Virgo_Mask/VirgoRT/Config/DeviceModelVirgo.xml

<?xml version="1.0" encoding="utf-16"?>
<DeviceModelDefine type="Virgo" xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" xsi:noNamespaceSchemaLocation="DeviceModel.xsd">
  <IoValves>
    <IoValve id="ValveMfc1" display="MFC1 Valve" schematicId="SV1" unit="" isNc="true"
             isDefaultOpen="false" diOpen="" doOpen="DO_EV8_MFC1_Valve" diCloseSensor="" diOpenSensor="" />
    <IoValve id="ValveMfc2" display="MFC2 Valve" schematicId="SV2" unit="" isNc="true"
             isDefaultOpen="false" diOpen="" doOpen="DO_EV9_MFC2_Valve" diCloseSensor="" diOpenSensor="" />
    <IoValve id="ValveMfc3" display="MFC3 Valve" schematicId="SV3" unit="" isNc="true"
             isDefaultOpen="false" diOpen="" doOpen="DO_EV10_MFC3_Valve" diCloseSensor="" diOpenSensor="" />
    <IoValve id="ValveMfc4" display="MFC4 Valve" schematicId="SV13" unit="" isNc="true"
             isDefaultOpen="false" diOpen="" doOpen="DO_EV11_MFC4_Valve" diCloseSensor="" diOpenSensor="" />
    <IoValve id="ValveMfc5" display="MFC5 Valve" schematicId="SV14" unit="" isNc="true"
             isDefaultOpen="false" diOpen="" doOpen="DO_EV12_MFC5_Valve" diCloseSensor="" diOpenSensor="" />
    
    <IoValve id="ValveChamberPurge" display="Purge valve" schematicId="SV6"
             unit="" isNc="true" isDefaultOpen="false" diOpen="" doOpen="DO_EV6_Chamber_Purge_Valve" diCloseSensor="" diOpenSensor="" />
    <IoValve id="ValveProcess" display="Process gas final valve" schematicId=""
             unit="" isNc="true" isDefaultOpen="false" diOpen="" doOpen="DO_EV1_Process_Gas_Final_Valve"
             diCloseSensor="" diOpenSensor="" />
    <IoValve id="ValveSoftPumping" display="Soft pumping valve" schematicId=""
             unit="" isNc="true" isDefaultOpen="false" diOpen="" doOpen="DO_EV2_Soft_Pumping_Valve"
             diCloseSensor="" diOpenSensor="" />
    <IoValve id="ValveFastPumping" display="Fast pumping valve" schematicId=""
             unit="" isNc="true" isDefaultOpen="false" diOpen="" doOpen="DO_EV3_Fast_Pumping_Valve"
             diCloseSensor="" diOpenSensor="" />
    <IoValve id="ValveFastVent" display="Fast vent valve" schematicId=""
             unit="" isNc="true" isDefaultOpen="false" diOpen="" doOpen="DO_EV7_Chamber_Vent_Valve"
             diCloseSensor="" diOpenSensor="" />
  </IoValves>

  <IoMfcs assembly="VirgoRT" classType="VirgoRT.Devices.IODevices.IoMfc1">
    <IoMfc1 id="MfcGas1" display="MfcGas1" schematicId="MFC1" unit="sccm"
           aiFlow="AI_MFC1_Flow" aoFlow="AO_MFC1_Flow_Setpoint" diOffline="" aoRange=""
           diPressureAlarm="DI_MFC1_Pressure_Switch"
           scGasName="Gas1Name"
           scEnable="Gas1Enable"
           scN2Scale="Gas1MfcN2Scale"
           scScaleFactor="Gas1MfcScaleFactor"
           scAlarmRange="Gas1MfcAlarmRange"
           scEnableAlarm="Gas1MfcEnableAlarm"
           scAlarmTime="Gas1MfcAlarmTime"
           scFlowRegulationFactor="Gas1MfcFlowRegulationFactor"
           scDefaultSetPoint="" />
    <IoMfc1 id="MfcGas2" display="MfcGas2" schematicId="MFC2" unit="sccm"
           aiFlow="AI_MFC2_Flow" aoFlow="AO_MFC2_Flow_Setpoint" diOffline="" aoRange=""
           diPressureAlarm="DI_MFC2_Pressure_Switch"
           scGasName="Gas2Name"
           scEnable="Gas2Enable"
           scN2Scale="Gas2MfcN2Scale"
           scScaleFactor="Gas2MfcScaleFactor"
           scAlarmRange="Gas2MfcAlarmRange"
           scEnableAlarm="Gas2MfcEnableAlarm"
           scAlarmTime="Gas2MfcAlarmTime"
           scFlowRegulationFactor="Gas2MfcFlowRegulationFactor"
           scDefaultSetPoint="" />
    <IoMfc1 id="MfcGas3" display="MfcGas3" schematicId="MFC3" unit="sccm"
           aiFlow="AI_MFC3_Flow" aoFlow="AO_MFC3_Flow_Setpoint" diOffline="" aoRange=""
           diPressureAlarm="DI_MFC3_Pressure_Switch"
           scGasName="Gas3Name"
           scEnable="Gas3Enable"
           scN2Scale="Gas3MfcN2Scale"
           scScaleFactor="Gas3MfcScaleFactor"
           scAlarmRange="Gas3MfcAlarmRange"
           scEnableAlarm="Gas3MfcEnableAlarm"
           scAlarmTime="Gas3MfcAlarmTime"
           scFlowRegulationFactor="Gas3MfcFlowRegulationFactor"
           scDefaultSetPoint="" />
    <IoMfc1 id="MfcGas4" display="Gas4" schematicId="MFC4" unit="sccm"
          aiFlow="AI_MFC4_Flow" aoFlow="AO_MFC4_Flow_Setpoint" diOffline="" aoRange=""
          diPressureAlarm="DI_MFC4_Pressure_Switch"
          scGasName="Gas4Name"
          scEnable="Gas4Enable"
          scN2Scale="Gas4MfcN2Scale"
          scScaleFactor="Gas4MfcScaleFactor"
          scAlarmRange="Gas4MfcAlarmRange"
          scEnableAlarm="Gas4MfcEnableAlarm"
          scAlarmTime="Gas4MfcAlarmTime"
          scFlowRegulationFactor="Gas4MfcFlowRegulationFactor"
          scDefaultSetPoint="" />
    <IoMfc1 id="MfcGas5" display="Gas5" schematicId="MFC5" unit="sccm"
           aiFlow="AI_MFC5_Flow" aoFlow="AO_MFC5_Flow_Setpoint" diOffline="" aoRange=""
           diPressureAlarm="DI_MFC5_Pressure_Switch"
           scGasName="Gas5Name"
           scEnable="Gas5Enable"
           scN2Scale="Gas5MfcN2Scale"
           scScaleFactor="Gas5MfcScaleFactor"
           scAlarmRange="Gas5MfcAlarmRange"
           scEnableAlarm="Gas5MfcEnableAlarm"
           scAlarmTime="Gas5MfcAlarmTime"
           scFlowRegulationFactor="Gas5MfcFlowRegulationFactor"
           scDefaultSetPoint="" />
  </IoMfcs>

  <IoGasSticks assembly="VirgoRT" classType="VirgoRT.Devices.IoGasStick">
    <IoGasStick id="GasStick1" display="" mfc ="MfcGas1" downvalve="ValveMfc1" />
    <IoGasStick id="GasStick2" display="" mfc ="MfcGas2" downvalve="ValveMfc2" />
    <IoGasStick id="GasStick3" display="" mfc ="MfcGas3" downvalve="ValveMfc3" />
    <IoGasStick id="GasStick4" display="" mfc ="MfcGas4" downvalve="ValveMfc4" />
    <IoGasStick id="GasStick5" display="" mfc ="MfcGas5" downvalve="ValveMfc5" />
  </IoGasSticks>

  <IoSensors>
    <IoSensor id="SensorATMSwitch" display="ATM Switch"  schematicId="" unit="" di="DI_PM_ATM_Switch" isLowAsNormal="" textOutTrigValue="true" infoText="" warningText="" alarmText="" />
    <IoSensor id="SensorVacSwitch" display="VAC Switch"  schematicId="" unit="" di="DI_PM_VAC_Switch" isLowAsNormal="" textOutTrigValue="true" infoText="" warningText="" alarmText="" />
    <IoSensor id="SensorWaterFlowOk" display="Water Flow OK"  schematicId="" unit="" di="DI_Cooling_Water_Flow_Switch" isLowAsNormal="" textOutTrigValue="false" infoText="" warningText="sensor water flow abnormal" alarmText="" />
    <!--<IoSensor id="SensorCoolantInletTCOK" display="Coolant Inlet TC OK"  schematicId="" unit="" di="DI_Coolant_Inlet_TC_Broken_Alarm" isLowAsNormal="" textOutTrigValue="true" infoText="" warningText="" alarmText="Coolant Inlet TC Broken Alarm" />-->
    <!--<IoSensor id="SensorCoolantOutletTCOK" display="Coolant Outlet TC OK"  schematicId="" unit="" di="DI_Coolant_Outlet_TC_Broken_Alarm" isLowAsNormal="" textOutTrigValue="true" infoText="" warningText="" alarmText="Coolant Outlet TC Broken Alarm" />-->
    <IoSensor id="SensorWaterLeakOk" display="Water Leak Ok"  schematicId="" unit="" di="DI_Water_Leak_Sensor" isLowAsNormal="" textOutTrigValue="false" infoText="" warningText="" alarmText="Sensor water leak" />
    <IoSensor id="N2PressureOk" display="N2 Pressure OK"  schematicId="" unit="" di="DI_N2_Pressure_Switch" isLowAsNormal="" textOutTrigValue="false" infoText="" warningText="" alarmText="N2 Pressure Alarm" />
    <!--<IoSensor id="LE_OT" display="LE OT"  schematicId="" unit="" di="DI_LE_OT_Switch_Alarm" isLowAsNormal="" textOutTrigValue="true" infoText="" warningText="" alarmText="LE OT SW Alarm" />-->
    <IoSensor id="GB_Door" display="GB Door"  schematicId="" unit="" di="DI_GB_Door_Interlock" isLowAsNormal="" textOutTrigValue="true" infoText="" warningText="" alarmText="GB Door SW Alarm" />
    <IoSensor id="GB_Pressure" display="GB Pressure"  schematicId="" unit="" di="DI_GB_Pressure_Interlock" isLowAsNormal="" textOutTrigValue="true" infoText="" warningText="" alarmText="GB Pressure SW Alarm" />
    <!--<IoSensor id="CHB_Wall_Switch" display="CHB Wall Switch"  schematicId="" unit="" di="DI_CHB_Wall_OT_Switch_Alarm" isLowAsNormal="" textOutTrigValue="true" infoText="" warningText="" alarmText="CHB Wall Switch SW Alarm" />-->
    <IoSensor id="SensorCDAPressureOk" display="CDA pressure OK"  schematicId="" unit="" di="DI_CDA_Pressure_Switch_Out_1" isLowAsNormal="" textOutTrigValue="false" infoText="" warningText="" alarmText="Sensor CDA pressure abnormal" />
    <!--<IoSensor id="SensorCDAPressureOk2" display="CDA pressure switch OK 2"  schematicId="" unit="" di="DI_CDA_Pressure_Switch_Out_2" isLowAsNormal="" textOutTrigValue="false" infoText="" warningText="" alarmText="Sensor CDA 2 pressure abnormal" />-->
    <IoSensor id="SensorArmNotExtend" display="Arm not Extend"  schematicId="" unit="" di="DI_ARM_Not_Extend_to_PM" isLowAsNormal="" textOutTrigValue="true" infoText="Sensor arm extended" warningText="" alarmText="" />
    <IoSensor id="SourceFan1" display="Source Fan1"  schematicId="" unit="" di="DI_Source_Fans_Running" isLowAsNormal="" textOutTrigValue="false" infoText="" warningText="" alarmText="Source Fan1 Alarm" />
    <IoSensor id="CTRLBoxFansRunning" display="CTRL Box Fans Running"  schematicId="" unit="" di="DI_CTRL_Box_Fans_Running" isLowAsNormal="" textOutTrigValue="false" infoText="" warningText="CTRL Box Fans Running Warning" alarmText="" />
    <IoSensor id="GeneratorInterlock" display="RF hardware interlock" di="DI_Generator_Hardware_Interlock" isLowAsNormal="" infoText="Generator interlock" warningText="" alarmText="" />
    <IoSensor id="ACR_Smoke_Monitoring" display="ACR Smoke Monitoring"  schematicId="" unit="" di="DI_ACR_Smoke_Monitoring" isLowAsNormal="" textOutTrigValue="false" infoText="" warningText="" alarmText="ACR_Smoke Monitoring SW Alarm" />
    <IoSensor id="ACR_Power_On" display="ACR Power On"  schematicId="" unit="" di="DI_ACR_Power_On" isLowAsNormal="" textOutTrigValue="false" infoText="" warningText="" alarmText="ACR Power On SW Alarm" />
    <IoSensor id="SRFWaterFlowSwitch" display="SRF Water Flow Switch" di="DI_SRF_Water_Flow_Switch" isLowAsNormal="" textOutTrigValue="false"  infoText="" warningText="" alarmText="SRF Water Flow Switch Alarm" />
    <!--<IoSensor id="FactoryScrubberSysNormal" display="Factory Scrubber Sys Normal" di="DI_Factory_Scrubber_SYS_Normal" isLowAsNormal="" textOutTrigValue="true"  infoText="" warningText="" alarmText="" />-->
    <IoSensor id="LiftServoGroupCurrentPosDIffAlarm" display="Lift servo group current POS DIff alarm" di="DI_Lift_Servo_Group_Current_Pos_DIff_Alarm" isLowAsNormal="" textOutTrigValue="true"  infoText="" warningText="" alarmText="Lift servo group current POS DIff alarm" />

    <IoSensor id="ACRFansRunning" display="ACR Fans Running" di="DI_ACR_Fans_Running" isLowAsNormal="" textOutTrigValue="false"  infoText="" warningText="ACR Fans Running Sensor Warning" alarmText="" />
  </IoSensors>

  <IoPumps assembly="VirgoRT" classType="VirgoRT.Devices.IoPump" IsEnabled = "False">
    <IoPump id="MainPump" display="Main Pump" schematicId="MainPump" unit="mTorr"
            diBreakerState=""
            diRunning="DI_Pump_Running"
            diStart=""
            diStop=""
            diAlarm="DI_Pump_Alarm"
            diWarning="DI_Pump_Warning"
            diPumpTempAlarm=""
            diN2Alarm="DI_Pump_N2_Purge_Alarm"
            diWaterFlowAlarm="DI_Pump_Cool_Water_Flow_Alarm"
            diExhaustPressureAlarm="DI_Pump_Exhaust_Pressure_Alarm"

            doStart="DO_Pump_Start"
            doStop="DO_Pump_Stop"
            doWaterFlowAlarm=""
            doN2PressureAlarm=""

            aiWaterFlow=""
            aiN2Pressure=""
            aoN2PressureAlarmMaxValue=""
            aoN2PressureAlarmMinValue=""
            aoWaterFlowAlarmMaxValue=""
            aoWaterFlowAlarmMinValue=""

            scEnableDryPump="EnableDryPump"
            scEnableWaterFlow="PumpEnableWaterFlow"
            scWaterFlowMinValue="PumpWaterFlowMinValue"
            scWaterFlowMaxValue="PumpWaterFlowMaxValue"
            scWaterFlowOutOfToleranceWarningTime="PumpWaterFlowOutOfToleranceWarningTime"
            scWaterFlowOutOfToleranceAlarmTime="PumpWaterFlowOutOfToleranceAlarmTime"
            scEnableN2Pressure="PumpEnableN2Pressure"
            scN2PressureMinValue="PumpN2PressureMinValue"
            scN2PressureMaxValue="PumpN2PressureMaxValue"
            scN2PressureOutOfToleranceWarningTime="PumpN2PressureOutOfToleranceWarningTime"
            scN2PressureOutOfToleranceAlarmTime="PumpN2PressureOutOfToleranceAlarmTime" />
  </IoPumps>

  <IoPressureMeters assembly="VirgoRT" classType="VirgoRT.Devices.IODevices.IoPressureMeter">
    <IoPressureMeter id="ProcessGauge" display="process Pressure" schematicId="" unit="mTorr"
                     aiValue="AI_Process_pressure" diGaugeFail="" scPrecision="" scOffset=""/>
    <IoPressureMeter id="PressureGauge" display="Chamber Pressure" schematicId="" unit="mTorr"
                     aiValue="AI_Chamber_pressure"
                     diGaugeFail=""
                     scPrecision="ChamberPressureGaugePrecision"
                     scOffset=""/>
    <IoPressureMeter id="ForelineGauge" display="Foreline Pressure" schematicId="" unit="mTorr"
                     aiValue="AI_Foreline_pressure" diGaugeFail="" scPrecision="" scOffset=""/>
  </IoPressureMeters>

  <IoThrottleValves assembly="VirgoRT" classType="VirgoRT.Devices.IoThrottleValve">
    <IoThrottleValve  id="ThrottleValve" display="" schematicId="" unit=""
                      aiPositionFeedback="AI_Throttle_Valve_Real_Position"
                      aiPressureFeedback="AI_Throttle_Valve_Real_Pressure"
                      aiState=""
                      aoPositionSetPoint="AO_Throttle_Valve_Position_Setpoint"
                      aoPressureSetPoint="AO_Throttle_Valve_Pressure_Setpoint"
                      aoPressureMode="AO_Throttle_Valve_Work_Mode" />
  </IoThrottleValves>

  <IoPressureControls assembly="VirgoRT" classType="VirgoRT.Devices.IoPressureControl">
    <IoPressureControl id="PressureControl" display="PressureControl" schematicId="PressureControl" unit="mTorr"
                       diLogicProcessGasFlowing=""
                       scGasFlowPressureAlarmRange="GasFlowPressureAlarmRange"
                       scGasFlowPressureAlarmTime="GasFlowPressureAlarmTime"
                       scIsIndependentControl="IsIndependentControl"
                       scIsBoostPumpInstalled="EnableBoosterPump"
                       scTvInstalled="EnableThrottleValve"
                       boost="" tv="ThrottleValve" drypump="MainPump"
                       pressureMeter ="PressureGauge" processMeter="ProcessGauge" forelineMeter="ForelineGauge" />
  </IoPressureControls>

  <IoRfs assembly="VirgoRT" classType="VirgoRT.Devices.IoRf" IsEnabled = "False">
    <IoRf  id="Rf"
            display="RF Generator"
            schematicId=""
            unit=""
            doOnOff="DO_Generator_Power_ON"
            diOnOffFeedback="DI_Generator_Power_Status"
            diInterlock="DI_Generator_Hardware_Interlock"
            diOverTemp ="DI_Generator_Over_Temp"
            aiCurrent=""
            aiVoltage=""
            diBreakerState=""
            diIArc=""
            diOffline=""
            diVArc=""
            doWaterFlowAlarm=""
            doWaterFlowWarning=""

            aoMatchMode=""
            aoMatchPositionC1=""
            aoMatchPositionC2=""
            aoWorkMode=""
            aoFrequency=""
            aoDuty=""
            aoPower="AO_Generator_Power_Setpoint"
            aoCoefficient=""
            aiWaterFlow=""
            aiForwardPower="AI_Generator_Forward_Power"
            aiReflectPower="AI_Generator_Reflect_Power"
            aiMatchMode =""
            aiMatchPositionC1=""
            aiMatchPositionC2=""

            scMatchMode="MatchMode"
            scMatchPositionC1="MatchPositionC1"
            scMatchPositionC2="MatchPositionC2"
            scPowerAlarmRange="RfPowerAlarmRange"
            scPowerAlarmTime="RfPowerAlarmTime"
            scReflectPowerAlarmRange="RfReflectPowerAlarmRange"
            scReflectPowerAlarmTime="RfReflectPowerAlarmTime"
            scPowerRange="PowerRange"
            scCoefficient="Coefficient"
            scEnablePulsingFunction="EnablePulsingFunction"
            scEnableC1C2Position="EnableC1C2Position"
            scEnableReflectPower="EnableReflectPower"
            scEnableVoltageCurrent="EnableVoltageCurrent"
            scPowerRegulationFactor="PowerRegulationFactor" />
  </IoRfs>

  <IoHeaters assembly="VirgoRT" classType="VirgoRT.Devices.IoHeater">
    <IoHeater id="HeaterChamber" display="Chamber Heater" schematicId="VCHTR" unit="℃"
           doPowerOn="DO_Substrate_Heater_On"
           diDeviation="DI_Substrate_TC_Deviation_out_of_range"
           diPowerOnFeedback="DI_Substrate_Heater_On_FB"
           diControlTcBroken="DI_Substrate_Control_TC_Broken_Alarm"
           diMonitorTcBroken="DI_Substrate_Monitor_TC_Broken_Alarm"
           aoSetPoint="AO_Substrate_Temperature_Setpoint"
           aoSetPointLimit="AO_Substrate_Temp_Limit_Setpoint"
           aiFeedback="AI_Substrate_Control_TC_Temp"
           aiMonitor="AI_Substrate_Monitor_TC_Temp"
           aiCoolantInletTemp=""
           aiCoolantOutletTemp=""
           scSetPointLimit="ChamberHeaterSetPointLimit" />
    <IoHeater id="ForelineHeater" display="Foreline Heater" schematicId="" unit="℃"
         doPowerOn="DO_Forline_Heater_On"
         diDeviation="DI_Foreline_TC_Deviation_out_of_range"
         diPowerOnFeedback="DI_Foreline_Heater_On_FB"
         diControlTcBroken="DI_Foreline_Control_TC_Broken_Alarm"
         diMonitorTcBroken="DI_Foreline_Monitor_TC_Broken_Alarm"
         aoSetPoint="AO_Foreline_Temperature_Setpoint"
         aoSetPointLimit="AO_Foreline_Temp_Limit_Setpoint"
         aiFeedback="AI_Foreline_Control_TC_Temp"
         aiMonitor="AI_Foreline_Monitor_TC_Temp"
         scSetPointLimit="ForeLineHeaterSetPointLimit" />
    <IoHeater id="WallHeater" display="Wall Heater" schematicId="" unit="℃"
              doPowerOn="DO_CHB_Wall_Heater_On"

              diDeviation="DI_CHB_Wall_TC_Deviation_out_of_range"
              diPowerOnFeedback="DI_CHB_Wall_Heater_On_FB"
              diControlTcBroken="DI_CHB_Wall_Control_TC_Broken_Alarm"
              diMonitorTcBroken="DI_CHB_Wall_Monitor_TC_Broken_Alarm"

              aoSetPoint="AO_CHB_Wall_Temperature_Setpoint"
              aoSetPointLimit="AO_CHB_Wall_Temp_Limit_Setpoint"

              aiFeedback="AI_CHB_Wall_Control_TC_Temp"
              aiMonitor="AI_CHB_Wall_Monitor_TC_Temp"

              scSetPointLimit="WallHeaterSetPointLimit" />


    <IoHeater id="GridHeater" display="Grid Heater" schematicId="" unit="℃"
              doPowerOn=""

              diDeviation=""
              diPowerOnFeedback=""
              diControlTcBroken=""
              diMonitorTcBroken=""

              aoSetPoint=""
              aoSetPointLimit=""

              aiFeedback=""
              aiMonitor=""

              scSetPointLimit="" />
  </IoHeaters>

  <IoHeartbeats assembly="VirgoRT" classType=" VirgoRT.Devices.IODevices.IoHeartbeat">
    <IoHeartbeat  id="Heartbeat" display="" schematicId="" unit="" ao="AO_Heartbeat" ai="AI_Heartbeat_FB" />
  </IoHeartbeats>

  <IoResets>
    <IoReset id="ResetPlcSignal" display="" schematicId="" unit="" doReset="DO_Reset_Signal" />
  </IoResets>

  <IoSetConfigs>
    <IoSetConfig id="SetProcessPressureOffset" display="" schematicId="" unit="" aoPressureOffset="AO_Process_Pressure_Offset_Value" />
  </IoSetConfigs>

  <IoStatisticss>
    <IoStatistics id="StatisticsRfOnTime" display="RF On Statistics" schematicId="" unit=""
                  diMonitorSignal="DI_Generator_Power_Status"
                  scLastPMTime="RfOnTimeLastPMTime"
                  scTimeFromLastPM="RfOnTimeFromLastPM"
                  scTimeTotal="RfOnTimeTotal"
                  scEnableAlarm="RfOnTimeEnableAlarm"
                  scPMInterval="RfOnTimePMInterval" />

    <IoStatistics id="StatisticsPumpOnTime" display="Pump On Statistics" schematicId="" unit=""
                  diMonitorSignal="DI_Pump_Running"
                  scLastPMTime="PumpOnTimeLastPMTime"
                  scTimeFromLastPM="PumpOnTimeFromLastPM"
                  scTimeTotal="PumpOnTimeTotal"
                  scEnableAlarm="PumpOnTimeEnableAlarm"
                  scPMInterval="PumpOnTimePMInterval" />
  </IoStatisticss>

  <IoPlcDateTimes>
    <IoPlcDateTime id="PlcDateTime" display="PlcDateTime" schematicId="" unit=""
                  aiYear="AI_Year" aiMonth="AI_Month" aiDay="AI_Day" aiHour="AI_Time" aiMinute="AI_Minute" aiSecond="AI_Second" />
  </IoPlcDateTimes>

  <IoCylinders assembly="VirgoRT" classType="VirgoRT.Devices.IoCylinder">
    <IoCylinder id="SlitDoor" display="Slit door" schematicId="" unit="" doMotorRelay="" 
                doON="DO_EV4_Slit_Door_Open" doOFF="DO_EV4_Slit_Door_Close" diON="DI_Slit_Door_Open_Pos" diOFF="DI_Slit_Door_Close_Pos" />
  </IoCylinders>

  <IoTriStates assembly="VirgoRT" classType="VirgoRT.Devices.IoTriStateLift2">
    <IoTriStateLift2 id="TriStateLiftPin2" display="Group TriState LiftPin" schematicId="" unit="" doMotorRelay=""
		 diOrigin="DI_Lift_Servo_1_Servo_Origin_Complete" diOrigin2="DI_Lift_Servo_2_Servo_Origin_Complete" diOrigin3="DI_Lift_Servo_Group_Go_Pos_Origin_Complete"
	     diP1="DI_Lift_Servo_Group_Go_Pos_1_Complete" diP2="DI_Lift_Servo_Group_Go_Pos_2_Complete" diP3="DI_Lift_Servo_Group_Go_Pos_3_Complete"
		 diCOMMAlarm="DI_YAS_Servo_Controler_COMM_Alarm" diBatteryLowAlarm="DI_YAS_Servo_Controler_Battery_Low_Alarm"
		 doOrigin="DO_Lift_Servo_Group_Origin"
		 doReset="DO_Reset_Signal"
		 doP1="DO_Lift_Servo_Group_Go_Position1" doP2="DO_Lift_Servo_Group_Go_Position2" doP3="DO_Lift_Servo_Group_Go_Position3"
	     doStop="DO_Lift_Servo_Group_Stop" doUp="DO_Lift_Servo_Group_Manual_Up" doDown="DO_Lift_Servo_Group_Manual_Down"
					aiCurrentValue=""
	     aoSetP1="AO_Lift_Servo_Group_ABS_POS1" aoSetP2="AO_Lift_Servo_Group_ABS_POS2" aoSetP3="AO_Lift_Servo_Group_ABS_POS3"
		  aoServoWorkMode=""
       aoOriginSpeed="AO_Lift_Servo_Group_Search_Origin_Speed" aoManualSpeed="AO_Lift_Servo_Group_Manual_Speed" aoAutoSpeed="AO_Lift_Servo_Group_Auto_Speed"
	     aoSoftUpLimit="AO_Lift_Servo_Group_Soft_Up_Limit" aoSoftDownLimit="AO_Lift_Servo_Group_soft_Down_Limit"  aoAccDecSpeedTime=""
       aoPosDiff="AO_Lift_Servo_Group_ABS_POS_Diff"
    di1_L_Servo_Driver_Alarm="DI_Lift_Servo_1_L_Servo_Driver_Alarm" di1_L_Servo_Driver_Warning="DI_Lift_Servo_1_L_Servo_Driver_Warning" 
    di1_Search_ORG_Fail_Alarm="DI_Lift_Servo_1_Search_ORG_Fail_Alarm" di1_ABS_Fail_Alarm="DI_Lift_Servo_1_ABS_Fail_Alarm" 
    di1_Up_Limit_Alarm="DI_Lift_Servo_1_Up_Limit_Alarm" di1_Down_Limit_Alarm="DI_Lift_Servo_1_Down_Limit_Alarm" di1_Over_Software_Alarm="DI_Lift_Servo_1_Over_Software_Alarm"
    di2_L_Servo_Driver_Alarm="DI_Lift_Servo_2_L_Servo_Driver_Alarm" di2_L_Servo_Driver_Warning="DI_Lift_Servo_2_L_Servo_Driver_Warning" 
    di2_Search_ORG_Fail_Alarm="DI_Lift_Servo_2_Search_ORG_Fail_Alarm" di2_ABS_Fail_Alarm="DI_Lift_Servo_2_ABS_Fail_Alarm" 
    di2_Up_Limit_Alarm="DI_Lift_Servo_2_Up_Limit_Alarm" di2_Down_Limit_Alarm="DI_Lift_Servo_2_Down_Limit_Alarm" di2_Over_Software_Alarm="DI_Lift_Servo_2_Over_Software_Alarm"  />
  </IoTriStates>
  
  <IoLids assembly="VirgoRT" classType=" VirgoRT.Devices.IODevices.IoLid">
    <IoLid id="Lid" display="Lid" schematicId="" unit="" doMotorRelay="" doON="" doOFF="" diON="" diOFF="DI_Lid_Closed" />
  </IoLids>
  
  <IoMessage assembly="VirgoRT" classType=" VirgoRT.Devices.IODevices.IoMessage">
    <IoMessage id="Messager" display="Messager" schematicId="" unit="" doMotorRelay="" ai="" ao="AO_BaisRF_Enable" />
    <IoMessage id="SubstrateTemperature" display="SubstrateTemperature" schematicId="" unit="" doMotorRelay="" ai="" ao="AO_Substrate_Temperature_TC_TM_Diff" />
    <IoMessage id="ForelineTemperature" display="ForelineTemperature" schematicId="" unit="" doMotorRelay="" ai="" ao="AO_Foreline_Temperature_TC_TM_Diff" />
    <IoMessage id="CHBWallTemperature" display="CHBWallTemperature" schematicId="" unit="" doMotorRelay="" ai="" ao="AO_CHB_Wall_Temperature_TC_TM_Diff" />
  </IoMessage>
  
</DeviceModelDefine>