JET-YDB\JET-YANGDB
f92e4e963f
1.修改efem界面，把Aligner1 改成 Aligner，buffer改成cooling
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3 weeks ago | |
|---|---|---|
| .. | ||
| EFEMs | 3 weeks ago | |
| Interlocks | 3 months ago | |
| LPs | 1 month ago | |
| PMs | 3 weeks ago | |
| Schedulers | 3 weeks ago | |
| AutoTransfer.cs | 3 months ago | |
| AutoTransferClean.cs | 3 months ago | |
| AutoTransfer_FA.cs | 3 months ago | |
| AutoTransfer_T.cs | 3 weeks ago | |
| EntityTaskBase.cs | 3 months ago | |
| HomeAll.cs | 3 months ago | |
| IMoveManager.cs | 3 months ago | |
| ManualTransfer.cs | 3 weeks ago | |
| ReturnAllWafer.cs | 3 weeks ago | |
| RouteManager.cs | 2 months ago | |