PmOverviewView.xaml 102 KB

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  1. <UserControl x:Class="VirgoUI.Client.Models.PMs.PmOverviewView"
  2. xmlns="http://schemas.microsoft.com/winfx/2006/xaml/presentation"
  3. xmlns:x="http://schemas.microsoft.com/winfx/2006/xaml"
  4. xmlns:mc="http://schemas.openxmlformats.org/markup-compatibility/2006"
  5. xmlns:d="http://schemas.microsoft.com/expression/blend/2008"
  6. xmlns:i="http://schemas.microsoft.com/expression/2010/interactivity"
  7. xmlns:ctrl="http://OpenSEMI.Ctrlib.com/presentation"
  8. xmlns:cal="http://www.caliburn.org"
  9. xmlns:deviceControl="clr-namespace:Aitex.Core.UI.DeviceControl;assembly=MECF.Framework.UI.Core"
  10. xmlns:control="clr-namespace:Aitex.Core.UI.Control;assembly=MECF.Framework.UI.Core"
  11. xmlns:parts="clr-namespace:VirgoUI.Controls.Parts"
  12. xmlns:pMs="clr-namespace:VirgoUI.Client.Models.PMs"
  13. xmlns:converters="clr-namespace:Aitex.Core.UI.Converters;assembly=MECF.Framework.UI.Core"
  14. mc:Ignorable="d"
  15. d:DesignHeight="800" d:DesignWidth="1530">
  16. <UserControl.Resources>
  17. <converters:bool2VisibilityConverter x:Key="bool2VisibilityConvert"/>
  18. <Storyboard x:Key="SlitValve_Open">
  19. <DoubleAnimationUsingKeyFrames Storyboard.TargetProperty="(FrameworkElement.Height)" >
  20. <EasingDoubleKeyFrame KeyTime="0" Value="75"/>
  21. <EasingDoubleKeyFrame KeyTime="0:0:0.5" Value="55"/>
  22. </DoubleAnimationUsingKeyFrames>
  23. </Storyboard>
  24. <Storyboard x:Key="SlitValve_Close">
  25. <DoubleAnimationUsingKeyFrames Storyboard.TargetProperty="(FrameworkElement.Height)" >
  26. <EasingDoubleKeyFrame KeyTime="0" Value="55"/>
  27. <EasingDoubleKeyFrame KeyTime="0:0:0.5" Value="75"/>
  28. </DoubleAnimationUsingKeyFrames>
  29. </Storyboard>
  30. <Style TargetType="{x:Type Rectangle}" x:Key="SlitValve_Animation" >
  31. <Style.Triggers>
  32. <DataTrigger Binding="{Binding IsSlitValveOpen}" Value="true">
  33. <DataTrigger.EnterActions>
  34. <BeginStoryboard Storyboard="{StaticResource SlitValve_Open}"/>
  35. </DataTrigger.EnterActions>
  36. <DataTrigger.ExitActions>
  37. <BeginStoryboard Storyboard="{StaticResource SlitValve_Close}"/>
  38. </DataTrigger.ExitActions>
  39. </DataTrigger>
  40. </Style.Triggers>
  41. </Style>
  42. <DataTemplate x:Key="Default">
  43. <Grid>
  44. <Grid.ColumnDefinitions>
  45. <ColumnDefinition Width="125"></ColumnDefinition>
  46. <ColumnDefinition></ColumnDefinition>
  47. </Grid.ColumnDefinitions>
  48. <Border BorderBrush="{DynamicResource Table_BD}" BorderThickness="0,0,1,0" Grid.Row="0" Padding="0">
  49. <TextBlock Text="{Binding Feedback}" TextAlignment="Center" Width="90" Margin="0"></TextBlock>
  50. </Border>
  51. <TextBlock Text="{Binding Setpoint}" Grid.Column="1" TextAlignment="Center" Width="90">
  52. <TextBlock.Style>
  53. <Style>
  54. <Setter Property="TextBlock.Visibility" Value="Collapsed" ></Setter>
  55. <Style.Triggers>
  56. <DataTrigger Binding="{Binding SetpointEnabled}" Value="False">
  57. <Setter Property="TextBlock.Visibility" Value="Visible" ></Setter>
  58. </DataTrigger>
  59. </Style.Triggers>
  60. </Style>
  61. </TextBlock.Style>
  62. </TextBlock>
  63. <ctrl:TextBoxEx Text="{Binding Setpoint, UpdateSourceTrigger=PropertyChanged}" TextSaved="{Binding SetpointSaved, Mode=TwoWay, UpdateSourceTrigger=PropertyChanged}" Grid.Column="1" Width="90">
  64. <!--<i:Interaction.Triggers>
  65. <i:EventTrigger EventName="KeyDown">
  66. <cal:ActionMessage MethodName="SetParameter">
  67. <cal:Parameter Value="$eventargs" />
  68. <cal:Parameter Value="{Binding }" />
  69. </cal:ActionMessage>
  70. </i:EventTrigger>
  71. </i:Interaction.Triggers>-->
  72. <TextBox.Style>
  73. <Style>
  74. <Setter Property="TextBox.Visibility" Value="Collapsed" ></Setter>
  75. <Style.Triggers>
  76. <DataTrigger Binding="{Binding SetpointEnabled}" Value="True">
  77. <Setter Property="TextBox.Visibility" Value="Visible" ></Setter>
  78. </DataTrigger>
  79. </Style.Triggers>
  80. </Style>
  81. </TextBox.Style>
  82. </ctrl:TextBoxEx>
  83. </Grid>
  84. </DataTemplate>
  85. <DataTemplate x:Key="Share">
  86. <TextBlock Text="{Binding Feedback}" Width="250" TextAlignment="Center"></TextBlock>
  87. </DataTemplate>
  88. <DataTemplate x:Key="DropdownList">
  89. <Grid>
  90. <Grid.ColumnDefinitions>
  91. <ColumnDefinition Width="125"></ColumnDefinition>
  92. <ColumnDefinition></ColumnDefinition>
  93. </Grid.ColumnDefinitions>
  94. <Border BorderBrush="{DynamicResource Table_BD}" BorderThickness="0,0,1,0" Grid.Row="0" Padding="0">
  95. <TextBlock Text="{Binding Feedback}" TextAlignment="Center" Width="90" Margin="0"></TextBlock>
  96. </Border>
  97. <ComboBox ItemsSource="{Binding Selections}" SelectedValue="{Binding Setpoint, UpdateSourceTrigger=PropertyChanged}" Grid.Column="1" Width="120"></ComboBox>
  98. </Grid>
  99. </DataTemplate>
  100. <DataTemplate x:Key="ListBoxDataTemp">
  101. <Canvas Width="60" Height="200">
  102. <Grid Width="60">
  103. <Grid.RowDefinitions>
  104. <RowDefinition Height="20"/>
  105. <RowDefinition Height="20"/>
  106. </Grid.RowDefinitions>
  107. <!--<TextBlock Text="{Binding Display}" FontFamily="Arial" TextAlignment="Center" FontSize="14" Foreground="{DynamicResource FG_Black}" HorizontalAlignment="Center" VerticalAlignment="Center"/>-->
  108. <TextBlock Grid.Row="1" Text="{Binding MfcData.DisplayName}" FontFamily="Arial" TextAlignment="Center" FontSize="14" Foreground="{DynamicResource FG_Black}" VerticalAlignment="Center" HorizontalAlignment="Center"/>
  109. </Grid>
  110. <ctrl:Gasline Orientation="Vertical" Height="160" Canvas.Left="27" Canvas.Top="40"/>
  111. <ctrl:GaslineJoint JointType="UP" Canvas.Left="27" Canvas.Top="200"/>
  112. <control:FlowPipeV2 Width="200" Height="8" FlowOrientation="Vertical" IsFlowing="{Binding ValveData.Feedback}" Canvas.Left="35" Canvas.Top="41" />
  113. <control:FlowPipeV2 Width="50" Height="8" FlowOrientation="Vertical" IsFlowing="{Binding ValveData.Feedback}" Canvas.Left="35" Canvas.Top="100" />
  114. <deviceControl:AITGasValve Canvas.Left="14" Canvas.Top="130" ValveOpenOrientation="Vertical" DeviceData="{Binding ValveData}" EnableServiceControl="True" IsAutoMode="{Binding RelativeSource={RelativeSource FindAncestor,AncestorType={x:Type UserControl}},Path= DataContext.IsAutoMode}" />
  115. <control:MfcControl Canvas.Left="10" Canvas.Top="90" DeviceData="{Binding MfcData}" IsAutoMode="{Binding RelativeSource={RelativeSource FindAncestor,AncestorType={x:Type UserControl}},Path= DataContext.IsAutoMode}" />
  116. </Canvas>
  117. </DataTemplate>
  118. <pMs:PMTemplateSelector x:Key="SPSelector" DefaultTemplate="{StaticResource Default}" ShareTemplate="{StaticResource Share}" DropDownListTemplate="{StaticResource DropdownList}" />
  119. </UserControl.Resources>
  120. <Grid>
  121. <Grid.ColumnDefinitions>
  122. <ColumnDefinition />
  123. <ColumnDefinition Width="Auto"/>
  124. <ColumnDefinition Width="Auto"/>
  125. </Grid.ColumnDefinitions>
  126. <Canvas Grid.Column="0" Width="800" Height="800" HorizontalAlignment="Center" VerticalAlignment="Center" Margin="0 0 20 0" >
  127. <!--Lid 盖子,其实没有Lid开关控制信号,盖子上有把锁, 和温度有interlock-->
  128. <!--<Grid Width="220" HorizontalAlignment="Center" VerticalAlignment="Top" Canvas.Left="425" Canvas.Top="10">
  129. <Grid.RowDefinitions>
  130. <RowDefinition Height="24"/>
  131. <RowDefinition Height="40"/>
  132. <RowDefinition />
  133. </Grid.RowDefinitions>
  134. <Border BorderBrush="{DynamicResource Table_BD}" BorderThickness="1" Background="{DynamicResource Table_BG_Title}" Grid.Row="0" Grid.Column="0" Padding="5,1">
  135. <TextBlock Text="Lid Control" TextWrapping="Wrap" TextAlignment="Center" Foreground="{DynamicResource FG_Black}" FontSize="12" FontFamily="Arial" VerticalAlignment="Center"/>
  136. </Border>
  137. <Border BorderBrush="{DynamicResource Table_BD}" BorderThickness="1,0,1,1" Background="{DynamicResource Table_BG_Content}" Grid.Row="1" Grid.ColumnSpan="2" Padding="5,1">
  138. <StackPanel Orientation="Horizontal" HorizontalAlignment="Center" >
  139. <Button Content="Open Lid" IsEnabled="{Binding EnableOpenLid}" Width="90" Height="25" Margin="0">
  140. <i:Interaction.Triggers>
  141. <i:EventTrigger EventName="Click">
  142. <cal:ActionMessage MethodName="OpenLid"></cal:ActionMessage>
  143. </i:EventTrigger>
  144. </i:Interaction.Triggers>
  145. </Button>
  146. <Button Content="Close Lid" IsEnabled="{Binding EnableCloseLid}" Width="90" Height="25" Margin="5">
  147. <i:Interaction.Triggers>
  148. <i:EventTrigger EventName="Click">
  149. <cal:ActionMessage MethodName="CloseLid"></cal:ActionMessage>
  150. </i:EventTrigger>
  151. </i:Interaction.Triggers>
  152. </Button>
  153. </StackPanel>
  154. </Border>
  155. </Grid>-->
  156. <!--DI switch signals-->
  157. <Grid Canvas.Left="45" Canvas.Top="90">
  158. <Grid.ColumnDefinitions>
  159. <ColumnDefinition Width="100"/>
  160. <ColumnDefinition Width="105"/>
  161. <ColumnDefinition Width="100"/>
  162. <ColumnDefinition Width="105"/>
  163. </Grid.ColumnDefinitions>
  164. <Grid.RowDefinitions>
  165. <RowDefinition Height="25"/>
  166. <RowDefinition Height="25"/>
  167. <RowDefinition Height="25"/>
  168. <RowDefinition Height="25"/>
  169. </Grid.RowDefinitions>
  170. <!--chamber status-->
  171. <Border BorderBrush="{DynamicResource Table_BD}" BorderThickness="1" Background="{DynamicResource Table_BG_Title}" Grid.Row="0" Padding="5,1">
  172. <TextBlock Text="State" TextWrapping="Wrap" Foreground="{DynamicResource FG_Black}" FontSize="12" FontFamily="Arial" VerticalAlignment="Center"/>
  173. </Border>
  174. <Border BorderBrush="{DynamicResource Table_BD}" BorderThickness="0,1,1,1" Background="{DynamicResource Table_BG_Content}" Grid.Row="0" Grid.Column="1" Padding="5,1">
  175. <TextBlock Text="{Binding Path=ChamberStatus}" Background="{Binding ChamberStatusBkColor}" TextAlignment="Center" VerticalAlignment="Center"/>
  176. </Border>
  177. <!--SensorWaterFlowOk-->
  178. <Border BorderBrush="{DynamicResource Table_BD}" BorderThickness="1,0,1,1" Background="{DynamicResource Table_BG_Title}" Grid.Row="1" Padding="5,1">
  179. <TextBlock Text="Water Flow" TextWrapping="Wrap" Foreground="{DynamicResource FG_Black}" FontSize="12" FontFamily="Arial" VerticalAlignment="Center"/>
  180. </Border>
  181. <Border BorderBrush="{DynamicResource Table_BD}" BorderThickness="0,0,1,1" Background="{DynamicResource Table_BG_Content}" Grid.Row="1" Grid.Column="1" Padding="5,1">
  182. <deviceControl:AITSensor IsInterlockMode="True" DeviceData="{Binding SensorWaterFlowOk}" />
  183. </Border>
  184. <!--SensorCDAPressureOk-->
  185. <Border BorderBrush="{DynamicResource Table_BD}" BorderThickness="1,0,1,1" Background="{DynamicResource Table_BG_Title}" Grid.Row="2" Padding="5,1">
  186. <TextBlock Text="CDA" TextWrapping="Wrap" Foreground="{DynamicResource FG_Black}" FontSize="12" FontFamily="Arial" VerticalAlignment="Center"/>
  187. </Border>
  188. <Border BorderBrush="{DynamicResource Table_BD}" BorderThickness="0,0,1,1" Background="{DynamicResource Table_BG_Content}" Grid.Row="2" Grid.Column="1" Padding="5,1">
  189. <StackPanel Orientation="Horizontal">
  190. <deviceControl:AITSensor IsInterlockMode="True" DeviceData="{Binding SensorCDAPressureOk}" Margin="25,0,0,0"/>
  191. <deviceControl:AITSensor IsInterlockMode="True" DeviceData="{Binding SensorCDAPressureOk2}" Margin="10,0,0,0"/>
  192. </StackPanel>
  193. </Border>
  194. <!--SourceFan1-->
  195. <Border BorderBrush="{DynamicResource Table_BD}" BorderThickness="1,0,1,1" Background="{DynamicResource Table_BG_Title}" Grid.Row="3" Padding="5,1">
  196. <TextBlock Text="Fan" TextWrapping="Wrap" Foreground="{DynamicResource FG_Black}" FontSize="12" FontFamily="Arial" VerticalAlignment="Center"/>
  197. </Border>
  198. <Border BorderBrush="{DynamicResource Table_BD}" BorderThickness="0,0,1,1" Background="{DynamicResource Table_BG_Content}" Grid.Row="3" Grid.Column="1" Padding="5,1">
  199. <StackPanel Orientation="Horizontal" HorizontalAlignment="Center">
  200. <deviceControl:AITSensor IsInterlockMode="True" DeviceData="{Binding SourceFan1}" />
  201. </StackPanel>
  202. </Border>
  203. <!--SensorWaterLeakOk-->
  204. <Border BorderBrush="{DynamicResource Table_BD}" BorderThickness="0,1,1,1" Background="{DynamicResource Table_BG_Title}" Grid.Row="0" Grid.Column="2" Padding="5,1">
  205. <TextBlock Text="Water Leak" TextWrapping="Wrap" Foreground="{DynamicResource FG_Black}" FontSize="12" FontFamily="Arial" VerticalAlignment="Center"/>
  206. </Border>
  207. <Border BorderBrush="{DynamicResource Table_BD}" BorderThickness="0,1,1,1" Background="{DynamicResource Table_BG_Content}" Grid.Row="0" Grid.Column="3" Padding="5,1">
  208. <deviceControl:AITSensor IsInterlockMode="True" DeviceData="{Binding SensorWaterLeakOk}" />
  209. </Border>
  210. <!--SensorArmNotExtend-->
  211. <Border BorderBrush="{DynamicResource Table_BD}" BorderThickness="0,0,1,1" Background="{DynamicResource Table_BG_Title}" Grid.Row="2" Grid.Column="2" Padding="5,1">
  212. <TextBlock Text="Arm Unextend" TextWrapping="Wrap" Foreground="{DynamicResource FG_Black}" FontSize="12" FontFamily="Arial" VerticalAlignment="Center"/>
  213. </Border>
  214. <Border BorderBrush="{DynamicResource Table_BD}" BorderThickness="0,0,1,1" Background="{DynamicResource Table_BG_Content}" Grid.Row="2" Grid.Column="3" Padding="5,1">
  215. <deviceControl:AITSensor IsInterlockMode="True" DeviceData="{Binding SensorArmNotExtend}" />
  216. </Border>
  217. <!--ATM Switch-->
  218. <Border BorderBrush="{DynamicResource Table_BD}" BorderThickness="0,0,1,1" Background="{DynamicResource Table_BG_Title}" Grid.Row="3" Grid.Column="2" Padding="5,1">
  219. <TextBlock Text="ATM" TextWrapping="Wrap" Foreground="{DynamicResource FG_Black}" FontSize="12" FontFamily="Arial" VerticalAlignment="Center"/>
  220. </Border>
  221. <Border BorderBrush="{DynamicResource Table_BD}" BorderThickness="0,0,1,1" Background="{DynamicResource Table_BG_Content}" Grid.Row="3" Grid.Column="3" Padding="5,1">
  222. <deviceControl:AITSensor GreenColor="True" DeviceData="{Binding SensorATMSwitch}" />
  223. </Border>
  224. <!--VAC switch-->
  225. <Border BorderBrush="{DynamicResource Table_BD}" BorderThickness="0,0,1,1" Background="{DynamicResource Table_BG_Title}" Grid.Row="1" Grid.Column="2" Padding="5,1">
  226. <TextBlock Text="Vac" TextWrapping="Wrap" Foreground="{DynamicResource FG_Black}" FontSize="12" FontFamily="Arial" VerticalAlignment="Center"/>
  227. </Border>
  228. <Border BorderBrush="{DynamicResource Table_BD}" BorderThickness="0,0,1,1" Background="{DynamicResource Table_BG_Content}" Grid.Row="1" Grid.Column="3" Padding="5,1">
  229. <deviceControl:AITSensor GreenColor="True" DeviceData="{Binding SensorVacSwitch}" />
  230. </Border>
  231. </Grid>
  232. <Canvas Canvas.Left="121" Canvas.Top="280" >
  233. <!-- Fast vent valve-->
  234. <TextBlock Text="Vent" FontFamily="Arial" TextAlignment="Center" FontSize="14" Foreground="{DynamicResource FG_Black}" Canvas.Left="212" Canvas.Top="-87"/>
  235. <TextBlock Text="Purge" FontFamily="Arial" TextAlignment="Center" FontSize="14" Foreground="{DynamicResource FG_Black}" Canvas.Left="252" Canvas.Top="-60"/>
  236. <ctrl:Gasline Orientation="Vertical" Height="166" Canvas.Left="220" Canvas.Top="-66" />
  237. <control:FlowPipeV2 Width="168" Height="7" IsFlowing="{Binding FastVentVlv.Feedback}" Canvas.Left="228" Canvas.Top="-66" >
  238. <control:FlowPipeV2.RenderTransform>
  239. <RotateTransform Angle="90"></RotateTransform>
  240. </control:FlowPipeV2.RenderTransform>
  241. </control:FlowPipeV2>
  242. <deviceControl:AITGasValve Canvas.Left="208" Canvas.Top="-19" ValveOpenOrientation="Vertical" DeviceData="{Binding FastVentVlv}" EnableServiceControl="{Binding enableServiceControl}" IsAutoMode="{Binding IsAutoMode}"/>
  243. <ctrl:Gasline Orientation="Vertical" Height="73" Canvas.Left="265" Canvas.Top="-41" />
  244. <ctrl:Gasline Orientation="Horizontal" Canvas.Left="227" Canvas.Top="-41" Width="38" />
  245. <ctrl:Gasline Orientation="Horizontal" Canvas.Left="227" Canvas.Top="27" Width="38" />
  246. <ctrl:GaslineJoint JointType="RIGHT" Canvas.Left="220" Canvas.Top="27" />
  247. <ctrl:GaslineJoint JointType="RIGHT_BOTTOM" Canvas.Left="265" Canvas.Top="27" />
  248. <ctrl:GaslineJoint JointType="RIGHT_TOP" Canvas.Left="265" Canvas.Top="-41" />
  249. <ctrl:GaslineJoint JointType="RIGHT" Canvas.Left="220" Canvas.Top="-41" />
  250. <control:FlowPipeV2 Width="38" Height="8" IsFlowing="{Binding SoftVentVlv.Feedback}" Visibility="{Binding Path=SoftVentVlv.Feedback, Converter={StaticResource bool2VisibilityConvert}}" Canvas.Left="227" Canvas.Top="-41" />
  251. <control:FlowPipeV2 Width="29" Height="8" IsFlowing="{Binding SoftVentVlv.Feedback}" Visibility="{Binding Path=SoftVentVlv.Feedback, Converter={StaticResource bool2VisibilityConvert}}" Canvas.Left="210" Canvas.Top="-55" RenderTransformOrigin="0.5,0.5" >
  252. <control:FlowPipeV2.RenderTransform>
  253. <TransformGroup>
  254. <ScaleTransform/>
  255. <SkewTransform/>
  256. <RotateTransform Angle="90"/>
  257. <TranslateTransform/>
  258. </TransformGroup>
  259. </control:FlowPipeV2.RenderTransform>
  260. </control:FlowPipeV2>
  261. <control:FlowPipeV2 Width="77" Height="8" IsFlowing="{Binding SoftVentVlv.Feedback}" Visibility="{Binding Path=SoftVentVlv.Feedback, Converter={StaticResource bool2VisibilityConvert}}" Canvas.Left="231" Canvas.Top="-7" RenderTransformOrigin="0.5,0.5" >
  262. <control:FlowPipeV2.RenderTransform>
  263. <TransformGroup>
  264. <ScaleTransform/>
  265. <SkewTransform/>
  266. <RotateTransform Angle="90"/>
  267. <TranslateTransform/>
  268. </TransformGroup>
  269. </control:FlowPipeV2.RenderTransform>
  270. </control:FlowPipeV2>
  271. <control:FlowPipeV2 Width="62" Height="8" IsFlowing="{Binding SoftVentVlv.Feedback}" Visibility="{Binding Path=SoftVentVlv.Feedback, Converter={StaticResource bool2VisibilityConvert}}" Canvas.Left="194" Canvas.Top="56" RenderTransformOrigin="0.5,0.5" >
  272. <control:FlowPipeV2.RenderTransform>
  273. <TransformGroup>
  274. <ScaleTransform/>
  275. <SkewTransform/>
  276. <RotateTransform Angle="90"/>
  277. <TranslateTransform/>
  278. </TransformGroup>
  279. </control:FlowPipeV2.RenderTransform>
  280. </control:FlowPipeV2>
  281. <control:FlowPipeV2 Width="38" Height="8" IsFlowing="{Binding SoftVentVlv.Feedback}" Visibility="{Binding Path=SoftVentVlv.Feedback, Converter={StaticResource bool2VisibilityConvert}}" Canvas.Left="227" Canvas.Top="27" RenderTransformOrigin="0.5,0.5" >
  282. <control:FlowPipeV2.RenderTransform>
  283. <TransformGroup>
  284. <ScaleTransform/>
  285. <SkewTransform/>
  286. <RotateTransform Angle="180"/>
  287. <TranslateTransform/>
  288. </TransformGroup>
  289. </control:FlowPipeV2.RenderTransform>
  290. </control:FlowPipeV2>
  291. <deviceControl:AITGasValve Canvas.Left="253" Canvas.Top="-18" ValveOpenOrientation="Vertical" DeviceData="{Binding SoftVentVlv}" EnableServiceControl="{Binding enableServiceControl}" IsAutoMode="{Binding IsAutoMode}"/>
  292. </Canvas>
  293. <ctrl:Gasline Width="430" Canvas.Left="15" Canvas.Top="376" />
  294. <!--<control:FlowPipeV2 Width="170" Height="8" IsFlowing="{Binding GP1Valve.Feedback}" Canvas.Left="50" Canvas.Top="292" RenderTransformOrigin="0.5,0.5" >
  295. <control:FlowPipeV2.RenderTransform>
  296. <TransformGroup>
  297. <ScaleTransform/>
  298. <SkewTransform/>
  299. <RotateTransform Angle="90"/>
  300. <TranslateTransform/>
  301. </TransformGroup>
  302. </control:FlowPipeV2.RenderTransform>
  303. </control:FlowPipeV2>
  304. <control:FlowPipeV2 Width="170" Height="8" IsFlowing="{Binding GP2Valve.Feedback}" Canvas.Left="112" Canvas.Top="296" RenderTransformOrigin="0.5,0.5" >
  305. <control:FlowPipeV2.RenderTransform>
  306. <TransformGroup>
  307. <ScaleTransform/>
  308. <SkewTransform/>
  309. <RotateTransform Angle="90"/>
  310. <TranslateTransform/>
  311. </TransformGroup>
  312. </control:FlowPipeV2.RenderTransform>
  313. </control:FlowPipeV2>
  314. <control:FlowPipeV2 Width="170" Height="8" IsFlowing="{Binding GP3Valve.Feedback}" Canvas.Left="180" Canvas.Top="295" RenderTransformOrigin="0.5,0.5" >
  315. <control:FlowPipeV2.RenderTransform>
  316. <TransformGroup>
  317. <ScaleTransform/>
  318. <SkewTransform/>
  319. <RotateTransform Angle="90"/>
  320. <TranslateTransform/>
  321. </TransformGroup>
  322. </control:FlowPipeV2.RenderTransform>
  323. </control:FlowPipeV2>-->
  324. <ItemsControl Canvas.Left="-15" Canvas.Top="176" Width="300" Height="200" ItemsSource="{Binding Gaslines}"
  325. ItemTemplate="{StaticResource ListBoxDataTemp}" Focusable="False" HorizontalAlignment="Left" VerticalAlignment="Top" >
  326. <ItemsControl.ItemsPanel>
  327. <ItemsPanelTemplate >
  328. <VirtualizingStackPanel Orientation="Horizontal"/>
  329. </ItemsPanelTemplate>
  330. </ItemsControl.ItemsPanel>
  331. </ItemsControl>
  332. <control:FlowPipeV2 Width="430" Height="8" Canvas.Left="15" Canvas.Top="376" >
  333. <control:FlowPipeV2.IsFlowing>
  334. <MultiBinding>
  335. <MultiBinding.Converter>
  336. <converters:FlowConverterFirstFalseMultiBinding></converters:FlowConverterFirstFalseMultiBinding>
  337. </MultiBinding.Converter>
  338. <MultiBinding.Bindings>
  339. <Binding Path="ProcessVlv.Feedback"></Binding>
  340. <Binding Path="GP1Valve.Feedback"></Binding>
  341. </MultiBinding.Bindings>
  342. </MultiBinding>
  343. </control:FlowPipeV2.IsFlowing>
  344. </control:FlowPipeV2>
  345. <control:FlowPipeV2 Width="365" Height="8" Canvas.Left="80" Canvas.Top="376" >
  346. <control:FlowPipeV2.IsFlowing>
  347. <MultiBinding>
  348. <MultiBinding.Converter>
  349. <converters:FlowConverterFirstFalseMultiBinding></converters:FlowConverterFirstFalseMultiBinding>
  350. </MultiBinding.Converter>
  351. <MultiBinding.Bindings>
  352. <Binding Path="ProcessVlv.Feedback"></Binding>
  353. <Binding Path="GP2Valve.Feedback"></Binding>
  354. </MultiBinding.Bindings>
  355. </MultiBinding>
  356. </control:FlowPipeV2.IsFlowing>
  357. </control:FlowPipeV2>
  358. <control:FlowPipeV2 Width="305" Height="8" Canvas.Left="140" Canvas.Top="376" >
  359. <control:FlowPipeV2.IsFlowing>
  360. <MultiBinding>
  361. <MultiBinding.Converter>
  362. <converters:FlowConverterFirstFalseMultiBinding></converters:FlowConverterFirstFalseMultiBinding>
  363. </MultiBinding.Converter>
  364. <MultiBinding.Bindings>
  365. <Binding Path="ProcessVlv.Feedback"></Binding>
  366. <Binding Path="GP3Valve.Feedback"></Binding>
  367. </MultiBinding.Bindings>
  368. </MultiBinding>
  369. </control:FlowPipeV2.IsFlowing>
  370. </control:FlowPipeV2>
  371. <control:FlowPipeV2 Width="252" Height="8" Canvas.Left="193" Canvas.Top="376" >
  372. <control:FlowPipeV2.IsFlowing>
  373. <MultiBinding>
  374. <MultiBinding.Converter>
  375. <converters:FlowConverterFirstFalseMultiBinding></converters:FlowConverterFirstFalseMultiBinding>
  376. </MultiBinding.Converter>
  377. <MultiBinding.Bindings>
  378. <Binding Path="ProcessVlv.Feedback"></Binding>
  379. <Binding Path="GP4Valve.Feedback"></Binding>
  380. </MultiBinding.Bindings>
  381. </MultiBinding>
  382. </control:FlowPipeV2.IsFlowing>
  383. </control:FlowPipeV2>
  384. <control:FlowPipeV2 Width="187" Height="8" Canvas.Left="258" Canvas.Top="376" >
  385. <control:FlowPipeV2.IsFlowing>
  386. <MultiBinding>
  387. <MultiBinding.Converter>
  388. <converters:FlowConverterFirstFalseMultiBinding></converters:FlowConverterFirstFalseMultiBinding>
  389. </MultiBinding.Converter>
  390. <MultiBinding.Bindings>
  391. <Binding Path="ProcessVlv.Feedback"></Binding>
  392. <Binding Path="GP5Valve.Feedback"></Binding>
  393. </MultiBinding.Bindings>
  394. </MultiBinding>
  395. </control:FlowPipeV2.IsFlowing>
  396. </control:FlowPipeV2>
  397. <control:FlowPipeV2 Width="105" Height="8" Canvas.Left="341" Canvas.Top="376" >
  398. <control:FlowPipeV2.IsFlowing>
  399. <MultiBinding>
  400. <MultiBinding.Converter>
  401. <converters:FlowConverterFirstFalseMultiBinding></converters:FlowConverterFirstFalseMultiBinding>
  402. </MultiBinding.Converter>
  403. <MultiBinding.Bindings>
  404. <Binding Path="ProcessVlv.Feedback"></Binding>
  405. <Binding Path="FastVentVlv.Feedback"></Binding>
  406. <Binding Path="SoftVentVlv.Feedback"></Binding>
  407. </MultiBinding.Bindings>
  408. </MultiBinding>
  409. </control:FlowPipeV2.IsFlowing>
  410. </control:FlowPipeV2>
  411. <!--<TextBlock Canvas.Left="62" Canvas.Top="198" Text="N2"></TextBlock>-->
  412. <!--<ctrl:Gasline Orientation="Vertical" Height="166" Canvas.Left="66" Canvas.Top="218" />-->
  413. <ctrl:GaslineJoint JointType="LEFT_BOTTOM" Canvas.Left="12" Canvas.Top="376" />
  414. <!--<ctrl:Gasline Height="8" Width="5" Canvas.Left="135" Canvas.Top="396" />-->
  415. <!--<deviceControl:AITGasValve Canvas.Left="53" Canvas.Top="302" ValveOpenOrientation="Vertical" DeviceData="{Binding N2PurgeValveData}" EnableServiceControl="True" />-->
  416. <deviceControl:AITGasValve Canvas.Left="405" Canvas.Top="365" ValveOpenOrientation="Horizontal" DeviceData="{Binding ProcessVlv}" EnableServiceControl="{Binding enableServiceControl}" IsAutoMode="{Binding IsAutoMode}"/>
  417. <!--chamber-->
  418. <Canvas Height="550" Width="350" Canvas.Left="445" Canvas.Top="171">
  419. <TextBlock Text="Bias Match" Canvas.Left="284" Canvas.Top="109" Visibility="{Binding Path=IsBiasMatchVisible, Converter={StaticResource bool2VisibilityConvert}}"/>
  420. <deviceControl:AITSensor Canvas.Left="264" Canvas.Top="109" GreenColor="True" LightOnValue="{Binding IsBiasMatchPowerOn}" Visibility="{Binding Path=IsBiasMatchVisible, Converter={StaticResource bool2VisibilityConvert}}"/>
  421. <TextBlock Text="Bias RF" Canvas.Left="284" Canvas.Top="129" Visibility="{Binding Path=IsBiasRfVisible, Converter={StaticResource bool2VisibilityConvert}}"/>
  422. <deviceControl:AITSensor Canvas.Left="264" Canvas.Top="129" GreenColor="True" LightOnValue="{Binding IsBiasRfPowerOn}" Visibility="{Binding Path=IsBiasRfVisible, Converter={StaticResource bool2VisibilityConvert}}"/>
  423. <deviceControl:AITRfGenerator DeviceData="{Binding RfBias}" Canvas.Left="250" Canvas.Top="144" IsAutoMode="{Binding IsAutoMode}" Visibility="{Binding Path=IsBiasRfVisible, Converter={StaticResource bool2VisibilityConvert}}"></deviceControl:AITRfGenerator>
  424. <TextBlock Text="RF" Canvas.Left="280" Canvas.Top="29" />
  425. <deviceControl:AITSensor Canvas.Left="260" Canvas.Top="29" GreenColor="True" LightOnValue="{Binding IsRfPowerOn}" />
  426. <deviceControl:AITRfGenerator DeviceData="{Binding Rf}" Canvas.Left="250" Canvas.Top="44" IsAutoMode="{Binding IsAutoMode}"></deviceControl:AITRfGenerator>
  427. <!--wall temperature-->
  428. <Canvas Visibility="{Binding WallHeaterVisibility}">
  429. <TextBlock Text="Wall TEMP" Canvas.Left="269" Canvas.Top="179" />
  430. <deviceControl:AITHeaterControl DeviceData="{Binding WallHeater}" Width="80" Canvas.Left="256" Canvas.Top="194" IsAutoMode="{Binding IsAutoMode}"/>
  431. </Canvas>
  432. <!--substrate heater temperature-->
  433. <TextBlock Text="LE TEMP" Canvas.Left="260" Canvas.Top="227" Visibility="{Binding Path=IsHeaterVisibility, Converter={StaticResource bool2VisibilityConvert}}"/>
  434. <TextBlock Text="Chiller TEMP" Canvas.Left="260" Canvas.Top="227" Visibility="{Binding Path=IsChillerVisibility, Converter={StaticResource bool2VisibilityConvert}}"/>
  435. <deviceControl:AITChillerControl DeviceData="{Binding ChillerData}" Canvas.Left="256" Canvas.Top="242" Width="80" IsAutoMode="{Binding IsAutoMode}" IsEnabled="{Binding IsChillerEnable}" Visibility="{Binding Path=IsChillerVisibility, Converter={StaticResource bool2VisibilityConvert}}"/>
  436. <deviceControl:AITHeaterControl DeviceData="{Binding HeaterChamber}" Canvas.Left="256" Canvas.Top="242" Width="80" IsAutoMode="{Binding IsAutoMode}" IsEnabled="{Binding IsHeaterEnable}" Visibility="{Binding Path=IsHeaterVisibility, Converter={StaticResource bool2VisibilityConvert}}"/>
  437. <!--grid heater temperature-->
  438. <Canvas Visibility="{Binding GridHeaterVisibility}">
  439. <TextBlock Text="Grid TEMP" Canvas.Left="-10" Canvas.Top="25" />
  440. <deviceControl:AITHeaterControl DeviceData="{Binding GridHeater}" Width="80" Canvas.Left="-15" Canvas.Top="40" IsAutoMode="{Binding IsAutoMode}"/>
  441. </Canvas>
  442. <!--Foreline teamperature-->
  443. <TextBlock Text="Foreline" Canvas.Left="140" Canvas.Top="444" />
  444. <deviceControl:AITHeaterControl DeviceData="{Binding ForelineHeater}" Canvas.Left="148" Canvas.Top="460" IsAutoMode="{Binding IsAutoMode}"/>
  445. <ctrl:Gasline Orientation="Vertical" Height="20" Width="10" Canvas.Left="20" Canvas.Top="240"/>
  446. <ctrl:Gasline Orientation="Horizontal" Height="8" Canvas.Left="-102" Canvas.Top="250" Width="123"/>
  447. <ctrl:GaslineJoint JointType="LEFT" Width="10" Height="10" Canvas.Left="20" Canvas.Top="249" />
  448. <!--<ctrl:Gasline Orientation="Horizontal" Height="10" Canvas.Left="-105" Canvas.Top="288" Width="133"/>-->
  449. <!--<ctrl:GaslineJoint JointType="RIGHT_BOTTOM" Width="10" Height="10" Canvas.Left="20" Canvas.Top="288" />-->
  450. <!--<deviceControl:AITPressureMeter DeviceData="{Binding PressureGauge}" Height="30" Width="100" Canvas.Left="-112" Canvas.Top="276" />-->
  451. <deviceControl:AITPressureMeter DeviceData="{Binding ProcessGauge}" Height="30" Width="100" Canvas.Left="-112" Canvas.Top="240" />
  452. <TextBlock Text="Process" FontFamily="Arial" TextAlignment="Center" FontSize="14" Foreground="{DynamicResource FG_Black}" Canvas.Left="-170" Canvas.Top="248"/>
  453. <!--<TextBlock Text="腔体压力" FontFamily="Arial" TextAlignment="Center" FontSize="14" Foreground="{DynamicResource FG_Black}" Canvas.Left="-170" Canvas.Top="283"/>-->
  454. <ctrl:Gasline Orientation="Vertical" Height="268" Canvas.Left="208" Canvas.Top="240"/>
  455. <!--<control:FlowPipeV2 Width="274" Height="7" IsFlowing="{Binding FastPumpVlv.Feedback}" Visibility="{Binding Path=FastPumpVlv.Feedback, Converter={StaticResource bool2VisibilityConvert}}" Canvas.Left="216" Canvas.Top="238" >
  456. <control:FlowPipeV2.RenderTransform>
  457. <TransformGroup>
  458. <ScaleTransform/>
  459. <SkewTransform/>
  460. <RotateTransform Angle="90"/>
  461. <TranslateTransform/>
  462. </TransformGroup>
  463. </control:FlowPipeV2.RenderTransform>
  464. </control:FlowPipeV2>-->
  465. <control:FlowPipeV2 Width="275" Height="8" IsFlowing="{Binding FastPumpVlv.Feedback}" Visibility="{Binding Path=FastPumpVlv.Feedback, Converter={StaticResource bool2VisibilityConvert}}" Canvas.Left="74" Canvas.Top="370" RenderTransformOrigin="0.5,0.5" >
  466. <control:FlowPipeV2.RenderTransform>
  467. <TransformGroup>
  468. <ScaleTransform/>
  469. <SkewTransform/>
  470. <RotateTransform Angle="90"/>
  471. <TranslateTransform/>
  472. </TransformGroup>
  473. </control:FlowPipeV2.RenderTransform>
  474. </control:FlowPipeV2>
  475. <deviceControl:AITGasValve Canvas.Left="196" Canvas.Top="360" ValveOpenOrientation="Vertical" DeviceData="{Binding FastPumpVlv}" EnableServiceControl="{Binding enableServiceControl}" IsAutoMode="{Binding IsAutoMode}"/>
  476. <TextBlock Text="Fast" FontFamily="Arial" TextAlignment="Center" FontSize="14" Foreground="{DynamicResource FG_Black}" Canvas.Left="166" Canvas.Top="370"/>
  477. <TextBlock Text="Slow" FontFamily="Arial" TextAlignment="Center" FontSize="14" Foreground="{DynamicResource FG_Black}" Canvas.Left="276" Canvas.Top="370"/>
  478. <Canvas Canvas.Left="-12" Canvas.Top="341" >
  479. <ctrl:Gasline Orientation="Vertical" Height="143" Canvas.Left="266" Canvas.Top="-69" />
  480. <ctrl:Gasline Orientation="Horizontal" Canvas.Left="228" Width="38" Canvas.Top="-77" />
  481. <ctrl:Gasline Orientation="Horizontal" Canvas.Left="228" Canvas.Top="66" Width="38" />
  482. <!--<ctrl:GaslineJoint JointType="RIGHT" Canvas.Left="220" Canvas.Top="27" />-->
  483. <ctrl:GaslineJoint JointType="RIGHT_BOTTOM" Canvas.Left="266" Canvas.Top="66" />
  484. <ctrl:GaslineJoint JointType="RIGHT_TOP" Canvas.Left="266" Canvas.Top="-77" />
  485. <!--<ctrl:GaslineJoint JointType="RIGHT" Canvas.Left="220" Canvas.Top="-41" />-->
  486. <control:FlowPipeV2 Width="39" Height="8" IsFlowing="{Binding SoftPumpVlv.Feedback}" Visibility="{Binding Path=SoftPumpVlv.Feedback, Converter={StaticResource bool2VisibilityConvert}}" Canvas.Left="228" Canvas.Top="-77" />
  487. <control:FlowPipeV2 Width="30" Height="8" IsFlowing="{Binding SoftPumpVlv.Feedback}" Visibility="{Binding Path=SoftPumpVlv.Feedback, Converter={StaticResource bool2VisibilityConvert}}" Canvas.Left="209" Canvas.Top="-89" RenderTransformOrigin="0.5,0.5" >
  488. <control:FlowPipeV2.RenderTransform>
  489. <TransformGroup>
  490. <ScaleTransform/>
  491. <SkewTransform/>
  492. <RotateTransform Angle="90"/>
  493. <TranslateTransform/>
  494. </TransformGroup>
  495. </control:FlowPipeV2.RenderTransform>
  496. </control:FlowPipeV2>
  497. <control:FlowPipeV2 Width="142" Height="8" IsFlowing="{Binding SoftPumpVlv.Feedback}" Visibility="{Binding Path=SoftPumpVlv.Feedback, Converter={StaticResource bool2VisibilityConvert}}" Canvas.Left="199" Canvas.Top="-9" RenderTransformOrigin="0.5,0.5" >
  498. <control:FlowPipeV2.RenderTransform>
  499. <TransformGroup>
  500. <ScaleTransform/>
  501. <SkewTransform/>
  502. <RotateTransform Angle="90"/>
  503. <TranslateTransform/>
  504. </TransformGroup>
  505. </control:FlowPipeV2.RenderTransform>
  506. </control:FlowPipeV2>
  507. <control:FlowPipeV2 Width="96" Height="6" IsFlowing="{Binding SoftPumpVlv.Feedback}" Visibility="{Binding Path=SoftPumpVlv.Feedback, Converter={StaticResource bool2VisibilityConvert}}" Canvas.Left="176" Canvas.Top="112" RenderTransformOrigin="0.5,0.5" >
  508. <control:FlowPipeV2.RenderTransform>
  509. <TransformGroup>
  510. <ScaleTransform/>
  511. <SkewTransform/>
  512. <RotateTransform Angle="90"/>
  513. <TranslateTransform/>
  514. </TransformGroup>
  515. </control:FlowPipeV2.RenderTransform>
  516. </control:FlowPipeV2>
  517. <control:FlowPipeV2 Width="38" Height="8" IsFlowing="{Binding SoftPumpVlv.Feedback}" Visibility="{Binding Path=SoftPumpVlv.Feedback, Converter={StaticResource bool2VisibilityConvert}}" Canvas.Left="227" Canvas.Top="66" RenderTransformOrigin="0.5,0.5" >
  518. <control:FlowPipeV2.RenderTransform>
  519. <TransformGroup>
  520. <ScaleTransform/>
  521. <SkewTransform/>
  522. <RotateTransform Angle="180"/>
  523. <TranslateTransform/>
  524. </TransformGroup>
  525. </control:FlowPipeV2.RenderTransform>
  526. </control:FlowPipeV2>
  527. <deviceControl:AITGasValve Canvas.Left="254" Canvas.Top="20" ValveOpenOrientation="Vertical" DeviceData="{Binding SoftPumpVlv}" EnableServiceControl="{Binding enableServiceControl}" IsAutoMode="{Binding IsAutoMode}"/>
  528. </Canvas>
  529. <ctrl:Gasline Orientation="Horizontal" Canvas.Left="216" Canvas.Top="468" Width="46" />
  530. <ctrl:GaslineJoint JointType="RIGHT" Canvas.Left="208" Canvas.Top="468" />
  531. <TextBlock Text="Foreline" Canvas.Left="250" Canvas.Top="440" />
  532. <deviceControl:AITPressureMeter DeviceData="{Binding ForelineGauge}" Height="30" Width="100" Canvas.Left="227" Canvas.Top="456" />
  533. <deviceControl:AITPump Canvas.Top="500" DeviceData="{Binding MainPumpData}" EnableControl="{Binding enableServiceControl}" IsShowSensor="False" Canvas.Left="4" IsAutoMode="{Binding IsAutoMode}"/>
  534. <deviceControl:AITThrottleValve Canvas.Top="288" DeviceData="{Binding Tv}" Canvas.Left="192" IsAutoMode="{Binding IsAutoMode}"></deviceControl:AITThrottleValve>
  535. <Grid Visibility="{Binding EPDVisibility}" Canvas.Left="-245" Canvas.Top="288">
  536. <Grid.ColumnDefinitions>
  537. <ColumnDefinition Width="120"/>
  538. <ColumnDefinition Width="50" />
  539. <ColumnDefinition Width="120" />
  540. </Grid.ColumnDefinitions>
  541. <Border BorderBrush="{DynamicResource Table_BD}" BorderThickness="1" Background="{DynamicResource Table_BG_Title}" Grid.Row="0" Padding="5,1" Height="24">
  542. <TextBlock Text="EPD Status" TextWrapping="Wrap" Foreground="{DynamicResource FG_Black}" FontSize="14" FontFamily="Arial" HorizontalAlignment="Center" VerticalAlignment="Center"/>
  543. </Border>
  544. <Border BorderBrush="{DynamicResource Table_BD}" BorderThickness="0,1,1,1" Grid.Row="0" Grid.Column="1" Padding="5,1">
  545. <deviceControl:AITSensor Margin="5,0,5,0" GreenColor="True" LightOnValue="{Binding IsEPDConnected}" />
  546. </Border>
  547. <Border BorderBrush="{DynamicResource Table_BD}" BorderThickness="0,1,1,1" Grid.Row="0" Grid.Column="2" Padding="5,1">
  548. <TextBlock Text="{Binding EPDStatus}" TextWrapping="Wrap" Foreground="{DynamicResource FG_Black}" FontSize="15" FontFamily="Arial" HorizontalAlignment="Center" VerticalAlignment="Center"/>
  549. </Border>
  550. </Grid>
  551. <!--slit valve-->
  552. <Grid Width="280" HorizontalAlignment="Center" VerticalAlignment="Top" Canvas.Left="-245" Canvas.Top="330">
  553. <Grid.RowDefinitions>
  554. <RowDefinition Height="24"/>
  555. <RowDefinition Height="30"/>
  556. <RowDefinition />
  557. </Grid.RowDefinitions>
  558. <Border BorderBrush="{DynamicResource Table_BD}" BorderThickness="1" Background="{DynamicResource Table_BG_Title}" Grid.Row="0" Grid.Column="0" Padding="5,1">
  559. <TextBlock Text="Slit door" TextWrapping="Wrap" TextAlignment="Center" Foreground="{DynamicResource FG_Black}" FontSize="12" FontFamily="黑体" VerticalAlignment="Center"/>
  560. </Border>
  561. <Border BorderBrush="{DynamicResource Table_BD}" BorderThickness="1,0,1,1" Background="{DynamicResource Table_BG_Content}" Grid.Row="1" Grid.ColumnSpan="2" Padding="5,1">
  562. <StackPanel Orientation="Horizontal" HorizontalAlignment="Center">
  563. <deviceControl:AITSensor Margin="5,0,5,0" GreenColor="True" LightOnValue="{Binding IsSlitValveOpen}" />
  564. <Button Content="Open" IsEnabled="{Binding EnableOpenSlitValve}" Width="100" Height="25" Margin="0">
  565. <i:Interaction.Triggers>
  566. <i:EventTrigger EventName="Click">
  567. <cal:ActionMessage MethodName="OpenSlitValve"></cal:ActionMessage>
  568. </i:EventTrigger>
  569. </i:Interaction.Triggers>
  570. </Button>
  571. <deviceControl:AITSensor Margin="15,0,5,0" GreenColor="True" LightOnValue="{Binding IsSlitValveClose}" />
  572. <Button Content="Close" IsEnabled="{Binding EnableCloseSlitValve}" Width="100" Height="25" Margin="0">
  573. <i:Interaction.Triggers>
  574. <i:EventTrigger EventName="Click">
  575. <cal:ActionMessage MethodName="CloseSlitValve"/>
  576. </i:EventTrigger>
  577. </i:Interaction.Triggers>
  578. </Button>
  579. </StackPanel>
  580. </Border>
  581. </Grid>
  582. <!--chamber-->
  583. <Grid Width="240" Height="190" Canvas.Top="80">
  584. <Grid.RowDefinitions>
  585. <RowDefinition Height="160"/>
  586. <RowDefinition />
  587. </Grid.RowDefinitions>
  588. <Path Data="M0.5,0.5 L33.5,0.5 33.5,17.5 206.5,17.5 206.5,0.5 239.5,0.5 239.5,149.5 0.5,149.5 z" Stroke="#FF747474" Margin="0,10,0,0">
  589. <Path.Fill>
  590. <LinearGradientBrush EndPoint="1,1" StartPoint="0,0">
  591. <GradientStop Color="#FF8F8F8F" Offset="0"/>
  592. <GradientStop Color="#FF9B9B9B" Offset="1"/>
  593. <GradientStop Color="#FEF1ECEC" Offset="0.15"/>
  594. <GradientStop Color="#FEC0C0C0" Offset="0.38"/>
  595. <GradientStop Color="#FEB4B4B4" Offset="0.5"/>
  596. <GradientStop Color="#FEE5E5E5" Offset="0.7"/>
  597. <GradientStop Color="#FFBABABA" Offset="0.85"/>
  598. <GradientStop Color="#FFE5E5E5" Offset="0.9"/>
  599. </LinearGradientBrush>
  600. </Path.Fill>
  601. </Path>
  602. <Rectangle Stroke="#FF747474" Margin="8,18">
  603. <Rectangle.Fill>
  604. <LinearGradientBrush EndPoint="0.243,1" StartPoint="0.757,0">
  605. <GradientStop Color="#FFE0DEDE" Offset="0"/>
  606. <GradientStop Color="#FFE2E2E2" Offset="1"/>
  607. <GradientStop Color="#FEFFFFFF" Offset="0.55"/>
  608. <GradientStop Color="#FFEFEFEF" Offset="0.75"/>
  609. </LinearGradientBrush>
  610. </Rectangle.Fill>
  611. </Rectangle>
  612. <Rectangle x:Name="BG_Status" Margin="9,19" Visibility="{Binding BiasRfPowerOnChamberVisibility}">
  613. <Rectangle.Style>
  614. <Style>
  615. <Setter Property="Rectangle.Fill" Value="{DynamicResource Chamber_BD}"/>
  616. <Style.Triggers>
  617. <DataTrigger Binding="{Binding ShowTitle,RelativeSource={RelativeSource FindAncestor, AncestorType={x:Type UserControl}}}" Value="False">
  618. <Setter Property="Rectangle.Fill" Value="#FFFF9292"/>
  619. </DataTrigger>
  620. </Style.Triggers>
  621. </Style>
  622. </Rectangle.Style>
  623. </Rectangle>
  624. <ctrl:Slot ViewType="Front" HorizontalAlignment="Center" VerticalAlignment="Top" Margin="0,4,0,0">
  625. </ctrl:Slot>
  626. <Rectangle Stroke="#FF747474" Height="11" VerticalAlignment="Bottom" Margin="12,0,12,8">
  627. <Rectangle.Fill>
  628. <LinearGradientBrush EndPoint="0.243,1" StartPoint="0.757,0">
  629. <GradientStop Color="#FFE0DEDE" Offset="0"/>
  630. <GradientStop Color="#FFE2E2E2" Offset="1"/>
  631. <GradientStop Color="#FEFFFFFF" Offset="0.55"/>
  632. <GradientStop Color="#FFEFEFEF" Offset="0.75"/>
  633. </LinearGradientBrush>
  634. </Rectangle.Fill>
  635. </Rectangle>
  636. <Grid x:Name="Cover" Width="180" Height="18" HorizontalAlignment="Left" VerticalAlignment="Top" Margin="30,2,0,0" RenderTransformOrigin="1,0.4444">
  637. <Grid.RenderTransform>
  638. <TransformGroup>
  639. <ScaleTransform/>
  640. <SkewTransform/>
  641. <RotateTransform/>
  642. <TranslateTransform/>
  643. </TransformGroup>
  644. </Grid.RenderTransform>
  645. <Grid.Resources>
  646. <Storyboard x:Key="CoverOpen">
  647. <DoubleAnimationUsingKeyFrames Storyboard.TargetProperty="(UIElement.RenderTransform).(TransformGroup.Children)[2].(RotateTransform.Angle)">
  648. <EasingDoubleKeyFrame KeyTime="0" Value="0"/>
  649. <EasingDoubleKeyFrame KeyTime="0:0:0.5" Value="45"/>
  650. </DoubleAnimationUsingKeyFrames>
  651. </Storyboard>
  652. <Storyboard x:Key="CoverClose">
  653. <DoubleAnimationUsingKeyFrames Storyboard.TargetProperty="(UIElement.RenderTransform).(TransformGroup.Children)[2].(RotateTransform.Angle)">
  654. <EasingDoubleKeyFrame KeyTime="0" Value="45"/>
  655. <EasingDoubleKeyFrame KeyTime="0:0:0.5" Value="0"/>
  656. </DoubleAnimationUsingKeyFrames>
  657. </Storyboard>
  658. </Grid.Resources>
  659. <Grid.Style>
  660. <Style>
  661. <Style.Triggers>
  662. <DataTrigger Binding="{Binding IsLidOpen}" Value="true">
  663. <DataTrigger.EnterActions>
  664. <BeginStoryboard Storyboard="{StaticResource CoverOpen}"/>
  665. </DataTrigger.EnterActions>
  666. <DataTrigger.ExitActions>
  667. <BeginStoryboard Storyboard="{StaticResource CoverClose}"/>
  668. </DataTrigger.ExitActions>
  669. </DataTrigger>
  670. </Style.Triggers>
  671. </Style>
  672. </Grid.Style>
  673. <Rectangle Grid.Row="0" HorizontalAlignment="Center" VerticalAlignment="Bottom" Fill="{DynamicResource Lid_BG}" Stroke="{DynamicResource Lid_BD}" Width="172" Height="12"/>
  674. <Rectangle Grid.Row="0" HorizontalAlignment="Center" VerticalAlignment="Top" Fill="{DynamicResource Lid_BG}" Stroke="{DynamicResource Lid_BD}" Width="180" Height="8"/>
  675. <Line X1="35" Y1="-80" X2="120" Y2="-90" Stroke="#B87333" StrokeThickness="5"/>
  676. <Line X1="35" Y1="-60" X2="145" Y2="-70" Stroke="#B87333" StrokeThickness="5"/>
  677. <Line X1="35" Y1="-40" X2="145" Y2="-50" Stroke="#B87333" StrokeThickness="5"/>
  678. <Line X1="35" Y1="-20" X2="145" Y2="-30" Stroke="#B87333" StrokeThickness="5"/>
  679. <Rectangle Stroke="DimGray" Fill="WhiteSmoke" Margin="130,-101,42,0" Width="8" VerticalAlignment="Top" Height="102" />
  680. <Rectangle Stroke="DimGray" Fill="WhiteSmoke" Margin="42,-101,130,0" Width="8" VerticalAlignment="Top" Height="102" />
  681. <Rectangle Fill="DimGray" Margin="42,-108,42,0" VerticalAlignment="Top" Height="8" />
  682. <Rectangle Fill="White" Margin="50,-101,50,0" Width="80" Height="118" />
  683. <Rectangle x:Name="BG_Status1" Fill="{DynamicResource Chamber_BD}" Margin="50,-101,50,0" Width="80" Height="118" Visibility="{Binding RfPowerOnChamberVisibility}" />
  684. <Rectangle Stroke="#FF000000" Width="80" Height="10" Margin="0,8,0,0" StrokeThickness="1" StrokeDashArray="4 2" SnapsToDevicePixels="True"/>
  685. <Rectangle Stroke="#FF000000" Width="80" Height="9" Margin="0,-10,0,0" StrokeThickness="1" StrokeDashArray="4 2" SnapsToDevicePixels="True"/>
  686. <Line X1="35" Y1="-40" X2="145" Y2="-30" Stroke="#B87333" StrokeThickness="5"/>
  687. <Line X1="35" Y1="-60" X2="145" Y2="-50" Stroke="#B87333" StrokeThickness="5"/>
  688. <Line X1="35" Y1="-80" X2="145" Y2="-70" Stroke="#B87333" StrokeThickness="5"/>
  689. </Grid>
  690. <Grid Grid.RowSpan="2" Width="160" Height="167" VerticalAlignment="Bottom" Margin="0,0,0,2">
  691. <Rectangle Height="12" Stroke="Gray" VerticalAlignment="Top" Width="150" Margin="0,98,0,0">
  692. <Rectangle.Fill>
  693. <LinearGradientBrush EndPoint="0.5,1" StartPoint="0.5,0">
  694. <GradientStop Color="#FFABABAB" Offset="0"/>
  695. <GradientStop Color="#FFDADADA" Offset="1"/>
  696. </LinearGradientBrush>
  697. </Rectangle.Fill>
  698. </Rectangle>
  699. <Rectangle Height="12" Margin="0,109,0,0" Stroke="Gray" VerticalAlignment="Top" Width="160">
  700. <Rectangle.Fill>
  701. <LinearGradientBrush EndPoint="0.5,1" StartPoint="0.5,0">
  702. <GradientStop Color="#FFABABAB" Offset="0"/>
  703. <GradientStop Color="#FFDADADA" Offset="1"/>
  704. </LinearGradientBrush>
  705. </Rectangle.Fill>
  706. </Rectangle>
  707. <!--4寸 guide pin--><!--
  708. <Grid x:Name="Bottom_LiftPin" Height="75" VerticalAlignment="Bottom" Margin="0,0,0,0" Visibility="{Binding Path=IsMidPinVisible, Converter={StaticResource bool2VisibilityConvert}}">
  709. <Grid.Resources>
  710. <Storyboard x:Key="BottomPinUp">
  711. <ThicknessAnimationUsingKeyFrames Storyboard.TargetProperty="(FrameworkElement.Margin)" >
  712. <EasingThicknessKeyFrame KeyTime="0" Value="0,0,0,0"/>
  713. <EasingThicknessKeyFrame KeyTime="0:0:0.5" Value="0,0,0,15"/>
  714. </ThicknessAnimationUsingKeyFrames>
  715. </Storyboard>
  716. <Storyboard x:Key="BottomPinDown">
  717. <ThicknessAnimationUsingKeyFrames Storyboard.TargetProperty="(FrameworkElement.Margin)" >
  718. <EasingThicknessKeyFrame KeyTime="0" Value="0,0,0,15"/>
  719. <EasingThicknessKeyFrame KeyTime="0:0:0.5" Value="0,0,0,0"/>
  720. </ThicknessAnimationUsingKeyFrames>
  721. </Storyboard>
  722. </Grid.Resources>
  723. <Grid.Style>
  724. <Style>
  725. <Style.Triggers>
  726. <DataTrigger Binding="{Binding IsLowerPinUp}" Value="true">
  727. <DataTrigger.EnterActions>
  728. <BeginStoryboard Storyboard="{StaticResource BottomPinUp}"/>
  729. </DataTrigger.EnterActions>
  730. <DataTrigger.ExitActions>
  731. <BeginStoryboard Storyboard="{StaticResource BottomPinDown}"/>
  732. </DataTrigger.ExitActions>
  733. </DataTrigger>
  734. </Style.Triggers>
  735. </Style>
  736. </Grid.Style>
  737. <Rectangle HorizontalAlignment="Left" Fill="{DynamicResource Lid_BG1}" Stroke="{DynamicResource Lid_BD}" Width="8" Margin="10,6,0,4"/>
  738. <Rectangle HorizontalAlignment="Right" Fill="{DynamicResource Lid_BG1}" Stroke="{DynamicResource Lid_BD}" Width="8" Margin="0,6,10,4"/>
  739. <Rectangle Stroke="{DynamicResource Lid_BD}" Fill="{DynamicResource Lid_BG1}" StrokeThickness="1" VerticalAlignment="Bottom" Height="8" Margin="5,0"/>
  740. </Grid>-->
  741. <!--3寸 guide pin-->
  742. <Grid x:Name="Middle_LiftPin" Width="120" Height="63" VerticalAlignment="Bottom" Margin="0,0,0,12">
  743. <Grid.Resources>
  744. <Storyboard x:Key="MidPinUp">
  745. <ThicknessAnimationUsingKeyFrames Storyboard.TargetProperty="(FrameworkElement.Margin)" >
  746. <EasingThicknessKeyFrame KeyTime="0:0:0.5" Value="0,0,0,36"/>
  747. </ThicknessAnimationUsingKeyFrames>
  748. </Storyboard>
  749. <Storyboard x:Key="MidPinMiddle">
  750. <ThicknessAnimationUsingKeyFrames Storyboard.TargetProperty="(FrameworkElement.Margin)" >
  751. <EasingThicknessKeyFrame KeyTime="0:0:0.5" Value="0,0,0,27"/>
  752. </ThicknessAnimationUsingKeyFrames>
  753. </Storyboard>
  754. <Storyboard x:Key="MidPinDown">
  755. <ThicknessAnimationUsingKeyFrames Storyboard.TargetProperty="(FrameworkElement.Margin)" >
  756. <EasingThicknessKeyFrame KeyTime="0:0:0.5" Value="0,0,0,19"/>
  757. </ThicknessAnimationUsingKeyFrames>
  758. </Storyboard>
  759. <Storyboard x:Key="MidPinHome">
  760. <ThicknessAnimationUsingKeyFrames Storyboard.TargetProperty="(FrameworkElement.Margin)" >
  761. <EasingThicknessKeyFrame KeyTime="0:0:0.5" Value="0,0,0,12"/>
  762. </ThicknessAnimationUsingKeyFrames>
  763. </Storyboard>
  764. </Grid.Resources>
  765. <Grid.Style>
  766. <Style>
  767. <Style.Triggers>
  768. <DataTrigger Binding="{Binding PinPosition}" Value="3">
  769. <DataTrigger.EnterActions>
  770. <BeginStoryboard x:Name="MidPinUp" Storyboard="{StaticResource MidPinUp}"/>
  771. </DataTrigger.EnterActions>
  772. <DataTrigger.ExitActions>
  773. <StopStoryboard BeginStoryboardName="MidPinUp"/>
  774. </DataTrigger.ExitActions>
  775. </DataTrigger>
  776. <DataTrigger Binding="{Binding PinPosition}" Value="2">
  777. <DataTrigger.EnterActions>
  778. <BeginStoryboard x:Name="MidPinMiddle" Storyboard="{StaticResource MidPinMiddle}"/>
  779. </DataTrigger.EnterActions>
  780. <DataTrigger.ExitActions>
  781. <StopStoryboard BeginStoryboardName="MidPinMiddle"/>
  782. </DataTrigger.ExitActions>
  783. </DataTrigger>
  784. <DataTrigger Binding="{Binding PinPosition}" Value="1">
  785. <DataTrigger.EnterActions>
  786. <BeginStoryboard x:Name="MidPinDown" Storyboard="{StaticResource MidPinDown}"/>
  787. </DataTrigger.EnterActions>
  788. <DataTrigger.ExitActions>
  789. <StopStoryboard BeginStoryboardName="MidPinDown"/>
  790. </DataTrigger.ExitActions>
  791. </DataTrigger>
  792. <DataTrigger Binding="{Binding PinPosition}" Value="0">
  793. <DataTrigger.EnterActions>
  794. <BeginStoryboard x:Name="MidPinHome" Storyboard="{StaticResource MidPinHome}"/>
  795. </DataTrigger.EnterActions>
  796. <DataTrigger.ExitActions>
  797. <StopStoryboard BeginStoryboardName="MidPinHome"/>
  798. </DataTrigger.ExitActions>
  799. </DataTrigger>
  800. </Style.Triggers>
  801. </Style>
  802. </Grid.Style>
  803. <Rectangle HorizontalAlignment="Left" Fill="{DynamicResource Lid_BG2}" Stroke="{DynamicResource Lid_BD}" Width="8" Margin="10,6,0,4"/>
  804. <Rectangle HorizontalAlignment="Right" Fill="{DynamicResource Lid_BG2}" Stroke="{DynamicResource Lid_BD}" Width="8" Margin="0,6,10,4"/>
  805. <Rectangle Stroke="{DynamicResource Lid_BD}" Fill="{DynamicResource Lid_BG2}" StrokeThickness="1" VerticalAlignment="Bottom" Height="8" Margin="5,0"/>
  806. <Rectangle Fill="{DynamicResource idleWafer}" HorizontalAlignment="Center" Margin="0,-2,0,0" Width="{Binding WaferLength}" Height="8" VerticalAlignment="Top"/>
  807. <!--<parts:Wafer WaferStyle="Rect" WaferItem="{Binding PMWafer}" Station ="{Binding Station}" Slot="0" Width="130" VerticalAlignment="Top" >
  808. <parts:Wafer.Style>
  809. <Style>
  810. <Setter Property="parts:Wafer.Visibility" Value="Collapsed"/>
  811. <Style.Triggers>
  812. <DataTrigger Binding="{Binding PMWaferType}" Value="Wafer8">
  813. <Setter Property="parts:Wafer.Visibility" Value="Visible"/>
  814. </DataTrigger>
  815. </Style.Triggers>
  816. </Style>
  817. </parts:Wafer.Style>
  818. </parts:Wafer>-->
  819. <ctrl:Slot ViewType="Front" x:Name="EFEMLower" DataContext="{Binding UnitData.WaferManager.Wafers[0],RelativeSource={RelativeSource FindAncestor, AncestorType={x:Type UserControl}}}" WaferStatus="{Binding WaferStatus}" SlotID="{Binding SlotID}" ModuleID="{Binding ModuleID}" SourceName="{Binding SourceName}" HorizontalAlignment="Center" VerticalAlignment="Top" Margin="15,-5,15,0">
  820. <i:Interaction.Triggers>
  821. <i:EventTrigger EventName="SlotMouseButtonDown">
  822. <cal:ActionMessage MethodName="OnMouseUp">
  823. <cal:Parameter Value="$source" />
  824. <cal:Parameter Value="$eventargs" />
  825. </cal:ActionMessage>
  826. </i:EventTrigger>
  827. <i:EventTrigger EventName="WaferTransferStarted">
  828. <cal:ActionMessage MethodName="OnWaferTransfer">
  829. <cal:Parameter Value="$eventargs" />
  830. </cal:ActionMessage>
  831. </i:EventTrigger>
  832. </i:Interaction.Triggers>
  833. </ctrl:Slot>
  834. </Grid>
  835. <!--lift pin-->
  836. <!--<Grid x:Name="Top_LiftPin" Height="51" VerticalAlignment="Bottom" Margin="0,0,0,28" Visibility="{Binding Path=IsLiftPinVisible, Converter={StaticResource bool2VisibilityConvert}}">
  837. <Grid.Resources>
  838. <Storyboard x:Key="TopPinUp">
  839. <ThicknessAnimationUsingKeyFrames Storyboard.TargetProperty="(FrameworkElement.Margin)" >
  840. <EasingThicknessKeyFrame KeyTime="0" Value="0,0,0,28"/>
  841. <EasingThicknessKeyFrame KeyTime="0:0:0.5" Value="0,0,0,54"/>
  842. </ThicknessAnimationUsingKeyFrames>
  843. </Storyboard>
  844. <Storyboard x:Key="TopPinDown">
  845. <ThicknessAnimationUsingKeyFrames Storyboard.TargetProperty="(FrameworkElement.Margin)" >
  846. <EasingThicknessKeyFrame KeyTime="0" Value="0,0,0,54"/>
  847. <EasingThicknessKeyFrame KeyTime="0:0:0.5" Value="0,0,0,28"/>
  848. </ThicknessAnimationUsingKeyFrames>
  849. </Storyboard>
  850. </Grid.Resources>
  851. <Grid.Style>
  852. <Style>
  853. <Style.Triggers>
  854. <DataTrigger Binding="{Binding IsLiftPinUp}" Value="true">
  855. <DataTrigger.EnterActions>
  856. <BeginStoryboard Storyboard="{StaticResource TopPinUp}"/>
  857. </DataTrigger.EnterActions>
  858. <DataTrigger.ExitActions>
  859. <BeginStoryboard Storyboard="{StaticResource TopPinDown}"/>
  860. </DataTrigger.ExitActions>
  861. </DataTrigger>
  862. </Style.Triggers>
  863. </Style>
  864. </Grid.Style>
  865. <Rectangle HorizontalAlignment="Left" Fill="{DynamicResource Lid_BG3}" Stroke="{DynamicResource Lid_BD}" Width="8" Margin="48,10,0,4"/>
  866. <Rectangle HorizontalAlignment="Right" Fill="{DynamicResource Lid_BG3}" Stroke="{DynamicResource Lid_BD}" Width="8" Margin="0,10,48,4"/>
  867. <Rectangle Stroke="{DynamicResource Lid_BD}" Fill="{DynamicResource Lid_BG3}" StrokeThickness="1" VerticalAlignment="Bottom" Height="8" Margin="5,0" Width="64" />
  868. <Rectangle Fill="{DynamicResource idleWafer}" HorizontalAlignment="Center" Margin="-100,0" Width="{Binding WaferLength}" Height="10" VerticalAlignment="Top"/>
  869. <TextBlock Text="{Binding WaferSize}" HorizontalAlignment="Center" TextAlignment="Center" Margin="-100,0" Width="{Binding WaferLength}" Height="15" VerticalAlignment="Top"></TextBlock>
  870. </Grid>-->
  871. <!--左边slit door-->
  872. <Grid x:Name="Slit_valve" Margin="-41,-10,191,29" >
  873. <Rectangle x:Name="SlitValve_Top" Style="{StaticResource SlitValve_Animation}" Fill="DimGray" Width="8" VerticalAlignment="Top" Height="75" />
  874. <Rectangle x:Name="SlitValve_Bottom" Style="{StaticResource SlitValve_Animation}" Fill="DimGray" Width="8" VerticalAlignment="Bottom" Height="75" />
  875. </Grid>
  876. <!--slit door右边-->
  877. <Grid Margin="190,-10,-40,29" >
  878. <Rectangle Fill="DimGray" Width="8" VerticalAlignment="Top" Height="75" />
  879. <Rectangle Fill="DimGray" Width="8" VerticalAlignment="Bottom" Height="75" />
  880. </Grid>
  881. </Grid>
  882. </Grid>
  883. </Canvas>
  884. <!--lift pin / guide pin control grid-->
  885. <Grid Width="280" Grid.ColumnSpan="3" HorizontalAlignment="Center" VerticalAlignment="Top" Canvas.Left="200" Canvas.Top="585">
  886. <Grid.RowDefinitions>
  887. <RowDefinition Height="24"/>
  888. <RowDefinition Height="32"/>
  889. <RowDefinition Height="{Binding SmallPinHeight}"/>
  890. <RowDefinition Height="{Binding MediumPinHeight}"/>
  891. <RowDefinition />
  892. </Grid.RowDefinitions>
  893. <Grid.ColumnDefinitions>
  894. <ColumnDefinition Width="80"/>
  895. <ColumnDefinition />
  896. </Grid.ColumnDefinitions>
  897. <Border Grid.ColumnSpan="2" BorderBrush="{DynamicResource Table_BD}" BorderThickness="1" Background="{DynamicResource Table_BG_Title}" Grid.Row="0" Grid.Column="0" Padding="5,1">
  898. <TextBlock Text="Pin" TextWrapping="Wrap" TextAlignment="Center" Foreground="{DynamicResource FG_Black}" FontSize="12" FontFamily="Arial" VerticalAlignment="Center"/>
  899. </Border>
  900. <!--lift pin button-->
  901. <Border BorderBrush="{DynamicResource Table_BD}" BorderThickness="1,0,1,1" Background="{DynamicResource Table_BG_Content}" Grid.Row="1" Grid.ColumnSpan="2" Padding="5,1">
  902. <StackPanel Orientation="Horizontal" HorizontalAlignment="Center" >
  903. <!--lift pin up-->
  904. <deviceControl:AITSensor Margin="5,0,5,0" GreenColor="True" LightOnValue="{Binding IsLiftPinUp}" />
  905. <Button Content="Lift Pin Up" IsEnabled="{Binding EnableLiftPinUp}" Width="100" Height="25" Margin="0">
  906. <i:Interaction.Triggers>
  907. <i:EventTrigger EventName="Click">
  908. <cal:ActionMessage MethodName="MoveLiftPinSetState">
  909. <cal:Parameter Value="Up"></cal:Parameter>
  910. </cal:ActionMessage>
  911. </i:EventTrigger>
  912. </i:Interaction.Triggers>
  913. </Button>
  914. <!--lift pin down-->
  915. <deviceControl:AITSensor Margin="15,0,5,0" GreenColor="True" LightOnValue="{Binding IsLiftPinDown}" />
  916. <Button Content="Lift Pin Down" IsEnabled="{Binding EnableLiftPinDown}" Width="100" Height="25" Margin="0">
  917. <i:Interaction.Triggers>
  918. <i:EventTrigger EventName="Click">
  919. <cal:ActionMessage MethodName="MoveLiftPinSetState">
  920. <cal:Parameter Value="Down"></cal:Parameter>
  921. </cal:ActionMessage>
  922. </i:EventTrigger>
  923. </i:Interaction.Triggers>
  924. </Button>
  925. </StackPanel>
  926. </Border>
  927. <!--3' guide pin button-->
  928. <Border BorderBrush="{DynamicResource Table_BD}" BorderThickness="1,0,1,1" Background="{DynamicResource Table_BG_Content}" Grid.Row="2" Grid.ColumnSpan="2" Padding="5,1">
  929. <StackPanel Orientation="Horizontal" HorizontalAlignment="Center" >
  930. <deviceControl:AITSensor Margin="5,0,5,0" GreenColor="True" LightOnValue="{Binding IsLiftPinHome}"></deviceControl:AITSensor>
  931. <Button Content="Home" IsEnabled="{Binding EnableLiftPinHome}" Width="100" Height="25" Margin="0">
  932. <i:Interaction.Triggers>
  933. <i:EventTrigger EventName="Click">
  934. <cal:ActionMessage MethodName="MoveLiftPinHome">
  935. <cal:Parameter Value="Home"></cal:Parameter>
  936. </cal:ActionMessage>
  937. </i:EventTrigger>
  938. </i:Interaction.Triggers>
  939. </Button>
  940. <deviceControl:AITSensor Margin="15,0,5,0" GreenColor="True" LightOnValue="{Binding IsLiftPinMiddle}"></deviceControl:AITSensor>
  941. <Button Content="Lift Pin Middle" IsEnabled="{Binding EnableLiftPinMiddle}" Width="100" Height="25" Margin="0">
  942. <i:Interaction.Triggers>
  943. <i:EventTrigger EventName="Click">
  944. <cal:ActionMessage MethodName="MoveLiftPinSetState">
  945. <cal:Parameter Value="Middle"></cal:Parameter>
  946. </cal:ActionMessage>
  947. </i:EventTrigger>
  948. </i:Interaction.Triggers>
  949. </Button>
  950. </StackPanel>
  951. </Border>
  952. </Grid>
  953. <Grid Width="280" Grid.ColumnSpan="3" HorizontalAlignment="Center" VerticalAlignment="Top" Canvas.Left="200" Canvas.Top="670" Visibility="Collapsed">
  954. <Grid.RowDefinitions>
  955. <RowDefinition Height="24"/>
  956. <RowDefinition Height="32"/>
  957. <RowDefinition Height="32"/>
  958. </Grid.RowDefinitions>
  959. <Grid.ColumnDefinitions>
  960. <ColumnDefinition Width="140" />
  961. <ColumnDefinition />
  962. </Grid.ColumnDefinitions>
  963. <Border Grid.ColumnSpan="2" BorderBrush="{DynamicResource Table_BD}" BorderThickness="1" Background="{DynamicResource Table_BG_Title}" Grid.Row="0" Grid.Column="0" Padding="5,1">
  964. <TextBlock Text="Servo" TextWrapping="Wrap" TextAlignment="Center" Foreground="{DynamicResource FG_Black}" FontSize="12" FontFamily="Arial" VerticalAlignment="Center"/>
  965. </Border>
  966. <Border BorderBrush="{DynamicResource Table_BD}" BorderThickness="1,0,1,1" Background="{DynamicResource Table_BG_Content}" Grid.Row="1" Grid.ColumnSpan="1" Padding="5,1">
  967. <StackPanel Orientation="Horizontal" HorizontalAlignment="Center" >
  968. <deviceControl:AITSensor Margin="5,0,5,0" GreenColor="True" LightOnValue="{Binding ManualStopState}"></deviceControl:AITSensor>
  969. <Button Content="Stop" IsEnabled="{Binding EnableLiftPinManualMove}" Width="100" Height="25" Margin="0">
  970. <i:Interaction.Triggers>
  971. <i:EventTrigger EventName="Click">
  972. <cal:ActionMessage MethodName="TriStateLiftPinStop">
  973. </cal:ActionMessage>
  974. </i:EventTrigger>
  975. </i:Interaction.Triggers>
  976. </Button>
  977. </StackPanel>
  978. </Border>
  979. <Border BorderBrush="{DynamicResource Table_BD}" BorderThickness="0,0,1,1" Background="{DynamicResource Table_BG_Content}" Grid.Row="1" Grid.Column="1" Grid.ColumnSpan="1" Padding="5,1">
  980. <StackPanel Orientation="Horizontal" HorizontalAlignment="Center" >
  981. <TextBlock Text="Position:" VerticalAlignment="Center" HorizontalAlignment="Left" Margin="5,7,0,7" Width="55" ></TextBlock>
  982. <TextBlock Text="{Binding TriStateLiftPinCurrentValue}" VerticalAlignment="Center" HorizontalAlignment="Left" Margin="5,7,0,7" Width="55" ></TextBlock>
  983. </StackPanel>
  984. </Border>
  985. <Border BorderBrush="{DynamicResource Table_BD}" BorderThickness="1,0,1,1" Background="{DynamicResource Table_BG_Content}" Grid.Row="2" Grid.ColumnSpan="2" Padding="5,1">
  986. <StackPanel Orientation="Horizontal" HorizontalAlignment="Center" >
  987. <deviceControl:AITSensor Margin="5,0,5,0" GreenColor="True" LightOnValue="{Binding ManualUpState}"></deviceControl:AITSensor>
  988. <Button Content="Up" IsEnabled="{Binding EnableLiftPinManualMove}" Width="100" Height="25" Margin="0">
  989. <i:Interaction.Triggers>
  990. <i:EventTrigger EventName="Click">
  991. <cal:ActionMessage MethodName="TriStateLiftPinUp">
  992. </cal:ActionMessage>
  993. </i:EventTrigger>
  994. </i:Interaction.Triggers>
  995. </Button>
  996. <deviceControl:AITSensor Margin="15,0,5,0" GreenColor="True" LightOnValue="{Binding ManualDownState}"></deviceControl:AITSensor>
  997. <Button Content="Down" IsEnabled="{Binding EnableLiftPinManualMove}" Width="100" Height="25" Margin="0">
  998. <i:Interaction.Triggers>
  999. <i:EventTrigger EventName="Click">
  1000. <cal:ActionMessage MethodName="TriStateLiftPinDown">
  1001. </cal:ActionMessage>
  1002. </i:EventTrigger>
  1003. </i:Interaction.Triggers>
  1004. </Button>
  1005. </StackPanel>
  1006. </Border>
  1007. </Grid>
  1008. </Canvas>
  1009. <!--参数 Grid 那一列-->
  1010. <Grid Grid.Column="1">
  1011. <Grid.RowDefinitions>
  1012. <RowDefinition Height="110"></RowDefinition>
  1013. <RowDefinition Height="600"></RowDefinition>
  1014. </Grid.RowDefinitions>
  1015. <!--选择recipe,开始recipe-->
  1016. <Grid Grid.Row="0" VerticalAlignment="Top" Margin="0,10,0,0">
  1017. <Grid.RowDefinitions>
  1018. <RowDefinition Height="35"/>
  1019. <RowDefinition Height="Auto"/>
  1020. <RowDefinition Height="35"/>
  1021. </Grid.RowDefinitions>
  1022. <Grid Grid.Row="0">
  1023. <Grid.ColumnDefinitions>
  1024. <ColumnDefinition Width="140"/>
  1025. <ColumnDefinition />
  1026. </Grid.ColumnDefinitions>
  1027. <Border BorderBrush="{DynamicResource Table_BD}" BorderThickness="1,1,1,1" Background="{DynamicResource Table_BG_Title}" Grid.Row="1" Padding="5,1">
  1028. <Button Content="Choose Recipe" IsEnabled="{Binding IsEnableSelectRecipe}" Width="120" Height="25">
  1029. <i:Interaction.Triggers>
  1030. <i:EventTrigger EventName="Click">
  1031. <cal:ActionMessage MethodName="SelectRecipe"/>
  1032. </i:EventTrigger>
  1033. </i:Interaction.Triggers>
  1034. </Button>
  1035. </Border>
  1036. <Border BorderBrush="{DynamicResource Table_BD}" BorderThickness="0,1,1,1" Background="{DynamicResource Table_BG_Content}" Grid.Row="1" Grid.Column="1" Padding="5,1">
  1037. <TextBlock Text="{Binding SelectedRecipeName}" VerticalAlignment="Center" />
  1038. </Border>
  1039. </Grid>
  1040. <Border BorderBrush="{DynamicResource Table_BD}" BorderThickness="1,0,1,1" Background="{DynamicResource Table_BG_Content}" Grid.Row="1" Grid.Column="1" Padding="5,1">
  1041. <StackPanel Orientation="Horizontal" Grid.Row="1" HorizontalAlignment="Center" VerticalAlignment="Center" Margin="0,5">
  1042. <Button Content="Start" IsEnabled="{Binding IsEnableStartRecipe}" Width="80" Height="25">
  1043. <i:Interaction.Triggers>
  1044. <i:EventTrigger EventName="Click">
  1045. <cal:ActionMessage MethodName="Start"/>
  1046. </i:EventTrigger>
  1047. </i:Interaction.Triggers>
  1048. </Button>
  1049. <Button Content="Next Step" IsEnabled="{Binding IsEnableNextStep}" Width="80" Height="25" Margin="30,0">
  1050. <i:Interaction.Triggers>
  1051. <i:EventTrigger EventName="Click">
  1052. <cal:ActionMessage MethodName="NextStep"/>
  1053. </i:EventTrigger>
  1054. </i:Interaction.Triggers>
  1055. </Button>
  1056. <Button Content="Stop" IsEnabled="{Binding IsEnableStopRecipe}" Width="80" Height="25">
  1057. <i:Interaction.Triggers>
  1058. <i:EventTrigger EventName="Click">
  1059. <cal:ActionMessage MethodName="Stop"/>
  1060. </i:EventTrigger>
  1061. </i:Interaction.Triggers>
  1062. </Button>
  1063. </StackPanel>
  1064. </Border>
  1065. <Grid Grid.Row="2" Margin="0,0,0,10" Visibility="Hidden">
  1066. <Grid.ColumnDefinitions>
  1067. <ColumnDefinition Width="120"/>
  1068. <ColumnDefinition />
  1069. </Grid.ColumnDefinitions>
  1070. <Border BorderBrush="{DynamicResource Table_BD}" BorderThickness="1" Background="{DynamicResource Table_BG_Title}" Grid.Row="0" Padding="5,1" Height="24">
  1071. <TextBlock Text="Status" TextWrapping="Wrap" Foreground="{DynamicResource FG_Black}" FontSize="12" FontFamily="Arial" HorizontalAlignment="Left" VerticalAlignment="Center"/>
  1072. </Border>
  1073. <Border BorderBrush="{DynamicResource Table_BD}" BorderThickness="0,1,1,1" Background="{DynamicResource Table_BG_Content}" Grid.Row="0" Grid.Column="1" Padding="5,1" Height="24">
  1074. <TextBlock Text="Status" TextWrapping="Wrap" Foreground="{DynamicResource FG_Black}" FontSize="12" FontFamily="Arial" HorizontalAlignment="Left" VerticalAlignment="Center"/>
  1075. </Border>
  1076. </Grid>
  1077. </Grid>
  1078. <!--recipe 参数列表-->
  1079. <DataGrid Grid.Row="1" AlternationCount="2" HorizontalAlignment="Left" CanUserAddRows="False"
  1080. AutoGenerateColumns="False" RowHeaderWidth="0" CanUserResizeColumns="False" FontSize="14"
  1081. VirtualizingPanel.IsVirtualizing="True" VirtualizingPanel.VirtualizationMode="Recycling"
  1082. ItemsSource="{Binding PMParameters}" Margin="0,5,0,0" Width="452">
  1083. <DataGrid.Columns>
  1084. <!--参数名字-->
  1085. <DataGridTemplateColumn Header="Parameter" Width="200">
  1086. <DataGridTemplateColumn.CellTemplate>
  1087. <DataTemplate>
  1088. <TextBlock Text="{Binding Display}" Margin="5,0" FontFamily="Arial" FontSize="14"
  1089. Foreground="{DynamicResource FG_Black}" HorizontalAlignment="Left" VerticalAlignment="Center" >
  1090. </TextBlock>
  1091. </DataTemplate>
  1092. </DataGridTemplateColumn.CellTemplate>
  1093. </DataGridTemplateColumn>
  1094. <!--参数 Setpoint & Feedback-->
  1095. <DataGridTemplateColumn Header="Parameter" Width="250" CellTemplateSelector="{StaticResource SPSelector}">
  1096. <DataGridTemplateColumn.HeaderTemplate>
  1097. <DataTemplate>
  1098. <Grid>
  1099. <Grid.ColumnDefinitions>
  1100. <ColumnDefinition Width="125"></ColumnDefinition>
  1101. <ColumnDefinition Width="125"></ColumnDefinition>
  1102. </Grid.ColumnDefinitions>
  1103. <Border BorderBrush="{DynamicResource Table_BD}" BorderThickness="0,0,1,0" Grid.Row="0" Padding="0">
  1104. <TextBlock Text="Feedback" HorizontalAlignment="Center" VerticalAlignment="Center" FontSize="14" />
  1105. </Border>
  1106. <TextBlock Text="Setpoint" Grid.Column="1" HorizontalAlignment="Center" VerticalAlignment="Center" FontSize="14" />
  1107. </Grid>
  1108. </DataTemplate>
  1109. </DataGridTemplateColumn.HeaderTemplate>
  1110. </DataGridTemplateColumn>
  1111. </DataGrid.Columns>
  1112. </DataGrid>
  1113. </Grid>
  1114. <Grid Grid.Column="2" Grid.RowSpan="2" Margin="10,0,0,0">
  1115. <Grid.RowDefinitions>
  1116. <RowDefinition Height="30"/>
  1117. <RowDefinition Height="Auto"/>
  1118. <RowDefinition Height="30"/>
  1119. <RowDefinition Height="Auto"/>
  1120. <RowDefinition Height="Auto"/>
  1121. <RowDefinition />
  1122. </Grid.RowDefinitions>
  1123. <Border Grid.Row="0" BorderBrush="{DynamicResource Table_BD}" CornerRadius="5,5,0,0" BorderThickness="1" Background="{DynamicResource Table_BG_FirstTitle}" Padding="5,1">
  1124. <StackPanel Orientation="Horizontal" HorizontalAlignment="Left" VerticalAlignment="Center">
  1125. <Path Data="M0,0 L5,0 5,5 z" Fill="White" HorizontalAlignment="Left" Grid.Row="1" RenderTransformOrigin="0.5,0.5" Stretch="Fill" Width="5" Height="5">
  1126. <Path.RenderTransform>
  1127. <TransformGroup>
  1128. <ScaleTransform/>
  1129. <SkewTransform/>
  1130. <RotateTransform Angle="45"/>
  1131. <TranslateTransform/>
  1132. </TransformGroup>
  1133. </Path.RenderTransform>
  1134. </Path>
  1135. <TextBlock Margin="5,0,0,0" Text="Working Mode" FontFamily="Arial" FontSize="14" Foreground="{DynamicResource FG_White}" HorizontalAlignment="Left" VerticalAlignment="Center"/>
  1136. </StackPanel>
  1137. </Border>
  1138. <Border Grid.Row="1" BorderBrush="{DynamicResource Table_BD}" Background="{DynamicResource Table_BG_Content}" BorderThickness="1,0,1,1" Padding="5,1">
  1139. <StackPanel Orientation="Vertical">
  1140. <StackPanel Orientation="Horizontal" HorizontalAlignment="Center">
  1141. <Button Width="80" Height="25" Margin="10,0" Content="Initialize">
  1142. <i:Interaction.Triggers>
  1143. <i:EventTrigger EventName="Click">
  1144. <cal:ActionMessage MethodName="SetInit"/>
  1145. </i:EventTrigger>
  1146. </i:Interaction.Triggers>
  1147. </Button>
  1148. <Button Width="80" Height="25" Margin="10,0" Content="Abort">
  1149. <i:Interaction.Triggers>
  1150. <i:EventTrigger EventName="Click">
  1151. <cal:ActionMessage MethodName="AbortPM"/>
  1152. </i:EventTrigger>
  1153. </i:Interaction.Triggers>
  1154. </Button>
  1155. </StackPanel>
  1156. <Grid Margin="5,5,5,0">
  1157. <Grid.ColumnDefinitions>
  1158. <ColumnDefinition Width="120"/>
  1159. <ColumnDefinition />
  1160. </Grid.ColumnDefinitions>
  1161. <Border BorderBrush="{DynamicResource Table_BD}" BorderThickness="1" Background="{DynamicResource Table_BG_Title}" Grid.Row="0" Padding="5,1" Height="24">
  1162. <TextBlock Text="Operation Mode" TextWrapping="Wrap" Foreground="{DynamicResource FG_Black}" FontSize="14" FontFamily="Arial" HorizontalAlignment="Center" VerticalAlignment="Center"/>
  1163. </Border>
  1164. <Border BorderBrush="{DynamicResource Table_BD}" BorderThickness="0,1,1,1" Background="{DynamicResource Table_BG_Content}" Grid.Row="0" Grid.Column="1" Padding="5,1">
  1165. <TextBlock Text="{Binding PmOperationMode}" TextWrapping="Wrap" Foreground="{DynamicResource FG_Black}" FontSize="12" FontFamily="Arial" HorizontalAlignment="Center" VerticalAlignment="Center"/>
  1166. </Border>
  1167. </Grid>
  1168. <StackPanel Margin="0,5,0,10" Orientation="Horizontal" HorizontalAlignment="Center">
  1169. <Button Width="80" Height="25" Margin="10,0" Content="Manual" IsEnabled="{Binding IsManualButtonEnabled}" >
  1170. <i:Interaction.Triggers>
  1171. <i:EventTrigger EventName="Click">
  1172. <cal:ActionMessage MethodName="SetManual"/>
  1173. </i:EventTrigger>
  1174. </i:Interaction.Triggers>
  1175. </Button>
  1176. <Button Width="80" Height="25" Margin="10,0" Content="Auto" IsEnabled="{Binding IsAutoButtonEnabled}">
  1177. <i:Interaction.Triggers>
  1178. <i:EventTrigger EventName="Click">
  1179. <cal:ActionMessage MethodName="SetAuto"/>
  1180. </i:EventTrigger>
  1181. </i:Interaction.Triggers>
  1182. </Button>
  1183. </StackPanel>
  1184. <Grid Margin="5,5,5,0">
  1185. <Grid.ColumnDefinitions>
  1186. <ColumnDefinition Width="120"/>
  1187. <ColumnDefinition />
  1188. </Grid.ColumnDefinitions>
  1189. <Border BorderBrush="{DynamicResource Table_BD}" BorderThickness="1" Background="{DynamicResource Table_BG_Title}" Grid.Row="0" Padding="5,1" Height="24">
  1190. <TextBlock Text="Offline" TextWrapping="Wrap" Foreground="{DynamicResource FG_Black}" FontSize="14" FontFamily="Arial" HorizontalAlignment="Center" VerticalAlignment="Center"/>
  1191. </Border>
  1192. <Border BorderBrush="{DynamicResource Table_BD}" BorderThickness="0,1,1,1" Background="{Binding PMOnlineColor}" Grid.Row="0" Grid.Column="1" Padding="5,1">
  1193. <TextBlock Text="Online" TextWrapping="Wrap" Foreground="{DynamicResource FG_Black}" FontSize="15" FontFamily="Arial" HorizontalAlignment="Center" VerticalAlignment="Center"/>
  1194. </Border>
  1195. </Grid>
  1196. <StackPanel Margin="0,5,0,10" Orientation="Horizontal" HorizontalAlignment="Center">
  1197. <Button Width="80" Height="25" Margin="10,0" Content="Offline" IsEnabled="{Binding IsOfflineButtonEnabled}">
  1198. <i:Interaction.Triggers>
  1199. <i:EventTrigger EventName="Click">
  1200. <cal:ActionMessage MethodName="SetOffline"/>
  1201. </i:EventTrigger>
  1202. </i:Interaction.Triggers>
  1203. </Button>
  1204. <Button Width="80" Height="25" Margin="10,0" Content="Online" IsEnabled="{Binding IsOnlineButtonEnabled}" >
  1205. <i:Interaction.Triggers>
  1206. <i:EventTrigger EventName="Click">
  1207. <cal:ActionMessage MethodName="SetOnline"/>
  1208. </i:EventTrigger>
  1209. </i:Interaction.Triggers>
  1210. </Button>
  1211. </StackPanel>
  1212. </StackPanel>
  1213. </Border>
  1214. <Border Grid.Row="2" BorderBrush="{DynamicResource Table_BD}" BorderThickness="1,0,1,1" Background="{DynamicResource Table_BG_FirstTitle}" Padding="5,1">
  1215. <StackPanel Orientation="Horizontal" HorizontalAlignment="Left" VerticalAlignment="Center">
  1216. <Path Data="M0,0 L5,0 5,5 z" Fill="White" HorizontalAlignment="Left" Grid.Row="1" RenderTransformOrigin="0.5,0.5" Stretch="Fill" Width="5" Height="5">
  1217. <Path.RenderTransform>
  1218. <TransformGroup>
  1219. <ScaleTransform/>
  1220. <SkewTransform/>
  1221. <RotateTransform Angle="45"/>
  1222. <TranslateTransform/>
  1223. </TransformGroup>
  1224. </Path.RenderTransform>
  1225. </Path>
  1226. <TextBlock Margin="5,0,0,0" Text="Manual Operation" FontFamily="Arial" FontSize="14" Foreground="{DynamicResource FG_White}" HorizontalAlignment="Left" VerticalAlignment="Center"/>
  1227. </StackPanel>
  1228. </Border>
  1229. <Border Grid.Row="3" BorderBrush="{DynamicResource Table_BD}" Background="{DynamicResource Table_BG_Content}" BorderThickness="1,0,1,1" Padding="5,1">
  1230. <StackPanel HorizontalAlignment="Center" VerticalAlignment="Top" Margin="5,10">
  1231. <Grid>
  1232. <Grid.ColumnDefinitions>
  1233. <ColumnDefinition Width="140"/>
  1234. <ColumnDefinition Width="100"/>
  1235. </Grid.ColumnDefinitions>
  1236. <Grid.RowDefinitions>
  1237. <RowDefinition Height="24"/>
  1238. <RowDefinition Height="24"/>
  1239. <RowDefinition Height="24"/>
  1240. </Grid.RowDefinitions>
  1241. <Border BorderBrush="{DynamicResource Table_BD}" BorderThickness="1" Background="{DynamicResource Table_BG_Title}" Grid.Row="0" Padding="5,1">
  1242. <TextBlock Text="Chamber (mTorr)" TextWrapping="Wrap" Foreground="{DynamicResource FG_Black}" FontSize="12" FontFamily="Arial" VerticalAlignment="Center"/>
  1243. </Border>
  1244. <Border BorderBrush="{DynamicResource Table_BD}" BorderThickness="0,1,1,1" Background="{DynamicResource Table_BG_Content}" Grid.Row="0" Grid.Column="1" Padding="5,1">
  1245. <ctrl:TextBoxEx Text="{Binding Path=BasePressureSetPoint}" TextSaved="{Binding BasePressureSetPointSaved, Mode=TwoWay, UpdateSourceTrigger=PropertyChanged}" EditBoxMode="UnSignDecimal" VerticalAlignment="Center"/>
  1246. </Border>
  1247. <Border BorderBrush="{DynamicResource Table_BD}" BorderThickness="1" Background="{DynamicResource Table_BG_Title}" Grid.Row="1" Padding="5,1">
  1248. <TextBlock Text="Max Pumpdown time(s)" TextWrapping="Wrap" Foreground="{DynamicResource FG_Black}" FontSize="12" FontFamily="Arial" VerticalAlignment="Center"/>
  1249. </Border>
  1250. <Border BorderBrush="{DynamicResource Table_BD}" BorderThickness="0,1,1,1" Background="{DynamicResource Table_BG_Content}" Grid.Row="1" Grid.Column="1" Padding="5,1">
  1251. <ctrl:TextBoxEx Text="{Binding Path=PumpLimitSetPoint}" TextSaved="{Binding PumpLimitSetPointSaved, Mode=TwoWay, UpdateSourceTrigger=PropertyChanged}" EditBoxMode="UnSignInteger" VerticalAlignment="Center"/>
  1252. </Border>
  1253. <Border BorderBrush="{DynamicResource Table_BD}" BorderThickness="1" Background="{DynamicResource Table_BG_Title}" Grid.Row="2" Padding="5,1">
  1254. <TextBlock Text="Pumpdown time (s)" TextWrapping="Wrap" Foreground="{DynamicResource FG_Black}" FontSize="12" FontFamily="Arial" VerticalAlignment="Center"/>
  1255. </Border>
  1256. <Border BorderBrush="{DynamicResource Table_BD}" BorderThickness="0,1,1,1" Background="{DynamicResource Table_BG_Content}" Grid.Row="2" Grid.Column="1" Padding="5,1">
  1257. <TextBlock Text="{Binding Path=PumpTime}" VerticalAlignment="Center"/>
  1258. </Border>
  1259. </Grid>
  1260. <Grid>
  1261. <Grid.ColumnDefinitions>
  1262. <ColumnDefinition Width="*"/>
  1263. <ColumnDefinition Width="*"/>
  1264. </Grid.ColumnDefinitions>
  1265. <Grid.RowDefinitions>
  1266. <RowDefinition Height="50"/>
  1267. </Grid.RowDefinitions>
  1268. <Button Content="Pumpdown" Width="80" Height="25" Margin="0,10,0,0" IsEnabled="{Binding Path=IsManualMode}" Grid.Column="1"
  1269. Background="{Binding Path=PumpButtonBackground}">
  1270. <i:Interaction.Triggers>
  1271. <i:EventTrigger EventName="Click">
  1272. <cal:ActionMessage MethodName="DoPump"/>
  1273. </i:EventTrigger>
  1274. </i:Interaction.Triggers>
  1275. </Button>
  1276. <Button Content="Run Pump" Width="85" Height="25" Margin="0,10,0,0" IsEnabled="{Binding Path=IsManualMode}" Grid.Column="0"
  1277. Background="{Binding Path=PumpButtonBackground}">
  1278. <i:Interaction.Triggers>
  1279. <i:EventTrigger EventName="Click">
  1280. <cal:ActionMessage MethodName="DoStartPump"/>
  1281. </i:EventTrigger>
  1282. </i:Interaction.Triggers>
  1283. </Button>
  1284. </Grid>
  1285. </StackPanel>
  1286. </Border>
  1287. <Border Grid.Row="4" BorderBrush="{DynamicResource Table_BD}" Background="{DynamicResource Table_BG_Content}" BorderThickness="1,0,1,1" Padding="5,1">
  1288. <StackPanel Margin="0,10">
  1289. <!--流气-->
  1290. <Button Content="Gas Flow" Width="80" Height="25" Margin="0 0 0 10" IsEnabled="{Binding Path=IsManualMode}">
  1291. <i:Interaction.Triggers>
  1292. <i:EventTrigger EventName="Click">
  1293. <cal:ActionMessage MethodName="Gas"/>
  1294. </i:EventTrigger>
  1295. </i:Interaction.Triggers>
  1296. </Button>
  1297. <!--源射频-->
  1298. <Button Content="Start RF" Width="80" Height="25" Margin="0 0 0 10" IsEnabled="{Binding Path=IsRFEnabled}">
  1299. <i:Interaction.Triggers>
  1300. <i:EventTrigger EventName="Click">
  1301. <cal:ActionMessage MethodName="RF"/>
  1302. </i:EventTrigger>
  1303. </i:Interaction.Triggers>
  1304. </Button>
  1305. <!--加热基座-->
  1306. <Button Content="{Binding HeaterButtonContent}" Width="80" Height="0" Margin="0 0 0 0" IsEnabled="{Binding Path=IsHeaterButtonEnable}">
  1307. <i:Interaction.Triggers>
  1308. <i:EventTrigger EventName="Click">
  1309. <cal:ActionMessage MethodName="Heat"/>
  1310. </i:EventTrigger>
  1311. </i:Interaction.Triggers>
  1312. </Button>
  1313. <!--抽气-->
  1314. <Button Content="Purge" Width="80" Height="25" Margin="0 0 0 10" IsEnabled="{Binding Path=IsManualMode}">
  1315. <i:Interaction.Triggers>
  1316. <i:EventTrigger EventName="Click">
  1317. <cal:ActionMessage MethodName="Purge"/>
  1318. </i:EventTrigger>
  1319. </i:Interaction.Triggers>
  1320. </Button>
  1321. <Button Content="检测漏率" Width="80" Height="0" Margin="0 0 0 0" IsEnabled="{Binding Path=IsManualMode}">
  1322. <i:Interaction.Triggers>
  1323. <i:EventTrigger EventName="Click">
  1324. <cal:ActionMessage MethodName="LeakCheck"/>
  1325. </i:EventTrigger>
  1326. </i:Interaction.Triggers>
  1327. </Button>
  1328. </StackPanel>
  1329. </Border>
  1330. <Border Grid.Row="5" BorderBrush="{DynamicResource Table_BD}" CornerRadius="0,0,5,5" Background="{DynamicResource Table_BG_Content}" BorderThickness="1,0,1,1" Padding="5,1">
  1331. <Button Content="Vent" Width="80" Height="25" Margin="0,10" VerticalAlignment="Top" IsEnabled="{Binding Path=IsManualMode}">
  1332. <i:Interaction.Triggers>
  1333. <i:EventTrigger EventName="Click">
  1334. <cal:ActionMessage MethodName="Vent"/>
  1335. </i:EventTrigger>
  1336. </i:Interaction.Triggers>
  1337. </Button>
  1338. </Border>
  1339. </Grid>
  1340. </Grid>
  1341. </UserControl>