EfemEntity.cs 43 KB

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  1. using System;
  2. using Aitex.Core.Common;
  3. using Aitex.Core.RT.DataCenter;
  4. using Aitex.Core.RT.Event;
  5. using Aitex.Core.RT.Fsm;
  6. using Aitex.Core.RT.OperationCenter;
  7. using Aitex.Core.RT.SCCore;
  8. using Aitex.Core.Utilities;
  9. using Aitex.Sorter.Common;
  10. using MECF.Framework.Common.Equipment;
  11. using MECF.Framework.Common.Schedulers;
  12. using MECF.Framework.Common.SubstrateTrackings;
  13. using VirgoCommon;
  14. using VirgoRT.Device;
  15. using VirgoRT.Device.YASKAWA;
  16. using VirgoRT.Devices.EFEM;
  17. using VirgoRT.Modules.LPs;
  18. using BAI.Systems.Common.Substrates;
  19. namespace VirgoRT.Modules
  20. {
  21. class EfemEntity : Entity, IEntity, IModuleEntity
  22. {
  23. private int _bigWafer = 0;
  24. private int _midWafer = 0;
  25. private int _smallWafer = 0;
  26. private bool _hasPlacementError = false;
  27. private bool _EnableResetEFEMError = false;
  28. public enum STATE
  29. {
  30. Unknown, // 0
  31. Initializing, // 1
  32. Idle, // 2
  33. Error, // 3
  34. Picking, // 4
  35. Placing, // 5
  36. Aligning, // 6
  37. Mapping, // 7
  38. Init, // 8
  39. Orgshing, // 9
  40. Lifting, // 10
  41. InitingAL, // 11
  42. InitingRB, // 12
  43. Extending, // 13
  44. Retracting, // 14
  45. //SettingLamp, // 15
  46. Swapping,
  47. Gotoing,
  48. Gripping,
  49. Ungripping,
  50. Fliping,
  51. EmsStoping,
  52. SetSpeed,
  53. Loading,
  54. }
  55. public enum MSG
  56. {
  57. HomeAll, // 0
  58. Pick, // 1
  59. Place, // 2
  60. Align, // 3
  61. ActionDone, // 4
  62. RecHwMsg, // 5
  63. MoveCmd, // 6
  64. //LED, // 7
  65. Recover, // 8
  66. Goto, // 9
  67. Error, // 10
  68. Online, // 11
  69. CommReady, // 12
  70. Lift, // 13
  71. HomeAL, // 14
  72. HomeRB, // 15
  73. Extend, // 16
  74. Retract, // 17
  75. PMLiftPinUp, // 18
  76. PMLiftPinDown, // 19
  77. TurnOffBuzzer,
  78. //SwitchOnBuzzerAndRed,
  79. Abort,
  80. Map,
  81. ToInit,
  82. Cool,
  83. PickAndPlace,
  84. Grip,
  85. Ungrip,
  86. Flip,
  87. LiftActionDone,
  88. EmsStop,
  89. SetRobotSpeed,
  90. Load,
  91. }
  92. public enum EfemType
  93. {
  94. FutureEfem = 1,
  95. JetEfem = 2,
  96. BrooksEFEM = 3,
  97. BeamSUNWAY = 4,
  98. }
  99. public bool Check(int msg, out string reason, params object[] args)
  100. {
  101. throw new NotImplementedException();
  102. }
  103. // Fields
  104. //
  105. private readonly string Name;
  106. private readonly Efem _efem;
  107. private readonly LoadPortModule[] _lpms = new LoadPortModule[2];
  108. private readonly EfemType _efemType;
  109. public Efem EfemDevice => _efem;
  110. public EfemType EFEMType => _efemType;
  111. // Constructor
  112. //
  113. public EfemEntity()
  114. {
  115. _smallWafer = SC.GetValue<int>($"System.SmallWafer");
  116. _midWafer = SC.GetValue<int>($"System.MidWafer");
  117. _bigWafer = SC.GetValue<int>($"System.BigWafer");
  118. _efemType = (EfemType)SC.GetValue<int>($"EFEM.EfemType");
  119. _EnableResetEFEMError = SC.GetValue<bool>($"EFEM.EnableResetError");
  120. _efem = new Efem();
  121. Name = ModuleName.EFEM.ToString();
  122. InitFsmMap();
  123. }
  124. public void NotifyLP(ModuleName mod, LoadportEntity.MSG msg)
  125. {
  126. _lpms[mod - ModuleName.LP1].PostMsg(msg);
  127. }
  128. public void NotifyLPError(ModuleName mod )
  129. {
  130. _lpms[mod - ModuleName.LP1].PostMsg(LoadportEntity.MSG.ActionDone);
  131. //_lpms[mod - ModuleName.LP1]..OnError();
  132. }
  133. public void NotifyLP(ModuleName mod, LoadPortModule.MSG msg)
  134. {
  135. _lpms[mod - ModuleName.LP1].PostMsg(msg);
  136. }
  137. public bool IsLPIdle(ModuleName mod)
  138. {
  139. return _lpms[mod - ModuleName.LP1].IsReady;
  140. }
  141. protected override bool Init()
  142. {
  143. _lpms[0] = new LoadPortModule(ModuleName.LP1, _efem);
  144. _lpms[1] = new LoadPortModule(ModuleName.LP2, _efem);
  145. _lpms[0].Initialize();
  146. _lpms[1].Initialize();
  147. OP.Subscribe($"{ModuleName.EFEM}.{EfemOperation.Home}", (cmd, args) => { PostMsg(MSG.HomeAll); return true; });
  148. OP.Subscribe($"{ModuleName.EFEM}.{EfemOperation.ClearError}", (cmd, args) => { PostMsg(MSG.Recover); return true; });
  149. OP.Subscribe($"{ModuleName.EFEM}.{EfemOperation.TurnOffBuzzer}", (cmd, args) => { PostMsg(MSG.TurnOffBuzzer); return true; });
  150. //OP.Subscribe($"{ModuleName.EFEM}.{EfemOperation.SwitchOnBuzzerAndRed}", (cmd, args) => { PostMsg(MSG.SwitchOnBuzzerAndRed); return true; });
  151. OP.Subscribe($"{ModuleName.EFEM}.Online", (cmd, args) => { PostMsg(MSG.Online); return true; });
  152. OP.Subscribe($"{ModuleName.EfemRobot}.{EfemOperation.Pick}", (cmd, args) => { PostMsg(MSG.Pick, args[0], args[1], args[3], args[2]); return true; });
  153. OP.Subscribe($"{ModuleName.EfemRobot}.{EfemOperation.Place}", (cmd, args) => { PostMsg(MSG.Place, args[0], args[1], args[3], args[2]); return true; });
  154. OP.Subscribe($"{ModuleName.EfemRobot}.{EfemOperation.Extend}", (cmd, args) => { PostMsg(MSG.Extend, args[0], args[1], args[2]); return true; });
  155. OP.Subscribe($"{ModuleName.EfemRobot}.{EfemOperation.Retract}", (cmd, args) => { PostMsg(MSG.Retract, args[0], args[1]); return true; });
  156. OP.Subscribe($"{ModuleName.EfemRobot}.{EfemOperation.Abort}", (cmd, args) => { PostMsg(MSG.Abort); return true; });
  157. OP.Subscribe($"{ModuleName.EfemRobot}.{EfemOperation.Home}", (cmd, args) => { PostMsg(MSG.HomeRB, args); return true; });
  158. OP.Subscribe($"{ModuleName.EfemRobot}.{EfemOperation.Grip}", (cmd, args) =>
  159. {
  160. bool isGrip = ((string)args[0]).ToLower() == "on";
  161. PostMsg(isGrip ? MSG.Grip : MSG.Ungrip, args[1]);
  162. return true;
  163. });
  164. OP.Subscribe($"{ModuleName.EfemRobot}.{EfemOperation.Flip}", (cmd, args) => { PostMsg(MSG.Flip, args[0]); return true; });
  165. OP.Subscribe($"{ModuleName.EfemRobot}.{EfemOperation.EmsStop}", (cmd, args) => { PostMsg(MSG.EmsStop); return true; });
  166. OP.Subscribe($"{ModuleName.EfemRobot}.{EfemOperation.SetRobotSpeed}", (cmd, args) => { PostMsg(MSG.SetRobotSpeed, args[0]); return true; });
  167. OP.Subscribe($"{ModuleName.Aligner1}.{EfemOperation.Home}", (cmd, args) => { PostMsg(MSG.HomeAL, ModuleName.Aligner1); return true; });
  168. OP.Subscribe($"{ModuleName.Aligner2}.{EfemOperation.Home}", (cmd, args) => { PostMsg(MSG.HomeAL, ModuleName.Aligner2); return true; });
  169. OP.Subscribe($"{ModuleName.Cooling1}.{EfemOperation.Home}", (cmd, args) => { PostMsg(MSG.HomeAL, ModuleName.Cooling1); return true; });
  170. OP.Subscribe($"{ModuleName.Cooling2}.{EfemOperation.Home}", (cmd, args) => { PostMsg(MSG.HomeAL, ModuleName.Cooling2); return true; });
  171. OP.Subscribe($"{ModuleName.Aligner1}.{EfemOperation.Align}", (cmd, args) => { PostMsg(MSG.Align, ModuleName.Aligner1, args[0]); return true; });
  172. OP.Subscribe($"{ModuleName.Aligner2}.{EfemOperation.Align}", (cmd, args) => { PostMsg(MSG.Align, ModuleName.Aligner2, args[0]); return true; });
  173. OP.Subscribe($"{ModuleName.Cooling1}.{EfemOperation.Align}", (cmd, args) => { PostMsg(MSG.Align, ModuleName.Cooling1, args[0]); return true; });
  174. OP.Subscribe($"{ModuleName.Cooling2}.{EfemOperation.Align}", (cmd, args) => { PostMsg(MSG.Align, ModuleName.Cooling2, args[0]); return true; });
  175. OP.Subscribe($"{ModuleName.Aligner1}.{EfemOperation.Lift}", (cmd, args) => { PostMsg(MSG.Lift, ModuleName.Aligner1); return true; });
  176. OP.Subscribe($"{ModuleName.Aligner2}.{EfemOperation.Lift}", (cmd, args) => { PostMsg(MSG.Lift, ModuleName.Aligner2); return true; });
  177. OP.Subscribe($"{ModuleName.Cooling1}.{EfemOperation.Lift}", (cmd, args) => { PostMsg(MSG.Lift, ModuleName.Cooling1); return true; });
  178. OP.Subscribe($"{ModuleName.Cooling2}.{EfemOperation.Lift}", (cmd, args) => { PostMsg(MSG.Lift, ModuleName.Cooling2); return true; });
  179. DATA.Subscribe($"{Name}.FsmState", () => ((STATE)fsm.State).ToString());
  180. DATA.Subscribe($"{Name}.FsmPrevState", () => ((STATE)fsm.PrevState).ToString());
  181. DATA.Subscribe($"{Name}.FsmLastMessage", GetFsmLastMessage);
  182. DATA.Subscribe($"{Name}.SmallWafer", () => _smallWafer);
  183. DATA.Subscribe($"{Name}.BigWafer", () => _bigWafer);
  184. DATA.Subscribe($"{Name}.MidWafer", () => _midWafer);
  185. DATA.Subscribe($"{Name}.HasPlacementError", () => _hasPlacementError);
  186. return true;
  187. }
  188. private void InitFsmMap()
  189. {
  190. fsm = new StateMachine<EfemEntity>("EFEM", (int)STATE.Unknown, 50);
  191. fsm.EnableRepeatedMsg(true);
  192. AnyStateTransition(FSM_MSG.TIMER, fnMonitor, FSM_STATE.SAME);
  193. AnyStateTransition(MSG.RecHwMsg, fnRecMsg, FSM_STATE.SAME);
  194. //AnyStateTransition(MSG.LED, fnSetLED, STATE.SettingLamp);
  195. AnyStateTransition(MSG.TurnOffBuzzer, fnTurnOffBuzzer, FSM_STATE.SAME);
  196. //AnyStateTransition(MSG.SwitchOnBuzzerAndRed, fnSwitchOnBuzzerAndRed, FSM_STATE.SAME);
  197. AnyStateTransition(MSG.Recover, fnRecover, FSM_STATE.SAME);
  198. AnyStateTransition(MSG.Error, fnError, STATE.Error);
  199. AnyStateTransition(MSG.Online, fnOnline, FSM_STATE.SAME);
  200. AnyStateTransition(MSG.Abort, fnAbortRobot, STATE.Idle);
  201. AnyStateTransition(MSG.ToInit, fnToInit, STATE.Init);
  202. AnyStateTransition((int)FSM_MSG.ALARM, fnError, (int)STATE.Error);
  203. EnterExitTransition<STATE, FSM_MSG>(STATE.Initializing, fnEnterExecute, FSM_MSG.NONE, fnExitExecute);
  204. EnterExitTransition<STATE, FSM_MSG>(STATE.InitingRB, fnEnterExecute, FSM_MSG.NONE, null);
  205. EnterExitTransition<STATE, FSM_MSG>(STATE.InitingAL, fnEnterExecute, FSM_MSG.NONE, null);
  206. EnterExitTransition<STATE, FSM_MSG>(STATE.Picking, fnEnterExecute, FSM_MSG.NONE, fnExitExecute);
  207. EnterExitTransition<STATE, FSM_MSG>(STATE.Gotoing, fnEnterExecute, FSM_MSG.NONE, fnExitExecute);
  208. EnterExitTransition<STATE, FSM_MSG>(STATE.Placing, fnEnterExecute, FSM_MSG.NONE, fnExitExecute);
  209. EnterExitTransition<STATE, FSM_MSG>(STATE.Swapping, fnEnterExecute, FSM_MSG.NONE, fnExitExecute);
  210. EnterExitTransition<STATE, FSM_MSG>(STATE.Extending, fnEnterExecute, FSM_MSG.NONE, fnExitExecute);
  211. EnterExitTransition<STATE, FSM_MSG>(STATE.Retracting, fnEnterExecute, FSM_MSG.NONE, fnExitExecute);
  212. EnterExitTransition<STATE, FSM_MSG>(STATE.Lifting, fnEnterExecute, FSM_MSG.NONE, null);
  213. EnterExitTransition<STATE, FSM_MSG>(STATE.Aligning, fnEnterExecute, FSM_MSG.NONE, null);
  214. EnterExitTransition<STATE, FSM_MSG>(STATE.Mapping, fnEnterExecute, FSM_MSG.NONE, fnExitExecute);
  215. EnterExitTransition<STATE, FSM_MSG>(STATE.Gripping, fnEnterExecute, FSM_MSG.NONE, null);
  216. EnterExitTransition<STATE, FSM_MSG>(STATE.Ungripping, fnEnterExecute, FSM_MSG.NONE, null);
  217. EnterExitTransition<STATE, FSM_MSG>(STATE.Fliping, fnEnterExecute, FSM_MSG.NONE, fnExitExecute);
  218. EnterExitTransition<STATE, FSM_MSG>(STATE.EmsStoping, fnEnterExecute, FSM_MSG.NONE, fnExitExecute);
  219. EnterExitTransition<STATE, FSM_MSG>(STATE.SetSpeed, fnEnterExecute, FSM_MSG.NONE, fnExitExecute);
  220. EnterExitTransition<STATE, FSM_MSG>(STATE.Loading, fnEnterExecute, FSM_MSG.NONE, fnExitExecute);
  221. Transition(STATE.Unknown, MSG.CommReady, null, STATE.Init);
  222. // Home
  223. Transition(STATE.Init, MSG.HomeAll, fnHomeAll, STATE.Initializing);
  224. Transition(STATE.Idle, MSG.HomeAll, fnHomeAll, STATE.Initializing); // 暂时加,出错的时候做 HOME
  225. Transition(STATE.Error, MSG.HomeAll, fnHomeAll, STATE.Initializing);
  226. Transition(STATE.Initializing, MSG.ActionDone, fnActionDone, STATE.Orgshing);
  227. Transition(STATE.Orgshing, MSG.ActionDone, fnActionDone, STATE.Idle);
  228. Transition(STATE.Idle, MSG.HomeRB, fnHomeRobot, STATE.InitingRB);
  229. Transition(STATE.InitingRB, MSG.ActionDone, null, STATE.Idle);
  230. //Transition(STATE.SettingLamp, MSG.ActionDone, fnSetLampDone, STATE.Idle);
  231. // Pick
  232. Transition(STATE.Idle, MSG.Pick, fnPick, STATE.Picking);
  233. Transition(STATE.Picking, MSG.ActionDone, fnActionDone, STATE.Idle);
  234. Transition(STATE.Picking, MSG.PMLiftPinUp, fnPmPinUp, STATE.Idle);
  235. Transition(STATE.Picking, MSG.PMLiftPinDown, fnPmPinDown, STATE.Idle);
  236. // Place
  237. Transition(STATE.Idle, MSG.Place, fnPlace, STATE.Placing);
  238. Transition(STATE.Placing, MSG.ActionDone, fnActionDone, STATE.Idle);
  239. Transition(STATE.Placing, MSG.PMLiftPinUp, fnPmPinUp, STATE.Idle);
  240. Transition(STATE.Placing, MSG.PMLiftPinDown, fnPmPinDown, STATE.Idle);
  241. // PickAndPlace
  242. Transition(STATE.Idle, MSG.PickAndPlace, fnSwap, STATE.Swapping);
  243. Transition(STATE.Swapping, MSG.ActionDone, fnActionDone, STATE.Idle);
  244. Transition(STATE.Swapping, MSG.PMLiftPinUp, fnPmPinUp, STATE.Idle);
  245. Transition(STATE.Swapping, MSG.PMLiftPinDown, fnPmPinDown, STATE.Idle);
  246. // Goto
  247. Transition(STATE.Idle, MSG.Goto, fnGoto, STATE.Gotoing);
  248. Transition(STATE.Gotoing, MSG.ActionDone, fnActionDone, STATE.Idle);
  249. // Extend
  250. Transition(STATE.Idle, MSG.Extend, fnExtend, STATE.Extending);
  251. Transition(STATE.Extending, MSG.ActionDone, fnActionDone, STATE.Idle);
  252. // Retract
  253. Transition(STATE.Idle, MSG.Retract, fnRetract, STATE.Retracting);
  254. Transition(STATE.Retracting, MSG.ActionDone, fnActionDone, STATE.Idle);
  255. // Map
  256. Transition(STATE.Idle, MSG.Map, fnMap, STATE.Mapping);
  257. Transition(STATE.Mapping, MSG.ActionDone, fnActionDone, STATE.Idle);
  258. // Grip
  259. Transition(STATE.Idle, MSG.Grip, fnGrip, STATE.Gripping);
  260. Transition(STATE.Gripping, MSG.ActionDone, fnActionDone, STATE.Idle);
  261. // Ungrip
  262. Transition(STATE.Idle, MSG.Ungrip, fnUngrip, STATE.Ungripping);
  263. Transition(STATE.Ungripping, MSG.ActionDone, fnActionDone, STATE.Idle);
  264. // Aligner
  265. Transition(STATE.Idle, MSG.HomeAL, fnHomeAligner, STATE.InitingAL);
  266. Transition(STATE.InitingAL, MSG.ActionDone, fnActionDone, STATE.Idle);
  267. Transition(STATE.Idle, MSG.Lift, fnLift, STATE.Lifting);
  268. Transition(STATE.Lifting, MSG.LiftActionDone, fnActionDone, STATE.Idle);
  269. Transition(STATE.Idle, MSG.Align, fnAlign, STATE.Aligning);
  270. Transition(STATE.Aligning, MSG.ActionDone, fnActionDone, STATE.Idle);
  271. // Flip
  272. Transition(STATE.Idle, MSG.Flip, fnFlip, STATE.Fliping);
  273. Transition(STATE.Fliping, MSG.ActionDone, fnActionDone, STATE.Idle);
  274. // EmsStop
  275. Transition(STATE.Idle, MSG.EmsStop, fnEmsStop, STATE.EmsStoping);
  276. Transition(STATE.EmsStoping, MSG.ActionDone, fnActionDone, STATE.Idle);
  277. // Set Robot Speed
  278. Transition(STATE.Idle, MSG.SetRobotSpeed, fnSetRobotSpeed, STATE.SetSpeed);
  279. Transition(STATE.SetSpeed, MSG.ActionDone, fnActionDone, STATE.Idle);
  280. // Load Foup
  281. Transition(STATE.Idle, MSG.Load, fnLoadFoup, STATE.Loading);
  282. Transition(STATE.Loading, MSG.ActionDone, fnActionDone, STATE.Idle);
  283. EnumLoop<STATE>.ForEach((item) => { fsm.MapState((int)item, item.ToString()); });
  284. EnumLoop<MSG>.ForEach((item) => { fsm.MapMessage((int)item, item.ToString()); });
  285. }
  286. private bool fnHomeAll(object[] param)
  287. {
  288. _efem.ClearActions();
  289. _efem.HomeAll();
  290. return true;
  291. }
  292. private bool fnHomeRobot(object[] param)
  293. {
  294. _efem.ClearActions();
  295. _efem.Home(ModuleName.EfemRobot, (string)param[0]);
  296. return true;
  297. }
  298. private bool fnHomeAligner(object[] param)
  299. {
  300. // module
  301. ModuleName unit = ModuleName.EFEM;
  302. if (param[0] is string s1)
  303. unit = ModuleNameString.ToEnum(s1);
  304. else if (param[0] is ModuleName mod)
  305. unit = mod;
  306. else
  307. throw new ArgumentException("Argument error");
  308. _efem.Home(unit, "");
  309. return true;
  310. }
  311. private bool fnEnterExecute(object[] param)
  312. {
  313. if(!_efem.HasUncompleteActions)
  314. _efem.ExecuteAction();
  315. return false;
  316. }
  317. private bool fnExitExecute(object[] param)
  318. {
  319. if (!_efem.HasUncompleteActions)
  320. _efem.ExecuteAction();
  321. return false;
  322. }
  323. private bool fnActionDone(object[] param)
  324. {
  325. try
  326. {
  327. EfemOperation actionType = (EfemOperation)param[0];
  328. if (((fsm.State == (int)STATE.Orgshing) && (actionType == EfemOperation.Orgsh || actionType == EfemOperation.Home || actionType == EfemOperation.BFVALVE)) ||
  329. (fsm.State == (int)STATE.Initializing && actionType == EfemOperation.ClearError) ||
  330. (fsm.State == (int)STATE.Extending) ||
  331. (fsm.State == (int)STATE.Picking) ||
  332. (fsm.State == (int)STATE.Placing) ||
  333. (fsm.State == (int)STATE.Swapping) ||
  334. (fsm.State == (int)STATE.Aligning) ||
  335. (fsm.State == (int)STATE.Fliping))
  336. {
  337. if (_efem.HasActions || _efem.HasUncompleteActions)
  338. {
  339. if(!_efem.HasUncompleteActions)
  340. {
  341. _efem.ExecuteAction();
  342. }
  343. return false;
  344. }
  345. }
  346. return true;
  347. }
  348. catch (Exception ex)
  349. {
  350. EV.PostAlarmLog(ModuleName.EFEM.ToString(), ex.Message);
  351. return true;
  352. }
  353. }
  354. public bool CheckToPostMessage(int msg, params object[] args)
  355. {
  356. if (!fsm.FindTransition(fsm.State, msg))
  357. {
  358. EV.PostWarningLog(Name, $"{Name} is in {(STATE)fsm.State} state,can not do {(MSG)msg}");
  359. return false;
  360. }
  361. Running = true;
  362. fsm.PostMsg(msg, args);
  363. return true;
  364. }
  365. private bool fnRecMsg(object[] param)
  366. {
  367. if (param == null) return false;
  368. string strHwMsg = param[0] as string;
  369. if (_efem is EfemBase device)
  370. {
  371. device.ReceiveMessage(strHwMsg);
  372. return true;
  373. }
  374. return false;
  375. }
  376. private bool fnMonitor(object[] param)
  377. {
  378. STATE curSt = (STATE)fsm.State;
  379. if (curSt == STATE.Initializing || curSt == STATE.Mapping || curSt == STATE.Picking || curSt == STATE.Placing
  380. || curSt == STATE.Orgshing || curSt == STATE.Lifting || curSt == STATE.Extending || curSt == STATE.Retracting
  381. || curSt == STATE.InitingAL || curSt == STATE.InitingRB)
  382. {
  383. int time = SC.GetValue<int>("EFEM.MotionTimeout");
  384. if (fsm.ElapsedTime > time * 1000)
  385. {
  386. EV.PostAlarmLog("EFEM", $"Can not complete motion {curSt} in {time} seconds. ");
  387. PostMsg(MSG.Error);
  388. }
  389. }
  390. else if (curSt == STATE.Aligning)
  391. {
  392. int _timeout = SC.GetValue<int>("EFEM.AlignerTimeout");
  393. if (fsm.ElapsedTime > _timeout * 1000)
  394. {
  395. EV.PostAlarmLog(ModuleName.Aligner.ToString(), "Align timeout");
  396. PostMsg(MSG.Error);
  397. }
  398. }
  399. else if (curSt == STATE.Idle)
  400. {
  401. if (_efem.HasActions && !_efem.HasUncompleteActions)
  402. {
  403. _efem.ExecuteAction();
  404. }
  405. }
  406. if (_efemType == EfemType.BrooksEFEM && (SC.GetValue<bool>("EFEM.LoadPort.EnableDockUndock") == false))
  407. {
  408. _efem.QueryLPState();
  409. }
  410. // update Loadport wafer placement parity error status
  411. _hasPlacementError = _efem[ModuleName.LP1].HasPlacementError || _efem[ModuleName.LP2].HasPlacementError;
  412. return true;
  413. }
  414. private bool fnOnline(object[] param)
  415. {
  416. bool bOnlineFlag = (bool)param[0];
  417. if (_efem is EfemBase efem)
  418. {
  419. efem.SetOnline(bOnlineFlag);
  420. }
  421. return true;
  422. }
  423. private string GetFsmLastMessage()
  424. {
  425. int msg = fsm.LastMsg;
  426. if (msg >= (int)MSG.HomeAll && msg <= (int)MSG.Error)
  427. return ((MSG)msg).ToString();
  428. if (msg == (int)FSM_MSG.TIMER)
  429. return "Timer";
  430. return msg.ToString();
  431. }
  432. private bool fnError(object[] param)
  433. {
  434. return true;
  435. }
  436. private bool fnToInit(object[] param)
  437. {
  438. return true;
  439. }
  440. private bool fnRecover(object[] param)
  441. {
  442. _efem.ClearActions();
  443. _efem.ClearError();
  444. //_efem.ExecuteAction();
  445. return true;
  446. }
  447. private bool fnAbortRobot(object[] param)
  448. {
  449. _efem.ClearActions();
  450. _efem.AbortRobot();
  451. //_efem.ExecuteAction();
  452. return true;
  453. }
  454. private bool fnSetLED(object[] param)
  455. {
  456. LightType light = (LightType)param[0];
  457. LightStatus st = (LightStatus)param[1];
  458. _efem.SetLamp(light, st);
  459. return true;
  460. }
  461. private bool fnTurnOffBuzzer(object[] param)
  462. {
  463. _efem.TurnOffBuzzer();
  464. return false;
  465. }
  466. //private bool fnSwitchOnBuzzerAndRed(object[] param)
  467. //{
  468. // _efem.SwitchOnBuzzerAndRed();
  469. // return false;
  470. //}
  471. //
  472. private bool fnSetLampDone(object[] param)
  473. {
  474. if (_efem.HasActions && !_efem.HasUncompleteActions)
  475. {
  476. _efem.ExecuteAction();
  477. return false;
  478. }
  479. else
  480. {
  481. return true;
  482. }
  483. }
  484. private bool fnPick(object[] param)
  485. {
  486. // module
  487. ModuleName unit = ModuleName.EFEM;
  488. if (param[0] is string s1)
  489. unit = ModuleNameString.ToEnum(s1);
  490. else if (param[0] is ModuleName mod)
  491. unit = mod;
  492. else
  493. throw new ArgumentException("Argument error");
  494. // slot
  495. byte slot = (byte)(int)param[1];
  496. // hand
  497. Hand arm = (Hand)Enum.Parse(typeof(Hand), param[2].ToString());
  498. // wafer size
  499. WaferSize ws1 = WaferSize.WS0;
  500. if (param[3] is string s2)
  501. {
  502. if (Enum.TryParse(s2, out WaferSize p5))
  503. ws1 = p5;
  504. }
  505. else if (param[3] is WaferSize p6)
  506. {
  507. ws1 = p6;
  508. }
  509. MoveParam mp = new MoveParam(unit, slot, ModuleName.EfemRobot, (byte)arm, arm, ws1);
  510. if (!_efem.Pick(mp))
  511. return false;
  512. return true;
  513. }
  514. private bool fnPlace(object[] param)
  515. {
  516. // module
  517. ModuleName unit = ModuleName.EFEM;
  518. if (param[0] is string s1)
  519. unit = ModuleNameString.ToEnum(s1);
  520. else if (param[0] is ModuleName mod)
  521. unit = mod;
  522. else
  523. throw new ArgumentException("Argument error");
  524. // slot
  525. byte slot = (byte)(int)param[1];
  526. // hand
  527. Hand arm = (Hand)Enum.Parse(typeof(Hand), param[2].ToString());
  528. // wafer size
  529. WaferSize ws1 = WaferSize.WS0;
  530. if (param[3] is string s2)
  531. {
  532. if (Enum.TryParse(s2, out WaferSize p5))
  533. ws1 = p5;
  534. }
  535. else if (param[3] is WaferSize p6)
  536. {
  537. ws1 = p6;
  538. }
  539. MoveParam mp = new MoveParam(ModuleName.EfemRobot, (byte)arm, unit, slot, arm, ws1);
  540. if (!_efem.Place(mp))
  541. return false;
  542. return true;
  543. }
  544. private bool fnGoto(object[] param)
  545. {
  546. // module
  547. ModuleName unit = ModuleName.EFEM;
  548. if (param[0] is string s1)
  549. unit = ModuleNameString.ToEnum(s1);
  550. else if (param[0] is ModuleName mod)
  551. unit = mod;
  552. else
  553. throw new ArgumentException("Argument error");
  554. // slot
  555. byte slot = (byte)(int)param[1];
  556. Hand arm = Hand.Blade1;
  557. WaferSize ws = WaferSize.WS6;
  558. if (WaferManager.Instance.CheckHasWafer(ModuleName.EfemRobot, 0))
  559. {
  560. arm = Hand.Blade1;
  561. ws = WaferManager.Instance.GetWafer(ModuleName.EfemRobot, 0).Size;
  562. }
  563. else if (WaferManager.Instance.CheckHasWafer(ModuleName.EfemRobot, 1))
  564. {
  565. arm = Hand.Blade2;
  566. ws = WaferManager.Instance.GetWafer(ModuleName.EfemRobot, 1).Size;
  567. }
  568. MoveParam mp = new MoveParam(unit, slot, unit, slot, arm, ws);
  569. _efem.Goto(mp);
  570. return true;
  571. }
  572. private bool fnSwap(object[] param)
  573. {
  574. // module
  575. ModuleName unit = ModuleName.EFEM;
  576. if (param[0] is string s1)
  577. unit = ModuleNameString.ToEnum(s1);
  578. else if (param[0] is ModuleName mod)
  579. unit = mod;
  580. else
  581. throw new ArgumentException("Argument error");
  582. // pickSlot
  583. byte pickSlot = (byte)(int)param[1];
  584. // pick hand
  585. Hand pickArm = (Hand)Enum.Parse(typeof(Hand), param[2].ToString());
  586. // wafer size
  587. WaferSize ws1 = WaferSize.WS0;
  588. if (param[5] is string s2)
  589. {
  590. if (Enum.TryParse(s2, out WaferSize p5))
  591. ws1 = p5;
  592. }
  593. else if (param[5] is WaferSize p6)
  594. {
  595. ws1 = p6;
  596. }
  597. MoveParam pickParam = new MoveParam(unit, pickSlot, ModuleName.EfemRobot, (byte)pickArm, pickArm, ws1);
  598. // place slot
  599. byte placeSlot = (byte)(int)param[4];
  600. // hand
  601. Hand placeArm = (Hand)Enum.Parse(typeof(Hand), param[3].ToString());
  602. MoveParam placeParam = new MoveParam(ModuleName.EfemRobot, (byte)placeArm, unit, placeSlot, placeArm, ws1);
  603. _efem.PickAndPlace(pickParam, placeParam);
  604. return true;
  605. }
  606. private bool fnExtend(object[] param)
  607. {
  608. // module
  609. ModuleName unit = ModuleName.EFEM;
  610. if (param[0] is string s1)
  611. unit = ModuleNameString.ToEnum(s1);
  612. else if (param[0] is ModuleName mod)
  613. unit = mod;
  614. else
  615. throw new ArgumentException("Argument error");
  616. Hand arm = (Hand)Enum.Parse(typeof(Hand), (string)param[2]);
  617. ExtendParam mp = new ExtendParam
  618. {
  619. Module = unit,
  620. Arm = arm,
  621. Pos = (ExtendPos)Enum.Parse(typeof(ExtendPos), param[1] as string)
  622. };
  623. if (!_efem.Extend(mp))
  624. return false;
  625. return true;
  626. }
  627. private bool fnRetract(object[] param)
  628. {
  629. // module
  630. ModuleName unit = ModuleName.EFEM;
  631. if (param[0] is string s1)
  632. unit = ModuleNameString.ToEnum(s1);
  633. else if (param[0] is ModuleName mod)
  634. unit = mod;
  635. else
  636. throw new ArgumentException("Argument error");
  637. Hand arm = (Hand)Enum.Parse(typeof(Hand), (string)param[2]);
  638. ExtendParam mp = new ExtendParam
  639. {
  640. Module = unit,
  641. Arm = arm,
  642. Pos = (ExtendPos)Enum.Parse(typeof(ExtendPos), param[1] as string)
  643. };
  644. if (!_efem.Retract(mp))
  645. return false;
  646. return true;
  647. }
  648. private bool fnPmPinUp(object[] param)
  649. {
  650. _efem.UpdateStatus((ushort)param[0], ActionStatus.Completed);
  651. if (_efem.HasActions && !_efem.HasUncompleteActions)
  652. {
  653. _efem.ExecuteAction();
  654. return false;
  655. }
  656. else
  657. {
  658. return true;
  659. }
  660. }
  661. private bool fnPmPinDown(object[] param)
  662. {
  663. _efem.UpdateStatus((ushort)param[0], ActionStatus.Completed);
  664. if (_efem.HasActions && !_efem.HasUncompleteActions)
  665. {
  666. _efem.ExecuteAction();
  667. return false;
  668. }
  669. else
  670. {
  671. return true;
  672. }
  673. }
  674. private bool fnLift(object[] param)
  675. {
  676. // module
  677. ModuleName unit = ModuleName.EFEM;
  678. if (param[0] is string s1)
  679. unit = ModuleNameString.ToEnum(s1);
  680. else if (param[0] is ModuleName mod)
  681. unit = mod;
  682. else
  683. throw new ArgumentException("Argument error");
  684. bool isUp = true;
  685. if (param.Length > 1)
  686. {
  687. isUp = (bool) param[1];
  688. }
  689. if (isUp)
  690. {
  691. if (!_efem.SetPinUp(unit))
  692. return false;
  693. }
  694. else
  695. {
  696. if (!_efem.SetPinDown(unit))
  697. return false;
  698. }
  699. return true;
  700. }
  701. private bool fnAlign(object[] param)
  702. {
  703. // module
  704. ModuleName unit = ModuleName.EFEM;
  705. if (param[0] is string s1)
  706. unit = ModuleNameString.ToEnum(s1);
  707. else if (param[0] is ModuleName mod)
  708. unit = mod;
  709. else
  710. throw new ArgumentException("Argument error");
  711. // wafer size
  712. WaferSize ws1 = WaferSize.WS0;
  713. if (param[1] is string s2)
  714. {
  715. if (Enum.TryParse(s2, out WaferSize p5))
  716. ws1 = p5;
  717. }
  718. else if (param[1] is WaferSize p6)
  719. {
  720. ws1 = p6;
  721. }
  722. if (!_efem.Align(unit, 1000, ws1))
  723. return false;
  724. return true;
  725. }
  726. private bool fnMap(object[] param)
  727. {
  728. // module
  729. ModuleName unit = ModuleName.EFEM;
  730. if (param[0] is string s1)
  731. unit = ModuleNameString.ToEnum(s1);
  732. else if (param[0] is ModuleName mod)
  733. unit = mod;
  734. else
  735. throw new ArgumentException("Argument error");
  736. if (!_efem.Map(unit))
  737. return false;
  738. return true;
  739. }
  740. private bool fnGrip(object[] param)
  741. {
  742. Hand arm = (Hand)Enum.Parse(typeof(Hand), (string)param[0]);
  743. if (!_efem.Grip(arm, true))
  744. return false;
  745. return true;
  746. }
  747. private bool fnUngrip(object[] param)
  748. {
  749. Hand arm = (Hand)Enum.Parse(typeof(Hand), (string)param[0]);
  750. if (!_efem.Grip(arm, false))
  751. return false;
  752. return true;
  753. }
  754. private bool fnFlip(object[] param)
  755. {
  756. string orient = (string)param[0];
  757. if (!_efem.Flip(orient))
  758. return false;
  759. return true;
  760. }
  761. private bool fnEmsStop(object[] param)
  762. {
  763. if (!_efem.EmsStop())
  764. return false;
  765. return true;
  766. }
  767. private bool fnSetRobotSpeed(object[] param)
  768. {
  769. string speed = (string)param[0];
  770. if (!_efem.SetSpeed(speed))
  771. return false;
  772. return true;
  773. }
  774. private bool fnLoadFoup(object[] param)
  775. {
  776. ModuleName lp = ModuleHelper.Converter((string)param[0]);
  777. if (!_efem.Load(lp))
  778. return false;
  779. return true;
  780. }
  781. public bool IsIdle
  782. {
  783. get { return fsm.State == (int)STATE.Idle; }
  784. }
  785. public bool IsError
  786. {
  787. get { return fsm.State == (int)STATE.Error; }
  788. }
  789. public bool IsInit
  790. {
  791. get { return fsm.State == (int)STATE.Unknown || fsm.State==(int)STATE.Init; }
  792. }
  793. public bool IsBusy
  794. {
  795. get { return !IsInit && !IsError && !IsIdle; }
  796. }
  797. public bool IsOnline { get; internal set; }
  798. public int Invoke(string function, params object[] args)
  799. {
  800. switch (function)
  801. {
  802. case "Home":
  803. CheckToPostMessage((int)MSG.HomeAll);
  804. return (int)MSG.HomeAll;
  805. }
  806. return (int)FSM_MSG.NONE;
  807. }
  808. public bool CheckAcked(int msg)
  809. {
  810. return fsm.CheckExecuted(msg);
  811. }
  812. internal void InvokeReset()
  813. {
  814. if (_EnableResetEFEMError && fsm.State == (int) STATE.Error)
  815. {
  816. PostMsg((int)MSG.Recover);
  817. }
  818. }
  819. public int InvokeAlign(string module, float time)
  820. {
  821. if (CheckToPostMessage((int)MSG.Align, module, time))
  822. return (int)MSG.Align;
  823. return (int)FSM_MSG.NONE;
  824. }
  825. public int InvokeLiftDown(string module)
  826. {
  827. if (CheckToPostMessage((int)MSG.Lift, module, false))
  828. return (int)MSG.Lift;
  829. return (int)FSM_MSG.NONE;
  830. }
  831. public int InvokePick(ModuleName source, int slot, Hand hand, WaferSize size)
  832. {
  833. if (CheckToPostMessage((int)MSG.Pick, source, slot, hand, size))
  834. return (int)MSG.Pick;
  835. return (int)FSM_MSG.NONE;
  836. }
  837. public int InvokeGoto(ModuleName source, int slot)
  838. {
  839. if (CheckToPostMessage((int)MSG.Goto, source, slot))
  840. return (int)MSG.Goto;
  841. return (int)FSM_MSG.NONE;
  842. }
  843. public int InvokePlace(ModuleName target, int slot, Hand hand, WaferSize size)
  844. {
  845. if (CheckToPostMessage((int)MSG.Place, target, slot, hand, size))
  846. return (int)MSG.Place;
  847. return (int)FSM_MSG.NONE;
  848. }
  849. public int InvokePickAndPlace(ModuleName targetModule, Hand pickHand, int pickSlot, Hand placeHand, int placeSlot, WaferSize size)
  850. {
  851. if (CheckToPostMessage((int)MSG.PickAndPlace, targetModule, pickSlot, pickHand, placeHand, placeSlot, size))
  852. return (int)MSG.PickAndPlace;
  853. return (int)FSM_MSG.NONE;
  854. }
  855. public int InvokeMap(string target )
  856. {
  857. if (CheckToPostMessage((int)MSG.Map, target ))
  858. return (int)MSG.Map;
  859. return (int)FSM_MSG.NONE;
  860. }
  861. public int InvokeFlip(string orient)
  862. {
  863. if (CheckToPostMessage((int)MSG.Flip, orient))
  864. return (int)MSG.Flip;
  865. return (int)FSM_MSG.NONE;
  866. }
  867. public bool IsPrepareTransferReady(ModuleName module, EnumTransferType type, int slot)
  868. {
  869. if (type == EnumTransferType.Pick)
  870. {
  871. //需要补充:判断LP 放好了,而且已经map过。
  872. return _efem[module].HasCassette && _efem[module].IsMapped;
  873. }
  874. else if (type == EnumTransferType.Place)
  875. {
  876. //需要补充:判断LP 放好了,而且已经map过。
  877. return _efem[module].HasCassette && _efem[module].IsMapped;
  878. }
  879. return false;
  880. }
  881. internal bool CheckReadyRunNewJob(ModuleName module)
  882. {
  883. //???
  884. return true;
  885. }
  886. internal bool CheckReadyTransfer(ModuleName module)
  887. {
  888. return _efem[module].HasCassette && _efem[module].IsMapped;
  889. }
  890. internal bool CheckPlaced(ModuleName module)
  891. {
  892. return _efem[module].HasCassette;
  893. }
  894. internal void NoteJobStart(ModuleName module)
  895. {
  896. _efem[module].NoteJobStart();
  897. }
  898. internal void NoteJobComplete(ModuleName module)
  899. {
  900. _efem[module].NoteJobComplete();
  901. }
  902. internal string GetCarrierID(ModuleName module)
  903. {
  904. return _efem[module].CarrierId;
  905. }
  906. }
  907. /// <summary>
  908. /// LP entity
  909. /// </summary>
  910. class LoadportEntity : Entity, IEntity
  911. {
  912. private enum STATE
  913. {
  914. Unknown,
  915. Idle, // 1
  916. Initializing, // 2
  917. Initialized, // 3
  918. Mapping, // 4
  919. Mapped, // 5
  920. }
  921. public enum MSG
  922. {
  923. Home, // 0
  924. Map, // 1
  925. ActionDone, // 2
  926. RecHwMsg, // 3
  927. Recover, // 4
  928. Abort, // 5
  929. Online, // 6
  930. Error // 7
  931. }
  932. private readonly Efem _efem;
  933. private ModuleName Module { get; }
  934. public LoadportEntity(ModuleName mod, Efem efem)
  935. {
  936. this.Module = mod;
  937. _efem = efem;
  938. InitFsmMap();
  939. OP.Subscribe($"{Module}.Home", (cmd, args) => { PostMsg(MSG.Home); return true; });
  940. OP.Subscribe($"{Module}.Abort", (cmd, args) => { PostMsg(MSG.Abort); return true; });
  941. //OP.Subscribe($"{Module}.Map", (cmd, args) => { PostMsg(MSG.Map); return true; });
  942. OP.Subscribe($"{Module}.Online", (cmd, args) => { PostMsg(MSG.Online); return true; });
  943. DATA.Subscribe($"{Module}.Status", () => ((STATE)fsm.State).ToString());
  944. DATA.Subscribe($"{Module}.FsmState", () => ((STATE)fsm.State).ToString());
  945. DATA.Subscribe($"{Module}.FsmPrevState", () => ((STATE)fsm.PrevState).ToString());
  946. DATA.Subscribe($"{Module}.FsmLastMessage", GetFsmLastMessage);
  947. }
  948. private string GetFsmLastMessage()
  949. {
  950. int msg = fsm.LastMsg;
  951. if (msg >= (int)MSG.Home && msg <= (int)MSG.Error)
  952. return ((MSG)msg).ToString();
  953. if (msg == (int)FSM_MSG.TIMER)
  954. return "Timer";
  955. return msg.ToString();
  956. }
  957. private void InitFsmMap()
  958. {
  959. fsm = new StateMachine<LoadportEntity>($"LPM_{Module}", (int)STATE.Idle, 500);
  960. AnyStateTransition(FSM_MSG.TIMER, fnMonitor, FSM_STATE.SAME);
  961. //AnyStateTransition(MSG.RecHwMsg, fnRecMsg, FSM_STATE.SAME);
  962. AnyStateTransition(MSG.Online, fnOnline, FSM_STATE.SAME);
  963. AnyStateTransition(MSG.Recover, fnRecover, STATE.Idle);
  964. AnyStateTransition(MSG.Abort, fnRecover, STATE.Idle);
  965. EnterExitTransition<STATE, FSM_MSG>(STATE.Initializing, fnEnterExecute, FSM_MSG.NONE, fnExitExecute);
  966. // Home
  967. AnyStateTransition(MSG.Home, fnHome, STATE.Initializing);
  968. Transition(STATE.Initializing, MSG.ActionDone, fnActionDone, STATE.Idle);
  969. }
  970. private bool fnOnline(object[] param)
  971. {
  972. bool online = (bool)param[0];
  973. _efem.SetOnline(Module, online);
  974. return true;
  975. }
  976. private bool fnRecover(object[] param)
  977. {
  978. return true;
  979. }
  980. private bool fnMonitor(object[] param)
  981. {
  982. STATE curSt = (STATE)fsm.State;
  983. if (curSt == STATE.Initializing || curSt == STATE.Mapping)
  984. {
  985. if (fsm.ElapsedTime > 20 * 1000)
  986. {
  987. PostMsg(MSG.Recover);
  988. }
  989. }
  990. return true;
  991. }
  992. private bool fnEnterExecute(object[] param)
  993. {
  994. _efem.ExecuteAction();
  995. return true;
  996. }
  997. private bool fnExitExecute(object[] param)
  998. {
  999. return true;
  1000. }
  1001. private bool fnActionDone(object[] param)
  1002. {
  1003. return true;
  1004. }
  1005. private bool fnHome(object[] param)
  1006. {
  1007. _efem.Home(Module, ModuleName.EFEM.ToString());
  1008. return true;
  1009. }
  1010. public bool Check(int msg, out string reason, params object[] args)
  1011. {
  1012. throw new NotImplementedException();
  1013. }
  1014. }
  1015. }