9 Control permissions:{0} Information OperationAuthorization Only authorized account can execute operation and control command 10 '{0}' exits the system. Information UserLoggedOff User exits the system. 11 User {0} login Information UserLoggedIn log in User {0} login Account {0} login 12 The content of user account '{0}' has been modified. Information AccountChanged User account change 13 The password for user account '{0}' has been changed. Information PasswordChanged User account password change 14 The user account '{0}' has been deleted. Information AccountDeleted User account deletion 15 The user account '{0}' has been created. Information AccountCreated User account creation 19 Wafer placed to {0} Information PuttingWaferToChamberEnds This event is posted right after put a wafer 20 Placing wafer to {0} Information PuttingWaferToChamberBegins This event is posted right before placing 21 Wafer picked from {0} Information PickingWaferFromChamberEnds This event is posted right after wafer picked 22 Picking wafer from {0} Information PickingWaferFromChamberBegins This event is posted right before picking 25 Align start:notch is {0}。 Information AlignBegins When aligners start aligning. 26 Align end。 Information AlignEnds When aligners aligning completed. 27 Align failed。{0} Warning AlignFailed When aligners aligning failed. 28 Wafer {0} moved from {1} {2} to {3} {4} Information WaferMoved Wafer Move information. 36 Wafer created at {0} slot {1}, status is {2}. Information WaferCreate Wafer Create Information 37 Wafer deleted from {0} slot {1}. Information WaferDelete Wafer Delete Information 41 {0} load FOUP start. Information LoadFOUPStart 42 {0} load FOUP end. Information LoadFOUPEnd 43 {0} load FOUP Failed. Alarm LoadFOUPFailed 44 {0} unload FOUP start. Information UnloadFOUPStart 45 {0} unload Foup end. Information UnloadFOUPEnd 46 {0} unload Foup failed. Alarm UnloadFOUPFailed 1000 {0} Information GeneralInfo 默认事件类型(通用) 1222 1023 {0} '{1}' stopped,reason: {2}。 Information ServiceRoutineAborted where {0} is the chamber name, while {1} is the service name. When service routine is aborted, this event will be posted. 1033 {0} {1}:{2}。 Information ServiceRoutineInfo 用于显示在服务程序运行过程中的信息显示,{0}反应腔名,{1}服务程序名,{2}当前动作名。 1040 {0} {1}。 Information GuiCmdExecSucc 当收到用户界面命令,并成功执行时,发出该事件。{0}反应腔名,{1}命令解释。 1052 {0} {1}。 Information SwInterlock 当发生软件互锁时,发出该警告信息。{0}反应腔名,{1}具体软件互锁原因。 2052 用户 {0} 无操控权,请先获取操控权 Warning AccountWithoutAuthorization 只有拥有操控权的用户,才能进行操控 获取操控权限 2053 {0}。 Warning DefaultWarning 警告范围2000~3999,如果系统反馈的警告事件没有指定事件ID,或者ID编号范围有误,则使用当前默认的警告代码作为该事件的警告代码。 默认的警告代码。 3027 {0} {1}。 Warning GuiCmdExecFailed 当用户命令执行失败时发出该警告事件。 1.检查操作指令是否符合设备操作要求。 2.检查当前操作是否触发软件互锁。 3034 {0} 数据库连接失败。 Warning DbConnFailed 当控制程序与数据库连接断开时发出该事件。 1.请检查数据库连接配置参数。 2.请检查网线是否已联通。 3038 {0} {1}。 Warning SafePlcInterlock 当安全PLC的安全逻辑将某DO设定值拦截下来的时候发出该警告信息。 检查软件互锁逻辑与硬件互锁逻辑内容,检查互锁发生原因。 3039 {0} 阀门{1}{2}失败,原因{3}。 Warning ValveOperationFail 当阀门打开或关闭超时的时候发出该警告信息。 1.检查当前阀门动作是否满足软件互锁规则。 2.如果当前阀门为安全阀门,检查安全PLC是否正常运行。 4050 Prepare transfer failed, {0} Alarm TransferPrepareFailed See detail description 4093 Alarm event:{0}. Alarm event:{0}. 报警事件:{0}。 Alarm DefaultAlarm 默认报警事件 5027 {0} PLC operation failed, please check the PLC operation status. Alarm PlcHeartBeatFail When the PLC is running, it needs to continuously send heartbeat packet messages to the C # program. If the message timeout occurs, it will send the error message to the GUI. 1. Check if the PLC program on the industrial computer in the reaction chamber is running. 5120 TCPConnSucess TCP connect success,IP:{0} Port:{1} TCP connect success Information 5125 {0} Communication error, {1} Alarm CommunicationError Error occur during communication with hardware 1.Check network 2.Check hardware working status 5126 {0} {1}Tolerance alarm:{2}. {0} {1} Tolerance alarm:{2}. {0} {1} Follow error alarm:{2}. Alarm ToleranceAlarm When the error between the set value and the actual feedback value of the device module is compared, an alarm is issued. 1. Check if the device with tracking error is working properly. 2. Check if the set value or rate of change exceeds the range. 5128 TC {0} broken. TC {0} broken. The thermometer {0} is broken. Alarm TCBroken display if TC is broken change the broken TC. 5200 Initialize start。 Information HomeBegins 5201 Initialize end。 Information HomeEnds 5202 Initialize failed,{0} 。 Alarm HomeFailed check subsystem。 5203 Foup Arrived at {0} Information CarrierArrived Notify the Foup placed at the position. 5204 Foup removed from {0} Information CarrierRemoved Notify the Foup is removed from the position. 5205 Manually Push the OP button at {0} Information ManualOpAccess Notify the Foup will be load. 5206 Read {0} Carrier ID, {1} Information CarrierIdRead Notify the carrier id was read. 5207 Failed read {0} carrier ID Alarm CarrierIdReadFailed Notify failed while reading the carrier id. 5208 {0} wafer mapped, {1} Information SlotMapAvailable Notify after mapped wafer.