ManualTransfer.cs 18 KB

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  1. using System.Collections.Generic;
  2. using Aitex.Core.Common;
  3. using Aitex.Core.RT.Routine;
  4. using Aitex.Core.Util;
  5. using Aitex.Core.RT.Event;
  6. using MECF.Framework.Common.Equipment;
  7. using VirgoRT.Scheduler;
  8. using Aitex.Sorter.Common;
  9. using MECF.Framework.Common.Schedulers;
  10. using MECF.Framework.Common.SubstrateTrackings;
  11. using VirgoRT.Modules.PMs;
  12. using VirgoRT.Modules.Schedulers;
  13. using Aitex.Core.RT.SCCore;
  14. namespace VirgoRT.Modules
  15. {
  16. internal interface IManualTransferRoutine : IRoutine
  17. {
  18. }
  19. public class MoveItemEx : MoveItem
  20. {
  21. public int CoolingTime { get; set; }
  22. public MoveItemEx(ModuleName sourceModule, int sourceSlot, ModuleName destinationModule, int destinationSlot, int coolingTime, Hand blade)
  23. : base(sourceModule, sourceSlot, destinationModule, destinationSlot, blade)
  24. {
  25. CoolingTime = coolingTime;
  26. }
  27. }
  28. public class ManualTransfer : TransferModule
  29. {
  30. private Queue<IRoutine> _moveTaskQueue = new Queue<IRoutine>();
  31. private IRoutine _activeTask;
  32. public Result Start(object[] objs)
  33. {
  34. _moveTaskQueue.Clear();
  35. ModuleName source = (ModuleName)objs[0];
  36. int ss = (int)objs[1];
  37. ModuleName target = (ModuleName)objs[2];
  38. int ds = (int)objs[3];
  39. bool autoAlign = (bool)objs[4];
  40. int alignAngle = (int)objs[5];
  41. bool autoCooling = (bool)objs[6];
  42. int coolingTime = (int)objs[7];
  43. if (!WaferManager.Instance.CheckWafer(source, ss, WaferStatus.Normal))
  44. {
  45. EV.PostWarningLog("System", $"source {source} slot {ss+1} no normal wafer");
  46. return Result.FAIL;
  47. }
  48. if (!WaferManager.Instance.CheckNoWafer(target, ds))
  49. {
  50. EV.PostWarningLog("System", "destination has wafer");
  51. return Result.FAIL;
  52. }
  53. if (source!=ModuleName.EfemRobot && WaferManager.Instance.CheckHasWafer(ModuleName.EfemRobot, 0) && WaferManager.Instance.CheckHasWafer(ModuleName.EfemRobot, 1))
  54. {
  55. EV.PostWarningLog("System", "robot has wafer");
  56. return Result.FAIL;
  57. }
  58. Hand blade = (WaferManager.Instance.CheckNoWafer(ModuleName.EfemRobot, 0) && SC.GetValue<bool>("EFEM.EfemRobot.LowerBladeEnable")) ? Hand.Blade1 : Hand.Blade2;
  59. if (source == ModuleName.EfemRobot)
  60. blade = ss == 0 ? Hand.Blade1 : Hand.Blade2;
  61. else if (target == ModuleName.EfemRobot)
  62. blade = ds == 0 ? Hand.Blade1 : Hand.Blade2;
  63. if (blade == Hand.Blade1 && !SC.GetValue<bool>("EFEM.EfemRobot.LowerBladeEnable"))
  64. {
  65. EV.PostAlarmLog("System", $"Lower Blade disable");
  66. return Result.FAIL;
  67. }
  68. if (blade == Hand.Blade2 && !SC.GetValue<bool>("EFEM.EfemRobot.UpperBladeEnable"))
  69. {
  70. EV.PostAlarmLog("System", $"Upper Blade disable");
  71. return Result.FAIL;
  72. }
  73. if (autoAlign && !ModuleHelper.IsAligner(source) && !ModuleHelper.IsAligner(target) )
  74. {
  75. if (WaferManager.Instance.CheckHasWafer(ModuleName.Aligner1, 0) && WaferManager.Instance.CheckHasWafer(ModuleName.Aligner2, 0))
  76. {
  77. EV.PostWarningLog("System", "Can not transfer, aligner has wafer, can not auto align");
  78. return Result.FAIL;
  79. }
  80. ModuleName aligner = WaferManager.Instance.CheckHasWafer(ModuleName.Aligner1, 0)
  81. ? ModuleName.Aligner2
  82. : ModuleName.Aligner1;
  83. _moveTaskQueue.Enqueue(new EfemRobotMover(new MoveItemEx(source, ss, aligner, 0, 1, blade)));
  84. _moveTaskQueue.Enqueue(new AlignRoutine(aligner.ToString()));
  85. _moveTaskQueue.Enqueue(new EfemRobotMover(new MoveItemEx(aligner, 0, target, ds, 0, blade)));
  86. }
  87. else if(autoCooling && (ModuleHelper.IsInstalled(ModuleName.Cooling1) || ModuleHelper.IsInstalled(ModuleName.Cooling2)) && !ModuleHelper.IsCooling(source) && !ModuleHelper.IsCooling(target))
  88. {
  89. if (WaferManager.Instance.CheckHasWafer(ModuleName.Cooling1, 0) && WaferManager.Instance.CheckHasWafer(ModuleName.Cooling2, 0))
  90. {
  91. EV.PostWarningLog("System", "Can not transfer, cooling has wafer, can not auto cooling");
  92. return Result.FAIL;
  93. }
  94. ModuleName cooling = WaferManager.Instance.CheckHasWafer(ModuleName.Cooling1, 0)
  95. ? ModuleName.Cooling2
  96. : ModuleName.Cooling1;
  97. _moveTaskQueue.Enqueue(new EfemRobotMover(new MoveItemEx(source, ss, cooling, 0, coolingTime, blade)));
  98. if (ModuleHelper.IsInstalled(ModuleName.Cooling1) || ModuleHelper.IsInstalled(ModuleName.Cooling2))
  99. _moveTaskQueue.Enqueue(new CoolingRoutine(cooling.ToString(), coolingTime));
  100. _moveTaskQueue.Enqueue(new EfemRobotMover(new MoveItemEx(cooling, 0, target, ds, 0, blade)));
  101. }
  102. else if (autoCooling && (ModuleHelper.IsInstalled(ModuleName.Buffer)) && !ModuleHelper.IsBuffer(source) && !ModuleHelper.IsBuffer(target))
  103. {
  104. ModuleName cooling = ModuleName.Buffer;
  105. int slot = -1;
  106. if (WaferManager.Instance.CheckNoWafer(ModuleName.Buffer, 0))
  107. {
  108. slot = 0;
  109. }
  110. else if (WaferManager.Instance.CheckNoWafer(ModuleName.Cooling2, 0))
  111. {
  112. slot = 1;
  113. }
  114. else
  115. {
  116. EV.PostWarningLog("System", "No valid cooling station for auto cooling");
  117. return Result.FAIL;
  118. }
  119. _moveTaskQueue.Enqueue(new EfemRobotMover(new MoveItemEx(source, ss, cooling, slot, coolingTime, blade)));
  120. _moveTaskQueue.Enqueue(new BufferRoutine(cooling.ToString(), coolingTime));
  121. _moveTaskQueue.Enqueue(new EfemRobotMover(new MoveItemEx(cooling, slot, target, ds, 0, blade)));
  122. }
  123. else
  124. {
  125. _moveTaskQueue.Enqueue(new EfemRobotMover(new MoveItemEx(source, ss, target, ds, coolingTime, blade)));
  126. if (ModuleHelper.IsAligner(target) || ModuleHelper.IsCooling(target))
  127. {
  128. _moveTaskQueue.Enqueue(new AlignRoutine(target.ToString()));
  129. }
  130. }
  131. _activeTask = _moveTaskQueue.Dequeue();
  132. return _activeTask.Start();
  133. }
  134. public Result Monitor(object[] objs)
  135. {
  136. System.Diagnostics.Debug.Assert(_activeTask != null, "mover should not be null, call start first");
  137. Result ret = _activeTask.Monitor();
  138. if (ret == Result.FAIL)
  139. return ret;
  140. if (ret == Result.DONE)
  141. {
  142. if (_moveTaskQueue.Count > 0)
  143. {
  144. _activeTask = _moveTaskQueue.Dequeue();
  145. return _activeTask.Start();
  146. }
  147. return Result.DONE;
  148. }
  149. return Result.RUN;
  150. }
  151. public void Clear()
  152. {
  153. _moveTaskQueue.Clear();
  154. _activeTask = null;
  155. }
  156. }
  157. public class EfemRobotMover : TransferModule, IRoutine
  158. {
  159. private MoveItemEx _moveTask;
  160. private SchedulerModule _source;
  161. private SchedulerModule _destination;
  162. public EfemRobotMover(MoveItemEx moveTask)
  163. {
  164. _moveTask = moveTask;
  165. }
  166. public Result Start()
  167. {
  168. _source = GetModule(_moveTask.SourceModule.ToString());
  169. _destination = GetModule(_moveTask.DestinationModule.ToString());
  170. System.Diagnostics.Debug.Assert(_source != null, $"{_moveTask.SourceModule} not valid");
  171. System.Diagnostics.Debug.Assert(_destination != null, $"{_moveTask.DestinationModule} not valid");
  172. if(!WaferManager.Instance.CheckHasWafer(_moveTask.SourceModule, _moveTask.SourceSlot))
  173. {
  174. EV.PostWarningLog("System", $"Failed transfer, source {_moveTask.SourceModule} slot {_moveTask.SourceSlot + 1} has not wafer");
  175. return Result.FAIL;
  176. }
  177. if (WaferManager.Instance.CheckHasWafer(_moveTask.DestinationModule, _moveTask.DestinationSlot))
  178. {
  179. EV.PostWarningLog("System", $"Failed transfer, destination {_moveTask.DestinationModule} slot {_moveTask.DestinationSlot + 1} has wafer");
  180. return Result.FAIL;
  181. }
  182. if (!_source.IsAvailable)
  183. {
  184. EV.PostWarningLog("System", $"Failed transfer, source {_moveTask.SourceModule} not ready");
  185. return Result.FAIL;
  186. }
  187. if (ModuleHelper.IsLoadPort(_source.Module))
  188. {
  189. if (!(_source as SchedulerLoadPort).CheckReadyTransfer())
  190. {
  191. EV.PostWarningLog("System", $"Failed transfer, source {_moveTask.SourceModule} not ready");
  192. return Result.FAIL;
  193. }
  194. }
  195. if (!_destination.IsAvailable)
  196. {
  197. EV.PostWarningLog("System", $"Failed transfer, Destination {_moveTask.DestinationModule} not ready");
  198. return Result.FAIL;
  199. }
  200. if (ModuleHelper.IsLoadPort(_destination.Module))
  201. {
  202. if (!(_destination as SchedulerLoadPort).CheckReadyTransfer())
  203. {
  204. EV.PostWarningLog("System", $"Failed transfer, source {_moveTask.DestinationModule} not ready");
  205. return Result.FAIL;
  206. }
  207. }
  208. if (!_efemRobot.IsAvailable)
  209. {
  210. EV.PostWarningLog("System", $"Failed transfer, EFEM Robot not ready");
  211. return Result.FAIL;
  212. }
  213. if ((Singleton<RouteManager>.Instance.EFEM.EFEMType != EfemEntity.EfemType.BeamSUNWAY && ModuleHelper.IsAligner(_source.Module)) || ModuleHelper.IsCooling(_source.Module))
  214. _source.Cooling(_moveTask.CoolingTime);
  215. if ((Singleton<RouteManager>.Instance.EFEM.EFEMType != EfemEntity.EfemType.BeamSUNWAY && ModuleHelper.IsAligner(_destination.Module)) || ModuleHelper.IsCooling(_destination.Module))
  216. _destination.Cooling(_moveTask.CoolingTime);
  217. if (_moveTask.SourceModule == ModuleName.EfemRobot)
  218. {
  219. _moveTask.RobotHand = (Hand)_moveTask.SourceSlot;
  220. }else if (_moveTask.DestinationModule == ModuleName.EfemRobot)
  221. {
  222. _moveTask.RobotHand = (Hand)_moveTask.DestinationSlot;
  223. }
  224. return Result.RUN;
  225. }
  226. public Result Start(params object[] objs)
  227. {
  228. return this.Start();
  229. }
  230. public Result Monitor()
  231. {
  232. if (_source.IsError || _destination.IsError || _efemRobot.IsError)
  233. return Result.FAIL;
  234. if (!WaferManager.Instance.CheckHasWafer(_moveTask.SourceModule, _moveTask.SourceSlot) &&
  235. WaferManager.Instance.CheckHasWafer(_moveTask.DestinationModule, _moveTask.DestinationSlot) &&
  236. _efemRobot.IsAvailable)
  237. {
  238. if (_source.IsWaitTransfer(ModuleName.EfemRobot))
  239. {
  240. _source.PostTransfer(ModuleName.EfemRobot, EnumTransferType.Pick, 0);
  241. //_source.StopWaitTransfer(ModuleName.EfemRobot);
  242. }
  243. if (_destination.IsWaitTransfer(ModuleName.EfemRobot))
  244. {
  245. _destination.PostTransfer(ModuleName.EfemRobot, EnumTransferType.Place, 0);
  246. //_destination.StopWaitTransfer(ModuleName.EfemRobot);
  247. }
  248. if (_source.IsAvailable && _destination.IsAvailable)
  249. return Result.DONE;
  250. return Result.RUN;
  251. }
  252. if (!_efemRobot.IsAvailable)
  253. return Result.RUN;
  254. //pick
  255. if (_moveTask.SourceModule != ModuleName.EfemRobot)
  256. {
  257. if (WaferManager.Instance.CheckHasWafer(_moveTask.SourceModule, _moveTask.SourceSlot))
  258. {
  259. if (!_source.IsAvailable)
  260. return Result.RUN;
  261. if (!_source.IsReadyForPick(ModuleName.EfemRobot, _moveTask.SourceSlot, _moveTask.RobotHand))
  262. {
  263. if (!_source.PrepareTransfer(ModuleName.EfemRobot, EnumTransferType.Pick, _moveTask.SourceSlot))
  264. return Result.FAIL;
  265. }
  266. if (!_source.IsAvailable)
  267. return Result.RUN;
  268. if (!WaferManager.Instance.CheckHasWafer(ModuleName.EfemRobot, (int)_moveTask.RobotHand))
  269. {
  270. if (!_efemRobot.Pick(_moveTask.SourceModule, _moveTask.SourceSlot, _moveTask.RobotHand))
  271. {
  272. return Result.FAIL;
  273. }
  274. _source.WaitTransfer(ModuleName.EfemRobot, EnumTransferType.Pick, 0);
  275. }
  276. if (!_efemRobot.IsAvailable)
  277. return Result.RUN;
  278. }
  279. else
  280. {
  281. if (!_efemRobot.IsAvailable)
  282. return Result.RUN;
  283. if (_source.IsWaitTransfer(ModuleName.EfemRobot))
  284. {
  285. _source.PostTransfer(ModuleName.EfemRobot, EnumTransferType.Pick, 0);
  286. }
  287. }
  288. }
  289. //place
  290. if (_moveTask.DestinationModule != ModuleName.EfemRobot)
  291. {
  292. if (!_destination.IsAvailable)
  293. return Result.RUN;
  294. if (!WaferManager.Instance.CheckHasWafer(_moveTask.DestinationModule, _moveTask.DestinationSlot))
  295. {
  296. if (!_destination.IsReadyForPlace(ModuleName.EfemRobot, _moveTask.DestinationSlot, _moveTask.RobotHand))
  297. {
  298. if (!_destination.PrepareTransfer(ModuleName.EfemRobot, EnumTransferType.Place,
  299. _moveTask.DestinationSlot))
  300. return Result.FAIL;
  301. }
  302. if (!_destination.IsAvailable)
  303. return Result.RUN;
  304. if (WaferManager.Instance.CheckHasWafer(ModuleName.EfemRobot, (int)_moveTask.RobotHand))
  305. {
  306. if (!_efemRobot.Place(_moveTask.DestinationModule, _moveTask.DestinationSlot, _moveTask.RobotHand))
  307. return Result.FAIL;
  308. _destination.WaitTransfer(ModuleName.EfemRobot, EnumTransferType.Place, 0);
  309. }
  310. if (!_efemRobot.IsAvailable)
  311. return Result.RUN;
  312. }
  313. else
  314. {
  315. if (!_efemRobot.IsAvailable)
  316. return Result.RUN;
  317. if (_destination.IsWaitTransfer(ModuleName.EfemRobot))
  318. {
  319. _destination.PostTransfer(ModuleName.EfemRobot, EnumTransferType.Place, 0);
  320. //_destination.StopWaitTransfer(ModuleName.EfemRobot);
  321. }
  322. }
  323. }
  324. return Result.RUN;
  325. }
  326. public void Abort()
  327. {
  328. Clear();
  329. }
  330. public void Clear()
  331. {
  332. _efemRobot.ResetTask();
  333. _source?.ResetTask();
  334. _destination?.ResetTask();
  335. }
  336. }
  337. public class AlignRoutine : TransferModule, IRoutine
  338. {
  339. private SchedulerAligner _aligner;
  340. public AlignRoutine(string module)
  341. {
  342. _aligner = GetModule(module) as SchedulerAligner;
  343. }
  344. public Result Start(params object[] objs)
  345. {
  346. _aligner.Align(0);
  347. return Result.RUN;
  348. }
  349. public Result Monitor()
  350. {
  351. if (_aligner.IsAvailable)
  352. return Result.DONE;
  353. return Result.RUN;
  354. }
  355. public void Abort()
  356. {
  357. }
  358. }
  359. public class CoolingRoutine : TransferModule, IRoutine
  360. {
  361. private SchedulerAligner _cooling;
  362. private int _coolingTimeS;
  363. public CoolingRoutine(string module, int coolingTimeS)
  364. {
  365. _cooling = GetModule(module) as SchedulerAligner;
  366. _coolingTimeS = coolingTimeS;
  367. }
  368. public Result Start(params object[] objs)
  369. {
  370. _cooling.Cooling(_coolingTimeS);
  371. return Result.RUN;
  372. }
  373. public Result Monitor()
  374. {
  375. if (_cooling.IsAvailable)
  376. return Result.DONE;
  377. return Result.RUN;
  378. }
  379. public void Abort()
  380. {
  381. }
  382. }
  383. public class FlipRoutine : TransferModule, IRoutine
  384. {
  385. private SchedulerFlipper _fliper;
  386. private string _orient;
  387. public FlipRoutine(string module, string orient)
  388. {
  389. _fliper = GetModule(module) as SchedulerFlipper;
  390. _orient = orient;
  391. }
  392. public Result Start(params object[] objs)
  393. {
  394. _fliper.Flip(_orient);
  395. return Result.RUN;
  396. }
  397. public Result Monitor()
  398. {
  399. if (_fliper.IsAvailable)
  400. return Result.DONE;
  401. return Result.RUN;
  402. }
  403. public void Abort()
  404. {
  405. }
  406. }
  407. public class BufferRoutine : TransferModule, IRoutine
  408. {
  409. private SchedulerBuffer _cooling;
  410. private int _coolingTimeS;
  411. public BufferRoutine(string module, int coolingTimeS)
  412. {
  413. _cooling = GetModule(module) as SchedulerBuffer;
  414. _coolingTimeS = coolingTimeS;
  415. }
  416. public Result Start(params object[] objs)
  417. {
  418. _cooling.Cooling(_coolingTimeS);
  419. return Result.RUN;
  420. }
  421. public Result Monitor()
  422. {
  423. if (_cooling.IsAvailable)
  424. return Result.DONE;
  425. return Result.RUN;
  426. }
  427. public void Abort()
  428. {
  429. }
  430. }
  431. }