SimulatorSystem_R.cs 34 KB

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  1. using Aitex.Core.RT.DataCenter;
  2. using Aitex.Core.RT.IOCore;
  3. using Aitex.Core.RT.Log;
  4. using Aitex.Core.Util;
  5. using MECF.Framework.Common.Equipment;
  6. using MECF.Framework.Simulator.Core.Driver;
  7. using System;
  8. using System.Collections.Generic;
  9. using VirgoSimulator.Devices;
  10. namespace VirgoSimulator.Instances
  11. {
  12. public class SimulatorSystem_R : Singleton<SimulatorSystem_R>
  13. {
  14. private PeriodicJob _thread;
  15. private Random _rd = new Random();
  16. private RD_TRIG _trigATM = new RD_TRIG();
  17. private RD_TRIG _trigVAC = new RD_TRIG();
  18. private readonly float ATM_THRESHOLD = 750000;
  19. private readonly float ATM_PRESSURE = 760000;
  20. private readonly uint VAC_SW_PRESSURE = 9500;
  21. private readonly uint PROCESS_GAUGE = 10000;
  22. private Dictionary<ModuleName, DeviceSimulator> _MockDevices = new Dictionary<ModuleName, DeviceSimulator>();
  23. public SimulatorSystem_R()
  24. {
  25. //_MockDevices.Add(ModuleName.PMB, new SkyPumpMock());
  26. //_MockDevices.Add(ModuleName.PMB, new AdTecGeneratorMock());
  27. //_MockDevices.Add(ModuleName.PMB, new AdTecMatchMock());
  28. // TODO
  29. }
  30. ~SimulatorSystem_R()
  31. {
  32. _thread?.Stop();
  33. }
  34. public void Initialize()
  35. {
  36. SetDefaultValue(ModuleName.PMA);
  37. SetDefaultValue(ModuleName.PMB);
  38. Singleton<DataManager>.Instance.Initialize(false);
  39. _thread = new PeriodicJob(500, OnMonitor, nameof(SimulatorSystem_R), true);
  40. }
  41. private void SetDefaultValue(ModuleName mod)
  42. {
  43. // chamber
  44. IO.DI[$"{mod}.DI_Lid_Closed"].Value = true;
  45. IO.DI[$"{mod}.DI_PM_ATM_SW"].Value = true;
  46. IO.DI[$"{mod}.DI_CDA_Pressure"].Value = true;
  47. IO.DI[$"{mod}.DI_Source_Fans_Running"].Value = true;
  48. //IO.DI[$"{mod}.DI_SourceFan2"].Value = true;
  49. IO.DI[$"{mod}.DI_Cooling_Water_Flow_SW"].Value = true;
  50. //IO.DI[$"{mod}.DI_Coolant_Inlet_TC_Broken_Alarm"].Value = false;
  51. //IO.DI[$"{mod}.DI_Coolant_Outlet_TC_Broken_Alarm"].Value = false;
  52. IO.DI[$"{mod}.DI_Water_Leak"].Value = true;
  53. IO.DI[$"{mod}.DI_ARM_Not_Extend_to_PM"].Value = true;
  54. IO.DI[$"{mod}.DI_Control_Box_Fans_Running"].Value = true;
  55. IO.DI[$"{mod}.DI_AC_RACK_Fans_Running"].Value = true;
  56. IO.DI[$"{mod}.DI_AC_RACK_Smoke_Detect_SW"].Value = true;
  57. IO.DI[$"{mod}.DI_AC_RACK_Main_Power_ON"].Value = true;
  58. IO.DI[$"{mod}.DI_MFC1_Pressure"].Value = true;
  59. IO.DI[$"{mod}.DI_MFC2_Pressure"].Value = true;
  60. IO.DI[$"{mod}.DI_MFC3_Pressure"].Value = true;
  61. IO.DI[$"{mod}.DI_MFC4_Pressure"].Value = true;
  62. IO.DI[$"{mod}.DI_MFC5_Pressure"].Value = true;
  63. IO.DI[$"{mod}.DI_EFEM_Side_Panel_Closed"].Value = true;
  64. //IO.DI[$"{mod}.DI_Generator_Hardware_Interlock"].Value = true;
  65. IO.DI[$"{mod}.DI_SRF_Match_Interlock_OK"].Value = true;
  66. IO.DI[$"{mod}.DI_BRF_Match_Interlock_OK"].Value = true;
  67. IO.DI[$"{mod}.DI_RF_Interlock_OK"].Value = true;
  68. IO.DI[$"{mod}.DI_N2_Pressure"].Value = true;
  69. // slit door
  70. IO.DI[$"{mod}.DI_Slit_Door_Open_Pos"].Value = false;
  71. IO.DI[$"{mod}.DI_Slit_Door_Close_Pos"].Value = true;
  72. //// lift pin
  73. //IO.DI[$"{mod}.DI_Lift_Pin_Up"].Value = false;
  74. //IO.DI[$"{mod}.DI_Lift_Pin_Down"].Value = true;
  75. //
  76. IO.DI[$"{mod}.DI_LE_OT_SW_Alarm"].Value = true;
  77. IO.DI[$"{mod}.DI_GB_Door_SW_Alarm"].Value = true;
  78. IO.DI[$"{mod}.DI_GB_Pressure_SW_Alarm"].Value = true;
  79. IO.DI[$"{mod}.DI_SRF_Match_Interlock_OK"].Value = true;
  80. IO.DI[$"{mod}.DI_BRF_Match_Interlock_OK"].Value = true;
  81. IO.DI[$"{mod}.DI_RF_Cover_Closed"].Value = true;
  82. IO.DI[$"{mod}.DI_CHBW_OT_SW"].Value = true;
  83. IO.DI[$"{mod}.DI_Lift_Servo_Busy"].Value = false;
  84. ////Guide pin
  85. //IO.DI[$"{mod}.DI_Guide_Pin_Small_Lifter_Up_Pos"].Value = false;
  86. //IO.DI[$"{mod}.DI_Guide_Pin_Small_Lifter_Down_Pos"].Value = true;
  87. //IO.DI[$"{mod}.DI_Guide_Pin_Medium_Lifter_Up_Pos"].Value = false;
  88. //IO.DI[$"{mod}.DI_Guide_Pin_Medium_Lifter_Down_Pos"].Value = true;
  89. //IO.DI[$"{mod}.DI_Dry_Pump_Running"].Value = false;
  90. //IO.DI[$"{mod}.DI_Pump_Remote_Status"].Value = true;
  91. //IO.DI[$"{mod}.DI_Pump_Alarm"].Value = false;
  92. // pressure
  93. SetAiValue($"{mod}.AI_Foreline_pressure", 5000);
  94. SetAiValue($"{mod}.AI_Chamber_pressure", ATM_PRESSURE);
  95. SetAiValue($"{mod}.AI_Process_pressure", PROCESS_GAUGE);
  96. ////SetAiValue($"{mod}.AI_Throttle_Valve_State", 1);
  97. //IO.AI[$"{mod}.AI_Throttle_Valve_State"].Value = 1;
  98. IO.AI[$"{mod}.AI_Throttle_Valve_Real_Position"].Value = 10;
  99. // Temperature
  100. SetAiValue($"{mod}.AI_Substrate_Control_TC_Temp", 28);
  101. SetAiValue($"{mod}.AI_Substrate_Monitor_TC_Temp", 27);
  102. SetAiValue($"{mod}.AI_Foreline_Control_TC_Temp", 28);
  103. SetAiValue($"{mod}.AI_Foreline_Monitor_TC_Temp", 27);
  104. SetAiValue($"{mod}.AI_Coolant_Inlet_Temp", 28);
  105. if (mod == ModuleName.PMA)
  106. {
  107. SetAiValue($"{mod}.AI_Coolant_Outlet_Temp", 29);
  108. }
  109. else if (mod == ModuleName.PMB)
  110. {
  111. SetAiValue($"{mod}.AI_Coolant_Outlet_Temp", 30);
  112. }
  113. // Datetime
  114. SetAiValue($"{mod}.AI_Year", DateTime.Today.Year);
  115. SetAiValue($"{mod}.AI_Month", DateTime.Today.Month);
  116. SetAiValue($"{mod}.AI_Day", DateTime.Today.Day);
  117. //IoTriStateLift
  118. IO.DI[$"{mod}.DI_Lift_Servo1_Alarm"].Value = true;
  119. IO.DI[$"{mod}.DI_Lift_Servo2_Alarm"].Value = true;
  120. IO.DI[$"{mod}.DI_Lift_Servo3_Alarm"].Value = true;
  121. IO.DI[$"{mod}.DI_Lift_Servo4_Alarm"].Value = true;
  122. IO.DI[$"{mod}.DI_Lift_Servo1_Brake_ON"].Value = true;
  123. IO.DI[$"{mod}.DI_Lift_Servo2_Brake_ON"].Value = true;
  124. IO.DI[$"{mod}.DI_Lift_Servo3_Brake_ON"].Value = true;
  125. IO.DI[$"{mod}.DI_Lift_Servo4_Brake_ON"].Value = true;
  126. IO.DI[$"{mod}.DI_Lift_Servo_FSTP"].Value = true;
  127. IO.DI[$"{mod}.DI_Lift_Servo_ABS_fail_alarm"].Value = false;
  128. IO.DI[$"{mod}.DI_Lift_Servo_ORG_fail_alarm"].Value = false;
  129. IO.DI[$"{mod}.DI_Lift_Servo_ABS_fail_alarm"].Value = false;
  130. IO.DI[$"{mod}.DI_Lift_Servo_Over_software_Limit_alarm"].Value = false;
  131. IO.DI[$"{mod}.DI_MPE_CPU_Communication_Alarm"].Value = false;
  132. IO.DI[$"{mod}.DI_MPE_CPU_Battery_Alarm"].Value = false;
  133. IO.DI[$"{mod}.DI_MPE_CPU_OT_Warning"].Value = false;
  134. IO.DI[$"{mod}.DI_MPE_CPU_Error"].Value = false;
  135. }
  136. private bool OnMonitor()
  137. {
  138. try
  139. {
  140. // PMA
  141. MonitorSlitDoor(ModuleName.PMA);
  142. MonitorPin(ModuleName.PMA);
  143. MonitorPressure(ModuleName.PMA);
  144. MonitorTemperature(ModuleName.PMA);
  145. MonitorGas(ModuleName.PMA);
  146. ChangeTime(ModuleName.PMA);
  147. // PMB
  148. MonitorSlitDoor(ModuleName.PMB);
  149. MonitorPin(ModuleName.PMB);
  150. MonitorPressure(ModuleName.PMB);
  151. MonitorTemperature(ModuleName.PMB);
  152. MonitorGas(ModuleName.PMB);
  153. ChangeTime(ModuleName.PMB);
  154. }
  155. catch (Exception e)
  156. {
  157. LOG.Write(e);
  158. }
  159. return true;
  160. }
  161. private void ChangeTime(ModuleName mod)
  162. {
  163. // Heartbeat with PLC
  164. SetAiValue($"{mod}.AI_Heartbeat_FB", GetAoValue($"{mod}.AO_Heartbeat"));
  165. SetAiValue($"{mod}.AI_Time", DateTime.Now.Hour);
  166. SetAiValue($"{mod}.AI_Minute", DateTime.Now.Minute);
  167. SetAiValue($"{mod}.AI_Second", DateTime.Now.Second);
  168. }
  169. void MonitorSlitDoor(ModuleName mod)
  170. {
  171. // slit door open
  172. if (IO.DO[$"{mod}.DO_Slit_Door_Open"].Value)
  173. {
  174. IO.DI[$"{mod}.DI_Slit_Door_Open_Pos"].Value = true;
  175. IO.DI[$"{mod}.DI_Slit_Door_Close_Pos"].Value = false;
  176. }
  177. // slit door close
  178. if (IO.DO[$"{mod}.DO_Slit_Door_Close"].Value)
  179. {
  180. IO.DI[$"{mod}.DI_Slit_Door_Open_Pos"].Value = false;
  181. IO.DI[$"{mod}.DI_Slit_Door_Close_Pos"].Value = true;
  182. }
  183. }
  184. void MonitorPin(ModuleName mod)
  185. {
  186. //IoTriStateLift
  187. if (IO.DO[$"{mod}.DO_Lift_Servo_Go_Position1"].Value)
  188. {
  189. IO.DI[$"{mod}.DI_Lift_Servo_with_origin"].Value = false;
  190. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position1_Complete"].Value = true;
  191. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position2_Complete"].Value = false;
  192. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position3_Complete"].Value = false;
  193. }
  194. if (IO.DO[$"{mod}.DO_Lift_Servo_Go_Position2"].Value)
  195. {
  196. IO.DI[$"{mod}.DI_Lift_Servo_with_origin"].Value = false;
  197. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position1_Complete"].Value = false;
  198. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position2_Complete"].Value = true;
  199. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position3_Complete"].Value = false;
  200. }
  201. if (IO.DO[$"{mod}.DO_Lift_Servo_Go_Position3"].Value)
  202. {
  203. IO.DI[$"{mod}.DI_Lift_Servo_with_origin"].Value = false;
  204. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position1_Complete"].Value = false;
  205. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position2_Complete"].Value = false;
  206. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position3_Complete"].Value = true;
  207. }
  208. if (IO.DO[$"{mod}.DO_Lift_Servo_Origin"].Value)
  209. {
  210. IO.DI[$"{mod}.DI_Lift_Servo_with_origin"].Value = true;
  211. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position1_Complete"].Value = false;
  212. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position2_Complete"].Value = false;
  213. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position3_Complete"].Value = false;
  214. }
  215. if (IO.DO[$"{mod}.DO_Lift_Servo_Manual_UP"].Value)
  216. {
  217. SetRealFloat(IO.AI[$"{mod}.AI_Lift_Servo_Current_Position"], GetRealFloat(IO.AI[$"{mod}.AI_Lift_Servo_Current_Position"]) + 0.3f);
  218. }
  219. else if (IO.DO[$"{mod}.DO_Lift_Servo_Manual_DOWN"].Value)
  220. {
  221. SetRealFloat(IO.AI[$"{mod}.AI_Lift_Servo_Current_Position"], GetRealFloat(IO.AI[$"{mod}.AI_Lift_Servo_Current_Position"]) - 0.3f);
  222. }
  223. //// lift pin up
  224. //if (IO.DO[$"{mod}.DO_Lift_Pin_Up"].Value != IO.DO[$"{mod}.DO_Lift_Pin_Down"].Value)
  225. //{
  226. // IO.DI[$"{mod}.DI_Lift_Pin_Up"].Value = IO.DO[$"{mod}.DO_Lift_Pin_Up"].Value;
  227. // IO.DI[$"{mod}.DI_Lift_Pin_Down"].Value = IO.DO[$"{mod}.DO_Lift_Pin_Down"].Value;
  228. //}
  229. //// upper guide pin up
  230. //if (IO.DO[$"{mod}.DO_Guide_Pin_Small_Lifter_Up"].Value)
  231. //{
  232. // IO.DI[$"{mod}.DI_Guide_Pin_Small_Lifter_Up_Pos"].Value = true;
  233. // IO.DI[$"{mod}.DI_Guide_Pin_Small_Lifter_Down_Pos"].Value = false;
  234. //}
  235. //// upper guide pin down
  236. //if (IO.DO[$"{mod}.DO_Guide_Pin_Small_Lifter_Down"].Value)
  237. //{
  238. // IO.DI[$"{mod}.DI_Guide_Pin_Small_Lifter_Up_Pos"].Value = false;
  239. // IO.DI[$"{mod}.DI_Guide_Pin_Small_Lifter_Down_Pos"].Value = true;
  240. //}
  241. //// lower guide pin up
  242. //if (IO.DO[$"{mod}.DO_Guide_Pin_Medium_Lifter_Up"].Value)
  243. //{
  244. // IO.DI[$"{mod}.DI_Guide_Pin_Medium_Lifter_Up_Pos"].Value = true;
  245. // IO.DI[$"{mod}.DI_Guide_Pin_Medium_Lifter_Down_Pos"].Value = false;
  246. //}
  247. //// lower guide pin down
  248. //if (IO.DO[$"{mod}.DO_Guide_Pin_Medium_Lifter_Down"].Value)
  249. //{
  250. // IO.DI[$"{mod}.DI_Guide_Pin_Medium_Lifter_Up_Pos"].Value = false;
  251. // IO.DI[$"{mod}.DI_Guide_Pin_Medium_Lifter_Down_Pos"].Value = true;
  252. //}
  253. }
  254. protected void SetRealFloat(IOAccessor<short> accessor, float val)
  255. {
  256. byte[] val2 = BitConverter.GetBytes(val);
  257. accessor.Buffer[accessor.Index] = BitConverter.ToInt16(val2, 0);
  258. accessor.Buffer[accessor.Index + 1] = BitConverter.ToInt16(val2, 2);
  259. }
  260. protected float GetRealFloat(IOAccessor<short> accessor)
  261. {
  262. byte[] low = BitConverter.GetBytes(accessor.Buffer[accessor.Index]);
  263. byte[] high = BitConverter.GetBytes(accessor.Buffer[accessor.Index + 1]);
  264. float res = BitConverter.ToSingle(new[] { low[0], low[1], high[0], high[1] }, 0);
  265. return res;
  266. }
  267. void MonitorPressure(ModuleName mod)
  268. {
  269. // pressure
  270. string sAI_Foreline = "AI_Foreline_pressure";
  271. // Foreline
  272. if (SkyPumpMockPMA._simPumpStatus == SkyPumpMockPMA.SimPumpStatus.Open || EdwardsPumpMockPMA._simPumpStatus == EdwardsPumpMockPMA.SimEdwardsPumpStatus.Open)
  273. {
  274. SetAiValue($"{mod}.{sAI_Foreline}", GetAiValue($"{mod}.{sAI_Foreline}") - _rd.Next(500, 600));
  275. }
  276. else
  277. {
  278. SetAiValue($"{mod}.{sAI_Foreline}", GetAiValue($"{mod}.{sAI_Foreline}") + _rd.Next(500, 600));
  279. }
  280. // PLC 模拟量范围[0,4000], 电压[0, 10V], 压力[0, 760Torr]
  281. string sAI_ChamberPressure = "AI_Chamber_pressure";
  282. string sAI_ProcessPressure = "AI_Process_pressure";
  283. //float chamber_pressure = GetMockChamberPressure(mod);
  284. //float process_pressure = GetAiValue($"{mod}.AI_Process_pressure");
  285. // soft pump & fast pump
  286. DOAccessor fast_pump_vlv = IO.DO[$"{mod}.DO_Fast_Pumping_Valve"];
  287. DOAccessor soft_pump_vlv = IO.DO[$"{mod}.DO_Soft_Pumping_Valve"];
  288. if (fast_pump_vlv.Value || soft_pump_vlv.Value)
  289. {
  290. if (fast_pump_vlv.Value && soft_pump_vlv.Value)
  291. {
  292. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  293. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  294. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  295. {
  296. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - 30000);
  297. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  298. }
  299. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  300. {
  301. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  302. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 1500);
  303. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 1500);
  304. }
  305. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(15000, 16000));
  306. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(150, 160));
  307. }
  308. else if (fast_pump_vlv.Value)
  309. {
  310. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  311. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  312. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  313. {
  314. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - 25000);
  315. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  316. }
  317. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  318. {
  319. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  320. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 1300);
  321. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 1300);
  322. }
  323. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(12000, 13000));
  324. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(120, 130));
  325. }
  326. else if (soft_pump_vlv.Value)
  327. {
  328. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  329. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  330. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  331. {
  332. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - 22000);
  333. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  334. }
  335. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  336. {
  337. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  338. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 1100);
  339. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 1100);
  340. }
  341. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(13000, 14000));
  342. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(100, 110));
  343. }
  344. }
  345. // fast vent & purge
  346. DOAccessor vent_vlv = IO.DO[$"{mod}.DO_Chamber_vent_valve"];
  347. DOAccessor purge_vlv = IO.DO[$"{mod}.DO_Chamber_purge_valve"];
  348. if (vent_vlv.Value || purge_vlv.Value)
  349. {
  350. if (vent_vlv.Value && purge_vlv.Value)
  351. {
  352. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  353. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  354. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  355. {
  356. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 30000);
  357. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  358. }
  359. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  360. {
  361. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  362. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1500);
  363. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1500);
  364. }
  365. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + _rd.Next(45000, 50000));
  366. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + _rd.Next(150, 160));
  367. }
  368. else if (vent_vlv.Value)
  369. {
  370. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  371. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  372. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  373. {
  374. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 25000);
  375. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  376. }
  377. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  378. {
  379. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  380. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1300);
  381. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1300);
  382. }
  383. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + _rd.Next(25000, 30000));
  384. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + _rd.Next(130, 150));
  385. }
  386. else if (purge_vlv.Value)
  387. {
  388. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  389. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  390. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  391. {
  392. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 30000);
  393. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  394. }
  395. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  396. {
  397. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  398. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 3100);
  399. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 3100);
  400. }
  401. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + _rd.Next(15000, 20000));
  402. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + _rd.Next(100, 120));
  403. }
  404. }
  405. // 压力值越界,复位
  406. float chamber_pressure1 = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  407. if (chamber_pressure1 > ATM_PRESSURE)
  408. {
  409. SetAiValue($"{mod}.AI_Chamber_pressure", ATM_PRESSURE);
  410. }
  411. else if (chamber_pressure1 < 20)
  412. {
  413. SetAiValue($"{mod}.AI_Chamber_pressure", 20);
  414. }
  415. float process_pressure1 = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  416. if (process_pressure1 > PROCESS_GAUGE)
  417. {
  418. SetAiValue($"{mod}.AI_Process_pressure", PROCESS_GAUGE);
  419. }
  420. else if (process_pressure1 < 20)
  421. {
  422. SetAiValue($"{mod}.AI_Process_pressure", 20);
  423. }
  424. float foreline_pressure = GetAiValue($"{mod}.{sAI_Foreline}");
  425. if (foreline_pressure > 10000)
  426. {
  427. SetAiValue($"{mod}.AI_Foreline_pressure", 10000);
  428. }
  429. else if (foreline_pressure < 150)
  430. {
  431. SetAiValue($"{mod}.AI_Foreline_pressure", 150);
  432. }
  433. // 模拟压力计漂移
  434. //int p1 = (int)GetMockChamberPressure(mod);
  435. //int new_p1 = _rd.Next(p1 - 2, p1 + 2);
  436. //SetAiValue($"{mod}.AI_Chamber_pressure", new_p1);
  437. //int p2 = (int)GetAiValue($"{mod}.AI_Foreline_pressure");
  438. //int new_p2 = _rd.Next(p2 - 1, p2 + 1);
  439. //SetAiValue($"{mod}.AI_Foreline_pressure", new_p2);
  440. //int p3 = (int)GetAiValue($"{mod}.AI_Process_pressure");
  441. //int new_p3 = _rd.Next(p3 - 1, p3 + 1);
  442. //SetAiValue($"{mod}.AI_Process_pressure", new_p3);
  443. // 根据当前压力值设定信号
  444. //float chamber_pressure2 = GetMockChamberPressure(mod);
  445. // ATM switch
  446. IO.DI[$"{mod}.DI_PM_ATM_SW"].Value = GetAiValue($"{mod}.{sAI_ChamberPressure}") > ATM_THRESHOLD;
  447. // VAC switch
  448. IO.DI[$"{mod}.DI_PM_VAC_SW"].Value = GetAiValue($"{mod}.{sAI_ChamberPressure}") < VAC_SW_PRESSURE;
  449. // Throttle valve
  450. //var pos_sp = IO.AO[$"{mod}.AO_Throttle_Valve_Pressure_Setpoint"].Value;
  451. //var mock_pos_fb = _rd.Next(pos_sp - 2, pos_sp + 2);
  452. ////IO.AI[$"{mod}.AI_Throttle_Valve_Real_Pressure"].Value = (short)mock_pos_fb;
  453. //SetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure", mock_pos_fb);
  454. // 压力值
  455. if (GetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure") < GetAoValue($"{mod}.AO_Throttle_Valve_Pressure_Setpoint"))
  456. {
  457. short increase = (short)_rd.Next(20, 30);
  458. SetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure", GetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure") + increase);
  459. if (GetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure") > GetAoValue($"{mod}.AO_Throttle_Valve_Pressure_Setpoint"))
  460. {
  461. SetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure", GetAoValue($"{mod}.AO_Throttle_Valve_Pressure_Setpoint"));
  462. }
  463. }
  464. else
  465. {
  466. short increase = (short)_rd.Next(20, 30);
  467. SetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure", GetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure") - increase);
  468. if (GetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure") < GetAoValue($"{mod}.AO_Throttle_Valve_Pressure_Setpoint"))
  469. {
  470. SetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure", GetAoValue($"{mod}.AO_Throttle_Valve_Pressure_Setpoint"));
  471. }
  472. }
  473. // 位置值
  474. if (GetAiValue($"{mod}.AI_Throttle_Valve_Real_Position") < GetAoValue($"{mod}.AO_Throttle_Valve_Position_Setpoint"))
  475. {
  476. short increase = (short)_rd.Next(20, 30);
  477. SetAiValue($"{mod}.AI_Throttle_Valve_Real_Position", GetAiValue($"{mod}.AI_Throttle_Valve_Real_Position") + increase);
  478. if (GetAiValue($"{mod}.AI_Throttle_Valve_Real_Position") > GetAoValue($"{mod}.AO_Throttle_Valve_Position_Setpoint"))
  479. {
  480. SetAiValue($"{mod}.AI_Throttle_Valve_Real_Position", GetAoValue($"{mod}.AO_Throttle_Valve_Position_Setpoint"));
  481. }
  482. }
  483. else
  484. {
  485. short increase = (short)_rd.Next(20, 30);
  486. SetAiValue($"{mod}.AI_Throttle_Valve_Real_Position", GetAiValue($"{mod}.AI_Throttle_Valve_Real_Position") - increase);
  487. if (GetAiValue($"{mod}.AI_Throttle_Valve_Real_Position") < GetAoValue($"{mod}.AO_Throttle_Valve_Position_Setpoint"))
  488. {
  489. SetAiValue($"{mod}.AI_Throttle_Valve_Real_Position", GetAoValue($"{mod}.AO_Throttle_Valve_Position_Setpoint"));
  490. }
  491. }
  492. }
  493. //float GetMockChamberPressure(ModuleName mod)
  494. //{
  495. // return GetAiValue($"{mod}.AI_Chamber_pressure");
  496. //}
  497. //void SetMockChamberPressure(ModuleName mod, float val)
  498. //{
  499. // SetAiValue($"{mod}.AI_Chamber_pressure", val);
  500. //}
  501. void SetAiValue(string name, float value)
  502. {
  503. byte[] flow = BitConverter.GetBytes(value);
  504. short high1 = BitConverter.ToInt16(flow, 0);
  505. short low1 = BitConverter.ToInt16(flow, 2);
  506. IO.AI[name].Buffer[IO.AI[name].Index] = BitConverter.ToInt16(flow, 0);
  507. IO.AI[name].Buffer[IO.AI[name].Index + 1] = BitConverter.ToInt16(flow, 2);
  508. byte[] high = BitConverter.GetBytes(IO.AI[name].Buffer[IO.AI[name].Index]);
  509. byte[] low = BitConverter.GetBytes(IO.AI[name].Buffer[IO.AI[name].Index + 1]);
  510. float readback = BitConverter.ToSingle(new[] { high[0], high[1], low[0], low[1] }, 0);
  511. }
  512. float GetAiValue(string name)
  513. {
  514. byte[] high = BitConverter.GetBytes(IO.AI[name].Buffer[IO.AI[name].Index]);
  515. byte[] low = BitConverter.GetBytes(IO.AI[name].Buffer[IO.AI[name].Index + 1]);
  516. float flow = BitConverter.ToSingle(new[] { high[0], high[1], low[0], low[1] }, 0);
  517. return flow;
  518. }
  519. float GetAoValue(string name)
  520. {
  521. byte[] high = BitConverter.GetBytes(IO.AO[name].Buffer[IO.AO[name].Index]);
  522. byte[] low = BitConverter.GetBytes(IO.AO[name].Buffer[IO.AO[name].Index + 1]);
  523. float flow = BitConverter.ToSingle(new[] { high[0], high[1], low[0], low[1] }, 0);
  524. return flow;
  525. }
  526. void MonitorTemperature(ModuleName mod)
  527. {
  528. IO.DI[$"{mod}.DI_Substrate_Heater_On_FB"].Value = IO.DO[$"{mod}.DO_Substrate_Heater_On"].Value;
  529. IO.DI[$"{mod}.DI_Foreline_Heater_On_FB"].Value = IO.DO[$"{mod}.DO_Forline_Heater_On"].Value;
  530. IO.DI[$"{mod}.DI_CHB_Wall_Heater_On_FB"].Value = IO.DO[$"{mod}.DO_CHB_Wall_Heater_On"].Value;
  531. IO.DI[$"{mod}.DI_Foreline_TC_Deviation_out_of_range"].Value = false;
  532. IO.DI[$"{mod}.DI_Substrate_TC_Deviation_out_of_range"].Value = false;
  533. // 底座
  534. if (IO.DO[$"{mod}.DO_Substrate_Heater_On"].Value &&
  535. GetAiValue($"{mod}.AI_Substrate_Control_TC_Temp") < GetAoValue($"{mod}.AO_Substrate_Temperature_Setpoint"))
  536. {
  537. SetAiValue($"{mod}.AI_Substrate_Control_TC_Temp", GetAiValue($"{mod}.AI_Substrate_Control_TC_Temp") + _rd.Next(1, 2));
  538. SetAiValue($"{mod}.AI_Substrate_Monitor_TC_Temp", GetAiValue($"{mod}.AI_Substrate_Monitor_TC_Temp") + _rd.Next(1, 2));
  539. }
  540. else if (IO.DO[$"{mod}.DO_Substrate_Heater_On"].Value &&
  541. GetAiValue($"{mod}.AI_Substrate_Control_TC_Temp") > GetAoValue($"{mod}.AO_Substrate_Temperature_Setpoint"))
  542. {
  543. SetAiValue($"{mod}.AI_Substrate_Control_TC_Temp", GetAiValue($"{mod}.AI_Substrate_Control_TC_Temp") - _rd.Next(1, 2));
  544. SetAiValue($"{mod}.AI_Substrate_Monitor_TC_Temp", GetAiValue($"{mod}.AI_Substrate_Monitor_TC_Temp") - _rd.Next(1, 2));
  545. }
  546. // Foreline
  547. if (IO.DO[$"{mod}.DO_Forline_Heater_On"].Value &&
  548. GetAiValue($"{mod}.AI_Foreline_Control_TC_Temp") < GetAoValue($"{mod}.AO_Foreline_Temperature_Setpoint"))
  549. {
  550. SetAiValue($"{mod}.AI_Foreline_Control_TC_Temp", GetAiValue($"{mod}.AI_Foreline_Control_TC_Temp") + _rd.Next(1, 2));
  551. SetAiValue($"{mod}.AI_Foreline_Monitor_TC_Temp", GetAiValue($"{mod}.AI_Foreline_Monitor_TC_Temp") + _rd.Next(1, 2));
  552. }
  553. else if (IO.DO[$"{mod}.DO_Forline_Heater_On"].Value &&
  554. GetAiValue($"{mod}.AI_Foreline_Control_TC_Temp") > GetAoValue($"{mod}.AO_Foreline_Temperature_Setpoint"))
  555. {
  556. SetAiValue($"{mod}.AI_Foreline_Control_TC_Temp", GetAiValue($"{mod}.AI_Foreline_Control_TC_Temp") - _rd.Next(1, 2));
  557. SetAiValue($"{mod}.AI_Foreline_Monitor_TC_Temp", GetAiValue($"{mod}.AI_Foreline_Monitor_TC_Temp") - _rd.Next(1, 2));
  558. }
  559. // Wall
  560. if (IO.DO[$"{mod}.DO_CHB_Wall_Heater_On"].Value &&
  561. GetAiValue($"{mod}.AI_CHB_Wall_Control_TC_Temp") < GetAoValue($"{mod}.AO_CHB_Wall_Temperature_Setpoint"))
  562. {
  563. SetAiValue($"{mod}.AI_CHB_Wall_Control_TC_Temp", GetAiValue($"{mod}.AI_CHB_Wall_Control_TC_Temp") + _rd.Next(1, 2));
  564. SetAiValue($"{mod}.AI_CHB_Wall_Monitor_TC_Temp", GetAiValue($"{mod}.AI_CHB_Wall_Monitor_TC_Temp") + _rd.Next(1, 2));
  565. }
  566. else if (IO.DO[$"{mod}.DO_CHB_Wall_Heater_On"].Value &&
  567. GetAiValue($"{mod}.AI_Substrate_Control_TC_Temp") > GetAoValue($"{mod}.AO_CHB_Wall_Temperature_Setpoint"))
  568. {
  569. SetAiValue($"{mod}.AI_CHB_Wall_Control_TC_Temp", GetAiValue($"{mod}.AI_CHB_Wall_Control_TC_Temp") - _rd.Next(1, 2));
  570. SetAiValue($"{mod}.AI_CHB_Wall_Monitor_TC_Temp", GetAiValue($"{mod}.AI_CHB_Wall_Monitor_TC_Temp") - _rd.Next(1, 2));
  571. }
  572. }
  573. void MonitorGas(ModuleName mod)
  574. {
  575. // gas
  576. this.SimulateMFC(ModuleName.PMA, 1);
  577. this.SimulateMFC(ModuleName.PMA, 2);
  578. this.SimulateMFC(ModuleName.PMA, 3);
  579. this.SimulateMFC(ModuleName.PMA, 4);
  580. this.SimulateMFC(ModuleName.PMA, 5);
  581. this.SimulateMFC(ModuleName.PMB, 1);
  582. this.SimulateMFC(ModuleName.PMB, 2);
  583. this.SimulateMFC(ModuleName.PMB, 3);
  584. this.SimulateMFC(ModuleName.PMB, 4);
  585. this.SimulateMFC(ModuleName.PMB, 5);
  586. }
  587. private void SimulateMFC(ModuleName mod, byte gasNum)
  588. {
  589. var sp = GetAoValue($"{mod}.AO_MFC{gasNum}_Flow_Setpoint");
  590. if (gasNum == 3)
  591. {
  592. sp = Math.Max(0, sp - 1500);
  593. }
  594. var mock_fb = _rd.Next((int)sp - 3, (int)sp + 3) + _rd.NextDouble();
  595. SetAiValue($"{mod}.AI_MFC{gasNum}_Flow", (float)mock_fb);
  596. }
  597. public void Terminate()
  598. {
  599. _thread.Stop();
  600. }
  601. }
  602. }