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Virgo_Mask
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VirgoRT
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Config
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EquipmentVariables.xml

EquipmentVariables.xml 40 KB
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  1. <?xml version="1.0"?>
    2. 

  2. <EquipmentVariables xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" xmlns:xsd="http://www.w3.org/2001/XMLSchema">
    3. 

  3.   <SystemInfo clockFormat="yyMMddHHmmss" traceSampleMax="20" traceMaxCount="5" supportValidIpRestrict="false" validIps="" name="Virgo" version="3.6" />
    4. 

  4.   <CommunicationInfo remoteIpAddress="127.0.0.1" port="5000" supportHeartCheck="true" heartInterval="5" />
    5. 

  5.   <StatusVariables>
    6. 

  6.     <StatusVariable id="1" valueType="List" logicalName="AlarmsEnabled" eventTrigger="" units="" />
    7. 

  7.     <StatusVariable id="2" valueType="List" logicalName="AlarmsSet" eventTrigger="" units="" />
    8. 

  8.     <StatusVariable id="3" valueType="Ascii" logicalName="Clock" eventTrigger="" units="" />
    9. 

  9.     <StatusVariable id="4" valueType="U4" logicalName="ControlState" eventTrigger="" units="" />
    10. 

  10.     <StatusVariable id="5" valueType="List" logicalName="EventsEnabled" eventTrigger="" units="" />
    11. 

  11.     <StatusVariable id="6" valueType="Ascii" logicalName="PPExecName" eventTrigger="" units="" />
    12. 

  12.     <StatusVariable id="7" valueType="U1" logicalName="PreviousProcessState" eventTrigger="" units="" />
    13. 

  13.     <StatusVariable id="8" valueType="U1" logicalName="ProcessState" eventTrigger="" units="" />
    14. 

  14.     <StatusVariable id="9" valueType="U4" logicalName="SpoolCountActual" eventTrigger="" units="" />
    15. 

  15.     <StatusVariable id="10" valueType="U4" logicalName="SpoolCountTotal" eventTrigger="" units="" />
    16. 

  16.     <StatusVariable id="11" valueType="Ascii" logicalName="SpoolFullTime" eventTrigger="" units="" />
    17. 

  17.     <StatusVariable id="12" valueType="Ascii" logicalName="SpoolStartTime" eventTrigger="" units="" />
    18. 

  18.     <StatusVariable id="13" valueType="Ascii" logicalName="SpoolState" eventTrigger="" units="" />
    19. 

  19.     <StatusVariable id="14" valueType="Ascii" logicalName="SpoolSubstate" eventTrigger="" units="" />
    20. 

  20. 	<StatusVariable id="1101" valueType="U4" logicalName="EquipmentMode"  units="" eventTrigger=" " />
    21. 

  21. 	<StatusVariable id="1102" valueType="U4" logicalName="EquipmentStatus"  units="" eventTrigger=" " />
    22. 

  22. 	<StatusVariable id="1103" valueType="List" logicalName="RecipeList"  units="" eventTrigger=" " />
    23. 

  23. 	<StatusVariable id="1201" valueType="Ascii" logicalName="System.IoPressureMeter.PressureMeterChamber.Feedback"  units="" eventTrigger=" " />
    24. 

  24. 	<StatusVariable id="1202" valueType="Ascii" logicalName="System.IoThrottleValve.ThrottleValve.TVPosition"  units="" eventTrigger=" " />
    25. 

  25. 	<StatusVariable id="1203" valueType="Ascii" logicalName="System.IoThrottleValve.ThrottleValve.TVPositionSetPoint"  units="" eventTrigger=" " />
    26. 

  26. 	<StatusVariable id="1204" valueType="Ascii" logicalName="System.IoThrottleValve.ThrottleValve.TVPressure"  units="" eventTrigger=" " />
    27. 

  27. 	<StatusVariable id="1205" valueType="Ascii" logicalName="System.IoThrottleValve.ThrottleValve.TVPressureSetPoint"  units="" eventTrigger=" " />
    28. 

  28. 	<StatusVariable id="1206" valueType="Ascii" logicalName="System.IoPump.MainPump.N2PressureValue"  units="" eventTrigger=" " />
    29. 

  29. 	<StatusVariable id="1207" valueType="Ascii" logicalName="System.IoPump.MainPump.WaterFlowValue"  units="" eventTrigger=" " />
    30. 

  30. 	<StatusVariable id="1208" valueType="Ascii" logicalName="System.IoRf.Rf.RFSetPoint"  units="" eventTrigger=" " />
    31. 

  31. 	<StatusVariable id="1209" valueType="Ascii" logicalName="System.IoRf.Rf.RFForwardPower"  units="" eventTrigger=" " />
    32. 

  32. 	<StatusVariable id="1210" valueType="Ascii" logicalName="System.IoRf.Rf.RFReflectPower"  units="" eventTrigger=" " />
    33. 

  33. 	<StatusVariable id="1211" valueType="Ascii" logicalName="System.IoRf.Rf.RFMatchPositionC1Feedback"  units="" eventTrigger=" " />
    34. 

  34. 	<StatusVariable id="1212" valueType="Ascii" logicalName="System.IoRf.Rf.RFMatchPositionC2Feedback"  units="" eventTrigger=" " />
    35. 

  35. 	<StatusVariable id="1213" valueType="Ascii" logicalName="System.IoRf.Rf.RFMatchPositionC1SetPoint"  units="" eventTrigger=" " />
    36. 

  36. 	<StatusVariable id="1214" valueType="Ascii" logicalName="System.IoRf.Rf.RFMatchPositionC2SetPoint"  units="" eventTrigger=" " />
    37. 

  37. 	<StatusVariable id="1215" valueType="Ascii" logicalName="System.IoRf.Rf.RFFrequency"  units="" eventTrigger=" " />
    38. 

  38. 	<StatusVariable id="1216" valueType="Ascii" logicalName="System.IoRf.Rf.RFDuty"  units="" eventTrigger=" " />
    39. 

  39. 	<StatusVariable id="1217" valueType="Ascii" logicalName="System.IoMfc.MfcGas1.FeedBack"  units="" eventTrigger=" " />
    40. 

  40. 	<StatusVariable id="1218" valueType="Ascii" logicalName="System.IoMfc.MfcGas1.SetPoint"  units="" eventTrigger=" " />
    41. 

  41. 	<StatusVariable id="1219" valueType="Ascii" logicalName="System.IoMfc.MfcGas2.FeedBack"  units="" eventTrigger=" " />
    42. 

  42. 	<StatusVariable id="1220" valueType="Ascii" logicalName="System.IoMfc.MfcGas2.SetPoint"  units="" eventTrigger=" " />
    43. 

  43. 	<StatusVariable id="1221" valueType="Ascii" logicalName="System.IoMfc.MfcGas3.FeedBack"  units="" eventTrigger=" " />
    44. 

  44. 	<StatusVariable id="1222" valueType="Ascii" logicalName="System.IoMfc.MfcGas3.SetPoint"  units="" eventTrigger=" " />
    45. 

  45. 	<StatusVariable id="1223" valueType="Ascii" logicalName="System.IoMfc.MfcGas4.FeedBack"  units="" eventTrigger=" " />
    46. 

  46. 	<StatusVariable id="1224" valueType="Ascii" logicalName="System.IoMfc.MfcGas4.SetPoint"  units="" eventTrigger=" " />
    47. 

  47. 	<StatusVariable id="1225" valueType="Ascii" logicalName="System.IoMfc.MfcGas5.FeedBack"  units="" eventTrigger=" " />
    48. 

  48. 	<StatusVariable id="1226" valueType="Ascii" logicalName="System.IoMfc.MfcGas5.SetPoint"  units="" eventTrigger=" " />
    49. 

  49. 	<StatusVariable id="10001" valueType="Ascii" logicalName="LP1.SlotMap"  units="" eventTrigger=" " />
    50. 

  50. 	<StatusVariable id="10002" valueType="U4" logicalName="LP1.CassettePresent"  units="" eventTrigger=" " />
    51. 

  51. 	<StatusVariable id="10003" valueType="U4" logicalName="LP1.IsWaferProtrude"  units="" eventTrigger=" " />
    52. 

  52. 	<StatusVariable id="20001" valueType="Ascii" logicalName="LP2.SlotMap"  units="" eventTrigger=" " />
    53. 

  53. 	<StatusVariable id="20002" valueType="U4" logicalName="LP2.CassettePresent"  units="" eventTrigger=" " />
    54. 

  54. 	<StatusVariable id="20003" valueType="U4" logicalName="LP2.IsWaferProtrude"  units="" eventTrigger=" " />
    55. 

  55. 	<StatusVariable id="430001" valueType="Ascii" logicalName="PMA.IoPressureMeter.PressureMeterChamber.Feedback"  units="" eventTrigger=" " />
    56. 

  56. 	<StatusVariable id="430002" valueType="Ascii" logicalName="PMA.IoThrottleValve.ThrottleValve.TVPosition"  units="" eventTrigger=" " />
    57. 

  57. 	<StatusVariable id="430003" valueType="Ascii" logicalName="PMA.IoThrottleValve.ThrottleValve.TVPositionSetPoint"  units="" eventTrigger=" " />
    58. 

  58. 	<StatusVariable id="430004" valueType="Ascii" logicalName="PMA.IoThrottleValve.ThrottleValve.TVPressure"  units="" eventTrigger=" " />
    59. 

  59. 	<StatusVariable id="430005" valueType="Ascii" logicalName="PMA.IoThrottleValve.ThrottleValve.TVPressureSetPoint"  units="" eventTrigger=" " />
    60. 

  60. 	<StatusVariable id="430006" valueType="Ascii" logicalName="PMA.IoPump.MainPump.N2PressureValue"  units="" eventTrigger=" " />
    61. 

  61. 	<StatusVariable id="430007" valueType="Ascii" logicalName="PMA.IoPump.MainPump.WaterFlowValue"  units="" eventTrigger=" " />
    62. 

  62. 	<StatusVariable id="430008" valueType="Ascii" logicalName="PMA.IoRf.Rf.RFSetPoint"  units="" eventTrigger=" " />
    63. 

  63. 	<StatusVariable id="430009" valueType="Ascii" logicalName="PMA.IoRf.Rf.RFForwardPower"  units="" eventTrigger=" " />
    64. 

  64. 	<StatusVariable id="430010" valueType="Ascii" logicalName="PMA.IoRf.Rf.RFReflectPower"  units="" eventTrigger=" " />
    65. 

  65. 	<StatusVariable id="430011" valueType="Ascii" logicalName="PMA.IoRf.Rf.RFMatchPositionC1Feedback"  units="" eventTrigger=" " />
    66. 

  66. 	<StatusVariable id="430012" valueType="Ascii" logicalName="PMA.IoRf.Rf.RFMatchPositionC2Feedback"  units="" eventTrigger=" " />
    67. 

  67. 	<StatusVariable id="430013" valueType="Ascii" logicalName="PMA.IoRf.Rf.RFMatchPositionC1SetPoint"  units="" eventTrigger=" " />
    68. 

  68. 	<StatusVariable id="430014" valueType="Ascii" logicalName="PMA.IoRf.Rf.RFMatchPositionC2SetPoint"  units="" eventTrigger=" " />
    69. 

  69. 	<StatusVariable id="430015" valueType="Ascii" logicalName="PMA.IoRf.Rf.RFFrequency"  units="" eventTrigger=" " />
    70. 

  70. 	<StatusVariable id="430016" valueType="Ascii" logicalName="PMA.IoRf.Rf.RFDuty"  units="" eventTrigger=" " />
    71. 

  71. 	<StatusVariable id="430017" valueType="Ascii" logicalName="PMA.IoMfc.MfcGas1.FeedBack"  units="" eventTrigger=" " />
    72. 

  72. 	<StatusVariable id="430018" valueType="Ascii" logicalName="PMA.IoMfc.MfcGas1.SetPoint"  units="" eventTrigger=" " />
    73. 

  73. 	<StatusVariable id="430019" valueType="Ascii" logicalName="PMA.IoMfc.MfcGas2.FeedBack"  units="" eventTrigger=" " />
    74. 

  74. 	<StatusVariable id="430020" valueType="Ascii" logicalName="PMA.IoMfc.MfcGas2.SetPoint"  units="" eventTrigger=" " />
    75. 

  75. 	<StatusVariable id="430021" valueType="Ascii" logicalName="PMA.IoMfc.MfcGas3.FeedBack"  units="" eventTrigger=" " />
    76. 

  76. 	<StatusVariable id="430022" valueType="Ascii" logicalName="PMA.IoMfc.MfcGas3.SetPoint"  units="" eventTrigger=" " />
    77. 

  77. 	<StatusVariable id="430023" valueType="Ascii" logicalName="PMA.IoMfc.MfcGas4.FeedBack"  units="" eventTrigger=" " />
    78. 

  78. 	<StatusVariable id="430024" valueType="Ascii" logicalName="PMA.IoMfc.MfcGas4.SetPoint"  units="" eventTrigger=" " />
    79. 

  79. 	<StatusVariable id="430025" valueType="Ascii" logicalName="PMA.IoMfc.MfcGas5.FeedBack"  units="" eventTrigger=" " />
    80. 

  80. 	<StatusVariable id="430026" valueType="Ascii" logicalName="PMA.IoMfc.MfcGas5.SetPoint"  units="" eventTrigger=" " />
    81. 

  81. 	<StatusVariable id="430027" valueType="Ascii" logicalName="PMA.BiasMatch.C1"  units="" eventTrigger=" " />
    82. 

  82. 	<StatusVariable id="430028" valueType="Ascii" logicalName="PMA.BiasMatch.C2"  units="" eventTrigger=" " />
    83. 

  83. 	<StatusVariable id="430029" valueType="Ascii" logicalName="PMA.BiasMatch.MatchProcessMode"  units="" eventTrigger=" " />
    84. 

  84. 	<StatusVariable id="430030" valueType="Ascii" logicalName="PMA.BiasMatch.VPP"  units="" eventTrigger=" " />
    85. 

  85. 	<StatusVariable id="430031" valueType="Ascii" logicalName="PMA.BiasRf.ForwardPower"  units="" eventTrigger=" " />
    86. 

  86. 	<StatusVariable id="430032" valueType="Ascii" logicalName="PMA.BiasRf.Frequency"  units="" eventTrigger=" " />
    87. 

  87. 	<StatusVariable id="430033" valueType="Ascii" logicalName="PMA.BiasRf.PowerSetPoint"  units="" eventTrigger=" " />
    88. 

  88. 	<StatusVariable id="430034" valueType="Ascii" logicalName="PMA.BiasRf.PulsingDutyCycle"  units="" eventTrigger=" " />
    89. 

  89. 	<StatusVariable id="430035" valueType="Ascii" logicalName="PMA.BiasRf.PulsingFrequency"  units="" eventTrigger=" " />
    90. 

  90. 	<StatusVariable id="430036" valueType="Ascii" logicalName="PMA.BiasRf.ReflectPower"  units="" eventTrigger=" " />
    91. 

  91. 	<StatusVariable id="430037" valueType="Ascii" logicalName="PMA.ChamberPressure"  units="" eventTrigger=" " />
    92. 

  92. 	<StatusVariable id="430038" valueType="Ascii" logicalName="PMA.Chiller.ControlTcFeedback"  units="" eventTrigger=" " />
    93. 

  93. 	<StatusVariable id="430039" valueType="Ascii" logicalName="PMA.Chiller.ControlTcSetPoint"  units="" eventTrigger=" " />
    94. 

  94. 	<StatusVariable id="430040" valueType="Ascii" logicalName="PMA.Chiller.CoolantInletTempFeedback"  units="" eventTrigger=" " />
    95. 

  95. 	<StatusVariable id="430041" valueType="Ascii" logicalName="PMA.Chiller.CoolantOutletTempFeedback"  units="" eventTrigger=" " />
    96. 

  96. 	<StatusVariable id="430042" valueType="Ascii" logicalName="PMA.Chiller.Temperature"  units="" eventTrigger=" " />
    97. 

  97. 	<StatusVariable id="430043" valueType="Ascii" logicalName="PMA.ForelineGauge.Value"  units="" eventTrigger=" " />
    98. 

  98. 	<StatusVariable id="430044" valueType="Ascii" logicalName="PMA.IoHeater.ForelineHeater.ControlTcFeedback"  units="" eventTrigger=" " />
    99. 

  99. 	<StatusVariable id="430045" valueType="Ascii" logicalName="PMA.IoHeater.ForelineHeater.ControlTcSetPoint"  units="" eventTrigger=" " />
    100. 

  100. 	<StatusVariable id="430046" valueType="Ascii" logicalName="PMA.IoHeater.ForelineHeater.ControlTcSetPointView"  units="" eventTrigger=" " />
    101. 

  101. 	<StatusVariable id="430047" valueType="Ascii" logicalName="PMA.IoHeater.ForelineHeater.CoolantInletTempFeedback"  units="" eventTrigger=" " />
    102. 

  102. 	<StatusVariable id="430048" valueType="Ascii" logicalName="PMA.IoHeater.ForelineHeater.CoolantOutletTempFeedback"  units="" eventTrigger=" " />
    103. 

  103. 	<StatusVariable id="430049" valueType="Ascii" logicalName="PMA.IoHeater.ForelineHeater.MonitorTcFeedback"  units="" eventTrigger=" " />
    104. 

  104. 	<StatusVariable id="430050" valueType="Ascii" logicalName="PMA.IoHeater.HeaterChamber.ControlTcFeedback"  units="" eventTrigger=" " />
    105. 

  105. 	<StatusVariable id="430051" valueType="Ascii" logicalName="PMA.IoHeater.HeaterChamber.ControlTcSetPoint"  units="" eventTrigger=" " />
    106. 

  106. 	<StatusVariable id="430052" valueType="Ascii" logicalName="PMA.IoHeater.HeaterChamber.ControlTcSetPointView"  units="" eventTrigger=" " />
    107. 

  107. 	<StatusVariable id="430053" valueType="Ascii" logicalName="PMA.IoHeater.HeaterChamber.CoolantInletTempFeedback"  units="" eventTrigger=" " />
    108. 

  108. 	<StatusVariable id="430054" valueType="Ascii" logicalName="PMA.IoHeater.HeaterChamber.CoolantOutletTempFeedback"  units="" eventTrigger=" " />
    109. 

  109. 	<StatusVariable id="430055" valueType="Ascii" logicalName="PMA.IoHeater.HeaterChamber.MonitorTcFeedback"  units="" eventTrigger=" " />
    110. 

  110. 	<StatusVariable id="430056" valueType="Ascii" logicalName="PMA.PressureGauge.Value"  units="" eventTrigger=" " />
    111. 

  111. 	<StatusVariable id="430057" valueType="Ascii" logicalName="PMA.ProcessGauge.Value"  units="" eventTrigger=" " />
    112. 

  112. 	<StatusVariable id="430058" valueType="Ascii" logicalName="PMA.Rf.ForwardPower"  units="" eventTrigger=" " />
    113. 

  113. 	<StatusVariable id="430059" valueType="Ascii" logicalName="PMA.Rf.Frequency"  units="" eventTrigger=" " />
    114. 

  114. 	<StatusVariable id="430060" valueType="Ascii" logicalName="PMA.Rf.PowerSetPoint"  units="" eventTrigger=" " />
    115. 

  115. 	<StatusVariable id="430061" valueType="Ascii" logicalName="PMA.Rf.PulsingDutyCycle"  units="" eventTrigger=" " />
    116. 

  116. 	<StatusVariable id="430062" valueType="Ascii" logicalName="PMA.Rf.PulsingFrequency"  units="" eventTrigger=" " />
    117. 

  117. 	<StatusVariable id="430063" valueType="Ascii" logicalName="PMA.Rf.ReflectPower"  units="" eventTrigger=" " />
    118. 

  118. 	<StatusVariable id="430064" valueType="Ascii" logicalName="PMA.StepNo"  units="" eventTrigger=" " />
    119. 

  119. 	<StatusVariable id="430065" valueType="Ascii" logicalName="PMA.RecipeProcessTime"  units="s" eventTrigger=" " />
    120. 

  120. 	<StatusVariable id="430066" valueType="Ascii" logicalName="PMA.RecipeStepTimeElapsed"  units="s" eventTrigger=" " />
    121. 

  121. 	<StatusVariable id="430067" valueType="Ascii" logicalName="PMA.RecipeStepTimeSetPoint"  units="s" eventTrigger=" " />
    122. 

  122. 	<StatusVariable id="440001" valueType="Ascii" logicalName="PMB.IoPressureMeter.PressureMeterChamber.Feedback"  units="" eventTrigger=" " />
    123. 

  123. 	<StatusVariable id="440002" valueType="Ascii" logicalName="PMB.IoThrottleValve.ThrottleValve.TVPosition"  units="" eventTrigger=" " />
    124. 

  124. 	<StatusVariable id="440003" valueType="Ascii" logicalName="PMB.IoThrottleValve.ThrottleValve.TVPositionSetPoint"  units="" eventTrigger=" " />
    125. 

  125. 	<StatusVariable id="440004" valueType="Ascii" logicalName="PMB.IoThrottleValve.ThrottleValve.TVPressure"  units="" eventTrigger=" " />
    126. 

  126. 	<StatusVariable id="440005" valueType="Ascii" logicalName="PMB.IoThrottleValve.ThrottleValve.TVPressureSetPoint"  units="" eventTrigger=" " />
    127. 

  127. 	<StatusVariable id="440006" valueType="Ascii" logicalName="PMB.IoPump.MainPump.N2PressureValue"  units="" eventTrigger=" " />
    128. 

  128. 	<StatusVariable id="440007" valueType="Ascii" logicalName="PMB.IoPump.MainPump.WaterFlowValue"  units="" eventTrigger=" " />
    129. 

  129. 	<StatusVariable id="440008" valueType="Ascii" logicalName="PMB.IoRf.Rf.RFSetPoint"  units="" eventTrigger=" " />
    130. 

  130. 	<StatusVariable id="440009" valueType="Ascii" logicalName="PMB.IoRf.Rf.RFForwardPower"  units="" eventTrigger=" " />
    131. 

  131. 	<StatusVariable id="440010" valueType="Ascii" logicalName="PMB.IoRf.Rf.RFReflectPower"  units="" eventTrigger=" " />
    132. 

  132. 	<StatusVariable id="440011" valueType="Ascii" logicalName="PMB.IoRf.Rf.RFMatchPositionC1Feedback"  units="" eventTrigger=" " />
    133. 

  133. 	<StatusVariable id="440012" valueType="Ascii" logicalName="PMB.IoRf.Rf.RFMatchPositionC2Feedback"  units="" eventTrigger=" " />
    134. 

  134. 	<StatusVariable id="440013" valueType="Ascii" logicalName="PMB.IoRf.Rf.RFMatchPositionC1SetPoint"  units="" eventTrigger=" " />
    135. 

  135. 	<StatusVariable id="440014" valueType="Ascii" logicalName="PMB.IoRf.Rf.RFMatchPositionC2SetPoint"  units="" eventTrigger=" " />
    136. 

  136. 	<StatusVariable id="440015" valueType="Ascii" logicalName="PMB.IoRf.Rf.RFFrequency"  units="" eventTrigger=" " />
    137. 

  137. 	<StatusVariable id="440016" valueType="Ascii" logicalName="PMB.IoRf.Rf.RFDuty"  units="" eventTrigger=" " />
    138. 

  138. 	<StatusVariable id="440017" valueType="Ascii" logicalName="PMB.IoMfc.MfcGas1.FeedBack"  units="" eventTrigger=" " />
    139. 

  139. 	<StatusVariable id="440018" valueType="Ascii" logicalName="PMB.IoMfc.MfcGas1.SetPoint"  units="" eventTrigger=" " />
    140. 

  140. 	<StatusVariable id="440019" valueType="Ascii" logicalName="PMB.IoMfc.MfcGas2.FeedBack"  units="" eventTrigger=" " />
    141. 

  141. 	<StatusVariable id="440020" valueType="Ascii" logicalName="PMB.IoMfc.MfcGas2.SetPoint"  units="" eventTrigger=" " />
    142. 

  142. 	<StatusVariable id="440021" valueType="Ascii" logicalName="PMB.IoMfc.MfcGas3.FeedBack"  units="" eventTrigger=" " />
    143. 

  143. 	<StatusVariable id="440022" valueType="Ascii" logicalName="PMB.IoMfc.MfcGas3.SetPoint"  units="" eventTrigger=" " />
    144. 

  144. 	<StatusVariable id="440023" valueType="Ascii" logicalName="PMB.IoMfc.MfcGas4.FeedBack"  units="" eventTrigger=" " />
    145. 

  145. 	<StatusVariable id="440024" valueType="Ascii" logicalName="PMB.IoMfc.MfcGas4.SetPoint"  units="" eventTrigger=" " />
    146. 

  146. 	<StatusVariable id="440025" valueType="Ascii" logicalName="PMB.IoMfc.MfcGas5.FeedBack"  units="" eventTrigger=" " />
    147. 

  147. 	<StatusVariable id="440026" valueType="Ascii" logicalName="PMB.IoMfc.MfcGas5.SetPoint"  units="" eventTrigger=" " />
    148. 

  148. 	<StatusVariable id="440027" valueType="Ascii" logicalName="PMB.BiasMatch.C1"  units="" eventTrigger=" " />
    149. 

  149. 	<StatusVariable id="440028" valueType="Ascii" logicalName="PMB.BiasMatch.C2"  units="" eventTrigger=" " />
    150. 

  150. 	<StatusVariable id="440029" valueType="Ascii" logicalName="PMB.BiasMatch.MatchProcessMode"  units="" eventTrigger=" " />
    151. 

  151. 	<StatusVariable id="440030" valueType="Ascii" logicalName="PMB.BiasMatch.VPP"  units="" eventTrigger=" " />
    152. 

  152. 	<StatusVariable id="440031" valueType="Ascii" logicalName="PMB.BiasRf.ForwardPower"  units="" eventTrigger=" " />
    153. 

  153. 	<StatusVariable id="440032" valueType="Ascii" logicalName="PMB.BiasRf.Frequency"  units="" eventTrigger=" " />
    154. 

  154. 	<StatusVariable id="440033" valueType="Ascii" logicalName="PMB.BiasRf.PowerSetPoint"  units="" eventTrigger=" " />
    155. 

  155. 	<StatusVariable id="440034" valueType="Ascii" logicalName="PMB.BiasRf.PulsingDutyCycle"  units="" eventTrigger=" " />
    156. 

  156. 	<StatusVariable id="440035" valueType="Ascii" logicalName="PMB.BiasRf.PulsingFrequency"  units="" eventTrigger=" " />
    157. 

  157. 	<StatusVariable id="440036" valueType="Ascii" logicalName="PMB.BiasRf.ReflectPower"  units="" eventTrigger=" " />
    158. 

  158. 	<StatusVariable id="440037" valueType="Ascii" logicalName="PMB.ChamberPressure"  units="" eventTrigger=" " />
    159. 

  159. 	<StatusVariable id="440038" valueType="Ascii" logicalName="PMB.Chiller.ControlTcFeedback"  units="" eventTrigger=" " />
    160. 

  160. 	<StatusVariable id="440039" valueType="Ascii" logicalName="PMB.Chiller.ControlTcSetPoint"  units="" eventTrigger=" " />
    161. 

  161. 	<StatusVariable id="440040" valueType="Ascii" logicalName="PMB.Chiller.CoolantInletTempFeedback"  units="" eventTrigger=" " />
    162. 

  162. 	<StatusVariable id="440041" valueType="Ascii" logicalName="PMB.Chiller.CoolantOutletTempFeedback"  units="" eventTrigger=" " />
    163. 

  163. 	<StatusVariable id="440042" valueType="Ascii" logicalName="PMB.Chiller.Temperature"  units="" eventTrigger=" " />
    164. 

  164. 	<StatusVariable id="440043" valueType="Ascii" logicalName="PMB.ForelineGauge.Value"  units="" eventTrigger=" " />
    165. 

  165. 	<StatusVariable id="440044" valueType="Ascii" logicalName="PMB.IoHeater.ForelineHeater.ControlTcFeedback"  units="" eventTrigger=" " />
    166. 

  166. 	<StatusVariable id="440045" valueType="Ascii" logicalName="PMB.IoHeater.ForelineHeater.ControlTcSetPoint"  units="" eventTrigger=" " />
    167. 

  167. 	<StatusVariable id="440046" valueType="Ascii" logicalName="PMB.IoHeater.ForelineHeater.ControlTcSetPointView"  units="" eventTrigger=" " />
    168. 

  168. 	<StatusVariable id="440047" valueType="Ascii" logicalName="PMB.IoHeater.ForelineHeater.CoolantInletTempFeedback"  units="" eventTrigger=" " />
    169. 

  169. 	<StatusVariable id="440048" valueType="Ascii" logicalName="PMB.IoHeater.ForelineHeater.CoolantOutletTempFeedback"  units="" eventTrigger=" " />
    170. 

  170. 	<StatusVariable id="440049" valueType="Ascii" logicalName="PMB.IoHeater.ForelineHeater.MonitorTcFeedback"  units="" eventTrigger=" " />
    171. 

  171. 	<StatusVariable id="440050" valueType="Ascii" logicalName="PMB.IoHeater.HeaterChamber.ControlTcFeedback"  units="" eventTrigger=" " />
    172. 

  172. 	<StatusVariable id="440051" valueType="Ascii" logicalName="PMB.IoHeater.HeaterChamber.ControlTcSetPoint"  units="" eventTrigger=" " />
    173. 

  173. 	<StatusVariable id="440052" valueType="Ascii" logicalName="PMB.IoHeater.HeaterChamber.ControlTcSetPointView"  units="" eventTrigger=" " />
    174. 

  174. 	<StatusVariable id="440053" valueType="Ascii" logicalName="PMB.IoHeater.HeaterChamber.CoolantInletTempFeedback"  units="" eventTrigger=" " />
    175. 

  175. 	<StatusVariable id="440054" valueType="Ascii" logicalName="PMB.IoHeater.HeaterChamber.CoolantOutletTempFeedback"  units="" eventTrigger=" " />
    176. 

  176. 	<StatusVariable id="440055" valueType="Ascii" logicalName="PMB.IoHeater.HeaterChamber.MonitorTcFeedback"  units="" eventTrigger=" " />
    177. 

  177. 	<StatusVariable id="440056" valueType="Ascii" logicalName="PMB.PressureGauge.Value"  units="" eventTrigger=" " />
    178. 

  178. 	<StatusVariable id="440057" valueType="Ascii" logicalName="PMB.ProcessGauge.Value"  units="" eventTrigger=" " />
    179. 

  179. 	<StatusVariable id="440058" valueType="Ascii" logicalName="PMB.Rf.ForwardPower"  units="" eventTrigger=" " />
    180. 

  180. 	<StatusVariable id="440059" valueType="Ascii" logicalName="PMB.Rf.Frequency"  units="" eventTrigger=" " />
    181. 

  181. 	<StatusVariable id="440060" valueType="Ascii" logicalName="PMB.Rf.PowerSetPoint"  units="" eventTrigger=" " />
    182. 

  182. 	<StatusVariable id="440061" valueType="Ascii" logicalName="PMB.Rf.PulsingDutyCycle"  units="" eventTrigger=" " />
    183. 

  183. 	<StatusVariable id="440062" valueType="Ascii" logicalName="PMB.Rf.PulsingFrequency"  units="" eventTrigger=" " />
    184. 

  184. 	<StatusVariable id="440063" valueType="Ascii" logicalName="PMB.Rf.ReflectPower"  units="" eventTrigger=" " />
    185. 

  185. 	<StatusVariable id="440064" valueType="Ascii" logicalName="PMB.StepNo"  units="" eventTrigger=" " />
    186. 

  186. 	<StatusVariable id="440065" valueType="Ascii" logicalName="PMB.RecipeProcessTime"  units="s" eventTrigger=" " />
    187. 

  187. 	<StatusVariable id="440066" valueType="Ascii" logicalName="PMB.RecipeStepTimeElapsed"  units="s" eventTrigger=" " />
    188. 

  188. 	<StatusVariable id="440067" valueType="Ascii" logicalName="PMB.RecipeStepTimeSetPoint"  units="s" eventTrigger=" " />
    189. 

  189.   </StatusVariables>
    190. 

  190.   <EquipmentConstants>
    191. 

  191.     <EquipmentConstant id="2000" valueType="U2" logicalName="EstablishCommunicationsTimeout" value="2" min="0" max="100" units="" defaultValue="" eventTrigger="" />
    192. 

  192.     <EquipmentConstant id="2001" valueType="U4" logicalName="FA.SpoolingMaxTransmit" value="100" min="0" max="100" units="" defaultValue="" eventTrigger="" />
    193. 

  193.     <EquipmentConstant id="2003" valueType="Boolean" logicalName="FA.SpoolingFullOverWrite" value="FALSE" min="" max="" units="" defaultValue="" eventTrigger="" />
    194. 

  194.     <EquipmentConstant id="2005" valueType="U4" logicalName="FA.SpoolingCapability" value="100" min="0" max="100" units="" defaultValue="" eventTrigger="" />
    195. 

  195.     <EquipmentConstant id="2006" valueType="Boolean" logicalName="SpoolEnabled" value="False" min="" max="" units="" defaultValue="" eventTrigger="" />
    196. 

  196.     <EquipmentConstant id="2007" valueType="U1" logicalName="TimeFormat" value="0" min="0" max="100" units="" defaultValue="" eventTrigger="" />
    197. 

  197.   </EquipmentConstants>
    198. 

  198.   <DataVariables>
    199. 

  199.     <DataVariable id="3007" valueType="I4" logicalName="ECChangedID" eventTrigger="" />
    200. 

  200. 	<DataVariable id="3001" valueType="U4" logicalName="EventLimit" eventTrigger="" />
    201. 

  201. 	<DataVariable id="3002" valueType="U4" logicalName="LimitVariable" eventTrigger="" />
    202. 

  202. 	<DataVariable id="3003" valueType="Ascii" logicalName="PPChangeName" eventTrigger="" />
    203. 

  203. 	<DataVariable id="3004" valueType="U2" logicalName="PPChangeStatus" eventTrigger="" />
    204. 

  204. 	<DataVariable id="3005" valueType="Binary" logicalName="TransitionType" eventTrigger="" />
    205. 

  205. 	<DataVariable id="3006" valueType="U4" logicalName="AlarmID" eventTrigger="" />
    206. 

  206. 	<DataVariable id="3007" valueType="U4" logicalName="ECChangedID" eventTrigger="" />
    207. 

  207. 	<DataVariable id="3101" valueType="Ascii" logicalName="EventName" eventTrigger="" />
    208. 

  208. 	<DataVariable id="3102" valueType="Ascii" logicalName="LotID" eventTrigger="" />
    209. 

  209. 	<DataVariable id="3103" valueType="Ascii" logicalName="RecipeID" eventTrigger="" />
    210. 

  210. 	<DataVariable id="3104" valueType="Ascii" logicalName="JobID" eventTrigger="" />
    211. 

  211. 	<DataVariable id="3105" valueType="Ascii" logicalName="PortID" eventTrigger="" />
    212. 

  212. 	<DataVariable id="3106" valueType="Ascii" logicalName="SlotMap" eventTrigger="" />
    213. 

  213. 	<DataVariable id="3107" valueType="Ascii" logicalName="SequenceID" eventTrigger="" />
    214. 

  214. 	<DataVariable id="3108" valueType="Ascii" logicalName="StationName" eventTrigger="" />
    215. 

  215. 	<DataVariable id="3109" valueType="Ascii" logicalName="RecipeStepNumber" eventTrigger="" />
    216. 

  216. 	<DataVariable id="3110" valueType="Ascii" logicalName="SlotID" eventTrigger="" />
    217. 

  217. 	<DataVariable id="3111" valueType="Ascii" logicalName="ProcessedWaferCount" eventTrigger="" />
    218. 

  218. 	<DataVariable id="3112" valueType="Ascii" logicalName="CarrierID" eventTrigger="" />
    219. 

  219. 	<DataVariable id="3113" valueType="Ascii" logicalName="TagData" eventTrigger="" />
    220. 

  220. 	<DataVariable id="3114" valueType="List" logicalName="RecipeStepEndDataSummary" eventTrigger="" />
    221. 

  221. 	<DataVariable id="3115" valueType="U4" logicalName="WaferProcessResult" eventTrigger="" />
    222. 

  222.   </DataVariables>
    223. 

  223.   <AlarmVariables>
    224. 

  224. 	  <AlarmVariable id="1" logicalName="EMOPressed" description="EMO Pressed" category="PersonalSafety" enabled="true"/>
    225. 

  225. 	  <AlarmVariable id="2" logicalName="LidError" description="Lid Error" category="PersonalSafety" enabled="true"/>
    226. 

  226. 	  <AlarmVariable id="3" logicalName="MFCOffline" description="MFC Offline" category="PersonalSafety" enabled="true"/>
    227. 

  227. 	  <AlarmVariable id="4" logicalName="VacuumGaugeError" description="Vacuum Gauge Error" category="PersonalSafety" enabled="true"/>
    228. 

  228. 	  <AlarmVariable id="5" logicalName="PressureOutOfTolerance" description="Pressure Out Of Tolerance" category="PersonalSafety" enabled="true"/>
    229. 

  229. 	  <AlarmVariable id="6" logicalName="PumpError" description="Pump Error" category="PersonalSafety" enabled="true"/>
    230. 

  230. 	  <AlarmVariable id="7" logicalName="RFGeneratorOffline" description="RF Generator Offline" category="PersonalSafety" enabled="true"/>
    231. 

  231. 	  <AlarmVariable id="8" logicalName="RFHighReflect" description="RF High Reflect" category="PersonalSafety" enabled="true"/>
    232. 

  232. 	  <AlarmVariable id="9" logicalName="RFHardwareInterlock" description="R FHardware Interlock" category="PersonalSafety" enabled="true"/>
    233. 

  233. 	  <AlarmVariable id="10" logicalName="GasFlowOutOfTolerance" description="Gas Flow Out Of Tolerance" category="PersonalSafety" enabled="true"/>
    234. 

  234. 	  <AlarmVariable id="11" logicalName="RFOutOfTolerance" description="RF Out Of Tolerance" category="PersonalSafety" enabled="true"/>
    235. 

  235. 	  <AlarmVariable id="12" logicalName="WaferProtrude" description="WaferProtrude" category="PersonalSafety" enabled="true"/>
    236. 

  236. 	  <AlarmVariable id="13" logicalName="EFEMSideDoorOpen" description="EFEM Side Door Open" category="PersonalSafety" enabled="true"/>
    237. 

  237. 	  <AlarmVariable id="14" logicalName="EFEMVacuumPressureError" description="EFEM Vacuum Pressure Error" category="PersonalSafety" enabled="true"/>
    238. 

  238. 	  <AlarmVariable id="15" logicalName="EFEMCDAError" description="EFEM CDA Error" category="PersonalSafety" enabled="true"/>
    239. 

  239. 	  <AlarmVariable id="16" logicalName="EFEMFlowGaugeSensorError" description="EFEM Flow Gauge Sensor Error" category="PersonalSafety" enabled="true"/>
    240. 

  240. 	  <AlarmVariable id="17" logicalName="EFEMLeakageAlarm" description="EFEM Leakage Alarm" category="PersonalSafety" enabled="true"/>
    241. 

  241. 	  <AlarmVariable id="18" logicalName="EFEMIonizerAlarm" description="EFEM Ionizer Alarm" category="PersonalSafety" enabled="true"/>
    242. 

  242. 	  <AlarmVariable id="19" logicalName="EFEMFFUAlarm" description="EFEM FFU Alarm" category="PersonalSafety" enabled="true"/>
    243. 

  243. 	  <AlarmVariable id="20" logicalName="EFEMOffline" description="EFEM Offline" category="PersonalSafety" enabled="true"/>
    244. 

  244. 	  <AlarmVariable id="21" logicalName="EFEMCommunicationError" description="EFEM Communication Error" category="PersonalSafety" enabled="true"/>
    245. 

  245. 	  <AlarmVariable id="22" logicalName="WaferTransferFailed" description="Wafer Transfer Failed" category="PersonalSafety" enabled="true"/>
    246. 

  246. 	  <AlarmVariable id="23" logicalName="EFEMError" description="EFEM Operation failed" category="PersonalSafety" enabled="true"/>
    247. 

  247. 	  <AlarmVariable id="24" logicalName="RecipeFileInvalid" description="Recipe File Invalid" category="PersonalSafety" enabled="true"/>
    248. 

  248. 	  <AlarmVariable id="25" logicalName="ALARM_EVENT" description="System Error" category="PersonalSafety" enabled="true"/>
    249. 

  249.   </AlarmVariables>
    250. 

  250.   <Reports>
    251. 

  251.     <Report id="1" logicalName="HostDefinedReport_1">
    252. 

  252.       <Variables>
    253. 

  253.         <ReportVariable id="3" variableType="StatusVariable" logicalName="Clock" />
    254. 

  254.         <ReportVariable id="4" variableType="StatusVariable" logicalName="ControlState" />
    255. 

  255.       </Variables>
    256. 

  256.     </Report>
    257. 

  257. 	<Report id="2" logicalName="ProcessingReport">
    258. 

  258. 		<Variables>
    259. 

  259. 			<ReportVariable id="3" varType="StatusVariable" logicalName="Clock" />
    260. 

  260. 			<ReportVariable id="7" varType="StatusVariable" logicalName="PreviousProcessState" />
    261. 

  261. 		</Variables>
    262. 

  262. 	</Report>
    263. 

  263. 	<Report id="4" logicalName="ProcessingStateChangedReport">
    264. 

  264. 		<Variables>
    265. 

  265. 			<ReportVariable id="3" varType="StatusVariable" logicalName="Clock" />
    266. 

  266. 			<ReportVariable id="8" varType="StatusVariable" logicalName="ProcessState" />
    267. 

  267. 			<ReportVariable id="7" varType="StatusVariable" logicalName="PreviousProcessState" />
    268. 

  268. 		</Variables>
    269. 

  269. 	</Report>
    270. 

  270. 	<Report id="5" logicalName="ECChangedReport">
    271. 

  271. 		<Variables>
    272. 

  272. 			<ReportVariable id="3007" varType="DataVariable" logicalName="ECChangedID" />
    273. 

  273. 		</Variables>
    274. 

  274. 	</Report>
    275. 

  275. 	<Report id="6" logicalName="PPChangedReport">
    276. 

  276. 		<Variables>
    277. 

  277. 			<ReportVariable id="3003" varType="DataVariable" logicalName="PPChangeName" />
    278. 

  278. 			<ReportVariable id="3004" varType="DataVariable" logicalName="PPChangeStatus" />
    279. 

  279. 		</Variables>
    280. 

  280. 	</Report>
    281. 

  281. 	<Report id="7" logicalName="PPSelectedReport">
    282. 

  282. 		<Variables>
    283. 

  283. 			<ReportVariable id="6" varType="StatusVariable" logicalName="PPExecName" />
    284. 

  284. 		</Variables>
    285. 

  285. 	</Report>
    286. 

  286. 	<Report id="8" logicalName="AlarmEventReport">
    287. 

  287. 		<Variables>
    288. 

  288. 			<ReportVariable id="3006" varType="DataVariable" logicalName="AlarmID" />
    289. 

  289. 			<ReportVariable id="3" varType="StatusVariable" logicalName="Clock" />
    290. 

  290. 			<ReportVariable id="2" varType="StatusVariable" logicalName="AlarmsSet" />
    291. 

  291. 		</Variables>
    292. 

  292. 	</Report>
    293. 

  293.   </Reports>
    294. 

  294.   <CollectionEvents>
    295. 

  295.     <CollectionEvent id="1" logicalName="EquipmentOFFLINE" description="" enabled="true">
    296. 

  296.       <Reports>
    297. 

  297.         <int>1</int>
    298. 

  298.       </Reports>
    299. 

  299.     </CollectionEvent>
    300. 

  300. 	<CollectionEvent id="2" logicalName="ControlStateLOCAL" description=" " enabled="true">
    301. 

  301. 		<Reports>
    302. 

  302. 			<int>1</int>
    303. 

  303. 		</Reports>
    304. 

  304. 	</CollectionEvent>
    305. 

  305. 	<CollectionEvent id="3" logicalName="ControlStateREMOTE" description=" " enabled="true">
    306. 

  306. 		<Reports>
    307. 

  307. 			<int>1</int>
    308. 

  308. 		</Reports>
    309. 

  309. 	</CollectionEvent>
    310. 

  310. 	<CollectionEvent id="4" logicalName="ProcessingStarted" description=" " enabled="true">
    311. 

  311. 		<Reports>
    312. 

  312. 			<int>2</int>
    313. 

  313. 		</Reports>
    314. 

  314. 	</CollectionEvent>
    315. 

  315. 	<CollectionEvent id="5" logicalName="ProcessingCompleted" description=" " enabled="true">
    316. 

  316. 		<Reports>
    317. 

  317. 			<int>2</int>
    318. 

  318. 		</Reports>
    319. 

  319. 	</CollectionEvent>
    320. 

  320. 	<CollectionEvent id="6" logicalName="ProcessingStopped" description=" " enabled="true">
    321. 

  321. 		<Reports>
    322. 

  322. 			<int>2</int>
    323. 

  323. 		</Reports>
    324. 

  324. 	</CollectionEvent>
    325. 

  325. 	<CollectionEvent id="7" logicalName="ProcessingStateChanged" description=" " enabled="true">
    326. 

  326. 		<Reports>
    327. 

  327. 			<int>4</int>
    328. 

  328. 		</Reports>
    329. 

  329. 	</CollectionEvent>
    330. 

  330. 	<CollectionEvent id="8" logicalName="EquipmentConstantChanged" description=" " enabled="true">
    331. 

  331. 		<Reports>
    332. 

  332. 			<int>5</int>
    333. 

  333. 		</Reports>
    334. 

  334. 	</CollectionEvent>
    335. 

  335. 	<CollectionEvent id="9" logicalName="ProcessProgramChanged" description=" " enabled="true">
    336. 

  336. 		<Reports>
    337. 

  337. 			<int>6</int>
    338. 

  338. 		</Reports>
    339. 

  339. 	</CollectionEvent>
    340. 

  340. 	<CollectionEvent id="10" logicalName="ProcessProgramSelected" description=" " enabled="true">
    341. 

  341. 		<Reports>
    342. 

  342. 			<int>7</int>
    343. 

  343. 		</Reports>
    344. 

  344. 	</CollectionEvent>
    345. 

  345. 	<CollectionEvent id="11" logicalName="SpoolingActivated" description=" " enabled="true" />
    346. 

  346. 	<CollectionEvent id="12" logicalName="SpoolingDeactivated" description=" " enabled="true" />
    347. 

  347. 	<CollectionEvent id="13" logicalName="SpoolingFailed" description=" " enabled="true" />
    348. 

  348. 	<CollectionEvent id="1001" logicalName="WaferLeftPosition" description=" " enabled="true" />
    349. 

  349. 	<CollectionEvent id="1002" logicalName="WaferArrivePosition" description=" " enabled="true" />
    350. 

  350. 	<CollectionEvent id="1101" logicalName="Port1LoadComplete" description=" " enabled="true" />
    351. 

  351. 	<CollectionEvent id="1102" logicalName="Port1LoadFailed" description=" " enabled="true" />
    352. 

  352. 	<CollectionEvent id="1103" logicalName="Port1UnloadComplete" description=" " enabled="true" />
    353. 

  353. 	<CollectionEvent id="1104" logicalName="Port1UnloadFailed" description=" " enabled="true" />
    354. 

  354. 	<CollectionEvent id="1105" logicalName="Port1CassetteArrive" description=" " enabled="true" />
    355. 

  355. 	<CollectionEvent id="1106" logicalName="Port1CassetteRemoved" description=" " enabled="true" />
    356. 

  356. 	<CollectionEvent id="1107" logicalName="Port1JobStarted" description=" " enabled="true" />
    357. 

  357. 	<CollectionEvent id="1108" logicalName="Port1JobStopped" description=" " enabled="true" />
    358. 

  358. 	<CollectionEvent id="1109" logicalName="Port1JobPaused" description=" " enabled="true" />
    359. 

  359. 	<CollectionEvent id="1110" logicalName="Port1JobResumed" description=" " enabled="true" />
    360. 

  360. 	<CollectionEvent id="1111" logicalName="Port1JobAborted" description=" " enabled="true" />
    361. 

  361. 	<CollectionEvent id="1112" logicalName="Port1JobFinished" description=" " enabled="true" />
    362. 

  362. 	<CollectionEvent id="1113" logicalName="Port1JobFailed" description=" " enabled="true" />
    363. 

  363. 	<CollectionEvent id="1114" logicalName="Port1MappingComplete" description=" " enabled="true" />
    364. 

  364. 	<CollectionEvent id="1115" logicalName="Port1MappingFailed" description=" " enabled="true" />
    365. 

  365. 	<CollectionEvent id="1116" logicalName="Port1SequenceSelected" description=" " enabled="true" />
    366. 

  366. 	<CollectionEvent id="1117" logicalName="Port1SequenceSelectFailed" description=" " enabled="true" />
    367. 

  367. 	<CollectionEvent id="1118" logicalName="Port1JobWaferStart" description=" " enabled="true" />
    368. 

  368. 	<CollectionEvent id="1119" logicalName="Port1JobWaferEnd" description=" " enabled="true" />
    369. 

  369. 	<CollectionEvent id="1120" logicalName="Port1Clamped" description=" " enabled="true" />
    370. 

  370. 	<CollectionEvent id="1121" logicalName="Port1Unclamped" description=" " enabled="true" />
    371. 

  371. 	<CollectionEvent id="1122" logicalName="Port1IDRead" description=" " enabled="true" />
    372. 

  372. 	<CollectionEvent id="1123" logicalName="Port1ReadIDFailed" description=" " enabled="true" />
    373. 

  373. 	<CollectionEvent id="1124" logicalName="Port1IDWrite" description=" " enabled="true" />
    374. 

  374. 	<CollectionEvent id="1125" logicalName="Port1WriteIDFailed" description=" " enabled="true" />
    375. 

  375. 	<CollectionEvent id="1126" logicalName="Port1TagDataRead" description=" " enabled="true" />
    376. 

  376. 	<CollectionEvent id="1127" logicalName="Port1ReadTagDataFailed" description=" " enabled="true" />
    377. 

  377. 	<CollectionEvent id="1128" logicalName="Port1TagDataWrite" description=" " enabled="true" />
    378. 

  378. 	<CollectionEvent id="1129" logicalName="Port1WriteTagDataFailed" description=" " enabled="true" />
    379. 

  379. 	<CollectionEvent id="1201" logicalName="Port2LoadComplete" description=" " enabled="true" />
    380. 

  380. 	<CollectionEvent id="1202" logicalName="Port2LoadFailed" description=" " enabled="true" />
    381. 

  381. 	<CollectionEvent id="1203" logicalName="Port2UnloadComplete" description=" " enabled="true" />
    382. 

  382. 	<CollectionEvent id="1204" logicalName="Port2UnloadFailed" description=" " enabled="true" />
    383. 

  383. 	<CollectionEvent id="1205" logicalName="Port2CassetteArrive" description=" " enabled="true" />
    384. 

  384. 	<CollectionEvent id="1206" logicalName="Port2CassetteRemoved" description=" " enabled="true" />
    385. 

  385. 	<CollectionEvent id="1207" logicalName="Port2JobStarted" description=" " enabled="true" />
    386. 

  386. 	<CollectionEvent id="1208" logicalName="Port2JobStopped" description=" " enabled="true" />
    387. 

  387. 	<CollectionEvent id="1209" logicalName="Port2JobPaused" description=" " enabled="true" />
    388. 

  388. 	<CollectionEvent id="1210" logicalName="Port2JobResumed" description=" " enabled="true" />
    389. 

  389. 	<CollectionEvent id="1211" logicalName="Port2JobAborted" description=" " enabled="true" />
    390. 

  390. 	<CollectionEvent id="1212" logicalName="Port2JobFinished" description=" " enabled="true" />
    391. 

  391. 	<CollectionEvent id="1213" logicalName="Port2JobFailed" description=" " enabled="true" />
    392. 

  392. 	<CollectionEvent id="1214" logicalName="Port2MappingComplete" description=" " enabled="true" />
    393. 

  393. 	<CollectionEvent id="1215" logicalName="Port2MappingFailed" description=" " enabled="true" />
    394. 

  394. 	<CollectionEvent id="1216" logicalName="Port2SequenceSelected" description=" " enabled="true" />
    395. 

  395. 	<CollectionEvent id="1217" logicalName="Port2SequenceSelectFailed" description=" " enabled="true" />
    396. 

  396. 	<CollectionEvent id="1218" logicalName="Port2JobWaferStart" description=" " enabled="true" />
    397. 

  397. 	<CollectionEvent id="1219" logicalName="Port2JobWaferEnd" description=" " enabled="true" />
    398. 

  398. 	<CollectionEvent id="1220" logicalName="Port2Clamped" description=" " enabled="true" />
    399. 

  399. 	<CollectionEvent id="1221" logicalName="Port2Unclamped" description=" " enabled="true" />
    400. 

  400. 	<CollectionEvent id="1222" logicalName="Port2IDRead" description=" " enabled="true" />
    401. 

  401. 	<CollectionEvent id="1223" logicalName="Port2ReadIDFailed" description=" " enabled="true" />
    402. 

  402. 	<CollectionEvent id="1224" logicalName="Port2IDWrite" description=" " enabled="true" />
    403. 

  403. 	<CollectionEvent id="1225" logicalName="Port2WriteIDFailed" description=" " enabled="true" />
    404. 

  404. 	<CollectionEvent id="1226" logicalName="Port2TagDataRead" description=" " enabled="true" />
    405. 

  405. 	<CollectionEvent id="1227" logicalName="Port2ReadTagDataFailed" description=" " enabled="true" />
    406. 

  406. 	<CollectionEvent id="1228" logicalName="Port2TagDataWrite" description=" " enabled="true" />
    407. 

  407. 	<CollectionEvent id="1229" logicalName="Port2WriteTagDataFailed" description=" " enabled="true" />
    408. 

  408. 	<CollectionEvent id="2101" logicalName="PM1RecipeStart" description=" " enabled="true" />
    409. 

  409. 	<CollectionEvent id="2102" logicalName="PM1RecipeComplete" description=" " enabled="true" />
    410. 

  410. 	<CollectionEvent id="2103" logicalName="PM1RecipeStepStart" description=" " enabled="true" />
    411. 

  411. 	<CollectionEvent id="2104" logicalName="PM1RecipeStepEnd" description=" " enabled="true" />
    412. 

  412. 	<CollectionEvent id="2105" logicalName="PM1RecipeFailed" description=" " enabled="true" />
    413. 

  413. 	<CollectionEvent id="2106" logicalName="PM1WaferArrivedPosition" description=" " enabled="true" />
    414. 

  414. 	<CollectionEvent id="2107" logicalName="PM1WaferLeftPosition" description=" " enabled="true" />
    415. 

  415. 	<CollectionEvent id="2201" logicalName="PM2RecipeStart" description=" " enabled="true" />
    416. 

  416. 	<CollectionEvent id="2202" logicalName="PM2RecipeComplete" description=" " enabled="true" />
    417. 

  417. 	<CollectionEvent id="2203" logicalName="PM2RecipeStepStart" description=" " enabled="true" />
    418. 

  418. 	<CollectionEvent id="2204" logicalName="PM2RecipeStepEnd" description=" " enabled="true" />
    419. 

  419. 	<CollectionEvent id="2205" logicalName="PM2RecipeFailed" description=" " enabled="true" />
    420. 

  420. 	<CollectionEvent id="2206" logicalName="PM2WaferArrivedPosition" description=" " enabled="true" />
    421. 

  421. 	<CollectionEvent id="2207" logicalName="PM2WaferLeftPosition" description=" " enabled="true" />
    422. 

  422. 	<CollectionEvent id="3101" logicalName="Aligner1WaferArrivedPosition" description=" " enabled="true" />
    423. 

  423. 	<CollectionEvent id="3102" logicalName="Aligner1WaferLeftPosition" description=" " enabled="true" />
    424. 

  424. 	<CollectionEvent id="3201" logicalName="Aligner2WaferArrivedPosition" description=" " enabled="true" />
    425. 

  425. 	<CollectionEvent id="3202" logicalName="Aligner2WaferLeftPosition" description=" " enabled="true" />
    426. 

  426. 	<CollectionEvent id="3301" logicalName="Cooling1WaferArrivedPosition" description=" " enabled="true" />
    427. 

  427. 	<CollectionEvent id="3302" logicalName="Cooling1WaferLeftPosition" description=" " enabled="true" />
    428. 

  428. 	<CollectionEvent id="3401" logicalName="Cooling2WaferArrivedPosition" description=" " enabled="true" />
    429. 

  429. 	<CollectionEvent id="3402" logicalName="Cooling2WaferLeftPosition" description=" " enabled="true" />
    430. 

  430. 	<CollectionEvent id="4001" logicalName="CassetteDoorOpen" description=" " enabled="true" />
    431. 

  431. 	<CollectionEvent id="4002" logicalName="CassetteDoorClose" description=" " enabled="true" />
    432. 

  432.   </CollectionEvents>
    433. 

  433. </EquipmentVariables>
    434.