Virgo_Mask/VirgoRT/Modules/AutoTransfer.cs

using Aitex.Core.Common;
using Aitex.Core.RT.DataCenter;
using Aitex.Core.RT.Device;
using Aitex.Core.RT.Event;
using Aitex.Core.RT.Log;
using Aitex.Core.RT.RecipeCenter;
using Aitex.Core.RT.Routine;
using Aitex.Core.RT.SCCore;
using Aitex.Sorter.Common;
using MECF.Framework.Common.DBCore;
using MECF.Framework.Common.Equipment;
using MECF.Framework.Common.Jobs;
using MECF.Framework.Common.Schedulers;
using MECF.Framework.Common.SubstrateTrackings;
using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.PMs;
using System;
using System.Collections.Generic;
using System.Linq;
using System.Xml;
using Aitex.Core.Util;
using VirgoRT.Modules.Schedulers;
using VirgoRT.Scheduler;
using VirgoRT.Module;

namespace VirgoRT.Modules
{
    public partial class AutoTransfer : TransferModule, IAutoTransfer
    {
        private List<ControlJobInfo> _lstControlJobs = new List<ControlJobInfo>();
        private List<ProcessJobInfo> _lstProcessJobs = new List<ProcessJobInfo>();

        //private Object _locker = new Object();

        private List<SchedulerPM> _lstPms = new List<SchedulerPM>();
        private List<SchedulerAligner> _lstAligners = new List<SchedulerAligner>();
        private List<SchedulerAligner> _lstCoolings = new List<SchedulerAligner>();
        private List<SchedulerLoadPort> _lstLps = new List<SchedulerLoadPort>();

        private const string LogSource = "Scheduler";

        private bool _isCycleMode;
        private int _cycleSetPoint = 0;
        private int _cycledCount = 0;
        private int _cycledWafer = 0;

        private bool _isRunningInParallelMode;
        private bool _isFixAlignerAndCooling; // 如果不同的尺寸，就固定住4寸和6寸，用不同的aligner，cooling，PM，避免来回
        private Dictionary<ModuleName, ModuleName> _mapLpPm = new Dictionary<ModuleName, ModuleName>();
        private Dictionary<ModuleName, ModuleName> _mapLpAligner = new Dictionary<ModuleName, ModuleName>();
        private Dictionary<ModuleName, ModuleName> _mapLpCooling = new Dictionary<ModuleName, ModuleName>();

        private List<ModuleName> _mapTarget = new List<ModuleName>();

        public bool HasJobRunning
        {
            get { return _lstControlJobs.Count > 0; }
        }

        public bool IsEfemRobotAvavilable => _efemRobot.IsAvailable;

        private SchedulerFACallback _faCallback;
        private SchedulerDBCallback _dbCallback;


        public AutoTransfer()
        {
            _faCallback = new SchedulerFACallback();
            _dbCallback = new SchedulerDBCallback();

            if (ModuleHelper.IsInstalled(ModuleName.PMA))
                _lstPms.Add(_pma);
            if (ModuleHelper.IsInstalled(ModuleName.PMB))
                _lstPms.Add(_pmb);

            _lstAligners.AddRange(new[] { _aligner1, _aligner2 });
            _lstCoolings.AddRange(new[] { _cooling1, _cooling2 });
            _lstLps.AddRange(new[] { _lp1, _lp2 });

            DATA.Subscribe("Scheduler.CycledCount", () => _cycledCount);
            DATA.Subscribe("Scheduler.CycledWafer", () => _cycledWafer);
            DATA.Subscribe("Scheduler.CycleSetPoint", () => _cycleSetPoint);


            DATA.Subscribe("Scheduler.PjIdList", () => Array.ConvertAll(_lstProcessJobs.ToArray(), x => x.InnerId.ToString()).ToList());

            //DATA.Subscribe("LP1.LocalJobName", () =>
            //{
            //    if (_lstControlJobs.Exists(x => x.Name == "CJ_Local_LP1"))
            //        return "CJ_Local_LP1";
            //    return "";
            //});
            //DATA.Subscribe("LP1.LocalJobStatus", () =>
            //{
            //    var jb = _lstControlJobs.Find(x => x.Name == "CJ_Local_LP1");
            //    if (jb != null)
            //        return jb.State.ToString();
            //    return "";
            //});
            //DATA.Subscribe("LP2.LocalJobName", () =>
            //{
            //    if (_lstControlJobs.Exists(x => x.Name == "CJ_Local_LP2"))
            //        return "CJ_Local_LP2";
            //    return "";
            //});
            //DATA.Subscribe("LP2.LocalJobStatus", () =>
            //{
            //    var jb = _lstControlJobs.Find(x => x.Name == "CJ_Local_LP2");
            //    if (jb != null)
            //        return jb.State.ToString();
            //    return "";
            //});

            foreach (var lp in _lstLps)
            {
                DATA.Subscribe($"{lp.Module}.LocalJobName", () =>
                {
                    var cj = _lstControlJobs.FirstOrDefault(x => x.Module == lp.Module.ToString());
                    if (cj != null)
                        return cj.Name;
                    return "";
                });

                DATA.Subscribe($"{lp.Module}.JobLotName", () =>
                {
                    var cj = _lstControlJobs.FirstOrDefault(x => x.Module == lp.Module.ToString());
                    if (cj != null)
                        return cj.LotName;

                    return "";
                });
                DATA.Subscribe($"{lp.Module}.LocalJobStatus", () =>
                {
                    var cj = _lstControlJobs.FirstOrDefault(x => x.Module == lp.Module.ToString());
                    if (cj != null)
                        return cj.State.ToString();
                    return "";
                });

                DATA.Subscribe($"{lp.Module}.CurrentRecipeList", () =>
                {
                    var local = lp;
                    List<string> result = Enumerable.Repeat("", 25).ToList();

                    for (int i = 0; i < _lstProcessJobs.Count; i++)
                    {
                        foreach (var wafers in _lstProcessJobs[i].SlotWafers)
                        {
                            if (wafers.Item1 == local.Module)
                            {
                                result[wafers.Item2] = _lstProcessJobs[i].Sequence.Name;
                            }
                        }
                    }
                    return result;
                });
            }
        }

        public void Clear()
        {
            _efemRobot.ResetTask();
            foreach (var pm in _lstPms)
            {
                pm.ResetTask();
            }

            foreach (var buffer in _lstAligners)
            {
                buffer.ResetTask();
            }

            foreach (var buffer in _lstCoolings)
            {
                buffer.ResetTask();
            }

            foreach (var lp in _lstLps)
            {
                lp.ResetTask();
            }


            _lstControlJobs.Clear();
            _lstProcessJobs.Clear();

            _mapLpAligner.Clear();
            _mapLpCooling.Clear();
            _mapLpPm.Clear();

            _isFixAlignerAndCooling = false;
            _isRunningInParallelMode = false;

            _mapTarget.Clear();
        }

        #region Job Management

        public void CreateJob(Dictionary<string, object> param)
        {
            _isCycleMode = SC.GetValue<bool>("System.IsCycleMode");
            _cycleSetPoint = _isCycleMode ? SC.GetValue<int>("System.CycleCount") : 0;


            string[] slotSequence = (string[])param["SlotSequence"];
            string jobId = (string)param["JobId"];
            string module = (string)param["Module"];
            bool autoStart = (bool)param["AutoStart"];
            string lotId = jobId;
            if (param.ContainsKey("LotId"))
                lotId = (string)param["LotId"];

            if (slotSequence.Length != 25)
            {
                EV.PostWarningLog(LogSource, $"slot sequence parameter not valid, length is {slotSequence.Length}, should be 25");
                _faCallback.JobCreateFailed(module, lotId, jobId, "");
                return;
            }

            if (!ModuleHelper.IsLoadPort(ModuleHelper.Converter(module)))
            {
                EV.PostWarningLog(LogSource, $"{module} should be LoadPort");
                _faCallback.JobCreateFailed(module, lotId, jobId, "");
                return;
            }

            if (string.IsNullOrEmpty(jobId))
            {
                jobId = "CJ_Local_" + module;
            }

            if (_lstControlJobs.Exists(x => x.Name == jobId))
            {
                EV.PostWarningLog(LogSource, $"{jobId} already created");
                _faCallback.JobCreateFailed(module, lotId, jobId, "");
                return;
            }

            SchedulerLoadPort lp = GetModule(module) as SchedulerLoadPort;
            if (!lp.CheckReadyRunJob())
            {
                EV.PostWarningLog(LogSource, $"{module} not ready");
                _faCallback.JobCreateFailed(module, lotId, jobId, "");
                return;
            }

            ControlJobInfo cj = new ControlJobInfo();
            cj.Name = jobId;
            cj.Module = module;
            cj.LotName = lotId;
            cj.LotInnerId = Guid.NewGuid();
            cj.LotWafers = new List<WaferInfo>();
            cj.CarrierID = lp.GetCarrierID();
            cj.SetState(EnumControlJobState.WaitingForStart);

            Dictionary<string, bool[]> seqSlot = new Dictionary<string, bool[]>();
            Dictionary<string, List<Tuple<ModuleName, int>>> seqSlotWafers = new Dictionary<string, List<Tuple<ModuleName, int>>>();
            Dictionary<string, string> indexSequence = new Dictionary<string, string>();

            bool enableGroupBySequence = SC.GetValue<bool>("Scheduler.GroupWaferBySequence");
            for (int i = 0; i < 25; i++)
            {
                if (string.IsNullOrEmpty(slotSequence[i]) || string.IsNullOrEmpty(slotSequence[i].Trim()))
                    continue;

                string groupName = enableGroupBySequence ? slotSequence[i].Trim() : i.ToString();
                indexSequence[groupName] = slotSequence[i];
                if (!seqSlot.ContainsKey(groupName))
                {
                    seqSlot[groupName] = new bool[25];
                }
                if (!seqSlotWafers.ContainsKey(groupName))
                {
                    seqSlotWafers[groupName] = new List<Tuple<ModuleName, int>>();
                }
                seqSlot[groupName][i] = true;

                if (!WaferManager.Instance.CheckHasWafer(module, i))
                {
                    EV.PostWarningLog(LogSource, $"job wafer: {module} slot {i + 1} not in the carrier");
                    //return;
                }
                if (!WaferManager.Instance.CheckWafer(ModuleHelper.Converter(module), i, WaferStatus.Normal))
                {
                    EV.PostWarningLog(LogSource, $"job wafer: {module} slot {i + 1} status is {WaferManager.Instance.GetWafer(ModuleHelper.Converter(module), i).Status}");
                    _faCallback.JobCreateFailed(module, lotId, jobId, "");
                    return;
                }

                if (WaferManager.Instance.GetWafer(ModuleHelper.Converter(module), i).ProcessState != EnumWaferProcessStatus.Idle)
                {
                    EV.PostWarningLog(LogSource, $"job wafer: {module} slot {i + 1} process status is {WaferManager.Instance.GetWafer(ModuleHelper.Converter(module), i).ProcessState}");
                    _faCallback.JobCreateFailed(module, lotId, jobId, "");
                    return;
                }

                var smallWafer = SC.GetValue<int>($"System.SmallWafer");

                //特殊场景，3寸片第一片不能取放
                if (i == 0 && (WaferManager.Instance.GetWafer(ModuleHelper.Converter(module), i).Size == WaferSize.WS3) && (int)smallWafer == 3)
                {
                    EV.PostWarningLog(LogSource, $"job wafer: {module} 3 inch slot {i + 1} is not supported.");
                    _faCallback.JobCreateFailed(module, lotId, jobId, "");
                    return;
                }

                cj.LotWafers.Add(WaferManager.Instance.GetWafer(ModuleHelper.Converter(module), i));
                WaferManager.Instance.GetWafer(ModuleHelper.Converter(module), i).SequenceName = slotSequence[i];
                WaferManager.Instance.GetWafer(ModuleHelper.Converter(module), i).NextSequenceStep = 0;
                WaferManager.Instance.UpdateWaferLotId(ModuleHelper.Converter(module), i, lotId);

                seqSlotWafers[groupName].Add(Tuple.Create(ModuleHelper.Converter(module), i));

                cj.JobWaferSize = WaferManager.Instance.GetWafer(ModuleHelper.Converter(module), i).Size;


            }

            if (seqSlotWafers.Count == 0)
            {
                EV.PostWarningLog(LogSource, $"job has not assign wafer");
                _faCallback.JobCreateFailed(module, lotId, jobId, "");
                return;
            }

            List<ProcessJobInfo> pjs = new List<ProcessJobInfo>();
            string[] seqs = seqSlot.Keys.ToArray();
            for (int i = 0; i < seqs.Length; i++)
            {
                ProcessJobInfo pj = new ProcessJobInfo();
                pj.Name = jobId + "_" + (i + 1);
                pj.Sequence = SequenceInfoHelper.GetInfo(indexSequence[seqs[i]]);
                pj.ControlJobName = cj.Name;
                pj.LotName = lotId;
                pj.SlotWafers = seqSlotWafers[seqs[i]];
                pj.SetState(EnumProcessJobState.Queued);

                if (!CheckSequencePmReady(pj.Sequence, null, out _, out string reason))
                {
                    EV.PostWarningLog(LogSource, $"no valid chamber for the {reason}");
                    _faCallback.JobCreateFailed(module, lotId, jobId, "");
                    return;
                }


                if (!CheckSequenceOrderOk(pj.Sequence, out reason))
                {
                    EV.PostWarningLog(LogSource, $"sequence path not valid, {reason}");
                    _faCallback.JobCreateFailed(module, lotId, jobId, "");
                    return;
                }
                if (!SC.GetValue<bool>("System.IsATMMode") && !CheckSequenceRecipeFileValid(pj.Sequence, out reason))
                {
                    EV.PostWarningLog(LogSource, $"recipe file not valid in the sequence, {reason}");
                    _faCallback.JobCreateFailed(module, lotId, jobId, "");
                    return;
                }

                if (!SetSequenceTemperatureInfo(pj.Sequence, out reason))
                {
                    EV.PostWarningLog(LogSource, $"sequence recipe temperature not valid, {reason}");
                    _faCallback.JobCreateFailed(module, lotId, jobId, "");
                    return;
                }

                pjs.Add(pj);
            }

            _dbCallback.LotUpdate(cj);
            foreach (var pj in pjs)
            {
                cj.ProcessJobNameList.Add(pj.Name);
                _lstProcessJobs.Add(pj);
            }

            _lstControlJobs.Add(cj);

            UpdateParallelMode();

            _faCallback.JobCreated(cj, GetFirstProcessJob(cj));
        }

        public ProcessJobInfo GetFirstProcessJob(ControlJobInfo cj)
        {
            foreach (var pj in _lstProcessJobs)
            {
                if (pj.ControlJobName == cj.Name)
                    return pj;
            }

            return null;
        }

        public void StopJob(string jobName)
        {
            ControlJobInfo cj = _lstControlJobs.Find(x => x.Name == jobName);
            if (cj == null)
            {
                EV.PostWarningLog(LogSource, $"stop job rejected, not found job with id {jobName}");
                return;
            }

            foreach (var pj in _lstProcessJobs)
            {
                if (pj.ControlJobName == cj.Name)
                {
                    pj.SetState(EnumProcessJobState.Stopping);
                }
            }

            _faCallback.JobStopped(cj, GetFirstProcessJob(cj));
            _dbCallback.LotFinished(cj);
        }

        public void AbortJob(string jobName)
        {
            ControlJobInfo cj = _lstControlJobs.Find(x => x.Name == jobName);
            if (cj == null)
            {
                EV.PostWarningLog(LogSource, $"abort job rejected, not found job with id {jobName}");
                return;
            }

            List<ProcessJobInfo> pjAbortList = new List<ProcessJobInfo>();
            foreach (var pj in _lstProcessJobs)
            {
                if (pj.ControlJobName == cj.Name)
                {
                    pj.SetState(EnumProcessJobState.Aborting);
                    pjAbortList.Add(pj);

                    int unprocessed = 0;
                    int aborted = 0;
                    WaferInfo[] wafers = WaferManager.Instance.GetWaferByProcessJob(pj.Name);
                    foreach (var waferInfo in wafers)
                    {
                        waferInfo.ProcessJob = null;
                        waferInfo.NextSequenceStep = 0;
                        if (waferInfo.ProcessState != EnumWaferProcessStatus.Completed)
                            unprocessed++;
                    }
                    JobDataRecorder.EndPJ(pj.InnerId.ToString(), aborted, unprocessed);
                }
            }
            _faCallback.JobAborted(cj, GetFirstProcessJob(cj));

            _dbCallback.LotFinished(cj);
            foreach (var pj in pjAbortList)
            {
                _lstProcessJobs.Remove(pj);
            }

            _lstControlJobs.Remove(cj);


        }

        public void ResumeJob(string jobName)
        {
            ControlJobInfo cj = _lstControlJobs.Find(x => x.Name == jobName);
            if (cj == null)
            {
                EV.PostWarningLog(LogSource, $"resume job rejected, not found job with id {jobName}");
                return;
            }

            if (cj.State == EnumControlJobState.Paused)
            {
                cj.SetState(EnumControlJobState.Executing);
            }

            _faCallback.JobResumed(cj, GetFirstProcessJob(cj));
        }

        public void StartJob(string jobName)
        {
            ControlJobInfo cj = _lstControlJobs.Find(x => x.Name == jobName);
            if (cj == null)
            {
                EV.PostWarningLog(LogSource, $"start job rejected, not found job with id {jobName}");
                return;
            }

            if (cj.State == EnumControlJobState.WaitingForStart)
            {
                cj.SetState(EnumControlJobState.Executing);
                //PreJobClean(cj);

                (GetModule(cj.Module) as SchedulerLoadPort).NoteJobStart();

                cj.StartTime = DateTime.Now;

                _dbCallback.LotCreated(cj);
                _faCallback.JobStarted(cj, GetFirstProcessJob(cj));
            }
        }

        public void PauseJob(string jobName)
        {
            ControlJobInfo cj = _lstControlJobs.Find(x => x.Name == jobName);
            if (cj == null)
            {
                EV.PostWarningLog(LogSource, $"pause job rejected, not found job with id {jobName}");
                return;
            }

            if (cj.State == EnumControlJobState.Executing)
            {
                cj.SetState(EnumControlJobState.Paused);
            }
            _faCallback.JobPaused(cj, GetFirstProcessJob(cj));
        }

        public void Map(string moduleName)
        {
            ModuleName target = ModuleHelper.Converter(moduleName);
            if (!ModuleHelper.IsLoadPort(target))
            {
                EV.PostWarningLog(LogSource, $"Invalid map target {target}");
                return;
            }

            if (!_mapTarget.Contains(target))
            {
                _mapTarget.Add(target);
            }
        }

        #endregion Job Management

        public Result Start(params object[] objs)
        {
            _isCycleMode = SC.GetValue<bool>("System.IsCycleMode");
            _cycleSetPoint = _isCycleMode ? SC.GetValue<int>("System.CycleCount") : 0;
            _cycledWafer = 0;
            _cycledCount = 0;

            bool hasPmOnline = false;
            foreach (var schedulerPm in _lstPms)
            {
                if (schedulerPm.IsAvailable)
                {
                    schedulerPm.SetPMAuto();
                    hasPmOnline = true;
                    continue;
                }
            }

            if (!hasPmOnline)
            {
                EV.PostWarningLog("Scheduler", "can not change to auto mode, at least one process chamber be online");
                return Result.FAIL;
            }


            return Result.RUN;
        }

        public Result Monitor()
        {
            MonitorEfemRobotMapTask();

            ControlJobInfo cjActive = _lstControlJobs.Find(x => x.State == EnumControlJobState.Executing);
            if (cjActive != null)
            {
                MonitorModuleTasks();
            }

            MonitorJobTasks();

            MonitorCleanTasks();

            return Result.RUN;
        }

        #region Job task

        public Result MonitorJobTasks()
        {
            UpdateParallelMode();

            UpdateProcessJobStatus();

            UpdateControlJobStatus();

            StartNewJob();

            return Result.RUN;
        }

        private void UpdateParallelMode()
        {
            bool enableParallel = SC.GetValue<bool>("Scheduler.IsRunInParallelMode");
            bool bothLpHasJob = true;
            _isRunningInParallelMode = enableParallel;

            Dictionary<ModuleName, Dictionary<ModuleName, float>> lpNeededPmTemperature = new Dictionary<ModuleName, Dictionary<ModuleName, float>>();

            foreach (var lp in _lstLps)
            {
                var cj = _lstControlJobs.Find(x => x.Module == lp.Module.ToString());
                bothLpHasJob = bothLpHasJob && (cj != null);

                if (cj != null)
                {
                    lpNeededPmTemperature[lp.Module] = new Dictionary<ModuleName, float>();

                    var pj = _lstProcessJobs.FirstOrDefault(x => x.ControlJobName == cj.Name);
                    if (pj != null)
                    {
                        var seq = pj.Sequence;
                        for (int i = 0; i < seq.Steps.Count; i++)
                        {
                            SequenceStepInfo stepInfo = seq.Steps[i];
                            foreach (var module in stepInfo.StepModules)
                            {
                                if (ModuleHelper.IsPm(module) && !lpNeededPmTemperature[lp.Module].ContainsKey(module))
                                {
                                    lpNeededPmTemperature[lp.Module][module] = (float)seq.Steps[i]
                                        .StepParameter[module == ModuleName.PMA ? "PMATemp" : "PMBTemp"];
                                }
                            }
                        }
                    }
                }
            }

            bool needSamePm = false;
            ModuleName pmSource = ModuleName.System;
            foreach (var pmNeeded in lpNeededPmTemperature)
            {
                if (pmNeeded.Value.Count == 1)
                {
                    var source = pmNeeded.Value.Keys.First();
                    if (source != pmSource)
                    {
                        pmSource = source;
                    }
                    else
                    {
                        needSamePm = true;
                        break;
                    }
                }
                else if(pmNeeded.Value.Count > 1)
                {
                    needSamePm = true;
                }
            }

            var needFixPosition = enableParallel && bothLpHasJob && !needSamePm;

            _isRunningInParallelMode = needFixPosition;

            if (needFixPosition != _isFixAlignerAndCooling)
            {
                _isFixAlignerAndCooling = needFixPosition;

                if (needFixPosition)
                {
                    //aligner固定不做逻辑
                    _mapLpAligner[ModuleName.LP1] = ModuleName.Aligner1;
                    _mapLpAligner[ModuleName.LP2] = ModuleName.Aligner2;

                    _mapLpCooling[ModuleName.LP1] = ModuleName.Cooling1;
                    _mapLpCooling[ModuleName.LP2] = ModuleName.Cooling2;
                    bool assigned = false;
                    foreach (var pmNeeded in lpNeededPmTemperature)
                    {
                        if (pmNeeded.Value.Count == 1)
                        {
                            _mapLpPm[pmNeeded.Key] = pmNeeded.Value.Keys.First();
                            var anotherLp = pmNeeded.Key == ModuleName.LP1 ? ModuleName.LP2 : ModuleName.LP1;
                            var anotherPm = _mapLpPm[pmNeeded.Key] == ModuleName.PMA ? ModuleName.PMB : ModuleName.PMA;

                            _mapLpPm[anotherLp] = anotherPm;
                            assigned = true;
                            break;
                        }
                    }

                    if (!assigned)
                    {
                        _mapLpPm[ModuleName.LP1] = ModuleName.PMA;
                        _mapLpPm[ModuleName.LP2] = ModuleName.PMB;

                        float pmaTemp = ((SchedulerPM)GetModule(ModuleName.PMA.ToString())).Temperature;
                        float pmbTemp = ((SchedulerPM)GetModule(ModuleName.PMB.ToString())).Temperature;

                        float tempCurrent = Math.Abs(lpNeededPmTemperature[ModuleName.LP1][ModuleName.PMA] - pmaTemp)
                            + Math.Abs(lpNeededPmTemperature[ModuleName.LP2][ModuleName.PMB] - pmbTemp);

                        float tempAnother = Math.Abs(lpNeededPmTemperature[ModuleName.LP1][ModuleName.PMB] - pmbTemp)
                                            + Math.Abs(lpNeededPmTemperature[ModuleName.LP2][ModuleName.PMA] - pmaTemp);

                        if (tempAnother < tempCurrent)
                        {
                            _mapLpPm[ModuleName.LP1] = ModuleName.PMB;
                            _mapLpPm[ModuleName.LP2] = ModuleName.PMA;
                        }
                    }
                }
            }
        }

        private void UpdateProcessJobStatus()
        {
            foreach (var pj in _lstProcessJobs)
            {
                if (pj.State == EnumProcessJobState.Processing)
                {
                    if (CheckAllWaferReturned(pj, true))
                    {
                        pj.SetState(EnumProcessJobState.ProcessingComplete);
                        JobDataRecorder.EndPJ(pj.InnerId.ToString(), 0, 0);
                    }
                }
                else if (pj.State == EnumProcessJobState.Stopping)
                {
                    if (CheckAllWaferReturned(pj, false))
                    {
                        pj.SetState(EnumProcessJobState.ProcessingComplete);
                        JobDataRecorder.EndPJ(pj.InnerId.ToString(), 0, 0);
                    }
                }

            }
        }

        private void UpdateControlJobStatus()
        {
            if (_lstControlJobs.Count == 0)
                return;

            bool allControlJobComplete = true;
            List<ControlJobInfo> cjRemoveList = new List<ControlJobInfo>();
            foreach (var cj in _lstControlJobs)
            {
                if (!GetModule(cj.Module).IsAvailable)
                {
                    allControlJobComplete = false;
                    continue;
                }
                if (cj.State == EnumControlJobState.Executing)
                {
                    bool allPjCompleted = true;
                    foreach (var pjName in cj.ProcessJobNameList)
                    {
                        var pj = _lstProcessJobs.Find(x => x.Name == pjName);
                        if (pj == null)
                        {
                            LOG.Error($"Not find pj named {pjName} in {cj.Name}");
                            continue;
                        }
                        if (pj.State != EnumProcessJobState.Complete && pj.State != EnumProcessJobState.ProcessingComplete)
                        {
                            allPjCompleted = false;
                            break;
                        }
                    }

                    if (allPjCompleted)
                    {
                        cj.SetState(EnumControlJobState.Completed);
                        cj.EndTime = DateTime.Now;

                        if( !(_isCycleMode && _cycledCount+1 < _cycleSetPoint))
                        {
                            CompleteJobClean(cj);
                        }

                        _faCallback.JobFinished(cj, GetFirstProcessJob(cj));
                        _dbCallback.LotFinished(cj);

                        if (!(_isCycleMode && _cycledCount < _cycleSetPoint))
                            (GetModule(cj.Module) as SchedulerLoadPort).NoteJobComplete();
                    }
                }


                LoadportCassetteState state = (LoadportCassetteState)DATA.Poll($"{cj.Module}.CassetteState");
                if (cj.State == EnumControlJobState.Completed && state != LoadportCassetteState.Normal)
                {
                    cjRemoveList.Add(cj);
                }

                allControlJobComplete = allControlJobComplete && cj.State == EnumControlJobState.Completed;
            }

            if (_isCycleMode && _cycledCount < (_isCycleMode ? _cycleSetPoint : 0))
            {
                int countPerCycle = 0;
                int countProcessed = 0;
                foreach (var pj in _lstProcessJobs)
                {
                    foreach (var pjSlotWafer in pj.SlotWafers)
                    {
                        countPerCycle++;
                        WaferInfo wafer = WaferManager.Instance.GetWafer(pjSlotWafer.Item1, pjSlotWafer.Item2);
                        if (!wafer.IsEmpty && !CheckWaferNeedProcess(pjSlotWafer.Item1, pjSlotWafer.Item2))
                            countProcessed++;
                    }
                }

                _cycledWafer = _cycledCount * countPerCycle + countProcessed;

                if (allControlJobComplete)
                {
                    _cycledCount++;

                    if (_cycledCount < _cycleSetPoint)
                    {
                        foreach (var cj in _lstControlJobs)
                        {
                            cj.SetState(EnumControlJobState.Executing);

                            //循环模式，不做PreJob Clean
                            //PreJobClean(cj);

                            cj.LotInnerId = Guid.NewGuid();
                            //PreJobClean(cj);

                            _dbCallback.LotCreated(cj);
                        }
                        foreach (var pj in _lstProcessJobs)
                        {
                            pj.SetState(EnumProcessJobState.Queued);
                            pj.InnerId = Guid.NewGuid();
                            foreach (var pjSlotWafer in pj.SlotWafers)
                            {
                                WaferInfo wafer = WaferManager.Instance.GetWafer(pjSlotWafer.Item1, pjSlotWafer.Item2);

                                wafer.ProcessJob = null;
                                wafer.NextSequenceStep = 0;
                                wafer.ProcessState = EnumWaferProcessStatus.Idle;
                            }
                        }
                    }
                }

            }

            foreach (var cj in cjRemoveList)
            {
                List<ProcessJobInfo> pjRemoveList = new List<ProcessJobInfo>();
                foreach (var pj in _lstProcessJobs)
                {
                    if (pj.ControlJobName == cj.Name)
                        pjRemoveList.Add(pj);
                }

                foreach (var pj in pjRemoveList)
                {
                    _lstProcessJobs.Remove(pj);
                }

                _lstControlJobs.Remove(cj);
            }

            if (cjRemoveList.Count > 0)
            {
                UpdateParallelMode();
            }
        }

        public bool CheckJobJustDone(out string sJobName)
        {
            foreach (var cj in _lstControlJobs)
            {
                if (cj.State == EnumControlJobState.Completed && !cj.BeenPosted)
                {
                    //LP;WaferSize;Lot;Number;Start;End;
                    sJobName = $"{cj.Module};{cj.JobWaferSize};{cj.LotName};{cj.LotWafers.Count};{cj.StartTime:T};{cj.EndTime:T}";
                    cj.BeenPosted = true;
                    return true;
                }
            }

            //string strInfo = $"{cj.Module} has finished: \r\n\r\nProcessed wafer number: {cj.LotWafers.Count} \r\nStart time: {cj.BeginTime} \r\nEnd time: {cj.EndTime} \r\nDuration: {(cj.EndTime - cj.BeginTime).TotalSeconds:F0} sec";


            sJobName = "NULL";
            return false;
        }

        public bool CheckAllJobDone()
        {
            foreach (var cj in _lstControlJobs)
            {
                if (cj.State == EnumControlJobState.Executing || cj.State == EnumControlJobState.Paused)
                    return false;
            }

            return true;
        }

        protected void StartNewJob()
        {
            ControlJobInfo cjActived = null;

            List<ModuleName> pmOccupied = GetPmUsedInRunningPj();
            foreach (var cj in _lstControlJobs)
            {
                if (cj.State != EnumControlJobState.Executing)
                    continue;

                cjActived = cj;

                foreach (var pjName in cjActived.ProcessJobNameList)
                {
                    var pj = _lstProcessJobs.Find(x => x.Name == pjName);
                    if (pj == null)
                    {
                        LOG.Error($"Not find pj named {pjName} in {cjActived.Name}");
                        continue;
                    }

                    if (pj.State == EnumProcessJobState.Queued)
                    {
                        if (CheckSequencePmReady(pj.Sequence, pmOccupied, out var pmUsed, out string reason))
                        {
                            ActiveProcessJob(pj);

                            foreach (var moduleName in pmUsed)
                            {
                                if (!pmOccupied.Contains(moduleName))
                                    pmOccupied.Add(moduleName);
                            }
                        }
                        break;
                    }
                }

                if (!_isRunningInParallelMode)
                    break;
            }
        }

        private bool ActiveProcessJob(ProcessJobInfo pj)
        {
            foreach (var pjSlotWafer in pj.SlotWafers)
            {
                WaferInfo wafer = WaferManager.Instance.GetWafer(pjSlotWafer.Item1, pjSlotWafer.Item2);

                wafer.ProcessJob = pj;
                wafer.NextSequenceStep = 0;

                WaferDataRecorder.SetPjInfo(wafer.InnerId.ToString(), pj.InnerId.ToString());
            }

            ControlJobInfo cj = _lstControlJobs.Find(x => x.Name == pj.ControlJobName);

            CarrierInfo carrier = CarrierManager.Instance.GetCarrier(cj.Module);
            JobDataRecorder.StartPJ(pj.InnerId.ToString(), carrier.InnerId.ToString(), cj.InnerId.ToString(), pj.Name, cj.Module, cj.Module, pj.SlotWafers.Count);

            pj.SetState(EnumProcessJobState.Processing);

            PreJobClean(cj);

            return true;
        }

        #endregion Job task

        #region Module task

        public Result MonitorModuleTasks()
        {
            MonitorPMTask();

            MonitorEfemRobotTask();

            MonitorAlignerTask();

            MonitorCoolingTask();

            MonitorInterlockTask();

            return Result.RUN;
        }

        private void MonitorInterlockTask()
        {
            foreach (var cj in _lstControlJobs)
            {
                if (cj.State == EnumControlJobState.Executing || cj.State == EnumControlJobState.Paused ||
                    cj.State == EnumControlJobState.WaitingForStart)
                {
                    var lp = GetModule(cj.Module);
                    if (!(lp as SchedulerLoadPort).CheckPlaced())
                    {
                        EV.PostAlarmLog("System", "Cassette removed while job not finished.");

                        Singleton<RouteManager>.Instance.PostMsg(RouteManager.MSG.ERROR);
                    }
                }
            }
        }

        private void MonitorAlignerTask()
        {
            foreach (var schedulerBuffer in _lstAligners)
            {
                if (!schedulerBuffer.IsAvailable
                    || WaferManager.Instance.CheckNoWafer(schedulerBuffer.Module, 0)
                    )
                    continue;

                if (CheckWaferNextStepIsAlign(schedulerBuffer.Module, 0))
                {
                    WaferInfo wafer = WaferManager.Instance.GetWafers(schedulerBuffer.Module)[0];
                    var job = wafer.ProcessJob;
                    GetWaferSequenceAlignTime(schedulerBuffer.Module, 0, out float time);
                    if (schedulerBuffer.Align(time))
                    {
                        wafer.NextSequenceStep++;
                    }
                }
            }


        }

        private void MonitorCoolingTask()
        {
            foreach (var schedulerBuffer in _lstCoolings)
            {
                if (!schedulerBuffer.IsAvailable
                    || WaferManager.Instance.CheckNoWafer(schedulerBuffer.Module, 0)
                )
                    continue;

                if (CheckWaferNextStepIsCooling(schedulerBuffer.Module, 0))
                {
                    WaferInfo wafer = WaferManager.Instance.GetWafers(schedulerBuffer.Module)[0];
                    var job = wafer.ProcessJob;
                    GetWaferSequenceAlignTime(schedulerBuffer.Module, 0, out float time);
                    if (schedulerBuffer.Align(time))
                    {
                        wafer.NextSequenceStep++;
                    }
                }
            }


        }

        private void MonitorEfemRobotTask()
        {
            if (!_efemRobot.IsAvailable)
                return;

            //efem robot is idle, release all the target 
            foreach (var pm in _lstPms)
            {
                if (pm.IsWaitTransfer(ModuleName.EfemRobot))
                {
                    pm.PostTransfer(ModuleName.EfemRobot);
                }
            }
            foreach (var buffer in _lstCoolings)
            {
                if (buffer.IsWaitTransfer(ModuleName.EfemRobot))
                {
                    buffer.PostTransfer(ModuleName.EfemRobot);
                }
            }
            foreach (var buffer in _lstAligners)
            {
                if (buffer.IsWaitTransfer(ModuleName.EfemRobot))
                {
                    buffer.PostTransfer(ModuleName.EfemRobot);
                }
            }

            foreach (var lp in _lstLps)
            {
                if (lp.IsWaitTransfer(ModuleName.EfemRobot, EnumTransferType.Pick))
                {
                    lp.PostTransfer(ModuleName.EfemRobot);
                }

                if (lp.IsWaitTransfer(ModuleName.EfemRobot, EnumTransferType.Place))
                {
                    lp.PostTransfer(ModuleName.EfemRobot);

                    ProcessJobInfo pj = WaferManager.Instance.GetWafer(lp.Module, lp.InTransferSlot)
                        .ProcessJob;
                    ControlJobInfo cj = _lstControlJobs.Find(x => x.Name == pj.ControlJobName);

                    _faCallback.JobWaferEnd(cj, pj, lp.Module.ToString(), lp.InTransferSlot);
                }

            }

            bool blade0HasWaferAndNeedCooling = WaferManager.Instance.CheckHasWafer(ModuleName.EfemRobot, 0) &&
                                                CheckWaferNeedCooling(ModuleName.EfemRobot, 0);
            bool blade1HasWaferAndNeedCooling = WaferManager.Instance.CheckHasWafer(ModuleName.EfemRobot, 1) &&
                                                CheckWaferNeedCooling(ModuleName.EfemRobot, 1);
            if (blade0HasWaferAndNeedCooling || blade1HasWaferAndNeedCooling)
            {
                MonitorEfemRobotCoolingTask();
                if (!_efemRobot.IsAvailable)
                    return;
            }

            bool blade0HasWaferAndComplete = WaferManager.Instance.CheckHasWafer(ModuleName.EfemRobot, 0)
                                             && !CheckWaferNeedProcess(ModuleName.EfemRobot, 0)
                                             && !CheckWaferNeedCooling(ModuleName.EfemRobot, 0);
            bool blade1HasWaferAndComplete = WaferManager.Instance.CheckHasWafer(ModuleName.EfemRobot, 1)
                                              && !CheckWaferNeedProcess(ModuleName.EfemRobot, 1)
                                              && !CheckWaferNeedCooling(ModuleName.EfemRobot, 1);
            if (blade0HasWaferAndComplete || blade1HasWaferAndComplete || ModuleHelper.IsLoadPort(_efemRobot.PreviousTarget))
            {
                MonitorEfemRobotLoadPortTask();
                if (!_efemRobot.IsAvailable)
                    return;
            }

            //bool blade0HasWaferAndNeedAligner = WaferManager.Instance.CheckHasWafer(ModuleName.EfemRobot, 0) &&
            //                                    CheckWaferNeedAlign(ModuleName.EfemRobot, 0);
            //bool blade1HasWaferAndNeedAligner = WaferManager.Instance.CheckHasWafer(ModuleName.EfemRobot, 1) &&
            //                                    CheckWaferNeedAlign(ModuleName.EfemRobot, 1);
            //if (blade0HasWaferAndNeedAligner || blade1HasWaferAndNeedAligner)
            //{
            //    MonitorEfemRobotAlignerTask();
            //    if (!_efemRobot.IsAvailable)
            //        return;
            //}

            MonitorEfemRobotAlignerTask();
            if (!_efemRobot.IsAvailable)
                return;

            MonitorEfemRobotPMTask();
            if (!_efemRobot.IsAvailable)
                return;


            MonitorEfemRobotLoadPortTask();
            if (!_efemRobot.IsAvailable)
                return;

            MonitorEfemRobotCoolingTask();
            if (!_efemRobot.IsAvailable)
                return;

            MonitorEfemRobotGotoTask();
            if (!_efemRobot.IsAvailable)
                return;
        }

        private void MonitorEfemRobotMapTask()
        {
            if (!_efemRobot.IsAvailable)
                return;

            if (_mapTarget.Count > 0)
            {
                ModuleName first = _mapTarget[0];

                //避免重复map，job信息被清除
                foreach (var cj in _lstControlJobs)
                {
                    if (cj.Module != first.ToString())
                        continue;

                    if (cj.State == EnumControlJobState.Executing || cj.State == EnumControlJobState.Paused)
                    {
                        EV.PostWarningLog("System", $"{first} is running, can not map again");
                        _mapTarget.Remove(first);
                    }
                }

                SchedulerLoadPort lp = GetModule(first.ToString()) as SchedulerLoadPort;
                if (lp != null && lp.IsAvailable)
                {
                    _efemRobot.Map(first);
                    _mapTarget.Remove(first);
                }
            }
        }

        private void MonitorEfemRobotPMTask()
        {
            if (!_efemRobot.IsAvailable)
                return;

            //swap PM
            if (WaferManager.Instance.CheckNoWafer(ModuleName.EfemRobot, 0) ^ WaferManager.Instance.CheckNoWafer(ModuleName.EfemRobot, 1))
            {
                Hand pickBlade = WaferManager.Instance.CheckNoWafer(ModuleName.EfemRobot, 0) ? Hand.Blade1 : Hand.Blade2;
                Hand placeBlade = pickBlade == Hand.Blade1 ? Hand.Blade2 : Hand.Blade1;

                SchedulerPM swapPm = null;

                foreach (var pm in _lstPms)
                {
                    if (!pm.IsAvailable || !WaferManager.Instance.CheckHasWafer(pm.Module, 0)
                                        || CheckWaferNeedProcess(pm.Module, 0, pm.Module)
                                        || !pm.IsReadyForPick(ModuleName.EfemRobot, 0, pickBlade)
                                        || !CheckVacuumWaferHasAvailableTarget(pm.Module, 0)
                                        || !CheckWaferNextProcessIn(ModuleName.EfemRobot, (int)placeBlade, pm.Module))
                        continue;

                    if (swapPm == null || (pm.WaferArriveTicks[0] < swapPm.WaferArriveTicks[0]))
                    {
                        swapPm = pm;
                    }
                }

                if (swapPm != null)
                {
                    if (_efemRobot.PickAndPlace(swapPm.Module, 0, 0, pickBlade, placeBlade))
                    {
                        swapPm.WaitTransfer(ModuleName.EfemRobot, EnumTransferType.Pick, 0);
                        return;
                    }
                }
            }

            //place to pm
            bool blade0HasWaferAndNeedProcess = WaferManager.Instance.CheckHasWafer(ModuleName.EfemRobot, 0)
                                                && CheckWaferNeedProcess(ModuleName.EfemRobot, 0);
            bool blade1HasWaferAndNeedProcess = WaferManager.Instance.CheckHasWafer(ModuleName.EfemRobot, 1)
                                                && CheckWaferNeedProcess(ModuleName.EfemRobot, 1);
            if (blade0HasWaferAndNeedProcess || blade1HasWaferAndNeedProcess)
            {
                List<Hand> orderedBlade = new List<Hand>();
                if (blade0HasWaferAndNeedProcess && blade1HasWaferAndNeedProcess)
                {
                    int result = CompareWaferPriority(ModuleName.EfemRobot, 0, ModuleName.EfemRobot, 1);
                    if (result < 0 || (result==0 && _efemRobot.WaferArriveTicks[1] < _efemRobot.WaferArriveTicks[0]))
                    {
                        orderedBlade.AddRange(new List<Hand>() {Hand.Blade2, Hand.Blade1});
                    }
                    else
                    {
                        orderedBlade.AddRange(new List<Hand>() { Hand.Blade1, Hand.Blade2 });
                    }
                }
                else
                {
                    orderedBlade.Add(blade0HasWaferAndNeedProcess ? Hand.Blade1 : Hand.Blade2);
                }

                foreach (Hand placeBlade in orderedBlade)
                {
                    foreach (var pm in _lstPms)
                    {
                        if (!pm.IsAvailable
                            || !WaferManager.Instance.CheckNoWafer(pm.Module, 0)
                            || !CheckWaferNextProcessIn(ModuleName.EfemRobot, (int)placeBlade, pm.Module))
                            continue;

                        if (_isFixAlignerAndCooling && GetWaferCountOutofLP(ModuleName.LP1) <= 1 && GetWaferCountOutofLP(ModuleName.LP2) <= 1)
                        {
                            int origin = WaferManager.Instance.GetWafer(ModuleName.EfemRobot, (int)placeBlade).OriginStation;

                            if (origin == (int)ModuleName.LP1 && _mapLpPm[ModuleName.LP1] != pm.Module)
                                continue;
                            if (origin == (int)ModuleName.LP2 && _mapLpPm[ModuleName.LP2] != pm.Module)
                                continue;
                        }

                        if (!pm.IsReadyForPlace(ModuleName.EfemRobot, 0, placeBlade))
                            continue;

                        if (_efemRobot.Place(pm.Module, 0, placeBlade))
                        {
                            pm.WaitTransfer(ModuleName.EfemRobot, EnumTransferType.Place, 0);
                            return;
                        }
                    }
                }

            }

            if (!_efemRobot.IsAvailable)
                return;

            //pick from pm
            bool blade1Empty = WaferManager.Instance.CheckNoWafer(ModuleName.EfemRobot, 0);
            bool blade2Empty = WaferManager.Instance.CheckNoWafer(ModuleName.EfemRobot, 1);
            if (blade1Empty || blade2Empty)
            {
                ModuleName pickPm = ModuleName.System;
                int preOriginSlot = int.MaxValue;
                string pmPj = string.Empty;
                int preWaferCountInCooling = 0;
                foreach (var schedulerPm in _lstPms)
                {
                    if (!schedulerPm.IsAvailable
                        || WaferManager.Instance.CheckNoWafer(schedulerPm.Module, 0)
                        || CheckWaferNeedProcess(schedulerPm.Module, 0, schedulerPm.Module))
                        continue;

                    WaferInfo wafer = WaferManager.Instance.GetWafer(schedulerPm.Module, 0);

                    bool pickAllowed = CheckVacuumWaferHasAvailableTarget(schedulerPm.Module, 0);

                    if (!pickAllowed)
                        continue;

                    if ((pickPm == ModuleName.System)
                        || (wafer.OriginSlot < preOriginSlot && pmPj == wafer.ProcessJob.Name)
                        || (GetCoolingWaferCount(wafer.ProcessJob.Name) < preWaferCountInCooling))
                    {
                        preOriginSlot = wafer.OriginSlot;
                        pickPm = schedulerPm.Module;
                        pmPj = wafer.ProcessJob.Name;
                        preWaferCountInCooling = GetCoolingWaferCount(pmPj);
                        continue;
                    }
                }

                if (pickPm != ModuleName.System)
                {
                    Hand pickBlade = blade1Empty ? Hand.Blade1 : Hand.Blade2;
                    if (blade1Empty && blade2Empty)
                    {
                        if (_efemRobot.WaferArriveTicks[1] < _efemRobot.WaferArriveTicks[0])
                            pickBlade = Hand.Blade2;
                    }

                    SchedulerModule pm = GetModule(pickPm.ToString());
                    if (pm.IsReadyForPick(ModuleName.EfemRobot, 0, pickBlade))
                    {
                        if (_efemRobot.Pick(pm.Module, 0, pickBlade))
                        {
                            pm.WaitTransfer(ModuleName.EfemRobot, EnumTransferType.Pick, 0);
                            return;
                        }
                    }
                }
            }
        }

        private void MonitorEfemRobotLoadPortTask()
        {
            if (!_efemRobot.IsAvailable)
                return;

            //pick
            int maxOutWafer = 6;//cooling*2 + Aligner*2+PM*2
            bool blade1Empty = WaferManager.Instance.CheckNoWafer(ModuleName.EfemRobot, 0);
            bool blade2Empty = WaferManager.Instance.CheckNoWafer(ModuleName.EfemRobot, 1);
            bool bothAlignerEmpty = true;
            foreach (var schedulerAligner in _lstAligners)
            {
                if (WaferManager.Instance.CheckHasWafer(schedulerAligner.Module, 0))
                {
                    bothAlignerEmpty = false;
                    break;
                }
            }
            bool bothBladeEmpty = blade1Empty && blade2Empty;

            if (GetWaferCountOutofLP(ModuleName.System) < maxOutWafer
                && GetWaferCountInJobQueue(ModuleName.System) > 0
                && (bothBladeEmpty || (bothAlignerEmpty && (blade1Empty || blade2Empty))))
            {
                SlotItem position = GetNextWaferInJobQueue(ModuleName.System);
                if (position != null
                    && CheckWaferHasAvailableTarget(position.Module, position.Slot)
                    && CheckWaferPmTemperatureIsOk(position.Module, position.Slot))
                {
                    SchedulerLoadPort lp = (SchedulerLoadPort)GetModule(position.Module.ToString());
                    Hand pickBlade = blade1Empty ? Hand.Blade1 : Hand.Blade2;
                    if (lp.IsReadyForPick(ModuleName.EfemRobot, position.Slot, pickBlade))
                    {

                        if (_efemRobot.Pick(position.Module, position.Slot, pickBlade))
                        {
                            lp.WaitTransfer(ModuleName.EfemRobot, EnumTransferType.Pick, position.Slot);

                            ProcessJobInfo pj = WaferManager.Instance.GetWafer(position.Module, position.Slot)
                                .ProcessJob;
                            ControlJobInfo cj = _lstControlJobs.Find(x => x.Name == pj.ControlJobName);

                            _faCallback.JobWaferStart(cj, pj, position.Module.ToString(), position.Slot);
                            return;
                        }
                    }
                }
            }


            if (!_efemRobot.IsAvailable)
                return;

            //place
            bool blade0HasWaferAndProcessed = WaferManager.Instance.CheckHasWafer(ModuleName.EfemRobot, 0)
                                              && !CheckWaferNeedProcess(ModuleName.EfemRobot, 0)
                                              && !CheckWaferNeedCooling(ModuleName.EfemRobot, 0);
            bool blade1HasWaferAndProcessed = WaferManager.Instance.CheckHasWafer(ModuleName.EfemRobot, 1)
                                              && !CheckWaferNeedProcess(ModuleName.EfemRobot, 1)
                                              && !CheckWaferNeedCooling(ModuleName.EfemRobot, 1);
            if (blade0HasWaferAndProcessed || blade1HasWaferAndProcessed)
            {
                Hand placeBlade = blade0HasWaferAndProcessed ? Hand.Blade1 : Hand.Blade2;
                if (blade0HasWaferAndProcessed && blade1HasWaferAndProcessed)
                {
                    if (WaferManager.Instance.GetWafer(ModuleName.EfemRobot, 1).OriginSlot <
                        WaferManager.Instance.GetWafer(ModuleName.EfemRobot, 0).OriginSlot)
                    {
                        placeBlade = Hand.Blade2;
                    }
                }

                SlotItem destination = GetWaferReturnLoadPort(_efemRobot.Module, (int)placeBlade);
                if (destination != null && ModuleHelper.IsLoadPort(destination.Module))
                {
                    SchedulerLoadPort lp = (SchedulerLoadPort)GetModule(destination.Module.ToString());
                    if (lp.IsReadyForPlace(ModuleName.EfemRobot, destination.Slot, placeBlade))
                    {
                        if (_efemRobot.Place(destination.Module, destination.Slot, (Hand)placeBlade))
                        {
                            lp.WaitTransfer(ModuleName.EfemRobot, EnumTransferType.Place, destination.Slot);

                            //_cycledTotalWafer++;
                            //if (SC.ContainsItem("System.TotalCycledWafer"))
                            //    SC.SetItemValue("System.TotalCycledWafer", _cycledTotalWafer);

                            return;
                        }

                    }
                }
            }
        }

        private void MonitorEfemRobotAlignerTask()
        {
            if (!_efemRobot.IsAvailable)
                return;

            //swap Aligner
            if (WaferManager.Instance.CheckNoWafer(ModuleName.EfemRobot, 0) ^ WaferManager.Instance.CheckNoWafer(ModuleName.EfemRobot, 1))
            {
                Hand pickBlade = WaferManager.Instance.CheckNoWafer(ModuleName.EfemRobot, 0) ? Hand.Blade1 : Hand.Blade2;
                Hand placeBlade = pickBlade == Hand.Blade1 ? Hand.Blade2 : Hand.Blade1;

                SchedulerAligner swapAligner = null;

                foreach (var aligner in _lstAligners)
                {
                    if (!aligner.IsAvailable || !WaferManager.Instance.CheckHasWafer(aligner.Module, 0)
                                             || !aligner.IsReadyForPick(ModuleName.EfemRobot, 0, pickBlade)
                                             || CheckWaferNeedAlign(aligner.Module, 0)
                                             || !CheckWaferNeedAlign(ModuleName.EfemRobot, (int)placeBlade))
                        continue;

                    if (swapAligner == null || (aligner.WaferArriveTicks[0] < swapAligner.WaferArriveTicks[0]))
                    {
                        swapAligner = aligner;
                    }
                }

                if (swapAligner != null)
                {
                    if (_efemRobot.PickAndPlace(swapAligner.Module, 0, 0, pickBlade, placeBlade))
                    {
                        swapAligner.WaitTransfer(ModuleName.EfemRobot, EnumTransferType.Pick, 0);
                        return;
                    }
                }
            }

            //place to aligner
            bool blade0HasWaferAndNeedAligner = WaferManager.Instance.CheckHasWafer(ModuleName.EfemRobot, 0) &&
                                                CheckWaferNeedAlign(ModuleName.EfemRobot, 0);
            bool blade1HasWaferAndNeedAligner = WaferManager.Instance.CheckHasWafer(ModuleName.EfemRobot, 1) &&
                                                CheckWaferNeedAlign(ModuleName.EfemRobot, 1);
            if (blade0HasWaferAndNeedAligner || blade1HasWaferAndNeedAligner)
            {
                foreach (var buffer in _lstAligners)
                {
                    if (!buffer.IsAvailable || !WaferManager.Instance.CheckNoWafer(buffer.Module, 0))
                        continue;


                    List<Hand> orderedBlade = new List<Hand>();
                    if (blade0HasWaferAndNeedAligner && blade1HasWaferAndNeedAligner)
                    {
                        int result = CompareWaferPriority(ModuleName.EfemRobot, 0, ModuleName.EfemRobot, 1);
                        if (result < 0 || (result == 0 && _efemRobot.WaferArriveTicks[1] < _efemRobot.WaferArriveTicks[0]))
                        {
                            orderedBlade.AddRange(new List<Hand>() { Hand.Blade2, Hand.Blade1 });
                        }
                        else
                        {
                            orderedBlade.AddRange(new List<Hand>() { Hand.Blade1, Hand.Blade2 });
                        }
                    }
                    else
                    {
                        orderedBlade.Add(blade0HasWaferAndNeedAligner ? Hand.Blade1 : Hand.Blade2);
                    }

                    foreach (Hand placeBlade in orderedBlade)
                    {

                        if (_isFixAlignerAndCooling && GetWaferCountOutofLP(ModuleName.LP1) <= 1 && GetWaferCountOutofLP(ModuleName.LP2) <= 1)
                        {
                            int origin = WaferManager.Instance.GetWafer(ModuleName.EfemRobot, (int)placeBlade).OriginStation;

                            if (origin == (int)ModuleName.LP1 && _mapLpAligner[ModuleName.LP1] != buffer.Module)
                                continue;
                            if (origin == (int)ModuleName.LP2 && _mapLpAligner[ModuleName.LP2] != buffer.Module)
                                continue;
                        }

                        if (!buffer.IsReadyForPlace(ModuleName.EfemRobot, 0, placeBlade))
                            continue;

                        if (_efemRobot.Place(buffer.Module, 0, placeBlade))
                        {
                            buffer.WaitTransfer(ModuleName.EfemRobot, EnumTransferType.Place, 0);
                            return;
                        }
                    }
                }
            }

            if (!_efemRobot.IsAvailable)
                return;

            //pick from aligner
            bool blade1Empty = WaferManager.Instance.CheckNoWafer(ModuleName.EfemRobot, 0);
            bool blade2Empty = WaferManager.Instance.CheckNoWafer(ModuleName.EfemRobot, 1);
            if (blade1Empty || blade2Empty)
            {
                ModuleName pickAligner = ModuleName.System;
                int preOriginSlot = int.MaxValue;
                string prePj = string.Empty;
                int preWaferCountInCooling = 0;

                foreach (var schedulerAligner in _lstAligners)
                {
                    if (!schedulerAligner.IsAvailable
                        || WaferManager.Instance.CheckNoWafer(schedulerAligner.Module, 0)
                        || CheckWaferNeedAlign(schedulerAligner.Module, 0))
                        continue;

                    WaferInfo wafer = WaferManager.Instance.GetWafer(schedulerAligner.Module, 0);

                    bool pickAllowed = CheckBufferWaferHasAvailableTarget(schedulerAligner.Module, 0)
                        || (blade1Empty && blade2Empty);

                    if (!pickAllowed)
                    {
                        continue;
                    }

                    if ((pickAligner == ModuleName.System)
                        || (wafer.OriginSlot < preOriginSlot && prePj == wafer.ProcessJob.Name)
                        || (GetCoolingWaferCount(wafer.ProcessJob.Name) < preWaferCountInCooling))
                    {
                        preOriginSlot = wafer.OriginSlot;
                        pickAligner = schedulerAligner.Module;
                        prePj = wafer.ProcessJob.Name;
                        preWaferCountInCooling = GetCoolingWaferCount(prePj);
                        continue;
                    }
                }

                if (pickAligner != ModuleName.System)
                {
                    SchedulerModule buffer = GetModule(pickAligner.ToString());
                    Hand pickBlade = blade1Empty ? Hand.Blade1 : Hand.Blade2;

                    if (!CheckWaferNeedProcess(ModuleName.EfemRobot, 0) &&
                        !CheckWaferNeedProcess(ModuleName.EfemRobot, 1))
                    {
                        if (buffer.IsReadyForPick(ModuleName.EfemRobot, 0, pickBlade))
                        {
                            if (_efemRobot.Pick(buffer.Module, 0, pickBlade))
                            {
                                buffer.WaitTransfer(ModuleName.EfemRobot, EnumTransferType.Pick, 0);
                                return;
                            }
                        }
                    }

                }
            }
        }

        private void MonitorEfemRobotCoolingTask()
        {
            if (!_efemRobot.IsAvailable)
                return;

            //swap Cooling
            if (WaferManager.Instance.CheckNoWafer(ModuleName.EfemRobot, 0) ^ WaferManager.Instance.CheckNoWafer(ModuleName.EfemRobot, 1))
            {
                Hand pickBlade = WaferManager.Instance.CheckNoWafer(ModuleName.EfemRobot, 0) ? Hand.Blade1 : Hand.Blade2;
                Hand placeBlade = pickBlade == Hand.Blade1 ? Hand.Blade2 : Hand.Blade1;

                SchedulerAligner swapCooling = null;

                foreach (var cooling in _lstCoolings)
                {
                    if (!cooling.IsAvailable || !WaferManager.Instance.CheckHasWafer(cooling.Module, 0)
                                             || !cooling.IsReadyForPick(ModuleName.EfemRobot, 0, pickBlade)
                                             || !CheckWaferNeedCooling(ModuleName.EfemRobot, (int)placeBlade))
                        continue;

                    if (swapCooling == null || (cooling.WaferArriveTicks[0] < swapCooling.WaferArriveTicks[0]))
                    {
                        swapCooling = cooling;
                    }
                }

                if (swapCooling != null)
                {
                    if (_efemRobot.PickAndPlace(swapCooling.Module, 0, 0, pickBlade, placeBlade))
                    {
                        swapCooling.WaitTransfer(ModuleName.EfemRobot, EnumTransferType.Pick, 0);
                        return;
                    }
                }
            }

            if (!_efemRobot.IsAvailable)
                return;
            //place to cooling
            bool blade0HasWaferAndNeedCooling = WaferManager.Instance.CheckHasWafer(ModuleName.EfemRobot, 0) &&
                                                CheckWaferNeedCooling(ModuleName.EfemRobot, 0);
            bool blade1HasWaferAndNeedCooling = WaferManager.Instance.CheckHasWafer(ModuleName.EfemRobot, 1) &&
                                                CheckWaferNeedCooling(ModuleName.EfemRobot, 1);

            if (blade0HasWaferAndNeedCooling || blade1HasWaferAndNeedCooling)
            {
                foreach (var buffer in _lstCoolings)
                {
                    if (!buffer.IsAvailable || !WaferManager.Instance.CheckNoWafer(buffer.Module, 0))
                        continue;

                    List<Hand> orderedBlade = new List<Hand>();
                    if (blade0HasWaferAndNeedCooling && blade1HasWaferAndNeedCooling)
                    {
                        int result = CompareWaferPriority(ModuleName.EfemRobot, 0, ModuleName.EfemRobot, 1);
                        if (result < 0 || (result == 0 && _efemRobot.WaferArriveTicks[1] < _efemRobot.WaferArriveTicks[0]))
                        {
                            orderedBlade.AddRange(new List<Hand>() { Hand.Blade2, Hand.Blade1 });
                        }
                        else
                        {
                            orderedBlade.AddRange(new List<Hand>() { Hand.Blade1, Hand.Blade2 });
                        }
                    }
                    else
                    {
                        orderedBlade.Add(blade0HasWaferAndNeedCooling ? Hand.Blade1 : Hand.Blade2);
                    }

                    foreach (Hand placeBlade in orderedBlade)
                    {

                        if (_isFixAlignerAndCooling && GetWaferCountOutofLP(ModuleName.LP1) <= 1 && GetWaferCountOutofLP(ModuleName.LP2) <= 1)
                        {
                            int origin = WaferManager.Instance.GetWafer(ModuleName.EfemRobot, (int)placeBlade).OriginStation;

                            if (origin == (int)ModuleName.LP1 && _mapLpCooling[ModuleName.LP1] != buffer.Module)
                                continue;
                            if (origin == (int)ModuleName.LP2 && _mapLpCooling[ModuleName.LP2] != buffer.Module)
                                continue;
                        }


                        if (!buffer.IsReadyForPlace(ModuleName.EfemRobot, 0, placeBlade))
                            continue;


                        if (_efemRobot.Place(buffer.Module, 0, placeBlade))
                        {
                            buffer.WaitTransfer(ModuleName.EfemRobot, EnumTransferType.Place, 0);
                            return;
                        }
                    }
                }
            }

            if (!_efemRobot.IsAvailable)
                return;

            //pick from cooling
            bool blade1Empty = WaferManager.Instance.CheckNoWafer(ModuleName.EfemRobot, 0);
            bool blade2Empty = WaferManager.Instance.CheckNoWafer(ModuleName.EfemRobot, 1);
            if (blade1Empty || blade2Empty)
            {
                ModuleName pickBuffer = ModuleName.System;
                int preOriginSlot = int.MaxValue;
                string prePj = string.Empty;
                int preWaferCountInPm = 0;
                foreach (var schedulerBuffer in _lstCoolings)
                {
                    if (!schedulerBuffer.IsAvailable
                        || WaferManager.Instance.CheckNoWafer(schedulerBuffer.Module, 0)
                        || CheckWaferNeedCooling(schedulerBuffer.Module, 0))
                        continue;

                    WaferInfo wafer = WaferManager.Instance.GetWafer(schedulerBuffer.Module, 0);

                    bool pickAllowed = CheckWaferHasAvailableTarget(schedulerBuffer.Module, 0);
                    if (!pickAllowed)
                        continue;

                    if ((pickBuffer == ModuleName.System)
                        || (wafer.OriginSlot < preOriginSlot && prePj == wafer.ProcessJob.Name)
                        || (GetProcessingWaferCount(wafer.ProcessJob.Name) < preWaferCountInPm))
                    {
                        preOriginSlot = wafer.OriginSlot;
                        pickBuffer = schedulerBuffer.Module;
                        prePj = wafer.ProcessJob.Name;
                        preWaferCountInPm = GetProcessingWaferCount(prePj);
                        continue;
                    }
                }

                if (pickBuffer != ModuleName.System)
                {
                    SchedulerModule buffer = GetModule(pickBuffer.ToString());
                    Hand pickBlade = blade1Empty ? Hand.Blade1 : Hand.Blade2;
                    if (buffer.IsReadyForPick(ModuleName.EfemRobot, 0, pickBlade))
                    {

                        if (_efemRobot.Pick(buffer.Module, 0, pickBlade))
                        {
                            buffer.WaitTransfer(ModuleName.EfemRobot, EnumTransferType.Pick, 0);
                            return;
                        }
                    }
                }
            }
        }

        private void MonitorEfemRobotGotoTask()
        {
            if (!_efemRobot.IsAvailable)
                return;

            SchedulerPM gotoPm = null;
            int gotoSlot = Int32.MaxValue;
            int gotoModule = -1;

            foreach (var pm in _lstPms)
            {
                WaferInfo wafer = WaferManager.Instance.GetWafer(pm.Module, 0);
                if (wafer.IsEmpty)
                    continue;

                if (gotoPm == null)
                {
                    gotoPm = pm;
                    gotoModule = wafer.OriginStation;
                    gotoSlot = wafer.OriginSlot;
                    continue;
                }

                if (wafer.OriginSlot < gotoSlot && gotoModule == wafer.OriginStation)
                {
                    gotoSlot = wafer.OriginSlot;
                    gotoPm = pm;
                }
            }

            if (gotoPm != null)
            {
                if (_efemRobot.PreviousTarget == gotoPm.Module)
                    return;

                if (_efemRobot.Goto(gotoPm.Module, 0))
                {
                    return;
                }
            }
        }

        private void MonitorPMTask()
        {
            bool robotWaferAssigned = false;
            bool aligner1WaferAssigned = false;
            bool aligner2WaferAssigned = false;

            foreach (var pm in _lstPms)
            {
                if (!pm.IsAvailable)
                    continue;

                if (WaferManager.Instance.CheckHasWafer(pm.Module, 0))
                {
                    if (CheckWaferNeedProcess(pm.Module, 0, pm.Module))
                    {
                        WaferInfo wafer = WaferManager.Instance.GetWafer(pm.Module, 0);
                        var recipeName = pm.Module == ModuleName.PMA
                            ? wafer.ProcessJob.Sequence.Steps[wafer.NextSequenceStep].StepParameter["PMARecipe"]
                            : wafer.ProcessJob.Sequence.Steps[wafer.NextSequenceStep].StepParameter["PMBRecipe"];
                        if (pm.Process((string)recipeName, false, true, wafer))
                        {
                            WaferManager.Instance.GetWafer(pm.Module, 0).NextSequenceStep++;
                            continue;
                        }
                    }
                    else
                    {
                        if (!pm.IsReadyForPick(ModuleName.EfemRobot, 0, Hand.Blade1))
                        {
                            pm.PrepareTransfer(ModuleName.EfemRobot, EnumTransferType.Pick, 0);
                        }
                    }
                }
                else //no wafer
                {
                    if (WaferManager.Instance.CheckNoWafer(ModuleName.EfemRobot, 0)
                        && WaferManager.Instance.CheckNoWafer(ModuleName.EfemRobot, 1)
                        && WaferManager.Instance.CheckNoWafer(ModuleName.Aligner1, 0)
                        && WaferManager.Instance.CheckNoWafer(ModuleName.Aligner2, 0))
                    {
                        ModuleName source = ModuleName.System;
                        if (_isFixAlignerAndCooling)
                        {
                            foreach (var moduleName in _mapLpPm)
                            {
                                if (moduleName.Value == pm.Module)
                                    source = moduleName.Key;
                            }
                        }
                        SlotItem item = GetNextWaferInJobQueue(source);
                        if (item != null && CheckWaferNeedProcess(item.Module, item.Slot, pm.Module))
                        {
                            if (GetWaferTemperatureSetInRecipe(item.Module, item.Slot, pm.Module, out float temp) && !pm.IsTemperatureReady(temp))
                            {
                                pm.Preheating(temp);
                                continue;
                            }
                        }
                    }

                    if (!pm.IsAvailable)
                        continue;

                    if (!robotWaferAssigned 
                        && CheckWaferNeedProcess(ModuleName.EfemRobot, 0, pm.Module) 
                        && CheckWaferNextProcessIn(ModuleName.EfemRobot, 0, pm.Module))
                    {
                        robotWaferAssigned = true;

                        GetWaferTemperatureSetInRecipe(ModuleName.EfemRobot, 0, pm.Module, out float temp);

                        bool alreadyPrepare = false;
                        foreach (var schedulerPm in _lstPms)
                        {
                            if (schedulerPm.IsPrepareTransfer(ModuleName.EfemRobot, EnumTransferType.Place, 0)
                                || (!_efemRobot.IsAvailable)
                                || (schedulerPm.IsAvailable && WaferManager.Instance.CheckNoWafer(pm.Module, 0) && pm.IsReadyForPlace(ModuleName.EfemRobot, 0, Hand.Blade1)))
                                alreadyPrepare = true;
                        }

                        if (!alreadyPrepare)
                        {
                            if (!pm.IsReadyForPlace(ModuleName.EfemRobot, 0, Hand.Blade1) || !pm.IsTemperatureReady(temp))
                            {
                                pm.PrepareTransfer(ModuleName.EfemRobot, EnumTransferType.Place, 0, temp, Hand.Blade1, WaferManager.Instance.GetWafer(ModuleName.EfemRobot, 0).Size);
                            }
                        }


                    }

                    if (!pm.IsAvailable)
                        continue;

                    if (!robotWaferAssigned
                        && CheckWaferNeedProcess(ModuleName.EfemRobot, 1, pm.Module)
                        && CheckWaferNextProcessIn(ModuleName.EfemRobot, 1, pm.Module))
                    {
                        robotWaferAssigned = true;

                        GetWaferTemperatureSetInRecipe(ModuleName.EfemRobot, 1, pm.Module, out float temp);

                        bool alreadyPrepare = false;
                        foreach (var schedulerPm in _lstPms)
                        {
                            if (schedulerPm.IsPrepareTransfer(ModuleName.EfemRobot, EnumTransferType.Place, 0)
                                || (!_efemRobot.IsAvailable)
                                || (schedulerPm.IsAvailable && WaferManager.Instance.CheckNoWafer(pm.Module, 0) && pm.IsReadyForPlace(ModuleName.EfemRobot, 0, Hand.Blade2)))
                                alreadyPrepare = true;
                        }

                        if (!alreadyPrepare)
                        {

                            if (!pm.IsReadyForPlace(ModuleName.EfemRobot, 0, Hand.Blade2) ||
                                !pm.IsTemperatureReady(temp))
                            {
                                pm.PrepareTransfer(ModuleName.EfemRobot, EnumTransferType.Place, 0, temp, Hand.Blade2,
                                    WaferManager.Instance.GetWafer(ModuleName.EfemRobot, 1).Size);
                            }
                        }
                    }

                    if (!pm.IsAvailable)
                        continue;

                    //并行模式下，避免提前预判aligner的wafer位置
                    if (_isRunningInParallelMode) 
                        continue;

                    if (!aligner1WaferAssigned && CheckWaferNeedProcess(ModuleName.Aligner1, 0, pm.Module))
                    {
                        aligner1WaferAssigned = true;

                        GetWaferTemperatureSetInRecipe(ModuleName.Aligner1, 0, pm.Module, out float temp);

                        bool alreadyPrepare = false;
                        foreach (var schedulerPm in _lstPms)
                        {
                            if (schedulerPm.IsPrepareTransfer(ModuleName.EfemRobot, EnumTransferType.Place, 0)
                                || (!_efemRobot.IsAvailable)
                                || (schedulerPm.IsAvailable && WaferManager.Instance.CheckNoWafer(pm.Module, 0) && pm.IsReadyForPlace(ModuleName.EfemRobot, 0, Hand.Blade1)))
                                alreadyPrepare = true;
                        }

                        if (!alreadyPrepare)
                        {

                            if (!pm.IsReadyForPlace(ModuleName.EfemRobot, 0, Hand.Blade1) ||
                                !pm.IsTemperatureReady(temp))
                            {
                                pm.PrepareTransfer(ModuleName.EfemRobot, EnumTransferType.Place, 0, temp, Hand.Blade1,
                                    WaferManager.Instance.GetWafer(ModuleName.Aligner1, 0).Size);
                            }
                        }
                    }

                    if (!pm.IsAvailable)
                        continue;

                    if (!aligner2WaferAssigned && CheckWaferNeedProcess(ModuleName.Aligner2, 0, pm.Module))
                    {
                        aligner2WaferAssigned = true;

                        GetWaferTemperatureSetInRecipe(ModuleName.Aligner2, 0, pm.Module, out float temp);

                        bool alreadyPrepare = false;
                        foreach (var schedulerPm in _lstPms)
                        {
                            if (schedulerPm.IsPrepareTransfer(ModuleName.EfemRobot, EnumTransferType.Place, 0)
                                || (!_efemRobot.IsAvailable)
                                || (schedulerPm.IsAvailable && WaferManager.Instance.CheckNoWafer(pm.Module, 0) && pm.IsReadyForPlace(ModuleName.EfemRobot, 0, Hand.Blade1)))
                                alreadyPrepare = true;
                        }

                        if (!alreadyPrepare)
                        {
                            if (!pm.IsReadyForPlace(ModuleName.EfemRobot, 0, Hand.Blade1) ||
                                !pm.IsTemperatureReady(temp))
                            {
                                pm.PrepareTransfer(ModuleName.EfemRobot, EnumTransferType.Place, 0, temp, Hand.Blade1,
                                    WaferManager.Instance.GetWafer(ModuleName.Aligner2, 0).Size);
                            }
                        }
                    }

                    if (!pm.IsAvailable)
                        continue;
                }
            }
        }

        #endregion Module task

        #region Logic Check

        private bool CheckSequencePmReady(SequenceInfo seq, List<ModuleName> pmOccupied, out List<ModuleName> pmUsed, out string reason)
        {
            pmUsed = new List<ModuleName>();
            reason = "";
            bool pmIsReady = true;

            for (int i = 0; i < seq.Steps.Count; i++)
            {
                SequenceStepInfo stepInfo = seq.Steps[i];
                bool hasPm = false;
                foreach (var module in stepInfo.StepModules)
                {
                    if (!ModuleHelper.IsPm(module))
                    {
                        hasPm = true;
                        break;
                    }

                    PM pm = DEVICE.GetDevice<PM>(module.ToString());
                    if (pm.IsInstalled && (pmOccupied == null || !pmOccupied.Contains(module)))
                    {
                        hasPm = true;
                    }

                    if (!pmUsed.Contains(module))
                        pmUsed.Add(module);
                }

                if (pmIsReady && !hasPm)
                {
                    reason = $"Step {i + 1} no valid PM, " + string.Join("|", stepInfo.StepModules);
                    pmIsReady = false;
                }
            }

            return pmIsReady;
        }


        private bool CheckSequenceOrderOk(SequenceInfo seq, out string reason)
        {
            reason = "";
            bool foundPm = false;
            bool isAlignerAfterPm = false;
            for (int i = 0; i < seq.Steps.Count; i++)
            {
                SequenceStepInfo stepInfo = seq.Steps[i];
                foreach (var module in stepInfo.StepModules)
                {
                    if (ModuleHelper.IsPm(module))
                    {
                        foundPm = true;
                    }

                    if (ModuleHelper.IsAligner(module) && foundPm)
                    {
                        isAlignerAfterPm = true;
                    }
                }
            }

            if (!foundPm)
            {
                reason = $"not found PM in the sequence file;";
            }

            if (isAlignerAfterPm)
            {
                reason += "Aligner after PM not support";
            }


            return true;
        }


        protected int GetUnprocessedWaferCount()
        {
            int count = 0;

            foreach (ProcessJobInfo pj in _lstProcessJobs)
            {
                if (pj.State == EnumProcessJobState.Processing || pj.State == EnumProcessJobState.Paused)
                    count += GetUnprocessedWaferCount(pj);
            }

            return count;
        }

        protected int GetUnprocessedWaferCount(ProcessJobInfo pj)
        {
            int count = 0;

            for (int i = 0; i < pj.SlotWafers.Count; ++i)
            {
                WaferInfo wafer = WaferManager.Instance.GetWafer(pj.SlotWafers[i].Item1, pj.SlotWafers[i].Item2);
                if (wafer.IsEmpty)
                    continue;
                if (CheckWaferNeedProcess(pj.SlotWafers[i].Item1, pj.SlotWafers[i].Item2))
                    count++;
            }

            return count;
        }

        protected bool CheckAllWaferReturned(ProcessJobInfo pj, bool checkAllProcessed)
        {
            for (int i = 0; i < pj.SlotWafers.Count; ++i)
            {
                WaferInfo wafer = WaferManager.Instance.GetWafer(pj.SlotWafers[i].Item1, pj.SlotWafers[i].Item2);
                if (wafer.IsEmpty)
                    return false;
                if (checkAllProcessed && CheckWaferNeedProcess(pj.SlotWafers[i].Item1, pj.SlotWafers[i].Item2))
                    return false;
            }

            return true;
        }


        private bool CheckWaferNextStepIsAlign(ModuleName module, int slot)
        {
            if (!WaferManager.Instance.CheckHasWafer(module, slot))
                return false;

            WaferInfo wafer = WaferManager.Instance.GetWafer(module, slot);

            if (wafer.ProcessJob == null || wafer.ProcessJob.Sequence == null)
                return false;

            if (wafer.NextSequenceStep >= wafer.ProcessJob.Sequence.Steps.Count)
                return false;

            if (wafer.ProcessJob.Sequence.Steps[wafer.NextSequenceStep].StepModules.Contains(ModuleName.Aligner1)
                || wafer.ProcessJob.Sequence.Steps[wafer.NextSequenceStep].StepModules.Contains(ModuleName.Aligner2))
                return true;

            return false;
        }

        private bool CheckWaferNextStepIsCooling(ModuleName module, int slot)
        {
            if (!WaferManager.Instance.CheckHasWafer(module, slot))
                return false;

            WaferInfo wafer = WaferManager.Instance.GetWafer(module, slot);

            if (wafer.ProcessJob == null || wafer.ProcessJob.Sequence == null)
                return false;

            if (wafer.NextSequenceStep >= wafer.ProcessJob.Sequence.Steps.Count)
                return false;

            if (wafer.ProcessJob.Sequence.Steps[wafer.NextSequenceStep].StepModules.Contains(ModuleName.Cooling1)
                || wafer.ProcessJob.Sequence.Steps[wafer.NextSequenceStep].StepModules.Contains(ModuleName.Cooling2))
                return true;

            return false;
        }

        private bool GetWaferTemperatureSetInRecipe(ModuleName waferModule, int waferSlot, ModuleName pmModule, out float temp)
        {
            WaferInfo wafer = WaferManager.Instance.GetWafer(waferModule, waferSlot);

            var seq = wafer.ProcessJob.Sequence;
            for (int i = 0; i < seq.Steps.Count; i++)
            {
                SequenceStepInfo stepInfo = seq.Steps[i];
                foreach (var module in stepInfo.StepModules)
                {
                    if (module == pmModule)
                    {
                        temp = (float)seq.Steps[i].StepParameter[module == ModuleName.PMA ? "PMATemp" : "PMBTemp"];
                        return true;
                    }
                }
            }

            temp = 0;
            LOG.Error($"Can not find wafer {waferModule} {waferSlot + 1} temperature set in recipe");
            return false;
        }

        private bool CheckWaferPmTemperatureIsOk(ModuleName waferModule, int waferSlot)
        {
            WaferInfo wafer = WaferManager.Instance.GetWafer(waferModule, waferSlot);

            if (wafer.IsEmpty || wafer.ProcessJob == null || wafer.ProcessJob.Sequence == null)
                return false;

            var seq = wafer.ProcessJob.Sequence;
            for (int i = 0; i < seq.Steps.Count; i++)
            {
                SequenceStepInfo stepInfo = seq.Steps[i];
                bool stepOk = false;
                foreach (var module in stepInfo.StepModules)
                {
                    if (ModuleHelper.IsPm(module))
                    {
                        float tempNeeded = (float)seq.Steps[i].StepParameter[module == ModuleName.PMA ? "PMATemp" : "PMBTemp"];
                        if ((GetModule(module.ToString()) as SchedulerPM).IsTemperatureReady(tempNeeded))
                        {
                            stepOk = true;
                            break;
                        }
                    }
                    else
                    {
                        stepOk = true;
                    }
                }

                if (!stepOk)
                    return false;
            }

            return true;
        }

        protected bool CheckWaferNeedAlign(ModuleName waferModule, int waferSlot)
        {
            WaferInfo wafer = WaferManager.Instance.GetWafer(waferModule, waferSlot);

            if (wafer.IsEmpty)
                return false;

            if (wafer.ProcessJob == null || wafer.ProcessJob.Sequence == null)
                return false;

            if (wafer.NextSequenceStep >= wafer.ProcessJob.Sequence.Steps.Count)
                return false;

            if (!wafer.ProcessJob.Sequence.Steps[wafer.NextSequenceStep].StepModules
                    .Contains(ModuleName.Aligner1) && !wafer.ProcessJob.Sequence.Steps[wafer.NextSequenceStep].StepModules
                    .Contains(ModuleName.Aligner2))
                return false;

            return true;
        }

        private bool CheckWaferNeedCooling(ModuleName waferModule, int waferSlot)
        {
            WaferInfo wafer = WaferManager.Instance.GetWafer(waferModule, waferSlot);

            if (wafer.IsEmpty)
                return false;

            if (wafer.ProcessJob == null || wafer.ProcessJob.Sequence == null)
                return false;

            if (wafer.NextSequenceStep >= wafer.ProcessJob.Sequence.Steps.Count)
                return false;

            if (!wafer.ProcessJob.Sequence.Steps[wafer.NextSequenceStep].StepModules
                .Contains(ModuleName.Cooling1) && !wafer.ProcessJob.Sequence.Steps[wafer.NextSequenceStep].StepModules
                .Contains(ModuleName.Cooling2))
                return false;

            return true;
        }

        private bool CheckWaferNextProcessIn(ModuleName waferModule, int waferSlot, ModuleName chamber)
        {
            WaferInfo wafer = WaferManager.Instance.GetWafer(waferModule, waferSlot);

            if (wafer.IsEmpty ||
                wafer.ProcessJob == null ||
                wafer.ProcessJob.Sequence == null ||
                wafer.ProcessJob.Sequence.Steps == null ||
                wafer.ProcessJob.Sequence.Steps.Count <= wafer.NextSequenceStep ||
                wafer.ProcessJob.Sequence.Steps[wafer.NextSequenceStep] == null ||
                wafer.ProcessJob.Sequence.Steps[wafer.NextSequenceStep].StepModules == null)
            {
                return false;
            }

            if (_isFixAlignerAndCooling && _mapLpPm[(ModuleName)wafer.OriginStation] != chamber)
                return false;

            return wafer.ProcessJob.Sequence.Steps[wafer.NextSequenceStep].StepModules.Contains(chamber);
        }

        public bool CheckWaferNeedProcessAndPMAvailable(ModuleName waferModule, int waferSlot, ModuleName processIn = ModuleName.System)
        {
            WaferInfo wafer = WaferManager.Instance.GetWafer(waferModule, waferSlot);

            if (wafer.IsEmpty)
                return false;

            if (wafer.ProcessJob == null || wafer.ProcessJob.Sequence == null)
                return false;

            if (wafer.NextSequenceStep >= wafer.ProcessJob.Sequence.Steps.Count)
                return false;

            for (int i = wafer.NextSequenceStep; i < wafer.ProcessJob.Sequence.Steps.Count; i++)
            {
                if (wafer.ProcessJob.Sequence.Steps[i].StepModules
                        .Contains(ModuleName.PMA) || wafer.ProcessJob.Sequence.Steps[i].StepModules
                        .Contains(ModuleName.PMB))
                {
                    var hasPmAvailable = false;
                    foreach (var stepModule in wafer.ProcessJob.Sequence.Steps[i].StepModules)
                    {
                        var pm = GetModule(stepModule.ToString()) as SchedulerPM;
                        if (pm != null)
                        {
                            if (pm.IsAvailable || (pm.IsOnline && pm.Task != SchedulerModule.TaskType.PreJobProcess))
                            {
                                hasPmAvailable = true;
                                break;
                            }
                        }
                    }

                    if (!hasPmAvailable)
                        return false;

                    if (processIn == ModuleName.System)
                        return true;

                    if (_isFixAlignerAndCooling && _mapLpPm[(ModuleName)wafer.OriginStation] != processIn)
                        return false;

                    if (wafer.ProcessJob.Sequence.Steps[i].StepModules
                        .Contains(processIn))
                        return true;
                }
            }

            return false;
        }

        public bool CheckWaferNeedProcess(ModuleName waferModule, int waferSlot, ModuleName processIn = ModuleName.System)
        {
            WaferInfo wafer = WaferManager.Instance.GetWafer(waferModule, waferSlot);

            if (wafer.IsEmpty)
                return false;

            if (wafer.ProcessJob == null || wafer.ProcessJob.Sequence == null)
                return false;

            if (wafer.NextSequenceStep >= wafer.ProcessJob.Sequence.Steps.Count)
                return false;

            for (int i = wafer.NextSequenceStep; i < wafer.ProcessJob.Sequence.Steps.Count; i++)
            {
                if (wafer.ProcessJob.Sequence.Steps[i].StepModules
                        .Contains(ModuleName.PMA) || wafer.ProcessJob.Sequence.Steps[i].StepModules
                        .Contains(ModuleName.PMB))
                {
                    if (processIn == ModuleName.System)
                        return true;

                    if (_isFixAlignerAndCooling && _mapLpPm[(ModuleName)wafer.OriginStation] != processIn)
                        return false;

                    if (wafer.ProcessJob.Sequence.Steps[i].StepModules
                        .Contains(processIn))
                        return true;
                }
            }

            return false;
        }

        private bool CheckVacuumWaferHasAvailableTarget(ModuleName waferModule, int waferSlot)
        {
            WaferInfo wafer = WaferManager.Instance.GetWafer(waferModule, waferSlot);
            //System.Diagnostics.Trace.Assert(!wafer.IsEmpty);

            //if (CheckWaferNeedProcess(waferModule, waferSlot))
            //{
            //    // Check for an empty PM
            //    foreach (var pm in _lstPms)
            //    {
            //        if (WaferManager.Instance.CheckNoWafer(pm.Module, 0))
            //        {
            //            if (pm.IsAvailable == false)
            //                continue;

            //            if (!CheckWaferNextProcessIn(waferModule, waferSlot, pm.Module))
            //                continue;

            //            return true;
            //        }
            //    }
            //}
            //else
            {
                // No more processing needed, check for a outbound BUFFER slot
                foreach (var buffer in _lstCoolings)
                {
                    if (!buffer.IsAvailable)
                        continue;

                    if (WaferManager.Instance.CheckNoWafer(buffer.Module, 0))
                    {
                        return true;
                    }
                }
            }

            return false;
        }

        private bool CheckWaferHasAvailableTarget(ModuleName waferModule, int waferSlot)
        {
            WaferInfo wafer = WaferManager.Instance.GetWafer(waferModule, waferSlot);

            if (wafer.IsEmpty)
                return false;

            if (wafer.ProcessJob == null || wafer.ProcessJob.Sequence == null)
                return false;

            //sequence done, return LP
            if (wafer.NextSequenceStep >= wafer.ProcessJob.Sequence.Steps.Count)
                return true;

            foreach (var stepModule in wafer.ProcessJob.Sequence.Steps[wafer.NextSequenceStep].StepModules)
            {
                if (WaferManager.Instance.CheckNoWafer(stepModule, 0))
                    return true;
            }

            return false;
        }
        private bool CheckBufferWaferHasAvailableTarget(ModuleName waferModule, int waferSlot)
        {
            WaferInfo wafer = WaferManager.Instance.GetWafer(waferModule, waferSlot);
            //System.Diagnostics.Trace.Assert(!wafer.IsEmpty);

            if (!CheckWaferNeedProcess(waferModule, waferSlot))
                return true;


            // Check for an empty PM
            foreach (var pm in _lstPms)
            {
                if (WaferManager.Instance.CheckNoWafer(pm.Module, 0))
                {
                    if (pm.IsAvailable == false)
                        continue;

                    if (!CheckWaferNextProcessIn(waferModule, waferSlot, pm.Module))
                        continue;

                    return true;
                }
            }

            return false;
        }

        private bool SetSequenceTemperatureInfo(SequenceInfo seq, out string reason)
        {
            for (int i = 0; i < seq.Steps.Count; i++)
            {
                SequenceStepInfo stepInfo = seq.Steps[i];
                foreach (var module in stepInfo.StepModules)
                {
                    if (ModuleHelper.IsPm(module))
                    {
                        string attr = module == ModuleName.PMA ? "PMARecipe" : "PMBRecipe";
                        if (stepInfo.StepParameter.ContainsKey(attr)
                            && !string.IsNullOrEmpty((string)stepInfo.StepParameter[attr]))
                        {
                            var recipeName = (string)stepInfo.StepParameter[attr];
                            if (!string.IsNullOrEmpty(recipeName))
                            {
                                var recipeContent =
                                    RecipeFileManager.Instance.LoadRecipe($"", recipeName, false);
                                if (string.IsNullOrEmpty(recipeContent))
                                {
                                    reason = $"Can not find recipe file{recipeName}";
                                    return false;
                                }

                                try
                                {
                                    XmlDocument xml = new XmlDocument();
                                    xml.LoadXml(recipeContent);
                                    var substrateTemp = xml.DocumentElement.HasAttribute("SubstrateTemp") ? xml.DocumentElement.Attributes["SubstrateTemp"].Value : "";

                                    if (!float.TryParse(substrateTemp, out float temp))
                                    {
                                        reason = $"Invalid substrate temperature in recipe head {recipeName}";
                                        return false;
                                    }

                                    seq.Steps[i].StepParameter[module == ModuleName.PMA ? "PMATemp" : "PMBTemp"] = temp;
                                }
                                catch (Exception ex)
                                {
                                    LOG.Write(ex);
                                    reason = $"recipe not valid, {recipeName}";
                                    return false;
                                }
                            }
                        }
                    }
                }
            }

            reason = "";
            return true;
        }

        private bool CheckSequenceRecipeFileValid(SequenceInfo seq, out string reason)
        {
            for (int i = 0; i < seq.Steps.Count; i++)
            {
                SequenceStepInfo stepInfo = seq.Steps[i];
                foreach (var module in stepInfo.StepModules)
                {
                    if (ModuleHelper.IsPm(module))
                    {
                        string attr = module == ModuleName.PMA ? "PMARecipe" : "PMBRecipe";
                        if (stepInfo.StepParameter.ContainsKey(attr)
                            && !string.IsNullOrEmpty((string)stepInfo.StepParameter[attr]))
                        {
                            var recipeName = (string)stepInfo.StepParameter[attr];
                            if (!string.IsNullOrEmpty(recipeName))
                            {
                                var recipeContent =
                                    RecipeFileManager.Instance.LoadRecipe($"", recipeName, false);
                                if (string.IsNullOrEmpty(recipeContent))
                                {
                                    reason = $"Can not find recipe file{recipeName}";
                                    return false;
                                }
                            }
                        }
                    }
                }
            }

            reason = "";
            return true;
        }

        private bool GetWaferSequenceAlignTime(ModuleName module, int slot, out float time)
        {
            time = 0;

            if (!WaferManager.Instance.CheckHasWafer(module, slot))
                return false;

            WaferInfo wafer = WaferManager.Instance.GetWafer(module, slot);

            if (wafer.ProcessJob == null || wafer.ProcessJob.Sequence == null)
                return false;

            if (wafer.NextSequenceStep >= wafer.ProcessJob.Sequence.Steps.Count)
                return false;

            if (!wafer.ProcessJob.Sequence.Steps[wafer.NextSequenceStep].StepModules.Contains(ModuleName.Aligner1)
                && !wafer.ProcessJob.Sequence.Steps[wafer.NextSequenceStep].StepModules.Contains(ModuleName.Aligner2)
                && !wafer.ProcessJob.Sequence.Steps[wafer.NextSequenceStep].StepModules.Contains(ModuleName.Cooling1)
                && !wafer.ProcessJob.Sequence.Steps[wafer.NextSequenceStep].StepModules.Contains(ModuleName.Cooling2))
                return false;

            if (!wafer.ProcessJob.Sequence.Steps[wafer.NextSequenceStep].StepParameter.ContainsKey("CoolingTime"))
                return false;

            if (!float.TryParse((string)wafer.ProcessJob.Sequence.Steps[wafer.NextSequenceStep].StepParameter["CoolingTime"],
                out time))
                return false;

            return true;
        }

        private int GetWaferCountOutofLP(ModuleName lp)
        {
            int count = 0;

            var lstPosition = new List<ModuleName>()
            {
                ModuleName.EfemRobot, ModuleName.Aligner1, ModuleName.Aligner2, ModuleName.Cooling1, ModuleName.Cooling2, ModuleName.PMA, ModuleName.PMB,
            };

            foreach (var moduleName in lstPosition)
            {
                if (ModuleHelper.IsPm(moduleName) && !GetModule(moduleName.ToString()).IsOnline)
                    continue;

                if (WaferManager.Instance.CheckHasWafer(moduleName, 0))
                {
                    if (lp == ModuleName.System ||
                        WaferManager.Instance.GetWafer(moduleName, 0).OriginStation == (int)lp)
                        count++;
                }
            }

            if (WaferManager.Instance.CheckHasWafer(ModuleName.EfemRobot, 1))
            {
                if (lp == ModuleName.System ||
                    WaferManager.Instance.GetWafer(ModuleName.EfemRobot, 1).OriginStation == (int)lp)
                    count++;
            }

            return count;
        }

        private SlotItem GetWaferReturnLoadPort(ModuleName module, int slot)
        {
            WaferInfo wafer = WaferManager.Instance.GetWafer(module, slot);
            if (!wafer.IsEmpty)
            {
                return new SlotItem((ModuleName)wafer.OriginStation, wafer.OriginSlot);
            }

            return null;
        }

        private int GetWaferCountInJobQueue(ModuleName sourceLp)
        {
            int count = 0;
            foreach (var lp in _lstLps)
            {
                for (int i = 0; i < 25; i++)
                {
                    if (CheckWaferNeedProcess(lp.Module, i) && (sourceLp == ModuleName.System || sourceLp == lp.Module))
                        count++;
                }
            }

            return count;
        }

        /// <summary>
        /// 获取下一个Wafer。根据某个LP，或者任意LP
        /// </summary>
        /// <param name="lpModule">如果是System，表示查询的时候根据任意LoadPort</param>
        /// <returns></returns>
        protected SlotItem GetNextWaferInJobQueue(ModuleName lpModule)
        {
            if (!_isRunningInParallelMode)
            {
                foreach (var cj in _lstControlJobs)
                {
                    if (lpModule != ModuleName.System && (cj.Module != lpModule.ToString()))
                        continue;

                    if (cj.State == EnumControlJobState.Executing)
                    {
                        foreach (var pj in _lstProcessJobs)
                        {
                            if (pj.ControlJobName == cj.Name && pj.State == EnumProcessJobState.Processing)
                            {
                                foreach (var pjSlotWafer in pj.SlotWafers)
                                {
                                    if (CheckWaferNeedProcessAndPMAvailable(pjSlotWafer.Item1, pjSlotWafer.Item2))
                                        return new SlotItem(pjSlotWafer.Item1, pjSlotWafer.Item2);
                                }
                            }
                        }
                    }
                }

                return null;
            }

            //parallel mode 
            Dictionary<string, SlotItem> pjWafer = new Dictionary<string, SlotItem>();
            Dictionary<string, List<ModuleName>> pmUsed = new Dictionary<string, List<ModuleName>>();

            foreach (var cj in _lstControlJobs)
            {
                if (cj.State != EnumControlJobState.Executing)
                    continue;

                foreach (var pj in _lstProcessJobs)
                {
                    if (pj.ControlJobName == cj.Name && pj.State == EnumProcessJobState.Processing)
                    {
                        foreach (var pjSlotWafer in pj.SlotWafers)
                        {
                            if (CheckWaferNeedProcessAndPMAvailable(pjSlotWafer.Item1, pjSlotWafer.Item2))
                            {
                                pjWafer[pj.Name] = new SlotItem(pjSlotWafer.Item1, pjSlotWafer.Item2);
                                break;
                            }
                        }
                    }
                }
            }

            if (pjWafer.Count == 0)
                return null;

            if (pjWafer.Count == 1)
                return pjWafer.Values.First();

            string preferPj = pjWafer.Keys.First();
            int runningWaferCount = GetWaitingProcessWaferCount(preferPj);
            foreach (var slotItem in pjWafer)
            {
                if (slotItem.Key == preferPj)
                    continue;

                int count = GetWaitingProcessWaferCount(slotItem.Key);
                if (count < runningWaferCount)
                {
                    preferPj = slotItem.Key;
                    runningWaferCount = count;
                }
            }

            return pjWafer[preferPj];

        }

        private int GetWaitingProcessWaferCount(string pjName)
        {
            List<Tuple<ModuleName, int>> location = new List<Tuple<ModuleName, int>>()
            {
                Tuple.Create(ModuleName.EfemRobot, 0),
                Tuple.Create(ModuleName.EfemRobot, 1),
                Tuple.Create(ModuleName.Aligner1, 0),
                Tuple.Create(ModuleName.Aligner2, 0),
                Tuple.Create(ModuleName.PMA, 0),
                Tuple.Create(ModuleName.PMB, 0),
            };

            int count = 0;
            foreach (var tuple in location)
            {
                if (ModuleHelper.IsPm(tuple.Item1) && !GetModule(tuple.Item1.ToString()).IsOnline)
                    continue;

                WaferInfo wafer = WaferManager.Instance.GetWafer(tuple.Item1, tuple.Item2);
                if (wafer.IsEmpty)
                    continue;

                if (wafer.ProcessJob != null && wafer.ProcessJob.Name == pjName)
                    count++;
            }

            return count;
        }

        private int GetCoolingWaferCount(string pjName)
        {
            List<Tuple<ModuleName, int>> location = new List<Tuple<ModuleName, int>>()
            {
                Tuple.Create(ModuleName.Cooling1, 0),
                Tuple.Create(ModuleName.Cooling2, 0),
            };

            int count = 0;
            foreach (var tuple in location)
            {
                WaferInfo wafer = WaferManager.Instance.GetWafer(tuple.Item1, tuple.Item2);
                if (wafer.IsEmpty)
                    continue;

                if (wafer.ProcessJob != null && wafer.ProcessJob.Name == pjName)
                    count++;
            }

            return count;
        }

        private int GetProcessingWaferCount(string pjName)
        {
            List<Tuple<ModuleName, int>> location = new List<Tuple<ModuleName, int>>()
            {
                Tuple.Create(ModuleName.PMA, 0),
                Tuple.Create(ModuleName.PMB, 0),
            };

            int count = 0;
            foreach (var tuple in location)
            {
                if (ModuleHelper.IsPm(tuple.Item1) && !GetModule(tuple.Item1.ToString()).IsOnline)
                    continue;

                WaferInfo wafer = WaferManager.Instance.GetWafer(tuple.Item1, tuple.Item2);
                if (wafer.IsEmpty)
                    continue;

                if (wafer.ProcessJob != null && wafer.ProcessJob.Name == pjName)
                    count++;
            }

            return count;
        }

        private List<ModuleName> GetPmUsedInRunningPj()
        {
            var pmUsed = new List<ModuleName>();
            foreach (var cj in _lstControlJobs)
            {
                if (cj.State != EnumControlJobState.Executing && cj.State != EnumControlJobState.Paused)
                    continue;

                foreach (var pj in _lstProcessJobs)
                {
                    if (pj.ControlJobName == cj.Name && (pj.State == EnumProcessJobState.Processing || pj.State == EnumProcessJobState.Paused))
                    {
                        for (int i = 0; i < pj.Sequence.Steps.Count; i++)
                        {
                            SequenceStepInfo stepInfo = pj.Sequence.Steps[i];
                            foreach (var module in stepInfo.StepModules)
                            {
                                if (ModuleHelper.IsPm(module) && !pmUsed.Contains(module))
                                    pmUsed.Add(module);
                            }
                        }
                    }
                }
            }

            return pmUsed;
        }


        private int CompareWaferPriority(ModuleName module1, int slot1, ModuleName module2, int slot2)
        {
            if (module1 == ModuleName.System || module2 == ModuleName.System)
                return 0;

            WaferInfo wafer1 = WaferManager.Instance.GetWafer(module1, slot1);
            WaferInfo wafer2 = WaferManager.Instance.GetWafer(module2, slot2);

            if (wafer1.IsEmpty || wafer2.IsEmpty)
                return 0;

            if (wafer1.Size != wafer2.Size)
                return 0;

            //same process job && same load port
            if (_lstProcessJobs.Exists(x => x.SlotWafers.Exists(y => y.Item1 == (ModuleName)wafer1.OriginStation && y.Item2 == wafer1.OriginSlot)
                                            && x.SlotWafers.Exists((y =>
                                                y.Item1 == (ModuleName)wafer2.OriginStation && y.Item2 == wafer2.OriginSlot)))
                && (wafer1.OriginStation == wafer2.OriginStation))
            {
                //lower number slot has high priority
                return wafer2.OriginSlot - wafer1.OriginSlot;
            }

            return 0;
        }

        private List<SchedulerPM> GetPmNeeded(ControlJobInfo cj)
        {
            List<SchedulerPM> result = new List<SchedulerPM>();

            foreach (var pj in _lstProcessJobs)
            {
                if (pj.ControlJobName != cj.Name)
                    continue;

                var seq = pj.Sequence;
                for (int i = 0; i < seq.Steps.Count; i++)
                {
                    SequenceStepInfo stepInfo = seq.Steps[i];
                    foreach (var module in stepInfo.StepModules)
                    {
                        if (ModuleHelper.IsPm(module))
                        {
                            var pm = _lstPms.Find(x => x.Module == module);

                            if (pm != null && !result.Contains(pm))
                            {
                                result.Add(pm);
                            }
                        }
                    }
                }
            }


            return result;
        }

        public bool CheckRecipeUsedInJob(string pathName)
        {
            foreach (var pj in _lstProcessJobs)
            {
                var seq = pj.Sequence;
                for (int i = 0; i < seq.Steps.Count; i++)
                {
                    SequenceStepInfo stepInfo = seq.Steps[i];
                    foreach (var module in stepInfo.StepModules)
                    {
                        if (ModuleHelper.IsPm(module))
                        {
                            string attr = module == ModuleName.PMA ? "PMARecipe" : "PMBRecipe";
                            if (stepInfo.StepParameter.ContainsKey(attr)
                                && !string.IsNullOrEmpty((string)stepInfo.StepParameter[attr]))
                            {
                                var recipeName = (string)stepInfo.StepParameter[attr];
                                if (!string.IsNullOrEmpty(recipeName))
                                {
                                    if (pathName.EndsWith(recipeName+".rcp"))
                                        return true;
                                }
                            }
                        }
                    }
                }
            }
            return false;
        }

        public bool CheckSequenceUsedInJob(string pathName)
        {
            foreach (var pj in _lstProcessJobs)
            {
                if (pathName.EndsWith(pj.Sequence.Name+".seq"))
                    return true;
            }
            return false;
        }

        #endregion Logic Check
    }
}