Virgo_Mask/VirgoRT/Config/DeviceModelVirgo_R.xml

<?xml version="1.0" encoding="utf-16"?>
<DeviceModelDefine type="Virgo" xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" xsi:noNamespaceSchemaLocation="DeviceModel_R.xsd">
  <IoValves>
    <IoValve id="ValveMfc1" display="MFC1 Valve" schematicId="SV1" unit="" isNc="true"
             isDefaultOpen="false" diOpen="" doOpen="DO_MFC1_Valve" diCloseSensor="" diOpenSensor="" />
    <IoValve id="ValveMfc2" display="MFC2 Valve" schematicId="SV2" unit="" isNc="true"
             isDefaultOpen="false" diOpen="" doOpen="DO_MFC2_Valve" diCloseSensor="" diOpenSensor="" />
    <IoValve id="ValveMfc3" display="MFC3 Valve" schematicId="SV3" unit="" isNc="true"
             isDefaultOpen="false" diOpen="" doOpen="DO_MFC3_Valve" diCloseSensor="" diOpenSensor="" />
    <IoValve id="ValveMfc4" display="MFC4 Valve" schematicId="SV13" unit="" isNc="true"
             isDefaultOpen="false" diOpen="" doOpen="DO_MFC4_Valve" diCloseSensor="" diOpenSensor="" />
    <IoValve id="ValveMfc5" display="MFC5 Valve" schematicId="SV14" unit="" isNc="true"
             isDefaultOpen="false" diOpen="" doOpen="DO_MFC5_Valve" diCloseSensor="" diOpenSensor="" />

    <IoValve id="ValveChamberPurge" display="Purge valve" schematicId="SV6"
             unit="" isNc="true" isDefaultOpen="false" diOpen="" doOpen="DO_Chamber_purge_valve" diCloseSensor="" diOpenSensor="" />
    <IoValve id="ValveProcess" display="Process gas final valve" schematicId=""
             unit="" isNc="true" isDefaultOpen="false" diOpen="" doOpen="DO_Process_gas_final_valve"
             diCloseSensor="" diOpenSensor="" />
    <IoValve id="ValveSoftPumping" display="Soft pumping valve" schematicId=""
             unit="" isNc="true" isDefaultOpen="false" diOpen="" doOpen="DO_Soft_Pumping_Valve"
             diCloseSensor="" diOpenSensor="" />
    <IoValve id="ValveFastPumping" display="Fast pumping valve" schematicId=""
             unit="" isNc="true" isDefaultOpen="false" diOpen="" doOpen="DO_Fast_Pumping_Valve"
             diCloseSensor="" diOpenSensor="" />
    <IoValve id="ValveFastVent" display="Fast vent valve" schematicId=""
             unit="" isNc="true" isDefaultOpen="false" diOpen="" doOpen="DO_Chamber_vent_valve"
             diCloseSensor="" diOpenSensor="" />
    <IoValve id="WaterValve" display="Water Valve" schematicId=""
            unit="" isNc="true" isDefaultOpen="true" diOpen="" doOpen="DO_Water_Valve_On" diCloseSensor="" diOpenSensor="" />
  </IoValves>

  <IoMfcs assembly="VirgoRT" classType="VirgoRT.Devices.IODevices.IoMfc1">
    <IoMfc1 id="MfcGas1" display="Gas1" schematicId="MFC1" unit="sccm"
           aiFlow="AI_MFC1_Flow" aoFlow="AO_MFC1_Flow_Setpoint" diOffline="" aoRange=""
           diPressureAlarm="DI_MFC1_Pressure"
           scGasName="Gas1Name"
           scEnable="Gas1Enable"
           scN2Scale="Gas1MfcN2Scale"
           scScaleFactor="Gas1MfcScaleFactor"
           scAlarmRange="Gas1MfcAlarmRange"
           scEnableAlarm="Gas1MfcEnableAlarm"
           scAlarmTime="Gas1MfcAlarmTime"
           scFlowRegulationFactor="Gas1MfcFlowRegulationFactor"
           scDefaultSetPoint="" />
    <IoMfc1 id="MfcGas2" display="Gas2" schematicId="MFC2" unit="sccm"
           aiFlow="AI_MFC2_Flow" aoFlow="AO_MFC2_Flow_Setpoint" diOffline="" aoRange=""
           diPressureAlarm="DI_MFC2_Pressure"
           scGasName="Gas2Name"
           scEnable="Gas2Enable"
           scN2Scale="Gas2MfcN2Scale"
           scScaleFactor="Gas2MfcScaleFactor"
           scAlarmRange="Gas2MfcAlarmRange"
           scEnableAlarm="Gas2MfcEnableAlarm"
           scAlarmTime="Gas2MfcAlarmTime"
           scFlowRegulationFactor="Gas2MfcFlowRegulationFactor"
           scDefaultSetPoint="" />
    <IoMfc1 id="MfcGas3" display="Gas3" schematicId="MFC3" unit="sccm"
           aiFlow="AI_MFC3_Flow" aoFlow="AO_MFC3_Flow_Setpoint" diOffline="" aoRange=""
           diPressureAlarm="DI_MFC3_Pressure"
           scGasName="Gas3Name"
           scEnable="Gas3Enable"
           scN2Scale="Gas3MfcN2Scale"
           scScaleFactor="Gas3MfcScaleFactor"
           scAlarmRange="Gas3MfcAlarmRange"
           scEnableAlarm="Gas3MfcEnableAlarm"
           scAlarmTime="Gas3MfcAlarmTime"
           scFlowRegulationFactor="Gas3MfcFlowRegulationFactor"
           scDefaultSetPoint="" />
    <IoMfc1 id="MfcGas4" display="Gas4" schematicId="MFC4" unit="sccm"
          aiFlow="AI_MFC4_Flow" aoFlow="AO_MFC4_Flow_Setpoint" diOffline="" aoRange=""
          diPressureAlarm="DI_MFC4_Pressure"
          scGasName="Gas4Name"
          scEnable="Gas4Enable"
          scN2Scale="Gas4MfcN2Scale"
          scScaleFactor="Gas4MfcScaleFactor"
          scAlarmRange="Gas4MfcAlarmRange"
          scEnableAlarm="Gas4MfcEnableAlarm"
          scAlarmTime="Gas4MfcAlarmTime"
          scFlowRegulationFactor="Gas4MfcFlowRegulationFactor"
          scDefaultSetPoint="" />
    <IoMfc1 id="MfcGas5" display="Gas5" schematicId="MFC5" unit="sccm"
           aiFlow="AI_MFC5_Flow" aoFlow="AO_MFC5_Flow_Setpoint" diOffline="" aoRange=""
           diPressureAlarm="DI_MFC5_Pressure"
           scGasName="Gas5Name"
           scEnable="Gas5Enable"
           scN2Scale="Gas5MfcN2Scale"
           scScaleFactor="Gas5MfcScaleFactor"
           scAlarmRange="Gas5MfcAlarmRange"
           scEnableAlarm="Gas5MfcEnableAlarm"
           scAlarmTime="Gas5MfcAlarmTime"
           scFlowRegulationFactor="Gas5MfcFlowRegulationFactor"
           scDefaultSetPoint="" />
  </IoMfcs>

  <IoGasSticks assembly="VirgoRT" classType="VirgoRT.Devices.IoGasStick">
    <IoGasStick id="GasStick1" display="" mfc ="MfcGas1" downvalve="ValveMfc1" />
    <IoGasStick id="GasStick2" display="" mfc ="MfcGas2" downvalve="ValveMfc2" />
    <IoGasStick id="GasStick3" display="" mfc ="MfcGas3" downvalve="ValveMfc3" />
    <IoGasStick id="GasStick4" display="" mfc ="MfcGas4" downvalve="ValveMfc4" />
    <IoGasStick id="GasStick5" display="" mfc ="MfcGas5" downvalve="ValveMfc5" />
  </IoGasSticks>

  <IoSensors>
    <IoSensor id="SensorATMSwitch" display="ATM Switch"  schematicId="" unit="" di="DI_PM_ATM_SW" isLowAsNormal="" textOutTrigValue="true" infoText="" warningText="" alarmText="" />
    <IoSensor id="SensorVacSwitch" display="VAC Switch"  schematicId="" unit="" di="DI_PM_VAC_SW" isLowAsNormal="" textOutTrigValue="true" infoText="" warningText="" alarmText="" />
    <IoSensor id="SensorWaterFlowOk" display="Water Flow OK"  schematicId="" unit="" di="DI_Cooling_Water_Flow_SW" isLowAsNormal="" textOutTrigValue="false" infoText="" warningText="" alarmText="sensor water flow abnormal" />
    <!--<IoSensor id="SensorCoolantInletTCOK" display="Coolant Inlet TC OK"  schematicId="" unit="" di="DI_Coolant_Inlet_TC_Broken_Alarm" isLowAsNormal="" textOutTrigValue="true" infoText="" warningText="" alarmText="Coolant Inlet TC Broken Alarm" />-->
    <!--<IoSensor id="SensorCoolantOutletTCOK" display="Coolant Outlet TC OK"  schematicId="" unit="" di="DI_Coolant_Outlet_TC_Broken_Alarm" isLowAsNormal="" textOutTrigValue="true" infoText="" warningText="" alarmText="Coolant Outlet TC Broken Alarm" />-->
    <IoSensor id="SensorWaterLeakOk" display="Water Leak Ok"  schematicId="" unit="" di="DI_Water_Leak" isLowAsNormal="" textOutTrigValue="false" infoText="" warningText="" alarmText="Sensor water leak" />
    <IoSensor id="N2PressureOk" display="N2 Pressure OK"  schematicId="" unit="" di="DI_N2_Pressure" isLowAsNormal="" textOutTrigValue="false" infoText="" warningText="" alarmText="N2 Pressure Warning" />

    <IoSensor id="LE_OT" display="LE OT"  schematicId="" unit="" di="DI_LE_OT_SW_Alarm" isLowAsNormal="" textOutTrigValue="false" infoText="" warningText="" alarmText="LE OT SW Alarm" />
    <IoSensor id="GB_Pressure" display="GB Pressure"  schematicId="" unit="" di="DI_GB_Pressure_SW_Alarm" isLowAsNormal="" textOutTrigValue="false" infoText="" warningText="" alarmText="GB Pressure SW Alarm" />
    <IoSensor id="GB_Door" display="GB Door"  schematicId="" unit="" di="DI_GB_Door_SW_Alarm" isLowAsNormal="" textOutTrigValue="false" infoText="" warningText="" alarmText="GB Door SW Alarm" />
    <IoSensor id="SensorCDAPressureOk" display="CDA pressure OK"  schematicId="" unit="" di="DI_CDA_Pressure" isLowAsNormal="" textOutTrigValue="false" infoText="" warningText="" alarmText="Sensor CDA pressure abnormal" />
    <IoSensor id="SensorArmNotExtend" display="Arm not Extend"  schematicId="" unit="" di="DI_ARM_Not_Extend_to_PM" isLowAsNormal="" textOutTrigValue="true" infoText="Sensor arm extended" warningText="" alarmText="" />
    
    <!--<IoSensor id="SourceFan1" display="Source Fan1"  schematicId="" unit="" di="DI_SourceFan1" isLowAsNormal="" textOutTrigValue="false" infoText="" warningText="Source Fan1 Warning" alarmText="" />
    <IoSensor id="SourceFan2" display="Source Fan2"  schematicId="" unit="" di="DI_SourceFan2" isLowAsNormal="" textOutTrigValue="false" infoText="" warningText="Source Fan2 Warning" alarmText="" />-->
    <IoSensor id="SourceFan1" display="Source Fan1"  schematicId="" unit="" di="DI_Source_Fans_Running" isLowAsNormal="" textOutTrigValue="false" infoText="" warningText="" alarmText="Source Fan Warning" />
    
    <!--<IoSensor id="GeneratorInterlock" display="RF hardware interlock" di="DI_Generator_Hardware_Interlock" isLowAsNormal="" infoText="Generator interlock" warningText="" alarmText="" />-->
    <IoSensor id="GeneratorInterlock" display="RF hardware interlock" di="DI_RF_Interlock_OK" isLowAsNormal="" infoText="Generator interlock" warningText="" alarmText="" />

    <IoSensor id="SRF_Match_Interlock" display="SRF Match Interlock"  schematicId="" unit="" di="DI_SRF_Match_Interlock_OK" isLowAsNormal="" textOutTrigValue="false" infoText="" warningText="" alarmText="SRF Match Interlock Alarm" />
    <IoSensor id="BRF_Match_Interlock" display="BRF Match Interlock"  schematicId="" unit="" di="DI_BRF_Match_Interlock_OK" isLowAsNormal="" textOutTrigValue="false" infoText="" warningText="" alarmText="BRF Match Interlock Alarm" />
    <IoSensor id="RF_Cover_Closed" display="RF Cover Closed"  schematicId="" unit="" di="DI_RF_Cover_Closed" isLowAsNormal="" textOutTrigValue="false" infoText="" warningText="" alarmText="RF Cover Closed Alarm" />

    <IoSensor id="CHBW_OT_SW" display="CHBW OT SW"  schematicId="" unit="" di="DI_CHBW_OT_SW" isLowAsNormal="" textOutTrigValue="false" infoText="" warningText="" alarmText="CHBW OT SW Alarm" />

    <IoSensor id="Lift_Servo1_Alarm" display="Lift Servo1 Alarm"  schematicId="" unit="" di="DI_Lift_Servo1_Alarm" isLowAsNormal="" textOutTrigValue="false" infoText="" warningText="" alarmText="Servo1 Alarm" />
    <IoSensor id="Lift_Servo2_Alarm" display="Lift Servo2 Alarm"  schematicId="" unit="" di="DI_Lift_Servo2_Alarm" isLowAsNormal="" textOutTrigValue="false" infoText="" warningText="" alarmText="Servo2 Alarm" />
    <IoSensor id="Lift_Servo3_Alarm" display="Lift Servo3 Alarm"  schematicId="" unit="" di="DI_Lift_Servo3_Alarm" isLowAsNormal="" textOutTrigValue="false" infoText="" warningText="" alarmText="Servo3 Alarm" />
    <IoSensor id="Lift_Servo4_Alarm" display="Lift Servo4 Alarm"  schematicId="" unit="" di="DI_Lift_Servo4_Alarm" isLowAsNormal="" textOutTrigValue="false" infoText="" warningText="" alarmText="Servo4 Alarm" />

    <IoSensor id="Control_Box_Fans_Running" display="Control Box Fans Running"  schematicId="" unit="" di="DI_Control_Box_Fans_Running" isLowAsNormal="" textOutTrigValue="false" infoText="" warningText="Control Box Fans Running Warning" alarmText="" />
    <IoSensor id="AC_RACK_Fans_Running" display="AC RACK Fans Running"  schematicId="" unit="" di="DI_AC_RACK_Fans_Running" isLowAsNormal="" textOutTrigValue="false" infoText="" warningText="AC RACK Fans Running Warning" alarmText="" />

    <IoSensor id="AC_RACK_Smoke_Detect_SW" display="AC RACK Smoke Detect SW"  schematicId="" unit="" di="DI_AC_RACK_Smoke_Detect_SW" isLowAsNormal="" textOutTrigValue="false" infoText="" warningText="" alarmText="AC RACK Smoke Detect SW Alarm" />
    <IoSensor id="AC_RACK_Main_Power_ON" display="AC RACK Main Power ON"  schematicId="" unit="" di="DI_AC_RACK_Main_Power_ON" isLowAsNormal="" textOutTrigValue="false" infoText="" warningText="" alarmText="AC RACK Main Power ON Alarm" />

    <IoSensor id="Lift_Servo_ORG_fail_alarm" display="Lift Servo ORG fail alarm"  schematicId="" unit="" di="DI_Lift_Servo_ORG_fail_alarm" isLowAsNormal="" textOutTrigValue="true" infoText="" warningText="" alarmText="Lift Servo ORG Fail Alarm" />
    <IoSensor id="Lift_Servo_ABS_fail_alarm" display="Lift Servo ABS fail alarm"  schematicId="" unit="" di="DI_Lift_Servo_ABS_fail_alarm" isLowAsNormal="" textOutTrigValue="true" infoText="" warningText="" alarmText="Lift Servo ABS Fail Alarm" />
    <IoSensor id="Lift_Servo_Over_software_Limit_alarm" display="Lift Servo Over Software Limit alarm"  schematicId="" unit="" di="DI_Lift_Servo_Over_software_Limit_alarm" isLowAsNormal="" textOutTrigValue="true" infoText="" warningText="" alarmText="Lift Servo Over Software Limit Alarm" />

    <IoSensor id="MPE_CPU_Communication_Alarm" display="MPE CPU Communication Alarm"  schematicId="" unit="" di="DI_MPE_CPU_Communication_Alarm" isLowAsNormal="" textOutTrigValue="true" infoText="" warningText="" alarmText="MPE CPU Communication Alarm" />

    <IoSensor id="MPE_CPU_Battery_Alarm" display="MPE CPU Battery"  schematicId="" unit="" di="DI_MPE_CPU_Battery_Alarm" isLowAsNormal="" textOutTrigValue="true" infoText="" warningText="MPE CPU Battery Warning" alarmText="" />
    <IoSensor id="MPE_CPU_OT_Warning" display="MPE CPU OT"  schematicId="" unit="" di="DI_MPE_CPU_OT_Warning" isLowAsNormal="" textOutTrigValue="true" infoText="" warningText="MPE CPU OT Warning" alarmText="" />
    
    <IoSensor id="MPE_CPU_Error" display="MPE CPU Error"  schematicId="" unit="" di="DI_MPE_CPU_Error" isLowAsNormal="" textOutTrigValue="true" infoText="" warningText="" alarmText="MPE CPU Error Alarm" />
  </IoSensors>

  <!--<IoPumps assembly="VirgoRT" classType="VirgoRT.Devices.IoPump" IsEnabled = "False">
    <IoPump id="MainPump" display="Main Pump" schematicId="MainPump" unit="mTorr"
            diBreakerState=""
            diRunning="DI_Pump_Running"
            diStart=""
            diStop=""
            diAlarm="DI_Pump_Alarm"
            diWarning="DI_Pump_Warning"
            diPumpTempAlarm=""
            diN2Alarm="DI_Pump_N2_Purge_Alarm"
            diWaterFlowAlarm="DI_Pump_Cool_Water_Flow_Alarm"
            diExhaustPressureAlarm="DI_Pump_Exhaust_Pressure_Alarm"

            doStart="DO_Pump_Start"
            doStop="DO_Pump_Stop"
            doWaterFlowAlarm=""
            doN2PressureAlarm=""

            aiWaterFlow=""
            aiN2Pressure=""
            aoN2PressureAlarmMaxValue=""
            aoN2PressureAlarmMinValue=""
            aoWaterFlowAlarmMaxValue=""
            aoWaterFlowAlarmMinValue=""

            scEnableDryPump="EnableDryPump"
            scEnableWaterFlow="PumpEnableWaterFlow"
            scWaterFlowMinValue="PumpWaterFlowMinValue"
            scWaterFlowMaxValue="PumpWaterFlowMaxValue"
            scWaterFlowOutOfToleranceWarningTime="PumpWaterFlowOutOfToleranceWarningTime"
            scWaterFlowOutOfToleranceAlarmTime="PumpWaterFlowOutOfToleranceAlarmTime"
            scEnableN2Pressure="PumpEnableN2Pressure"
            scN2PressureMinValue="PumpN2PressureMinValue"
            scN2PressureMaxValue="PumpN2PressureMaxValue"
            scN2PressureOutOfToleranceWarningTime="PumpN2PressureOutOfToleranceWarningTime"
            scN2PressureOutOfToleranceAlarmTime="PumpN2PressureOutOfToleranceAlarmTime" />
  </IoPumps>-->

  <IoPressureMeters assembly="VirgoRT" classType="VirgoRT.Devices.IODevices.IoPressureMeter">
    <IoPressureMeter id="ProcessGauge" display="process Pressure" schematicId="" unit="mTorr"
                     aiValue="AI_Process_pressure" diGaugeFail="DI_Process_pressure_Alarm" scPrecision="" scOffset=""/>
    <IoPressureMeter id="PressureGauge" display="Chamber Pressure" schematicId="" unit="mTorr"
                     aiValue="AI_Chamber_pressure"
                     diGaugeFail="DI_Chamber_pressure_Alarm"
                     scPrecision="ChamberPressureGaugePrecision"
                     scOffset=""/>
    <IoPressureMeter id="ForelineGauge" display="Foreline Pressure" schematicId="" unit="mTorr"
                     aiValue="AI_Foreline_pressure" diGaugeFail="DI_Foreline_pressure_Alarm" scPrecision="" scOffset=""/>
  </IoPressureMeters>

  <IoThrottleValves assembly="VirgoRT" classType="VirgoRT.Devices.IoThrottleValve">
    <IoThrottleValve  id="ThrottleValve" display="" schematicId="" unit=""
                      aiPositionFeedback="AI_Throttle_Valve_Real_Position"
                      aiPressureFeedback="AI_Throttle_Valve_Real_Pressure"
                      aiState=""
                      aoPositionSetPoint="AO_Throttle_Valve_Position_Setpoint"
                      aoPressureSetPoint="AO_Throttle_Valve_Pressure_Setpoint"
                      aoPressureMode="AO_Throttle_Valve_Work_Mode" />
  </IoThrottleValves>

  <IoPressureControls assembly="VirgoRT" classType="VirgoRT.Devices.IoPressureControl">
    <IoPressureControl id="PressureControl" display="PressureControl" schematicId="PressureControl" unit="mTorr"
                       diLogicProcessGasFlowing=""
                       scGasFlowPressureAlarmRange="GasFlowPressureAlarmRange"
                       scGasFlowPressureAlarmTime="GasFlowPressureAlarmTime"
                       scIsIndependentControl="IsIndependentControl"
                       scIsBoostPumpInstalled="EnableBoosterPump"
                       scTvInstalled="EnableThrottleValve"
                       boost="" tv="ThrottleValve" drypump="MainPump"
                       pressureMeter ="PressureGauge" processMeter="ProcessGauge" forelineMeter="ForelineGauge" />
  </IoPressureControls>

  <!--<IoRfs assembly="VirgoRT" classType="VirgoRT.Devices.IoRf" IsEnabled = "False">
    <IoRf  id="Rf"
            display="RF Generator"
            schematicId=""
            unit=""
            doOnOff="DO_Generator_Power_ON"
            diOnOffFeedback="DI_Generator_Power_Status"
            diInterlock="DI_Generator_Hardware_Interlock"
            diOverTemp ="DI_Generator_Over_Temp"
            aiCurrent=""
            aiVoltage=""
            diBreakerState=""
            diIArc=""
            diOffline=""
            diVArc=""
            doWaterFlowAlarm=""
            doWaterFlowWarning=""

            aoMatchMode=""
            aoMatchPositionC1=""
            aoMatchPositionC2=""
            aoWorkMode=""
            aoFrequency=""
            aoDuty=""
            aoPower="AO_Generator_Power_Setpoint"
            aoCoefficient=""
            aiWaterFlow=""
            aiForwardPower="AI_Generator_Forward_Power"
            aiReflectPower="AI_Generator_Reflect_Power"
            aiMatchMode =""
            aiMatchPositionC1=""
            aiMatchPositionC2=""

            scMatchMode="MatchMode"
            scMatchPositionC1="MatchPositionC1"
            scMatchPositionC2="MatchPositionC2"
            scPowerAlarmRange="RfPowerAlarmRange"
            scPowerAlarmTime="RfPowerAlarmTime"
            scReflectPowerAlarmRange="RfReflectPowerAlarmRange"
            scReflectPowerAlarmTime="RfReflectPowerAlarmTime"
            scPowerRange="PowerRange"
            scCoefficient="Coefficient"
            scEnablePulsingFunction="EnablePulsingFunction"
            scEnableC1C2Position="EnableC1C2Position"
            scEnableReflectPower="EnableReflectPower"
            scEnableVoltageCurrent="EnableVoltageCurrent"
            scPowerRegulationFactor="PowerRegulationFactor" />
  </IoRfs>-->

  <IoHeaters assembly="VirgoRT" classType="VirgoRT.Devices.IoHeater">
    <IoHeater id="HeaterChamber" display="Chamber Heater" schematicId="VCHTR" unit="℃"
           doPowerOn="DO_Substrate_Heater_On"
           diDeviation="DI_Substrate_TC_Deviation_out_of_range"
           diPowerOnFeedback="DI_Substrate_Heater_On_FB"
           diControlTcBroken="DI_Substrate_Control_TC_Broken_Alarm"
           diMonitorTcBroken="DI_Substrate_Monitor_TC_Broken_Alarm"
           aoSetPoint="AO_Substrate_Temperature_Setpoint"
           aoSetPointLimit="AO_Substrate_Temp_Limit_Setpoint"
           aiFeedback="AI_Substrate_Control_TC_Temp"
           aiMonitor="AI_Substrate_Monitor_TC_Temp"
           aiCoolantInletTemp="AI_Coolant_Inlet_Temp"
           aiCoolantOutletTemp="AI_Coolant_Outlet_Temp"
           scSetPointLimit="ChamberHeaterSetPointLimit" />
    <IoHeater id="ForelineHeater" display="Foreline Heater" schematicId="" unit="℃"
         doPowerOn="DO_Forline_Heater_On"
         diDeviation="DI_Foreline_TC_Deviation_out_of_range"
         diPowerOnFeedback="DI_Foreline_Heater_On_FB"
         diControlTcBroken="DI_Foreline_Control_TC_Broken_Alarm"
         diMonitorTcBroken="DI_Foreline_Monitor_TC_Broken_Alarm"
         aoSetPoint="AO_Foreline_Temperature_Setpoint"
         aoSetPointLimit="AO_Foreline_Temp_Limit_Setpoint"
         aiFeedback="AI_Foreline_Control_TC_Temp"
         aiMonitor="AI_Foreline_Monitor_TC_Temp"
         scSetPointLimit="ForeLineHeaterSetPointLimit" />

    <IoHeater id="WallHeater" display="Wall Heater" schematicId="" unit="℃"
              doPowerOn="DO_CHB_Wall_Heater_On"

              diDeviation="DI_CHB_Wall_TC_Deviation_out_of_range"
              diPowerOnFeedback="DI_CHB_Wall_Heater_On_FB"
              diControlTcBroken="DI_CHB_Wall_Control_TC_Broken_Alarm"
              diMonitorTcBroken="DI_CHB_Wall_Monitor_TC_Broken_Alarm"

              aoSetPoint="AO_CHB_Wall_Temperature_Setpoint"
              aoSetPointLimit="AO_CHB_Wall_Temp_Limit_Setpoint"

              aiFeedback="AI_CHB_Wall_Control_TC_Temp"
              aiMonitor="AI_CHB_Wall_Monitor_TC_Temp"

              scSetPointLimit="WallHeaterSetPointLimit" />


    <IoHeater id="GridHeater" display="Grid Heater" schematicId="" unit="℃"
              doPowerOn=""

              diDeviation=""
              diPowerOnFeedback=""
              diControlTcBroken="DI_Grid_TC_Broken_Alarm"
              diMonitorTcBroken=""

              aoSetPoint=""
              aoSetPointLimit=""

              aiFeedback="AI_Grid_TC_Temp"
              aiMonitor=""

              scSetPointLimit="" />
  </IoHeaters>

  <IoHeartbeats assembly="VirgoRT" classType=" VirgoRT.Devices.IODevices.IoHeartbeat">
    <IoHeartbeat  id="Heartbeat" display="" schematicId="" unit="" ao="AO_Heartbeat" ai="AI_Heartbeat_FB" />
  </IoHeartbeats>

  <IoResets>
    <IoReset id="ResetPlcSignal" display="" schematicId="" unit="" doReset="DO_Reset_Signal" />
  </IoResets>

  <!--<IoSetConfigs>
    <IoSetConfig id="SetProcessPressureOffset" display="" schematicId="" unit="" aoPressureOffset="AO_Process_Pressure_Offset_Value" />
  </IoSetConfigs>-->

  <!--<IoStatisticss>
    <IoStatistics id="StatisticsRfOnTime" display="RF On Statistics" schematicId="" unit=""
                  diMonitorSignal="DI_Generator_Power_Status"
                  scLastPMTime="RfOnTimeLastPMTime"
                  scTimeFromLastPM="RfOnTimeFromLastPM"
                  scTimeTotal="RfOnTimeTotal"
                  scEnableAlarm="RfOnTimeEnableAlarm"
                  scPMInterval="RfOnTimePMInterval" />

    <IoStatistics id="StatisticsPumpOnTime" display="Pump On Statistics" schematicId="" unit=""
                  diMonitorSignal="DI_Pump_Running"
                  scLastPMTime="PumpOnTimeLastPMTime"
                  scTimeFromLastPM="PumpOnTimeFromLastPM"
                  scTimeTotal="PumpOnTimeTotal"
                  scEnableAlarm="PumpOnTimeEnableAlarm"
                  scPMInterval="PumpOnTimePMInterval" />
  </IoStatisticss>-->

  <IoPlcDateTimes>
    <IoPlcDateTime id="PlcDateTime" display="PlcDateTime" schematicId="" unit=""
                  aiYear="AI_Year" aiMonth="AI_Month" aiDay="AI_Day" aiHour="AI_Time" aiMinute="AI_Minute" aiSecond="AI_Second" />
  </IoPlcDateTimes>

  <IoCylinders assembly="VirgoRT" classType="VirgoRT.Devices.IoCylinder">
    <!--<IoCylinder id="LiftPin" display="lifter Pin" schematicId="" unit="" doMotorRelay=""
                doON="DO_Lift_Pin_Up" doOFF="DO_Lift_Pin_Down" diON="DI_Lift_Pin_Up" diOFF="DI_Lift_Pin_Down" />-->

    <IoCylinder id="SlitDoor" display="Slit door" schematicId="" unit="" doMotorRelay=""
                doON="DO_Slit_Door_Open" doOFF="DO_Slit_Door_Close" diON="DI_Slit_Door_Open_Pos" diOFF="DI_Slit_Door_Close_Pos" />

    <!--<IoCylinder id="SmallPin" display="Small Pin" schematicId="" unit=""
                doON="DO_Guide_Pin_Small_Lifter_Up" doOFF="DO_Guide_Pin_Small_Lifter_Down"
                diON="DI_Guide_Pin_Small_Lifter_Up_Pos" diOFF="DI_Guide_Pin_Small_Lifter_Down_Pos" />

    <IoCylinder id="MediumPin" display="Medium Pin" schematicId="" unit=""
                doON="DO_Guide_Pin_Medium_Lifter_Up" doOFF="DO_Guide_Pin_Medium_Lifter_Down"
                diON="DI_Guide_Pin_Medium_Lifter_Up_Pos" diOFF="DI_Guide_Pin_Medium_Lifter_Down_Pos" />-->
  </IoCylinders>

  <IoTriStates assembly="VirgoRT" classType="VirgoRT.Devices.IoTriStateLift4">
    <IoTriStateLift4 id="TriStateLiftPin4" display="Double Group TriState LiftPin" schematicId="" unit="" doMotorRelay=""
                    diOrigin="DI_Lift_Servo_with_origin"
                    diP1="DI_Lift_Servo_Go_Position1_Complete" 
                    diP2="DI_Lift_Servo_Go_Position2_Complete" 
                    diP3="DI_Lift_Servo_Go_Position3_Complete"
                    diABSAlarm="DI_Lift_Servo_ABS_fail_alarm" 
                    diORGAlarm="DI_Lift_Servo_ORG_fail_alarm"  
                    diOverSoftwareLimitAlarm="DI_Lift_Servo_Over_software_Limit_alarm"
                    doOrigin="DO_Lift_Servo_Origin"
                    doReset="DO_Reset_Signal"
                    doP1="DO_Lift_Servo_Go_Position1" 
                    doP2="DO_Lift_Servo_Go_Position2" 
                    doP3="DO_Lift_Servo_Go_Position3"
                    doStop="DO_Lift_Servo_Stop" 
                    doUp="DO_Lift_Servo_Manual_UP" 
                    doDown="DO_Lift_Servo_Manual_DOWN"
                    doServo1JogUP="DO_Lift_Servo1_Jog_UP"
                    doServo1JogDOWN="DO_Lift_Servo1_Jog_DOWN"
                    doServo1Stop="DO_Lift_Servo1_Stop"
                    doServo1StepUp="DO_Lift_Servo1_Step_UP"
                    doServo1StepDOWN="DO_Lift_Servo1_Step_DOWN"
                    doServo2JogUP="DO_Lift_Servo2_Jog_UP"
                    doServo2JogDOWN="DO_Lift_Servo2_Jog_DOWN"
                    doServo2Stop="DO_Lift_Servo2_Stop"
                    doServo2StepUp="DO_Lift_Servo2_Step_UP"
                    doServo2StepDOWN="DO_Lift_Servo2_Step_DOWN"
                    doServo3JogUP="DO_Lift_Servo3_Jog_UP"
                    doServo3JogDOWN="DO_Lift_Servo3_Jog_DOWN"
                    doServo3Stop="DO_Lift_Servo3_Stop"
                    doServo3StepUp="DO_Lift_Servo3_Step_UP"
                    doServo3StepDOWN="DO_Lift_Servo3_Step_DOWN"
                    doServo4JogUP="DO_Lift_Servo4_Jog_UP"
                    doServo4JogDOWN="DO_Lift_Servo4_Jog_DOWN"
                    doServo4Stop="DO_Lift_Servo4_Stop"
                    doServo4StepUp="DO_Lift_Servo4_Step_UP"
                    doServo4StepDOWN="DO_Lift_Servo4_Step_DOWN"
                    aiCurrentValue="AI_Lift_Servo_Current_Position"
                    aiCurrentSpeed="AI_Lift_Servo_Current_Speed"
                    aiMotor1CurrentPosition="AI_Lift_Servo_Motor1_Current_Position"
                    aiMotor2CurrentPosition="AI_Lift_Servo_Motor2_Current_Position"
                    aiMotor3CurrentPosition="AI_Lift_Servo_Motor3_Current_Position"
                    aiMotor4CurrentPosition="AI_Lift_Servo_Motor4_Current_Position"
                    aiServo1AlarmCode="AI_Lift_Servo1_Alarm_Code"
                    aiServo2AlarmCode="AI_Lift_Servo2_Alarm_Code"
                    aiServo3AlarmCode="AI_Lift_Servo3_Alarm_Code"
                    aiServo4AlarmCode="AI_Lift_Servo4_Alarm_Code"
                    aiServoSVRAlarmCode="AI_Lift_Servo_SVR_Alarm_Code"
                    aiServo1WarningCode="AI_Lift_Servo1_Warning_Code"
                    aiServo2WarningCode="AI_Lift_Servo2_Warning_Code"
                    aiServo3WarningCode="AI_Lift_Servo3_Warning_Code"
                    aiServo4WarningCode="AI_Lift_Servo4_Warning_Code"
                    aiServoSVRWarningCode="AI_Lift_Servo_SVR_Warning_Code"        
                    aoSetP1="AO_Lift_Servo_Position1" 
                    aoSetP2="AO_Lift_Servo_Position2" 
                    aoSetP3="AO_Lift_Servo_Position3"
                    aoAutoSpeed="AO_Lift_Servo_Auto_Speed" 
                    aoManualSpeed="AO_Lift_Servo_Manual_Speed"
                    aoAccOrDecTime="AO_Lift_Servo_ACC_DEC_Time"
                    aoCCWLimitPosition="AO_Lift_Servo_CCW_Limit_Position" 
                    aoCWLimitPosition="AO_Lift_Servo_CW_Limit_Position"
                    aoStepDistance="AO_Lift_Servo_Step_Distance"
                    aoWorkMode="AO_Lift_Servo_Work_Mode"
                    aoSingleAxisManualSpeed="AO_Lift_Servo_Single_Axis_Manual_Speed"
                    aoOriginOffset="AO_Lift_Servo_Origin_Offset"           
		  />
  </IoTriStates>

  <IoLids assembly="VirgoRT" classType=" VirgoRT.Devices.IODevices.IoLid">
    <IoLid id="Lid" display="Lid" schematicId="" unit="" doMotorRelay="" doON="" doOFF="" diON="" diOFF="DI_Lid_Closed" />
  </IoLids>

  <IoMessage assembly="VirgoRT" classType=" VirgoRT.Devices.IODevices.IoMessage">
    <IoMessage id="Messager" display="Messager" schematicId="" unit="" doMotorRelay="" ai="" ao="AO_BiasRF_Enable" />
  </IoMessage>

  <!--<IoPumpCtrls assembly="VirgoRT" classType="VirgoRT.Devices.IODevices.IoPumpCtrl">
    <IoPumpCtrl id="PumpCtrl" display="Lid" schematicId="" unit="" aoPumpIOCTRLEnable="AO_Pump_IO_CTRL_Enable" doPumpRun="DO_Pump_Run" doPumpStop="DO_Pump_Stop" diDryPumpRunning="DI_Dry_Pump_Running" diBoosterPumpRunning="" diPumpRemoteStatus="DI_Pump_Remote_Status" diPumpAlarm="DI_Pump_Alarm"/>
  </IoPumpCtrls>-->

</DeviceModelDefine>