| 1234567891011121314151617181920212223242526272829303132333435363738394041424344454647484950515253545556575859606162636465666768697071727374757677787980818283848586878889909192939495969798991001011021031041051061071081091101111121131141151161171181191201211221231241251261271281291301311321331341351361371381391401411421431441451461471481491501511521531541551561571581591601611621631641651661671681691701711721731741751761771781791801811821831841851861871881891901911921931941951961971981992002012022032042052062072082092102112122132142152162172182192202212222232242252262272282292302312322332342352362372382392402412422432442452462472482492502512522532542552562572582592602612622632642652662672682692702712722732742752762772782792802812822832842852862872882892902912922932942952962972982993003013023033043053063073083093103113123133143153163173183193203213223233243253263273283293303313323333343353363373383393403413423433443453463473483493503513523533543553563573583593603613623633643653663673683693703713723733743753763773783793803813823833843853863873883893903913923933943953963973983994004014024034044054064074084094104114124134144154164174184194204214224234244254264274284294304314324334344354364374384394404414424434444454464474484494504514524534544554564574584594604614624634644654664674684694704714724734744754764774784794804814824834844854864874884894904914924934944954964974984995005015025035045055065075085095105115125135145155165175185195205215225235245255265275285295305315325335345355365375385395405415425435445455465475485495505515525535545555565575585595605615625635645655665675685695705715725735745755765775785795805815825835845855865875885895905915925935945955965975985996006016026036046056066076086096106116126136146156166176186196206216226236246256266276286296306316326336346356366376386396406416426436446456466476486496506516526536546556566576586596606616626636646656666676686696706716726736746756766776786796806816826836846856866876886896906916926936946956966976986997007017027037047057067077087097107117127137147157167177187197207217227237247257267277287297307317327337347357367377387397407417427437447457467477487497507517527537547557567577587597607617627637647657667677687697707717727737747757767777787797807817827837847857867877887897907917927937947957967977987998008018028038048058068078088098108118128138148158168178188198208218228238248258268278288298308318328338348358368378388398408418428438448458468478488498508518528538548558568578588598608618628638648658668678688698708718728738748758768778788798808818828838848858868878888898908918928938948958968978988999009019029039049059069079089099109119129139149159169179189199209219229239249259269279289299309319329339349359369379389399409419429439449459469479489499509519529539549559569579589599609619629639649659669679689699709719729739749759769779789799809819829839849859869879889899909919929939949959969979989991000100110021003100410051006100710081009101010111012101310141015101610171018101910201021102210231024102510261027102810291030103110321033103410351036103710381039104010411042104310441045104610471048104910501051105210531054105510561057105810591060106110621063106410651066106710681069107010711072107310741075107610771078107910801081108210831084108510861087108810891090109110921093109410951096109710981099110011011102110311041105110611071108110911101111111211131114111511161117111811191120112111221123112411251126112711281129113011311132113311341135113611371138113911401141114211431144114511461147114811491150115111521153115411551156115711581159116011611162116311641165116611671168116911701171117211731174117511761177117811791180118111821183118411851186118711881189119011911192119311941195119611971198119912001201120212031204 | using System;using Aitex.Core.Common;using Aitex.Core.RT.DataCenter;using Aitex.Core.RT.Event;using Aitex.Core.RT.Fsm;using Aitex.Core.RT.OperationCenter;using Aitex.Core.RT.SCCore;using Aitex.Core.Utilities;using Aitex.Sorter.Common;using MECF.Framework.Common.Equipment;using MECF.Framework.Common.Schedulers;using MECF.Framework.Common.SubstrateTrackings;using VirgoCommon;using VirgoRT.Device;using VirgoRT.Device.YASKAWA;using VirgoRT.Devices.EFEM;using VirgoRT.Modules.LPs;using BAI.Systems.Common.Substrates;namespace VirgoRT.Modules{    class EfemEntity : Entity, IEntity, IModuleEntity    {        private int _bigWafer = 0;        private int _midWafer = 0;        private int _smallWafer = 0;        private bool _hasPlacementError = false;        private bool _EnableResetEFEMError = false;        public enum STATE        {            Unknown,            // 0            Initializing,       // 1            Idle,               // 2            Error,              // 3            Picking,            // 4            Placing,            // 5            Aligning,           // 6            Mapping,            // 7            Init,               // 8            Orgshing,           // 9            Lifting,            // 10            InitingAL,          // 11            InitingRB,          // 12            Extending,          // 13            Retracting,         // 14            //SettingLamp,        // 15            Swapping,            Gotoing,            Gripping,            Ungripping,            Fliping,            EmsStoping,            SetSpeed,            Loading,        }        public enum MSG        {            HomeAll,            // 0            Pick,               // 1            Place,              // 2            Align,              // 3            ActionDone,         // 4            RecHwMsg,           // 5            MoveCmd,            // 6            //LED,                // 7            Recover,            // 8            Goto,               // 9            Error,              // 10            Online,             // 11            CommReady,          // 12            Lift,               // 13            HomeAL,             // 14            HomeRB,             // 15            Extend,             // 16            Retract,            // 17            PMLiftPinUp,        // 18            PMLiftPinDown,      // 19            TurnOffBuzzer,             //SwitchOnBuzzerAndRed,            Abort,            Map,			ToInit,			Cool,            PickAndPlace,            Grip,            Ungrip,            Flip,            LiftActionDone,            EmsStop,            SetRobotSpeed,            Load,        }        public enum EfemType        {            FutureEfem = 1,            JetEfem = 2,            BrooksEFEM = 3,            BeamSUNWAY = 4,        }        public bool Check(int msg, out string reason, params object[] args)        {            throw new NotImplementedException();        }        // Fields        //        private readonly string Name;        private readonly Efem _efem;        private readonly LoadPortModule[] _lpms = new LoadPortModule[2];        private readonly EfemType _efemType;        public Efem EfemDevice => _efem;        public EfemType EFEMType => _efemType;        // Constructor        //        public EfemEntity()        {            _smallWafer = SC.GetValue<int>($"System.SmallWafer");            _midWafer = SC.GetValue<int>($"System.MidWafer");            _bigWafer = SC.GetValue<int>($"System.BigWafer");            _efemType = (EfemType)SC.GetValue<int>($"EFEM.EfemType");            _EnableResetEFEMError = SC.GetValue<bool>($"EFEM.EnableResetError");            _efem = new Efem();            Name = ModuleName.EFEM.ToString();            InitFsmMap();        }        public void NotifyLP(ModuleName mod, LoadportEntity.MSG msg)        {            _lpms[mod - ModuleName.LP1].PostMsg(msg);        }        public void NotifyLPError(ModuleName mod )        {            _lpms[mod - ModuleName.LP1].PostMsg(LoadportEntity.MSG.ActionDone);            //_lpms[mod - ModuleName.LP1]..OnError();        }        protected override bool Init()        {            _lpms[0] = new LoadPortModule(ModuleName.LP1, _efem);            _lpms[1] = new LoadPortModule(ModuleName.LP2, _efem);            _lpms[0].Initialize();            _lpms[1].Initialize();            OP.Subscribe($"{ModuleName.EFEM}.{EfemOperation.Home}",         (cmd, args) => { PostMsg(MSG.HomeAll); return true; });            OP.Subscribe($"{ModuleName.EFEM}.{EfemOperation.ClearError}",        (cmd, args) => { PostMsg(MSG.Recover); return true; });            OP.Subscribe($"{ModuleName.EFEM}.{EfemOperation.TurnOffBuzzer}", (cmd, args) => { PostMsg(MSG.TurnOffBuzzer); return true; });            //OP.Subscribe($"{ModuleName.EFEM}.{EfemOperation.SwitchOnBuzzerAndRed}", (cmd, args) => { PostMsg(MSG.SwitchOnBuzzerAndRed); return true; });            OP.Subscribe($"{ModuleName.EFEM}.Online",                       (cmd, args) => { PostMsg(MSG.Online); return true; });            OP.Subscribe($"{ModuleName.EfemRobot}.{EfemOperation.Pick}",    (cmd, args) => { PostMsg(MSG.Pick, args[0], args[1], args[3], args[2]); return true; });            OP.Subscribe($"{ModuleName.EfemRobot}.{EfemOperation.Place}",   (cmd, args) => { PostMsg(MSG.Place, args[0], args[1], args[3], args[2]); return true; });            OP.Subscribe($"{ModuleName.EfemRobot}.{EfemOperation.Extend}",  (cmd, args) => { PostMsg(MSG.Extend, args[0], args[1], args[2]); return true; });            OP.Subscribe($"{ModuleName.EfemRobot}.{EfemOperation.Retract}", (cmd, args) => { PostMsg(MSG.Retract, args[0], args[1]); return true; });            OP.Subscribe($"{ModuleName.EfemRobot}.{EfemOperation.Abort}",   (cmd, args) => { PostMsg(MSG.Abort); return true; });            OP.Subscribe($"{ModuleName.EfemRobot}.{EfemOperation.Home}",    (cmd, args) => { PostMsg(MSG.HomeRB, args); return true; });            OP.Subscribe($"{ModuleName.EfemRobot}.{EfemOperation.Grip}", (cmd, args) =>            {                bool isGrip = ((string)args[0]).ToLower() == "on";                PostMsg(isGrip ? MSG.Grip : MSG.Ungrip,  args[1]);                                 return true;            });            OP.Subscribe($"{ModuleName.EfemRobot}.{EfemOperation.Flip}", (cmd, args) => { PostMsg(MSG.Flip, args[0]); return true; });            OP.Subscribe($"{ModuleName.EfemRobot}.{EfemOperation.EmsStop}", (cmd, args) => { PostMsg(MSG.EmsStop); return true; });            OP.Subscribe($"{ModuleName.EfemRobot}.{EfemOperation.SetRobotSpeed}", (cmd, args) => { PostMsg(MSG.SetRobotSpeed, args[0]); return true; });            OP.Subscribe($"{ModuleName.Aligner1}.{EfemOperation.Home}",     (cmd, args) => { PostMsg(MSG.HomeAL, ModuleName.Aligner1); return true; });            OP.Subscribe($"{ModuleName.Aligner2}.{EfemOperation.Home}",     (cmd, args) => { PostMsg(MSG.HomeAL, ModuleName.Aligner2); return true; });            OP.Subscribe($"{ModuleName.Cooling1}.{EfemOperation.Home}", (cmd, args) => { PostMsg(MSG.HomeAL, ModuleName.Cooling1); return true; });            OP.Subscribe($"{ModuleName.Cooling2}.{EfemOperation.Home}", (cmd, args) => { PostMsg(MSG.HomeAL, ModuleName.Cooling2); return true; });            OP.Subscribe($"{ModuleName.Aligner1}.{EfemOperation.Align}",    (cmd, args) => { PostMsg(MSG.Align, ModuleName.Aligner1, args[0]); return true; });            OP.Subscribe($"{ModuleName.Aligner2}.{EfemOperation.Align}",    (cmd, args) => { PostMsg(MSG.Align, ModuleName.Aligner2, args[0]); return true; });            OP.Subscribe($"{ModuleName.Cooling1}.{EfemOperation.Align}", (cmd, args) => { PostMsg(MSG.Align, ModuleName.Cooling1, args[0]); return true; });            OP.Subscribe($"{ModuleName.Cooling2}.{EfemOperation.Align}", (cmd, args) => { PostMsg(MSG.Align, ModuleName.Cooling2, args[0]); return true; });            OP.Subscribe($"{ModuleName.Aligner1}.{EfemOperation.Lift}",     (cmd, args) => { PostMsg(MSG.Lift, ModuleName.Aligner1); return true; });            OP.Subscribe($"{ModuleName.Aligner2}.{EfemOperation.Lift}",     (cmd, args) => { PostMsg(MSG.Lift, ModuleName.Aligner2); return true; });            OP.Subscribe($"{ModuleName.Cooling1}.{EfemOperation.Lift}", (cmd, args) => { PostMsg(MSG.Lift, ModuleName.Cooling1); return true; });            OP.Subscribe($"{ModuleName.Cooling2}.{EfemOperation.Lift}", (cmd, args) => { PostMsg(MSG.Lift, ModuleName.Cooling2); return true; });            DATA.Subscribe($"{Name}.FsmState",     () => ((STATE)fsm.State).ToString());            DATA.Subscribe($"{Name}.FsmPrevState", () => ((STATE)fsm.PrevState).ToString());            DATA.Subscribe($"{Name}.FsmLastMessage", GetFsmLastMessage);            DATA.Subscribe($"{Name}.SmallWafer", () => _smallWafer);            DATA.Subscribe($"{Name}.BigWafer", () => _bigWafer);            DATA.Subscribe($"{Name}.MidWafer", () => _midWafer);            DATA.Subscribe($"{Name}.HasPlacementError", () => _hasPlacementError);            return true;        }        private void InitFsmMap()        {            fsm = new StateMachine<EfemEntity>("EFEM", (int)STATE.Unknown, 50);            fsm.EnableRepeatedMsg(true);            AnyStateTransition(FSM_MSG.TIMER,                       fnMonitor,      FSM_STATE.SAME);            AnyStateTransition(MSG.RecHwMsg,                        fnRecMsg,       FSM_STATE.SAME);            //AnyStateTransition(MSG.LED,                           fnSetLED,       STATE.SettingLamp);            AnyStateTransition(MSG.TurnOffBuzzer,                   fnTurnOffBuzzer, FSM_STATE.SAME);            //AnyStateTransition(MSG.SwitchOnBuzzerAndRed,          fnSwitchOnBuzzerAndRed, FSM_STATE.SAME);            AnyStateTransition(MSG.Recover,                         fnRecover,      FSM_STATE.SAME);            AnyStateTransition(MSG.Error,                           fnError,        STATE.Error);            AnyStateTransition(MSG.Online,                          fnOnline,       FSM_STATE.SAME);            AnyStateTransition(MSG.Abort,                           fnAbortRobot,   STATE.Idle);            AnyStateTransition(MSG.ToInit,                          fnToInit,       STATE.Init);            EnterExitTransition<STATE, FSM_MSG>(STATE.Initializing, fnEnterExecute, FSM_MSG.NONE, fnExitExecute);            EnterExitTransition<STATE, FSM_MSG>(STATE.InitingRB,    fnEnterExecute, FSM_MSG.NONE, null);            EnterExitTransition<STATE, FSM_MSG>(STATE.InitingAL,    fnEnterExecute, FSM_MSG.NONE, null);            EnterExitTransition<STATE, FSM_MSG>(STATE.Picking,      fnEnterExecute, FSM_MSG.NONE, fnExitExecute);            EnterExitTransition<STATE, FSM_MSG>(STATE.Gotoing,      fnEnterExecute, FSM_MSG.NONE, fnExitExecute);            EnterExitTransition<STATE, FSM_MSG>(STATE.Placing,      fnEnterExecute, FSM_MSG.NONE, fnExitExecute);            EnterExitTransition<STATE, FSM_MSG>(STATE.Swapping,     fnEnterExecute, FSM_MSG.NONE, fnExitExecute);            EnterExitTransition<STATE, FSM_MSG>(STATE.Extending,    fnEnterExecute, FSM_MSG.NONE, fnExitExecute);            EnterExitTransition<STATE, FSM_MSG>(STATE.Retracting,   fnEnterExecute, FSM_MSG.NONE, fnExitExecute);            EnterExitTransition<STATE, FSM_MSG>(STATE.Lifting,      fnEnterExecute, FSM_MSG.NONE, null);            EnterExitTransition<STATE, FSM_MSG>(STATE.Aligning,     fnEnterExecute, FSM_MSG.NONE, null);            EnterExitTransition<STATE, FSM_MSG>(STATE.Mapping,      fnEnterExecute, FSM_MSG.NONE, fnExitExecute);            EnterExitTransition<STATE, FSM_MSG>(STATE.Gripping,     fnEnterExecute, FSM_MSG.NONE, null);            EnterExitTransition<STATE, FSM_MSG>(STATE.Ungripping,   fnEnterExecute, FSM_MSG.NONE, null);            EnterExitTransition<STATE, FSM_MSG>(STATE.Fliping,      fnEnterExecute, FSM_MSG.NONE, fnExitExecute);            EnterExitTransition<STATE, FSM_MSG>(STATE.EmsStoping,   fnEnterExecute, FSM_MSG.NONE, fnExitExecute);            EnterExitTransition<STATE, FSM_MSG>(STATE.SetSpeed,     fnEnterExecute, FSM_MSG.NONE, fnExitExecute);            EnterExitTransition<STATE, FSM_MSG>(STATE.Loading,      fnEnterExecute, FSM_MSG.NONE, fnExitExecute);            Transition(STATE.Unknown, MSG.CommReady,                null, STATE.Init);            // Home            Transition(STATE.Init,      MSG.HomeAll,                fnHomeAll,      STATE.Initializing);            Transition(STATE.Idle,      MSG.HomeAll,                fnHomeAll,      STATE.Initializing);    // 暂时加,出错的时候做 HOME            Transition(STATE.Error,     MSG.HomeAll,                fnHomeAll,      STATE.Initializing);            Transition(STATE.Initializing, MSG.ActionDone,          fnActionDone,   STATE.Orgshing);            Transition(STATE.Orgshing,  MSG.ActionDone,             fnActionDone,   STATE.Idle);            Transition(STATE.Idle,      MSG.HomeRB,                 fnHomeRobot,    STATE.InitingRB);            Transition(STATE.InitingRB, MSG.ActionDone,             null,           STATE.Idle);            //Transition(STATE.SettingLamp, MSG.ActionDone,         fnSetLampDone,  STATE.Idle);            // Pick            Transition(STATE.Idle,      MSG.Pick,                   fnPick,         STATE.Picking);            Transition(STATE.Picking,   MSG.ActionDone,             fnActionDone,   STATE.Idle);            Transition(STATE.Picking,   MSG.PMLiftPinUp,            fnPmPinUp,      STATE.Idle);            Transition(STATE.Picking,   MSG.PMLiftPinDown,          fnPmPinDown,    STATE.Idle);                        // Place            Transition(STATE.Idle,      MSG.Place,                  fnPlace,        STATE.Placing);            Transition(STATE.Placing,   MSG.ActionDone,             fnActionDone,   STATE.Idle);            Transition(STATE.Placing,   MSG.PMLiftPinUp,            fnPmPinUp,      STATE.Idle);            Transition(STATE.Placing,   MSG.PMLiftPinDown,          fnPmPinDown,    STATE.Idle);            // PickAndPlace            Transition(STATE.Idle,      MSG.PickAndPlace,           fnSwap,         STATE.Swapping);            Transition(STATE.Swapping,  MSG.ActionDone,             fnActionDone,   STATE.Idle);            Transition(STATE.Swapping,  MSG.PMLiftPinUp,            fnPmPinUp,      STATE.Idle);            Transition(STATE.Swapping,  MSG.PMLiftPinDown,          fnPmPinDown,    STATE.Idle);                        // Goto            Transition(STATE.Idle,      MSG.Goto,                   fnGoto,         STATE.Gotoing);            Transition(STATE.Gotoing,   MSG.ActionDone,             fnActionDone,   STATE.Idle);            // Extend            Transition(STATE.Idle,      MSG.Extend,                 fnExtend,       STATE.Extending);            Transition(STATE.Extending, MSG.ActionDone,             fnActionDone,   STATE.Idle);            // Retract            Transition(STATE.Idle,      MSG.Retract,                fnRetract,      STATE.Retracting);            Transition(STATE.Retracting, MSG.ActionDone,            fnActionDone,   STATE.Idle);            // Map            Transition(STATE.Idle,      MSG.Map,                    fnMap,          STATE.Mapping);            Transition(STATE.Mapping,   MSG.ActionDone,             fnActionDone,   STATE.Idle);            // Grip            Transition(STATE.Idle,      MSG.Grip,                   fnGrip,         STATE.Gripping);            Transition(STATE.Gripping,  MSG.ActionDone,             fnActionDone,   STATE.Idle);            // Ungrip            Transition(STATE.Idle,      MSG.Ungrip,                 fnUngrip,       STATE.Ungripping);            Transition(STATE.Ungripping, MSG.ActionDone,            fnActionDone,   STATE.Idle);            // Aligner            Transition(STATE.Idle,      MSG.HomeAL,                 fnHomeAligner,  STATE.InitingAL);            Transition(STATE.InitingAL, MSG.ActionDone,             fnActionDone,   STATE.Idle);            Transition(STATE.Idle,      MSG.Lift,                   fnLift,         STATE.Lifting);            Transition(STATE.Lifting,   MSG.LiftActionDone,         fnActionDone,   STATE.Idle);            Transition(STATE.Idle,      MSG.Align,                  fnAlign,        STATE.Aligning);            Transition(STATE.Aligning,  MSG.ActionDone,             fnActionDone,   STATE.Idle);            // Flip            Transition(STATE.Idle,      MSG.Flip,                   fnFlip,         STATE.Fliping);            Transition(STATE.Fliping,   MSG.ActionDone,             fnActionDone,   STATE.Idle);            // EmsStop            Transition(STATE.Idle,      MSG.EmsStop,                fnEmsStop,      STATE.EmsStoping);            Transition(STATE.EmsStoping,    MSG.ActionDone,         fnActionDone,   STATE.Idle);            // Set Robot Speed            Transition(STATE.Idle,      MSG.SetRobotSpeed,          fnSetRobotSpeed,    STATE.SetSpeed);            Transition(STATE.SetSpeed,  MSG.ActionDone,             fnActionDone,   STATE.Idle);            // Load Foup            Transition(STATE.Idle,      MSG.Load,                   fnLoadFoup,     STATE.Loading);            Transition(STATE.Loading,   MSG.ActionDone,             fnActionDone,   STATE.Idle);            EnumLoop<STATE>.ForEach((item) => { fsm.MapState((int)item, item.ToString()); });            EnumLoop<MSG>.ForEach((item) => { fsm.MapMessage((int)item, item.ToString()); });        }        private bool fnHomeAll(object[] param)        {            _efem.ClearActions();            _efem.HomeAll();            return true;        }        private bool fnHomeRobot(object[] param)        {            _efem.ClearActions();            _efem.Home(ModuleName.EfemRobot, (string)param[0]);            return true;        }        private bool fnHomeAligner(object[] param)        {            // module            ModuleName unit = ModuleName.EFEM;            if (param[0] is string s1)                unit = ModuleNameString.ToEnum(s1);            else if (param[0] is ModuleName mod)                unit = mod;            else                throw new ArgumentException("Argument error");            _efem.Home(unit, "");            return true;        }        private bool fnEnterExecute(object[] param)        {            if(!_efem.HasUncompleteActions)                _efem.ExecuteAction();            return false;        }        private bool fnExitExecute(object[] param)        {            if (!_efem.HasUncompleteActions)                _efem.ExecuteAction();            return false;        }        private bool fnActionDone(object[] param)        {            try            {                EfemOperation actionType = (EfemOperation)param[0];                if (((fsm.State == (int)STATE.Orgshing) && (actionType == EfemOperation.Orgsh || actionType == EfemOperation.Home)) ||                    (fsm.State == (int)STATE.Initializing && actionType == EfemOperation.ClearError) ||                    (fsm.State == (int)STATE.Extending) ||                    (fsm.State == (int)STATE.Picking) ||                    (fsm.State == (int)STATE.Placing) ||                    (fsm.State == (int)STATE.Swapping) ||                    (fsm.State == (int)STATE.Aligning) ||                    (fsm.State == (int)STATE.Fliping))                {                    if (_efem.HasActions || _efem.HasUncompleteActions)                    {                        if(!_efem.HasUncompleteActions)                        {                            _efem.ExecuteAction();                        }                        return false;                    }                }                return true;            }            catch (Exception ex)            {                EV.PostAlarmLog(ModuleName.EFEM.ToString(), ex.Message);                return true;            }        }        public bool CheckToPostMessage(int msg, params object[] args)        {            if (!fsm.FindTransition(fsm.State, msg))            {                EV.PostWarningLog(Name, $"{Name} is in {(STATE)fsm.State} state,can not do {(MSG)msg}");                return false;            }            Running = true;            fsm.PostMsg(msg, args);            return true;        }        private bool fnRecMsg(object[] param)        {            if (param == null) return false;            string strHwMsg = param[0] as string;            if (_efem is EfemBase device)            {                device.ReceiveMessage(strHwMsg);                return true;            }            return false;        }        private bool fnMonitor(object[] param)        {            STATE curSt = (STATE)fsm.State;            if (curSt == STATE.Initializing || curSt == STATE.Mapping || curSt == STATE.Picking || curSt == STATE.Placing                || curSt == STATE.Orgshing || curSt == STATE.Lifting || curSt == STATE.Extending || curSt == STATE.Retracting                || curSt == STATE.InitingAL || curSt == STATE.InitingRB)            {                int time = SC.GetValue<int>("EFEM.MotionTimeout");                if (fsm.ElapsedTime > time * 1000)                {                    EV.PostAlarmLog("EFEM", $"Can not complete motion {curSt} in {time} seconds. ");                    PostMsg(MSG.Error);                }            }            else if (curSt == STATE.Aligning)            {                int _timeout = SC.GetValue<int>("EFEM.AlignerTimeout");                if (fsm.ElapsedTime > _timeout * 1000)                {                    EV.PostAlarmLog(ModuleName.Aligner.ToString(), "Align timeout");                    PostMsg(MSG.Error);                }            }            else if (curSt == STATE.Idle)            {                if (_efem.HasActions && !_efem.HasUncompleteActions)                {                    _efem.ExecuteAction();                }            }            if (_efemType == EfemType.BrooksEFEM && (SC.GetValue<bool>("EFEM.LoadPort.EnableDockUndock") == false))            {                _efem.QueryLPState();            }            // update Loadport wafer placement parity error status            _hasPlacementError = _efem[ModuleName.LP1].HasPlacementError || _efem[ModuleName.LP2].HasPlacementError;            return true;        }         private bool fnOnline(object[] param)        {            bool bOnlineFlag = (bool)param[0];            if (_efem is EfemBase efem)            {                efem.SetOnline(bOnlineFlag);            }            return true;        }        private string GetFsmLastMessage()        {            int msg = fsm.LastMsg;            if (msg >= (int)MSG.HomeAll && msg <= (int)MSG.Error)                return ((MSG)msg).ToString();            if (msg == (int)FSM_MSG.TIMER)                return "Timer";            return msg.ToString();        }        private bool fnError(object[] param)        {            return true;        }        private bool fnToInit(object[] param)        {            return true;        }        private bool fnRecover(object[] param)        {            _efem.ClearActions();            _efem.ClearError();            //_efem.ExecuteAction();            return true;        }        private bool fnAbortRobot(object[] param)        {            _efem.ClearActions();            _efem.AbortRobot();            //_efem.ExecuteAction();            return true;        }        private bool fnSetLED(object[] param)        {            LightType light = (LightType)param[0];            LightStatus st = (LightStatus)param[1];            _efem.SetLamp(light, st);            return true;        }        private bool fnTurnOffBuzzer(object[] param)        {            _efem.TurnOffBuzzer();            return false;        }        //private bool fnSwitchOnBuzzerAndRed(object[] param)        //{        //    _efem.SwitchOnBuzzerAndRed();        //    return false;        //}        //        private bool fnSetLampDone(object[] param)        {            if (_efem.HasActions && !_efem.HasUncompleteActions)            {                _efem.ExecuteAction();                return false;            }            else            {                return true;            }        }        private bool fnPick(object[] param)        {            // module            ModuleName unit = ModuleName.EFEM;            if (param[0] is string s1)                unit = ModuleNameString.ToEnum(s1);            else if (param[0] is ModuleName mod)                unit = mod;            else                throw new ArgumentException("Argument error");            // slot            byte slot = (byte)(int)param[1];            // hand            Hand arm = (Hand)Enum.Parse(typeof(Hand),  param[2].ToString());            // wafer size            WaferSize ws1 = WaferSize.WS0;            if (param[3] is string s2)            {                if (Enum.TryParse(s2, out WaferSize p5))                    ws1 = p5;            }            else if (param[3] is WaferSize p6)            {                ws1 = p6;            }            MoveParam mp = new MoveParam(unit, slot, ModuleName.EfemRobot, (byte)arm, arm, ws1);            if (!_efem.Pick(mp))                return false;            return true;        }        private bool fnPlace(object[] param)        {            // module            ModuleName unit = ModuleName.EFEM;            if (param[0] is string s1)                unit = ModuleNameString.ToEnum(s1);            else if (param[0] is ModuleName mod)                unit = mod;            else                throw new ArgumentException("Argument error");            // slot            byte slot = (byte)(int)param[1];            // hand            Hand arm = (Hand)Enum.Parse(typeof(Hand), param[2].ToString());            // wafer size            WaferSize ws1 = WaferSize.WS0;            if (param[3] is string s2)            {                if (Enum.TryParse(s2, out WaferSize p5))                    ws1 = p5;            }            else if (param[3] is WaferSize p6)            {                ws1 = p6;            }            MoveParam mp = new MoveParam(ModuleName.EfemRobot, (byte)arm, unit, slot, arm, ws1);            if (!_efem.Place(mp))                return false;		               return true;        }        private bool fnGoto(object[] param)        {            // module            ModuleName unit = ModuleName.EFEM;            if (param[0] is string s1)                unit = ModuleNameString.ToEnum(s1);            else if (param[0] is ModuleName mod)                unit = mod;            else                throw new ArgumentException("Argument error");            // slot            byte slot = (byte)(int)param[1];            Hand arm = Hand.Blade1;            WaferSize ws = WaferSize.WS6;            if (WaferManager.Instance.CheckHasWafer(ModuleName.EfemRobot, 0))            {                arm = Hand.Blade1;                ws = WaferManager.Instance.GetWafer(ModuleName.EfemRobot, 0).Size;            }            else if (WaferManager.Instance.CheckHasWafer(ModuleName.EfemRobot, 1))            {                arm = Hand.Blade2;                ws = WaferManager.Instance.GetWafer(ModuleName.EfemRobot, 1).Size;            }            MoveParam mp = new MoveParam(unit, slot, unit, slot, arm, ws);            _efem.Goto(mp);            return true;        }        private bool fnSwap(object[] param)        {            // module            ModuleName unit = ModuleName.EFEM;            if (param[0] is string s1)                unit = ModuleNameString.ToEnum(s1);            else if (param[0] is ModuleName mod)                unit = mod;            else                throw new ArgumentException("Argument error");            // pickSlot            byte pickSlot = (byte)(int)param[1];            // pick hand            Hand pickArm = (Hand)Enum.Parse(typeof(Hand), param[2].ToString());            // wafer size            WaferSize ws1 = WaferSize.WS0;            if (param[5] is string s2)            {                if (Enum.TryParse(s2, out WaferSize p5))                    ws1 = p5;            }            else if (param[5] is WaferSize p6)            {                ws1 = p6;            }            MoveParam pickParam = new MoveParam(unit, pickSlot, ModuleName.EfemRobot, (byte)pickArm, pickArm, ws1);            // place slot            byte placeSlot = (byte)(int)param[4];            // hand            Hand placeArm = (Hand)Enum.Parse(typeof(Hand), param[3].ToString());             MoveParam placeParam = new MoveParam(ModuleName.EfemRobot, (byte)placeArm, unit, placeSlot, placeArm, ws1);            _efem.PickAndPlace(pickParam, placeParam);            return true;        }        private bool fnExtend(object[] param)        {            // module            ModuleName unit = ModuleName.EFEM;            if (param[0] is string s1)                unit = ModuleNameString.ToEnum(s1);            else if (param[0] is ModuleName mod)                unit = mod;            else                throw new ArgumentException("Argument error");            Hand arm = (Hand)Enum.Parse(typeof(Hand), (string)param[2]);            ExtendParam mp = new ExtendParam            {                Module = unit,                Arm = arm,                Pos = (ExtendPos)Enum.Parse(typeof(ExtendPos), param[1] as string)            };            if (!_efem.Extend(mp))                return false;            return true;        }        private bool fnRetract(object[] param)        {            // module            ModuleName unit = ModuleName.EFEM;            if (param[0] is string s1)                unit = ModuleNameString.ToEnum(s1);            else if (param[0] is ModuleName mod)                unit = mod;            else                throw new ArgumentException("Argument error");            Hand arm = (Hand)Enum.Parse(typeof(Hand), (string)param[2]);            ExtendParam mp = new ExtendParam            {                Module = unit,                Arm = arm,                Pos = (ExtendPos)Enum.Parse(typeof(ExtendPos), param[1] as string)            };            if (!_efem.Retract(mp))                return false;            return true;        }        private bool fnPmPinUp(object[] param)        {            _efem.UpdateStatus((ushort)param[0], ActionStatus.Completed);            if (_efem.HasActions && !_efem.HasUncompleteActions)            {                _efem.ExecuteAction();                return false;            }            else            {                return true;            }        }        private bool fnPmPinDown(object[] param)        {            _efem.UpdateStatus((ushort)param[0], ActionStatus.Completed);            if (_efem.HasActions && !_efem.HasUncompleteActions)            {                _efem.ExecuteAction();                return false;            }            else            {                return true;            }        }        private bool fnLift(object[] param)        {            // module            ModuleName unit = ModuleName.EFEM;            if (param[0] is string s1)                unit = ModuleNameString.ToEnum(s1);            else if (param[0] is ModuleName mod)                unit = mod;            else                throw new ArgumentException("Argument error");            bool isUp = true;            if (param.Length > 1)            {                isUp = (bool) param[1];            }            if (isUp)            {                if (!_efem.SetPinUp(unit))                    return false;            }            else            {                if (!_efem.SetPinDown(unit))                    return false;            }            return true;        }        private bool fnAlign(object[] param)        {            // module            ModuleName unit = ModuleName.EFEM;            if (param[0] is string s1)                unit = ModuleNameString.ToEnum(s1);            else if (param[0] is ModuleName mod)                unit = mod;            else                throw new ArgumentException("Argument error");            // wafer size            WaferSize ws1 = WaferSize.WS0;            if (param[1] is string s2)            {                if (Enum.TryParse(s2, out WaferSize p5))                    ws1 = p5;            }            else if (param[1] is WaferSize p6)            {                ws1 = p6;            }            if (!_efem.Align(unit, 1000, ws1))                return false;            return true;        }        private bool fnMap(object[] param)        {            // module            ModuleName unit = ModuleName.EFEM;            if (param[0] is string s1)                unit = ModuleNameString.ToEnum(s1);            else if (param[0] is ModuleName mod)                unit = mod;            else                throw new ArgumentException("Argument error");            if (!_efem.Map(unit))                return false;            return true;        }        private bool fnGrip(object[] param)        {            Hand arm = (Hand)Enum.Parse(typeof(Hand), (string)param[0]);            if (!_efem.Grip(arm, true))                return false;            return true;        }        private bool fnUngrip(object[] param)        {             Hand arm = (Hand)Enum.Parse(typeof(Hand), (string)param[0]);            if (!_efem.Grip(arm, false))                return false;            return true;        }        private bool fnFlip(object[] param)        {            string orient = (string)param[0];            if (!_efem.Flip(orient))                return false;            return true;        }        private bool fnEmsStop(object[] param)        {            if (!_efem.EmsStop())                return false;            return true;        }        private bool fnSetRobotSpeed(object[] param)        {            string speed = (string)param[0];            if (!_efem.SetSpeed(speed))                return false;            return true;        }        private bool fnLoadFoup(object[] param)        {            ModuleName lp = ModuleHelper.Converter((string)param[0]);            if (!_efem.Load(lp))                return false;            return true;        }        public bool IsIdle        {            get { return fsm.State == (int)STATE.Idle; }        }        public bool IsError        {            get { return fsm.State == (int)STATE.Error; }        }        public bool IsInit        {            get { return fsm.State == (int)STATE.Unknown || fsm.State==(int)STATE.Init; }        }        public bool IsBusy        {            get { return !IsInit && !IsError && !IsIdle; }        }        public bool IsOnline { get; internal set; }        public int Invoke(string function, params object[] args)        {            switch (function)            {            case "Home":                CheckToPostMessage((int)MSG.HomeAll);                return (int)MSG.HomeAll;            }            return (int)FSM_MSG.NONE;        }        public bool CheckAcked(int msg)        {            return fsm.CheckExecuted(msg);        }        internal void InvokeReset()        {            if (_EnableResetEFEMError && fsm.State == (int) STATE.Error)            {                PostMsg((int)MSG.Recover);            }        }        public int InvokeAlign(string module, float time)        {                        if (CheckToPostMessage((int)MSG.Align, module, time))                return (int)MSG.Align;            return (int)FSM_MSG.NONE;        }        public int InvokeLiftDown(string module)        {            if (CheckToPostMessage((int)MSG.Lift, module, false))                return (int)MSG.Lift;            return (int)FSM_MSG.NONE;        }        public int InvokePick(ModuleName source, int slot, Hand hand, WaferSize size)        {            if (CheckToPostMessage((int)MSG.Pick, source, slot, hand, size))                return (int)MSG.Pick;            return (int)FSM_MSG.NONE;        }        public int InvokeGoto(ModuleName source, int slot)        {            if (CheckToPostMessage((int)MSG.Goto, source, slot))                return (int)MSG.Goto;            return (int)FSM_MSG.NONE;        }        public int InvokePlace(ModuleName target, int slot, Hand hand, WaferSize size)        {            if (CheckToPostMessage((int)MSG.Place, target, slot, hand, size))                return (int)MSG.Place;            return (int)FSM_MSG.NONE;        }        public int InvokePickAndPlace(ModuleName targetModule, Hand pickHand, int pickSlot,  Hand placeHand, int placeSlot, WaferSize size)        {            if (CheckToPostMessage((int)MSG.PickAndPlace, targetModule, pickSlot, pickHand, placeHand, placeSlot, size))                return (int)MSG.PickAndPlace;            return (int)FSM_MSG.NONE;        }        public int InvokeMap(string target )        {            if (CheckToPostMessage((int)MSG.Map, target ))                return (int)MSG.Map;            return (int)FSM_MSG.NONE;        }        public int InvokeFlip(string orient)        {            if (CheckToPostMessage((int)MSG.Flip, orient))                return (int)MSG.Flip;            return (int)FSM_MSG.NONE;        }        public bool IsPrepareTransferReady(ModuleName module, EnumTransferType type, int slot)        {            if (type == EnumTransferType.Pick)            {                //需要补充:判断LP 放好了,而且已经map过。                return _efem[module].HasCassette && _efem[module].IsMapped;            }            else if (type == EnumTransferType.Place)            {                //需要补充:判断LP 放好了,而且已经map过。                return _efem[module].HasCassette && _efem[module].IsMapped;            }            return false;        }        internal bool CheckReadyRunNewJob(ModuleName module)        {            //???            return true;        }        internal bool CheckReadyTransfer(ModuleName module)        {            return _efem[module].HasCassette && _efem[module].IsMapped;        }        internal bool CheckPlaced(ModuleName module)        {            return _efem[module].HasCassette;        }		        internal void NoteJobStart(ModuleName module)        {            _efem[module].NoteJobStart();        }        internal void NoteJobComplete(ModuleName module)        {            _efem[module].NoteJobComplete();        }        internal string GetCarrierID(ModuleName module)        {            return _efem[module].CarrierId;        }    }    /// <summary>    /// LP entity    /// </summary>    class LoadportEntity : Entity, IEntity    {        private enum STATE        {            Unknown,            Idle,            // 1            Initializing,    // 2            Initialized,     // 3            Mapping,         // 4            Mapped,          // 5        }        public enum MSG        {            Home,            // 0            Map,             // 1            ActionDone,      // 2            RecHwMsg,        // 3            Recover,         // 4            Abort,           // 5            Online,          // 6            Error            // 7        }        private readonly Efem _efem;        private ModuleName Module { get; }        public LoadportEntity(ModuleName mod, Efem efem)        {            this.Module = mod;            _efem = efem;            InitFsmMap();            OP.Subscribe($"{Module}.Home",   (cmd, args) => { PostMsg(MSG.Home); return true; });            OP.Subscribe($"{Module}.Abort",  (cmd, args) => { PostMsg(MSG.Abort); return true; });            //OP.Subscribe($"{Module}.Map",    (cmd, args) => { PostMsg(MSG.Map); return true; });            OP.Subscribe($"{Module}.Online", (cmd, args) => { PostMsg(MSG.Online); return true; });            DATA.Subscribe($"{Module}.Status",       () => ((STATE)fsm.State).ToString());            DATA.Subscribe($"{Module}.FsmState",     () => ((STATE)fsm.State).ToString());            DATA.Subscribe($"{Module}.FsmPrevState", () => ((STATE)fsm.PrevState).ToString());            DATA.Subscribe($"{Module}.FsmLastMessage", GetFsmLastMessage);        }        private string GetFsmLastMessage()        {            int msg = fsm.LastMsg;            if (msg >= (int)MSG.Home && msg <= (int)MSG.Error)                return ((MSG)msg).ToString();            if (msg == (int)FSM_MSG.TIMER)                return "Timer";            return msg.ToString();        }        private void InitFsmMap()        {            fsm = new StateMachine<LoadportEntity>($"LPM_{Module}", (int)STATE.Idle, 500);            AnyStateTransition(FSM_MSG.TIMER,                         fnMonitor, FSM_STATE.SAME);            //AnyStateTransition(MSG.RecHwMsg,                        fnRecMsg, FSM_STATE.SAME);            AnyStateTransition(MSG.Online,                            fnOnline, FSM_STATE.SAME);            AnyStateTransition(MSG.Recover,                           fnRecover, STATE.Idle);            AnyStateTransition(MSG.Abort,                             fnRecover, STATE.Idle);            EnterExitTransition<STATE, FSM_MSG>(STATE.Initializing,   fnEnterExecute, FSM_MSG.NONE, fnExitExecute);            // Home            AnyStateTransition(MSG.Home,                              fnHome, STATE.Initializing);            Transition(STATE.Initializing, MSG.ActionDone,            fnActionDone, STATE.Idle);        }        private bool fnOnline(object[] param)        {            bool online = (bool)param[0];            _efem.SetOnline(Module, online);            return true;        }        private bool fnRecover(object[] param)        {            return true;        }        private bool fnMonitor(object[] param)        {            STATE curSt = (STATE)fsm.State;            if (curSt == STATE.Initializing || curSt == STATE.Mapping)            {                if (fsm.ElapsedTime > 20 * 1000)                {                    PostMsg(MSG.Recover);                }            }            return true;        }        private bool fnEnterExecute(object[] param)        {            _efem.ExecuteAction();            return true;        }        private bool fnExitExecute(object[] param)        {            return true;        }        private bool fnActionDone(object[] param)        {            return true;        }        private bool fnHome(object[] param)        {            _efem.Home(Module, ModuleName.EFEM.ToString());            return true;        }        public bool Check(int msg, out string reason, params object[] args)        {            throw new NotImplementedException();        }    }}
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