| 123456789101112131415161718192021222324252627282930313233343536373839404142434445464748495051525354555657585960616263646566676869707172737475767778798081828384858687888990919293949596979899100101102103104105106107108109110111112113114115116117118119120121122123124125126127128129130131132133134135136137138139140141142143144145146147148149150151152153154155156157158159160161162163164165166167168169170171172173174175176177178179180181182183184185186187188189190191192193194195196197198199200201202203204205206207208209210211212213214215216217218219220221222223224225226227228229230231232233234235236237238239240241242243244245246247248249250251252253254255256257258259260261262263264265266267268269270271272273274275276277278279280281282283284285286287288289290291292293294295296297298299300301302303304305306307308309310311312313314315316317318319320321322323324325326327328329330331332333334335336337338339340341342343344345346347348349350351352353354355356357358359360361362363364365366367368369370371372373374375376377378379380381382383384385386387388389390391392393394395396397398399400401402403404405406407408409410411412413414415416417418419420421422423424425426427428429430431432433434435436437438439440441442443444445446447448449450451452453454455456457458459460461462463464465466467468469470471472473474475476477478479480481482483484485 | using System.Collections.Generic;using Aitex.Core.Common;using Aitex.Core.RT.Routine;using Aitex.Core.Util;using Aitex.Core.RT.Event;using MECF.Framework.Common.Equipment;using VirgoRT.Scheduler;using Aitex.Sorter.Common;using MECF.Framework.Common.Schedulers;using MECF.Framework.Common.SubstrateTrackings;using VirgoRT.Modules.PMs;using VirgoRT.Modules.Schedulers;using Aitex.Core.RT.SCCore;namespace VirgoRT.Modules{    internal interface IManualTransferRoutine : IRoutine    {    }    public class MoveItemEx : MoveItem    {        public int CoolingTime { get; set; }        public MoveItemEx(ModuleName sourceModule, int sourceSlot, ModuleName destinationModule, int destinationSlot,  int coolingTime, Hand blade)             : base(sourceModule, sourceSlot, destinationModule, destinationSlot, blade)        {            CoolingTime = coolingTime;        }    }    public class ManualTransfer : TransferModule    {        private Queue<IRoutine> _moveTaskQueue = new Queue<IRoutine>();         private IRoutine _activeTask;         public Result Start(object[] objs)        {            _moveTaskQueue.Clear();            ModuleName source = (ModuleName)objs[0];            int ss = (int)objs[1];            ModuleName target = (ModuleName)objs[2];            int ds = (int)objs[3];            bool autoAlign = (bool)objs[4];            int alignAngle = (int)objs[5];            bool autoCooling = (bool)objs[6];            int coolingTime = (int)objs[7];            if (!WaferManager.Instance.CheckWafer(source, ss, WaferStatus.Normal))            {                EV.PostWarningLog("System", $"source {source} slot {ss+1} no normal wafer");                return Result.FAIL;            }            if (!WaferManager.Instance.CheckNoWafer(target, ds))            {                EV.PostWarningLog("System", "destination has wafer");                return Result.FAIL;            }            if (source!=ModuleName.EfemRobot && WaferManager.Instance.CheckHasWafer(ModuleName.EfemRobot, 0) && WaferManager.Instance.CheckHasWafer(ModuleName.EfemRobot, 1))            {                EV.PostWarningLog("System", "robot has wafer");                return Result.FAIL;            }            Hand blade = WaferManager.Instance.CheckNoWafer(ModuleName.EfemRobot, 0) ? Hand.Blade1 : Hand.Blade2;            if (source == ModuleName.EfemRobot)                blade = ss == 0 ? Hand.Blade1 : Hand.Blade2;            else if (target == ModuleName.EfemRobot)                blade = ds == 0 ? Hand.Blade1 : Hand.Blade2;            if (blade == Hand.Blade1 && !SC.GetValue<bool>("EFEM.EfemRobot.LowerBladeEnable"))            {                EV.PostAlarmLog("System", $"Lower Blade disable");                return Result.FAIL;            }            if (blade == Hand.Blade2 && !SC.GetValue<bool>("EFEM.EfemRobot.UpperBladeEnable"))            {                EV.PostAlarmLog("System", $"Upper Blade disable");                return Result.FAIL;            }            if (autoAlign && !ModuleHelper.IsAligner(source) && !ModuleHelper.IsAligner(target) )            {                if (WaferManager.Instance.CheckHasWafer(ModuleName.Aligner1, 0) && WaferManager.Instance.CheckHasWafer(ModuleName.Aligner2, 0))                {                    EV.PostWarningLog("System", "Can not transfer, aligner has wafer, can not auto align");                    return Result.FAIL;                }                ModuleName aligner = WaferManager.Instance.CheckHasWafer(ModuleName.Aligner1, 0)                    ? ModuleName.Aligner2                    : ModuleName.Aligner1;                _moveTaskQueue.Enqueue(new EfemRobotMover(new MoveItemEx(source, ss, aligner, 0, 1, blade)));                _moveTaskQueue.Enqueue(new AlignRoutine(aligner.ToString()));                _moveTaskQueue.Enqueue(new EfemRobotMover(new MoveItemEx(aligner, 0, target, ds, 0, blade)));            }            else if(autoCooling && !ModuleHelper.IsCooling(source) && !ModuleHelper.IsCooling(target))            {                if (WaferManager.Instance.CheckHasWafer(ModuleName.Cooling1, 0) && WaferManager.Instance.CheckHasWafer(ModuleName.Cooling2, 0))                {                    EV.PostWarningLog("System", "Can not transfer, cooling has wafer, can not auto cooling");                    return Result.FAIL;                }                ModuleName cooling = WaferManager.Instance.CheckHasWafer(ModuleName.Cooling1, 0)                    ? ModuleName.Cooling2                    : ModuleName.Cooling1;                _moveTaskQueue.Enqueue(new EfemRobotMover(new MoveItemEx(source, ss, cooling, 0, coolingTime, blade)));                if (ModuleHelper.IsInstalled(ModuleName.Cooling1) || ModuleHelper.IsInstalled(ModuleName.Cooling2))                    _moveTaskQueue.Enqueue(new CoolingRoutine(cooling.ToString(), coolingTime));                _moveTaskQueue.Enqueue(new EfemRobotMover(new MoveItemEx(cooling, 0, target, ds, 0, blade)));            }            else            {                _moveTaskQueue.Enqueue(new EfemRobotMover(new MoveItemEx(source, ss, target, ds, coolingTime, blade)));                if (ModuleHelper.IsAligner(target) || ModuleHelper.IsCooling(target))                {                    _moveTaskQueue.Enqueue(new AlignRoutine(target.ToString()));                }            }            _activeTask = _moveTaskQueue.Dequeue();            return _activeTask.Start();        }        public Result Monitor(object[] objs)        {            System.Diagnostics.Debug.Assert(_activeTask != null, "mover should not be null, call start first");            Result ret = _activeTask.Monitor();            if (ret == Result.FAIL)                return ret;            if (ret == Result.DONE)            {                if (_moveTaskQueue.Count > 0)                {                    _activeTask = _moveTaskQueue.Dequeue();                    return _activeTask.Start();                }                return Result.DONE;            }            return Result.RUN;        }         public void Clear()        {            _moveTaskQueue.Clear();            _activeTask = null;        }    }    public class EfemRobotMover : TransferModule, IRoutine    {        private MoveItemEx _moveTask;        private SchedulerModule _source;        private SchedulerModule _destination;        public EfemRobotMover(MoveItemEx moveTask)        {            _moveTask = moveTask;        }        public Result Start()        {            _source = GetModule(_moveTask.SourceModule.ToString());            _destination = GetModule(_moveTask.DestinationModule.ToString());            System.Diagnostics.Debug.Assert(_source != null, $"{_moveTask.SourceModule} not valid");            System.Diagnostics.Debug.Assert(_destination != null, $"{_moveTask.DestinationModule} not valid");            if(!WaferManager.Instance.CheckHasWafer(_moveTask.SourceModule, _moveTask.SourceSlot))            {                EV.PostWarningLog("System", $"Failed transfer, source {_moveTask.SourceModule} slot {_moveTask.SourceSlot + 1} has not wafer");                return Result.FAIL;            }            if (WaferManager.Instance.CheckHasWafer(_moveTask.DestinationModule, _moveTask.DestinationSlot))            {                EV.PostWarningLog("System", $"Failed transfer, destination {_moveTask.DestinationModule} slot {_moveTask.DestinationSlot + 1} has wafer");                return Result.FAIL;            }            if (!_source.IsAvailable)            {                EV.PostWarningLog("System", $"Failed transfer, source {_moveTask.SourceModule} not ready");                return Result.FAIL;            }            if (ModuleHelper.IsLoadPort(_source.Module))            {                if (!(_source as SchedulerLoadPort).CheckReadyTransfer())                {                    EV.PostWarningLog("System", $"Failed transfer, source {_moveTask.SourceModule} not ready");                    return Result.FAIL;                }            }            if (!_destination.IsAvailable)            {                EV.PostWarningLog("System", $"Failed transfer, Destination {_moveTask.DestinationModule} not ready");                return Result.FAIL;            }            if (ModuleHelper.IsLoadPort(_destination.Module))            {                if (!(_destination as SchedulerLoadPort).CheckReadyTransfer())                {                    EV.PostWarningLog("System", $"Failed transfer, source {_moveTask.DestinationModule} not ready");                    return Result.FAIL;                }            }            if (!_efemRobot.IsAvailable)            {                EV.PostWarningLog("System", $"Failed transfer, EFEM Robot not ready");                return Result.FAIL;            }            if (ModuleHelper.IsAligner(_source.Module) || ModuleHelper.IsCooling(_source.Module))                _source.Cooling(_moveTask.CoolingTime);            if (ModuleHelper.IsAligner(_destination.Module) || ModuleHelper.IsCooling(_destination.Module))                _destination.Cooling(_moveTask.CoolingTime);            if (_moveTask.SourceModule == ModuleName.EfemRobot)            {                _moveTask.RobotHand = (Hand)_moveTask.SourceSlot;            }else if (_moveTask.DestinationModule == ModuleName.EfemRobot)            {                _moveTask.RobotHand = (Hand)_moveTask.DestinationSlot;            }            return Result.RUN;        }        public Result Start(params object[] objs)        {            return this.Start();        }        public Result Monitor()        {            if (_source.IsError || _destination.IsError || _efemRobot.IsError)                return Result.FAIL;            if (!WaferManager.Instance.CheckHasWafer(_moveTask.SourceModule, _moveTask.SourceSlot) &&                WaferManager.Instance.CheckHasWafer(_moveTask.DestinationModule, _moveTask.DestinationSlot) &&                _efemRobot.IsAvailable)            {                if (_source.IsWaitTransfer(ModuleName.EfemRobot))                {                    _source.PostTransfer(ModuleName.EfemRobot, EnumTransferType.Pick, 0);                    //_source.StopWaitTransfer(ModuleName.EfemRobot);                }                if (_destination.IsWaitTransfer(ModuleName.EfemRobot))                {                    _destination.PostTransfer(ModuleName.EfemRobot, EnumTransferType.Place, 0);                    //_destination.StopWaitTransfer(ModuleName.EfemRobot);                }                if (_source.IsAvailable && _destination.IsAvailable)                    return Result.DONE;                return Result.RUN;            }            if (!_efemRobot.IsAvailable)                return Result.RUN;            //pick            if (_moveTask.SourceModule != ModuleName.EfemRobot)            {                if (WaferManager.Instance.CheckHasWafer(_moveTask.SourceModule, _moveTask.SourceSlot))                {                    if (!_source.IsAvailable)                        return Result.RUN;                    if (!_source.IsReadyForPick(ModuleName.EfemRobot, _moveTask.SourceSlot, _moveTask.RobotHand))                    {                        if (!_source.PrepareTransfer(ModuleName.EfemRobot, EnumTransferType.Pick, _moveTask.SourceSlot))                            return Result.FAIL;                    }                    if (!_source.IsAvailable)                        return Result.RUN;                    if (!WaferManager.Instance.CheckHasWafer(ModuleName.EfemRobot, (int)_moveTask.RobotHand))                    {                        if (!_efemRobot.Pick(_moveTask.SourceModule, _moveTask.SourceSlot, _moveTask.RobotHand))                        {                            return Result.FAIL;                        }                        _source.WaitTransfer(ModuleName.EfemRobot, EnumTransferType.Pick, 0);                    }                    if (!_efemRobot.IsAvailable)                        return Result.RUN;                }                else                {                    if (!_efemRobot.IsAvailable)                        return Result.RUN;                    if (_source.IsWaitTransfer(ModuleName.EfemRobot))                    {                        _source.PostTransfer(ModuleName.EfemRobot, EnumTransferType.Pick, 0);                    }                }            }            //place            if (_moveTask.DestinationModule != ModuleName.EfemRobot)            {                if (!_destination.IsAvailable)                    return Result.RUN;                if (!WaferManager.Instance.CheckHasWafer(_moveTask.DestinationModule, _moveTask.DestinationSlot))                {                    if (!_destination.IsReadyForPlace(ModuleName.EfemRobot, _moveTask.DestinationSlot, _moveTask.RobotHand))                    {                        if (!_destination.PrepareTransfer(ModuleName.EfemRobot, EnumTransferType.Place,                            _moveTask.DestinationSlot))                            return Result.FAIL;                    }                    if (!_destination.IsAvailable)                        return Result.RUN;                    if (WaferManager.Instance.CheckHasWafer(ModuleName.EfemRobot, (int)_moveTask.RobotHand))                    {                        if (!_efemRobot.Place(_moveTask.DestinationModule, _moveTask.DestinationSlot, _moveTask.RobotHand))                            return Result.FAIL;                        _destination.WaitTransfer(ModuleName.EfemRobot, EnumTransferType.Place, 0);                    }                    if (!_efemRobot.IsAvailable)                        return Result.RUN;                }                else                {                    if (!_efemRobot.IsAvailable)                        return Result.RUN;                    if (_destination.IsWaitTransfer(ModuleName.EfemRobot))                    {                        _destination.PostTransfer(ModuleName.EfemRobot, EnumTransferType.Place, 0);                        //_destination.StopWaitTransfer(ModuleName.EfemRobot);                    }                }            }            return Result.RUN;        }        public void Abort()        {            Clear();        }         public void Clear()        {            _efemRobot.ResetTask();            _source?.ResetTask();            _destination?.ResetTask();        }    }    public class AlignRoutine : TransferModule, IRoutine    {        private SchedulerAligner _aligner;        public AlignRoutine(string module)        {            _aligner = GetModule(module) as SchedulerAligner;        }        public Result Start(params object[] objs)        {            _aligner.Align(0);            return Result.RUN;        }        public Result Monitor()        {            if (_aligner.IsAvailable)                return Result.DONE;            return Result.RUN;        }        public void Abort()        {        }    }    public class CoolingRoutine : TransferModule, IRoutine    {        private SchedulerAligner _cooling;        private int _coolingTimeS;        public CoolingRoutine(string module, int coolingTimeS)        {            _cooling = GetModule(module) as SchedulerAligner;            _coolingTimeS = coolingTimeS;        }        public Result Start(params object[] objs)        {            _cooling.Cooling(_coolingTimeS);            return Result.RUN;        }        public Result Monitor()        {            if (_cooling.IsAvailable)                return Result.DONE;            return Result.RUN;        }        public void Abort()        {        }    }    public class FlipRoutine : TransferModule, IRoutine    {        private SchedulerFlipper _fliper;        private string _orient;        public FlipRoutine(string module, string orient)        {            _fliper = GetModule(module) as SchedulerFlipper;            _orient = orient;        }        public Result Start(params object[] objs)        {            _fliper.Flip(_orient);            return Result.RUN;        }        public Result Monitor()        {            if (_fliper.IsAvailable)                return Result.DONE;            return Result.RUN;        }        public void Abort()        {        }    }}
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