| 1234567891011121314151617181920 | using System;using System.Collections.Generic;using System.Linq;using System.Text;using System.Runtime.Serialization;namespace Aitex.Core.Equipment.SusceptorDefine{    [DataContract]    [Serializable]    public enum WaferStatus    {        [EnumMember]        Normal = 0,        [EnumMember]        Dummy = 1,            }}
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