SchedulerPM.cs 22 KB

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  1. using System;
  2. using System.Collections.Generic;
  3. using System.Diagnostics;
  4. using System.Linq;
  5. using System.Text;
  6. using System.Threading.Tasks;
  7. using Aitex.Core.Common;
  8. using Aitex.Core.RT.DataCenter;
  9. using Aitex.Core.RT.Device;
  10. using Aitex.Core.RT.Event;
  11. using Aitex.Core.RT.Fsm;
  12. using Aitex.Core.RT.Log;
  13. using Aitex.Core.RT.SCCore;
  14. using Aitex.Core.Util;
  15. using Aitex.Sorter.Common;
  16. using VirgoRT.Module;
  17. using VirgoRT.Modules;
  18. using MECF.Framework.Common.Equipment;
  19. using MECF.Framework.Common.Schedulers;
  20. using MECF.Framework.Common.SubstrateTrackings;
  21. using VirgoRT.Devices;
  22. namespace VirgoRT.Scheduler
  23. {
  24. public class SchedulerPM : SchedulerModule
  25. {
  26. public override bool IsAvailable
  27. {
  28. get { return _entity.IsIdle && _entity.IsOnline && CheckTaskDone() && !_waitCompletejobClean; }
  29. }
  30. public override bool IsOnline
  31. {
  32. get { return _entity != null && _entity.IsOnline; }
  33. }
  34. public override bool IsError
  35. {
  36. get { return _entity.IsError; }
  37. }
  38. public bool IsIdle
  39. {
  40. get { return _entity.IsIdle && _entity.IsOnline && CheckTaskDone() ; }
  41. }
  42. public TaskType Task => _task;
  43. private PMEntity _entity = null;
  44. private ModuleName _taskRobot;
  45. private EnumTransferType _taskTransferType;
  46. private Hand _taskBlade;
  47. private int _taskSlot;
  48. private int _entityTaskToken = (int)FSM_MSG.NONE;
  49. private DeviceTimer _timerProcess = new DeviceTimer();
  50. private JetPM _pm;
  51. private float _paramTemp;
  52. public float Temperature
  53. {
  54. get
  55. {
  56. if (SC.GetValue<bool>($"{Module}.Chiller.EnableChiller"))
  57. {
  58. return _pm.CoolantOutletTempFB;
  59. }
  60. return _pm.SubstrateTempFB;
  61. }
  62. }
  63. public RD_TRIG IdlePurgeTrig { get; set; }
  64. public Stopwatch IdlePurgeTimer { get; set; }
  65. public int IdlePurgeTime { get; set; }
  66. public int IdlePurgeNextRunTime { get; set; }
  67. public RD_TRIG IdleCleanTrig { get; set; }
  68. public Stopwatch IdleCleanTimer { get; set; }
  69. public int IdleCleanTime { get; set; }
  70. public int IdleCleanNextRunTime { get; set; }
  71. private bool _waitPreJobClean;
  72. private bool _waitCompletejobClean;
  73. private R_TRIG _trigIdleCleanFailed = new R_TRIG();
  74. private R_TRIG _trigIdlePurgeFailed = new R_TRIG();
  75. public RD_TRIG PreJobCleanTrig { get; set; }
  76. public Stopwatch PreJobCleanTimer { get; set; }
  77. public int PreJobCleanTime { get; set; }
  78. public SchedulerPM(ModuleName chamber) : base(chamber.ToString())
  79. {
  80. switch (chamber)
  81. {
  82. case ModuleName.PMA:
  83. _entity = Singleton<RouteManager>.Instance.PMA;
  84. break;
  85. case ModuleName.PMB:
  86. _entity = Singleton<RouteManager>.Instance.PMB;
  87. break;
  88. }
  89. _pm = DEVICE.GetDevice<JetPM>(Module.ToString());
  90. IdlePurgeTrig = new RD_TRIG();
  91. IdlePurgeTimer = new Stopwatch();
  92. IdleCleanTrig = new RD_TRIG();
  93. IdleCleanTimer = new Stopwatch();
  94. PreJobCleanTrig = new RD_TRIG();
  95. PreJobCleanTimer = new Stopwatch();
  96. EventWaferArrived += WaferArrived;
  97. }
  98. public void InitClean()
  99. {
  100. DATA.Subscribe($"{Module}.IdlePurgeNextRunTime", () => IdlePurgeNextRunTime);
  101. DATA.Subscribe($"{Module}.IdleCleanNextRunTime", () => IdleCleanNextRunTime);
  102. }
  103. public override bool IsReadyForPick(ModuleName robot, int slot, Hand blade)
  104. {
  105. return _entity.IsPrepareTransferReady(robot, EnumTransferType.Pick, slot, blade)
  106. && WaferManager.Instance.CheckHasWafer(ModuleHelper.Converter(_module), slot);
  107. }
  108. public override bool IsReadyForPlace(ModuleName robot, int slot, Hand blade)
  109. {
  110. return _entity.IsPrepareTransferReady(robot, EnumTransferType.Place, slot, blade)
  111. && WaferManager.Instance.CheckNoWafer(ModuleHelper.Converter(_module), slot);
  112. }
  113. public bool IsTemperatureReady(float temp)
  114. {
  115. return Math.Abs(Temperature - temp) < SC.GetValue<double>("System.MaxTemperatureToleranceTransferWafer");
  116. }
  117. public bool IsPrepareTransfer(ModuleName robot, EnumTransferType type, int slot)
  118. {
  119. return _task == TaskType.PrepareTransfer && _taskRobot == robot && _taskSlot == slot &&
  120. _taskTransferType == type;
  121. }
  122. public override bool PrepareTransfer(ModuleName robot, EnumTransferType type, int slot)
  123. {
  124. _task = TaskType.PrepareTransfer;
  125. _taskRobot = robot;
  126. _taskSlot = slot;
  127. _taskTransferType = type;
  128. _entityTaskToken = _entity.InvokePrepareTransfer(robot, type, slot);
  129. LogTaskStart(_task, $"{robot} {type} slot {slot + 1}");
  130. return _entityTaskToken != (int)FSM_MSG.NONE;
  131. }
  132. public bool PrepareTransfer(ModuleName robot, EnumTransferType type, int slot, float temp, Hand blade)
  133. {
  134. _task = TaskType.PrepareTransfer;
  135. _taskRobot = robot;
  136. _taskSlot = slot;
  137. _taskBlade = blade;
  138. _taskTransferType = type;
  139. _entityTaskToken = _entity.InvokePrepareTransfer(robot, type, slot, temp);
  140. LogTaskStart(_task, $"{robot} {type} slot {slot + 1}");
  141. return _entityTaskToken != (int)FSM_MSG.NONE;
  142. }
  143. public bool PrepareTransfer(ModuleName robot, EnumTransferType type, int slot, float temp, Hand blade, WaferSize size)
  144. {
  145. _task = TaskType.PrepareTransfer;
  146. _taskRobot = robot;
  147. _taskSlot = slot;
  148. _taskBlade = blade;
  149. _taskTransferType = type;
  150. _entityTaskToken = _entity.InvokePrepareTransfer(robot, type, slot, temp, size);
  151. LogTaskStart(_task, $"{robot} {type} slot {slot + 1}, temp: {temp}, {size}");
  152. return _entityTaskToken != (int)FSM_MSG.NONE;
  153. }
  154. public override bool PostTransfer(ModuleName robot, EnumTransferType type, int slot)
  155. {
  156. StopWaitTransfer(robot);
  157. _task = TaskType.PostTransfer;
  158. _taskRobot = robot;
  159. _taskSlot = slot;
  160. _taskTransferType = type;
  161. _entityTaskToken = _entity.InvokePostTransfer(robot, type, slot);
  162. LogTaskStart(_task, $"{robot} {type} slot {slot + 1}");
  163. return _entityTaskToken != (int)FSM_MSG.NONE;
  164. }
  165. public override bool PostTransfer(ModuleName robot)
  166. {
  167. StopWaitTransfer(robot);
  168. _task = TaskType.PostTransfer;
  169. _taskRobot = robot;
  170. _taskSlot = _inTransferSlot;
  171. _taskTransferType = _inTransferType;
  172. _entityTaskToken = _entity.InvokePostTransfer(robot, _inTransferType, _inTransferSlot);
  173. LogTaskStart(_task, $"{robot} {_inTransferType} slot {_inTransferSlot + 1}");
  174. return _entityTaskToken != (int)FSM_MSG.NONE;
  175. }
  176. public override bool Process(string recipeName, bool isCleanRecipe, bool withWafer, WaferInfo wafer)
  177. {
  178. _task = TaskType.Process;
  179. LogTaskStart(_task, $"recipe: {recipeName}, clean: {isCleanRecipe}, with wafer: {withWafer}");
  180. if (SC.GetValue<bool>("System.IsATMMode"))
  181. {
  182. int time = SC.GetValue<int>("System.ATMCyclePMDelayTime");
  183. _timerProcess.Start(time * 1000);
  184. EV.PostInfoLog("Scheduler", $"System run in ATM mode, process skipped, delay {time} seconds");
  185. WaferManager.Instance.UpdateWaferProcessStatus(Module, 0, EnumWaferProcessStatus.InProcess);
  186. return true;
  187. }
  188. else
  189. {
  190. _entityTaskToken = _entity.InvokeProcess(recipeName, wafer.WaferOrigin, withWafer);
  191. return _entityTaskToken != (int)FSM_MSG.NONE;
  192. }
  193. }
  194. public override bool Preheating(float temperature)
  195. {
  196. _task = TaskType.Heating;
  197. _paramTemp = temperature;
  198. _entityTaskToken = _entity.InvokePreHeat(temperature);
  199. LogTaskStart(_task, $"preheat to {temperature}");
  200. return _entityTaskToken != (int)FSM_MSG.NONE;
  201. }
  202. public bool CheckTaskDone()
  203. {
  204. bool ret = false;
  205. switch (_task)
  206. {
  207. case TaskType.None:
  208. ret = true;
  209. break;
  210. case TaskType.PrepareTransfer:
  211. ret = _entity.CheckAcked(_entityTaskToken) && _entity.IsPrepareTransferReady(_taskRobot, _taskTransferType == EnumTransferType.Swap ? EnumTransferType.Pick : _taskTransferType, _taskSlot, _taskBlade);
  212. break;
  213. case TaskType.PostTransfer:
  214. ret = _entity.CheckAcked(_entityTaskToken);
  215. break;
  216. case TaskType.Heating:
  217. ret = _entity.CheckAcked(_entityTaskToken) && IsTemperatureReady(_paramTemp);
  218. break;
  219. case TaskType.Process:
  220. case TaskType.IdlePurgeProcess:
  221. case TaskType.IdleCleanProcess:
  222. case TaskType.PreJobProcess:
  223. case TaskType.CompleteJobProcess:
  224. if (SC.GetValue<bool>("System.IsATMMode"))
  225. {
  226. ret = _timerProcess.IsTimeout() && _entity.IsIdle;
  227. if (ret)
  228. WaferManager.Instance.UpdateWaferProcessStatus(Module, 0, EnumWaferProcessStatus.Completed);
  229. }
  230. else
  231. {
  232. ret = _entity.CheckAcked(_entityTaskToken) && _entity.IsProcessed();
  233. }
  234. break;
  235. }
  236. if (ret && _task != TaskType.None)
  237. {
  238. LogTaskDone(_task, "");
  239. _task = TaskType.None;
  240. }
  241. return ret;
  242. }
  243. public bool Monitor()
  244. {
  245. return true;
  246. }
  247. public void SetPMAuto()
  248. {
  249. _entity.SetAuto();
  250. }
  251. public bool IdlePurgeProcess(string recipeName)
  252. {
  253. _task = TaskType.IdlePurgeProcess;
  254. _entityTaskToken = _entity.InvokeClean(recipeName, "", false);
  255. LogTaskStart(_task, $"recipe: {recipeName}, clean: {false}, with wafer: {false}");
  256. return _entityTaskToken != (int)FSM_MSG.NONE;
  257. }
  258. public bool IdleCleanProcess(string recipeName)
  259. {
  260. _task = TaskType.IdleCleanProcess;
  261. _entityTaskToken = _entity.InvokeClean(recipeName, "", false);
  262. LogTaskStart(_task, $"recipe: {recipeName}, clean: {true}, with wafer: {false}");
  263. return _entityTaskToken != (int)FSM_MSG.NONE;
  264. }
  265. public void PreJobClean()
  266. {
  267. var enableJobClean = SC.GetValue<bool>($"{Module}.JobClean.IsEnabled");
  268. var enablePreJobClean = SC.GetValue<bool>($"{Module}.JobClean.EnablePreJobClean");
  269. _waitPreJobClean = enableJobClean && enablePreJobClean;
  270. }
  271. public bool PreJobProcess(string recipeName)
  272. {
  273. _task = TaskType.PreJobProcess;
  274. _entityTaskToken = _entity.InvokeClean(recipeName, "", false);
  275. LogTaskStart(_task, $"recipe: {recipeName}, clean: {true}, with wafer: {false}");
  276. return _entityTaskToken != (int)FSM_MSG.NONE;
  277. }
  278. public void CompleteJobClean()
  279. {
  280. var enableJobClean = SC.GetValue<bool>($"{Module}.JobClean.IsEnabled");
  281. var enableCompleteJobClean = SC.GetValue<bool>($"{Module}.JobClean.EnableCompleteJobClean");
  282. _waitCompletejobClean = enableJobClean && enableCompleteJobClean;
  283. }
  284. public bool CompleteJobProcess(string recipeName)
  285. {
  286. _task = TaskType.CompleteJobProcess;
  287. _entityTaskToken = _entity.InvokeClean(recipeName, "", false);
  288. LogTaskStart(_task, $"recipe: {recipeName}, clean: {true}, with wafer: {false}");
  289. return _entityTaskToken != (int)FSM_MSG.NONE;
  290. }
  291. private void WaferArrived(object sender, EventArgs e)
  292. {
  293. WaferInfo wafer = WaferManager.Instance.GetWafer(Module, 0);
  294. var recipeName = Module == ModuleName.PMA
  295. ? wafer.ProcessJob.Sequence.Steps[wafer.NextSequenceStep].StepParameter["PMARecipe"]
  296. : wafer.ProcessJob.Sequence.Steps[wafer.NextSequenceStep].StepParameter["PMBRecipe"];
  297. Process((string)recipeName, false, true, wafer);
  298. }
  299. #region clean task
  300. internal void ResetIdlePurgeTime()
  301. {
  302. IdlePurgeTimer.Restart();
  303. }
  304. internal void ResetIdleCleanTime()
  305. {
  306. IdleCleanTimer.Restart();
  307. }
  308. public bool ResetClean(bool resetPurge, bool resetClean, bool jobClean)
  309. {
  310. if (resetPurge)
  311. {
  312. IdlePurgeTrig.RST = true;
  313. IdlePurgeTimer.Stop();
  314. IdlePurgeTime = 0;
  315. }
  316. if (resetClean)
  317. {
  318. IdleCleanTrig.RST = true;
  319. IdleCleanTimer.Stop();
  320. IdleCleanTime = 0;
  321. }
  322. if (jobClean)
  323. {
  324. _waitPreJobClean = false;
  325. _waitCompletejobClean = false;
  326. PreJobCleanTrig.RST = true;
  327. PreJobCleanTimer.Stop();
  328. }
  329. return true;
  330. }
  331. public void MonitorCleanTasks()
  332. {
  333. var hasWafer = WaferManager.Instance.CheckHasWafer(Module, 0);
  334. var enablePurge = false;//SC.GetValue<bool>($"{Module}.IdlePurge.IsEnabled");
  335. var enableClean = SC.GetValue<bool>($"{Module}.IdleClean.IsEnabled");
  336. #region Idle Purge
  337. IdlePurgeTrig.CLK = (IsIdle || _task != TaskType.IdlePurgeProcess) && enablePurge && !hasWafer;
  338. if (IdlePurgeTrig.R)
  339. {
  340. LOG.Write($"{Module} idle purge start calc elapse time");
  341. IdlePurgeTimer.Restart();
  342. }
  343. if (IdlePurgeTrig.T)
  344. {
  345. LOG.Write($"{Module} idle purge stopped calc elapse time");
  346. ResetClean(true, false, false);
  347. }
  348. if (IdlePurgeTimer.IsRunning)
  349. {
  350. IdlePurgeTime = (int)IdlePurgeTimer.ElapsedMilliseconds / 1000;
  351. int idlePurgeTimeSetPoint = SC.GetValue<int>($"{Module}.IdlePurge.IdlePurgeTime");
  352. var nextRunTime = idlePurgeTimeSetPoint - IdlePurgeTime;
  353. if (nextRunTime < 0)
  354. nextRunTime = 0;
  355. if (enablePurge)
  356. {
  357. if (nextRunTime <= 0 && IsAvailable)
  358. {
  359. var recipe = SC.GetStringValue($"{Module}.IdlePurge.IdlePurgeRecipe");
  360. if (string.IsNullOrEmpty(recipe))
  361. {
  362. _trigIdlePurgeFailed.CLK = true;
  363. LOG.Write($"{Module} Idle purge can not run, recipe is empty");
  364. ResetClean(true, false, false);
  365. }
  366. else if (hasWafer)
  367. {
  368. _trigIdlePurgeFailed.CLK = true;
  369. LOG.Write($"{Module} Idle purge can not run, has wafer");
  370. ResetClean(true, false, false);
  371. }
  372. else
  373. {
  374. _trigIdlePurgeFailed.CLK = false;
  375. LOG.Write($"{Module} Start run idle purge recipe {recipe}");
  376. IdlePurgeProcess("ALD\\Process\\" + recipe);
  377. }
  378. if (_trigIdlePurgeFailed.Q)
  379. {
  380. EV.PostWarningLog(Module.ToString(), "Can not run idle purge recipe");
  381. }
  382. }
  383. }
  384. else
  385. {
  386. nextRunTime = 0;
  387. }
  388. IdlePurgeNextRunTime = nextRunTime;
  389. }
  390. else
  391. {
  392. IdlePurgeNextRunTime = 0;
  393. }
  394. #endregion
  395. #region Idle Clean
  396. IdleCleanTrig.CLK = (IsIdle || _task != TaskType.IdleCleanProcess) && enableClean && !hasWafer;
  397. if (IdleCleanTrig.R)
  398. {
  399. LOG.Write($"{Module} idle clean start calc elapse time");
  400. IdleCleanTimer.Restart();
  401. }
  402. if (IdleCleanTrig.T)
  403. {
  404. LOG.Write($"{Module} idle clean stopped calc elapse time");
  405. ResetClean(false, true, false);
  406. }
  407. if (IdleCleanTimer.IsRunning)
  408. {
  409. IdleCleanTime = (int)IdleCleanTimer.ElapsedMilliseconds / 1000;
  410. int idleCleanTimeSetPoint = SC.GetValue<int>($"{Module}.IdleClean.IdleCleanTime");
  411. var nextRunTime = idleCleanTimeSetPoint - IdleCleanTime;
  412. if (nextRunTime < 0)
  413. nextRunTime = 0;
  414. if (enableClean)
  415. {
  416. if (nextRunTime <= 0 && IsAvailable)
  417. {
  418. var recipe = SC.GetStringValue($"{Module}.IdleClean.IdleCleanRecipe");
  419. if (string.IsNullOrEmpty(recipe))
  420. {
  421. _trigIdleCleanFailed.CLK = true;
  422. LOG.Write($"{Module} Idle clean can not run, recipe is empty");
  423. ResetClean(false, true, false);
  424. }
  425. else if (hasWafer)
  426. {
  427. _trigIdleCleanFailed.CLK = true;
  428. LOG.Write($"{Module} Idle clean can not run, has wafer");
  429. ResetClean(false, true, false);
  430. }
  431. else
  432. {
  433. _trigIdleCleanFailed.CLK = false;
  434. LOG.Write($"{Module} Start run idle Clean recipe {recipe}");
  435. IdleCleanProcess($"{Module}\\" + recipe);
  436. }
  437. if (_trigIdleCleanFailed.Q)
  438. {
  439. EV.PostWarningLog(Module.ToString(), "Can not run idle clean recipe");
  440. }
  441. }
  442. }
  443. else
  444. {
  445. nextRunTime = 0;
  446. }
  447. IdleCleanNextRunTime = nextRunTime;
  448. }
  449. else
  450. {
  451. IdleCleanNextRunTime = 0;
  452. }
  453. #endregion
  454. #region PreJob Clean
  455. var enableJobClean = SC.GetValue<bool>($"{Module}.JobClean.IsEnabled");
  456. var enablePreJobClean = SC.GetValue<bool>($"{Module}.JobClean.EnablePreJobClean");
  457. var enableCompleteJobClean = SC.GetValue<bool>($"{Module}.JobClean.EnableCompleteJobClean");
  458. if (enableJobClean && enableCompleteJobClean && _waitCompletejobClean && IsIdle)
  459. {
  460. var recipe = SC.GetStringValue($"{Module}.JobClean.CompleteJobCleanRecipe");
  461. if (string.IsNullOrEmpty(recipe))
  462. {
  463. EV.PostWarningLog(Module.ToString(), "complete job clean can not run, recipe is empty");
  464. }
  465. else if (hasWafer)
  466. {
  467. EV.PostWarningLog(Module.ToString(), "complete job clean can not run, has wafer");
  468. }
  469. else
  470. {
  471. EV.PostInfoLog(Module.ToString(), $"Start run complete job clean recipe {recipe}");
  472. CompleteJobProcess($"{Module}\\" + recipe);
  473. }
  474. _waitCompletejobClean = false;
  475. }
  476. PreJobCleanTrig.CLK = enableJobClean && enablePreJobClean && IsIdle;
  477. if (PreJobCleanTrig.R)
  478. {
  479. PreJobCleanTimer.Restart();
  480. }
  481. if(PreJobCleanTrig.T)
  482. {
  483. ResetClean(false, false, true);
  484. }
  485. if (PreJobCleanTimer.IsRunning && _waitPreJobClean)
  486. {
  487. PreJobCleanTime = (int)PreJobCleanTimer.ElapsedMilliseconds / 1000;
  488. int PreJobCleanIdleTimeSP = SC.GetValue<int>($"{Module}.JobClean.IdleCleanTime");
  489. if(PreJobCleanTime >= PreJobCleanIdleTimeSP)
  490. {
  491. var recipe = SC.GetStringValue($"{Module}.JobClean.PreJobCleanRecipe");
  492. if (string.IsNullOrEmpty(recipe))
  493. {
  494. EV.PostWarningLog(Module.ToString(), "pre job clean can not run, recipe is empty");
  495. }
  496. else if (hasWafer)
  497. {
  498. EV.PostWarningLog(Module.ToString(), "pre job clean can not run, has wafer");
  499. }
  500. else
  501. {
  502. EV.PostInfoLog(Module.ToString(), $"Start run pre job clean recipe {recipe}");
  503. PreJobProcess($"{Module}\\" + recipe);
  504. }
  505. }
  506. }
  507. #endregion
  508. }
  509. #endregion
  510. }
  511. }