Virgo_Mask/VirgoRT/Devices/EFEM/EfemAction.cs

using System;
using System.Collections.Generic;
using Aitex.Core.Common;
using Aitex.Core.RT.Event;
using Aitex.Core.Util;
using Aitex.Core.RT.SCCore;
using Aitex.Sorter.Common;
using MECF.Framework.Common.Equipment;
using MECF.Framework.Common.SubstrateTrackings;
using VirgoCommon;
using VirgoRT.Device;
using VirgoRT.Device.YASKAWA;
using System.Diagnostics;
using System.Threading;
using Aitex.Core.RT.Device;
using Aitex.Core.RT.Log;
using VirgoRT.Devices.EFEM;
using VirgoRT.Modules;

namespace VirgoRT.Devices
{
    /// <summary>
    /// Base action
    /// </summary>
    abstract class EfemActionBase : ActionBase
    {
        protected readonly EfemBase _efem;
        private readonly EfemEntity.EfemType _efemType;

        public EfemOperation Type { get; protected set; }

        protected EfemActionBase() : this(null) { }

        protected EfemActionBase(EfemBase efem) : base(ModuleName.EFEM)
        {
            _efem = efem;
            _efemType = (EfemEntity.EfemType)SC.GetValue<int>($"EFEM.EfemType");
        }

        protected void Send(IEfemMessage msg)
        {
            if (_efemType == EfemEntity.EfemType.BrooksEFEM)
            {
                if (_efem.BrooksProxy.Connected || Type == EfemOperation.Home)
                {
                    var _ = _efem.BrooksProxy.Send(msg);
                }
            }
            else
            {
                _efem.MsgHandler.Send(msg);
            }
        }
    }

    class DelayAction : ActionBase
    {
        private readonly DeviceTimer _timer = new DeviceTimer();
        private readonly ushort _delayTime;

        public bool IsDone => _timer.IsTimeout();

        public DelayAction(ushort delaytime) : base(ModuleName.System)
        {
            this._delayTime = delaytime;
        }

        public override void Execute()
        {
            _timer.Start(this._delayTime * 1000);
        }

        public override void OnPostWork(string data)
        {
            EV.PostInfoLog(ModuleName.EFEM.ToString(), $"Delay time [{_delayTime}]");
        }
    }
}

namespace VirgoRT.Devices.YASKAWA
{
    class EfemAction : EfemActionBase
    {
        public EfemAction(EfemBase device, ModuleName mod) : base(device)
        { }

        public override void Execute()
        {
            Send(new EfemMessage
            {
                Operation = this.Type,
                Head = EfemMessage.MsgHead.MOV,
                Parameters = new List<string> { Constant.ModuleString[this.Module] }
            });

            base.Execute();

            _efem.Status = DeviceState.Busy;
            EV.PostInfoLog(this.Module.ToString(), $"Cmd {this.ID} {this.Type} Start");
        }

        public override void OnPostWork(string data = null)
        {
            _efem.Status = DeviceState.Idle;
            EV.PostInfoLog(this.Module.ToString(), $"Cmd {this.ID} {this.Type} End");
        }
    }

    /// <summary>
    ///
    /// </summary>
    class HomeAllAction : EfemAction
    {
        public HomeAllAction(EfemBase efem, ModuleName mod) : base(efem, mod)
        {
            Type = EfemOperation.Home;
            this.Module = mod;
        }

        public override void OnPostWork(string data = null)
        {
            _efem[ModuleName.LP1].OnHomed();
            _efem[ModuleName.LP2].OnHomed();

            base.OnPostWork(data);

            var tower = DEVICE.GetDevice<VirgoSignalTower>("System.SignalTower");
            if (tower != null)
            {
                tower.ResetData();
            }
 
        }
    }

    class HomeModuleAction : EfemAction
    {
        private string _param;
        public HomeModuleAction(EfemBase efem, ModuleName mod, string param) : base(efem, mod)
        {
            Type = EfemOperation.Home;
            this.Module = mod;
            _param = param;

            IsBackground = ModuleHelper.IsLoadPort(mod);
        }

        public override void Execute()
        {
            var parameter = SC.GetValue<int>($"EFEM.EfemType") == 4 ? new List<string> { Constant.ModuleString[this.Module] } : new List<string> { Constant.ModuleString[this.Module], _param };
            Send(new EfemMessage
            {
                Operation = this.Type,
                Head = EfemMessage.MsgHead.MOV,
                Parameters = parameter
            });

            //base.Execute(); 
            this.Status = ActionStatus.SendCmd;
            _efem.Status = DeviceState.Busy;
            EV.PostInfoLog(this.Module.ToString(), $"Cmd {this.ID} {this.Type} Start");
        }

        public override void OnPostWork(string data = null)
        {
            if (ModuleHelper.IsLoadPort(Module))
            {
                _efem[Module].OnHomed();
            }

            EV.PostInfoLog(this.Module.ToString(), $"Cmd {this.ID} {this.Type} End");
        }
    }

    class SIGSTATModuleAction : EfemAction
    {
        private string _param;
        public SIGSTATModuleAction(EfemBase efem, ModuleName mod, string param) : base(efem, mod)
        {
            Type = EfemOperation.SigStatus;
            this.Module = mod;
            _param = param;
        }

        public override void Execute()
        {
            Send(new EfemMessage
            {
                Operation = this.Type,
                Head = EfemMessage.MsgHead.GET,
                Parameters = new List<string> { Constant.ModuleString[this.Module] }
            });

            //base.Execute(); 
            this.Status = ActionStatus.SendCmd;
            _efem.Status = DeviceState.Busy;
            EV.PostInfoLog(this.Module.ToString(), $"Cmd {this.ID} {this.Type} Start");
        }

        public override void OnPostWork(string data = null)
        {
            if (ModuleHelper.IsLoadPort(Module))
            {
                _efem[Module].OnHomed();
            }

            EV.PostInfoLog(this.Module.ToString(), $"Cmd {this.ID} {this.Type} End");
        }
    }

    class LoadModuleAction : EfemAction
    {
        public LoadModuleAction(EfemBase efem, ModuleName mod) : base(efem, mod)
        {
            Type = EfemOperation.Load;
            this.Module = mod;
            IsBackground = ModuleHelper.IsLoadPort(mod);
        }

        public override void OnPostWork(string data = null)
        {

            _efem[Module].OnLoaded();

            EV.PostInfoLog(this.Module.ToString(), $"Cmd {this.ID} {this.Type} {Module}:{_efem[Module].CarrierId} End");
        }
 
        public override void OnError(string data = null)
        {
            _efem[Module].OnLoadFailed(data);

            base.OnError(data);
        }
    }

    class UnloadModuleAction : EfemAction
    {
        public UnloadModuleAction(EfemBase efem, ModuleName mod) : base(efem, mod)
        {
            Type = EfemOperation.Unload;
            this.Module = mod;
            IsBackground = ModuleHelper.IsLoadPort(mod);
        }

        public override void OnPostWork(string data = null)
        {
            _efem.Status = DeviceState.Idle;


            _efem[Module].OnUnloaded();

            EV.PostInfoLog(this.Module.ToString(), $"Cmd {this.ID} {this.Type} End");
        }


        public override void OnError(string data = null)
        {
            _efem[Module].OnUnloadFailed(data);

            base.OnError(data);
        }
    }

    class ReadCarrierIdModuleAction : EfemAction
    {
        public ReadCarrierIdModuleAction(EfemBase efem, ModuleName mod) : base(efem, mod)
        {
            Type = EfemOperation.CarrierId;
            this.Module = mod;

            IsBackground = true;
        }

        public override void Execute()
        {
            Send(new EfemMessage
            {
                Operation = this.Type,
                Head = EfemMessage.MsgHead.GET,
                Parameters = new List<string> { Constant.ModuleString[this.Module] }
            });

            //base.Execute(); 
            this.Status = ActionStatus.SendCmd;
            _efem.Status = DeviceState.Busy;
            EV.PostInfoLog(this.Module.ToString(), $"Cmd {this.ID} {this.Type} Start");
        }

        public override void OnPostWork(string data = null)
        {
            _efem.Status = DeviceState.Idle;

            _efem[Module].OnCarrierIDRead(data);

            EV.PostInfoLog(this.Module.ToString(), $"Cmd {this.ID} {this.Type} End");
        }

        public override void OnError(string data = null)
        {
            _efem[Module].OnCarrierIDReadFailed(data);

            base.OnError(data);
        }
    }

    class WriteCarrierIdModuleAction : EfemAction
    {
        private string _id;

        public WriteCarrierIdModuleAction(EfemBase efem, ModuleName mod, string id) : base(efem, mod)
        {
            Type = EfemOperation.CarrierId;
            this.Module = mod;

            IsBackground = true;

            _id = id;
        }

        public override void Execute()
        {
            Send(new EfemMessage
            {
                Operation = this.Type,
                Head = EfemMessage.MsgHead.SET,
                Parameters = new List<string> { Constant.ModuleString[this.Module] , _id}
            });

            //base.Execute(); 
            this.Status = ActionStatus.SendCmd;
            _efem.Status = DeviceState.Busy;
            EV.PostInfoLog(this.Module.ToString(), $"Cmd {this.ID} {this.Type} Start");
        }

        public override void OnPostWork(string data = null)
        {
            _efem.Status = DeviceState.Idle;

            _efem[Module].OnCarrierIDWrite(_id);

            EV.PostInfoLog(this.Module.ToString(), $"Cmd {this.ID} {this.Type} End");
        }

        public override void OnError(string data = null)
        {
            _efem[Module].OnCarrierIDWriteFailed(_id);

            base.OnError(data);
        }
    }


    class ReadTagDataModuleAction : EfemAction
    {
        public ReadTagDataModuleAction(EfemBase efem, ModuleName mod) : base(efem, mod)
        {
            Type = EfemOperation.CarrierId;
            this.Module = mod;

            IsBackground = true;
        }

        public override void Execute()
        {
            Send(new EfemMessage
            {
                Operation = this.Type,
                Head = EfemMessage.MsgHead.GET,
                Parameters = new List<string> { Constant.ModuleString[this.Module] }
            });

            //base.Execute(); 
            this.Status = ActionStatus.SendCmd;
            _efem.Status = DeviceState.Busy;
            EV.PostInfoLog(this.Module.ToString(), $"Cmd {this.ID} {this.Type} Start");
        }

        public override void OnPostWork(string data = null)
        {
            _efem.Status = DeviceState.Idle;

            _efem[Module].OnTagDataRead(data);

            EV.PostInfoLog(this.Module.ToString(), $"Cmd {this.ID} {this.Type} End");
        }

        public override void OnError(string data = null)
        {
            _efem[Module].OnTagDataReadFailed(data);

            base.OnError(data);
        }
    }

    class WriteTagDataModuleAction : EfemAction
    {
        private string _id;

        public WriteTagDataModuleAction(EfemBase efem, ModuleName mod, string id) : base(efem, mod)
        {
            Type = EfemOperation.CarrierId;
            this.Module = mod;

            IsBackground = true;

            _id = id;
        }

        public override void Execute()
        {
            Send(new EfemMessage
            {
                Operation = this.Type,
                Head = EfemMessage.MsgHead.SET,
                Parameters = new List<string> { Constant.ModuleString[this.Module], _id }
            });

            //base.Execute(); 
            this.Status = ActionStatus.SendCmd;
            _efem.Status = DeviceState.Busy;
            EV.PostInfoLog(this.Module.ToString(), $"Cmd {this.ID} {this.Type} Start");
        }

        public override void OnPostWork(string data = null)
        {
            _efem.Status = DeviceState.Idle;

            _efem[Module].OnTagDataWrite(_id);

            EV.PostInfoLog(this.Module.ToString(), $"Cmd {this.ID} {this.Type} End");
        }

        public override void OnError(string data = null)
        {
            _efem[Module].OnTagDataWriteFailed(_id);

            base.OnError(data);
        }
    }

    class DockModuleAction : EfemAction
    {
        public DockModuleAction(EfemBase efem, ModuleName mod) : base(efem, mod)
        {
            Type = EfemOperation.Dock;
            this.Module = mod;

            IsBackground = true;
        }
    }

    class UndockModuleAction : EfemAction
    {
        public UndockModuleAction(EfemBase efem, ModuleName mod) : base(efem, mod)
        {
            Type = EfemOperation.Undock;
            this.Module = mod;

            IsBackground = true;
        }
    }

    class ClampModuleAction : EfemAction
    {
        private bool _isUnloadClamp;

        public ClampModuleAction(EfemBase efem, ModuleName mod, bool isUnloadClamp) : base(efem, mod)
        {
            Type = EfemOperation.Clamp;
            this.Module = mod;

            IsBackground = true;

            _isUnloadClamp = isUnloadClamp;
        }


        public override void OnPostWork(string data = null)
        {
            _efem.Status = DeviceState.Idle;


            _efem[Module].OnClamped(_isUnloadClamp);

            EV.PostInfoLog(this.Module.ToString(), $"Cmd {this.ID} {this.Type} End");
        }


        public override void OnError(string data = null)
        {
            _efem[Module].OnClampFailed(data);

            base.OnError(data);
        }
    }

    class UnclampModuleAction : EfemAction
    {
        public UnclampModuleAction(EfemBase efem, ModuleName mod) : base(efem, mod)
        {
            Type = EfemOperation.Unclamp;
            this.Module = mod;

            IsBackground = true;
        }

        public override void OnPostWork(string data = null)
        {
            _efem.Status = DeviceState.Idle;

            _efem[Module].OnUnclamped();

            EV.PostInfoLog(this.Module.ToString(), $"Cmd {this.ID} {this.Type} End");
        }


        public override void OnError(string data = null)
        {
            _efem[Module].OnUnclampFailed(data);

            base.OnError(data);
        }
    }

    class SetThicknessModuleAction : EfemAction
    {
        private string _thick;

        public SetThicknessModuleAction(EfemBase efem, ModuleName mod, string thickness) : base(efem, mod)
        {
            Type = EfemOperation.SetThickness;
            this.Module = mod;

            IsBackground = true;

            _thick = thickness;
        }
        public override void Execute()
        {
            Send(new EfemMessage
            {
                Operation = this.Type,
                Head = EfemMessage.MsgHead.SET,
                Parameters = new List<string> { Constant.ModuleString[this.Module] , _thick.ToUpper()}
            });

            //base.Execute(); 
            this.Status = ActionStatus.SendCmd;
 
            EV.PostInfoLog(this.Module.ToString(), $"Cmd {this.ID} {this.Type} Start");
        }

         
    }
 
    class OrgshAction : EfemAction
    {
        public OrgshAction(EfemBase efem, ModuleName mod) : base(efem, mod)
        {
            Type = EfemOperation.Orgsh;
            this.Module = mod;
        }
    }


    class TrackAction : EfemAction
    {
        public TrackAction(EfemBase efem, ModuleName mod) : base(efem, mod)
        {
            Type = EfemOperation.StateTrack;
            this.Module = mod;
        }
        public override void Execute()
        {
            Send(new EfemMessage
            {
                Operation = this.Type,
                Head = EfemMessage.MsgHead.GET,
                Parameters = new List<string> { "TRACK" }
            });

            this.Status = ActionStatus.SendCmd;

            EV.PostInfoLog(this.Module.ToString(), "Query wafer present information");
        }

        public override void OnPostWork(string data)
        {
            this.Status = ActionStatus.Completed;
            //000/111 upperArmWafer, lowerArmWafer, alignerWafer1, alignerWafer2,  coolingwafer1,coolingwafer2
            if (data.Length < 6 )
            {
                LOG.Write($"EFEM Track wafer present return invalid value, {data}, less then 6 characters");
                return;
            }

            //upper arm
            if (data[0] == '1')
            {
                if (WaferManager.Instance.CheckNoWafer(ModuleName.EfemRobot, 1))
                {
                    WaferManager.Instance.CreateWafer(ModuleName.EfemRobot, 1, WaferStatus.Normal);
                }
            }
            else
            {
                if (WaferManager.Instance.CheckHasWafer(ModuleName.EfemRobot, 1))
                {
                    EV.PostWarningLog(Module.ToString(), $" {ModuleName.EfemRobot} upper arm has wafer information, while EFEM return empty, manually delete if really no wafer");
                }
            }

            //lower arm
            if (data[1] == '1')
            {
                if (WaferManager.Instance.CheckNoWafer(ModuleName.EfemRobot, 0))
                {
                    WaferManager.Instance.CreateWafer(ModuleName.EfemRobot, 0, WaferStatus.Normal);
                }
            }
            else
            {
                if (WaferManager.Instance.CheckHasWafer(ModuleName.EfemRobot, 0))
                {
                    EV.PostWarningLog(Module.ToString(), $" {ModuleName.EfemRobot} lower arm has wafer information, while EFEM return empty, manually delete if really no wafer");
                }
            }

            //aligner1
            if (data[2] == '1')
            {
                if (WaferManager.Instance.CheckNoWafer(ModuleName.Aligner1, 0))
                {
                    WaferManager.Instance.CreateWafer(ModuleName.Aligner1, 0, WaferStatus.Normal);
                }
            }
            else
            {
                if (WaferManager.Instance.CheckHasWafer(ModuleName.Aligner1, 0))
                {
                    EV.PostWarningLog(Module.ToString(), $" {ModuleName.Aligner1} has wafer information, while EFEM return empty, manually delete if really no wafer");
                }
            }

            //aligner2
            if (data[3] == '1')
            {
                if (WaferManager.Instance.CheckNoWafer(ModuleName.Aligner2, 0))
                {
                    WaferManager.Instance.CreateWafer(ModuleName.Aligner2, 0, WaferStatus.Normal);
                }
            }
            else
            {
                if (WaferManager.Instance.CheckHasWafer(ModuleName.Aligner2, 0))
                {
                    EV.PostWarningLog(Module.ToString(), $" {ModuleName.Aligner2} has wafer information, while EFEM return empty, manually delete if really no wafer");
                }
            }

            //cooling1
            if (data[4] == '1')
            {
                if (WaferManager.Instance.CheckNoWafer(ModuleName.Cooling1, 0))
                {
                    WaferManager.Instance.CreateWafer(ModuleName.Cooling1, 0, WaferStatus.Normal);
                }
            }
            else
            {
                if (WaferManager.Instance.CheckHasWafer(ModuleName.Cooling1, 0))
                {
                    EV.PostWarningLog(Module.ToString(), $" {ModuleName.Cooling1} has wafer information, while EFEM return empty, manually delete if really no wafer");
                }
            }

            //cooling2
            if (data[5] == '1')
            {
                if (WaferManager.Instance.CheckNoWafer(ModuleName.Cooling2, 0))
                {
                    WaferManager.Instance.CreateWafer(ModuleName.Cooling2, 0, WaferStatus.Normal);
                }
            }
            else
            {
                if (WaferManager.Instance.CheckHasWafer(ModuleName.Cooling2, 0))
                {
                    EV.PostWarningLog(Module.ToString(), $" {ModuleName.Cooling2} has wafer information, while EFEM return empty, manually delete if really no wafer");
                }
            }

            if(data.Length > 6)
            {
                if (data[6] == '1')
                {
                    if (WaferManager.Instance.CheckNoWafer(ModuleName.Buffer, 0))
                    {
                        WaferManager.Instance.CreateWafer(ModuleName.Buffer, 0, WaferStatus.Normal);
                    }
                }
                else
                {
                    if (WaferManager.Instance.CheckHasWafer(ModuleName.Buffer, 0))
                    {
                        EV.PostWarningLog(Module.ToString(), $" {ModuleName.Buffer} slot 1 has wafer information, while EFEM return empty, manually delete if really no wafer");
                    }
                }
            }
            if (data.Length > 7)
            {
                if (data[7] == '1')
                {
                    if (WaferManager.Instance.CheckNoWafer(ModuleName.Buffer, 1))
                    {
                        WaferManager.Instance.CreateWafer(ModuleName.Buffer, 1, WaferStatus.Normal);
                    }
                }
                else
                {
                    if (WaferManager.Instance.CheckHasWafer(ModuleName.Buffer, 1))
                    {
                        EV.PostWarningLog(Module.ToString(), $" {ModuleName.Buffer} slot 2 has wafer information, while EFEM return empty, manually delete if really no wafer");
                    }
                }
            }
        }
    }

    class ClearErrorAction : EfemAction
    {
        public ClearErrorAction(EfemBase efem) : base(efem, ModuleName.EFEM)
        {
            Type = EfemOperation.ClearError;

            IsBackground = true;
        }

        public override void Execute()
        {
            Send(new EfemMessage
            {
                Operation = this.Type,
                Head = EfemMessage.MsgHead.SET,
                Parameters = new List<string> { "CLEAR" }
            });

            this.Status = ActionStatus.SendCmd;

            EV.PostInfoLog(this.Module.ToString(), "Clear EFEM Error");
        }
    }

    class MapAction : EfemAction
    {
        public MapAction(EfemBase efem, ModuleName mod) : base(efem, mod)
        {
            Type = EfemOperation.Map;
            this.Module = mod;
        }

        public override void OnPostWork(string data)
        {
            _efem[Module].Status = DeviceState.Idle;
        }
    }

    class PickAction : EfemAction
    {
        private MoveParam MoveParam { get; }

        public PickAction(EfemBase efem, MoveParam mp) : base(efem, ModuleName.EFEM)
        {
            Type = EfemOperation.Pick;
            MoveParam = mp;
        }

        public override void Execute()
        {
            //MOV:LOAD/P113/ARM2;
            Send(new EfemMessage
            {
                Operation = this.Type,
                Head = EfemMessage.MsgHead.MOV,
                Parameters = new List<string>
                {
                    MoveParam.SrcPos.ToHWString(),
                    Constant.ArmString[MoveParam.Arm],
                    MoveParam.WaferSize.ToString()
                }
            });
            this.Status = ActionStatus.SendCmd;
            _efem.Status = DeviceState.Busy;
        }

        public override void OnPostWork(string data)
        {
            WaferManager.Instance.WaferMoved(MoveParam.SrcModule, MoveParam.SrcSlot, MoveParam.DestModule, MoveParam.DestSlot);
            _efem.Status = DeviceState.Idle;
            //_bladeTarget = ModuleName.EfemRobot;
        }
    }

 
    class PlaceAction : EfemAction
    {
        private MoveParam MoveParam { get; }

        public PlaceAction(EfemBase device, MoveParam mp) : base(device, ModuleName.EFEM)
        {
            Type = EfemOperation.Place;
            MoveParam = mp;
        }

        public override void Execute()
        {
            Send(new EfemMessage
            {
                Operation = this.Type,
                Head = EfemMessage.MsgHead.MOV,
                Parameters = new List<string>
                {
                    MoveParam.DestPos.ToHWString(),
                    Constant.ArmString[MoveParam.Arm],
                    MoveParam.WaferSize.ToString()
                }
            });
            this.Status = ActionStatus.SendCmd;
            _efem.Status = DeviceState.Busy;
        }

        public override void OnPostWork(string data)
        {
            WaferManager.Instance.WaferMoved(MoveParam.SrcModule, MoveParam.SrcSlot, MoveParam.DestModule, MoveParam.DestSlot);
            _efem.Status = DeviceState.Idle;
        }
    }
 
    class GotoAction : EfemAction
    {
        private MoveParam MoveParam { get; }

        public GotoAction(EfemBase device, MoveParam mp) : base(device, ModuleName.EFEM)
        {
            Type = EfemOperation.Goto;
            MoveParam = mp;
        }

        public override void Execute()
        {

            Send(new EfemMessage
            {
                Operation = this.Type,
                Head = EfemMessage.MsgHead.MOV,
                Parameters = new List<string>
                {
                    MoveParam.DestPos.ToHWString(),
                    Constant.ArmString[MoveParam.Arm],
                    MoveParam.WaferSize.ToString()
                }
            });
            this.Status = ActionStatus.SendCmd;
            _efem.Status = DeviceState.Busy;
        }

        public override void OnPostWork(string data)
        {
            _efem.Status = DeviceState.Idle;
        }
    }

    class ExtendAction : EfemAction
    {
        private ExtendParam ExtParam { get; }

        public ExtendPos TargetPosition => ExtParam.Pos;

        public ExtendAction(EfemBase efem, ExtendParam ep)
            : base(efem, ModuleName.EFEM)
        {
            Type = EfemOperation.Extend;
            ExtParam = ep;
            ExtParam.Arm = ep.Arm;
        }

        public override void Execute()
        {
            //MOV:EXTEND/LLA03/ARM2;
            Send(new EfemMessage
            {
                Operation = this.Type,
                Head = EfemMessage.MsgHead.MOV,
                Parameters = new List<string>
                {
                    ExtParam.Module.ToHWString(),
                    //Constant.ExtendPosString[ExtParam.Pos],
                    ExtParam.Pos.ToString(),
                    Constant.ArmString[ExtParam.Arm]
                }
            });
            this.Status = ActionStatus.SendCmd;
            _efem.Status = DeviceState.Busy;
        }

        public override void OnPostWork(string data)
        {
            _efem.Status = DeviceState.Idle;

            switch (TargetPosition)
            {
            case ExtendPos.PB:
                LOG.Write($"robot extend PB put: arm {ExtParam.Arm}, module {ExtParam.Module}");
                //WaferManager.Instance.WaferMoved(ModuleName.EfemRobot, (int)ExtParam.Arm, ExtParam.Module, 0);
                break;
            case ExtendPos.G4:
                LOG.Write($"robot extend G4 get: arm {ExtParam.Arm}, module {ExtParam.Module}");
               //     WaferManager.Instance.WaferMoved(ExtParam.Module, 0, ModuleName.EfemRobot, (int)ExtParam.Arm);
                break;
            default:
                Debug.WriteLine($"MNPT:{TargetPosition} 不需要更新 WaferManager 信息");
                break;
            }
        }
    }


    class GripAction : EfemAction
    {
        private Hand _blade;

        private bool _isGrip;

        public GripAction(EfemBase efem, Hand blade, bool isGrip)
            : base(efem, ModuleName.EFEM)
        {
            Type = EfemOperation.Grip;
            _blade = blade;
            _isGrip = isGrip;
        }

        public override void Execute()
        {
            Send(new EfemMessage
            {
                Operation = this.Type,
                Head = EfemMessage.MsgHead.SET,
                Parameters = new List<string>
                {
                    _isGrip ? "ON":"OFF",
                    Constant.ArmString[_blade]
                }
            });
            this.Status = ActionStatus.SendCmd;
            _efem.Status = DeviceState.Busy;
        }

        public override void OnPostWork(string data)
        {
            _efem.Status = DeviceState.Idle;

            if (_blade == Hand.Blade1)
                _efem.GripStateBlade1 = _isGrip ? "ON" : "OFF";
            if (_blade == Hand.Blade2)
                _efem.GripStateBlade2 = _isGrip ? "ON" : "OFF";
        }
    }
	
    class LiftAction : EfemAction
    {
        // MOV:LIFT/ALIGN1;

        private bool _isUp;



        public LiftAction(EfemBase device, ModuleName mod, bool isUp) : base(device, mod)
        {
            Type = EfemOperation.Lift;
            Module = mod;

            _isUp = isUp;

            IsBackground = true;

            (device as Efem).IsBufferPinUp[mod] = !isUp;
        }

        public override void Execute()
        {
            Send(new EfemMessage
            {
                Operation = this.Type,
                Head = EfemMessage.MsgHead.MOV,
                Parameters = new List<string> { Constant.ModuleString[this.Module], _isUp ? "UP":"DOWN" }
            });

            this.Status = ActionStatus.SendCmd;
            _efem.Status = DeviceState.Busy;
            EV.PostInfoLog(this.Module.ToString(), $"Cmd {this.ID} {this.Type} Start");
        }

        public override void OnPostWork(string data)
        {
            _efem.Status = DeviceState.Idle;

            (_efem as Efem).IsBufferPinUp[Module] = _isUp;
        }
    }

    class AlignAction : EfemAction
    {
        private WaferSize _ws { get; }

        public AlignAction(EfemBase device, ModuleName mod, WaferSize size) : base(device, mod)
        {
            Type = EfemOperation.Align;
            this.Module = mod;
            this._ws = size;
        }

        public override void Execute()
        {
            Send(new EfemMessage
            {
                Operation = this.Type,
                Head = EfemMessage.MsgHead.MOV,
                Parameters = new List<string> { Module.ToHWString(), this._ws.ToString() }
            });
            this.Status = ActionStatus.SendCmd;
        }

        public override void OnPostWork(string data) { }
    }

    class LedAction : EfemAction
    {
        private LightType Light { get; }
        private LightStatus LtStatus { get; }

        public LedAction(EfemBase device, LightType lt, LightStatus st) : base(device, ModuleName.EFEM)
        {
            Type = EfemOperation.Light;
            Light = lt;
            LtStatus = st;
            IsBackground = true;
        }

        public override void Execute()
        {
            Send(new EfemMessage
            {
                Operation = this.Type,
                Head = EfemMessage.MsgHead.SET,
                Parameters = new List<string> { Constant.STOWER, Light.ToString(), LtStatus.ToString() }
            });

            _efem.Status = DeviceState.Busy;

            this.Status = ActionStatus.SendCmd;

            //EV.PostInfoLog(this.Module.ToString(), $"CMD[{this.ID}], Set {this.Light} = {LtStatus}");
        }

        public override void OnPostWork(string data)
        {
            
        }
    }

    class AbortAction: EfemAction
    {
        public AbortAction(EfemBase efem) : base(efem, ModuleName.EFEM)
        {
            Type = EfemOperation.Abort;
        }

        public override void Execute()
        {
            Send(new EfemMessage
            {
                Operation = this.Type,
                Head = EfemMessage.MsgHead.MOV
            });
        }
    }

    class FlipAction : EfemAction
    {
        private string _orient;
        public FlipAction(EfemBase device, ModuleName mod, string orient) : base(device, mod)
        {
            this.Type = EfemOperation.Flip;
            this._orient = orient;
        }

        public override void Execute()
        {
            Send(new EfemMessage
            {
                Operation = Type,
                Head = EfemMessage.MsgHead.MOV,
                Parameters = new List<string> { _orient }
            });
        }
    }

    class EmsStopAction : EfemAction
    {
        public EmsStopAction(EfemBase device, ModuleName mod) : base(device, mod)
        {
            this.Type = EfemOperation.EmsStop;
        }

        public override void Execute()
        {
            Send(new EfemMessage
            {
                Operation = Type,
                Head = EfemMessage.MsgHead.MOV,
                Parameters = new List<string> {  }
            });
        }
    }

    class SetSpeedAction : EfemAction
    {
        private string _speed;
        public SetSpeedAction(EfemBase device, ModuleName mod, string speed) : base(device, mod)
        {
            this.Type = EfemOperation.SetRobotSpeed;
            this._speed = speed;
        }

        public override void Execute()
        {
            Send(new EfemMessage
            {
                Operation = Type,
                Head = EfemMessage.MsgHead.MOV,
                Parameters = new List<string> { _speed }
            });
        }
    }

    class QueryLPStateAction : EfemAction
    {
        public QueryLPStateAction(EfemBase efem, ModuleName mod) : base(efem, mod)
        {
            Type = EfemOperation.QueryLPPresence;
            this.Module = mod;
            IsBackground = true;
        }
    }
}