ManualTransfer.cs 19 KB

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  1. using System.Collections.Generic;
  2. using Aitex.Core.Common;
  3. using Aitex.Core.RT.Routine;
  4. using Aitex.Core.Util;
  5. using Aitex.Core.RT.Event;
  6. using MECF.Framework.Common.Equipment;
  7. using VirgoRT.Scheduler;
  8. using Aitex.Sorter.Common;
  9. using MECF.Framework.Common.Schedulers;
  10. using MECF.Framework.Common.SubstrateTrackings;
  11. using VirgoRT.Modules.PMs;
  12. using VirgoRT.Modules.Schedulers;
  13. using Aitex.Core.RT.SCCore;
  14. namespace VirgoRT.Modules
  15. {
  16. internal interface IManualTransferRoutine : IRoutine
  17. {
  18. }
  19. public class MoveItemEx : MoveItem
  20. {
  21. public int CoolingTime { get; set; }
  22. public MoveItemEx(ModuleName sourceModule, int sourceSlot, ModuleName destinationModule, int destinationSlot, int coolingTime, Hand blade)
  23. : base(sourceModule, sourceSlot, destinationModule, destinationSlot, blade)
  24. {
  25. CoolingTime = coolingTime;
  26. }
  27. }
  28. public class ManualTransfer : TransferModule
  29. {
  30. private Queue<IRoutine> _moveTaskQueue = new Queue<IRoutine>();
  31. private IRoutine _activeTask;
  32. public Result Start(object[] objs)
  33. {
  34. _moveTaskQueue.Clear();
  35. ModuleName source = (ModuleName)objs[0];
  36. int ss = (int)objs[1];
  37. ModuleName target = (ModuleName)objs[2];
  38. int ds = (int)objs[3];
  39. bool autoAlign = (bool)objs[4];
  40. int alignAngle = (int)objs[5];
  41. bool autoCooling = (bool)objs[6];
  42. int coolingTime = (int)objs[7];
  43. if (!WaferManager.Instance.CheckWafer(source, ss, WaferStatus.Normal))
  44. {
  45. EV.PostWarningLog("System", $"source {source} slot {ss+1} no normal wafer");
  46. return Result.FAIL;
  47. }
  48. if (!WaferManager.Instance.CheckNoWafer(target, ds))
  49. {
  50. EV.PostWarningLog("System", "destination has wafer");
  51. return Result.FAIL;
  52. }
  53. if (source!=ModuleName.EfemRobot && WaferManager.Instance.CheckHasWafer(ModuleName.EfemRobot, 0) && WaferManager.Instance.CheckHasWafer(ModuleName.EfemRobot, 1))
  54. {
  55. EV.PostWarningLog("System", "robot has wafer");
  56. return Result.FAIL;
  57. }
  58. Hand blade = (WaferManager.Instance.CheckNoWafer(ModuleName.EfemRobot, 0) && SC.GetValue<bool>("EFEM.EfemRobot.LowerBladeEnable")) ? Hand.Blade1 : Hand.Blade2;
  59. if (source == ModuleName.EfemRobot)
  60. blade = ss == 0 ? Hand.Blade1 : Hand.Blade2;
  61. else if (target == ModuleName.EfemRobot)
  62. blade = ds == 0 ? Hand.Blade1 : Hand.Blade2;
  63. if (blade == Hand.Blade1 && !SC.GetValue<bool>("EFEM.EfemRobot.LowerBladeEnable"))
  64. {
  65. EV.PostAlarmLog("System", $"Lower Blade disable");
  66. return Result.FAIL;
  67. }
  68. if (blade == Hand.Blade2 && !SC.GetValue<bool>("EFEM.EfemRobot.UpperBladeEnable"))
  69. {
  70. EV.PostAlarmLog("System", $"Upper Blade disable");
  71. return Result.FAIL;
  72. }
  73. if (autoAlign && !ModuleHelper.IsAligner(source) && !ModuleHelper.IsAligner(target) )
  74. {
  75. if (WaferManager.Instance.CheckHasWafer(ModuleName.Aligner1, 0) && WaferManager.Instance.CheckHasWafer(ModuleName.Aligner2, 0))
  76. {
  77. EV.PostWarningLog("System", "Can not transfer, aligner has wafer, can not auto align");
  78. return Result.FAIL;
  79. }
  80. ModuleName aligner = WaferManager.Instance.CheckHasWafer(ModuleName.Aligner1, 0)
  81. ? ModuleName.Aligner2
  82. : ModuleName.Aligner1;
  83. _moveTaskQueue.Enqueue(new EfemRobotMover(new MoveItemEx(source, ss, aligner, 0, 1, blade)));
  84. _moveTaskQueue.Enqueue(new AlignRoutine(aligner.ToString()));
  85. _moveTaskQueue.Enqueue(new EfemRobotMover(new MoveItemEx(aligner, 0, target, ds, 0, blade)));
  86. }
  87. else if(autoCooling && (ModuleHelper.IsInstalled(ModuleName.Cooling1) || ModuleHelper.IsInstalled(ModuleName.Cooling2)) && !ModuleHelper.IsCooling(source) && !ModuleHelper.IsCooling(target))
  88. {
  89. if (WaferManager.Instance.CheckHasWafer(ModuleName.Cooling1, 0) && WaferManager.Instance.CheckHasWafer(ModuleName.Cooling2, 0))
  90. {
  91. EV.PostWarningLog("System", "Can not transfer, cooling has wafer, can not auto cooling");
  92. return Result.FAIL;
  93. }
  94. ModuleName cooling = WaferManager.Instance.CheckHasWafer(ModuleName.Cooling1, 0)
  95. ? ModuleName.Cooling2
  96. : ModuleName.Cooling1;
  97. _moveTaskQueue.Enqueue(new EfemRobotMover(new MoveItemEx(source, ss, cooling, 0, coolingTime, blade)));
  98. if (ModuleHelper.IsInstalled(ModuleName.Cooling1) || ModuleHelper.IsInstalled(ModuleName.Cooling2))
  99. _moveTaskQueue.Enqueue(new CoolingRoutine(cooling.ToString(), coolingTime));
  100. _moveTaskQueue.Enqueue(new EfemRobotMover(new MoveItemEx(cooling, 0, target, ds, 0, blade)));
  101. }
  102. else if (autoCooling && (ModuleHelper.IsInstalled(ModuleName.Buffer)) && !ModuleHelper.IsBuffer(source) && !ModuleHelper.IsBuffer(target))
  103. {
  104. ModuleName cooling = ModuleName.Buffer;
  105. int slot = -1;
  106. if (WaferManager.Instance.CheckNoWafer(ModuleName.Buffer, 0))
  107. {
  108. slot = 0;
  109. }
  110. else if (WaferManager.Instance.CheckNoWafer(ModuleName.Cooling2, 0))
  111. {
  112. slot = 1;
  113. }
  114. else
  115. {
  116. EV.PostWarningLog("System", "No valid cooling station for auto cooling");
  117. return Result.FAIL;
  118. }
  119. _moveTaskQueue.Enqueue(new EfemRobotMover(new MoveItemEx(source, ss, cooling, slot, coolingTime, blade)));
  120. _moveTaskQueue.Enqueue(new BufferRoutine(cooling.ToString(), coolingTime,slot));
  121. _moveTaskQueue.Enqueue(new EfemRobotMover(new MoveItemEx(cooling, slot, target, ds, 0, blade)));
  122. }
  123. else
  124. {
  125. _moveTaskQueue.Enqueue(new EfemRobotMover(new MoveItemEx(source, ss, target, ds, coolingTime, blade)));
  126. if (ModuleHelper.IsAligner(target) || ModuleHelper.IsCooling(target))
  127. {
  128. _moveTaskQueue.Enqueue(new AlignRoutine(target.ToString()));
  129. }
  130. }
  131. _activeTask = _moveTaskQueue.Dequeue();
  132. return _activeTask.Start();
  133. }
  134. public Result Monitor(object[] objs)
  135. {
  136. System.Diagnostics.Debug.Assert(_activeTask != null, "mover should not be null, call start first");
  137. Result ret = _activeTask.Monitor();
  138. if (ret == Result.FAIL)
  139. return ret;
  140. if (ret == Result.DONE)
  141. {
  142. if (_moveTaskQueue.Count > 0)
  143. {
  144. _activeTask = _moveTaskQueue.Dequeue();
  145. return _activeTask.Start();
  146. }
  147. return Result.DONE;
  148. }
  149. return Result.RUN;
  150. }
  151. public void Clear()
  152. {
  153. _moveTaskQueue.Clear();
  154. _activeTask = null;
  155. }
  156. public int GetCoolingTime(int slot)
  157. {
  158. if(_activeTask != null && _activeTask is BufferRoutine)
  159. {
  160. return ((BufferRoutine)_activeTask).GetCoolingTime(slot);
  161. }
  162. return 0;
  163. }
  164. }
  165. public class EfemRobotMover : TransferModule, IRoutine
  166. {
  167. private MoveItemEx _moveTask;
  168. private SchedulerModule _source;
  169. private SchedulerModule _destination;
  170. public EfemRobotMover(MoveItemEx moveTask)
  171. {
  172. _moveTask = moveTask;
  173. }
  174. public Result Start()
  175. {
  176. _source = GetModule(_moveTask.SourceModule.ToString());
  177. _destination = GetModule(_moveTask.DestinationModule.ToString());
  178. System.Diagnostics.Debug.Assert(_source != null, $"{_moveTask.SourceModule} not valid");
  179. System.Diagnostics.Debug.Assert(_destination != null, $"{_moveTask.DestinationModule} not valid");
  180. if(!WaferManager.Instance.CheckHasWafer(_moveTask.SourceModule, _moveTask.SourceSlot))
  181. {
  182. EV.PostWarningLog("System", $"Failed transfer, source {_moveTask.SourceModule} slot {_moveTask.SourceSlot + 1} has not wafer");
  183. return Result.FAIL;
  184. }
  185. if (WaferManager.Instance.CheckHasWafer(_moveTask.DestinationModule, _moveTask.DestinationSlot))
  186. {
  187. EV.PostWarningLog("System", $"Failed transfer, destination {_moveTask.DestinationModule} slot {_moveTask.DestinationSlot + 1} has wafer");
  188. return Result.FAIL;
  189. }
  190. if (!_source.IsAvailable)
  191. {
  192. EV.PostWarningLog("System", $"Failed transfer, source {_moveTask.SourceModule} not ready");
  193. return Result.FAIL;
  194. }
  195. if (ModuleHelper.IsLoadPort(_source.Module))
  196. {
  197. if (!(_source as SchedulerLoadPort).CheckReadyTransfer())
  198. {
  199. EV.PostWarningLog("System", $"Failed transfer, source {_moveTask.SourceModule} not ready");
  200. return Result.FAIL;
  201. }
  202. }
  203. if (!_destination.IsAvailable)
  204. {
  205. EV.PostWarningLog("System", $"Failed transfer, Destination {_moveTask.DestinationModule} not ready");
  206. return Result.FAIL;
  207. }
  208. if (ModuleHelper.IsLoadPort(_destination.Module))
  209. {
  210. if (!(_destination as SchedulerLoadPort).CheckReadyTransfer())
  211. {
  212. EV.PostWarningLog("System", $"Failed transfer, source {_moveTask.DestinationModule} not ready");
  213. return Result.FAIL;
  214. }
  215. }
  216. if (!_efemRobot.IsAvailable)
  217. {
  218. EV.PostWarningLog("System", $"Failed transfer, EFEM Robot not ready");
  219. return Result.FAIL;
  220. }
  221. if ((Singleton<RouteManager>.Instance.EFEM.EFEMType != EfemEntity.EfemType.BeamSUNWAY && ModuleHelper.IsAligner(_source.Module)) || ModuleHelper.IsCooling(_source.Module))
  222. _source.Cooling(_moveTask.CoolingTime);
  223. if ((Singleton<RouteManager>.Instance.EFEM.EFEMType != EfemEntity.EfemType.BeamSUNWAY && ModuleHelper.IsAligner(_destination.Module)) || ModuleHelper.IsCooling(_destination.Module))
  224. _destination.Cooling(_moveTask.CoolingTime);
  225. if (_moveTask.SourceModule == ModuleName.EfemRobot)
  226. {
  227. _moveTask.RobotHand = (Hand)_moveTask.SourceSlot;
  228. }else if (_moveTask.DestinationModule == ModuleName.EfemRobot)
  229. {
  230. _moveTask.RobotHand = (Hand)_moveTask.DestinationSlot;
  231. }
  232. return Result.RUN;
  233. }
  234. public Result Start(params object[] objs)
  235. {
  236. return this.Start();
  237. }
  238. public Result Monitor()
  239. {
  240. if (_source.IsError || _destination.IsError || _efemRobot.IsError)
  241. return Result.FAIL;
  242. if (!WaferManager.Instance.CheckHasWafer(_moveTask.SourceModule, _moveTask.SourceSlot) &&
  243. WaferManager.Instance.CheckHasWafer(_moveTask.DestinationModule, _moveTask.DestinationSlot) &&
  244. _efemRobot.IsAvailable)
  245. {
  246. if (_source.IsWaitTransfer(ModuleName.EfemRobot))
  247. {
  248. _source.PostTransfer(ModuleName.EfemRobot, EnumTransferType.Pick, 0);
  249. //_source.StopWaitTransfer(ModuleName.EfemRobot);
  250. }
  251. if (_destination.IsWaitTransfer(ModuleName.EfemRobot))
  252. {
  253. _destination.PostTransfer(ModuleName.EfemRobot, EnumTransferType.Place, 0);
  254. //_destination.StopWaitTransfer(ModuleName.EfemRobot);
  255. }
  256. if (_source.IsAvailable && _destination.IsAvailable)
  257. return Result.DONE;
  258. return Result.RUN;
  259. }
  260. if (!_efemRobot.IsAvailable)
  261. return Result.RUN;
  262. //pick
  263. if (_moveTask.SourceModule != ModuleName.EfemRobot)
  264. {
  265. if (WaferManager.Instance.CheckHasWafer(_moveTask.SourceModule, _moveTask.SourceSlot))
  266. {
  267. if (!_source.IsAvailable)
  268. return Result.RUN;
  269. if (!_source.IsReadyForPick(ModuleName.EfemRobot, _moveTask.SourceSlot, _moveTask.RobotHand))
  270. {
  271. if (!_source.PrepareTransfer(ModuleName.EfemRobot, EnumTransferType.Pick, _moveTask.SourceSlot))
  272. return Result.FAIL;
  273. }
  274. if (!_source.IsAvailable)
  275. return Result.RUN;
  276. if (!WaferManager.Instance.CheckHasWafer(ModuleName.EfemRobot, (int)_moveTask.RobotHand))
  277. {
  278. if (!_efemRobot.Pick(_moveTask.SourceModule, _moveTask.SourceSlot, _moveTask.RobotHand))
  279. {
  280. return Result.FAIL;
  281. }
  282. _source.WaitTransfer(ModuleName.EfemRobot, EnumTransferType.Pick, 0);
  283. }
  284. if (!_efemRobot.IsAvailable)
  285. return Result.RUN;
  286. }
  287. else
  288. {
  289. if (!_efemRobot.IsAvailable)
  290. return Result.RUN;
  291. if (_source.IsWaitTransfer(ModuleName.EfemRobot))
  292. {
  293. _source.PostTransfer(ModuleName.EfemRobot, EnumTransferType.Pick, 0);
  294. }
  295. }
  296. }
  297. //place
  298. if (_moveTask.DestinationModule != ModuleName.EfemRobot)
  299. {
  300. if (!_destination.IsAvailable)
  301. return Result.RUN;
  302. if (!WaferManager.Instance.CheckHasWafer(_moveTask.DestinationModule, _moveTask.DestinationSlot))
  303. {
  304. if (!_destination.IsReadyForPlace(ModuleName.EfemRobot, _moveTask.DestinationSlot, _moveTask.RobotHand))
  305. {
  306. if (!_destination.PrepareTransfer(ModuleName.EfemRobot, EnumTransferType.Place,
  307. _moveTask.DestinationSlot))
  308. return Result.FAIL;
  309. }
  310. if (!_destination.IsAvailable)
  311. return Result.RUN;
  312. if (WaferManager.Instance.CheckHasWafer(ModuleName.EfemRobot, (int)_moveTask.RobotHand))
  313. {
  314. if (!_efemRobot.Place(_moveTask.DestinationModule, _moveTask.DestinationSlot, _moveTask.RobotHand))
  315. return Result.FAIL;
  316. _destination.WaitTransfer(ModuleName.EfemRobot, EnumTransferType.Place, 0);
  317. }
  318. if (!_efemRobot.IsAvailable)
  319. return Result.RUN;
  320. }
  321. else
  322. {
  323. if (!_efemRobot.IsAvailable)
  324. return Result.RUN;
  325. if (_destination.IsWaitTransfer(ModuleName.EfemRobot))
  326. {
  327. _destination.PostTransfer(ModuleName.EfemRobot, EnumTransferType.Place, 0);
  328. //_destination.StopWaitTransfer(ModuleName.EfemRobot);
  329. }
  330. }
  331. }
  332. return Result.RUN;
  333. }
  334. public void Abort()
  335. {
  336. Clear();
  337. }
  338. public void Clear()
  339. {
  340. _efemRobot.ResetTask();
  341. _source?.ResetTask();
  342. _destination?.ResetTask();
  343. }
  344. }
  345. public class AlignRoutine : TransferModule, IRoutine
  346. {
  347. private SchedulerAligner _aligner;
  348. public AlignRoutine(string module)
  349. {
  350. _aligner = GetModule(module) as SchedulerAligner;
  351. }
  352. public Result Start(params object[] objs)
  353. {
  354. _aligner.Align(0);
  355. return Result.RUN;
  356. }
  357. public Result Monitor()
  358. {
  359. if (_aligner.IsAvailable)
  360. return Result.DONE;
  361. return Result.RUN;
  362. }
  363. public void Abort()
  364. {
  365. }
  366. }
  367. public class CoolingRoutine : TransferModule, IRoutine
  368. {
  369. private SchedulerAligner _cooling;
  370. private int _coolingTimeS;
  371. public CoolingRoutine(string module, int coolingTimeS)
  372. {
  373. _cooling = GetModule(module) as SchedulerAligner;
  374. _coolingTimeS = coolingTimeS;
  375. }
  376. public Result Start(params object[] objs)
  377. {
  378. _cooling.Cooling(_coolingTimeS);
  379. return Result.RUN;
  380. }
  381. public Result Monitor()
  382. {
  383. if (_cooling.IsAvailable)
  384. return Result.DONE;
  385. return Result.RUN;
  386. }
  387. public void Abort()
  388. {
  389. }
  390. }
  391. public class FlipRoutine : TransferModule, IRoutine
  392. {
  393. private SchedulerFlipper _fliper;
  394. private string _orient;
  395. public FlipRoutine(string module, string orient)
  396. {
  397. _fliper = GetModule(module) as SchedulerFlipper;
  398. _orient = orient;
  399. }
  400. public Result Start(params object[] objs)
  401. {
  402. _fliper.Flip(_orient);
  403. return Result.RUN;
  404. }
  405. public Result Monitor()
  406. {
  407. if (_fliper.IsAvailable)
  408. return Result.DONE;
  409. return Result.RUN;
  410. }
  411. public void Abort()
  412. {
  413. }
  414. }
  415. public class BufferRoutine : TransferModule, IRoutine
  416. {
  417. private SchedulerBuffer _cooling;
  418. private int _coolingTimeS;
  419. private int _slot;
  420. public BufferRoutine(string module, int coolingTimeS, int slot)
  421. {
  422. _cooling = GetModule(module) as SchedulerBuffer;
  423. _coolingTimeS = coolingTimeS;
  424. _slot = slot;
  425. }
  426. public Result Start(params object[] objs)
  427. {
  428. _cooling.Cooling(_coolingTimeS, _slot);
  429. return Result.RUN;
  430. }
  431. public Result Monitor()
  432. {
  433. if (_cooling.IsAvailable)
  434. return Result.DONE;
  435. return Result.RUN;
  436. }
  437. public void Abort()
  438. {
  439. }
  440. public int GetCoolingTime(int slot)
  441. {
  442. return _buffer.GetCoolingTime(slot);
  443. }
  444. }
  445. }