Efem.cs 37 KB

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  1. using Aitex.Core.Common;
  2. using Aitex.Core.Common.DeviceData;
  3. using Aitex.Core.RT.DataCenter;
  4. using Aitex.Core.RT.Device;
  5. using Aitex.Core.RT.Event;
  6. using Aitex.Core.RT.Log;
  7. using Aitex.Core.RT.SCCore;
  8. using Aitex.Core.Util;
  9. using Aitex.Sorter.Common;
  10. using MECF.Framework.Common.Equipment;
  11. using MECF.Framework.Common.CommonData;
  12. using MECF.Framework.Common.SubstrateTrackings;
  13. using System;
  14. using System.Collections;
  15. using System.Collections.Generic;
  16. using System.Diagnostics;
  17. using System.Linq;
  18. using VirgoCommon;
  19. using VirgoRT.Device;
  20. using VirgoRT.Device.YASKAWA;
  21. using VirgoRT.Devices.YASKAWA;
  22. using VirgoRT.Modules;
  23. using VirgoRT.Modules.LPs;
  24. namespace VirgoRT.Devices.EFEM
  25. {
  26. /// <summary>
  27. /// EFEM object class
  28. /// </summary>
  29. sealed class Efem : EfemBase, VirgoRT.Device.IEfem
  30. {
  31. //---------------------------------Fields----------------------------------------
  32. //
  33. private readonly JetPM[] _pm = new JetPM[2];
  34. //private readonly Loadport[] _LPMs = new Loadport[2];
  35. private readonly Dictionary<ModuleName, Loadport> _LPMs = new Dictionary<ModuleName, Loadport>();
  36. private readonly SignalTower _signalT = new SignalTower();
  37. //private readonly CoolingStage[] _aligner = new CoolingStage[2];
  38. //private string _robotMoveAction;
  39. private RobotMoveInfo _robotMoveInfo = new RobotMoveInfo();
  40. private LidState _CassetteDoor;
  41. private LidState _SideDoor;
  42. private F_TRIG _bSysVacPressure1 = new F_TRIG();
  43. private F_TRIG _bSysCompressedAirPressure = new F_TRIG();
  44. private R_TRIG _bFlowGaugeSensor = new R_TRIG();
  45. private R_TRIG _bLeakageSensor = new R_TRIG();
  46. private F_TRIG _bDiffPressureSensorSetting1 = new F_TRIG();
  47. private F_TRIG _bDiffPressureSensorSetting2 = new F_TRIG();
  48. private F_TRIG _bIonizerAlarm = new F_TRIG();
  49. private F_TRIG _bFFuAlarm = new F_TRIG();
  50. private F_TRIG _bAreaSensor = new F_TRIG();
  51. private F_TRIG _bModeSwitch = new F_TRIG();
  52. private RD_TRIG _bCassetteDoorTrig = new RD_TRIG();
  53. private RD_TRIG _bSideDoorTrig = new RD_TRIG();
  54. public Dictionary<ModuleName, bool> IsBufferPinUp = new Dictionary<ModuleName, bool>();
  55. private Stopwatch _queryLpStateTimer = new Stopwatch();
  56. public override ILoadport this[ModuleName mod]
  57. {
  58. get
  59. {
  60. if (!ModuleHelper.IsLoadPort(mod))
  61. throw new ApplicationException($"{mod} is NOT Loadport");
  62. //return _LPMs[mod - ModuleName.LP1];
  63. return _LPMs[mod];
  64. }
  65. }
  66. //---------------------------------Properties------------------------------------
  67. //
  68. public LidState CassetteDoor
  69. {
  70. get => _CassetteDoor;
  71. set
  72. {
  73. _CassetteDoor = value;
  74. _bCassetteDoorTrig.CLK = _CassetteDoor == LidState.Close;
  75. if (_bCassetteDoorTrig.T)
  76. {
  77. EV.Notify(CassetteDoorOpen);
  78. EV.PostWarningLog(Module.ToString(), "Cassette door opened");
  79. }
  80. if (_bCassetteDoorTrig.R)
  81. {
  82. EV.Notify(CassetteDoorClose);
  83. EV.PostInfoLog(Module.ToString(), "Cassette door closed");
  84. }
  85. }
  86. }
  87. public LidState DoorSwitch
  88. {
  89. get => _SideDoor;
  90. set
  91. {
  92. _SideDoor = value;
  93. _bSideDoorTrig.CLK = _SideDoor == LidState.Close;
  94. if (_bSideDoorTrig.T)
  95. {
  96. EV.Notify(EFEMSideDoorOpen);
  97. EV.PostAlarmLog(Module.ToString(), "EFEM Side door open");
  98. }
  99. if (_bSideDoorTrig.R)
  100. {
  101. EV.PostInfoLog(Module.ToString(), "EFEM Side door close");
  102. }
  103. }
  104. }
  105. private string CassetteDoorOpen = "CassetteDoorOpen";
  106. private string CassetteDoorClose = "CassetteDoorClose";
  107. private string EFEMSideDoorOpen = "EFEMSideDoorOpen";
  108. private string EFEMVacuumPressureError = "EFEMVacuumPressureError";
  109. private string EFEMCDAError = "EFEMCDAError";
  110. private string EFEMFlowGaugeSensorError = "EFEMFlowGaugeSensorError";
  111. private string EFEMLeakageAlarm = "EFEMLeakageAlarm";
  112. private string EFEMIonizerAlarm = "EFEMIonizerAlarm";
  113. private string EFEMFFUAlarm = "EFEMFFUAlarm";
  114. private string EFEMOffline = "EFEMOffline";
  115. private string EFEMCommunicationError = "EFEMCommunicationError";
  116. private string WaferTransferFailed = "WaferTransferFailed";
  117. private string EFEMError = "EFEMError";
  118. // Constructor
  119. //
  120. public Efem()
  121. {
  122. Module = ModuleName.EfemRobot;
  123. _pm[0] = DEVICE.GetDevice<JetPM>(ModuleName.PMA.ToString());
  124. _pm[1] = DEVICE.GetDevice<JetPM>(ModuleName.PMB.ToString());
  125. _comm = new EfemComm();
  126. _LPMs[ModuleName.LP1] = new Loadport(ModuleName.LP1, this);
  127. _LPMs[ModuleName.LP2] = new Loadport(ModuleName.LP2, this);
  128. _LPMs[ModuleName.Buffer] = new Loadport(ModuleName.Buffer, this);
  129. IsBufferPinUp[ModuleName.Aligner1] = false;
  130. IsBufferPinUp[ModuleName.Aligner2] = false;
  131. IsBufferPinUp[ModuleName.Cooling1] = false;
  132. IsBufferPinUp[ModuleName.Cooling2] = false;
  133. if ((EfemEntity.EfemType)SC.GetValue<int>($"EFEM.EfemType") == EfemEntity.EfemType.BrooksEFEM)
  134. {
  135. BrooksProxy = new BrooksEFEMProxy();
  136. BrooksProxy.CommandUpdated += MsgOnCommandUpdated;
  137. BrooksProxy.EventUpdated += MsgOnEventUpdated;
  138. BrooksProxy.ErrorOccurred += MsgOnErrorOccurred;
  139. }
  140. _msgHandler = new MessageHandler(this);
  141. _msgHandler.CommandUpdated += MsgOnCommandUpdated;
  142. _msgHandler.EventUpdated += MsgOnEventUpdated;
  143. _msgHandler.ErrorOccurred += MsgOnErrorOccurred;
  144. CarrierManager.Instance.SubscribeLocation(ModuleName.LP1.ToString(), 1);
  145. CarrierManager.Instance.SubscribeLocation(ModuleName.LP2.ToString(), 1);
  146. Action<ModuleName, int> _subscribeLoc = (ModuleName module, int waferCount) => {
  147. if (ModuleHelper.IsInstalled(module))
  148. {
  149. WaferManager.Instance.SubscribeLocation(module, waferCount);
  150. }
  151. };
  152. _subscribeLoc(ModuleName.EfemRobot, 2);
  153. _subscribeLoc(ModuleName.Aligner1, 1);
  154. _subscribeLoc(ModuleName.Aligner2, 1);
  155. _subscribeLoc(ModuleName.Cooling1, 1);
  156. _subscribeLoc(ModuleName.Cooling2, 1);
  157. _subscribeLoc(ModuleName.LP1, SC.GetValue<int>("EFEM.LoadPort.SlotNumber"));
  158. _subscribeLoc(ModuleName.LP2, SC.GetValue<int>("EFEM.LoadPort.SlotNumber"));
  159. _subscribeLoc(ModuleName.Flipper, 1);
  160. _subscribeLoc(ModuleName.Buffer, SC.GetValue<int>("EFEM.Buffer.SlotNumber"));
  161. DATA.Subscribe("EfemRobot.RobotMoveAction", () => _robotMoveInfo);
  162. DATA.Subscribe("LP1.JobDone", () =>
  163. {
  164. return _LPMs[ModuleName.LP1].JobDone;
  165. });
  166. DATA.Subscribe("LP1.NotifyJobDone", () =>
  167. {
  168. if (!_LPMs[ModuleName.LP1].JobDone || !_LPMs[ModuleName.LP1].HasCassette)
  169. return false;
  170. if (SC.GetValue<int>("System.Job.BuzzerTimeWhenJobDone") >= 0
  171. && _LPMs[ModuleName.LP1].TimerNotifyJobDone.ElapsedMilliseconds > SC.GetValue<int>("System.Job.BuzzerTimeWhenJobDone") * 1000)
  172. return false;
  173. return _LPMs[ModuleName.LP1].JobDone;
  174. });
  175. DATA.Subscribe("LP2.JobDone", () =>
  176. {
  177. return _LPMs[ModuleName.LP2].JobDone;
  178. });
  179. DATA.Subscribe("LP2.NotifyJobDone", () =>
  180. {
  181. if (!_LPMs[ModuleName.LP2].JobDone || !_LPMs[ModuleName.LP2].HasCassette)
  182. return false;
  183. if (SC.GetValue<int>("System.Job.BuzzerTimeWhenJobDone") >= 0
  184. && _LPMs[ModuleName.LP2].TimerNotifyJobDone.ElapsedMilliseconds > SC.GetValue<int>("System.Job.BuzzerTimeWhenJobDone") * 1000)
  185. return false;
  186. return _LPMs[ModuleName.LP2].JobDone;
  187. });
  188. Func<ModuleName, int, string> _waferSize = (ModuleName module, int slot) => {
  189. string sSize = WaferSize.WS12.ToString();
  190. if (ModuleHelper.IsInstalled(module))
  191. {
  192. sSize = WaferManager.Instance.GetWafer(module, slot).Size.ToString();
  193. }
  194. else
  195. {
  196. sSize = WaferSize.WS12.ToString();
  197. }
  198. return sSize;
  199. };
  200. DATA.Subscribe("Aligner1.WaferSize", () => _waferSize(ModuleName.Aligner1, 0));
  201. DATA.Subscribe("Aligner2.WaferSize", () => _waferSize(ModuleName.Aligner2, 0));
  202. DATA.Subscribe("Cooling1.WaferSize", () => _waferSize(ModuleName.Cooling1, 0));
  203. DATA.Subscribe("Cooling2.WaferSize", () => _waferSize(ModuleName.Cooling2, 0));
  204. DATA.Subscribe("EfemRobot.WaferSize", () => _waferSize(ModuleName.EfemRobot, 0));
  205. //DATA.Subscribe("Buffer.WaferSize", () => _waferSize(ModuleName.Buffer, 0));
  206. DATA.Subscribe("EFEM.CassetteDoor", () => CassetteDoor);
  207. DATA.Subscribe("EfemRobot.GripStateBlade1", () => GripStateBlade1);
  208. DATA.Subscribe("EfemRobot.GripStateBlade2", () => GripStateBlade2);
  209. GripStateBlade1 = "Unknown";
  210. GripStateBlade2 = "Unknown";
  211. _bCassetteDoorTrig.CLK = true;
  212. _bSideDoorTrig.CLK = true;
  213. EV.Subscribe(new EventItem("Event", CassetteDoorOpen, "Cassette Door Open"));
  214. EV.Subscribe(new EventItem("Event", CassetteDoorClose, "Cassette Door Close"));
  215. EV.Subscribe(new EventItem("Event", EFEMSideDoorOpen, "EFEM Side Door Open", EventLevel.Alarm, EventType.HostNotification));
  216. EV.Subscribe(new EventItem("Event", EFEMVacuumPressureError, "EFEM Vacuum pressure error", EventLevel.Alarm, EventType.HostNotification));
  217. EV.Subscribe(new EventItem("Event", EFEMCDAError, "EFEM CDA error", EventLevel.Alarm, EventType.HostNotification));
  218. EV.Subscribe(new EventItem("Event", EFEMFlowGaugeSensorError, "EFEM flow gauge sensor error", EventLevel.Alarm, EventType.HostNotification));
  219. EV.Subscribe(new EventItem("Event", EFEMLeakageAlarm, "EFEM leakage alarm", EventLevel.Alarm, EventType.HostNotification));
  220. EV.Subscribe(new EventItem("Event", EFEMIonizerAlarm, "EFEM Ionizer alarm", EventLevel.Alarm, EventType.HostNotification));
  221. EV.Subscribe(new EventItem("Event", EFEMFFUAlarm, "EFEM FFU alarm", EventLevel.Alarm, EventType.HostNotification));
  222. EV.Subscribe(new EventItem("Event", EFEMOffline, "EFEM offline", EventLevel.Alarm, EventType.HostNotification));
  223. EV.Subscribe(new EventItem("Event", EFEMCommunicationError, "EFEM Communication error", EventLevel.Alarm, EventType.HostNotification));
  224. EV.Subscribe(new EventItem("Event", WaferTransferFailed, "Wafer Transfer Failed", EventLevel.Alarm, EventType.HostNotification));
  225. EV.Subscribe(new EventItem("Event", EFEMError, "EFEM Error", EventLevel.Alarm, EventType.HostNotification));
  226. }
  227. // Methods
  228. //
  229. public bool HomeAll()
  230. {
  231. AddAction(new ClearErrorAction(this));
  232. AddAction(new HomeAllAction(this, ModuleName.EFEM));
  233. AddAction(new OrgshAction(this, ModuleName.EFEM));
  234. AddAction(new TrackAction(this, ModuleName.EFEM));
  235. return true;
  236. }
  237. public bool Home(ModuleName mod, string param)
  238. {
  239. AddAction(new HomeModuleAction(this, mod, param));
  240. return true;
  241. }
  242. public bool Load(ModuleName mod)
  243. {
  244. AddAction(new LoadModuleAction(this, mod));
  245. return true;
  246. }
  247. public bool Unload(ModuleName mod)
  248. {
  249. AddAction(new UnloadModuleAction(this, mod));
  250. return true;
  251. }
  252. public bool ReadCarrierId(ModuleName mod)
  253. {
  254. AddAction(new ReadCarrierIdModuleAction(this, mod));
  255. return true;
  256. }
  257. public bool WriteCarrierId(ModuleName mod, string id)
  258. {
  259. AddAction(new WriteCarrierIdModuleAction(this, mod, id));
  260. return true;
  261. }
  262. public bool ReadTagData(ModuleName mod)
  263. {
  264. AddAction(new ReadTagDataModuleAction(this, mod));
  265. return true;
  266. }
  267. public bool WriteTagData(ModuleName mod, string tagData)
  268. {
  269. AddAction(new WriteTagDataModuleAction(this, mod, tagData));
  270. return true;
  271. }
  272. public bool Dock(ModuleName mod)
  273. {
  274. AddAction(new DockModuleAction(this, mod));
  275. return true;
  276. }
  277. public bool Undock(ModuleName mod)
  278. {
  279. AddAction(new UndockModuleAction(this, mod));
  280. return true;
  281. }
  282. public bool Clamp(ModuleName mod, bool isUnloadClamp)
  283. {
  284. AddAction(new ClampModuleAction(this, mod, isUnloadClamp));
  285. return true;
  286. }
  287. public bool Unclamp(ModuleName mod)
  288. {
  289. AddAction(new UnclampModuleAction(this, mod));
  290. return true;
  291. }
  292. public bool SetThick(ModuleName mod)
  293. {
  294. AddAction(new SetThicknessModuleAction(this, mod, "Thick"));
  295. return true;
  296. }
  297. public bool SetThin(ModuleName mod)
  298. {
  299. AddAction(new SetThicknessModuleAction(this, mod, "Thin"));
  300. return true;
  301. }
  302. public bool ClearError()
  303. {
  304. AddAction(new ClearErrorAction(this));
  305. return true;
  306. }
  307. public void AbortRobot()
  308. {
  309. AddAction(new AbortAction(this));
  310. }
  311. public void SetRobotMovingInfo(RobotAction action, Hand hand, ModuleName target)
  312. {
  313. _robotMoveInfo.Action = action;
  314. _robotMoveInfo.ArmTarget = hand == Hand.Blade1 ? RobotArm.ArmA : (hand == Hand.Both ? RobotArm.Both : RobotArm.ArmB);
  315. _robotMoveInfo.BladeTarget = $"{_robotMoveInfo.ArmTarget}.{target}";
  316. }
  317. public bool Pick(MoveParam mp)
  318. {
  319. if (!WaferManager.Instance.CheckWafer(mp.SrcModule, mp.SrcSlot, WaferStatus.Normal))
  320. {
  321. EV.PostAlarmLog("System", $"{mp.SrcModule} slot {mp.SrcSlot + 1} wafer is not normal");
  322. return false;
  323. }
  324. if (!CheckBladeEnable(mp,"Pick"))
  325. {
  326. return false;
  327. }
  328. if (ModuleHelper.IsPm(mp.SrcModule))
  329. {
  330. JetPM pM = GetPM(mp.SrcModule);
  331. if (pM.IsSlitDoorClosed)
  332. {
  333. EV.PostAlarmLog(pM.Module.ToString(), "Slit 门必须打开");
  334. return false;
  335. }
  336. AddAction(new PinAction(mp.SrcModule, pM, MovementPosition.Up, false, mp.Arm, true));
  337. AddAction(new ExtendAction(this, new ExtendParam { Module = mp.SrcModule, Arm = mp.Arm, Pos = ExtendPos.GB }));
  338. AddAction(new PinAction(mp.SrcModule, pM, MovementPosition.Down, true, mp.Arm, true));
  339. AddAction(new ExtendAction(this, new ExtendParam { Module = mp.SrcModule, Arm = mp.Arm, Pos = ExtendPos.G4 }));
  340. }
  341. else
  342. {
  343. SetRobotMovingInfo(RobotAction.Picking, mp.Arm, mp.SrcModule);
  344. AddAction(new PickAction(this, mp));
  345. }
  346. return true;
  347. }
  348. private bool CheckBladeEnable(MoveParam mp, string title)
  349. {
  350. if (mp.Arm == Hand.Blade1 && !SC.GetValue<bool>("EFEM.EfemRobot.LowerBladeEnable"))
  351. {
  352. EV.PostAlarmLog("System", $"{title}:Lower Blade disable");
  353. return false;
  354. }
  355. if (mp.Arm == Hand.Blade2 && !SC.GetValue<bool>("EFEM.EfemRobot.UpperBladeEnable"))
  356. {
  357. EV.PostAlarmLog("System", $"{title}:Upper Blade disable");
  358. return false;
  359. }
  360. return true;
  361. }
  362. public bool Place(MoveParam mp)
  363. {
  364. if (!CheckBladeEnable(mp, "Place"))
  365. {
  366. return false;
  367. }
  368. if (ModuleHelper.IsPm(mp.DestModule))
  369. {
  370. JetPM pM = GetPM(mp.DestModule);
  371. if (pM.IsSlitDoorClosed)
  372. {
  373. EV.PostAlarmLog(pM.Module.ToString(), "Slit 门必须打开");
  374. return false;
  375. }
  376. AddAction(new ExtendAction(this, new ExtendParam { Module = mp.DestModule, Arm = mp.Arm, Pos = ExtendPos.PB }));
  377. AddAction(new PinAction(mp.DestModule, pM, MovementPosition.Up, true, mp.Arm, false));
  378. AddAction(new ExtendAction(this, new ExtendParam { Module = mp.DestModule, Arm = mp.Arm, Pos = ExtendPos.P4 }));
  379. AddAction(new PinAction(mp.DestModule, pM, MovementPosition.Up, false, mp.Arm, false));
  380. }
  381. else
  382. {
  383. SetRobotMovingInfo(RobotAction.Placing, mp.Arm, mp.DestModule);
  384. AddAction(new PlaceAction(this, mp));
  385. }
  386. return true;
  387. }
  388. public void PickAndPlace(MoveParam pickParam, MoveParam placeParam)
  389. {
  390. if (!WaferManager.Instance.CheckWafer(pickParam.SrcModule, pickParam.SrcSlot, WaferStatus.Normal))
  391. {
  392. EV.PostAlarmLog("System", $"{pickParam.SrcModule} slot {pickParam.SrcSlot + 1} wafer is not normal");
  393. return;
  394. }
  395. if (!CheckBladeEnable(pickParam, "Swap") || !CheckBladeEnable(placeParam, "Swap"))
  396. {
  397. return;
  398. }
  399. if (ModuleHelper.IsPm(pickParam.SrcModule))
  400. {
  401. JetPM pM = GetPM(pickParam.SrcModule);
  402. if (pM.IsSlitDoorClosed)
  403. {
  404. EV.PostAlarmLog(pM.Module.ToString(), "Slit 门必须打开");
  405. return;
  406. }
  407. AddAction(new PinAction(pickParam.SrcModule, pM, MovementPosition.Up, false, pickParam.Arm, true));
  408. AddAction(new ExtendAction(this, new ExtendParam { Module = pickParam.SrcModule, Arm = pickParam.Arm, Pos = ExtendPos.GB }));
  409. AddAction(new PinAction(pickParam.SrcModule, pM, MovementPosition.Down, true, pickParam.Arm, true));
  410. AddAction(new ExtendAction(this, new ExtendParam { Module = pickParam.SrcModule, Arm = pickParam.Arm, Pos = ExtendPos.G4 }));
  411. AddAction(new ExtendAction(this, new ExtendParam { Module = placeParam.DestModule, Arm = placeParam.Arm, Pos = ExtendPos.PB }));
  412. AddAction(new PinAction(placeParam.DestModule, pM, MovementPosition.Up, true, placeParam.Arm, false));
  413. AddAction(new ExtendAction(this, new ExtendParam { Module = placeParam.DestModule, Arm = placeParam.Arm, Pos = ExtendPos.P4 }));
  414. AddAction(new PinAction(placeParam.DestModule, pM, MovementPosition.Up, false, placeParam.Arm, false));
  415. }
  416. else
  417. {
  418. SetRobotMovingInfo(RobotAction.Picking, pickParam.Arm, pickParam.SrcModule);
  419. AddAction(new PickAction(this, pickParam));
  420. SetRobotMovingInfo(RobotAction.Placing, placeParam.Arm, placeParam.DestModule);
  421. AddAction(new PlaceAction(this, placeParam));
  422. }
  423. }
  424. public bool Extend(ExtendParam ep)
  425. {
  426. AddAction(new ExtendAction(this, ep));
  427. return true;
  428. }
  429. public void Goto(MoveParam ep)
  430. {
  431. //_robotMoveAction = string.Format($"{ep.SrcModule}.Goto");
  432. AddAction(new GotoAction(this, ep));
  433. }
  434. public bool Retract(ExtendParam ep)
  435. {
  436. AddAction(new ExtendAction(this, ep));
  437. return true;
  438. }
  439. public bool Map(ModuleName mod)
  440. {
  441. if (_LPMs[mod].Protrusion)
  442. {
  443. EV.PostAlarmLog(mod.ToString(), $"{mod} wafer protrusion, can not do Map");
  444. return false;
  445. }
  446. _LPMs[mod].Map();
  447. return true;
  448. }
  449. public bool Grip(Hand blade, bool isGrip)
  450. {
  451. AddAction(new GripAction(this, blade, isGrip));
  452. return true;
  453. }
  454. public bool SetPinUp(ModuleName mod)
  455. {
  456. AddAction(new LiftAction(this, mod, true));
  457. return true;
  458. }
  459. public bool SetPinDown(ModuleName mod)
  460. {
  461. AddAction(new LiftAction(this, mod, false));
  462. return true;
  463. }
  464. public bool Align(ModuleName mod, float delayTime, Aitex.Core.Common.WaferSize size)
  465. {
  466. AddAction(new AlignAction(this, mod, size));
  467. return true;
  468. }
  469. public bool SetLamp(LightType light, LightStatus status)
  470. {
  471. AddAction(new LedAction(this, light, status));
  472. return true;
  473. }
  474. public void TurnOffBuzzer()
  475. {
  476. AddAction(new LedAction(this, LightType.BUZZER1, LightStatus.OFF));
  477. }
  478. public bool Flip(string orient)
  479. {
  480. AddAction(new FlipAction(this, ModuleName.Flipper, orient));
  481. return true;
  482. }
  483. public bool EmsStop()
  484. {
  485. AddAction(new EmsStopAction(this, ModuleName.EfemRobot));
  486. return true;
  487. }
  488. public bool SetSpeed(string speed)
  489. {
  490. AddAction(new SetSpeedAction(this, ModuleName.EfemRobot, speed));
  491. return true;
  492. }
  493. //public void SwitchOnBuzzerAndRed()
  494. //{
  495. // AddAction(new LedAction(this, LightType.RED, LightStatus.ON));
  496. // AddAction(new LedAction(this, LightType.YELLOW, LightStatus.OFF));
  497. // AddAction(new LedAction(this, LightType.GREEN, LightStatus.OFF));
  498. // AddAction(new LedAction(this, LightType.BUZZER1, LightStatus.ON));
  499. //}
  500. public override void ReceiveMessage(string sRec)
  501. {
  502. _msgHandler.ReceiveMessage(sRec);
  503. }
  504. public override void SetOnline(ModuleName mod, bool online)
  505. {
  506. this[mod].SetOnline(online);
  507. }
  508. public override void SetBusy(ModuleName mod, bool busy)
  509. {
  510. this[mod].Status = DeviceState.Busy;
  511. }
  512. //--------------------------------Constructor------------------------------------
  513. //
  514. private JetPM GetPM(ModuleName mod)
  515. {
  516. if (!ModuleHelper.IsPm(mod))
  517. throw new ArgumentException("Module argument error");
  518. return _pm[mod - ModuleName.PMA];
  519. }
  520. //----------------------------------Private Method-------------------------------
  521. //
  522. private void MsgOnEventUpdated(object sender, EventArgs e)
  523. {
  524. if (!(e is EfemEventArgs))
  525. return;
  526. EfemEventArgs eArg = e as EfemEventArgs;
  527. switch (eArg.CommandType)
  528. {
  529. case EfemOperation.SigStatus:
  530. // EVT:SIGSTAT/Parameter/DATA1/DATA2;
  531. string sParam = eArg.DataList[0]; // "SYSTEM" or "Pn"
  532. // DATA1 & DATA2
  533. int nData1 = Convert.ToInt32(eArg.DataList[1], 16);
  534. int nData2 = Convert.ToInt32(eArg.DataList[2], 16);
  535. BitArray baData1 = new BitArray(new int[] { nData1 });
  536. BitArray baData2 = new BitArray(new int[] { nData2 });
  537. if (0 == string.Compare(sParam, Constant.SYS, true))
  538. {
  539. // EVT:SIGSTAT/System/00000000/00000004;
  540. // DATA1
  541. _bSysVacPressure1.CLK = baData1[0]; // bit 0
  542. _bSysCompressedAirPressure.CLK = baData1[2]; // bit 2
  543. _bFlowGaugeSensor.CLK = baData1[4]; // bit 4
  544. _bLeakageSensor.CLK = baData1[5]; // bit 5
  545. this.DoorSwitch = baData1[6] ? LidState.Close : LidState.Open; // bit 6
  546. //bDrivePower = baData1[7]; // bit 7
  547. _bDiffPressureSensorSetting1.CLK = baData1[8]; // bit 8
  548. _bDiffPressureSensorSetting2.CLK = baData1[9]; // bit 9
  549. _bIonizerAlarm.CLK = baData1[10]; // bit 10
  550. _bFFuAlarm.CLK = baData1[11]; // bit 11
  551. _bAreaSensor.CLK = baData1[12]; // bit 12
  552. _bModeSwitch.CLK = baData1[13]; // bit 13
  553. this.CassetteDoor = baData1[15] ? LidState.Close : LidState.Open; // bit 15
  554. // Post warning and alarm
  555. if (!baData1[0]) // Bit[0] ON=Normal, OFF=Abnormal
  556. {
  557. EV.Notify(EFEMVacuumPressureError);
  558. EV.PostAlarmLog(Module.ToString(), "EFEM System vacuum source pressure low");
  559. Singleton<RouteManager>.Instance.EFEM.PostMsg(EfemEntity.MSG.Error);
  560. }
  561. if (!baData1[1]) // Bit[1] ON=Normal, OFF=Abnormal
  562. {
  563. EV.Notify(EFEMIonizerAlarm);
  564. EV.PostAlarmLog(Module.ToString(), "EFEM Ionizer compressed air error");
  565. Singleton<RouteManager>.Instance.EFEM.PostMsg(EfemEntity.MSG.Error);
  566. }
  567. if (!baData1[2]) // Bit[2] ON=Normal, OFF=Abnormal
  568. {
  569. EV.Notify(EFEMCDAError);
  570. EV.PostAlarmLog(Module.ToString(), "EFEM System compressed air pressure low");
  571. Singleton<RouteManager>.Instance.EFEM.PostMsg(EfemEntity.MSG.Error);
  572. }
  573. if (!baData1[4]) // Bit[4] ON=Normal, OFF=Abnormal
  574. {
  575. EV.Notify(EFEMFlowGaugeSensorError);
  576. EV.PostAlarmLog(Module.ToString(), "EFEM Flow gauge sensor error");
  577. Singleton<RouteManager>.Instance.EFEM.PostMsg(EfemEntity.MSG.Error);
  578. }
  579. if (!baData1[5]) // Bit[5] ON=Normal, OFF=Abnormal
  580. {
  581. EV.Notify(EFEMLeakageAlarm);
  582. EV.PostAlarmLog(Module.ToString(), "EFEM Leakage alarm");
  583. Singleton<RouteManager>.Instance.EFEM.PostMsg(EfemEntity.MSG.Error);
  584. }
  585. if (!baData1[10]) // Bit[10] ON=Normal, OFF=Abnormal
  586. {
  587. EV.Notify(EFEMIonizerAlarm);
  588. EV.PostAlarmLog(Module.ToString(), "EFEM Ionizer alarm");
  589. Singleton<RouteManager>.Instance.EFEM.PostMsg(EfemEntity.MSG.Error);
  590. }
  591. if (!baData1[11]) // Bit[11] ON=Normal, OFF=Abnormal
  592. {
  593. EV.Notify(EFEMFFUAlarm);
  594. EV.PostAlarmLog(Module.ToString(), "FFU alarm");
  595. Singleton<RouteManager>.Instance.EFEM.PostMsg(EfemEntity.MSG.Error);
  596. }
  597. if (!baData1[13]) // Bit[13] ON=RUN, OFF=Maintain
  598. {
  599. EV.Notify(EFEMOffline);
  600. EV.PostAlarmLog(Module.ToString(), "EFEM switch to Maintain mode, HomeAll to recover");
  601. //Singleton<RouteManager>.Instance.EFEM.PostMsg(EfemEntity.MSG.ToInit);
  602. }
  603. // DATA2
  604. _signalT.ChangeLightStatus(LightType.RED, baData2[0] ? LightStatus.ON : baData2[5] ? LightStatus.BLINK : LightStatus.OFF);
  605. _signalT.ChangeLightStatus(LightType.GREEN, baData2[1] ? LightStatus.ON : baData2[6] ? LightStatus.BLINK : LightStatus.OFF);
  606. _signalT.ChangeLightStatus(LightType.YELLOW, baData2[2] ? LightStatus.ON : baData2[7] ? LightStatus.BLINK : LightStatus.OFF);
  607. _signalT.ChangeLightStatus(LightType.BLUE, baData2[3] ? LightStatus.ON : baData2[8] ? LightStatus.BLINK : LightStatus.OFF);
  608. _signalT.ChangeLightStatus(LightType.WHITE, baData2[4] ? LightStatus.ON : baData2[9] ? LightStatus.BLINK : LightStatus.OFF);
  609. _signalT.ChangeLightStatus(LightType.BUZZER1, baData2[10] ? LightStatus.ON : LightStatus.OFF);
  610. /* EFEM 程序中目前没有实现
  611. _RobotErr.CLK = baData2[27]; // bit 27
  612. bool bArmNotExtendLLA = baData2[30]; // bit 30
  613. bool bArmNotExtendLLB = baData2[31]; // bit 31
  614. */
  615. } // system event
  616. else
  617. {
  618. _LPMs[eArg.Module].HandleEvent(eArg);
  619. } // FOUP EVENT
  620. break;
  621. case EfemOperation.GetWaferInfo:
  622. _LPMs[eArg.Module].HandleEvent(eArg);
  623. break;
  624. default:
  625. break;
  626. }
  627. }
  628. private void MsgOnCommandUpdated(object sender, EventArgs e)
  629. {
  630. EfemActionArgs arg = e as EfemActionArgs;
  631. if (arg == null) throw new ArgumentNullException("Argument is Null");
  632. if (arg.CommandType == EfemOperation.Ready)
  633. {
  634. this.CommunicationConnected = true;
  635. Singleton<RouteManager>.Instance.EFEM.PostMsg(EfemEntity.MSG.CommReady);
  636. return;
  637. }
  638. EfemActionBase action = null;
  639. lock (_lockerAction)
  640. {
  641. foreach (var item in _actions)
  642. {
  643. if (item is EfemActionBase a1)
  644. {
  645. if (a1.Type == arg.CommandType && item.Status != ActionStatus.Completed)
  646. {
  647. action = a1;
  648. break;
  649. }
  650. }
  651. }
  652. if (action == null)
  653. {
  654. //EV.PostAlarmLog(arg.Module.ToString(), $"NO activated {arg.CommandType} in the queue");
  655. LOG.Write($"NO activated [{arg.ID}] [{arg.CommandType}] in the queue");
  656. return;
  657. }
  658. // 更新 action 状态
  659. action.Status = arg.Status;
  660. if (arg.Status == ActionStatus.Completed)
  661. {
  662. ModuleName mod = action.Module;
  663. // Map 命令比较特别, module 是LPX但是用robot做mapping
  664. if (mod == ModuleName.EFEM || mod == ModuleName.EfemRobot || ModuleHelper.IsAligner(mod) || ModuleHelper.IsCooling(mod) || arg.CommandType == EfemOperation.Map)
  665. {
  666. if ((action.Type != EfemOperation.Light) && (action.Type != EfemOperation.Lift) && (action.Type != EfemOperation.QueryLPPresence))
  667. {
  668. Singleton<RouteManager>.Instance.EFEM.PostMsg(EfemEntity.MSG.ActionDone, arg.CommandType);
  669. }
  670. if (action.Type == EfemOperation.Lift)
  671. {
  672. Singleton<RouteManager>.Instance.EFEM.PostMsg(EfemEntity.MSG.LiftActionDone, arg.CommandType);
  673. }
  674. }
  675. else if (ModuleHelper.IsLoadPort(mod))
  676. {
  677. Singleton<RouteManager>.Instance.EFEM.NotifyLP(mod, LoadportEntity.MSG.ActionDone);
  678. if (action.Type == EfemOperation.Load || action.Type == EfemOperation.Unload)
  679. {
  680. Singleton<RouteManager>.Instance.EFEM.PostMsg(EfemEntity.MSG.ActionDone, arg.CommandType);
  681. }
  682. }
  683. if (arg.CommandType == EfemOperation.Pick || arg.CommandType == EfemOperation.Place)
  684. SetRobotMovingInfo(RobotAction.None, Hand.Both, ModuleName.System);
  685. if (arg.CommandType == EfemOperation.Home)
  686. _queryLpStateTimer.Restart();
  687. action.OnPostWork(arg.Data);
  688. LOG.Write($"efem action [{action.GetType().Name}] [{action.ID}][{action.Type}] removed from queue");
  689. _actions.Remove(action);
  690. }
  691. else if (arg.Status == ActionStatus.Cancel)
  692. {
  693. if (ModuleHelper.IsLoadPort(action.Module) || ModuleHelper.IsBuffer(action.Module))
  694. {
  695. _LPMs[action.Module].OnCancel();
  696. }
  697. LOG.Write($"efem action [{action.GetType().Name}] [{action.ID}][{action.Type}] canceled from queue");
  698. _actions.Remove(action);
  699. }
  700. }
  701. }
  702. private void MsgOnErrorOccurred(object sender, EventArgs e)
  703. {
  704. if (!(e is EfemErrorArgs arg))
  705. return;
  706. this.Status = DeviceState.Error;
  707. EfemActionBase action = null;
  708. lock (_lockerAction)
  709. {
  710. foreach (var item in _actions)
  711. {
  712. if (item is EfemActionBase a1)
  713. {
  714. if (a1.Type == arg.CommandType && item.Status != ActionStatus.Completed)
  715. {
  716. action = a1;
  717. break;
  718. }
  719. }
  720. }
  721. if (action == null)
  722. {
  723. LOG.Write($"NO activated [{arg.ID}] [{arg.Module}] [{arg.CommandType}] in the queue");
  724. return;
  725. }
  726. ModuleName mod = action.Module;
  727. if (mod == ModuleName.EFEM || mod == ModuleName.EfemRobot || ModuleHelper.IsAligner(mod) || ModuleHelper.IsCooling(mod) || arg.CommandType == EfemOperation.Map)
  728. {
  729. if (action.Type != EfemOperation.Light)
  730. {
  731. Singleton<RouteManager>.Instance.EFEM.PostMsg(EfemEntity.MSG.Error);
  732. }
  733. }
  734. else if (ModuleHelper.IsLoadPort(mod))
  735. {
  736. Singleton<RouteManager>.Instance.EFEM.NotifyLPError(mod );
  737. }
  738. LOG.Write($"efem action [{action.GetType().Name}] [{action.ID}][{action.Module}][{action.Type}] removed from queue");
  739. _actions.Remove(action);
  740. }
  741. EV.Notify(EFEMError);
  742. EV.PostAlarmLog(Module.ToString(), $"{arg.Description}, [{arg.Message}], [{arg.Factor}]");
  743. }
  744. public void QueryLPState()
  745. {
  746. if (_queryLpStateTimer.IsRunning
  747. && _queryLpStateTimer.ElapsedMilliseconds >= 30000)
  748. {
  749. bool bExisting = false;
  750. bool bPending = false;
  751. EfemAction pendingAction = null;
  752. foreach (var action in _actions)
  753. {
  754. EfemAction EfemAction = action as EfemAction;
  755. if (EfemAction != null && EfemAction.Type == EfemOperation.QueryLPPresence)
  756. {
  757. bExisting = true;
  758. if (_queryLpStateTimer.ElapsedMilliseconds > 600000)
  759. {
  760. bPending = true;
  761. pendingAction = EfemAction;
  762. break;
  763. }
  764. }
  765. }
  766. if (!bExisting)
  767. {
  768. AddAction(new QueryLPStateAction(this, ModuleName.EFEM));
  769. _queryLpStateTimer.Restart();
  770. }
  771. if (bPending)
  772. {
  773. LOG.Write($"Found pending action [{pendingAction.GetType().Name}] [{pendingAction.ID}][{pendingAction.Type}], canceled from queue");
  774. _actions.Remove(pendingAction);
  775. _queryLpStateTimer.Restart();
  776. }
  777. }
  778. }
  779. }
  780. }