EfemSimulator.cs 12 KB

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  1. using System;
  2. using System.Text.RegularExpressions;
  3. using System.Threading;
  4. using System.Threading.Tasks;
  5. using Aitex.Core.UI.Control;
  6. using MECF.Framework.Simulator.Core.Driver;
  7. using Aitex.Core.Util;
  8. using VirgoCommon;
  9. namespace VirgoSimulator.Devices
  10. {
  11. class EfemSimulatorServer : SocketDeviceSimulator
  12. {
  13. private const string CMD_PATTERN = "^MOV|^SET|^GET";
  14. private const string SCMD = @"(?<=\:)(.*?)(?=\/)";
  15. private const string SFOUP = @"(?<=P)(\d{1})(?=[\;\/])";
  16. private const string ACK = "ACK";
  17. private string[] _slotMap = new string[25];
  18. private PeriodicJob _HwThread;
  19. private bool _bCommReady;
  20. private bool _isDoorOpen;
  21. private bool _isPlaced;
  22. public int WaferSize = 3;
  23. public string SlotMap
  24. {
  25. get { return string.Join("", _slotMap); }
  26. }
  27. public bool _isVacuumError { get; set; }
  28. public bool _isAirError { get; set; }
  29. public bool _isFlowError { get; set; }
  30. public bool _isLeak { get; set; }
  31. public bool _isMaintain { get; set; }
  32. public bool _isWaferPresent { get; set; }
  33. public bool _isMaintainDoorOpen { get; private set; }
  34. public bool _isProtrude1 { get; set; }
  35. public bool _isProtrude2 { get; set; }
  36. public EfemSimulatorServer() : base(13001, -1, "\r", ' ')
  37. {
  38. for (int i = 0; i < _slotMap.Length; i++)
  39. _slotMap[i] = "0";
  40. _HwThread = new PeriodicJob(5000, OnSendEvent, "EfemHardware", true);
  41. }
  42. private bool OnSendEvent()
  43. {
  44. if (!_bCommReady)
  45. {
  46. OnWriteMessage("INF:READY/COMM;");
  47. }
  48. return true;
  49. }
  50. protected override void ProcessUnsplitMessage(string str)
  51. {
  52. if (!_bCommReady && str.Contains("ACK:READY/COMM"))
  53. {
  54. _bCommReady = true;
  55. }
  56. if (!Regex.IsMatch(str, CMD_PATTERN))
  57. return;
  58. // 发送ACK 表示收到
  59. string ack = Regex.Replace(str, CMD_PATTERN, ACK);
  60. if(!str.Contains("SIGSTAT"))
  61. OnWriteMessage(ack);
  62. // 处理INF
  63. var a = OnWork(ack);
  64. }
  65. internal void SetCassetteDoor(bool doorOpen)
  66. {
  67. if (doorOpen != _isDoorOpen)
  68. {
  69. _isDoorOpen = doorOpen;
  70. SendSystemData();
  71. }
  72. }
  73. internal void SetMaintain(bool maintain)
  74. {
  75. if (maintain != _isMaintain)
  76. {
  77. _isMaintain = maintain;
  78. SendSystemData();
  79. }
  80. }
  81. internal void SetProtrude1(bool protrude)
  82. {
  83. if (protrude != _isProtrude1)
  84. {
  85. _isProtrude1 = protrude;
  86. SendLP1Data();
  87. }
  88. }
  89. internal void SetProtrude2(bool protrude)
  90. {
  91. if (protrude != _isProtrude2)
  92. {
  93. _isProtrude2 = protrude;
  94. SendLP2Data();
  95. }
  96. }
  97. private async Task OnWork(string strACK)
  98. {
  99. // match basic
  100. Match m1 = Regex.Match(strACK, SCMD);
  101. // get mock delay time
  102. string sBasic = m1.Groups[1].Value;
  103. if (string.IsNullOrEmpty(sBasic))
  104. return;
  105. EfemOperation op = EfemConstant.ToOperation(sBasic);
  106. ushort millionSec = this.SimuOperationTime(op);
  107. // Sleep
  108. //await Task.Run(() => Thread.Sleep(millionSec));
  109. await Task.Delay(millionSec);
  110. // build the INF string
  111. string strINF = string.Empty;
  112. switch (EfemConstant.ToOperation(sBasic))
  113. {
  114. case EfemOperation.GetWaferInfo:
  115. strINF = strACK.Replace(ACK, "INF");
  116. strINF = strINF.TrimEnd(';');
  117. strINF += "/1111111111111110001111111;";
  118. break;
  119. case EfemOperation.Home:
  120. //string s1 = "EVT:SIGSTAT/P1/00000381/00000000;\rEVT:SIGSTAT/P2/00000381/00000000;\rEVT:SIGSTAT/System/0000FFF7/00000004;\r";
  121. //strINF = s1 + strACK.Replace(ACK, "INF");
  122. SendSystemData();
  123. SendLP1Data();
  124. SendLP2Data();
  125. strINF = strACK.Replace(ACK, "INF");
  126. break;
  127. case EfemOperation.Map:
  128. Match m2 = Regex.Match(strACK, SFOUP);
  129. if (m2.Success)
  130. {
  131. string map = string.Join("", _slotMap);
  132. string s2 = $"EVT:MAPDT/P{m2.Groups[1].Value}/{map};\r";
  133. strINF = s2 + strACK.Replace(ACK, "INF");
  134. }
  135. break;
  136. case EfemOperation.SigStatus:
  137. {
  138. if(strACK.Contains("P1"))
  139. {
  140. uint data = GetLP1Data1();
  141. string msg = $"ACK:SIGSTAT/P1/{data:X8}/00000000;\r";
  142. OnWriteMessage(msg);
  143. msg = $"INF:SIGSTAT/P1/{data:X8}/00000000;\r";
  144. OnWriteMessage(msg);
  145. return;
  146. }
  147. if (strACK.Contains("P2"))
  148. {
  149. uint data = GetLP2Data1();
  150. string msg = $"ACK:SIGSTAT/P2/{data:X8}/00000000;\r";
  151. OnWriteMessage(msg);
  152. msg = $"INF:SIGSTAT/P2/{data:X8}/00000000;\r";
  153. OnWriteMessage(msg);
  154. return;
  155. }
  156. break;
  157. }
  158. case EfemOperation.Align:
  159. case EfemOperation.Pick:
  160. case EfemOperation.Place:
  161. case EfemOperation.Orgsh:
  162. case EfemOperation.Light:
  163. default:
  164. strINF = strACK.Replace(ACK, "INF");
  165. break;
  166. }
  167. OnWriteMessage(strINF);
  168. }
  169. private void SendLP1Data()
  170. {
  171. uint data = GetLP1Data1();
  172. string msg = $"EVT:SIGSTAT/P1/{data:X8}/00000000;";
  173. OnWriteMessage(msg);
  174. }
  175. private void SendLP2Data()
  176. {
  177. uint data = GetLP2Data1();
  178. string msg = $"EVT:SIGSTAT/P2/{data:X8}/00000000;";
  179. OnWriteMessage(msg);
  180. }
  181. private void SendSystemData()
  182. {
  183. uint data = GetSystemData1();
  184. string msg = $"EVT:SIGSTAT/System/{data:X8}/00000000;";
  185. OnWriteMessage(msg);
  186. }
  187. private ushort SimuOperationTime(EfemOperation op)
  188. {
  189. ushort sec = 0;
  190. switch (op)
  191. {
  192. case EfemOperation.Map:
  193. case EfemOperation.GetWaferInfo:
  194. case EfemOperation.Align:
  195. sec = 300;
  196. break;
  197. case EfemOperation.Pick:
  198. case EfemOperation.Place:
  199. case EfemOperation.Orgsh:
  200. sec = 400;
  201. break;
  202. case EfemOperation.Light:
  203. case EfemOperation.SigStatus:
  204. sec = 200;
  205. break;
  206. default:
  207. sec = 100;
  208. break;
  209. }
  210. return sec;
  211. }
  212. public void PlaceCarrier1()
  213. {
  214. _isPlaced = true;
  215. SendLP1Data();
  216. }
  217. public void RemoveCarrier1()
  218. {
  219. _isPlaced = false;
  220. SendLP1Data();
  221. }
  222. public void PlaceCarrier2()
  223. {
  224. _isPlaced = true;
  225. SendLP2Data();
  226. }
  227. public void RemoveCarrier2()
  228. {
  229. _isPlaced = false;
  230. SendLP2Data();
  231. }
  232. public void ClearWafer()
  233. {
  234. for (int i = 0; i < _slotMap.Length; i++)
  235. {
  236. _slotMap[i] = "0";
  237. }
  238. }
  239. public void SetAllWafer()
  240. {
  241. for (int i = 0; i < _slotMap.Length; i++)
  242. {
  243. _slotMap[i] = "1";
  244. }
  245. }
  246. public void SetUpWafer()
  247. {
  248. for (int i = 0; i < _slotMap.Length; i++)
  249. {
  250. _slotMap[i] = i > 15 ? "1" : "0";
  251. }
  252. }
  253. public void SetLowWafer()
  254. {
  255. for (int i = 0; i < _slotMap.Length; i++)
  256. {
  257. _slotMap[i] = i < 10 ? "1" : "0";
  258. }
  259. }
  260. public void RandomWafer()
  261. {
  262. Random _rd = new Random();
  263. for (int i = 0; i < _slotMap.Length; i++)
  264. {
  265. _slotMap[i] = (i % 9).ToString();// _rd.Next(0, 10) < 6 ? "0" : "1";
  266. }
  267. }
  268. private uint GetLP1Data1()
  269. {
  270. uint data1 = 0x0u;
  271. data1 |= (_isPlaced ? 0x00000001u : 0x0);
  272. data1 |= (!_isPlaced ? 0x00000002u : 0x0);
  273. switch (WaferSize)
  274. {
  275. case 3:
  276. //data1 |= 0x00000040u;
  277. data1 |= 0x00000080u;
  278. data1 |= 0x00000100u;
  279. break;
  280. case 4:
  281. data1 |= 0x00000040u;
  282. //data1 |= 0x00000080u;
  283. data1 |= 0x00000100u;
  284. break;
  285. case 6:
  286. data1 |= 0x00000040u;
  287. data1 |= 0x00000080u;
  288. //data1 |= 0x00000100u;
  289. break;
  290. }
  291. data1 |= (!_isProtrude1) ? 0x00000200u : 0x0;
  292. return data1;
  293. }
  294. private uint GetLP2Data1()
  295. {
  296. uint data1 = 0x0u;
  297. data1 |= (_isPlaced ? 0x00000001u : 0x0);
  298. data1 |= (!_isPlaced ? 0x00000002u : 0x0);
  299. switch (WaferSize)
  300. {
  301. case 3:
  302. //data1 |= 0x00000040u;
  303. data1 |= 0x00000080u;
  304. data1 |= 0x00000100u;
  305. break;
  306. case 4:
  307. data1 |= 0x00000040u;
  308. //data1 |= 0x00000080u;
  309. data1 |= 0x00000100u;
  310. break;
  311. case 6:
  312. data1 |= 0x00000040u;
  313. data1 |= 0x00000080u;
  314. //data1 |= 0x00000100u;
  315. break;
  316. }
  317. data1 |= (!_isProtrude2) ? 0x00000200u : 0x0;
  318. return data1;
  319. }
  320. private uint GetSystemData1()
  321. {
  322. uint data1 = 0x0u;
  323. //0:
  324. data1 |= (!_isVacuumError ? 0x00000001u : 0x0);
  325. //1
  326. data1 |= (!_isVacuumError ? 0x00000002u : 0x0);
  327. //2:
  328. data1 |= (!_isAirError ? 0x00000004u : 0x0);
  329. //4 Flow gauge Sensor Warning
  330. data1 |= (!_isFlowError ? 0x00000010u : 0x0);
  331. //5 Leakage Sensor Warning
  332. data1 |= (!_isLeak ? 0x00000020u : 0x0);
  333. //6:Door switch Door close
  334. data1 |= (!_isMaintainDoorOpen ? 0x00000040u : 0x0);
  335. //7 Drive power Normal
  336. data1 |= 0x00000080u;
  337. //8 Differential pressure sensor setting 1 Normal
  338. data1 |= 0x00000100u;
  339. //9 Differential pressure sensor setting 1 Normal
  340. data1 |= 0x00000200u;
  341. //10 Ionizer alarm Normal
  342. data1 |= 0x00000400u;
  343. //11 FFU alarm Normal
  344. data1 |= 0x00000800u;
  345. //12 Area sensor(Reserved) Not blocked
  346. data1 |= 0x00001000u;
  347. //13 Mode switch RUN
  348. data1 |= (!_isMaintain ? 0x00002000u : 0x0);
  349. //14 Robot Wafer Present No presence
  350. data1 |= (!_isWaferPresent ? 0x00004000u : 0x0);
  351. //15 Cassette Door Door Closed
  352. data1 |= (!_isDoorOpen ? 0x00008000u : 0x0);
  353. return data1;
  354. }
  355. }
  356. }