Flow_Setpoint" BufferOffset="10" Device="" Addr="d1010" Note="MFC" />
    <AO_ITEM Index="6" Name="AO_MFC5_Flow_Setpoint" BufferOffset="12" Device="" Addr="d1012" Note="MFC" />
    <AO_ITEM Index="7" Name="AO_Throttle_Valve_Work_Mode" BufferOffset="14" Device="" Addr="d1014" Note="Throttle valve only" />
    <AO_ITEM Index="8" Name="AO_Throttle_Valve_Pressure_Setpoint" BufferOffset="16" Device="" Addr="d1016" />
    <AO_ITEM Index="9" Name="AO_Throttle_Valve_Position_Setpoint" BufferOffset="18" Device="" Addr="d1018" />
    <AO_ITEM Index="10" Name="" />
    <AO_ITEM Index="11" Name="AO_Substrate_Temperature_Setpoint" BufferOffset="22" Device="" Addr="d1022" Note="基座设定温度" />
    <AO_ITEM Index="12" Name="AO_Foreline_Temperature_Setpoint" BufferOffset="24" Device="" Addr="d1024" Note="前级管道设定温度" />
    <AO_ITEM Index="13" Name="AO_Heartbeat" BufferOffset="26" Device="" Addr="d1026" Note="Check 通讯" />
    <AO_ITEM Index="14" Name="AO_CHB_Wall_Temperature_Setpoint"  BufferOffset="28" Device="" Addr="d1028" Note="CHB Wall设定温度" />
    <AO_ITEM Index="15" Name="AO_CHB_Wall_Temp_Limit_Setpoint"  BufferOffset="30" Device="" Addr="d1030" Note="CHB Wall限制温度" />
    <AO_ITEM Index="16" Name="" />
    <AO_ITEM Index="17" Name="" />
    <AO_ITEM Index="18" Name="" />
    <AO_ITEM Index="19" Name="" />
    <AO_ITEM Index="20" Name="AO_Substrate_Temp_Limit_Setpoint" BufferOffset="40" Device="" Addr="d1040" Note="Temp Limit" />
    <AO_ITEM Index="21" Name="AO_Foreline_Temp_Limit_Setpoint" BufferOffset="42" Device="" Addr="d1042" Note="Temp Limit" />
    <AO_ITEM Index="22" Name="AO_Process_Pressure_Offset_Value" BufferOffset="44" Device="" Addr="d1044" Note="0-20" />
    <AO_ITEM Index="23" Name="" />
    <AO_ITEM Index="24" Name="" />
    <AO_ITEM Index="25" Name="AO_BaisRF_Enable" BufferOffset="50" Device="" Addr="d1050" Note="0=Substrate heater mode ,1=Bais RF mode" />
    <AO_ITEM Index="26" Name="AO_Grid_TC_Enable" BufferOffset="52" Device=""  Addr="d1052" Note="1=Grid TC"/>
    <AO_ITEM Index="27" Name="AO_Lift_Servo_Enable" BufferOffset="54" Device=""  Addr="d1054" Note="0=Lift Pin ,1=Lift  Servo"/>
    <AO_ITEM Index="28" Name="AO_Lift_Servo_Auto_speed" BufferOffset="56" Device=""  Addr="d1056" Note="mm/s"/>
    <AO_ITEM Index="29" Name="AO_Lift_Servo_manual_speed" BufferOffset="58" Device=""  Addr="d1058" Note="mm/s" />
    <AO_ITEM Index="30" Name="AO_Lift_Servo_Acc_time" BufferOffset="60" Device=""  Addr="d1060" Note="ms"/>
    <AO_ITEM Index="31" Name="AO_Lift_Servo_Dec_time" BufferOffset="62" Device=""  Addr="d1062" Note="ms" />
    <AO_ITEM Index="32" Name="AO_Lift_Servo_CCW_limit_position" BufferOffset="64" Device=""  Addr="d1064" Note="mm"/>
    <AO_ITEM Index="33" Name="AO_Lift_Servo_CW_limit_position" BufferOffset="66" Device=""  Addr="d1066" Note="mm" />
    <AO_ITEM Index="34" Name="AO_Lift_Servo_Correction_value" BufferOffset="68" Device=""  Addr="d1068" Note="mm"/>
    <AO_ITEM Index="35" Name="AO_Lift_Servo_Position1" BufferOffset="70" Device=""  Addr="d1070" Note="mm"/>
    <AO_ITEM Index="36" Name="AO_Lift_Servo_Position2" BufferOffset="72" Device=""  Addr="d1072" Note="mm" />
    <AO_ITEM Index="37" Name="AO_Lift_Servo_Position3" BufferOffset="74" Device=""  Addr="d1074" Note="mm" />
    <AO_ITEM Index="38" Name="" />
    <AO_ITEM Index="39" Name="" />
    <AO_ITEM Index="40" Name="" />
    <AO_ITEM Index="41" Name="" />
    <AO_ITEM Index="42" Name="" />
    <AO_ITEM Index="43" Name="" />
    <AO_ITEM Index="44" Name="" />
    <AO_ITEM Index="45" Name="AO_Lift_Servo_Work_Mode" Addr="D1090" Device="" />
    <AO_ITEM Index="46" Name="AO_Lift_Servo_Group_ABS_POS_Diff" Addr="D1092" Device="" />
    <AO_ITEM Index="47" Name="" />
    <AO_ITEM Index="48" Name="" />
    <AO_ITEM Index="49" Name="" />
    <AO_ITEM Index="50" Name="AO_Lift_Servo_Group_ABS_POS1" Addr="D1100" Device=""  Note="RT" />
    <AO_ITEM Index="51" Name="AO_Lift_Servo_Group_ABS_POS2" Addr="D1102" Device="" />
    <AO_ITEM Index="52" Name="AO_Lift_Servo_Group_ABS_POS3" Addr="D1104" Device="" />
    <AO_ITEM Index="53" Name="AO_Lift_Servo_Group_ABS_POS4" Addr="D1106" Device="" />
    <AO_ITEM Index="54" Name="AO_Lift_Servo_Group_ABS_POS5" Addr="D1108" Device="" />
    <AO_ITEM Index="55" Name="" />
    <AO_ITEM Index="56" Name="" />
    <AO_ITEM Index="57" Name="AO_Lift_Servo_Group_Search_Origin_Speed" Addr="D1114" Device=""  Note="RT" />
    <AO_ITEM Index="58" Name="AO_Lift_Servo_Group_Auto_Speed" Addr="D1116" Device="" />
    <AO_ITEM Index="59" Name="AO_Lift_Servo_Group_Manual_Speed" Addr="D1118" Device=""  Note="UI" />
    <AO_ITEM Index="60" Name="AO_Lift_Servo_Group_Soft_Up_Limit" Addr="D1120" Device=""  Note="RT" />
    <AO_ITEM Index="61" Name="AO_Lift_Servo_Group_soft_Down_Limit" Addr="D1122" Device="" />
    <AO_ITEM Index="62" Name="AO_Lift_Servo_Group_ACC_DEC_Speed_Time" Addr="D1124" Device="" />
    <AO_ITEM Index="63" Name="" />
    <AO_ITEM Index="64" Name="" />
    <AO_ITEM Index="65" Name="" />
    <AO_ITEM Index="66" Name="" />
    <AO_ITEM Index="67" Name="" />
    <AO_ITEM Index="68" Name="" />
    <AO_ITEM Index="69" Name="" />
    <AO_ITEM Index="70" Name="" />
    <AO_ITEM Index="71" Name="" />
    <AO_ITEM Index="72" Name="" />
    <AO_ITEM Index="73" Name="" />
    <AO_ITEM Index="74" Name="" />
    <AO_ITEM Index="75" Name="" />
  </Ana_Out>
  <Ana_In>
    <AI_ITEM Index="0" Name="AI_Process_pressure" BufferOffset="0" Device="" Addr="d2000" Note="Process pressure" />
    <AI_ITEM Index="1" Name="AI_Chamber_pressure" BufferOffset="2" Device="" Addr="d2002" />
    <AI_ITEM Index="2" Name="AI_Foreline_pressure" BufferOffset="4" Device="" Addr="d2004" />
    <AI_ITEM Index="3" Name="" />
    <AI_ITEM Index="4" Name="AI_MFC1_Flow" BufferOffset="8" Device="" Addr="d2008" Note="MFC" />
    <AI_ITEM Index="5" Name="AI_MFC2_Flow" BufferOffset="10" Device="" Addr="d2010" Note="MFC" />
    <AI_ITEM Index="6" Name="AI_MFC3_Flow" BufferOffset="12" Device="" Addr="d2012" Note="MFC" />
    <AI_ITEM Index="7" Name="AI_MFC4_Flow" BufferOffset="14" Device="" Addr="d2014" Note="MFC" />
    <AI_ITEM Index="8" Name="AI_MFC5_Flow" BufferOffset="16" Device="" Addr="d2016" Note="MFC" />
    <AI_ITEM Index="9" Name="AI_Coolant_Inlet_Temp" BufferOffset="18" Device="" Addr="d2018" Note="Chiller" />
    <AI_ITEM Index="10" Name="AI_Coolant_Outlet_Temp" BufferOffset="20" Device="" Addr="d2020" Note="Chiller" />
    <AI_ITEM Index="11" Name="AI_Substrate_Control_TC_Temp" BufferOffset="22" Device="" Addr="d2022" Note="TC temp" />
    <AI_ITEM Index="12" Name="AI_Substrate_Monitor_TC_Temp" BufferOffset="24" Device="" Addr="d2024" Note="TC temp" />
    <AI_ITEM Index="13" Name="" />
    <AI_ITEM Index="14" Name="AI_Throttle_Valve_Real_Position" BufferOffset="28" Device="" Addr="d2028" Note="Throttle valve only" />
    <AI_ITEM Index="15" Name="AI_Throttle_Valve_Real_Pressure" BufferOffset="30" Device="" Addr="d2030" />
    <AI_ITEM Index="16" Name="AI_Throttle_Valve_State" BufferOffset="32" Device="" Addr="d2032" />
    <AI_ITEM Index="17" Name="" />
    <AI_ITEM Index="18" Name="AI_Heartbeat_FB" BufferOffset="36" Device="" Addr="d2036" />
    <AI_ITEM Index="19" Name="" />
    <AI_ITEM Index="20" Name="" />
    <AI_ITEM Index="21" Name="AI_Second" BufferOffset="42" Device="" Addr="d2042" />
    <AI_ITEM Index="22" Name="AI_Minute" BufferOffset="44" Device="" Addr="d2044" />
    <AI_ITEM Index="23" Name="AI_Time" BufferOffset="46" Device="" Addr="d2046" />
    <AI_ITEM Index="24" Name="AI_Day" BufferOffset="48" Device="" Addr="d2048" />
    <AI_ITEM Index="25" Name="AI_Month" BufferOffset="50" Device="" Addr="d2050" />
    <AI_ITEM Index="26" Name="AI_Year" BufferOffset="52" Device="" Addr="d2052" />
    <AI_ITEM Index="27" Name="" />
    <AI_ITEM Index="28" Name="" />
    <AI_ITEM Index="29" Name="" />
    <AI_ITEM Index="30" Name="AI_Foreline_Control_TC_Temp" BufferOffset="60" Device="" Addr="d2060" Note="TC temp" />
    <AI_ITEM Index="31" Name="AI_Foreline_Monitor_TC_Temp" BufferOffset="62" Device="" Addr="d2062" Note="TC temp" />
    <AI_ITEM Index="32" Name="" />
    <AI_ITEM Index="33" Name="" />
    <AI_ITEM Index="34" Name="" />
    <AI_ITEM Index="35" Name="AI_Grid_TC_Temp" BufferOffset="70" Device="" Addr="d2070" Note="TC temp" />
    <AI_ITEM Index="36" Name="AI_CHB_Wall_Control_TC_Temp" BufferOffset="72" Device="" Addr="d2072" Note="TC temp" />
    <AI_ITEM Index="37" Name="AI_CHB_Wall_Monitor_TC_Temp" BufferOffset="74" Device="" Addr="d2074" Note="TC temp" />
    <AI_ITEM Index="38" Name="" />
    <AI_ITEM Index="39" Name="" />
    <AI_ITEM Index="40" Name="NC_Error_Code" BufferOffset="80" Addr="d2080" Note="定位模块错误代码"/>
    <AI_ITEM Index="41" Name="AI_Lift_Servo_current_value" BufferOffset="82" Addr="d2082"/>
    <AI_ITEM Index="42" Name="AI_Generator_Forward_Power" BufferOffset="84" Device="" Addr="d2084" Note="ICP Souce/RPS" />
    <AI_ITEM Index="43" Name="AI_Generator_Reflect_Power" BufferOffset="86" Device="" Addr="d2086" />
    <AI_ITEM Index="44" Name="" />
    <AI_ITEM Index="45" Name="AI_Lift_Virtual_Servo_Current_Position" Addr="d2090" Device=""  Note="UNIT:MM" />
    <AI_ITEM Index="46" Name="AI_Lift_Servo_1_Current_Position" Addr="d2092" Device="" />
    <AI_ITEM Index="47" Name="AI_Lift_Servo_2_Current_Position" Addr="d2094" Device="" />
    <AI_ITEM Index="48" Name="" />
    <AI_ITEM Index="49" Name="" />
    <AI_ITEM Index="50" Name="AI_Lift_Virtual_Servo_Current_Speed" Addr="d2100" Device=""  Note="Unit:mm/s" />
    <AI_ITEM Index="51" Name="AI_Lift_Servo_1_Current_Speed" Addr="d2102" Device="" />
    <AI_ITEM Index="52" Name="AI_Lift_Servo_2_Current_Speed" Addr="d2104" Device="" />
    <AI_ITEM Index="53" Name="" />
    <AI_ITEM Index="54" Name="AI_Lift_Servo_1_Alarm_Code" Addr="d2108" Device="" />
    <AI_ITEM Index="55" Name="AI_Lift_Servo_2_Alarm_Code" Addr="d2110" Device="" />
    <AI_ITEM Index="56" Name="AI_Lift_Servo_1_Warning_Code" Addr="d2112" Device="" />
    <AI_ITEM Index="57" Name="AI_Lift_Servo_2_Warning_Code" Addr="d2114" Device="" />
    <AI_ITEM Index="58" Name="" />
    <AI_ITEM Index="59" Name="" />
    <AI_ITEM Index="60" Name="" />
  </Ana_In>
</IO_DEFINE>