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							- using System;
 
- using Aitex.Core.RT.Event;
 
- using Aitex.Core.RT.Routine;
 
- using Aitex.Core.RT.SCCore;
 
- using VirgoRT.Devices;
 
- namespace VirgoRT.Modules.PMs
 
- {
 
-     class PumpDownRoutine : PMRoutineBase, IRoutine
 
-     {
 
-         private enum PumpSequence
 
-         {
 
-             kCheckLidSignal,
 
-             kCheckSlitDoor,
 
-             kCheckDryPumpStatus,
 
-             kCloseValves,
 
-             kOpenPumpingValve,
 
-             kDelay,
 
-             kCheckVAC,
 
-             kCheckForelinePressure,
 
-             kCheckThrottleValveStatus,
 
-             kCheckATM,
 
-             kOpenSoftPumpValve,
 
-             kCloseSoftPumpValve,
 
-             kFastPumpValve,
 
-             kCloseFastPumpValve,
 
-             kCheckChamberPressure,
 
-             kCheckVACSignal,
 
-             kEnd
 
-         }
 
-         private int _basePressure;
 
-         private int _pumpValveDelay;
 
-         private double _pumpTimeLimit;
 
-         private readonly uint FORELINE_TARGET = 500;
 
-         public PumpDownRoutine(JetPM chamber) : base(chamber)
 
-         {
 
-             Name = "PumpDown";
 
-             bUINotify = true;
 
-         }
 
-         public void Terminate()
 
-         {
 
-         }
 
-         public Result Start(params object[] objs)
 
-         {
 
-             // 预检查,必须关盖子
 
-             if (CheckLid() == Result.RUN &&
 
-                 CheckSlitDoor() == Result.RUN)
 
-                 //&& CheckDryPump() == Result.RUN)
 
-             {
 
-                 Reset();
 
-                 //关闭所有阀门
 
-                 _chamber.CloseValves();
 
-                 //_PressureTrip1 = SC.GetValue<int>($"{Module}.Pump.PressureTrip1") * 1000;
 
-                 _basePressure = (objs.Length == 1) ? Convert.ToInt32(objs[0]) : SC.GetValue<int>($"{Module}.Pump.PumpBasePressure");
 
-                 _pumpTimeLimit = SC.GetValue<double>($"{Module}.Pump.PumpTimeLimit");
 
-                 _pumpValveDelay = SC.GetValue<int>($"{Module}.Pump.PumpValveDelay");
 
-                 Notify("Start");
 
-                 return Result.RUN;
 
-             }
 
-             return Result.FAIL;
 
-         }
 
-         public Result Monitor()
 
-         {
 
-             try
 
-             {
 
-                 CheckForeline((int)PumpSequence.kCheckForelinePressure, FORELINE_TARGET, 15);
 
-                 // open pumping valve
 
-                 SetValve((int)PumpSequence.kOpenSoftPumpValve, ValveType.SOFT_PUMP, true);
 
-                 CheckThrottleValveFullOpen((int)PumpSequence.kCheckThrottleValveStatus);
 
-                 TimeDelay((int)PumpSequence.kDelay, _pumpValveDelay);
 
-                 SetValve((int)PumpSequence.kFastPumpValve, ValveType.FAST_PUMP, true);
 
-                 SetValve((int)PumpSequence.kCloseFastPumpValve, ValveType.SOFT_PUMP, false);
 
-                 CheckATM2((int)PumpSequence.kCheckATM, false, 30);
 
-                 //CheckPressure((int)PumpSequence.kCheckChamberPressure, _PressureTrip1, false, 50);
 
-                 //OpenValve((int)PumpSequence.kCloseSoftPumpValve, ValveType.SOFT_PUMP, false);
 
-                 //检查VAC
 
-                 CheckVAC((int)PumpSequence.kCheckVACSignal, 90);
 
-                 CheckPressure((int)PumpSequence.kCheckVAC, _basePressure, false, (int)_pumpTimeLimit);
 
-                 End((int)PumpSequence.kEnd);
 
-             }
 
-             catch (RoutineBreakException)
 
-             {
 
-                 return Result.RUN;
 
-             }
 
-             catch (RoutineFaildException)
 
-             {
 
-                 Stop("Error");
 
-                 return Result.FAIL;
 
-             }
 
-             catch (Exception ex)
 
-             {
 
-                 Stop(ex.Message);
 
-                 return Result.FAIL;
 
-             }
 
-             Notify("Finish");
 
-             return Result.DONE;
 
-         }
 
-         public override void Abort()
 
-         {
 
-             _chamber.CloseValves();
 
-         }
 
-     }
 
- }
 
 
  |