| 123456789101112131415161718192021222324252627282930313233343536373839404142434445464748495051525354555657585960616263646566676869707172737475767778798081828384858687888990919293949596979899100101102103104105106107108109110111112113114115116117118119120121122123124125126127128129130131132133134135136137138139140141142143144145146147148149150151152153154155156157158159160161162163164165166167168169170171172173174175176177178179180181182183184185186187188189190191192193194195196197198199200201202203204205206207208209210211212213214215216217218219220221222223224225226227228229230231232233234235236237238239240241242243244245246247248249250251252253254255256257258259260261262263264265266267268269270271272273274275276277278279280281282283284285286287288289290291292293294295296297298299300301302303304305306307308309310311312313314315316317318319320321322323324325326327328329330331332333334335336337338339340341342343344345346347348349350351352353354355356357358359360361362363364365366367368369370371372373374375376377378379380381382383384385386387388389390391392393394395396397398399400401402403404405406407408409410411412413414415416417418419420421422423424425426427428429430431432433434435436437438439440441442443444445446447448449450451452453454455456457458459460461462463464465466467468469470471472473474475476477478479480481482483484485486487488489490491492493494495496497498499500501502503504505506507508509510511512513514515516517518519520521522523524525526527528529530531532533534535536537538539540541542543544545546547548549550551552553554555556557558559560561562563564565566567568569570571572573574575576577578579580581582583584585586587588589590591592593594595596597598599600601602603604605606607608609610611612613614615616617618619620621622623624625626627628629630631632633634635636637638639640641642643644645646647648649650651652653654655656657658659660661662663664665666667668669670671672673674675676677678679680681682683684685686687688689690691692693694695696697698699700701702703704705706707708709710711712713714715716717718719720721722723724725726727728729730731732733734735736737738739740741742743744745746747748749750751752753754755756757758759760761762763764765766767768769770771772773774775776777778779780781782783784785786787788789790791792793794795796797798799800801802803804805806807808809810811812813814815816817818819820821822823824825826827828829830831832833834835836837838839840841842843844845846847848849850851852853854855856857858859860861862863864865866867868869870871872873874875876877878879880881882883884885886887888889890891892893894895896897898899900901902903904905906907908909910911912913914915916917918919920921922923924925926927928929930931932933934935936937938939940941942943944945946947948949950951952953954955956957958959960961962963964965966967968969970971972973974975976977978979980981982983984985986987988989990991992993994995996997998999100010011002100310041005100610071008100910101011101210131014101510161017101810191020102110221023102410251026102710281029103010311032103310341035103610371038103910401041104210431044104510461047104810491050105110521053105410551056105710581059106010611062106310641065106610671068106910701071107210731074107510761077107810791080108110821083 | using System;using System.Collections.Generic;using Aitex.Core.Common;using Aitex.Core.RT.Event;using Aitex.Core.Util;using Aitex.Core.RT.SCCore;using Aitex.Sorter.Common;using MECF.Framework.Common.Equipment;using MECF.Framework.Common.SubstrateTrackings;using VirgoCommon;using VirgoRT.Device;using VirgoRT.Device.YASKAWA;using System.Diagnostics;using System.Threading;using Aitex.Core.RT.Device;using Aitex.Core.RT.Log;using VirgoRT.Devices.EFEM;using VirgoRT.Modules;namespace VirgoRT.Devices{    /// <summary>    /// Base action    /// </summary>    abstract class EfemActionBase : ActionBase    {        protected readonly EfemBase _efem;        private readonly EfemEntity.EfemType _efemType;        public EfemOperation Type { get; protected set; }        protected EfemActionBase() : this(null) { }        protected EfemActionBase(EfemBase efem) : base(ModuleName.EFEM)        {            _efem = efem;            _efemType = (EfemEntity.EfemType)SC.GetValue<int>($"EFEM.EfemType");        }        protected void Send(IEfemMessage msg)        {            if (_efemType == EfemEntity.EfemType.BrooksEFEM)            {                if (_efem.BrooksProxy.Connected || Type == EfemOperation.Home)                {                    var _ = _efem.BrooksProxy.Send(msg);                }            }            else            {                _efem.MsgHandler.Send(msg);            }        }    }    class DelayAction : ActionBase    {        private readonly DeviceTimer _timer = new DeviceTimer();        private readonly ushort _delayTime;        public bool IsDone => _timer.IsTimeout();        public DelayAction(ushort delaytime) : base(ModuleName.System)        {            this._delayTime = delaytime;        }        public override void Execute()        {            _timer.Start(this._delayTime * 1000);        }        public override void OnPostWork(string data)        {            EV.PostInfoLog(ModuleName.EFEM.ToString(), $"Delay time [{_delayTime}]");        }    }}namespace VirgoRT.Devices.YASKAWA{    class EfemAction : EfemActionBase    {        public EfemAction(EfemBase device, ModuleName mod) : base(device)        { }        public override void Execute()        {            Send(new EfemMessage            {                Operation = this.Type,                Head = EfemMessage.MsgHead.MOV,                Parameters = new List<string> { Constant.ModuleString[this.Module] }            });            base.Execute();            _efem.Status = DeviceState.Busy;            EV.PostInfoLog(this.Module.ToString(), $"Cmd {this.ID} {this.Type} Start");        }        public override void OnPostWork(string data = null)        {            _efem.Status = DeviceState.Idle;            EV.PostInfoLog(this.Module.ToString(), $"Cmd {this.ID} {this.Type} End");        }    }    /// <summary>    ///    /// </summary>    class HomeAllAction : EfemAction    {        public HomeAllAction(EfemBase efem, ModuleName mod) : base(efem, mod)        {            Type = EfemOperation.Home;            this.Module = mod;        }        public override void OnPostWork(string data = null)        {            _efem[ModuleName.LP1].OnHomed();            _efem[ModuleName.LP2].OnHomed();            base.OnPostWork(data);            var tower = DEVICE.GetDevice<VirgoSignalTower>("System.SignalTower");            if (tower != null)            {                tower.ResetData();            }         }    }    class HomeModuleAction : EfemAction    {        private string _param;        public HomeModuleAction(EfemBase efem, ModuleName mod, string param) : base(efem, mod)        {            Type = EfemOperation.Home;            this.Module = mod;            _param = param;            IsBackground = ModuleHelper.IsLoadPort(mod);        }        public override void Execute()        {            Send(new EfemMessage            {                Operation = this.Type,                Head = EfemMessage.MsgHead.MOV,                Parameters = new List<string> { Constant.ModuleString[this.Module], _param }            });            //base.Execute();             this.Status = ActionStatus.SendCmd;            _efem.Status = DeviceState.Busy;            EV.PostInfoLog(this.Module.ToString(), $"Cmd {this.ID} {this.Type} Start");        }        public override void OnPostWork(string data = null)        {            if (ModuleHelper.IsLoadPort(Module))            {                _efem[Module].OnHomed();            }            EV.PostInfoLog(this.Module.ToString(), $"Cmd {this.ID} {this.Type} End");        }    }    class LoadModuleAction : EfemAction    {        public LoadModuleAction(EfemBase efem, ModuleName mod) : base(efem, mod)        {            Type = EfemOperation.Load;            this.Module = mod;        }        public override void OnPostWork(string data = null)        {            _efem[Module].OnLoaded();            EV.PostInfoLog(this.Module.ToString(), $"Cmd {this.ID} {this.Type} {Module}:{_efem[Module].CarrierId} End");        }         public override void OnError(string data = null)        {            _efem[Module].OnLoadFailed(data);            base.OnError(data);        }    }    class UnloadModuleAction : EfemAction    {        public UnloadModuleAction(EfemBase efem, ModuleName mod) : base(efem, mod)        {            Type = EfemOperation.Unload;            this.Module = mod;        }        public override void OnPostWork(string data = null)        {            _efem.Status = DeviceState.Idle;            _efem[Module].OnUnloaded();            EV.PostInfoLog(this.Module.ToString(), $"Cmd {this.ID} {this.Type} End");        }        public override void OnError(string data = null)        {            _efem[Module].OnUnloadFailed(data);            base.OnError(data);        }    }    class ReadCarrierIdModuleAction : EfemAction    {        public ReadCarrierIdModuleAction(EfemBase efem, ModuleName mod) : base(efem, mod)        {            Type = EfemOperation.CarrierId;            this.Module = mod;            IsBackground = true;        }        public override void Execute()        {            Send(new EfemMessage            {                Operation = this.Type,                Head = EfemMessage.MsgHead.GET,                Parameters = new List<string> { Constant.ModuleString[this.Module] }            });            //base.Execute();             this.Status = ActionStatus.SendCmd;            _efem.Status = DeviceState.Busy;            EV.PostInfoLog(this.Module.ToString(), $"Cmd {this.ID} {this.Type} Start");        }        public override void OnPostWork(string data = null)        {            _efem.Status = DeviceState.Idle;            _efem[Module].OnCarrierIDRead(data);            EV.PostInfoLog(this.Module.ToString(), $"Cmd {this.ID} {this.Type} End");        }        public override void OnError(string data = null)        {            _efem[Module].OnCarrierIDReadFailed(data);            base.OnError(data);        }    }    class WriteCarrierIdModuleAction : EfemAction    {        private string _id;        public WriteCarrierIdModuleAction(EfemBase efem, ModuleName mod, string id) : base(efem, mod)        {            Type = EfemOperation.CarrierId;            this.Module = mod;            IsBackground = true;            _id = id;        }        public override void Execute()        {            Send(new EfemMessage            {                Operation = this.Type,                Head = EfemMessage.MsgHead.SET,                Parameters = new List<string> { Constant.ModuleString[this.Module] , _id}            });            //base.Execute();             this.Status = ActionStatus.SendCmd;            _efem.Status = DeviceState.Busy;            EV.PostInfoLog(this.Module.ToString(), $"Cmd {this.ID} {this.Type} Start");        }        public override void OnPostWork(string data = null)        {            _efem.Status = DeviceState.Idle;            _efem[Module].OnCarrierIDWrite(_id);            EV.PostInfoLog(this.Module.ToString(), $"Cmd {this.ID} {this.Type} End");        }        public override void OnError(string data = null)        {            _efem[Module].OnCarrierIDWriteFailed(_id);            base.OnError(data);        }    }    class ReadTagDataModuleAction : EfemAction    {        public ReadTagDataModuleAction(EfemBase efem, ModuleName mod) : base(efem, mod)        {            Type = EfemOperation.CarrierId;            this.Module = mod;            IsBackground = true;        }        public override void Execute()        {            Send(new EfemMessage            {                Operation = this.Type,                Head = EfemMessage.MsgHead.GET,                Parameters = new List<string> { Constant.ModuleString[this.Module] }            });            //base.Execute();             this.Status = ActionStatus.SendCmd;            _efem.Status = DeviceState.Busy;            EV.PostInfoLog(this.Module.ToString(), $"Cmd {this.ID} {this.Type} Start");        }        public override void OnPostWork(string data = null)        {            _efem.Status = DeviceState.Idle;            _efem[Module].OnTagDataRead(data);            EV.PostInfoLog(this.Module.ToString(), $"Cmd {this.ID} {this.Type} End");        }        public override void OnError(string data = null)        {            _efem[Module].OnTagDataReadFailed(data);            base.OnError(data);        }    }    class WriteTagDataModuleAction : EfemAction    {        private string _id;        public WriteTagDataModuleAction(EfemBase efem, ModuleName mod, string id) : base(efem, mod)        {            Type = EfemOperation.CarrierId;            this.Module = mod;            IsBackground = true;            _id = id;        }        public override void Execute()        {            Send(new EfemMessage            {                Operation = this.Type,                Head = EfemMessage.MsgHead.SET,                Parameters = new List<string> { Constant.ModuleString[this.Module], _id }            });            //base.Execute();             this.Status = ActionStatus.SendCmd;            _efem.Status = DeviceState.Busy;            EV.PostInfoLog(this.Module.ToString(), $"Cmd {this.ID} {this.Type} Start");        }        public override void OnPostWork(string data = null)        {            _efem.Status = DeviceState.Idle;            _efem[Module].OnTagDataWrite(_id);            EV.PostInfoLog(this.Module.ToString(), $"Cmd {this.ID} {this.Type} End");        }        public override void OnError(string data = null)        {            _efem[Module].OnTagDataWriteFailed(_id);            base.OnError(data);        }    }    class DockModuleAction : EfemAction    {        public DockModuleAction(EfemBase efem, ModuleName mod) : base(efem, mod)        {            Type = EfemOperation.Dock;            this.Module = mod;            IsBackground = true;        }    }    class UndockModuleAction : EfemAction    {        public UndockModuleAction(EfemBase efem, ModuleName mod) : base(efem, mod)        {            Type = EfemOperation.Undock;            this.Module = mod;            IsBackground = true;        }    }    class ClampModuleAction : EfemAction    {        private bool _isUnloadClamp;        public ClampModuleAction(EfemBase efem, ModuleName mod, bool isUnloadClamp) : base(efem, mod)        {            Type = EfemOperation.Clamp;            this.Module = mod;            IsBackground = true;            _isUnloadClamp = isUnloadClamp;        }        public override void OnPostWork(string data = null)        {            _efem.Status = DeviceState.Idle;            _efem[Module].OnClamped(_isUnloadClamp);            EV.PostInfoLog(this.Module.ToString(), $"Cmd {this.ID} {this.Type} End");        }        public override void OnError(string data = null)        {            _efem[Module].OnClampFailed(data);            base.OnError(data);        }    }    class UnclampModuleAction : EfemAction    {        public UnclampModuleAction(EfemBase efem, ModuleName mod) : base(efem, mod)        {            Type = EfemOperation.Unclamp;            this.Module = mod;            IsBackground = true;        }        public override void OnPostWork(string data = null)        {            _efem.Status = DeviceState.Idle;            _efem[Module].OnUnclamped();            EV.PostInfoLog(this.Module.ToString(), $"Cmd {this.ID} {this.Type} End");        }        public override void OnError(string data = null)        {            _efem[Module].OnUnclampFailed(data);            base.OnError(data);        }    }    class SetThicknessModuleAction : EfemAction    {        private string _thick;        public SetThicknessModuleAction(EfemBase efem, ModuleName mod, string thickness) : base(efem, mod)        {            Type = EfemOperation.SetThickness;            this.Module = mod;            IsBackground = true;            _thick = thickness;        }        public override void Execute()        {            Send(new EfemMessage            {                Operation = this.Type,                Head = EfemMessage.MsgHead.SET,                Parameters = new List<string> { Constant.ModuleString[this.Module] , _thick.ToUpper()}            });            //base.Execute();             this.Status = ActionStatus.SendCmd;             EV.PostInfoLog(this.Module.ToString(), $"Cmd {this.ID} {this.Type} Start");        }             }     class OrgshAction : EfemAction    {        public OrgshAction(EfemBase efem, ModuleName mod) : base(efem, mod)        {            Type = EfemOperation.Orgsh;            this.Module = mod;        }    }    class TrackAction : EfemAction    {        public TrackAction(EfemBase efem, ModuleName mod) : base(efem, mod)        {            Type = EfemOperation.StateTrack;            this.Module = mod;        }        public override void Execute()        {            Send(new EfemMessage            {                Operation = this.Type,                Head = EfemMessage.MsgHead.GET,                Parameters = new List<string> { "TRACK" }            });            this.Status = ActionStatus.SendCmd;            EV.PostInfoLog(this.Module.ToString(), "Query wafer present information");        }        public override void OnPostWork(string data)        {            this.Status = ActionStatus.Completed;            //000/111 upperArmWafer, lowerArmWafer, alignerWafer1, alignerWafer2,  coolingwafer1,coolingwafer2            if (data.Length != 6 )            {                LOG.Write($"EFEM Track wafer present return invalid value, {data}, should be 6 characters");                return;            }            //upper arm            if (data[0] == '1')            {                if (WaferManager.Instance.CheckNoWafer(ModuleName.EfemRobot, 1))                {                    WaferManager.Instance.CreateWafer(ModuleName.EfemRobot, 1, WaferStatus.Normal);                }            }            else            {                if (WaferManager.Instance.CheckHasWafer(ModuleName.EfemRobot, 1))                {                    EV.PostWarningLog(Module.ToString(), $" {ModuleName.EfemRobot} upper arm has wafer information, while EFEM return empty, manually delete if really no wafer");                }            }            //lower arm            if (data[1] == '1')            {                if (WaferManager.Instance.CheckNoWafer(ModuleName.EfemRobot, 0))                {                    WaferManager.Instance.CreateWafer(ModuleName.EfemRobot, 0, WaferStatus.Normal);                }            }            else            {                if (WaferManager.Instance.CheckHasWafer(ModuleName.EfemRobot, 0))                {                    EV.PostWarningLog(Module.ToString(), $" {ModuleName.EfemRobot} lower arm has wafer information, while EFEM return empty, manually delete if really no wafer");                }            }            //aligner1            if (data[2] == '1')            {                if (WaferManager.Instance.CheckNoWafer(ModuleName.Aligner1, 0))                {                    WaferManager.Instance.CreateWafer(ModuleName.Aligner1, 0, WaferStatus.Normal);                }            }            else            {                if (WaferManager.Instance.CheckHasWafer(ModuleName.Aligner1, 0))                {                    EV.PostWarningLog(Module.ToString(), $" {ModuleName.Aligner1} has wafer information, while EFEM return empty, manually delete if really no wafer");                }            }            //aligner2            if (data[3] == '1')            {                if (WaferManager.Instance.CheckNoWafer(ModuleName.Aligner2, 0))                {                    WaferManager.Instance.CreateWafer(ModuleName.Aligner2, 0, WaferStatus.Normal);                }            }            else            {                if (WaferManager.Instance.CheckHasWafer(ModuleName.Aligner2, 0))                {                    EV.PostWarningLog(Module.ToString(), $" {ModuleName.Aligner2} has wafer information, while EFEM return empty, manually delete if really no wafer");                }            }            //cooling1            if (data[4] == '1')            {                if (WaferManager.Instance.CheckNoWafer(ModuleName.Cooling1, 0))                {                    WaferManager.Instance.CreateWafer(ModuleName.Cooling1, 0, WaferStatus.Normal);                }            }            else            {                if (WaferManager.Instance.CheckHasWafer(ModuleName.Cooling1, 0))                {                    EV.PostWarningLog(Module.ToString(), $" {ModuleName.Cooling1} has wafer information, while EFEM return empty, manually delete if really no wafer");                }            }            //cooling2            if (data[5] == '1')            {                if (WaferManager.Instance.CheckNoWafer(ModuleName.Cooling2, 0))                {                    WaferManager.Instance.CreateWafer(ModuleName.Cooling2, 0, WaferStatus.Normal);                }            }            else            {                if (WaferManager.Instance.CheckHasWafer(ModuleName.Cooling2, 0))                {                    EV.PostWarningLog(Module.ToString(), $" {ModuleName.Cooling2} has wafer information, while EFEM return empty, manually delete if really no wafer");                }            }        }    }    class ClearErrorAction : EfemAction    {        public ClearErrorAction(EfemBase efem) : base(efem, ModuleName.EFEM)        {            Type = EfemOperation.ClearError;            IsBackground = true;        }        public override void Execute()        {            Send(new EfemMessage            {                Operation = this.Type,                Head = EfemMessage.MsgHead.SET,                Parameters = new List<string> { "CLEAR" }            });            this.Status = ActionStatus.SendCmd;            EV.PostInfoLog(this.Module.ToString(), "Clear EFEM Error");        }    }    class MapAction : EfemAction    {        public MapAction(EfemBase efem, ModuleName mod) : base(efem, mod)        {            Type = EfemOperation.Map;            this.Module = mod;        }        public override void OnPostWork(string data)        {            _efem[Module].Status = DeviceState.Idle;        }    }    class PickAction : EfemAction    {        private MoveParam MoveParam { get; }        public PickAction(EfemBase efem, MoveParam mp) : base(efem, ModuleName.EFEM)        {            Type = EfemOperation.Pick;            MoveParam = mp;        }        public override void Execute()        {            //MOV:LOAD/P113/ARM2;            Send(new EfemMessage            {                Operation = this.Type,                Head = EfemMessage.MsgHead.MOV,                Parameters = new List<string>                {                    MoveParam.SrcPos.ToHWString(),                    Constant.ArmString[MoveParam.Arm],                    MoveParam.WaferSize.ToString()                }            });            this.Status = ActionStatus.SendCmd;            _efem.Status = DeviceState.Busy;        }        public override void OnPostWork(string data)        {            WaferManager.Instance.WaferMoved(MoveParam.SrcModule, MoveParam.SrcSlot, MoveParam.DestModule, MoveParam.DestSlot);            _efem.Status = DeviceState.Idle;            //_bladeTarget = ModuleName.EfemRobot;        }    }     class PlaceAction : EfemAction    {        private MoveParam MoveParam { get; }        public PlaceAction(EfemBase device, MoveParam mp) : base(device, ModuleName.EFEM)        {            Type = EfemOperation.Place;            MoveParam = mp;        }        public override void Execute()        {            Send(new EfemMessage            {                Operation = this.Type,                Head = EfemMessage.MsgHead.MOV,                Parameters = new List<string>                {                    MoveParam.DestPos.ToHWString(),                    Constant.ArmString[MoveParam.Arm],                    MoveParam.WaferSize.ToString()                }            });            this.Status = ActionStatus.SendCmd;            _efem.Status = DeviceState.Busy;        }        public override void OnPostWork(string data)        {            WaferManager.Instance.WaferMoved(MoveParam.SrcModule, MoveParam.SrcSlot, MoveParam.DestModule, MoveParam.DestSlot);            _efem.Status = DeviceState.Idle;        }    }     class GotoAction : EfemAction    {        private MoveParam MoveParam { get; }        public GotoAction(EfemBase device, MoveParam mp) : base(device, ModuleName.EFEM)        {            Type = EfemOperation.Goto;            MoveParam = mp;        }        public override void Execute()        {            Send(new EfemMessage            {                Operation = this.Type,                Head = EfemMessage.MsgHead.MOV,                Parameters = new List<string>                {                    MoveParam.DestPos.ToHWString(),                    Constant.ArmString[MoveParam.Arm],                    MoveParam.WaferSize.ToString()                }            });            this.Status = ActionStatus.SendCmd;            _efem.Status = DeviceState.Busy;        }        public override void OnPostWork(string data)        {            _efem.Status = DeviceState.Idle;        }    }    class ExtendAction : EfemAction    {        private ExtendParam ExtParam { get; }        public ExtendPos TargetPosition => ExtParam.Pos;        public ExtendAction(EfemBase efem, ExtendParam ep)            : base(efem, ModuleName.EFEM)        {            Type = EfemOperation.Extend;            ExtParam = ep;            ExtParam.Arm = ep.Arm;        }        public override void Execute()        {            //MOV:EXTEND/LLA03/ARM2;            Send(new EfemMessage            {                Operation = this.Type,                Head = EfemMessage.MsgHead.MOV,                Parameters = new List<string>                {                    ExtParam.Module.ToHWString(),                    //Constant.ExtendPosString[ExtParam.Pos],                    ExtParam.Pos.ToString(),                    Constant.ArmString[ExtParam.Arm]                }            });            this.Status = ActionStatus.SendCmd;            _efem.Status = DeviceState.Busy;        }        public override void OnPostWork(string data)        {            _efem.Status = DeviceState.Idle;            switch (TargetPosition)            {            case ExtendPos.PB:                LOG.Write($"robot extend PB put: arm {ExtParam.Arm}, module {ExtParam.Module}");                //WaferManager.Instance.WaferMoved(ModuleName.EfemRobot, (int)ExtParam.Arm, ExtParam.Module, 0);                break;            case ExtendPos.G4:                LOG.Write($"robot extend G4 get: arm {ExtParam.Arm}, module {ExtParam.Module}");               //     WaferManager.Instance.WaferMoved(ExtParam.Module, 0, ModuleName.EfemRobot, (int)ExtParam.Arm);                break;            default:                Debug.WriteLine($"MNPT:{TargetPosition} 不需要更新 WaferManager 信息");                break;            }        }    }    class GripAction : EfemAction    {        private Hand _blade;        private bool _isGrip;        public GripAction(EfemBase efem, Hand blade, bool isGrip)            : base(efem, ModuleName.EFEM)        {            Type = EfemOperation.Grip;            _blade = blade;            _isGrip = isGrip;        }        public override void Execute()        {            Send(new EfemMessage            {                Operation = this.Type,                Head = EfemMessage.MsgHead.SET,                Parameters = new List<string>                {                    _isGrip ? "ON":"OFF",                    Constant.ArmString[_blade]                }            });            this.Status = ActionStatus.SendCmd;            _efem.Status = DeviceState.Busy;        }        public override void OnPostWork(string data)        {            _efem.Status = DeviceState.Idle;            if (_blade == Hand.Blade1)                _efem.GripStateBlade1 = _isGrip ? "ON" : "OFF";            if (_blade == Hand.Blade2)                _efem.GripStateBlade2 = _isGrip ? "ON" : "OFF";        }    }	    class LiftAction : EfemAction    {        // MOV:LIFT/ALIGN1;        private bool _isUp;        public LiftAction(EfemBase device, ModuleName mod, bool isUp) : base(device, mod)        {            Type = EfemOperation.Lift;            Module = mod;            _isUp = isUp;            IsBackground = true;            (device as Efem).IsBufferPinUp[mod] = !isUp;        }        public override void Execute()        {            Send(new EfemMessage            {                Operation = this.Type,                Head = EfemMessage.MsgHead.MOV,                Parameters = new List<string> { Constant.ModuleString[this.Module], _isUp ? "UP":"DOWN" }            });            this.Status = ActionStatus.SendCmd;            _efem.Status = DeviceState.Busy;            EV.PostInfoLog(this.Module.ToString(), $"Cmd {this.ID} {this.Type} Start");        }        public override void OnPostWork(string data)        {            _efem.Status = DeviceState.Idle;            (_efem as Efem).IsBufferPinUp[Module] = _isUp;        }    }    class AlignAction : EfemAction    {        private WaferSize _ws { get; }        public AlignAction(EfemBase device, ModuleName mod, WaferSize size) : base(device, mod)        {            Type = EfemOperation.Align;            this.Module = mod;            this._ws = size;        }        public override void Execute()        {            Send(new EfemMessage            {                Operation = this.Type,                Head = EfemMessage.MsgHead.MOV,                Parameters = new List<string> { Module.ToHWString(), this._ws.ToString() }            });            this.Status = ActionStatus.SendCmd;        }        public override void OnPostWork(string data) { }    }    class LedAction : EfemAction    {        private LightType Light { get; }        private LightStatus LtStatus { get; }        public LedAction(EfemBase device, LightType lt, LightStatus st) : base(device, ModuleName.EFEM)        {            Type = EfemOperation.Light;            Light = lt;            LtStatus = st;            IsBackground = true;        }        public override void Execute()        {            Send(new EfemMessage            {                Operation = this.Type,                Head = EfemMessage.MsgHead.SET,                Parameters = new List<string> { Constant.STOWER, Light.ToString(), LtStatus.ToString() }            });            _efem.Status = DeviceState.Busy;            this.Status = ActionStatus.SendCmd;            //EV.PostInfoLog(this.Module.ToString(), $"CMD[{this.ID}], Set {this.Light} = {LtStatus}");        }        public override void OnPostWork(string data)        {                    }    }    class AbortAction: EfemAction    {        public AbortAction(EfemBase efem) : base(efem, ModuleName.EFEM)        {            Type = EfemOperation.Abort;        }        public override void Execute()        {            Send(new EfemMessage            {                Operation = this.Type,                Head = EfemMessage.MsgHead.MOV            });        }    }    class FlipAction : EfemAction    {        private string _orient;        public FlipAction(EfemBase device, ModuleName mod, string orient) : base(device, mod)        {            this.Type = EfemOperation.Flip;            this._orient = orient;        }        public override void Execute()        {            Send(new EfemMessage            {                Operation = Type,                Head = EfemMessage.MsgHead.MOV,                Parameters = new List<string> { _orient }            });        }    }    class EmsStopAction : EfemAction    {        public EmsStopAction(EfemBase device, ModuleName mod) : base(device, mod)        {            this.Type = EfemOperation.EmsStop;        }        public override void Execute()        {            Send(new EfemMessage            {                Operation = Type,                Head = EfemMessage.MsgHead.MOV,                Parameters = new List<string> {  }            });        }    }    class SetSpeedAction : EfemAction    {        private string _speed;        public SetSpeedAction(EfemBase device, ModuleName mod, string speed) : base(device, mod)        {            this.Type = EfemOperation.SetRobotSpeed;            this._speed = speed;        }        public override void Execute()        {            Send(new EfemMessage            {                Operation = Type,                Head = EfemMessage.MsgHead.MOV,                Parameters = new List<string> { _speed }            });        }    }    class QueryLPStateAction : EfemAction    {        public QueryLPStateAction(EfemBase efem, ModuleName mod) : base(efem, mod)        {            Type = EfemOperation.QueryLPPresence;            this.Module = mod;            IsBackground = true;        }    }}
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