JET-YDB\JET-YANGDB
f92e4e963f
1.修改efem界面，把Aligner1 改成 Aligner，buffer改成cooling
|
1 day ago | |
|---|---|---|
| .. | ||
| Alarm | 2 months ago | |
| FA | 1 month ago | |
| Overview | 1 day ago | |
| RealTime | 2 months ago | |
| WaferAssociation | 1 day ago | |
|
JET-YDB\JET-YANGDB
f92e4e963f
1.修改efem界面，把Aligner1 改成 Aligner，buffer改成cooling
|
1 day ago | |
|---|---|---|
| .. | ||
| Alarm | 2 months ago | |
| FA | 1 month ago | |
| Overview | 1 day ago | |
| RealTime | 2 months ago | |
| WaferAssociation | 1 day ago | |