using System; using Aitex.Core.Common; using Aitex.Core.RT.DataCenter; using Aitex.Core.RT.Event; using Aitex.Core.RT.Fsm; using Aitex.Core.RT.OperationCenter; using Aitex.Core.RT.SCCore; using Aitex.Core.Utilities; using Aitex.Sorter.Common; using MECF.Framework.Common.Equipment; using MECF.Framework.Common.Schedulers; using MECF.Framework.Common.SubstrateTrackings; using VirgoCommon; using VirgoRT.Device; using VirgoRT.Device.YASKAWA; using VirgoRT.Devices.EFEM; using VirgoRT.Modules.LPs; using BAI.Systems.Common.Substrates; namespace VirgoRT.Modules { class EfemEntity : Entity, IEntity, IModuleEntity { private int _bigWafer = 0; private int _midWafer = 0; private int _smallWafer = 0; private bool _hasPlacementError = false; private bool _EnableResetEFEMError = false; public enum STATE { Unknown, // 0 Initializing, // 1 Idle, // 2 Error, // 3 Picking, // 4 Placing, // 5 Aligning, // 6 Mapping, // 7 Init, // 8 Orgshing, // 9 Lifting, // 10 InitingAL, // 11 InitingRB, // 12 Extending, // 13 Retracting, // 14 //SettingLamp, // 15 Swapping, Gotoing, Gripping, Ungripping, Fliping, EmsStoping, SetSpeed, Loading, } public enum MSG { HomeAll, // 0 Pick, // 1 Place, // 2 Align, // 3 ActionDone, // 4 RecHwMsg, // 5 MoveCmd, // 6 //LED, // 7 Recover, // 8 Goto, // 9 Error, // 10 Online, // 11 CommReady, // 12 Lift, // 13 HomeAL, // 14 HomeRB, // 15 Extend, // 16 Retract, // 17 PMLiftPinUp, // 18 PMLiftPinDown, // 19 TurnOffBuzzer, //SwitchOnBuzzerAndRed, Abort, Map, ToInit, Cool, PickAndPlace, Grip, Ungrip, Flip, LiftActionDone, EmsStop, SetRobotSpeed, Load, } public enum EfemType { FutureEfem = 1, JetEfem = 2, BrooksEFEM = 3, BeamSUNWAY = 4, } public bool Check(int msg, out string reason, params object[] args) { throw new NotImplementedException(); } // Fields // private readonly string Name; private readonly Efem _efem; private readonly LoadPortModule[] _lpms = new LoadPortModule[2]; private readonly EfemType _efemType; public Efem EfemDevice => _efem; public EfemType EFEMType => _efemType; // Constructor // public EfemEntity() { _smallWafer = SC.GetValue($"System.SmallWafer"); _midWafer = SC.GetValue($"System.MidWafer"); _bigWafer = SC.GetValue($"System.BigWafer"); _efemType = (EfemType)SC.GetValue($"EFEM.EfemType"); _EnableResetEFEMError = SC.GetValue($"EFEM.EnableResetError"); _efem = new Efem(); Name = ModuleName.EFEM.ToString(); InitFsmMap(); } public void NotifyLP(ModuleName mod, LoadportEntity.MSG msg) { _lpms[mod - ModuleName.LP1].PostMsg(msg); } public void NotifyLPError(ModuleName mod ) { _lpms[mod - ModuleName.LP1].PostMsg(LoadportEntity.MSG.ActionDone); //_lpms[mod - ModuleName.LP1]..OnError(); } public void NotifyLP(ModuleName mod, LoadPortModule.MSG msg) { _lpms[mod - ModuleName.LP1].PostMsg(msg); } public bool IsLPIdle(ModuleName mod) { return _lpms[mod - ModuleName.LP1].IsReady; } protected override bool Init() { _lpms[0] = new LoadPortModule(ModuleName.LP1, _efem); _lpms[1] = new LoadPortModule(ModuleName.LP2, _efem); _lpms[0].Initialize(); _lpms[1].Initialize(); OP.Subscribe($"{ModuleName.EFEM}.{EfemOperation.Home}", (cmd, args) => { PostMsg(MSG.HomeAll); return true; }); OP.Subscribe($"{ModuleName.EFEM}.{EfemOperation.ClearError}", (cmd, args) => { PostMsg(MSG.Recover); return true; }); OP.Subscribe($"{ModuleName.EFEM}.{EfemOperation.TurnOffBuzzer}", (cmd, args) => { PostMsg(MSG.TurnOffBuzzer); return true; }); //OP.Subscribe($"{ModuleName.EFEM}.{EfemOperation.SwitchOnBuzzerAndRed}", (cmd, args) => { PostMsg(MSG.SwitchOnBuzzerAndRed); return true; }); OP.Subscribe($"{ModuleName.EFEM}.Online", (cmd, args) => { PostMsg(MSG.Online); return true; }); OP.Subscribe($"{ModuleName.EfemRobot}.{EfemOperation.Pick}", (cmd, args) => { PostMsg(MSG.Pick, args[0], args[1], args[3], args[2]); return true; }); OP.Subscribe($"{ModuleName.EfemRobot}.{EfemOperation.Place}", (cmd, args) => { PostMsg(MSG.Place, args[0], args[1], args[3], args[2]); return true; }); OP.Subscribe($"{ModuleName.EfemRobot}.{EfemOperation.Extend}", (cmd, args) => { PostMsg(MSG.Extend, args[0], args[1], args[2]); return true; }); OP.Subscribe($"{ModuleName.EfemRobot}.{EfemOperation.Retract}", (cmd, args) => { PostMsg(MSG.Retract, args[0], args[1]); return true; }); OP.Subscribe($"{ModuleName.EfemRobot}.{EfemOperation.Abort}", (cmd, args) => { PostMsg(MSG.Abort); return true; }); OP.Subscribe($"{ModuleName.EfemRobot}.{EfemOperation.Home}", (cmd, args) => { PostMsg(MSG.HomeRB, args); return true; }); OP.Subscribe($"{ModuleName.EfemRobot}.{EfemOperation.Grip}", (cmd, args) => { bool isGrip = ((string)args[0]).ToLower() == "on"; PostMsg(isGrip ? MSG.Grip : MSG.Ungrip, args[1]); return true; }); OP.Subscribe($"{ModuleName.EfemRobot}.{EfemOperation.Flip}", (cmd, args) => { PostMsg(MSG.Flip, args[0]); return true; }); OP.Subscribe($"{ModuleName.EfemRobot}.{EfemOperation.EmsStop}", (cmd, args) => { PostMsg(MSG.EmsStop); return true; }); OP.Subscribe($"{ModuleName.EfemRobot}.{EfemOperation.SetRobotSpeed}", (cmd, args) => { PostMsg(MSG.SetRobotSpeed, args[0]); return true; }); OP.Subscribe($"{ModuleName.Aligner1}.{EfemOperation.Home}", (cmd, args) => { PostMsg(MSG.HomeAL, ModuleName.Aligner1); return true; }); OP.Subscribe($"{ModuleName.Aligner2}.{EfemOperation.Home}", (cmd, args) => { PostMsg(MSG.HomeAL, ModuleName.Aligner2); return true; }); OP.Subscribe($"{ModuleName.Cooling1}.{EfemOperation.Home}", (cmd, args) => { PostMsg(MSG.HomeAL, ModuleName.Cooling1); return true; }); OP.Subscribe($"{ModuleName.Cooling2}.{EfemOperation.Home}", (cmd, args) => { PostMsg(MSG.HomeAL, ModuleName.Cooling2); return true; }); OP.Subscribe($"{ModuleName.Aligner1}.{EfemOperation.Align}", (cmd, args) => { PostMsg(MSG.Align, ModuleName.Aligner1, args[0]); return true; }); OP.Subscribe($"{ModuleName.Aligner2}.{EfemOperation.Align}", (cmd, args) => { PostMsg(MSG.Align, ModuleName.Aligner2, args[0]); return true; }); OP.Subscribe($"{ModuleName.Cooling1}.{EfemOperation.Align}", (cmd, args) => { PostMsg(MSG.Align, ModuleName.Cooling1, args[0]); return true; }); OP.Subscribe($"{ModuleName.Cooling2}.{EfemOperation.Align}", (cmd, args) => { PostMsg(MSG.Align, ModuleName.Cooling2, args[0]); return true; }); OP.Subscribe($"{ModuleName.Aligner1}.{EfemOperation.Lift}", (cmd, args) => { PostMsg(MSG.Lift, ModuleName.Aligner1); return true; }); OP.Subscribe($"{ModuleName.Aligner2}.{EfemOperation.Lift}", (cmd, args) => { PostMsg(MSG.Lift, ModuleName.Aligner2); return true; }); OP.Subscribe($"{ModuleName.Cooling1}.{EfemOperation.Lift}", (cmd, args) => { PostMsg(MSG.Lift, ModuleName.Cooling1); return true; }); OP.Subscribe($"{ModuleName.Cooling2}.{EfemOperation.Lift}", (cmd, args) => { PostMsg(MSG.Lift, ModuleName.Cooling2); return true; }); DATA.Subscribe($"{Name}.FsmState", () => ((STATE)fsm.State).ToString()); DATA.Subscribe($"{Name}.FsmPrevState", () => ((STATE)fsm.PrevState).ToString()); DATA.Subscribe($"{Name}.FsmLastMessage", GetFsmLastMessage); DATA.Subscribe($"{Name}.SmallWafer", () => _smallWafer); DATA.Subscribe($"{Name}.BigWafer", () => _bigWafer); DATA.Subscribe($"{Name}.MidWafer", () => _midWafer); DATA.Subscribe($"{Name}.HasPlacementError", () => _hasPlacementError); return true; } private void InitFsmMap() { fsm = new StateMachine("EFEM", (int)STATE.Unknown, 50); fsm.EnableRepeatedMsg(true); AnyStateTransition(FSM_MSG.TIMER, fnMonitor, FSM_STATE.SAME); AnyStateTransition(MSG.RecHwMsg, fnRecMsg, FSM_STATE.SAME); //AnyStateTransition(MSG.LED, fnSetLED, STATE.SettingLamp); AnyStateTransition(MSG.TurnOffBuzzer, fnTurnOffBuzzer, FSM_STATE.SAME); //AnyStateTransition(MSG.SwitchOnBuzzerAndRed, fnSwitchOnBuzzerAndRed, FSM_STATE.SAME); AnyStateTransition(MSG.Recover, fnRecover, FSM_STATE.SAME); AnyStateTransition(MSG.Error, fnError, STATE.Error); AnyStateTransition(MSG.Online, fnOnline, FSM_STATE.SAME); AnyStateTransition(MSG.Abort, fnAbortRobot, STATE.Idle); AnyStateTransition(MSG.ToInit, fnToInit, STATE.Init); EnterExitTransition(STATE.Initializing, fnEnterExecute, FSM_MSG.NONE, fnExitExecute); EnterExitTransition(STATE.InitingRB, fnEnterExecute, FSM_MSG.NONE, null); EnterExitTransition(STATE.InitingAL, fnEnterExecute, FSM_MSG.NONE, null); EnterExitTransition(STATE.Picking, fnEnterExecute, FSM_MSG.NONE, fnExitExecute); EnterExitTransition(STATE.Gotoing, fnEnterExecute, FSM_MSG.NONE, fnExitExecute); EnterExitTransition(STATE.Placing, fnEnterExecute, FSM_MSG.NONE, fnExitExecute); EnterExitTransition(STATE.Swapping, fnEnterExecute, FSM_MSG.NONE, fnExitExecute); EnterExitTransition(STATE.Extending, fnEnterExecute, FSM_MSG.NONE, fnExitExecute); EnterExitTransition(STATE.Retracting, fnEnterExecute, FSM_MSG.NONE, fnExitExecute); EnterExitTransition(STATE.Lifting, fnEnterExecute, FSM_MSG.NONE, null); EnterExitTransition(STATE.Aligning, fnEnterExecute, FSM_MSG.NONE, null); EnterExitTransition(STATE.Mapping, fnEnterExecute, FSM_MSG.NONE, fnExitExecute); EnterExitTransition(STATE.Gripping, fnEnterExecute, FSM_MSG.NONE, null); EnterExitTransition(STATE.Ungripping, fnEnterExecute, FSM_MSG.NONE, null); EnterExitTransition(STATE.Fliping, fnEnterExecute, FSM_MSG.NONE, fnExitExecute); EnterExitTransition(STATE.EmsStoping, fnEnterExecute, FSM_MSG.NONE, fnExitExecute); EnterExitTransition(STATE.SetSpeed, fnEnterExecute, FSM_MSG.NONE, fnExitExecute); EnterExitTransition(STATE.Loading, fnEnterExecute, FSM_MSG.NONE, fnExitExecute); Transition(STATE.Unknown, MSG.CommReady, null, STATE.Init); // Home Transition(STATE.Init, MSG.HomeAll, fnHomeAll, STATE.Initializing); Transition(STATE.Idle, MSG.HomeAll, fnHomeAll, STATE.Initializing); // 暂时加,出错的时候做 HOME Transition(STATE.Error, MSG.HomeAll, fnHomeAll, STATE.Initializing); Transition(STATE.Initializing, MSG.ActionDone, fnActionDone, STATE.Orgshing); Transition(STATE.Orgshing, MSG.ActionDone, fnActionDone, STATE.Idle); Transition(STATE.Idle, MSG.HomeRB, fnHomeRobot, STATE.InitingRB); Transition(STATE.InitingRB, MSG.ActionDone, null, STATE.Idle); //Transition(STATE.SettingLamp, MSG.ActionDone, fnSetLampDone, STATE.Idle); // Pick Transition(STATE.Idle, MSG.Pick, fnPick, STATE.Picking); Transition(STATE.Picking, MSG.ActionDone, fnActionDone, STATE.Idle); Transition(STATE.Picking, MSG.PMLiftPinUp, fnPmPinUp, STATE.Idle); Transition(STATE.Picking, MSG.PMLiftPinDown, fnPmPinDown, STATE.Idle); // Place Transition(STATE.Idle, MSG.Place, fnPlace, STATE.Placing); Transition(STATE.Placing, MSG.ActionDone, fnActionDone, STATE.Idle); Transition(STATE.Placing, MSG.PMLiftPinUp, fnPmPinUp, STATE.Idle); Transition(STATE.Placing, MSG.PMLiftPinDown, fnPmPinDown, STATE.Idle); // PickAndPlace Transition(STATE.Idle, MSG.PickAndPlace, fnSwap, STATE.Swapping); Transition(STATE.Swapping, MSG.ActionDone, fnActionDone, STATE.Idle); Transition(STATE.Swapping, MSG.PMLiftPinUp, fnPmPinUp, STATE.Idle); Transition(STATE.Swapping, MSG.PMLiftPinDown, fnPmPinDown, STATE.Idle); // Goto Transition(STATE.Idle, MSG.Goto, fnGoto, STATE.Gotoing); Transition(STATE.Gotoing, MSG.ActionDone, fnActionDone, STATE.Idle); // Extend Transition(STATE.Idle, MSG.Extend, fnExtend, STATE.Extending); Transition(STATE.Extending, MSG.ActionDone, fnActionDone, STATE.Idle); // Retract Transition(STATE.Idle, MSG.Retract, fnRetract, STATE.Retracting); Transition(STATE.Retracting, MSG.ActionDone, fnActionDone, STATE.Idle); // Map Transition(STATE.Idle, MSG.Map, fnMap, STATE.Mapping); Transition(STATE.Mapping, MSG.ActionDone, fnActionDone, STATE.Idle); // Grip Transition(STATE.Idle, MSG.Grip, fnGrip, STATE.Gripping); Transition(STATE.Gripping, MSG.ActionDone, fnActionDone, STATE.Idle); // Ungrip Transition(STATE.Idle, MSG.Ungrip, fnUngrip, STATE.Ungripping); Transition(STATE.Ungripping, MSG.ActionDone, fnActionDone, STATE.Idle); // Aligner Transition(STATE.Idle, MSG.HomeAL, fnHomeAligner, STATE.InitingAL); Transition(STATE.InitingAL, MSG.ActionDone, fnActionDone, STATE.Idle); Transition(STATE.Idle, MSG.Lift, fnLift, STATE.Lifting); Transition(STATE.Lifting, MSG.LiftActionDone, fnActionDone, STATE.Idle); Transition(STATE.Idle, MSG.Align, fnAlign, STATE.Aligning); Transition(STATE.Aligning, MSG.ActionDone, fnActionDone, STATE.Idle); // Flip Transition(STATE.Idle, MSG.Flip, fnFlip, STATE.Fliping); Transition(STATE.Fliping, MSG.ActionDone, fnActionDone, STATE.Idle); // EmsStop Transition(STATE.Idle, MSG.EmsStop, fnEmsStop, STATE.EmsStoping); Transition(STATE.EmsStoping, MSG.ActionDone, fnActionDone, STATE.Idle); // Set Robot Speed Transition(STATE.Idle, MSG.SetRobotSpeed, fnSetRobotSpeed, STATE.SetSpeed); Transition(STATE.SetSpeed, MSG.ActionDone, fnActionDone, STATE.Idle); // Load Foup Transition(STATE.Idle, MSG.Load, fnLoadFoup, STATE.Loading); Transition(STATE.Loading, MSG.ActionDone, fnActionDone, STATE.Idle); EnumLoop.ForEach((item) => { fsm.MapState((int)item, item.ToString()); }); EnumLoop.ForEach((item) => { fsm.MapMessage((int)item, item.ToString()); }); } private bool fnHomeAll(object[] param) { _efem.ClearActions(); _efem.HomeAll(); return true; } private bool fnHomeRobot(object[] param) { _efem.ClearActions(); _efem.Home(ModuleName.EfemRobot, (string)param[0]); return true; } private bool fnHomeAligner(object[] param) { // module ModuleName unit = ModuleName.EFEM; if (param[0] is string s1) unit = ModuleNameString.ToEnum(s1); else if (param[0] is ModuleName mod) unit = mod; else throw new ArgumentException("Argument error"); _efem.Home(unit, ""); return true; } private bool fnEnterExecute(object[] param) { if(!_efem.HasUncompleteActions) _efem.ExecuteAction(); return false; } private bool fnExitExecute(object[] param) { if (!_efem.HasUncompleteActions) _efem.ExecuteAction(); return false; } private bool fnActionDone(object[] param) { try { EfemOperation actionType = (EfemOperation)param[0]; if (((fsm.State == (int)STATE.Orgshing) && (actionType == EfemOperation.Orgsh || actionType == EfemOperation.Home)) || (fsm.State == (int)STATE.Initializing && actionType == EfemOperation.ClearError) || (fsm.State == (int)STATE.Extending) || (fsm.State == (int)STATE.Picking) || (fsm.State == (int)STATE.Placing) || (fsm.State == (int)STATE.Swapping) || (fsm.State == (int)STATE.Aligning) || (fsm.State == (int)STATE.Fliping)) { if (_efem.HasActions || _efem.HasUncompleteActions) { if(!_efem.HasUncompleteActions) { _efem.ExecuteAction(); } return false; } } return true; } catch (Exception ex) { EV.PostAlarmLog(ModuleName.EFEM.ToString(), ex.Message); return true; } } public bool CheckToPostMessage(int msg, params object[] args) { if (!fsm.FindTransition(fsm.State, msg)) { EV.PostWarningLog(Name, $"{Name} is in {(STATE)fsm.State} state,can not do {(MSG)msg}"); return false; } Running = true; fsm.PostMsg(msg, args); return true; } private bool fnRecMsg(object[] param) { if (param == null) return false; string strHwMsg = param[0] as string; if (_efem is EfemBase device) { device.ReceiveMessage(strHwMsg); return true; } return false; } private bool fnMonitor(object[] param) { STATE curSt = (STATE)fsm.State; if (curSt == STATE.Initializing || curSt == STATE.Mapping || curSt == STATE.Picking || curSt == STATE.Placing || curSt == STATE.Orgshing || curSt == STATE.Lifting || curSt == STATE.Extending || curSt == STATE.Retracting || curSt == STATE.InitingAL || curSt == STATE.InitingRB) { int time = SC.GetValue("EFEM.MotionTimeout"); if (fsm.ElapsedTime > time * 1000) { EV.PostAlarmLog("EFEM", $"Can not complete motion {curSt} in {time} seconds. "); PostMsg(MSG.Error); } } else if (curSt == STATE.Aligning) { int _timeout = SC.GetValue("EFEM.AlignerTimeout"); if (fsm.ElapsedTime > _timeout * 1000) { EV.PostAlarmLog(ModuleName.Aligner.ToString(), "Align timeout"); PostMsg(MSG.Error); } } else if (curSt == STATE.Idle) { if (_efem.HasActions && !_efem.HasUncompleteActions) { _efem.ExecuteAction(); } } if (_efemType == EfemType.BrooksEFEM && (SC.GetValue("EFEM.LoadPort.EnableDockUndock") == false)) { _efem.QueryLPState(); } // update Loadport wafer placement parity error status _hasPlacementError = _efem[ModuleName.LP1].HasPlacementError || _efem[ModuleName.LP2].HasPlacementError; return true; } private bool fnOnline(object[] param) { bool bOnlineFlag = (bool)param[0]; if (_efem is EfemBase efem) { efem.SetOnline(bOnlineFlag); } return true; } private string GetFsmLastMessage() { int msg = fsm.LastMsg; if (msg >= (int)MSG.HomeAll && msg <= (int)MSG.Error) return ((MSG)msg).ToString(); if (msg == (int)FSM_MSG.TIMER) return "Timer"; return msg.ToString(); } private bool fnError(object[] param) { return true; } private bool fnToInit(object[] param) { return true; } private bool fnRecover(object[] param) { _efem.ClearActions(); _efem.ClearError(); //_efem.ExecuteAction(); return true; } private bool fnAbortRobot(object[] param) { _efem.ClearActions(); _efem.AbortRobot(); //_efem.ExecuteAction(); return true; } private bool fnSetLED(object[] param) { LightType light = (LightType)param[0]; LightStatus st = (LightStatus)param[1]; _efem.SetLamp(light, st); return true; } private bool fnTurnOffBuzzer(object[] param) { _efem.TurnOffBuzzer(); return false; } //private bool fnSwitchOnBuzzerAndRed(object[] param) //{ // _efem.SwitchOnBuzzerAndRed(); // return false; //} // private bool fnSetLampDone(object[] param) { if (_efem.HasActions && !_efem.HasUncompleteActions) { _efem.ExecuteAction(); return false; } else { return true; } } private bool fnPick(object[] param) { // module ModuleName unit = ModuleName.EFEM; if (param[0] is string s1) unit = ModuleNameString.ToEnum(s1); else if (param[0] is ModuleName mod) unit = mod; else throw new ArgumentException("Argument error"); // slot byte slot = (byte)(int)param[1]; // hand Hand arm = (Hand)Enum.Parse(typeof(Hand), param[2].ToString()); // wafer size WaferSize ws1 = WaferSize.WS0; if (param[3] is string s2) { if (Enum.TryParse(s2, out WaferSize p5)) ws1 = p5; } else if (param[3] is WaferSize p6) { ws1 = p6; } MoveParam mp = new MoveParam(unit, slot, ModuleName.EfemRobot, (byte)arm, arm, ws1); if (!_efem.Pick(mp)) return false; return true; } private bool fnPlace(object[] param) { // module ModuleName unit = ModuleName.EFEM; if (param[0] is string s1) unit = ModuleNameString.ToEnum(s1); else if (param[0] is ModuleName mod) unit = mod; else throw new ArgumentException("Argument error"); // slot byte slot = (byte)(int)param[1]; // hand Hand arm = (Hand)Enum.Parse(typeof(Hand), param[2].ToString()); // wafer size WaferSize ws1 = WaferSize.WS0; if (param[3] is string s2) { if (Enum.TryParse(s2, out WaferSize p5)) ws1 = p5; } else if (param[3] is WaferSize p6) { ws1 = p6; } MoveParam mp = new MoveParam(ModuleName.EfemRobot, (byte)arm, unit, slot, arm, ws1); if (!_efem.Place(mp)) return false; return true; } private bool fnGoto(object[] param) { // module ModuleName unit = ModuleName.EFEM; if (param[0] is string s1) unit = ModuleNameString.ToEnum(s1); else if (param[0] is ModuleName mod) unit = mod; else throw new ArgumentException("Argument error"); // slot byte slot = (byte)(int)param[1]; Hand arm = Hand.Blade1; WaferSize ws = WaferSize.WS6; if (WaferManager.Instance.CheckHasWafer(ModuleName.EfemRobot, 0)) { arm = Hand.Blade1; ws = WaferManager.Instance.GetWafer(ModuleName.EfemRobot, 0).Size; } else if (WaferManager.Instance.CheckHasWafer(ModuleName.EfemRobot, 1)) { arm = Hand.Blade2; ws = WaferManager.Instance.GetWafer(ModuleName.EfemRobot, 1).Size; } MoveParam mp = new MoveParam(unit, slot, unit, slot, arm, ws); _efem.Goto(mp); return true; } private bool fnSwap(object[] param) { // module ModuleName unit = ModuleName.EFEM; if (param[0] is string s1) unit = ModuleNameString.ToEnum(s1); else if (param[0] is ModuleName mod) unit = mod; else throw new ArgumentException("Argument error"); // pickSlot byte pickSlot = (byte)(int)param[1]; // pick hand Hand pickArm = (Hand)Enum.Parse(typeof(Hand), param[2].ToString()); // wafer size WaferSize ws1 = WaferSize.WS0; if (param[5] is string s2) { if (Enum.TryParse(s2, out WaferSize p5)) ws1 = p5; } else if (param[5] is WaferSize p6) { ws1 = p6; } MoveParam pickParam = new MoveParam(unit, pickSlot, ModuleName.EfemRobot, (byte)pickArm, pickArm, ws1); // place slot byte placeSlot = (byte)(int)param[4]; // hand Hand placeArm = (Hand)Enum.Parse(typeof(Hand), param[3].ToString()); MoveParam placeParam = new MoveParam(ModuleName.EfemRobot, (byte)placeArm, unit, placeSlot, placeArm, ws1); _efem.PickAndPlace(pickParam, placeParam); return true; } private bool fnExtend(object[] param) { // module ModuleName unit = ModuleName.EFEM; if (param[0] is string s1) unit = ModuleNameString.ToEnum(s1); else if (param[0] is ModuleName mod) unit = mod; else throw new ArgumentException("Argument error"); Hand arm = (Hand)Enum.Parse(typeof(Hand), (string)param[2]); ExtendParam mp = new ExtendParam { Module = unit, Arm = arm, Pos = (ExtendPos)Enum.Parse(typeof(ExtendPos), param[1] as string) }; if (!_efem.Extend(mp)) return false; return true; } private bool fnRetract(object[] param) { // module ModuleName unit = ModuleName.EFEM; if (param[0] is string s1) unit = ModuleNameString.ToEnum(s1); else if (param[0] is ModuleName mod) unit = mod; else throw new ArgumentException("Argument error"); Hand arm = (Hand)Enum.Parse(typeof(Hand), (string)param[2]); ExtendParam mp = new ExtendParam { Module = unit, Arm = arm, Pos = (ExtendPos)Enum.Parse(typeof(ExtendPos), param[1] as string) }; if (!_efem.Retract(mp)) return false; return true; } private bool fnPmPinUp(object[] param) { _efem.UpdateStatus((ushort)param[0], ActionStatus.Completed); if (_efem.HasActions && !_efem.HasUncompleteActions) { _efem.ExecuteAction(); return false; } else { return true; } } private bool fnPmPinDown(object[] param) { _efem.UpdateStatus((ushort)param[0], ActionStatus.Completed); if (_efem.HasActions && !_efem.HasUncompleteActions) { _efem.ExecuteAction(); return false; } else { return true; } } private bool fnLift(object[] param) { // module ModuleName unit = ModuleName.EFEM; if (param[0] is string s1) unit = ModuleNameString.ToEnum(s1); else if (param[0] is ModuleName mod) unit = mod; else throw new ArgumentException("Argument error"); bool isUp = true; if (param.Length > 1) { isUp = (bool) param[1]; } if (isUp) { if (!_efem.SetPinUp(unit)) return false; } else { if (!_efem.SetPinDown(unit)) return false; } return true; } private bool fnAlign(object[] param) { // module ModuleName unit = ModuleName.EFEM; if (param[0] is string s1) unit = ModuleNameString.ToEnum(s1); else if (param[0] is ModuleName mod) unit = mod; else throw new ArgumentException("Argument error"); // wafer size WaferSize ws1 = WaferSize.WS0; if (param[1] is string s2) { if (Enum.TryParse(s2, out WaferSize p5)) ws1 = p5; } else if (param[1] is WaferSize p6) { ws1 = p6; } if (!_efem.Align(unit, 1000, ws1)) return false; return true; } private bool fnMap(object[] param) { // module ModuleName unit = ModuleName.EFEM; if (param[0] is string s1) unit = ModuleNameString.ToEnum(s1); else if (param[0] is ModuleName mod) unit = mod; else throw new ArgumentException("Argument error"); if (!_efem.Map(unit)) return false; return true; } private bool fnGrip(object[] param) { Hand arm = (Hand)Enum.Parse(typeof(Hand), (string)param[0]); if (!_efem.Grip(arm, true)) return false; return true; } private bool fnUngrip(object[] param) { Hand arm = (Hand)Enum.Parse(typeof(Hand), (string)param[0]); if (!_efem.Grip(arm, false)) return false; return true; } private bool fnFlip(object[] param) { string orient = (string)param[0]; if (!_efem.Flip(orient)) return false; return true; } private bool fnEmsStop(object[] param) { if (!_efem.EmsStop()) return false; return true; } private bool fnSetRobotSpeed(object[] param) { string speed = (string)param[0]; if (!_efem.SetSpeed(speed)) return false; return true; } private bool fnLoadFoup(object[] param) { ModuleName lp = ModuleHelper.Converter((string)param[0]); if (!_efem.Load(lp)) return false; return true; } public bool IsIdle { get { return fsm.State == (int)STATE.Idle; } } public bool IsError { get { return fsm.State == (int)STATE.Error; } } public bool IsInit { get { return fsm.State == (int)STATE.Unknown || fsm.State==(int)STATE.Init; } } public bool IsBusy { get { return !IsInit && !IsError && !IsIdle; } } public bool IsOnline { get; internal set; } public int Invoke(string function, params object[] args) { switch (function) { case "Home": CheckToPostMessage((int)MSG.HomeAll); return (int)MSG.HomeAll; } return (int)FSM_MSG.NONE; } public bool CheckAcked(int msg) { return fsm.CheckExecuted(msg); } internal void InvokeReset() { if (_EnableResetEFEMError && fsm.State == (int) STATE.Error) { PostMsg((int)MSG.Recover); } } public int InvokeAlign(string module, float time) { if (CheckToPostMessage((int)MSG.Align, module, time)) return (int)MSG.Align; return (int)FSM_MSG.NONE; } public int InvokeLiftDown(string module) { if (CheckToPostMessage((int)MSG.Lift, module, false)) return (int)MSG.Lift; return (int)FSM_MSG.NONE; } public int InvokePick(ModuleName source, int slot, Hand hand, WaferSize size) { if (CheckToPostMessage((int)MSG.Pick, source, slot, hand, size)) return (int)MSG.Pick; return (int)FSM_MSG.NONE; } public int InvokeGoto(ModuleName source, int slot) { if (CheckToPostMessage((int)MSG.Goto, source, slot)) return (int)MSG.Goto; return (int)FSM_MSG.NONE; } public int InvokePlace(ModuleName target, int slot, Hand hand, WaferSize size) { if (CheckToPostMessage((int)MSG.Place, target, slot, hand, size)) return (int)MSG.Place; return (int)FSM_MSG.NONE; } public int InvokePickAndPlace(ModuleName targetModule, Hand pickHand, int pickSlot, Hand placeHand, int placeSlot, WaferSize size) { if (CheckToPostMessage((int)MSG.PickAndPlace, targetModule, pickSlot, pickHand, placeHand, placeSlot, size)) return (int)MSG.PickAndPlace; return (int)FSM_MSG.NONE; } public int InvokeMap(string target ) { if (CheckToPostMessage((int)MSG.Map, target )) return (int)MSG.Map; return (int)FSM_MSG.NONE; } public int InvokeFlip(string orient) { if (CheckToPostMessage((int)MSG.Flip, orient)) return (int)MSG.Flip; return (int)FSM_MSG.NONE; } public bool IsPrepareTransferReady(ModuleName module, EnumTransferType type, int slot) { if (type == EnumTransferType.Pick) { //需要补充:判断LP 放好了,而且已经map过。 return _efem[module].HasCassette && _efem[module].IsMapped; } else if (type == EnumTransferType.Place) { //需要补充:判断LP 放好了,而且已经map过。 return _efem[module].HasCassette && _efem[module].IsMapped; } return false; } internal bool CheckReadyRunNewJob(ModuleName module) { //??? return true; } internal bool CheckReadyTransfer(ModuleName module) { return _efem[module].HasCassette && _efem[module].IsMapped; } internal bool CheckPlaced(ModuleName module) { return _efem[module].HasCassette; } internal void NoteJobStart(ModuleName module) { _efem[module].NoteJobStart(); } internal void NoteJobComplete(ModuleName module) { _efem[module].NoteJobComplete(); } internal string GetCarrierID(ModuleName module) { return _efem[module].CarrierId; } } /// /// LP entity /// class LoadportEntity : Entity, IEntity { private enum STATE { Unknown, Idle, // 1 Initializing, // 2 Initialized, // 3 Mapping, // 4 Mapped, // 5 } public enum MSG { Home, // 0 Map, // 1 ActionDone, // 2 RecHwMsg, // 3 Recover, // 4 Abort, // 5 Online, // 6 Error // 7 } private readonly Efem _efem; private ModuleName Module { get; } public LoadportEntity(ModuleName mod, Efem efem) { this.Module = mod; _efem = efem; InitFsmMap(); OP.Subscribe($"{Module}.Home", (cmd, args) => { PostMsg(MSG.Home); return true; }); OP.Subscribe($"{Module}.Abort", (cmd, args) => { PostMsg(MSG.Abort); return true; }); //OP.Subscribe($"{Module}.Map", (cmd, args) => { PostMsg(MSG.Map); return true; }); OP.Subscribe($"{Module}.Online", (cmd, args) => { PostMsg(MSG.Online); return true; }); DATA.Subscribe($"{Module}.Status", () => ((STATE)fsm.State).ToString()); DATA.Subscribe($"{Module}.FsmState", () => ((STATE)fsm.State).ToString()); DATA.Subscribe($"{Module}.FsmPrevState", () => ((STATE)fsm.PrevState).ToString()); DATA.Subscribe($"{Module}.FsmLastMessage", GetFsmLastMessage); } private string GetFsmLastMessage() { int msg = fsm.LastMsg; if (msg >= (int)MSG.Home && msg <= (int)MSG.Error) return ((MSG)msg).ToString(); if (msg == (int)FSM_MSG.TIMER) return "Timer"; return msg.ToString(); } private void InitFsmMap() { fsm = new StateMachine($"LPM_{Module}", (int)STATE.Idle, 500); AnyStateTransition(FSM_MSG.TIMER, fnMonitor, FSM_STATE.SAME); //AnyStateTransition(MSG.RecHwMsg, fnRecMsg, FSM_STATE.SAME); AnyStateTransition(MSG.Online, fnOnline, FSM_STATE.SAME); AnyStateTransition(MSG.Recover, fnRecover, STATE.Idle); AnyStateTransition(MSG.Abort, fnRecover, STATE.Idle); EnterExitTransition(STATE.Initializing, fnEnterExecute, FSM_MSG.NONE, fnExitExecute); // Home AnyStateTransition(MSG.Home, fnHome, STATE.Initializing); Transition(STATE.Initializing, MSG.ActionDone, fnActionDone, STATE.Idle); } private bool fnOnline(object[] param) { bool online = (bool)param[0]; _efem.SetOnline(Module, online); return true; } private bool fnRecover(object[] param) { return true; } private bool fnMonitor(object[] param) { STATE curSt = (STATE)fsm.State; if (curSt == STATE.Initializing || curSt == STATE.Mapping) { if (fsm.ElapsedTime > 20 * 1000) { PostMsg(MSG.Recover); } } return true; } private bool fnEnterExecute(object[] param) { _efem.ExecuteAction(); return true; } private bool fnExitExecute(object[] param) { return true; } private bool fnActionDone(object[] param) { return true; } private bool fnHome(object[] param) { _efem.Home(Module, ModuleName.EFEM.ToString()); return true; } public bool Check(int msg, out string reason, params object[] args) { throw new NotImplementedException(); } } }