JetPlasma
/
Virgo_Mask


			
				
					
						
						
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							<?xml version="1.0" encoding="utf-16"?>
<SystemConfig xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" xmlns:xsd="http://www.w3.org/2001/XMLSchema">
  <DataElements>

    <DataElement displayName="TV Position"  cn="PMA.PositionFeedBack" en="" dbName="IO32.PMA.AI_Throttle_Valve_Real_Position" isPressureAxis="false"/>
    <DataElement displayName="TV Position SP"  cn="PMA.PositionSetPoint" en="" dbName="IO32.PMA.AO_Throttle_Valve_Position_Setpoint" isPressureAxis="false"/>
    <DataElement displayName="TV Pressure"  cn="PMA.PressureFeedBack" en="" dbName="IO32.PMA.AI_Throttle_Valve_Real_Pressure" isPressureAxis="false"/>
    <DataElement displayName="TV Pressure SP"  cn="PMA.PressureSetPoint" en="" dbName="IO32.PMA.AO_Throttle_Valve_Pressure_Setpoint" isPressureAxis="false"/>

    <DataElement displayName="RF Power SP"  cn="PMA.RFPowerSetPoint" en="" dbName="PMA.Rf.PowerSetPoint" isPressureAxis=""/>
    <DataElement displayName="RF Forward Power" cn="PMA.RFForwardPower" en=""  dbName="PMA.Rf.ForwardPower" isPressureAxis=""/>
    <DataElement displayName="RF Reflect Power" cn="PMA.RFReflectPower" en=""  dbName="PMA.Rf.ReflectPower" isPressureAxis=""/>

    <DataElement displayName="Substrate Temperature" cn="PMA.SubstrateTempFeedback" en=""  dbName="PMA.IoHeater.HeaterChamber.ControlTcFeedback" isPressureAxis=""/>
    <DataElement displayName="Substrate Temperature SP" cn="PMA.SubstrateTempSetPoint" en=""  dbName="PMA.IoHeater.HeaterChamber.ControlTcSetPointView" isPressureAxis=""/>

	  <DataElement displayName="Gas1 MFC"  cn="PMA.Gas1 MFCFeedBack" en="" dbName="PMA.IoMfc.MfcGas1.FeedBack" isPressureAxis=""/>
    <DataElement displayName="Gas1 MFC SP"  cn="PMA.Gas1 MFCSetPoint" en="" dbName="PMA.IoMfc.MfcGas1.SetPoint" isPressureAxis=""/>

    <DataElement displayName="Gas2 MFC" cn="PMA.Gas2 MFCFeedBack" en=""  dbName="PMA.IoMfc.MfcGas2.FeedBack" isPressureAxis=""/>
    <DataElement displayName="Gas2 MFC SP" cn="PMA.Gas2 MFCSetPoint" en=""  dbName="PMA.IoMfc.MfcGas2.SetPoint" isPressureAxis=""/>
    
    <DataElement displayName="Gas3 MFC" cn="PMA.Gas3 MFCFeedBack" en=""  dbName="PMA.IoMfc.MfcGas3.FeedBack" isPressureAxis=""/>
    <DataElement displayName="Gas3 MFC SP" cn="PMA.Gas3 MFCSetPoint" en=""  dbName="PMA.IoMfc.MfcGas3.SetPoint" isPressureAxis=""/>

    <DataElement displayName="Gas4 MFC" cn="PMA.Gas4 MFCFeedBack" en=""  dbName="PMA.IoMfc.MfcGas4.FeedBack" isPressureAxis=""/>
    <DataElement displayName="Gas4 MFC SP" cn="PMA.Gas4 MFCSetPoint" en=""  dbName="PMA.IoMfc.MfcGas4.SetPoint" isPressureAxis=""/>

    <DataElement displayName="Gas5 MFC" cn="PMA.Gas5 MFCFeedBack" en=""  dbName="PMA.IoMfc.MfcGas5.FeedBack" isPressureAxis=""/>
    <DataElement displayName="Gas5 MFC SP" cn="PMA.Gas5 MFCSetPoint" en=""  dbName="PMA.IoMfc.MfcGas5.SetPoint" isPressureAxis=""/>

  </DataElements>
</SystemConfig>