| 123456789101112131415161718192021222324252627282930313233343536373839404142434445464748495051525354555657585960616263646566676869707172737475767778798081828384858687888990919293949596979899100101102103104105106107108109110111112113114115116117118119120121122123124125126127128129130131132133134135136137138139140141142143144145146147148149150151152153154155156157158159160161162163164165166167168169170171172173174175176177178179180181182183184185186187188189190191192193194195196197198199200201202203204205206207208209210211212213214215216217218219220221222223224225226227228229230231232233234235236237238239240241242243244245246247248249250251252253254255256257258259260261262263264265266267268269270271272273274275276277278279280281282283284285286287288289290291292293294295296297298299300301302303304305306307308309310311312313314315316317318319320321322323324325326327328329330331332333334335336337338339340341342343344345346347348349350351352353354355356357358359360361362363364365366367368369370371372373374375376377378379380381382383384385386387388389390391392393394395396397398399400401402403404405406407408409410411412413414415416417418419420421422423424425426427428429430431432433434435436437438439440441442443444445446447448449450451452453454455456457458459460461462463464465466467468469470471472473474475476477478479480481482483484485486487488489490491492493494495496497498499500501502503504505506507508509510511512513514515516517518519520521522523524525526527528529530531532533534535536537538539540541542543544545546547548549550551552553554555556557558559560561562563564565566567568569570571572573574575576577578579580581582583584585586587588589590591592593594595596597598599600601602603604605606607608609610611612613614615616617618619620621622623624625626627628629630631632633634635636637638639640641642643644645646647648649650651652653654655656657658659660661662663664665666667668669670671672673674675676677678679680681682683684685686687688689690691692693694695696697698699700701702703704705706707708709710711712713714715716717718719720721722723724725726727728729730731732733734735736737738739740741742743744745746747748749750751752753754755756757758759760761762763764765766767768769770771772773774775776777778779780781782783784785786787788789790791792793794795796797798799800801802803804805806807808809810811812813814815816817818819820821822823824825826827828829830831832833834835836837838839840841842843844845846847848849850851852853854855856857858859860861862863864865866867868869870871872873874875876877878879880881882883884885886887888889890891892893894895896897898899900901902903904905906907908909910911912913914915916917918919920921922923924925926927928929930931932933934935936937938939940941942943944945946947948949950951952953954955956 | using System;using System.Collections.Generic;using Aitex.Core.Common;using Aitex.Core.RT.DataCenter;using Aitex.Core.RT.Event;using Aitex.Core.RT.Fsm;using Aitex.Core.RT.OperationCenter;using Aitex.Core.RT.Routine;using Aitex.Core.RT.SCCore;using Aitex.Core.Util;using MECF.Framework.Common.Equipment;using MECF.Framework.Common.SubstrateTrackings;using SecsGem.Core.Application;using VirgoCommon;using VirgoRT.HostWrapper;using VirgoRT.Instances;using VirgoRT.Module;namespace VirgoRT.Modules{    class RouteManager : Entity, IEntity    {        public enum MSG        {            MoveWafer,            ReturnWafer,            HomeUnit,            PauseAuto,            ResumeAuto,            Stop,            StartCycle,            HOME,            RESET,            ABORT,            ERROR,            SetAutoMode,            SetManualMode,            ResetIdleCleanTime,            ResetIdlePurgeTime,            CreateJob,            PauseJob,            ResumeJob,            StartJob,            StopJob,            AbortJob,            JobDone,            CassetteLeave,  //For unload light control off afer job done            Map,            ReturnAllWafer,        }        //public LoadPortEntity LP1 { get; private set; }        //public LoadPortEntity LP2 { get; private set; }        //public CoolingStorageEntity Aligner { get; private set; }        public EfemEntity EFEM { get; private set; }        public PMEntity PMA { get; private set; }        public PMEntity PMB { get; private set; }        //routine        public bool IsAutoMode        {            get            {                return fsm.State == (int)RtState.AutoRunning || fsm.State == (int)RtState.AutoIdle;            }        }        public string Name { get; set; }        public bool IsInit        {            get { return fsm.State == (int)RtState.Init; }        }        public bool IsIdle        {            get { return fsm.State == (int)RtState.Idle || fsm.State == (int)RtState.AutoIdle; }        }        public bool IsAlarm        {            get { return fsm.State == (int)RtState.Error; }        }        public bool IsEntityError        {            get            {                return (EFEM?.IsError ?? false)                       || (PMA?.IsError ?? false)                       || (PMB?.IsError ?? false);            }        }        public bool IsRunning        {            get            {                return !IsInit && !IsAlarm && !IsIdle;            }        }        public bool IsEfemRobotAvailable => _auto.IsEfemRobotAvavilable;        private ManualTransfer _manualTransfer;        private IAutoTransfer _auto = null;        private ReturnAllWafer _returnWafer;        private HomeAll _homeAll = new HomeAll();        private bool _isWaitUnload;                public RouteManager()        {            Name = "System";            //LP1 = new LoadPortEntity(ModuleName.LP1);            //LP2 = new LoadPortEntity(ModuleName.LP2);            //Aligner = new CoolingStorageEntity(ModuleName.Aligner);            EFEM = new EfemEntity();            if (ModuleHelper.IsInstalled(ModuleName.PMA))                PMA = new PMEntity(ModuleName.PMA);            if (ModuleHelper.IsInstalled(ModuleName.PMB))                PMB = new PMEntity(ModuleName.PMB);            fsm = new StateMachine<RouteManager>(Name, (int)RtState.Init, 50);            BuildTransitionTable();            SubscribeDataVariable();            SubscribeOperation();            Running = true;        }        private void BuildTransitionTable()        {            EnterExitTransition<RtState, FSM_MSG>(RtState.AutoRunning,  fEnterAutoRunning, FSM_MSG.NONE, fExitAutoTransfer);            EnterExitTransition<RtState, FSM_MSG>(RtState.Transfer,     null, FSM_MSG.NONE, fExitTransfer);            EnterExitTransition<RtState, FSM_MSG>(RtState.Idle,         fEnterIdle, FSM_MSG.NONE, fExitIdle);            EnterExitTransition<RtState, FSM_MSG>(RtState.ReturnWafer, null, FSM_MSG.NONE, FsmExitReturnWafer);            //Init sequence            Transition(RtState.Init, MSG.HOME,                 FsmStartHome, RtState.Initializing);            Transition(RtState.Idle, MSG.HOME,                 FsmStartHome, RtState.Initializing);            Transition(RtState.Error, MSG.HOME,                FsmStartHome, RtState.Initializing);            //  EnterExitTransition<RtState, FSM_MSG>(RtState.Initializing, fStartInit, FSM_MSG.NONE, null);            Transition(RtState.Initializing, FSM_MSG.TIMER,    FsmMonitorHome, RtState.Idle);            Transition(RtState.Initializing, MSG.ERROR,        fError, RtState.Error);            Transition(RtState.Initializing, MSG.ABORT,        FsmAbort, RtState.Init);            //Reset            AnyStateTransition(MSG.RESET,                      fStartReset, RtState.Idle);            AnyStateTransition(MSG.ERROR,                      fError, RtState.Error);            AnyStateTransition((int)FSM_MSG.ALARM,             fError, (int)RtState.Error);            //Unload cassette            AnyStateTransition(MSG.CassetteLeave,              fCassetteLeave, FSM_STATE.SAME);            //Auto/manual             Transition(RtState.Idle, MSG.SetAutoMode,          fStartAutoTransfer, RtState.AutoIdle);            Transition(RtState.AutoRunning, FSM_MSG.TIMER,     fAutoTransfer, RtState.Idle);            Transition(RtState.AutoRunning, MSG.ABORT,         fAbortAutoTransfer, RtState.Idle);            //Transition(RtState.AutoRunning, MSG.SetManualMode, FsmStartSetManualMode, RtState.Idle);            Transition(RtState.AutoRunning, MSG.JobDone,       fJobDone, RtState.AutoIdle);            //Transition(RtState.AutoRunning, MSG.CassetteLeave, fCassetteLeave, RtState.AutoRunning);   //For unload light control off afer job done            Transition(RtState.AutoRunning, MSG.CreateJob,     FsmCreateJob, RtState.AutoRunning);            Transition(RtState.AutoRunning, MSG.StartJob,      FsmStartJob, RtState.AutoRunning);            Transition(RtState.AutoRunning, MSG.PauseJob,      FsmPauseJob, RtState.AutoRunning);            Transition(RtState.AutoRunning, MSG.ResumeJob,     FsmResumeJob, RtState.AutoRunning);            Transition(RtState.AutoRunning, MSG.StopJob,       FsmStopJob, RtState.AutoRunning);            Transition(RtState.AutoRunning, MSG.AbortJob,      FsmAbortJob, RtState.AutoRunning);            Transition(RtState.AutoRunning, MSG.Map, FsmMap, RtState.AutoRunning);            Transition(RtState.AutoRunning, MSG.ResetIdleCleanTime, FsmResetIdleCleanTime, RtState.AutoRunning);            Transition(RtState.AutoRunning, MSG.ResetIdlePurgeTime, FsmResetIdlePurgeTime, RtState.AutoRunning);            Transition(RtState.AutoIdle, FSM_MSG.TIMER, FsmMonitorAutoIdle, RtState.AutoIdle);            Transition(RtState.AutoIdle, MSG.SetManualMode, FsmStartSetManualMode, RtState.Idle);            Transition(RtState.AutoIdle, MSG.CreateJob, FsmCreateJob, RtState.AutoIdle);            Transition(RtState.AutoIdle, MSG.StartJob, FsmStartJob, RtState.AutoRunning);            Transition(RtState.AutoIdle, MSG.PauseJob, FsmPauseJob, RtState.AutoIdle);            Transition(RtState.AutoIdle, MSG.ResumeJob, FsmResumeJob, RtState.AutoIdle);            Transition(RtState.AutoIdle, MSG.StopJob, FsmStopJob, RtState.AutoIdle);            Transition(RtState.AutoIdle, MSG.AbortJob, FsmAbortJob, RtState.AutoIdle);            Transition(RtState.AutoIdle, MSG.Map, FsmMap, RtState.AutoIdle);            //Transition(RtState.AutoIdle, MSG.CassetteLeave, fCassetteLeave, RtState.AutoIdle);   //For unload light control off afer job done            Transition(RtState.AutoIdle, MSG.ResetIdleCleanTime, FsmResetIdleCleanTime, RtState.AutoIdle);            Transition(RtState.AutoIdle, MSG.ResetIdlePurgeTime, FsmResetIdlePurgeTime, RtState.AutoIdle);            //Transfer             Transition(RtState.Idle, MSG.MoveWafer,            fStartTransfer, RtState.Transfer);            Transition(RtState.Transfer, FSM_MSG.TIMER,        fTransfer, RtState.Idle);            Transition(RtState.Transfer, MSG.ABORT,            FsmAbort, RtState.Idle);            //Return Wafer             Transition(RtState.Idle, MSG.ReturnAllWafer, FsmStartReturnWafer, RtState.ReturnWafer);            Transition(RtState.ReturnWafer, FSM_MSG.TIMER, FsmMonitorReturnWafer, RtState.Idle);            Transition(RtState.ReturnWafer, MSG.ABORT, FsmAbort, RtState.Idle);        }        void SubscribeDataVariable()        {            DATA.Subscribe("Rt.Status", () => ((RtState)fsm.State).ToString());            DATA.Subscribe(ModuleName.System.ToString(), "AlarmEvent", EV.GetAlarmEvent);            DATA.Subscribe("System.IsAutoMode", () => IsAutoMode);            DATA.Subscribe("System.IsIdle", () => IsIdle || IsInit);            DATA.Subscribe("System.IsAlarm", () => IsAlarm || IsEntityError);            DATA.Subscribe("System.IsBusy", () => IsRunning);            DATA.Subscribe("System.IsWaitUnload", () => _isWaitUnload && IsAutoMode);            DATA.Subscribe("System.IsConnectedWithHost", () => CheckSecsGemOnline(Singleton<SecGemApplication>.Instance.ControlState));            DATA.Subscribe("System.IsDisconnectWithHost", () => CheckSecsGemOnline(Singleton<SecGemApplication>.Instance.ControlState));            DATA.Subscribe("EquipmentMode", () => IsAutoMode ? 0 : 1, SubscriptionAttribute.FLAG.IgnoreSaveDB);            DATA.Subscribe("EquipmentStatus", () =>            {                //"0 = Uninit                //1 = Idle                //2 = Running                //3 = Error                //4 = Pause                //"                if (IsInit) return 0;                if (IsIdle) return 1;                if (IsAlarm) return 3;                                return 2;            }, SubscriptionAttribute.FLAG.IgnoreSaveDB);        }        /// <summary>        /// 检验Secsgem在线情况        /// </summary>        /// <param name="controlState"></param>        /// <returns></returns>        private bool CheckSecsGemOnline(SecsGem.Core.EnumData.ControlState controlState)        {            if (controlState == SecsGem.Core.EnumData.ControlState.OnlineLocal || controlState == SecsGem.Core.EnumData.ControlState.OnlineRemote)            {                return true;            }            return false;        }        void SubscribeOperation()        {            OP.Subscribe("CreateWafer", InvokeCreateWafer);            OP.Subscribe("DeleteWafer", InvokeDeleteWafer);            OP.Subscribe("ReturnWafer", InvokeReturnWafer);            OP.Subscribe("System.ReturnAllWafer", (string cmd, object[] args) =>            {                return CheckToPostMessage((int)MSG.ReturnAllWafer, args[0], args[1], args[2], args[3]);            });            OP.Subscribe("System.MoveWafer", (string cmd, object[] args) =>            {                if (!Enum.TryParse((string)args[0], out ModuleName source))                {                    EV.PostWarningLog(Name, $"Parameter source {(string)args[0]} not valid");                    return false;                }                if (!Enum.TryParse((string)args[2], out ModuleName destination))                {                    EV.PostWarningLog(Name, $"Parameter destination {(string)args[1]} not valid");                    return false;                }                return CheckToPostMessage((int)MSG.MoveWafer,                     source, (int)args[1],                    destination, (int)args[3],                    (bool)args[4], (int)args[5],                    (bool)args[6], (int)args[7], (string)args[8]);            });            OP.Subscribe("System.HomeAll", (string cmd, object[] args) =>            {                return CheckToPostMessage((int)MSG.HOME);            });            OP.Subscribe("System.Abort", (string cmd, object[] args) =>            {                return CheckToPostMessage((int)MSG.ABORT);            });            OP.Subscribe("System.Reset", (string cmd, object[] args) =>            {                return CheckToPostMessage((int)MSG.RESET);            });            OP.Subscribe("System.SetAutoMode", (string cmd, object[] args) =>            {                return CheckToPostMessage((int)MSG.SetAutoMode);            });            OP.Subscribe("System.SetManualMode", (string cmd, object[] args) =>            {                return CheckToPostMessage((int)MSG.SetManualMode);            });            OP.Subscribe("System.CreateJob", (string cmd, object[] args) =>            {                return CheckToPostMessage((int)MSG.CreateJob, args[0]);            });            OP.Subscribe("System.StartJob", (string cmd, object[] args) =>            {                return CheckToPostMessage((int)MSG.StartJob, args[0]);            });            OP.Subscribe("System.PauseJob", (string cmd, object[] args) =>            {                return CheckToPostMessage((int)MSG.PauseJob, args[0]);            });            OP.Subscribe("System.ResumeJob", (string cmd, object[] args) =>            {                return CheckToPostMessage((int)MSG.ResumeJob, args[0]);            });            OP.Subscribe("System.StopJob", (string cmd, object[] args) =>            {                return CheckToPostMessage((int)MSG.StopJob, args[0]);            });            OP.Subscribe("System.AbortJob", (string cmd, object[] args) =>            {                return CheckToPostMessage((int)MSG.AbortJob, args[0]);            });            OP.Subscribe("LP1.Map", (string cmd, object[] args) =>            {                if (IsAutoMode)                {                    return CheckToPostMessage((int)MSG.Map, ModuleName.LP1.ToString());                }                return EFEM.InvokeMap(ModuleName.LP1.ToString())!= (int)FSM_MSG.NONE;            });            OP.Subscribe("LP2.Map", (string cmd, object[] args) =>            {                if (IsAutoMode)                {                    return CheckToPostMessage((int)MSG.Map, ModuleName.LP2.ToString());                }                return EFEM.InvokeMap(ModuleName.LP2.ToString()) != (int)FSM_MSG.NONE;            });            OP.Subscribe("Buffer.Map", (string cmd, object[] args) =>            {                if (IsAutoMode)                {                    return CheckToPostMessage((int)MSG.Map, ModuleName.Buffer.ToString());                }                return EFEM.InvokeMap(ModuleName.Buffer.ToString()) != (int)FSM_MSG.NONE;            });            OP.Subscribe(RtOperation.SetConfig.ToString(), (name, args) =>            {                string sc_key = args[0] as string;                if (!string.IsNullOrWhiteSpace(sc_key) && args.Length > 1)                {                    SC.SetItemValue(sc_key, args[1]);                }                return true;            });            OP.Subscribe("System.ResetIdleCleanTime", (string cmd, object[] args) =>            {                return CheckToPostMessage((int)MSG.ResetIdleCleanTime, args[0]);            });            OP.Subscribe("System.ResetIdlePurgeTime", (string cmd, object[] args) =>            {                return CheckToPostMessage((int)MSG.ResetIdlePurgeTime, args[0]);            });            OP.Subscribe("System.SetWaferSize", (string cmd, object[] args) =>            {                string module = (string)args[0];                string size = (string)args[1];                switch (size)                {                case "3":                    WaferManager.Instance.UpdateWaferSize(ModuleHelper.Converter(module), 0, WaferSize.WS3);                    break;                case "4":                    WaferManager.Instance.UpdateWaferSize(ModuleHelper.Converter(module), 0, WaferSize.WS4);                    break;                case "6":                    WaferManager.Instance.UpdateWaferSize(ModuleHelper.Converter(module), 0, WaferSize.WS6);                    break;                default:                    EV.PostWarningLog("System", $"wafer size {size} not valid");                    break;                }                return true;            });            OP.Subscribe("System.CassetteLeave", (string cmd, object[] args) =>            {                return CheckToPostMessage((int)MSG.CassetteLeave);            });            OP.Subscribe("System.IsModuleInstalled", (string cmd, object[] args) => {                return ModuleHelper.IsInstalled((ModuleName)args[0]);            });        }        public bool CheckToPostMessage(int msg, params object[] args)        {            if (!fsm.FindTransition(fsm.State, msg))            {                EV.PostWarningLog(Name, $"{Name} is in { (RtState)fsm.State} state,can not do {(MSG)msg}");                return false;            }            fsm.PostMsg(msg, args);            return true;        }        public bool Check(int msg, out string reason, params object[] args)        {            if (!fsm.FindTransition(fsm.State, msg))            {                reason = String.Format("{0} is in {1} state,can not do {2}", Name, (RtState)fsm.State, (MSG)msg);                return false;            }            if (msg == (int)MSG.StartCycle)            {                if (!IsAutoMode)                {                    reason = String.Format("can not do {0}, isn't auto mode.", msg.ToString());                    return false;                }            }            reason = "";            return true;        }        protected override bool Init()        {            _manualTransfer = new ManualTransfer();            Singleton<EventManager>.Instance.OnAlarmEvent += Instance_OnAlarmEvent;            EFEM.Initialize();            //Aligner.Initialize();            //LP1.Initialize();            //LP2.Initialize();            PMA?.Initialize();            PMB?.Initialize();            //_auto = new AutoTransfer();            _auto = new AutoTransfer_T();            _returnWafer = new ReturnAllWafer();            return true;        }        private void Instance_OnAlarmEvent(EventItem obj)        {            FSM_MSG msg = FSM_MSG.NONE;            if (obj.Level == EventLevel.Warning)                msg = FSM_MSG.WARNING;            else if (obj.Level == EventLevel.Alarm)                msg = FSM_MSG.ALARM;            switch (obj.Source)            {                case "PMA":                    PMA?.PostMsg(msg, obj.Id, obj.Description);                    break;                case "PMB":                    PMB?.PostMsg(msg, obj.Id, obj.Description);                    break;                case "EFEM":                    EFEM?.PostMsg(msg, obj.Id, obj.Description);                    break;                //case "System":                //    PostMsg(msg, obj.Id, obj.Description);                //    break;            }        }        protected override void Term()        {            PMA?.Terminate();            PMB?.Terminate();            //LP2.Terminate();            //LP1.Terminate();            EFEM.Terminate();        }        #region Init        private bool FsmStartHome(object[] objs)        {            return _homeAll.Start() == Result.RUN;        }        private bool FsmMonitorHome(object[] objs)        {            Result ret = _homeAll.Monitor();            if (ret == Result.DONE)            {                _homeAll.Clear();                return true;            }            if (ret == Result.FAIL)            {                _homeAll.Clear();                PostMsg(MSG.ERROR);            }            return false;        }        private bool fError(object[] objs)        {            if (fsm.State == (int)RtState.Transfer)            {                _manualTransfer.Clear();            }            //EFEM.PostMsg(EfemEntity.MSG.LED, LightType.RED, LightStatus.ON);            //EFEM.PostMsg(EfemEntity.MSG.LED, LightType.YELLOW, LightStatus.OFF);            //EFEM.PostMsg(EfemEntity.MSG.LED, LightType.GREEN, LightStatus.OFF);            //EFEM.PostMsg(EfemEntity.MSG.LED, LightType.BLUE, LightStatus.OFF);            //EFEM.PostMsg(EfemEntity.MSG.LED, LightType.BUZZER1, LightStatus.ON);            return true;        }        private bool fEnterIdle(object[] param)        {            //EFEM.PostMsg(EfemEntity.MSG.LED, LightType.RED, LightStatus.OFF);            //EFEM.PostMsg(EfemEntity.MSG.LED, LightType.YELLOW, LightStatus.ON);            //EFEM.PostMsg(EfemEntity.MSG.LED, LightType.GREEN, LightStatus.OFF);            //EFEM.PostMsg(EfemEntity.MSG.LED, LightType.BLUE, LightStatus.OFF);            //EFEM.PostMsg(EfemEntity.MSG.LED, LightType.BUZZER1, LightStatus.OFF);             return true;        }        private bool fExitIdle(object[] param)        {            return true;        }        #endregion Init        #region AutoTransfer        private bool FsmMonitorAutoIdle(object[] param)        {            Result ret = _auto.Monitor();            if (!_auto.CheckAllJobDone())            {                 return false;            }            _isWaitUnload = (bool)DATA.Poll("LP1.NotifyJobDone") || (bool)DATA.Poll("LP2.NotifyJobDone");            return ret == Result.DONE;        }        private bool FsmStartSetManualMode(object[] objs)        {            if (_auto.HasJobRunning)            {                EV.PostWarningLog("System", "Can not change to manual mode, abort running job first");                return false;            }            return true;        }        private bool fStartAutoTransfer(object[] objs)        {            Result ret = _auto.Start(objs);            return ret == Result.RUN;        }        private bool fAutoTransfer(object[] objs)        {            var auto = _auto as AutoTransfer_T;            Result ret = auto.Monitor();                        if (_auto.CheckJobJustDone(out string jobInfo))            {                EV.PostPopDialogMessage(EventLevel.InformationNoDelay, "Job complete", jobInfo);            }            if (_auto.CheckAllJobDone())            {                if (!CheckToPostMessage((int)MSG.JobDone))                    return false;            }            _isWaitUnload = (bool)DATA.Poll("LP1.NotifyJobDone") || (bool)DATA.Poll("LP2.NotifyJobDone");            return ret == Result.DONE;        }        private bool fEnterAutoRunning(object[] objs)        {            //EFEM.PostMsg(EfemEntity.MSG.LED, LightType.RED, LightStatus.OFF);            //EFEM.PostMsg(EfemEntity.MSG.LED, LightType.GREEN, LightStatus.ON);            //EFEM.PostMsg(EfemEntity.MSG.LED, LightType.YELLOW, LightStatus.OFF);            //EFEM.PostMsg(EfemEntity.MSG.LED, LightType.BLUE, LightStatus.OFF);            //EFEM.PostMsg(EfemEntity.MSG.LED, LightType.BUZZER1, LightStatus.OFF);            return true;        }        private bool fExitAutoTransfer(object[] objs)        {            _auto.Clear();            return true;        }        private bool fJobDone(object[] objs)        {            //Unload light control on            //EFEM.PostMsg(EfemEntity.MSG.LED, LightType.RED, LightStatus.OFF);            //EFEM.PostMsg(EfemEntity.MSG.LED, LightType.GREEN, LightStatus.BLINK);            //EFEM.PostMsg(EfemEntity.MSG.LED, LightType.YELLOW, LightStatus.OFF);            //EFEM.PostMsg(EfemEntity.MSG.LED, LightType.BLUE, LightStatus.OFF);            //EFEM.PostMsg(EfemEntity.MSG.LED, LightType.BUZZER1, LightStatus.OFF);            _isWaitUnload = true;            return true;        }        private bool fCassetteLeave(object[] objs)        {            //Unload light control off,light as idle & autoidle mode            //EFEM.PostMsg(EfemEntity.MSG.LED, LightType.RED, LightStatus.OFF);            //EFEM.PostMsg(EfemEntity.MSG.LED, LightType.GREEN, LightStatus.OFF);            //EFEM.PostMsg(EfemEntity.MSG.LED, LightType.YELLOW, LightStatus.ON);            //EFEM.PostMsg(EfemEntity.MSG.LED, LightType.BLUE, LightStatus.OFF);            //EFEM.PostMsg(EfemEntity.MSG.LED, LightType.BUZZER1, LightStatus.OFF);            _isWaitUnload = false;            return true;        }        private bool fAbortAutoTransfer(object[] objs)        {            _auto.Clear();            return true;        }        #endregion AutoTransfer        #region return wafer        private bool FsmStartReturnWafer(object[] objs)        {            Result ret = _returnWafer.Start(objs);            if (ret == Result.FAIL || ret == Result.DONE)                return false;            return ret == Result.RUN;        }        private bool FsmMonitorReturnWafer(object[] objs)        {            Result ret = _returnWafer.Monitor(objs);            if (ret == Result.FAIL)            {                PostMsg(MSG.ERROR);                return false;            }            return ret == Result.DONE;        }        private bool FsmExitReturnWafer(object[] objs)        {            _returnWafer.Clear();            return true;        }        #endregion cycle        #region Transfer        private bool fStartTransfer(object[] objs)        {            Result ret = _manualTransfer.Start(objs);            if (ret == Result.FAIL || ret == Result.DONE)                return false;            return ret == Result.RUN;        }        private bool fTransfer(object[] objs)        {            Result ret = _manualTransfer.Monitor(objs);            if (ret == Result.FAIL)            {                PostMsg(MSG.ERROR);                return false;            }            return ret == Result.DONE;        }        private bool fExitTransfer(object[] objs)        {            _manualTransfer.Clear();            return true;        }         #endregion Transfer        #region reset        private bool fStartReset(object[] objs)        {            //LP1.InvokeReset();            //LP2.InvokeReset();            //Aligner.InvokeReset();            EFEM.InvokeReset();            PMA?.InvokeReset();            PMB?.InvokeReset();            Singleton<DeviceEntity>.Instance.PostMsg(DeviceEntity.MSG.RESET);            if (fsm.State == (int)RtState.Error)                return true;            return false;        }        #endregion reset        private bool FsmMap(object[] param)        {            _auto.Map((string)param[0]);            return true;        }        public bool CheckRecipeUsedInJob(string pathName)        {            if (!IsAutoMode)                return false;            return _auto.CheckRecipeUsedInJob(pathName);        }        public bool CheckSequenceUsedInJob(string pathName)        {            if (!IsAutoMode)                return false;            return _auto.CheckSequenceUsedInJob(pathName);        }        private bool FsmCreateJob(object[] param)        {            _auto.CreateJob((Dictionary<string, object>)param[0]);            return true;        }        private bool FsmAbortJob(object[] param)        {            _auto.AbortJob((string)param[0]);            return true;        }        private bool FsmStopJob(object[] param)        {            _auto.StopJob((string)param[0]);            return true;        }        private bool FsmResumeJob(object[] param)        {            _auto.ResumeJob((string)param[0]);            return true;        }        private bool FsmPauseJob(object[] param)        {            _auto.PauseJob((string)param[0]);            return true;        }        private bool FsmStartJob(object[] param)        {            _auto.StartJob((string)param[0]);            return true;        }        private bool FsmAbort(object[] param)        {            if (fsm.State == (int)RtState.Transfer)            {                _manualTransfer.Clear();            }            if (fsm.State == (int)RtState.AutoRunning)            {                _auto.Clear();            }            if (fsm.State == (int)RtState.ReturnWafer)            {                _returnWafer.Clear();            }            return true;        }        private bool FsmResetIdlePurgeTime(object[] param)        {            _auto.ResetIdlePurgeTime((string)param[0]);            return true;        }        private bool FsmResetIdleCleanTime(object[] param)        {            _auto.ResetIdleCleanTime((string)param[0]);            return true;        }        private bool InvokeReturnWafer(string arg1, object[] args)        {            ModuleName target = ModuleHelper.Converter(args[0].ToString());            int slot = (int)args[1];            if (ModuleHelper.IsLoadPort(target))            {                EV.PostInfoLog("System", string.Format("Wafer already at LoadPort {0} {1}, return operation is not valid", target.ToString(), slot + 1));                return false;            }            if (!WaferManager.Instance.IsWaferSlotLocationValid(target, slot))            {                EV.PostWarningLog("System", string.Format("Invalid position,{0},{1}", target.ToString(), slot.ToString()));                return false;            }            WaferInfo wafer = WaferManager.Instance.GetWafer(target, slot);            if (wafer.IsEmpty)            {                EV.PostInfoLog("System", string.Format("No wafer at {0} {1}, return operation is not valid", target.ToString(), slot + 1));                return false;            }             return CheckToPostMessage((int)MSG.MoveWafer,                target, slot,                (ModuleName)wafer.OriginStation, wafer.OriginSlot,                false, 0, false, 0 , "Blade1");        }        private bool InvokeDeleteWafer(string arg1, object[] args)        {            ModuleName chamber = ModuleHelper.Converter(args[0].ToString());            int slot = (int)args[1];            if (WaferManager.Instance.IsWaferSlotLocationValid(chamber, slot))            {                if (WaferManager.Instance.CheckHasWafer(chamber, slot))                {                    WaferManager.Instance.DeleteWafer(chamber, slot);                    EV.PostMessage(ModuleName.System.ToString(), EventEnum.WaferDelete, chamber.ToString(), slot + 1);                }                else                {                    EV.PostInfoLog("System", string.Format("No wafer at {0} {1}, delete not valid", chamber.ToString(), slot + 1));                }            }            else            {                EV.PostWarningLog("System", string.Format("Invalid position,{0},{1}", chamber.ToString(), slot.ToString()));                return false;            }            return true;        }        private bool InvokeCreateWafer(string arg1, object[] args)        {            ModuleName chamber = ModuleHelper.Converter(args[0].ToString());            int slot = (int)args[1];            WaferStatus state = WaferStatus.Normal;            if (WaferManager.Instance.IsWaferSlotLocationValid(chamber, slot))            {                if (WaferManager.Instance.CheckHasWafer(chamber, slot))                {                    EV.PostInfoLog("System", string.Format("{0} slot {1} already has wafer.create wafer is not valid", chamber, slot));                }                else if (WaferManager.Instance.CreateWafer(chamber, slot, state) != null)                {                    EV.PostMessage(ModuleName.System.ToString(), EventEnum.WaferCreate, chamber.ToString(), slot + 1, state.ToString());                }            }            else            {                EV.PostWarningLog("System", string.Format("Invalid position,{0},{1}", chamber.ToString(), slot.ToString()));                return false;            }            return true;        }    }}
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