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- using System;
- using Aitex.Core.Common;
- using Aitex.Core.RT.DataCenter;
- using Aitex.Core.RT.Event;
- using Aitex.Core.RT.Fsm;
- using Aitex.Core.RT.OperationCenter;
- using Aitex.Core.RT.SCCore;
- using Aitex.Core.Utilities;
- using Aitex.Sorter.Common;
- using MECF.Framework.Common.Equipment;
- using MECF.Framework.Common.Schedulers;
- using MECF.Framework.Common.SubstrateTrackings;
- using VirgoCommon;
- using VirgoRT.Device;
- using VirgoRT.Device.YASKAWA;
- using VirgoRT.Devices.EFEM;
- using VirgoRT.Modules.LPs;
- using BAI.Systems.Common.Substrates;
- namespace VirgoRT.Modules
- {
- class EfemEntity : Entity, IEntity, IModuleEntity
- {
- private int _bigWafer = 0;
- private int _midWafer = 0;
- private int _smallWafer = 0;
- private bool _hasPlacementError = false;
- private bool _EnableResetEFEMError = false;
- public enum STATE
- {
- Unknown, // 0
- Initializing, // 1
- Idle, // 2
- Error, // 3
- Picking, // 4
- Placing, // 5
- Aligning, // 6
- Mapping, // 7
- Init, // 8
- Orgshing, // 9
- Lifting, // 10
- InitingAL, // 11
- InitingRB, // 12
- Extending, // 13
- Retracting, // 14
- //SettingLamp, // 15
- Swapping,
- Gotoing,
- Gripping,
- Ungripping,
- Fliping,
- EmsStoping,
- SetSpeed,
- Loading,
- }
- public enum MSG
- {
- HomeAll, // 0
- Pick, // 1
- Place, // 2
- Align, // 3
- ActionDone, // 4
- RecHwMsg, // 5
- MoveCmd, // 6
- //LED, // 7
- Recover, // 8
- Goto, // 9
- Error, // 10
- Online, // 11
- CommReady, // 12
- Lift, // 13
- HomeAL, // 14
- HomeRB, // 15
- Extend, // 16
- Retract, // 17
- PMLiftPinUp, // 18
- PMLiftPinDown, // 19
- TurnOffBuzzer,
- //SwitchOnBuzzerAndRed,
- Abort,
- Map,
- ToInit,
- Cool,
- PickAndPlace,
- Grip,
- Ungrip,
- Flip,
- LiftActionDone,
- EmsStop,
- SetRobotSpeed,
- Load,
- }
- public enum EfemType
- {
- FutureEfem = 1,
- JetEfem = 2,
- BrooksEFEM = 3,
- BeamSUNWAY = 4,
- }
- public bool Check(int msg, out string reason, params object[] args)
- {
- throw new NotImplementedException();
- }
- // Fields
- //
- private readonly string Name;
- private readonly Efem _efem;
- private readonly LoadPortModule[] _lpms = new LoadPortModule[2];
- private readonly EfemType _efemType;
- public Efem EfemDevice => _efem;
- public EfemType EFEMType => _efemType;
- // Constructor
- //
- public EfemEntity()
- {
- _smallWafer = SC.GetValue<int>($"System.SmallWafer");
- _midWafer = SC.GetValue<int>($"System.MidWafer");
- _bigWafer = SC.GetValue<int>($"System.BigWafer");
- _efemType = (EfemType)SC.GetValue<int>($"EFEM.EfemType");
- _EnableResetEFEMError = SC.GetValue<bool>($"EFEM.EnableResetError");
- _efem = new Efem();
- Name = ModuleName.EFEM.ToString();
- InitFsmMap();
- }
- public void NotifyLP(ModuleName mod, LoadportEntity.MSG msg)
- {
- _lpms[mod - ModuleName.LP1].PostMsg(msg);
- }
- public void NotifyLPError(ModuleName mod )
- {
- _lpms[mod - ModuleName.LP1].PostMsg(LoadportEntity.MSG.ActionDone);
- //_lpms[mod - ModuleName.LP1]..OnError();
- }
- public void NotifyLP(ModuleName mod, LoadPortModule.MSG msg)
- {
- _lpms[mod - ModuleName.LP1].PostMsg(msg);
- }
- public bool IsLPIdle(ModuleName mod)
- {
- return _lpms[mod - ModuleName.LP1].IsReady;
- }
- protected override bool Init()
- {
- _lpms[0] = new LoadPortModule(ModuleName.LP1, _efem);
- _lpms[1] = new LoadPortModule(ModuleName.LP2, _efem);
- _lpms[0].Initialize();
- _lpms[1].Initialize();
- OP.Subscribe($"{ModuleName.EFEM}.{EfemOperation.Home}", (cmd, args) => { PostMsg(MSG.HomeAll); return true; });
- OP.Subscribe($"{ModuleName.EFEM}.{EfemOperation.ClearError}", (cmd, args) => { PostMsg(MSG.Recover); return true; });
- OP.Subscribe($"{ModuleName.EFEM}.{EfemOperation.TurnOffBuzzer}", (cmd, args) => { PostMsg(MSG.TurnOffBuzzer); return true; });
- //OP.Subscribe($"{ModuleName.EFEM}.{EfemOperation.SwitchOnBuzzerAndRed}", (cmd, args) => { PostMsg(MSG.SwitchOnBuzzerAndRed); return true; });
- OP.Subscribe($"{ModuleName.EFEM}.Online", (cmd, args) => { PostMsg(MSG.Online); return true; });
- OP.Subscribe($"{ModuleName.EfemRobot}.{EfemOperation.Pick}", (cmd, args) => { PostMsg(MSG.Pick, args[0], args[1], args[3], args[2]); return true; });
- OP.Subscribe($"{ModuleName.EfemRobot}.{EfemOperation.Place}", (cmd, args) => { PostMsg(MSG.Place, args[0], args[1], args[3], args[2]); return true; });
- OP.Subscribe($"{ModuleName.EfemRobot}.{EfemOperation.Extend}", (cmd, args) => { PostMsg(MSG.Extend, args[0], args[1], args[2]); return true; });
- OP.Subscribe($"{ModuleName.EfemRobot}.{EfemOperation.Retract}", (cmd, args) => { PostMsg(MSG.Retract, args[0], args[1]); return true; });
- OP.Subscribe($"{ModuleName.EfemRobot}.{EfemOperation.Abort}", (cmd, args) => { PostMsg(MSG.Abort); return true; });
- OP.Subscribe($"{ModuleName.EfemRobot}.{EfemOperation.Home}", (cmd, args) => { PostMsg(MSG.HomeRB, args); return true; });
- OP.Subscribe($"{ModuleName.EfemRobot}.{EfemOperation.Grip}", (cmd, args) =>
- {
- bool isGrip = ((string)args[0]).ToLower() == "on";
- PostMsg(isGrip ? MSG.Grip : MSG.Ungrip, args[1]);
-
- return true;
- });
- OP.Subscribe($"{ModuleName.EfemRobot}.{EfemOperation.Flip}", (cmd, args) => { PostMsg(MSG.Flip, args[0]); return true; });
- OP.Subscribe($"{ModuleName.EfemRobot}.{EfemOperation.EmsStop}", (cmd, args) => { PostMsg(MSG.EmsStop); return true; });
- OP.Subscribe($"{ModuleName.EfemRobot}.{EfemOperation.SetRobotSpeed}", (cmd, args) => { PostMsg(MSG.SetRobotSpeed, args[0]); return true; });
- OP.Subscribe($"{ModuleName.Aligner1}.{EfemOperation.Home}", (cmd, args) => { PostMsg(MSG.HomeAL, ModuleName.Aligner1); return true; });
- OP.Subscribe($"{ModuleName.Aligner2}.{EfemOperation.Home}", (cmd, args) => { PostMsg(MSG.HomeAL, ModuleName.Aligner2); return true; });
- OP.Subscribe($"{ModuleName.Cooling1}.{EfemOperation.Home}", (cmd, args) => { PostMsg(MSG.HomeAL, ModuleName.Cooling1); return true; });
- OP.Subscribe($"{ModuleName.Cooling2}.{EfemOperation.Home}", (cmd, args) => { PostMsg(MSG.HomeAL, ModuleName.Cooling2); return true; });
- OP.Subscribe($"{ModuleName.Aligner1}.{EfemOperation.Align}", (cmd, args) => { PostMsg(MSG.Align, ModuleName.Aligner1, args[0]); return true; });
- OP.Subscribe($"{ModuleName.Aligner2}.{EfemOperation.Align}", (cmd, args) => { PostMsg(MSG.Align, ModuleName.Aligner2, args[0]); return true; });
- OP.Subscribe($"{ModuleName.Cooling1}.{EfemOperation.Align}", (cmd, args) => { PostMsg(MSG.Align, ModuleName.Cooling1, args[0]); return true; });
- OP.Subscribe($"{ModuleName.Cooling2}.{EfemOperation.Align}", (cmd, args) => { PostMsg(MSG.Align, ModuleName.Cooling2, args[0]); return true; });
- OP.Subscribe($"{ModuleName.Aligner1}.{EfemOperation.Lift}", (cmd, args) => { PostMsg(MSG.Lift, ModuleName.Aligner1); return true; });
- OP.Subscribe($"{ModuleName.Aligner2}.{EfemOperation.Lift}", (cmd, args) => { PostMsg(MSG.Lift, ModuleName.Aligner2); return true; });
- OP.Subscribe($"{ModuleName.Cooling1}.{EfemOperation.Lift}", (cmd, args) => { PostMsg(MSG.Lift, ModuleName.Cooling1); return true; });
- OP.Subscribe($"{ModuleName.Cooling2}.{EfemOperation.Lift}", (cmd, args) => { PostMsg(MSG.Lift, ModuleName.Cooling2); return true; });
- DATA.Subscribe($"{Name}.FsmState", () => ((STATE)fsm.State).ToString());
- DATA.Subscribe($"{Name}.FsmPrevState", () => ((STATE)fsm.PrevState).ToString());
- DATA.Subscribe($"{Name}.FsmLastMessage", GetFsmLastMessage);
- DATA.Subscribe($"{Name}.SmallWafer", () => _smallWafer);
- DATA.Subscribe($"{Name}.BigWafer", () => _bigWafer);
- DATA.Subscribe($"{Name}.MidWafer", () => _midWafer);
- DATA.Subscribe($"{Name}.HasPlacementError", () => _hasPlacementError);
- return true;
- }
- private void InitFsmMap()
- {
- fsm = new StateMachine<EfemEntity>("EFEM", (int)STATE.Unknown, 50);
- fsm.EnableRepeatedMsg(true);
- AnyStateTransition(FSM_MSG.TIMER, fnMonitor, FSM_STATE.SAME);
- AnyStateTransition(MSG.RecHwMsg, fnRecMsg, FSM_STATE.SAME);
- //AnyStateTransition(MSG.LED, fnSetLED, STATE.SettingLamp);
- AnyStateTransition(MSG.TurnOffBuzzer, fnTurnOffBuzzer, FSM_STATE.SAME);
- //AnyStateTransition(MSG.SwitchOnBuzzerAndRed, fnSwitchOnBuzzerAndRed, FSM_STATE.SAME);
- AnyStateTransition(MSG.Recover, fnRecover, FSM_STATE.SAME);
- AnyStateTransition(MSG.Error, fnError, STATE.Error);
- AnyStateTransition(MSG.Online, fnOnline, FSM_STATE.SAME);
- AnyStateTransition(MSG.Abort, fnAbortRobot, STATE.Idle);
- AnyStateTransition(MSG.ToInit, fnToInit, STATE.Init);
- EnterExitTransition<STATE, FSM_MSG>(STATE.Initializing, fnEnterExecute, FSM_MSG.NONE, fnExitExecute);
- EnterExitTransition<STATE, FSM_MSG>(STATE.InitingRB, fnEnterExecute, FSM_MSG.NONE, null);
- EnterExitTransition<STATE, FSM_MSG>(STATE.InitingAL, fnEnterExecute, FSM_MSG.NONE, null);
- EnterExitTransition<STATE, FSM_MSG>(STATE.Picking, fnEnterExecute, FSM_MSG.NONE, fnExitExecute);
- EnterExitTransition<STATE, FSM_MSG>(STATE.Gotoing, fnEnterExecute, FSM_MSG.NONE, fnExitExecute);
- EnterExitTransition<STATE, FSM_MSG>(STATE.Placing, fnEnterExecute, FSM_MSG.NONE, fnExitExecute);
- EnterExitTransition<STATE, FSM_MSG>(STATE.Swapping, fnEnterExecute, FSM_MSG.NONE, fnExitExecute);
- EnterExitTransition<STATE, FSM_MSG>(STATE.Extending, fnEnterExecute, FSM_MSG.NONE, fnExitExecute);
- EnterExitTransition<STATE, FSM_MSG>(STATE.Retracting, fnEnterExecute, FSM_MSG.NONE, fnExitExecute);
- EnterExitTransition<STATE, FSM_MSG>(STATE.Lifting, fnEnterExecute, FSM_MSG.NONE, null);
- EnterExitTransition<STATE, FSM_MSG>(STATE.Aligning, fnEnterExecute, FSM_MSG.NONE, null);
- EnterExitTransition<STATE, FSM_MSG>(STATE.Mapping, fnEnterExecute, FSM_MSG.NONE, fnExitExecute);
- EnterExitTransition<STATE, FSM_MSG>(STATE.Gripping, fnEnterExecute, FSM_MSG.NONE, null);
- EnterExitTransition<STATE, FSM_MSG>(STATE.Ungripping, fnEnterExecute, FSM_MSG.NONE, null);
- EnterExitTransition<STATE, FSM_MSG>(STATE.Fliping, fnEnterExecute, FSM_MSG.NONE, fnExitExecute);
- EnterExitTransition<STATE, FSM_MSG>(STATE.EmsStoping, fnEnterExecute, FSM_MSG.NONE, fnExitExecute);
- EnterExitTransition<STATE, FSM_MSG>(STATE.SetSpeed, fnEnterExecute, FSM_MSG.NONE, fnExitExecute);
- EnterExitTransition<STATE, FSM_MSG>(STATE.Loading, fnEnterExecute, FSM_MSG.NONE, fnExitExecute);
- Transition(STATE.Unknown, MSG.CommReady, null, STATE.Init);
- // Home
- Transition(STATE.Init, MSG.HomeAll, fnHomeAll, STATE.Initializing);
- Transition(STATE.Idle, MSG.HomeAll, fnHomeAll, STATE.Initializing); // 暂时加,出错的时候做 HOME
- Transition(STATE.Error, MSG.HomeAll, fnHomeAll, STATE.Initializing);
- Transition(STATE.Initializing, MSG.ActionDone, fnActionDone, STATE.Orgshing);
- Transition(STATE.Orgshing, MSG.ActionDone, fnActionDone, STATE.Idle);
- Transition(STATE.Idle, MSG.HomeRB, fnHomeRobot, STATE.InitingRB);
- Transition(STATE.InitingRB, MSG.ActionDone, null, STATE.Idle);
- //Transition(STATE.SettingLamp, MSG.ActionDone, fnSetLampDone, STATE.Idle);
- // Pick
- Transition(STATE.Idle, MSG.Pick, fnPick, STATE.Picking);
- Transition(STATE.Picking, MSG.ActionDone, fnActionDone, STATE.Idle);
- Transition(STATE.Picking, MSG.PMLiftPinUp, fnPmPinUp, STATE.Idle);
- Transition(STATE.Picking, MSG.PMLiftPinDown, fnPmPinDown, STATE.Idle);
-
- // Place
- Transition(STATE.Idle, MSG.Place, fnPlace, STATE.Placing);
- Transition(STATE.Placing, MSG.ActionDone, fnActionDone, STATE.Idle);
- Transition(STATE.Placing, MSG.PMLiftPinUp, fnPmPinUp, STATE.Idle);
- Transition(STATE.Placing, MSG.PMLiftPinDown, fnPmPinDown, STATE.Idle);
- // PickAndPlace
- Transition(STATE.Idle, MSG.PickAndPlace, fnSwap, STATE.Swapping);
- Transition(STATE.Swapping, MSG.ActionDone, fnActionDone, STATE.Idle);
- Transition(STATE.Swapping, MSG.PMLiftPinUp, fnPmPinUp, STATE.Idle);
- Transition(STATE.Swapping, MSG.PMLiftPinDown, fnPmPinDown, STATE.Idle);
-
- // Goto
- Transition(STATE.Idle, MSG.Goto, fnGoto, STATE.Gotoing);
- Transition(STATE.Gotoing, MSG.ActionDone, fnActionDone, STATE.Idle);
- // Extend
- Transition(STATE.Idle, MSG.Extend, fnExtend, STATE.Extending);
- Transition(STATE.Extending, MSG.ActionDone, fnActionDone, STATE.Idle);
- // Retract
- Transition(STATE.Idle, MSG.Retract, fnRetract, STATE.Retracting);
- Transition(STATE.Retracting, MSG.ActionDone, fnActionDone, STATE.Idle);
- // Map
- Transition(STATE.Idle, MSG.Map, fnMap, STATE.Mapping);
- Transition(STATE.Mapping, MSG.ActionDone, fnActionDone, STATE.Idle);
- // Grip
- Transition(STATE.Idle, MSG.Grip, fnGrip, STATE.Gripping);
- Transition(STATE.Gripping, MSG.ActionDone, fnActionDone, STATE.Idle);
- // Ungrip
- Transition(STATE.Idle, MSG.Ungrip, fnUngrip, STATE.Ungripping);
- Transition(STATE.Ungripping, MSG.ActionDone, fnActionDone, STATE.Idle);
- // Aligner
- Transition(STATE.Idle, MSG.HomeAL, fnHomeAligner, STATE.InitingAL);
- Transition(STATE.InitingAL, MSG.ActionDone, fnActionDone, STATE.Idle);
- Transition(STATE.Idle, MSG.Lift, fnLift, STATE.Lifting);
- Transition(STATE.Lifting, MSG.LiftActionDone, fnActionDone, STATE.Idle);
- Transition(STATE.Idle, MSG.Align, fnAlign, STATE.Aligning);
- Transition(STATE.Aligning, MSG.ActionDone, fnActionDone, STATE.Idle);
- // Flip
- Transition(STATE.Idle, MSG.Flip, fnFlip, STATE.Fliping);
- Transition(STATE.Fliping, MSG.ActionDone, fnActionDone, STATE.Idle);
- // EmsStop
- Transition(STATE.Idle, MSG.EmsStop, fnEmsStop, STATE.EmsStoping);
- Transition(STATE.EmsStoping, MSG.ActionDone, fnActionDone, STATE.Idle);
- // Set Robot Speed
- Transition(STATE.Idle, MSG.SetRobotSpeed, fnSetRobotSpeed, STATE.SetSpeed);
- Transition(STATE.SetSpeed, MSG.ActionDone, fnActionDone, STATE.Idle);
- // Load Foup
- Transition(STATE.Idle, MSG.Load, fnLoadFoup, STATE.Loading);
- Transition(STATE.Loading, MSG.ActionDone, fnActionDone, STATE.Idle);
- EnumLoop<STATE>.ForEach((item) => { fsm.MapState((int)item, item.ToString()); });
- EnumLoop<MSG>.ForEach((item) => { fsm.MapMessage((int)item, item.ToString()); });
- }
- private bool fnHomeAll(object[] param)
- {
- _efem.ClearActions();
- _efem.HomeAll();
- return true;
- }
- private bool fnHomeRobot(object[] param)
- {
- _efem.ClearActions();
- _efem.Home(ModuleName.EfemRobot, (string)param[0]);
- return true;
- }
- private bool fnHomeAligner(object[] param)
- {
- // module
- ModuleName unit = ModuleName.EFEM;
- if (param[0] is string s1)
- unit = ModuleNameString.ToEnum(s1);
- else if (param[0] is ModuleName mod)
- unit = mod;
- else
- throw new ArgumentException("Argument error");
- _efem.Home(unit, "");
- return true;
- }
- private bool fnEnterExecute(object[] param)
- {
- if(!_efem.HasUncompleteActions)
- _efem.ExecuteAction();
- return false;
- }
- private bool fnExitExecute(object[] param)
- {
- if (!_efem.HasUncompleteActions)
- _efem.ExecuteAction();
- return false;
- }
- private bool fnActionDone(object[] param)
- {
- try
- {
- EfemOperation actionType = (EfemOperation)param[0];
- if (((fsm.State == (int)STATE.Orgshing) && (actionType == EfemOperation.Orgsh || actionType == EfemOperation.Home)) ||
- (fsm.State == (int)STATE.Initializing && actionType == EfemOperation.ClearError) ||
- (fsm.State == (int)STATE.Extending) ||
- (fsm.State == (int)STATE.Picking) ||
- (fsm.State == (int)STATE.Placing) ||
- (fsm.State == (int)STATE.Swapping) ||
- (fsm.State == (int)STATE.Aligning) ||
- (fsm.State == (int)STATE.Fliping))
- {
- if (_efem.HasActions || _efem.HasUncompleteActions)
- {
- if(!_efem.HasUncompleteActions)
- {
- _efem.ExecuteAction();
- }
- return false;
- }
- }
- return true;
- }
- catch (Exception ex)
- {
- EV.PostAlarmLog(ModuleName.EFEM.ToString(), ex.Message);
- return true;
- }
- }
- public bool CheckToPostMessage(int msg, params object[] args)
- {
- if (!fsm.FindTransition(fsm.State, msg))
- {
- EV.PostWarningLog(Name, $"{Name} is in {(STATE)fsm.State} state,can not do {(MSG)msg}");
- return false;
- }
- Running = true;
- fsm.PostMsg(msg, args);
- return true;
- }
- private bool fnRecMsg(object[] param)
- {
- if (param == null) return false;
- string strHwMsg = param[0] as string;
- if (_efem is EfemBase device)
- {
- device.ReceiveMessage(strHwMsg);
- return true;
- }
- return false;
- }
- private bool fnMonitor(object[] param)
- {
- STATE curSt = (STATE)fsm.State;
- if (curSt == STATE.Initializing || curSt == STATE.Mapping || curSt == STATE.Picking || curSt == STATE.Placing
- || curSt == STATE.Orgshing || curSt == STATE.Lifting || curSt == STATE.Extending || curSt == STATE.Retracting
- || curSt == STATE.InitingAL || curSt == STATE.InitingRB)
- {
- int time = SC.GetValue<int>("EFEM.MotionTimeout");
- if (fsm.ElapsedTime > time * 1000)
- {
- EV.PostAlarmLog("EFEM", $"Can not complete motion {curSt} in {time} seconds. ");
- PostMsg(MSG.Error);
- }
- }
- else if (curSt == STATE.Aligning)
- {
- int _timeout = SC.GetValue<int>("EFEM.AlignerTimeout");
- if (fsm.ElapsedTime > _timeout * 1000)
- {
- EV.PostAlarmLog(ModuleName.Aligner.ToString(), "Align timeout");
- PostMsg(MSG.Error);
- }
- }
- else if (curSt == STATE.Idle)
- {
- if (_efem.HasActions && !_efem.HasUncompleteActions)
- {
- _efem.ExecuteAction();
- }
- }
- if (_efemType == EfemType.BrooksEFEM && (SC.GetValue<bool>("EFEM.LoadPort.EnableDockUndock") == false))
- {
- _efem.QueryLPState();
- }
- // update Loadport wafer placement parity error status
- _hasPlacementError = _efem[ModuleName.LP1].HasPlacementError || _efem[ModuleName.LP2].HasPlacementError;
- return true;
- }
-
- private bool fnOnline(object[] param)
- {
- bool bOnlineFlag = (bool)param[0];
- if (_efem is EfemBase efem)
- {
- efem.SetOnline(bOnlineFlag);
- }
- return true;
- }
- private string GetFsmLastMessage()
- {
- int msg = fsm.LastMsg;
- if (msg >= (int)MSG.HomeAll && msg <= (int)MSG.Error)
- return ((MSG)msg).ToString();
- if (msg == (int)FSM_MSG.TIMER)
- return "Timer";
- return msg.ToString();
- }
- private bool fnError(object[] param)
- {
- return true;
- }
- private bool fnToInit(object[] param)
- {
- return true;
- }
- private bool fnRecover(object[] param)
- {
- _efem.ClearActions();
- _efem.ClearError();
- //_efem.ExecuteAction();
- return true;
- }
- private bool fnAbortRobot(object[] param)
- {
- _efem.ClearActions();
- _efem.AbortRobot();
- //_efem.ExecuteAction();
- return true;
- }
- private bool fnSetLED(object[] param)
- {
- LightType light = (LightType)param[0];
- LightStatus st = (LightStatus)param[1];
- _efem.SetLamp(light, st);
- return true;
- }
- private bool fnTurnOffBuzzer(object[] param)
- {
- _efem.TurnOffBuzzer();
- return false;
- }
- //private bool fnSwitchOnBuzzerAndRed(object[] param)
- //{
- // _efem.SwitchOnBuzzerAndRed();
- // return false;
- //}
- //
- private bool fnSetLampDone(object[] param)
- {
- if (_efem.HasActions && !_efem.HasUncompleteActions)
- {
- _efem.ExecuteAction();
- return false;
- }
- else
- {
- return true;
- }
- }
- private bool fnPick(object[] param)
- {
- // module
- ModuleName unit = ModuleName.EFEM;
- if (param[0] is string s1)
- unit = ModuleNameString.ToEnum(s1);
- else if (param[0] is ModuleName mod)
- unit = mod;
- else
- throw new ArgumentException("Argument error");
- // slot
- byte slot = (byte)(int)param[1];
- // hand
- Hand arm = (Hand)Enum.Parse(typeof(Hand), param[2].ToString());
- // wafer size
- WaferSize ws1 = WaferSize.WS0;
- if (param[3] is string s2)
- {
- if (Enum.TryParse(s2, out WaferSize p5))
- ws1 = p5;
- }
- else if (param[3] is WaferSize p6)
- {
- ws1 = p6;
- }
- MoveParam mp = new MoveParam(unit, slot, ModuleName.EfemRobot, (byte)arm, arm, ws1);
- if (!_efem.Pick(mp))
- return false;
- return true;
- }
- private bool fnPlace(object[] param)
- {
- // module
- ModuleName unit = ModuleName.EFEM;
- if (param[0] is string s1)
- unit = ModuleNameString.ToEnum(s1);
- else if (param[0] is ModuleName mod)
- unit = mod;
- else
- throw new ArgumentException("Argument error");
- // slot
- byte slot = (byte)(int)param[1];
- // hand
- Hand arm = (Hand)Enum.Parse(typeof(Hand), param[2].ToString());
- // wafer size
- WaferSize ws1 = WaferSize.WS0;
- if (param[3] is string s2)
- {
- if (Enum.TryParse(s2, out WaferSize p5))
- ws1 = p5;
- }
- else if (param[3] is WaferSize p6)
- {
- ws1 = p6;
- }
- MoveParam mp = new MoveParam(ModuleName.EfemRobot, (byte)arm, unit, slot, arm, ws1);
- if (!_efem.Place(mp))
- return false;
-
- return true;
- }
- private bool fnGoto(object[] param)
- {
- // module
- ModuleName unit = ModuleName.EFEM;
- if (param[0] is string s1)
- unit = ModuleNameString.ToEnum(s1);
- else if (param[0] is ModuleName mod)
- unit = mod;
- else
- throw new ArgumentException("Argument error");
- // slot
- byte slot = (byte)(int)param[1];
- Hand arm = Hand.Blade1;
- WaferSize ws = WaferSize.WS6;
- if (WaferManager.Instance.CheckHasWafer(ModuleName.EfemRobot, 0))
- {
- arm = Hand.Blade1;
- ws = WaferManager.Instance.GetWafer(ModuleName.EfemRobot, 0).Size;
- }
- else if (WaferManager.Instance.CheckHasWafer(ModuleName.EfemRobot, 1))
- {
- arm = Hand.Blade2;
- ws = WaferManager.Instance.GetWafer(ModuleName.EfemRobot, 1).Size;
- }
- MoveParam mp = new MoveParam(unit, slot, unit, slot, arm, ws);
- _efem.Goto(mp);
- return true;
- }
- private bool fnSwap(object[] param)
- {
- // module
- ModuleName unit = ModuleName.EFEM;
- if (param[0] is string s1)
- unit = ModuleNameString.ToEnum(s1);
- else if (param[0] is ModuleName mod)
- unit = mod;
- else
- throw new ArgumentException("Argument error");
- // pickSlot
- byte pickSlot = (byte)(int)param[1];
- // pick hand
- Hand pickArm = (Hand)Enum.Parse(typeof(Hand), param[2].ToString());
- // wafer size
- WaferSize ws1 = WaferSize.WS0;
- if (param[5] is string s2)
- {
- if (Enum.TryParse(s2, out WaferSize p5))
- ws1 = p5;
- }
- else if (param[5] is WaferSize p6)
- {
- ws1 = p6;
- }
- MoveParam pickParam = new MoveParam(unit, pickSlot, ModuleName.EfemRobot, (byte)pickArm, pickArm, ws1);
- // place slot
- byte placeSlot = (byte)(int)param[4];
- // hand
- Hand placeArm = (Hand)Enum.Parse(typeof(Hand), param[3].ToString());
-
- MoveParam placeParam = new MoveParam(ModuleName.EfemRobot, (byte)placeArm, unit, placeSlot, placeArm, ws1);
- _efem.PickAndPlace(pickParam, placeParam);
- return true;
- }
- private bool fnExtend(object[] param)
- {
- // module
- ModuleName unit = ModuleName.EFEM;
- if (param[0] is string s1)
- unit = ModuleNameString.ToEnum(s1);
- else if (param[0] is ModuleName mod)
- unit = mod;
- else
- throw new ArgumentException("Argument error");
- Hand arm = (Hand)Enum.Parse(typeof(Hand), (string)param[2]);
- ExtendParam mp = new ExtendParam
- {
- Module = unit,
- Arm = arm,
- Pos = (ExtendPos)Enum.Parse(typeof(ExtendPos), param[1] as string)
- };
- if (!_efem.Extend(mp))
- return false;
- return true;
- }
- private bool fnRetract(object[] param)
- {
- // module
- ModuleName unit = ModuleName.EFEM;
- if (param[0] is string s1)
- unit = ModuleNameString.ToEnum(s1);
- else if (param[0] is ModuleName mod)
- unit = mod;
- else
- throw new ArgumentException("Argument error");
- Hand arm = (Hand)Enum.Parse(typeof(Hand), (string)param[2]);
- ExtendParam mp = new ExtendParam
- {
- Module = unit,
- Arm = arm,
- Pos = (ExtendPos)Enum.Parse(typeof(ExtendPos), param[1] as string)
- };
- if (!_efem.Retract(mp))
- return false;
- return true;
- }
- private bool fnPmPinUp(object[] param)
- {
- _efem.UpdateStatus((ushort)param[0], ActionStatus.Completed);
- if (_efem.HasActions && !_efem.HasUncompleteActions)
- {
- _efem.ExecuteAction();
- return false;
- }
- else
- {
- return true;
- }
- }
- private bool fnPmPinDown(object[] param)
- {
- _efem.UpdateStatus((ushort)param[0], ActionStatus.Completed);
- if (_efem.HasActions && !_efem.HasUncompleteActions)
- {
- _efem.ExecuteAction();
- return false;
- }
- else
- {
- return true;
- }
- }
- private bool fnLift(object[] param)
- {
- // module
- ModuleName unit = ModuleName.EFEM;
- if (param[0] is string s1)
- unit = ModuleNameString.ToEnum(s1);
- else if (param[0] is ModuleName mod)
- unit = mod;
- else
- throw new ArgumentException("Argument error");
- bool isUp = true;
- if (param.Length > 1)
- {
- isUp = (bool) param[1];
- }
- if (isUp)
- {
- if (!_efem.SetPinUp(unit))
- return false;
- }
- else
- {
- if (!_efem.SetPinDown(unit))
- return false;
- }
- return true;
- }
- private bool fnAlign(object[] param)
- {
- // module
- ModuleName unit = ModuleName.EFEM;
- if (param[0] is string s1)
- unit = ModuleNameString.ToEnum(s1);
- else if (param[0] is ModuleName mod)
- unit = mod;
- else
- throw new ArgumentException("Argument error");
- // wafer size
- WaferSize ws1 = WaferSize.WS0;
- if (param[1] is string s2)
- {
- if (Enum.TryParse(s2, out WaferSize p5))
- ws1 = p5;
- }
- else if (param[1] is WaferSize p6)
- {
- ws1 = p6;
- }
- if (!_efem.Align(unit, 1000, ws1))
- return false;
- return true;
- }
- private bool fnMap(object[] param)
- {
- // module
- ModuleName unit = ModuleName.EFEM;
- if (param[0] is string s1)
- unit = ModuleNameString.ToEnum(s1);
- else if (param[0] is ModuleName mod)
- unit = mod;
- else
- throw new ArgumentException("Argument error");
- if (!_efem.Map(unit))
- return false;
- return true;
- }
- private bool fnGrip(object[] param)
- {
- Hand arm = (Hand)Enum.Parse(typeof(Hand), (string)param[0]);
- if (!_efem.Grip(arm, true))
- return false;
- return true;
- }
- private bool fnUngrip(object[] param)
- {
-
- Hand arm = (Hand)Enum.Parse(typeof(Hand), (string)param[0]);
- if (!_efem.Grip(arm, false))
- return false;
- return true;
- }
- private bool fnFlip(object[] param)
- {
- string orient = (string)param[0];
- if (!_efem.Flip(orient))
- return false;
- return true;
- }
- private bool fnEmsStop(object[] param)
- {
- if (!_efem.EmsStop())
- return false;
- return true;
- }
- private bool fnSetRobotSpeed(object[] param)
- {
- string speed = (string)param[0];
- if (!_efem.SetSpeed(speed))
- return false;
- return true;
- }
- private bool fnLoadFoup(object[] param)
- {
- ModuleName lp = ModuleHelper.Converter((string)param[0]);
- if (!_efem.Load(lp))
- return false;
- return true;
- }
- public bool IsIdle
- {
- get { return fsm.State == (int)STATE.Idle; }
- }
- public bool IsError
- {
- get { return fsm.State == (int)STATE.Error; }
- }
- public bool IsInit
- {
- get { return fsm.State == (int)STATE.Unknown || fsm.State==(int)STATE.Init; }
- }
- public bool IsBusy
- {
- get { return !IsInit && !IsError && !IsIdle; }
- }
- public bool IsOnline { get; internal set; }
- public int Invoke(string function, params object[] args)
- {
- switch (function)
- {
- case "Home":
- CheckToPostMessage((int)MSG.HomeAll);
- return (int)MSG.HomeAll;
- }
- return (int)FSM_MSG.NONE;
- }
- public bool CheckAcked(int msg)
- {
- return fsm.CheckExecuted(msg);
- }
- internal void InvokeReset()
- {
- if (_EnableResetEFEMError && fsm.State == (int) STATE.Error)
- {
- PostMsg((int)MSG.Recover);
- }
- }
- public int InvokeAlign(string module, float time)
- {
-
- if (CheckToPostMessage((int)MSG.Align, module, time))
- return (int)MSG.Align;
- return (int)FSM_MSG.NONE;
- }
- public int InvokeLiftDown(string module)
- {
- if (CheckToPostMessage((int)MSG.Lift, module, false))
- return (int)MSG.Lift;
- return (int)FSM_MSG.NONE;
- }
- public int InvokePick(ModuleName source, int slot, Hand hand, WaferSize size)
- {
- if (CheckToPostMessage((int)MSG.Pick, source, slot, hand, size))
- return (int)MSG.Pick;
- return (int)FSM_MSG.NONE;
- }
- public int InvokeGoto(ModuleName source, int slot)
- {
- if (CheckToPostMessage((int)MSG.Goto, source, slot))
- return (int)MSG.Goto;
- return (int)FSM_MSG.NONE;
- }
- public int InvokePlace(ModuleName target, int slot, Hand hand, WaferSize size)
- {
- if (CheckToPostMessage((int)MSG.Place, target, slot, hand, size))
- return (int)MSG.Place;
- return (int)FSM_MSG.NONE;
- }
- public int InvokePickAndPlace(ModuleName targetModule, Hand pickHand, int pickSlot, Hand placeHand, int placeSlot, WaferSize size)
- {
- if (CheckToPostMessage((int)MSG.PickAndPlace, targetModule, pickSlot, pickHand, placeHand, placeSlot, size))
- return (int)MSG.PickAndPlace;
- return (int)FSM_MSG.NONE;
- }
- public int InvokeMap(string target )
- {
- if (CheckToPostMessage((int)MSG.Map, target ))
- return (int)MSG.Map;
- return (int)FSM_MSG.NONE;
- }
- public int InvokeFlip(string orient)
- {
- if (CheckToPostMessage((int)MSG.Flip, orient))
- return (int)MSG.Flip;
- return (int)FSM_MSG.NONE;
- }
- public bool IsPrepareTransferReady(ModuleName module, EnumTransferType type, int slot)
- {
- if (type == EnumTransferType.Pick)
- {
- //需要补充:判断LP 放好了,而且已经map过。
- return _efem[module].HasCassette && _efem[module].IsMapped;
- }
- else if (type == EnumTransferType.Place)
- {
- //需要补充:判断LP 放好了,而且已经map过。
- return _efem[module].HasCassette && _efem[module].IsMapped;
- }
- return false;
- }
- internal bool CheckReadyRunNewJob(ModuleName module)
- {
- //???
- return true;
- }
- internal bool CheckReadyTransfer(ModuleName module)
- {
- return _efem[module].HasCassette && _efem[module].IsMapped;
- }
- internal bool CheckPlaced(ModuleName module)
- {
- return _efem[module].HasCassette;
- }
-
- internal void NoteJobStart(ModuleName module)
- {
- _efem[module].NoteJobStart();
- }
- internal void NoteJobComplete(ModuleName module)
- {
- _efem[module].NoteJobComplete();
- }
- internal string GetCarrierID(ModuleName module)
- {
- return _efem[module].CarrierId;
- }
- }
- /// <summary>
- /// LP entity
- /// </summary>
- class LoadportEntity : Entity, IEntity
- {
- private enum STATE
- {
- Unknown,
- Idle, // 1
- Initializing, // 2
- Initialized, // 3
- Mapping, // 4
- Mapped, // 5
- }
- public enum MSG
- {
- Home, // 0
- Map, // 1
- ActionDone, // 2
- RecHwMsg, // 3
- Recover, // 4
- Abort, // 5
- Online, // 6
- Error // 7
- }
- private readonly Efem _efem;
- private ModuleName Module { get; }
- public LoadportEntity(ModuleName mod, Efem efem)
- {
- this.Module = mod;
- _efem = efem;
- InitFsmMap();
- OP.Subscribe($"{Module}.Home", (cmd, args) => { PostMsg(MSG.Home); return true; });
- OP.Subscribe($"{Module}.Abort", (cmd, args) => { PostMsg(MSG.Abort); return true; });
- //OP.Subscribe($"{Module}.Map", (cmd, args) => { PostMsg(MSG.Map); return true; });
- OP.Subscribe($"{Module}.Online", (cmd, args) => { PostMsg(MSG.Online); return true; });
- DATA.Subscribe($"{Module}.Status", () => ((STATE)fsm.State).ToString());
- DATA.Subscribe($"{Module}.FsmState", () => ((STATE)fsm.State).ToString());
- DATA.Subscribe($"{Module}.FsmPrevState", () => ((STATE)fsm.PrevState).ToString());
- DATA.Subscribe($"{Module}.FsmLastMessage", GetFsmLastMessage);
- }
- private string GetFsmLastMessage()
- {
- int msg = fsm.LastMsg;
- if (msg >= (int)MSG.Home && msg <= (int)MSG.Error)
- return ((MSG)msg).ToString();
- if (msg == (int)FSM_MSG.TIMER)
- return "Timer";
- return msg.ToString();
- }
- private void InitFsmMap()
- {
- fsm = new StateMachine<LoadportEntity>($"LPM_{Module}", (int)STATE.Idle, 500);
- AnyStateTransition(FSM_MSG.TIMER, fnMonitor, FSM_STATE.SAME);
- //AnyStateTransition(MSG.RecHwMsg, fnRecMsg, FSM_STATE.SAME);
- AnyStateTransition(MSG.Online, fnOnline, FSM_STATE.SAME);
- AnyStateTransition(MSG.Recover, fnRecover, STATE.Idle);
- AnyStateTransition(MSG.Abort, fnRecover, STATE.Idle);
- EnterExitTransition<STATE, FSM_MSG>(STATE.Initializing, fnEnterExecute, FSM_MSG.NONE, fnExitExecute);
- // Home
- AnyStateTransition(MSG.Home, fnHome, STATE.Initializing);
- Transition(STATE.Initializing, MSG.ActionDone, fnActionDone, STATE.Idle);
- }
- private bool fnOnline(object[] param)
- {
- bool online = (bool)param[0];
- _efem.SetOnline(Module, online);
- return true;
- }
- private bool fnRecover(object[] param)
- {
- return true;
- }
- private bool fnMonitor(object[] param)
- {
- STATE curSt = (STATE)fsm.State;
- if (curSt == STATE.Initializing || curSt == STATE.Mapping)
- {
- if (fsm.ElapsedTime > 20 * 1000)
- {
- PostMsg(MSG.Recover);
- }
- }
- return true;
- }
- private bool fnEnterExecute(object[] param)
- {
- _efem.ExecuteAction();
- return true;
- }
- private bool fnExitExecute(object[] param)
- {
- return true;
- }
- private bool fnActionDone(object[] param)
- {
- return true;
- }
- private bool fnHome(object[] param)
- {
- _efem.Home(Module, ModuleName.EFEM.ToString());
- return true;
- }
- public bool Check(int msg, out string reason, params object[] args)
- {
- throw new NotImplementedException();
- }
- }
- }
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