9
Control permissions:{0}
Information
OperationAuthorization
Only authorized account can execute operation and control command
10
'{0}' exits the system.
Information
UserLoggedOff
User exits the system.
11
User {0} login
Information
UserLoggedIn
log in
User {0} login
Account {0} login
12
The content of user account '{0}' has been modified.
Information
AccountChanged
User account change
13
The password for user account '{0}' has been changed.
Information
PasswordChanged
User account password change
14
The user account '{0}' has been deleted.
Information
AccountDeleted
User account deletion
15
The user account '{0}' has been created.
Information
AccountCreated
User account creation
19
Wafer placed to {0}
Information
PuttingWaferToChamberEnds
This event is posted right after put a wafer
20
Placing wafer to {0}
Information
PuttingWaferToChamberBegins
This event is posted right before placing
21
Wafer picked from {0}
Information
PickingWaferFromChamberEnds
This event is posted right after wafer picked
22
Picking wafer from {0}
Information
PickingWaferFromChamberBegins
This event is posted right before picking
25
Align start:notch is {0}。
Information
AlignBegins
When aligners start aligning.
26
Align end。
Information
AlignEnds
When aligners aligning completed.
27
Align failed。{0}
Warning
AlignFailed
When aligners aligning failed.
28
Wafer {0} moved from {1} {2} to {3} {4}
Information
WaferMoved
Wafer Move information.
36
Wafer created at {0} slot {1}, status is {2}.
Information
WaferCreate
Wafer Create Information
37
Wafer deleted from {0} slot {1}.
Information
WaferDelete
Wafer Delete Information
41
{0} load FOUP start.
Information
LoadFOUPStart
42
{0} load FOUP end.
Information
LoadFOUPEnd
43
{0} load FOUP Failed.
Alarm
LoadFOUPFailed
44
{0} unload FOUP start.
Information
UnloadFOUPStart
45
{0} unload Foup end.
Information
UnloadFOUPEnd
46
{0} unload Foup failed.
Alarm
UnloadFOUPFailed
1000
{0}
Information
GeneralInfo
默认事件类型(通用)
1222
1023
{0} '{1}' stopped,reason: {2}。
Information
ServiceRoutineAborted
where {0} is the chamber name, while {1} is the service name. When service routine is aborted, this event will be posted.
1033
{0} {1}:{2}。
Information
ServiceRoutineInfo
用于显示在服务程序运行过程中的信息显示,{0}反应腔名,{1}服务程序名,{2}当前动作名。
1040
{0} {1}。
Information
GuiCmdExecSucc
当收到用户界面命令,并成功执行时,发出该事件。{0}反应腔名,{1}命令解释。
1052
{0} {1}。
Information
SwInterlock
当发生软件互锁时,发出该警告信息。{0}反应腔名,{1}具体软件互锁原因。
2052
用户 {0} 无操控权,请先获取操控权
Warning
AccountWithoutAuthorization
只有拥有操控权的用户,才能进行操控
获取操控权限
2053
{0}。
Warning
DefaultWarning
警告范围2000~3999,如果系统反馈的警告事件没有指定事件ID,或者ID编号范围有误,则使用当前默认的警告代码作为该事件的警告代码。
默认的警告代码。
3027
{0} {1}。
Warning
GuiCmdExecFailed
当用户命令执行失败时发出该警告事件。
1.检查操作指令是否符合设备操作要求。
2.检查当前操作是否触发软件互锁。
3034
{0} 数据库连接失败。
Warning
DbConnFailed
当控制程序与数据库连接断开时发出该事件。
1.请检查数据库连接配置参数。
2.请检查网线是否已联通。
3038
{0} {1}。
Warning
SafePlcInterlock
当安全PLC的安全逻辑将某DO设定值拦截下来的时候发出该警告信息。
检查软件互锁逻辑与硬件互锁逻辑内容,检查互锁发生原因。
3039
{0} 阀门{1}{2}失败,原因{3}。
Warning
ValveOperationFail
当阀门打开或关闭超时的时候发出该警告信息。
1.检查当前阀门动作是否满足软件互锁规则。
2.如果当前阀门为安全阀门,检查安全PLC是否正常运行。
4050
Prepare transfer failed, {0}
Alarm
TransferPrepareFailed
See detail description
4093
Alarm event:{0}.
Alarm event:{0}.
报警事件:{0}。
Alarm
DefaultAlarm
默认报警事件
5027
{0} PLC operation failed, please check the PLC operation status.
Alarm
PlcHeartBeatFail
When the PLC is running, it needs to continuously send heartbeat packet messages to the C # program. If the message timeout occurs, it will send the error message to the GUI.
1. Check if the PLC program on the industrial computer in the reaction chamber is running.
5120
TCPConnSucess
TCP connect success,IP:{0} Port:{1}
TCP connect success
Information
5125
{0} Communication error, {1}
Alarm
CommunicationError
Error occur during communication with hardware
1.Check network
2.Check hardware working status
5126
{0} {1}Tolerance alarm:{2}.
{0} {1} Tolerance alarm:{2}.
{0} {1} Follow error alarm:{2}.
Alarm
ToleranceAlarm
When the error between the set value and the actual feedback value of the device module is compared, an alarm is issued.
1. Check if the device with tracking error is working properly.
2. Check if the set value or rate of change exceeds the range.
5128
TC {0} broken.
TC {0} broken.
The thermometer {0} is broken.
Alarm
TCBroken
display if TC is broken
change the broken TC.
5200
Initialize start。
Information
HomeBegins
5201
Initialize end。
Information
HomeEnds
5202
Initialize failed,{0} 。
Alarm
HomeFailed
check subsystem。
5203
Foup Arrived at {0}
Information
CarrierArrived
Notify the Foup placed at the position.
5204
Foup removed from {0}
Information
CarrierRemoved
Notify the Foup is removed from the position.
5205
Manually Push the OP button at {0}
Information
ManualOpAccess
Notify the Foup will be load.
5206
Read {0} Carrier ID, {1}
Information
CarrierIdRead
Notify the carrier id was read.
5207
Failed read {0} carrier ID
Alarm
CarrierIdReadFailed
Notify failed while reading the carrier id.
5208
{0} wafer mapped, {1}
Information
SlotMapAvailable
Notify after mapped wafer.