ManualTransfer.cs 16 KB

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  1. using System.Collections.Generic;
  2. using Aitex.Core.Common;
  3. using Aitex.Core.RT.Routine;
  4. using Aitex.Core.Util;
  5. using Aitex.Core.RT.Event;
  6. using MECF.Framework.Common.Equipment;
  7. using VirgoRT.Scheduler;
  8. using Aitex.Sorter.Common;
  9. using MECF.Framework.Common.Schedulers;
  10. using MECF.Framework.Common.SubstrateTrackings;
  11. using VirgoRT.Modules.PMs;
  12. using VirgoRT.Modules.Schedulers;
  13. using Aitex.Core.RT.SCCore;
  14. namespace VirgoRT.Modules
  15. {
  16. internal interface IManualTransferRoutine : IRoutine
  17. {
  18. }
  19. public class MoveItemEx : MoveItem
  20. {
  21. public int CoolingTime { get; set; }
  22. public MoveItemEx(ModuleName sourceModule, int sourceSlot, ModuleName destinationModule, int destinationSlot, int coolingTime, Hand blade)
  23. : base(sourceModule, sourceSlot, destinationModule, destinationSlot, blade)
  24. {
  25. CoolingTime = coolingTime;
  26. }
  27. }
  28. public class ManualTransfer : TransferModule
  29. {
  30. private Queue<IRoutine> _moveTaskQueue = new Queue<IRoutine>();
  31. private IRoutine _activeTask;
  32. public Result Start(object[] objs)
  33. {
  34. _moveTaskQueue.Clear();
  35. ModuleName source = (ModuleName)objs[0];
  36. int ss = (int)objs[1];
  37. ModuleName target = (ModuleName)objs[2];
  38. int ds = (int)objs[3];
  39. bool autoAlign = (bool)objs[4];
  40. int alignAngle = (int)objs[5];
  41. bool autoCooling = (bool)objs[6];
  42. int coolingTime = (int)objs[7];
  43. if (!WaferManager.Instance.CheckWafer(source, ss, WaferStatus.Normal))
  44. {
  45. EV.PostWarningLog("System", $"source {source} slot {ss+1} no normal wafer");
  46. return Result.FAIL;
  47. }
  48. if (!WaferManager.Instance.CheckNoWafer(target, ds))
  49. {
  50. EV.PostWarningLog("System", "destination has wafer");
  51. return Result.FAIL;
  52. }
  53. if (source!=ModuleName.EfemRobot && WaferManager.Instance.CheckHasWafer(ModuleName.EfemRobot, 0) && WaferManager.Instance.CheckHasWafer(ModuleName.EfemRobot, 1))
  54. {
  55. EV.PostWarningLog("System", "robot has wafer");
  56. return Result.FAIL;
  57. }
  58. Hand blade = (WaferManager.Instance.CheckNoWafer(ModuleName.EfemRobot, 0) && SC.GetValue<bool>("EFEM.EfemRobot.LowerBladeEnable")) ? Hand.Blade1 : Hand.Blade2;
  59. if (source == ModuleName.EfemRobot)
  60. blade = ss == 0 ? Hand.Blade1 : Hand.Blade2;
  61. else if (target == ModuleName.EfemRobot)
  62. blade = ds == 0 ? Hand.Blade1 : Hand.Blade2;
  63. if (blade == Hand.Blade1 && !SC.GetValue<bool>("EFEM.EfemRobot.LowerBladeEnable"))
  64. {
  65. EV.PostAlarmLog("System", $"Lower Blade disable");
  66. return Result.FAIL;
  67. }
  68. if (blade == Hand.Blade2 && !SC.GetValue<bool>("EFEM.EfemRobot.UpperBladeEnable"))
  69. {
  70. EV.PostAlarmLog("System", $"Upper Blade disable");
  71. return Result.FAIL;
  72. }
  73. if (autoAlign && !ModuleHelper.IsAligner(source) && !ModuleHelper.IsAligner(target) )
  74. {
  75. if (WaferManager.Instance.CheckHasWafer(ModuleName.Aligner1, 0) && WaferManager.Instance.CheckHasWafer(ModuleName.Aligner2, 0))
  76. {
  77. EV.PostWarningLog("System", "Can not transfer, aligner has wafer, can not auto align");
  78. return Result.FAIL;
  79. }
  80. ModuleName aligner = WaferManager.Instance.CheckHasWafer(ModuleName.Aligner1, 0)
  81. ? ModuleName.Aligner2
  82. : ModuleName.Aligner1;
  83. _moveTaskQueue.Enqueue(new EfemRobotMover(new MoveItemEx(source, ss, aligner, 0, 1, blade)));
  84. _moveTaskQueue.Enqueue(new AlignRoutine(aligner.ToString()));
  85. _moveTaskQueue.Enqueue(new EfemRobotMover(new MoveItemEx(aligner, 0, target, ds, 0, blade)));
  86. }
  87. else if(autoCooling && !ModuleHelper.IsCooling(source) && !ModuleHelper.IsCooling(target))
  88. {
  89. if (WaferManager.Instance.CheckHasWafer(ModuleName.Cooling1, 0) && WaferManager.Instance.CheckHasWafer(ModuleName.Cooling2, 0))
  90. {
  91. EV.PostWarningLog("System", "Can not transfer, cooling has wafer, can not auto cooling");
  92. return Result.FAIL;
  93. }
  94. ModuleName cooling = WaferManager.Instance.CheckHasWafer(ModuleName.Cooling1, 0)
  95. ? ModuleName.Cooling2
  96. : ModuleName.Cooling1;
  97. _moveTaskQueue.Enqueue(new EfemRobotMover(new MoveItemEx(source, ss, cooling, 0, coolingTime, blade)));
  98. if (ModuleHelper.IsInstalled(ModuleName.Cooling1) || ModuleHelper.IsInstalled(ModuleName.Cooling2))
  99. _moveTaskQueue.Enqueue(new CoolingRoutine(cooling.ToString(), coolingTime));
  100. _moveTaskQueue.Enqueue(new EfemRobotMover(new MoveItemEx(cooling, 0, target, ds, 0, blade)));
  101. }
  102. else
  103. {
  104. _moveTaskQueue.Enqueue(new EfemRobotMover(new MoveItemEx(source, ss, target, ds, coolingTime, blade)));
  105. if (ModuleHelper.IsAligner(target) || ModuleHelper.IsCooling(target))
  106. {
  107. _moveTaskQueue.Enqueue(new AlignRoutine(target.ToString()));
  108. }
  109. }
  110. _activeTask = _moveTaskQueue.Dequeue();
  111. return _activeTask.Start();
  112. }
  113. public Result Monitor(object[] objs)
  114. {
  115. System.Diagnostics.Debug.Assert(_activeTask != null, "mover should not be null, call start first");
  116. Result ret = _activeTask.Monitor();
  117. if (ret == Result.FAIL)
  118. return ret;
  119. if (ret == Result.DONE)
  120. {
  121. if (_moveTaskQueue.Count > 0)
  122. {
  123. _activeTask = _moveTaskQueue.Dequeue();
  124. return _activeTask.Start();
  125. }
  126. return Result.DONE;
  127. }
  128. return Result.RUN;
  129. }
  130. public void Clear()
  131. {
  132. _moveTaskQueue.Clear();
  133. _activeTask = null;
  134. }
  135. }
  136. public class EfemRobotMover : TransferModule, IRoutine
  137. {
  138. private MoveItemEx _moveTask;
  139. private SchedulerModule _source;
  140. private SchedulerModule _destination;
  141. public EfemRobotMover(MoveItemEx moveTask)
  142. {
  143. _moveTask = moveTask;
  144. }
  145. public Result Start()
  146. {
  147. _source = GetModule(_moveTask.SourceModule.ToString());
  148. _destination = GetModule(_moveTask.DestinationModule.ToString());
  149. System.Diagnostics.Debug.Assert(_source != null, $"{_moveTask.SourceModule} not valid");
  150. System.Diagnostics.Debug.Assert(_destination != null, $"{_moveTask.DestinationModule} not valid");
  151. if(!WaferManager.Instance.CheckHasWafer(_moveTask.SourceModule, _moveTask.SourceSlot))
  152. {
  153. EV.PostWarningLog("System", $"Failed transfer, source {_moveTask.SourceModule} slot {_moveTask.SourceSlot + 1} has not wafer");
  154. return Result.FAIL;
  155. }
  156. if (WaferManager.Instance.CheckHasWafer(_moveTask.DestinationModule, _moveTask.DestinationSlot))
  157. {
  158. EV.PostWarningLog("System", $"Failed transfer, destination {_moveTask.DestinationModule} slot {_moveTask.DestinationSlot + 1} has wafer");
  159. return Result.FAIL;
  160. }
  161. if (!_source.IsAvailable)
  162. {
  163. EV.PostWarningLog("System", $"Failed transfer, source {_moveTask.SourceModule} not ready");
  164. return Result.FAIL;
  165. }
  166. if (ModuleHelper.IsLoadPort(_source.Module))
  167. {
  168. if (!(_source as SchedulerLoadPort).CheckReadyTransfer())
  169. {
  170. EV.PostWarningLog("System", $"Failed transfer, source {_moveTask.SourceModule} not ready");
  171. return Result.FAIL;
  172. }
  173. }
  174. if (!_destination.IsAvailable)
  175. {
  176. EV.PostWarningLog("System", $"Failed transfer, Destination {_moveTask.DestinationModule} not ready");
  177. return Result.FAIL;
  178. }
  179. if (ModuleHelper.IsLoadPort(_destination.Module))
  180. {
  181. if (!(_destination as SchedulerLoadPort).CheckReadyTransfer())
  182. {
  183. EV.PostWarningLog("System", $"Failed transfer, source {_moveTask.DestinationModule} not ready");
  184. return Result.FAIL;
  185. }
  186. }
  187. if (!_efemRobot.IsAvailable)
  188. {
  189. EV.PostWarningLog("System", $"Failed transfer, EFEM Robot not ready");
  190. return Result.FAIL;
  191. }
  192. if ((Singleton<RouteManager>.Instance.EFEM.EFEMType != EfemEntity.EfemType.BeamSUNWAY && ModuleHelper.IsAligner(_source.Module)) || ModuleHelper.IsCooling(_source.Module))
  193. _source.Cooling(_moveTask.CoolingTime);
  194. if ((Singleton<RouteManager>.Instance.EFEM.EFEMType != EfemEntity.EfemType.BeamSUNWAY && ModuleHelper.IsAligner(_destination.Module)) || ModuleHelper.IsCooling(_destination.Module))
  195. _destination.Cooling(_moveTask.CoolingTime);
  196. if (_moveTask.SourceModule == ModuleName.EfemRobot)
  197. {
  198. _moveTask.RobotHand = (Hand)_moveTask.SourceSlot;
  199. }else if (_moveTask.DestinationModule == ModuleName.EfemRobot)
  200. {
  201. _moveTask.RobotHand = (Hand)_moveTask.DestinationSlot;
  202. }
  203. return Result.RUN;
  204. }
  205. public Result Start(params object[] objs)
  206. {
  207. return this.Start();
  208. }
  209. public Result Monitor()
  210. {
  211. if (_source.IsError || _destination.IsError || _efemRobot.IsError)
  212. return Result.FAIL;
  213. if (!WaferManager.Instance.CheckHasWafer(_moveTask.SourceModule, _moveTask.SourceSlot) &&
  214. WaferManager.Instance.CheckHasWafer(_moveTask.DestinationModule, _moveTask.DestinationSlot) &&
  215. _efemRobot.IsAvailable)
  216. {
  217. if (_source.IsWaitTransfer(ModuleName.EfemRobot))
  218. {
  219. _source.PostTransfer(ModuleName.EfemRobot, EnumTransferType.Pick, 0);
  220. //_source.StopWaitTransfer(ModuleName.EfemRobot);
  221. }
  222. if (_destination.IsWaitTransfer(ModuleName.EfemRobot))
  223. {
  224. _destination.PostTransfer(ModuleName.EfemRobot, EnumTransferType.Place, 0);
  225. //_destination.StopWaitTransfer(ModuleName.EfemRobot);
  226. }
  227. if (_source.IsAvailable && _destination.IsAvailable)
  228. return Result.DONE;
  229. return Result.RUN;
  230. }
  231. if (!_efemRobot.IsAvailable)
  232. return Result.RUN;
  233. //pick
  234. if (_moveTask.SourceModule != ModuleName.EfemRobot)
  235. {
  236. if (WaferManager.Instance.CheckHasWafer(_moveTask.SourceModule, _moveTask.SourceSlot))
  237. {
  238. if (!_source.IsAvailable)
  239. return Result.RUN;
  240. if (!_source.IsReadyForPick(ModuleName.EfemRobot, _moveTask.SourceSlot, _moveTask.RobotHand))
  241. {
  242. if (!_source.PrepareTransfer(ModuleName.EfemRobot, EnumTransferType.Pick, _moveTask.SourceSlot))
  243. return Result.FAIL;
  244. }
  245. if (!_source.IsAvailable)
  246. return Result.RUN;
  247. if (!WaferManager.Instance.CheckHasWafer(ModuleName.EfemRobot, (int)_moveTask.RobotHand))
  248. {
  249. if (!_efemRobot.Pick(_moveTask.SourceModule, _moveTask.SourceSlot, _moveTask.RobotHand))
  250. {
  251. return Result.FAIL;
  252. }
  253. _source.WaitTransfer(ModuleName.EfemRobot, EnumTransferType.Pick, 0);
  254. }
  255. if (!_efemRobot.IsAvailable)
  256. return Result.RUN;
  257. }
  258. else
  259. {
  260. if (!_efemRobot.IsAvailable)
  261. return Result.RUN;
  262. if (_source.IsWaitTransfer(ModuleName.EfemRobot))
  263. {
  264. _source.PostTransfer(ModuleName.EfemRobot, EnumTransferType.Pick, 0);
  265. }
  266. }
  267. }
  268. //place
  269. if (_moveTask.DestinationModule != ModuleName.EfemRobot)
  270. {
  271. if (!_destination.IsAvailable)
  272. return Result.RUN;
  273. if (!WaferManager.Instance.CheckHasWafer(_moveTask.DestinationModule, _moveTask.DestinationSlot))
  274. {
  275. if (!_destination.IsReadyForPlace(ModuleName.EfemRobot, _moveTask.DestinationSlot, _moveTask.RobotHand))
  276. {
  277. if (!_destination.PrepareTransfer(ModuleName.EfemRobot, EnumTransferType.Place,
  278. _moveTask.DestinationSlot))
  279. return Result.FAIL;
  280. }
  281. if (!_destination.IsAvailable)
  282. return Result.RUN;
  283. if (WaferManager.Instance.CheckHasWafer(ModuleName.EfemRobot, (int)_moveTask.RobotHand))
  284. {
  285. if (!_efemRobot.Place(_moveTask.DestinationModule, _moveTask.DestinationSlot, _moveTask.RobotHand))
  286. return Result.FAIL;
  287. _destination.WaitTransfer(ModuleName.EfemRobot, EnumTransferType.Place, 0);
  288. }
  289. if (!_efemRobot.IsAvailable)
  290. return Result.RUN;
  291. }
  292. else
  293. {
  294. if (!_efemRobot.IsAvailable)
  295. return Result.RUN;
  296. if (_destination.IsWaitTransfer(ModuleName.EfemRobot))
  297. {
  298. _destination.PostTransfer(ModuleName.EfemRobot, EnumTransferType.Place, 0);
  299. //_destination.StopWaitTransfer(ModuleName.EfemRobot);
  300. }
  301. }
  302. }
  303. return Result.RUN;
  304. }
  305. public void Abort()
  306. {
  307. Clear();
  308. }
  309. public void Clear()
  310. {
  311. _efemRobot.ResetTask();
  312. _source?.ResetTask();
  313. _destination?.ResetTask();
  314. }
  315. }
  316. public class AlignRoutine : TransferModule, IRoutine
  317. {
  318. private SchedulerAligner _aligner;
  319. public AlignRoutine(string module)
  320. {
  321. _aligner = GetModule(module) as SchedulerAligner;
  322. }
  323. public Result Start(params object[] objs)
  324. {
  325. _aligner.Align(0);
  326. return Result.RUN;
  327. }
  328. public Result Monitor()
  329. {
  330. if (_aligner.IsAvailable)
  331. return Result.DONE;
  332. return Result.RUN;
  333. }
  334. public void Abort()
  335. {
  336. }
  337. }
  338. public class CoolingRoutine : TransferModule, IRoutine
  339. {
  340. private SchedulerAligner _cooling;
  341. private int _coolingTimeS;
  342. public CoolingRoutine(string module, int coolingTimeS)
  343. {
  344. _cooling = GetModule(module) as SchedulerAligner;
  345. _coolingTimeS = coolingTimeS;
  346. }
  347. public Result Start(params object[] objs)
  348. {
  349. _cooling.Cooling(_coolingTimeS);
  350. return Result.RUN;
  351. }
  352. public Result Monitor()
  353. {
  354. if (_cooling.IsAvailable)
  355. return Result.DONE;
  356. return Result.RUN;
  357. }
  358. public void Abort()
  359. {
  360. }
  361. }
  362. public class FlipRoutine : TransferModule, IRoutine
  363. {
  364. private SchedulerFlipper _fliper;
  365. private string _orient;
  366. public FlipRoutine(string module, string orient)
  367. {
  368. _fliper = GetModule(module) as SchedulerFlipper;
  369. _orient = orient;
  370. }
  371. public Result Start(params object[] objs)
  372. {
  373. _fliper.Flip(_orient);
  374. return Result.RUN;
  375. }
  376. public Result Monitor()
  377. {
  378. if (_fliper.IsAvailable)
  379. return Result.DONE;
  380. return Result.RUN;
  381. }
  382. public void Abort()
  383. {
  384. }
  385. }
  386. }