EfemSimulator.cs 12 KB

123456789101112131415161718192021222324252627282930313233343536373839404142434445464748495051525354555657585960616263646566676869707172737475767778798081828384858687888990919293949596979899100101102103104105106107108109110111112113114115116117118119120121122123124125126127128129130131132133134135136137138139140141142143144145146147148149150151152153154155156157158159160161162163164165166167168169170171172173174175176177178179180181182183184185186187188189190191192193194195196197198199200201202203204205206207208209210211212213214215216217218219220221222223224225226227228229230231232233234235236237238239240241242243244245246247248249250251252253254255256257258259260261262263264265266267268269270271272273274275276277278279280281282283284285286287288289290291292293294295296297298299300301302303304305306307308309310311312313314315316317318319320321322323324325326327328329330331332333334335336337338339340341342343344345346347348349350351352353354355356357358359360361362363364365366367368369370371372373374375376377378379380381382383384385386387388389390391392393394395396397398399400401402403404405406407408409410411412413414415416417418419420421422423424425426427428429430431432433434435436
  1. using System;
  2. using System.Text.RegularExpressions;
  3. using System.Threading;
  4. using System.Threading.Tasks;
  5. using Aitex.Core.UI.Control;
  6. using MECF.Framework.Simulator.Core.Driver;
  7. using Aitex.Core.Util;
  8. using VirgoCommon;
  9. namespace VirgoSimulator.Devices
  10. {
  11. class EfemSimulatorServer : SocketDeviceSimulator
  12. {
  13. private const string CMD_PATTERN = "^MOV|^SET|^GET";
  14. private const string SCMD = @"(?<=\:)(.*?)(?=\/)";
  15. private const string SFOUP = @"(?<=P)(\d{1})(?=[\;\/])";
  16. private const string ACK = "ACK";
  17. private string[] _slotMap = new string[25];
  18. private PeriodicJob _HwThread;
  19. private bool _bCommReady;
  20. private bool _isDoorOpen;
  21. private bool _isPlaced;
  22. public int WaferSize = 3;
  23. public string SlotMap
  24. {
  25. get { return string.Join("", _slotMap); }
  26. }
  27. public bool _isVacuumError { get; set; }
  28. public bool _isAirError { get; set; }
  29. public bool _isFlowError { get; set; }
  30. public bool _isLeak { get; set; }
  31. public bool _isMaintain { get; set; }
  32. public bool _isWaferPresent { get; set; }
  33. public bool _isMaintainDoorOpen { get; private set; }
  34. public bool _isProtrude1 { get; set; }
  35. public bool _isProtrude2 { get; set; }
  36. public EfemSimulatorServer() : base(13001, -1, "\r", ' ')
  37. {
  38. for (int i = 0; i < _slotMap.Length; i++)
  39. _slotMap[i] = "0";
  40. _HwThread = new PeriodicJob(5000, OnSendEvent, "EfemHardware", true);
  41. }
  42. private bool OnSendEvent()
  43. {
  44. if (!_bCommReady)
  45. {
  46. OnWriteMessage("INF:READY/COMM;");
  47. }
  48. return true;
  49. }
  50. protected override void ProcessUnsplitMessage(string str)
  51. {
  52. if (!_bCommReady && str.Contains("ACK:READY/COMM"))
  53. {
  54. _bCommReady = true;
  55. }
  56. if (!Regex.IsMatch(str, CMD_PATTERN))
  57. return;
  58. // 发送ACK 表示收到
  59. string ack = Regex.Replace(str, CMD_PATTERN, ACK);
  60. if(!str.Contains("SIGSTAT"))
  61. OnWriteMessage(ack);
  62. // 处理INF
  63. var a = OnWork(ack);
  64. }
  65. internal void SetCassetteDoor(bool doorOpen)
  66. {
  67. if (doorOpen != _isDoorOpen)
  68. {
  69. _isDoorOpen = doorOpen;
  70. SendSystemData();
  71. }
  72. }
  73. internal void SetMaintain(bool maintain)
  74. {
  75. if (maintain != _isMaintain)
  76. {
  77. _isMaintain = maintain;
  78. SendSystemData();
  79. }
  80. }
  81. internal void SetProtrude1(bool protrude)
  82. {
  83. if (protrude != _isProtrude1)
  84. {
  85. _isProtrude1 = protrude;
  86. SendLP1Data();
  87. }
  88. }
  89. internal void SetProtrude2(bool protrude)
  90. {
  91. if (protrude != _isProtrude2)
  92. {
  93. _isProtrude2 = protrude;
  94. SendLP2Data();
  95. }
  96. }
  97. private async Task OnWork(string strACK)
  98. {
  99. // match basic
  100. Match m1 = Regex.Match(strACK, SCMD);
  101. // get mock delay time
  102. string sBasic = m1.Groups[1].Value;
  103. if (string.IsNullOrEmpty(sBasic))
  104. return;
  105. EfemOperation op = EfemConstant.ToOperation(sBasic);
  106. ushort millionSec = this.SimuOperationTime(op);
  107. // Sleep
  108. //await Task.Run(() => Thread.Sleep(millionSec));
  109. await Task.Delay(millionSec);
  110. // build the INF string
  111. string strINF = string.Empty;
  112. switch (EfemConstant.ToOperation(sBasic))
  113. {
  114. case EfemOperation.GetWaferInfo:
  115. strINF = strACK.Replace(ACK, "INF");
  116. strINF = strINF.TrimEnd(';');
  117. strINF += "/1111111111111110001111111;";
  118. break;
  119. case EfemOperation.Home:
  120. //string s1 = "EVT:SIGSTAT/P1/00000381/00000000;\rEVT:SIGSTAT/P2/00000381/00000000;\rEVT:SIGSTAT/System/0000FFF7/00000004;\r";
  121. //strINF = s1 + strACK.Replace(ACK, "INF");
  122. SendSystemData();
  123. SendLP1Data();
  124. SendLP2Data();
  125. strINF = strACK.Replace(ACK, "INF");
  126. break;
  127. case EfemOperation.Map:
  128. Match m2 = Regex.Match(strACK, SFOUP);
  129. if (m2.Success)
  130. {
  131. string map = string.Join("", _slotMap);
  132. string s2 = $"EVT:MAPDT/P{m2.Groups[1].Value}/{map};\r";
  133. strINF = s2 + strACK.Replace(ACK, "INF");
  134. }
  135. if (strACK.Contains("BUFFER"))
  136. {
  137. string map = string.Join("", _slotMap);
  138. string s2 = $"EVT:MAPDT/BUFFER/0000000000000000000000000;\r";
  139. strINF = s2 + strACK.Replace(ACK, "INF");
  140. }
  141. break;
  142. case EfemOperation.SigStatus:
  143. {
  144. if(strACK.Contains("P1"))
  145. {
  146. uint data = GetLP1Data1();
  147. string msg = $"ACK:SIGSTAT/P1/{data:X8}/00000000;\r";
  148. OnWriteMessage(msg);
  149. msg = $"INF:SIGSTAT/P1/{data:X8}/00000000;\r";
  150. OnWriteMessage(msg);
  151. return;
  152. }
  153. if (strACK.Contains("P2"))
  154. {
  155. uint data = GetLP2Data1();
  156. string msg = $"ACK:SIGSTAT/P2/{data:X8}/00000000;\r";
  157. OnWriteMessage(msg);
  158. msg = $"INF:SIGSTAT/P2/{data:X8}/00000000;\r";
  159. OnWriteMessage(msg);
  160. return;
  161. }
  162. break;
  163. }
  164. case EfemOperation.Align:
  165. case EfemOperation.Pick:
  166. case EfemOperation.Place:
  167. case EfemOperation.Orgsh:
  168. case EfemOperation.Light:
  169. default:
  170. strINF = strACK.Replace(ACK, "INF");
  171. break;
  172. }
  173. OnWriteMessage(strINF);
  174. }
  175. private void SendLP1Data()
  176. {
  177. uint data = GetLP1Data1();
  178. string msg = $"EVT:SIGSTAT/P1/{data:X8}/00000000;";
  179. OnWriteMessage(msg);
  180. }
  181. private void SendLP2Data()
  182. {
  183. uint data = GetLP2Data1();
  184. string msg = $"EVT:SIGSTAT/P2/{data:X8}/00000000;";
  185. OnWriteMessage(msg);
  186. }
  187. private void SendSystemData()
  188. {
  189. uint data = GetSystemData1();
  190. string msg = $"EVT:SIGSTAT/System/{data:X8}/00000000;";
  191. OnWriteMessage(msg);
  192. }
  193. private ushort SimuOperationTime(EfemOperation op)
  194. {
  195. ushort sec = 0;
  196. switch (op)
  197. {
  198. case EfemOperation.Map:
  199. case EfemOperation.GetWaferInfo:
  200. case EfemOperation.Align:
  201. sec = 300;
  202. break;
  203. case EfemOperation.Pick:
  204. case EfemOperation.Place:
  205. case EfemOperation.Orgsh:
  206. sec = 400;
  207. break;
  208. case EfemOperation.Light:
  209. case EfemOperation.SigStatus:
  210. sec = 200;
  211. break;
  212. default:
  213. sec = 100;
  214. break;
  215. }
  216. return sec;
  217. }
  218. public void PlaceCarrier1()
  219. {
  220. _isPlaced = true;
  221. SendLP1Data();
  222. }
  223. public void RemoveCarrier1()
  224. {
  225. _isPlaced = false;
  226. SendLP1Data();
  227. }
  228. public void PlaceCarrier2()
  229. {
  230. _isPlaced = true;
  231. SendLP2Data();
  232. }
  233. public void RemoveCarrier2()
  234. {
  235. _isPlaced = false;
  236. SendLP2Data();
  237. }
  238. public void ClearWafer()
  239. {
  240. for (int i = 0; i < _slotMap.Length; i++)
  241. {
  242. _slotMap[i] = "0";
  243. }
  244. }
  245. public void SetAllWafer()
  246. {
  247. for (int i = 0; i < _slotMap.Length; i++)
  248. {
  249. _slotMap[i] = "1";
  250. }
  251. }
  252. public void SetUpWafer()
  253. {
  254. for (int i = 0; i < _slotMap.Length; i++)
  255. {
  256. _slotMap[i] = i > 15 ? "1" : "0";
  257. }
  258. }
  259. public void SetLowWafer()
  260. {
  261. for (int i = 0; i < _slotMap.Length; i++)
  262. {
  263. _slotMap[i] = i < 10 ? "1" : "0";
  264. }
  265. }
  266. public void RandomWafer()
  267. {
  268. Random _rd = new Random();
  269. for (int i = 0; i < _slotMap.Length; i++)
  270. {
  271. _slotMap[i] = (i % 9).ToString();// _rd.Next(0, 10) < 6 ? "0" : "1";
  272. }
  273. }
  274. private uint GetLP1Data1()
  275. {
  276. uint data1 = 0x0u;
  277. data1 |= (_isPlaced ? 0x00000001u : 0x0);
  278. data1 |= (!_isPlaced ? 0x00000002u : 0x0);
  279. switch (WaferSize)
  280. {
  281. case 3:
  282. //data1 |= 0x00000040u;
  283. data1 |= 0x00000080u;
  284. data1 |= 0x00000100u;
  285. break;
  286. case 4:
  287. data1 |= 0x00000040u;
  288. //data1 |= 0x00000080u;
  289. data1 |= 0x00000100u;
  290. break;
  291. case 6:
  292. data1 |= 0x00000040u;
  293. data1 |= 0x00000080u;
  294. //data1 |= 0x00000100u;
  295. break;
  296. }
  297. data1 |= (!_isProtrude1) ? 0x00000200u : 0x0;
  298. return data1;
  299. }
  300. private uint GetLP2Data1()
  301. {
  302. uint data1 = 0x0u;
  303. data1 |= (_isPlaced ? 0x00000001u : 0x0);
  304. data1 |= (!_isPlaced ? 0x00000002u : 0x0);
  305. switch (WaferSize)
  306. {
  307. case 3:
  308. //data1 |= 0x00000040u;
  309. data1 |= 0x00000080u;
  310. data1 |= 0x00000100u;
  311. break;
  312. case 4:
  313. data1 |= 0x00000040u;
  314. //data1 |= 0x00000080u;
  315. data1 |= 0x00000100u;
  316. break;
  317. case 6:
  318. data1 |= 0x00000040u;
  319. data1 |= 0x00000080u;
  320. //data1 |= 0x00000100u;
  321. break;
  322. }
  323. data1 |= (!_isProtrude2) ? 0x00000200u : 0x0;
  324. return data1;
  325. }
  326. private uint GetSystemData1()
  327. {
  328. uint data1 = 0x0u;
  329. //0:
  330. data1 |= (!_isVacuumError ? 0x00000001u : 0x0);
  331. //1
  332. data1 |= (!_isVacuumError ? 0x00000002u : 0x0);
  333. //2:
  334. data1 |= (!_isAirError ? 0x00000004u : 0x0);
  335. //4 Flow gauge Sensor Warning
  336. data1 |= (!_isFlowError ? 0x00000010u : 0x0);
  337. //5 Leakage Sensor Warning
  338. data1 |= (!_isLeak ? 0x00000020u : 0x0);
  339. //6:Door switch Door close
  340. data1 |= (!_isMaintainDoorOpen ? 0x00000040u : 0x0);
  341. //7 Drive power Normal
  342. data1 |= 0x00000080u;
  343. //8 Differential pressure sensor setting 1 Normal
  344. data1 |= 0x00000100u;
  345. //9 Differential pressure sensor setting 1 Normal
  346. data1 |= 0x00000200u;
  347. //10 Ionizer alarm Normal
  348. data1 |= 0x00000400u;
  349. //11 FFU alarm Normal
  350. data1 |= 0x00000800u;
  351. //12 Area sensor(Reserved) Not blocked
  352. data1 |= 0x00001000u;
  353. //13 Mode switch RUN
  354. data1 |= (!_isMaintain ? 0x00002000u : 0x0);
  355. //14 Robot Wafer Present No presence
  356. data1 |= (!_isWaferPresent ? 0x00004000u : 0x0);
  357. //15 Cassette Door Door Closed
  358. data1 |= (!_isDoorOpen ? 0x00008000u : 0x0);
  359. return data1;
  360. }
  361. }
  362. }