{"text_format":"2","workbook":"xlsx","n_sheets":8,"sheets":["Revision","DI-DO","AO","AI","HW interlock","PLC interlock","PM HW interlock draft","PM PLC interlock draft"],"not_rendered":{"charts":0,"images":2,"macros":0,"external_links":0,"defined_names":2,"comments":0,"pivot_tables":0},"unopened":[],"bounds":{"document_bytes":16777216,"sheet_cells":100000,"run_cost":"one","rows_first":2000,"rows_last":500,"rows_between":2000,"halvings":0,"cell_chars":16384,"cell_head_chars":4096},"cells_cut":0,"cells_raw":0,"read":"whole","date_system":"1900"}

{"sheet":"Revision","index":0,"n_rows":8,"n_cols":6,"rows_kept":8,"cut":false,"hidden":false,"merged":[[0,0,0,6],[1,0,1,6],[2,0,2,1],[2,2,2,6],[3,0,3,1],[3,2,3,3],[3,5,3,6],[4,0,4,6],[6,0,6,1],[6,2,6,3],[6,5,6,6],[7,0,7,6]]}
["上海稷以科技有限公司\nSHANGHAI JETPLASMA CO.,LTD\n上海市闵行区莲花南路2899号\nNo.2899, Lianhua Road(s.), Minhang District, Shanghai\nTel: 021-34125995   Web: www.jetplasma.com"]
["EE BOM修改记录"]
["System Model",null,"Virgo T"]
["Revision",null,"V1.0",null,"Date","2022-06-15"]
[]
[]
["Revision",null,"V1.1",null,"Date","2022-06-30"]
["\n1，新增DO-52 Arm Extend Enable信号，此信号带一定逻辑，请注意。"]

{"sheet":"DI-DO","index":1,"n_rows":113,"n_cols":14,"rows_kept":113,"cut":false,"hidden":false,"merged":[]}
["DI","Name","Note","Postion (NO Power)","Location","Logic Note",null,"#.DO","ID","Name","EV No.","Note","Location","Logic Note"]
["DI-00","Lid Closed",null,null,"w20.00","Interlock-HW",null,"DO-00",null,"Soft Pumping Valve",null,null,"w0.00","SF PUMP"]
["DI-01","PM ATM SW",null,null,"w20.01","Interlock-PLC",null,"DO-01",null,"Fast Pumping Valve",null,null,"w0.01","FS PUMP"]
["DI-02","PM VAC SW","9.5T",null,"w20.02","Interlock-HW",null,"DO-02",{"$nulls":4},"w0.02"]
["DI-03","Cooling Water Flow SW",null,null,"w20.03","Interlock-HW",null,"DO-03",{"$nulls":4},"w0.03"]
["DI-04","LE OT SW Alarm",null,null,"w20.04","0=OK，1=alarm，Interlock-HW",null,"DO-04",null,"Slit Door Open",null,null,"w0.04","SL DR OPN"]
["DI-05","Water Leak",null,null,"w20.05","1=OK， 0=alarm",null,"DO-05",null,"Slit Door Close",null,"Interlock-HW","w0.05","SL DR CLS"]
["DI-06","Slit Door Open Pos",null,null,"w20.06","Interlock-HW",null,"DO-06",null,"Lift Pin Up",null,null,"w0.06","LF PIN UP"]
["DI-07","Slit Door Close Pos",null,null,"w20.07","Interlock-HW",null,"DO-07",null,"Lift Pin Down",null,null,"w0.07","LF PIN DN"]
["DI-08","Lift Pin Up",null,null,"w20.08","1=on,0=off",null,"DO-08",null,"Guide Pin Small Lifter Up",null,null,"w0.08"]
["DI-09","Lift Pin Down",null,null,"w20.09","1=on,0=off",null,"DO-09",null,"Guide Pin Small Lifter Down",null,null,"w0.09"]
["DI-10","Guide Pin Small Lifter Up Pos",null,null,"w20.10",null,null,"DO-10",null,"Guide Pin Medium Lifter Up",null,null,"w0.10"]
["DI-11","Guide Pin Small Lifter Down Pos",null,null,"w20.11",null,null,"DO-11",null,"Guide Pin Medium Lifter Down",null,null,"w0.11"]
["DI-12","Guide Pin Medium Lifter Up Pos",null,null,"w20.12",null,null,"DO-12",{"$nulls":4},"w0.12"]
["DI-13","Guide Pin Medium Lifter Down Pos",null,null,"w20.13",null,null,"DO-13",{"$nulls":4},"w0.13"]
["DI-14","ARM Not Extend to PM",null,null,"w20.14","Interlock-PLC",null,"DO-14",null,"MFC1 Valve",null,null,"w0.14"]
["DI-15","Generator Hardware Interlock",null,null,"w20.15","1=rf interlock ok,0=rf interlock off",null,"DO-15",null,"MFC2 Valve",null,null,"w0.15"]
["DI-16",null,null,null,"w21.00",null,null,"DO-16",null,"MFC3 Valve",null,null,"w1.00"]
["DI-17","Coolant Inlet TC Broken Alarm",null,null,"w21.01","0=OK，1=alarm",null,"DO-17",null,"MFC4 Valve",null,null,"w1.01"]
["DI-18","Coolant Outlet TC Broken Alarm",null,null,"w21.02","0=OK，1=alarm",null,"DO-18",null,"MFC5 Valve",null,null,"w1.02"]
["DI-19","Substrate Control TC Broken Alarm",null,null,"w21.03","0=OK，1=alarm",null,"DO-19",{"$nulls":4},"w1.03"]
["DI-20","Substrate Monitor TC Broken Alarm",null,null,"w21.04","0=OK，1=alarm",null,"DO-20",{"$nulls":4},"w1.04"]
["DI-21","Substrate Heater On_FB",null,null,"w21.05","0=off,1=on",null,"DO-21",{"$nulls":4},"w1.05"]
["DI-22","CDA Pressure",null,null,"w21.06","1=OK，0=alarm",null,"DO-22",{"$nulls":4},"w1.06"]
["DI-23",null,null,null,"w21.07",null,null,"DO-23",null,"Chamber purge valve",null,null,"w1.07"]
["DI-24","Source Fan","ICP",null,"w21.08","1=OK，0=alarm，Interlock-HW",null,"DO-24",null,"Chamber vent valve",null,null,"w1.08"]
["DI-25","Source Fan 2",null,null,"w21.09","1=OK，0=alarm，Interlock-HW",null,"DO-25",null,"Process gas final valve",null,null,"w1.09"]
["DI-26",null,null,null,"w21.10",null,null,"DO-26",{"$nulls":4},"w1.10"]
["DI-27",null,null,null,"w21.11",null,null,"DO-27",{"$nulls":4},"w1.11"]
["DI-28",null,null,null,"w21.12",null,null,"DO-28",{"$nulls":4},"w1.12"]
["DI-29","GB Interlock  Alarm",null,null,"w21.13","0=OK，1=alarm，Interlock-HW",null,"DO-29",{"$nulls":4},"w1.13"]
["DI-30","GB Door SW Alarm",null,null,"w21.14","0=OK，1=alarm，Interlock-HW",null,"DO-30",{"$nulls":4},"w1.14"]
["DI-31","CHB Wall OT SW Alarm",null,null,"w21.15","0=OK，1=alarm，Interlock-HW",null,"DO-31",{"$nulls":4},"w1.15"]
["DI-32",null,null,null,"w22.00",null,null,"DO-32",null,"Reset Signal",null,"Pc to plc","w2.00"]
["DI-33",null,null,null,"w22.01",null,null,"DO-33",{"$nulls":4},"w2.01"]
["DI-34",null,null,null,"w22.02",null,null,"DO-34",{"$nulls":4},"w2.02"]
["DI-35",null,null,null,"w22.03",null,null,"DO-35"]
["DI-36","Substrate TC Deviation out of range",null,null,"w22.04","0=OK，1=alarm",null,"DO-36",null,"Foreline Heater On",null,null,"w2.04","Heater On==1,\nHeater Off ==0"]
["DI-37","Foreline TC Deviation out of range",null,null,"w22.05","0=OK，1=alarm",null,"DO-37",null,"Substrate Heater On",null,"Interlock-HW","w2.05","Heater On==1,\nHeater Off ==0"]
["DI-38","Foreline Control TC Broken Alarm",null,null,"w22.06","0=OK，1=alarm",null,"DO-38",{"$nulls":4},"w2.06"]
["DI-39","Foreline Monitor TC Broken Alarm",null,null,"w22.07","0=OK，1=alarm",null,"DO-39",{"$nulls":4},"w2.07"]
["DI-40","Foreline Heater On_FB",null,null,"w22.08","0=off,1=on",null,"DO-40",{"$nulls":4},"w2.08"]
["DI-41",null,null,null,"w22.09",null,null,"DO-41",{"$nulls":4},"w2.09"]
["DI-42",null,null,null,"w22.10",null,null,"DO-42",{"$nulls":4},"w2.10"]
["DI-43","EFEM Side Panel Closed",null,null,"w22.11","Interlock-HW",null,"DO-43",{"$nulls":4},"w2.11"]
["DI-44",null,null,null,"w22.12",null,null,"DO-44",{"$nulls":4},"w2.12"]
["DI-45",null,null,null,"w22.13",null,null,"DO-45",{"$nulls":4},"w2.13"]
["DI-46",null,null,null,"w22.14",null,null,"DO-46",{"$nulls":4},"w2.14"]
["DI-47",null,null,null,"w22.15",null,null,"DO-47",null,"CHB Wall  Heater On",null,null,"w2.15"]
["DI-48","MFC1 Pressure",null,null,"w23.00","1=OK， 0=alarm     Interlock-PLC",null,"DO-48",{"$nulls":4},"w3.00"]
["DI-49","MFC2 Pressure",null,null,"w23.01","1=OK， 0=alarm     Interlock-PLC",null,"DO-49",{"$nulls":4},"w3.01"]
["DI-50","MFC3 Pressure",null,null,"w23.02","1=OK， 0=alarm     Interlock-PLC",null,"DO-50",{"$nulls":4},"w3.02"]
["DI-51","MFC4 Pressure",null,null,"w23.03","1=OK， 0=alarm     Interlock-PLC",null,"DO-51",{"$nulls":4},"w3.03"]
["DI-52","MFC5 Pressure",null,null,"w23.04","1=OK， 0=alarm     Interlock-PLC",null,"DO-52",null,"Arm Extend Enable",null,null,"w3.04","允许EFEM Rorbot Arm伸入PM腔体内，带逻辑"]
["DI-53","N2 Pressure",null,null,"w23.05","1=OK， 0=alarm     Interlock-PLC",null,"DO-53",{"$nulls":4},"w3.05"]
["DI-54","Process pressure gauge Alarm",null,null,"w23.06","0=OK，1=alarm",null,"DO-54",{"$nulls":4},"w3.06"]
["DI-55","Chamber pressure gauge Alarm",null,null,"w23.07","0=OK，1=alarm",null,"DO-55",{"$nulls":4},"w3.07"]
["DI-56","Foreline pressure gauge Alarm",null,null,"w23.08","0=OK，1=alarm",null,"DO-56",{"$nulls":4},"w3.08"]
["DI-57",null,null,null,"w23.09",null,null,"DO-57",{"$nulls":4},"w3.09"]
["DI-58",null,null,null,"w23.10",null,null,"DO-58",null,"Lift Servo Positioning",null,"定位命令","w3.10","有需求才置On,到达位置后或者停止置Off"]
["DI-59",null,null,null,"w23.11",null,null,"DO-59",null,"Lift Servo origin",null,"找原点","w3.11","有自动手动需求时置on;,DI-80标志位上升沿或者需要停止置Off"]
["DI-60",null,null,null,"w23.12",null,null,"DO-60",null,"Lift Servo manual stop",null,"手动停止","w3.12","延时型按钮，按住置1，一定时间后置off"]
["DI-61",null,null,null,"w23.13",null,null,"DO-61",null,"Lift Servo  manual  UP",null,"手动上升","w3.13","切换型按钮，按住置1，再按置off，非手动模式下强制置off"]
["DI-62",null,null,null,"w23.14",null,null,"DO-62",null,"Lift Servo  manual  DOWN",null,"手动下降","w3.14","切换型按钮，按住置1，再按置off，非手动模式下强制置off"]
["DI-63",null,null,null,"w23.15",null,null,"DO-63",{"$nulls":4},"w3.15"]
["DI-64",null,null,null,"w24.00",null,null,"DO-64",{"$nulls":4},"w4.00"]
["DI-65",null,null,null,"w24.01",null,null,"DO-65",{"$nulls":4},"w4.01"]
["DI-66",null,null,null,"w24.02",null,null,"DO-66",{"$nulls":4},"w4.02"]
["DI-67","CHB Wall TC Deviation out of range",null,null,"w24.03","0=OK，1=alarm",null,"DO-67",{"$nulls":4},"w4.03"]
["DI-68","Grid TC Broken Alarm",null,null,"w24.04","0=OK，1=alarm",null,"DO-68",{"$nulls":4},"w4.04"]
["DI-69","CHB Wall Control TC Broken Alarm",null,null,"w24.05","0=OK，1=alarm",null,"DO-69",{"$nulls":4},"w4.05"]
["DI-70","CHB Wall Monitor TC Broken Alarm",null,null,"w24.06","0=OK，1=alarm",null,"DO-70",{"$nulls":4},"w4.06"]
["DI-71","CHB Wall Heater On_FB",null,null,"w24.07",null,null,"DO-71",{"$nulls":4},"w4.07"]
["DI-72",null,null,null,"w24.08",null,null,"DO-72",{"$nulls":4},"w4.08"]
["DI-73",null,null,null,"w24.09",null,null,"DO-73",{"$nulls":4},"w4.09"]
["DI-74",null,null,null,"w24.10",null,null,"DO-74",{"$nulls":4},"w4.10"]
["DI-75",null,null,null,"w24.11",null,null,"DO-75",{"$nulls":4},"w4.11"]
["DI-76",null,null,null,"w24.12",null,null,"DO-76",{"$nulls":4},"w4.12"]
["DI-77",null,null,null,"w24.13",null,null,"DO-77",{"$nulls":4},"w4.13"]
["DI-78",null,null,null,"w24.14",null,null,"DO-78",{"$nulls":4},"w4.14"]
["DI-79",null,null,null,"w24.15",null,null,"DO-79",{"$nulls":4},"w4.15"]
["DI-80","Lift Servo with origin",null,null,"w25.00",null,null,"DO-80",{"$nulls":4},"w5.00"]
["DI-81","Lift Servo servo  on",null,null,"w25.01",null,null,"DO-81",{"$nulls":4},"w5.01"]
["DI-82","Lift Servo origin Sensor",null,null,"w25.02",null,null,"DO-82",{"$nulls":4},"w5.02"]
["DI-83","Lift Servo CW limit Sensor alarm",null,null,"w25.03","0=OK， 1=alarm     Interlock-PLC",null,"DO-83",{"$nulls":4},"w5.03"]
["DI-84","Lift Servo CCW limit Sensor alarm",null,null,"w25.04","0=OK， 1=alarm     Interlock-PLC",null,"DO-84",{"$nulls":4},"w5.04"]
["DI-85","Lift Servo alarm",null,null,"w25.05","0=OK， 1=alarm     Interlock-PLC",null,"DO-85",{"$nulls":4},"w5.05"]
["DI-86","Lift Servo ORG fail alarm",null,null,"w25.06","0=OK， 1=alarm     Interlock-PLC",null,"DO-86",{"$nulls":4},"w5.06"]
["DI-87","Lift Servo ABS fail alarm",null,null,"w25.07","0=OK， 1=alarm     Interlock-PLC",null,"DO-87",{"$nulls":4},"w5.07"]
["DI-88","Lift Servo Over software Limit alarm",null,null,"w25.08","0=OK， 1=alarm     Interlock-PLC",null,"DO-88",{"$nulls":4},"w5.08"]
["DI-89","Lift Servo Positioning Complete",null,null,"w25.09","定位完成+Home完成+停止状态",null,"DO-89",{"$nulls":4},"w5.09"]
["DI-90",null,null,null,"w25.10",null,null,"DO-90",{"$nulls":4},"w5.10"]
["DI-91",null,null,null,"w25.11",null,null,"DO-91",{"$nulls":4},"w5.11"]
["DI-92",null,null,null,"w25.12",null,null,"DO-92",{"$nulls":4},"w5.12"]
["DI-93",null,null,null,"w25.13",null,null,"DO-93",{"$nulls":4},"w5.13"]
["DI-94",null,null,null,"w25.14",null,null,"DO-94",{"$nulls":4},"w5.14"]
["DI-95",null,null,null,"w25.15",null,null,"DO-95",{"$nulls":4},"w5.15"]
["DI-96",null,null,null,"w26.00",null,null,"DO-96",{"$nulls":4},"w6.00"]
["DI-97",null,null,null,"w26.01",null,null,"DO-97",{"$nulls":4},"w6.01"]
["DI-98",null,null,null,"w26.02",null,null,"DO-98",{"$nulls":4},"w6.02"]
["DI-99",null,null,null,"w26.03",null,null,"DO-99",{"$nulls":4},"w6.03"]
["DI-100",null,null,null,"w26.04",null,null,"DO-100",{"$nulls":4},"w6.04"]
["DI-101",null,null,null,"w26.05",null,null,"DO-101",{"$nulls":4},"w6.05"]
["DI-102",null,null,null,"w26.06",null,null,"DO-102",{"$nulls":4},"w6.06"]
["DI-103",null,null,null,"w26.07",null,null,"DO-103",{"$nulls":4},"w6.07"]
["DI-104",null,null,null,"w26.08",null,null,"DO-104",{"$nulls":4},"w6.08"]
["DI-105",null,null,null,"w26.09",null,null,"DO-105",{"$nulls":4},"w6.09"]
["DI-106",null,null,null,"w26.10",null,null,"DO-106",{"$nulls":4},"w6.10"]
["DI-107",null,null,null,"w26.11",null,null,"DO-107",{"$nulls":4},"w6.11"]
["DI-108",null,null,null,"w26.12",null,null,"DO-108",{"$nulls":4},"w6.12"]
["DI-109",null,null,null,"w26.13",null,null,"DO-109",{"$nulls":4},"w6.13"]
["DI-110",null,null,null,"w26.14",null,null,"DO-110",{"$nulls":4},"w6.14"]
["DI-111",null,null,null,"w26.15",null,null,"DO-111",{"$nulls":4},"w6.15"]

{"sheet":"AO","index":2,"n_rows":51,"n_cols":7,"rows_kept":51,"cut":false,"hidden":false,"merged":[[31,4,35,4],[8,6,10,6],[41,6,42,6]]}
["Node No.","ID","Range","Device Name","Logic note","date type","Remark"]
["AO-00","d1000",null,null,null,"float","RF"]
["AO-01","d1002"]
["AO-02","d1004","0-4000","MFC1 Flow Setpoint",null,"float","MFC"]
["AO-03","d1006","0-4000","MFC2 Flow Setpoint",null,"float","MFC"]
["AO-04","d1008","0-4000","MFC3 Flow Setpoint",null,"float","MFC"]
["AO-05","d1010","0-4000","MFC4 Flow Setpoint",null,"float","MFC"]
["AO-06","d1012","0-4000","MFC5 Flow Setpoint",null,"float","MFC"]
["AO-07","d1014",null,"Throttle Valve Work Mode","Pressure=1,Position=2","float","Throttle valve only"]
["AO-08","d1016","0-4T","Throttle Valve Pressure Setpoint","unit:mtorr","float"]
["AO-09","d1018","0-100%","Throttle Valve Position Setpoint",null,"float"]
["AO-10","d1020",null,null,null,"float"]
["AO-11","d1022","50-250°","Substrate Temperature Setpoint",null,"float","基座设定温度"]
["AO-12","d1024","10-250°","Foreline Temperature Setpoint",null,"float","前级管道设定温度"]
["AO-13","d1026",null,"Heartbeat",null,"float","Check 通讯"]
["AO-14","d1028","100-500°","CHB Wall Temperature Setpoint",null,"float","CHB Wall设定温度"]
["AO-15","d1030","100-500°","CHB Wall Temp Limit Setpoint",null,"float","CHB Wall最高温度"]
["AO-16","d1032",null,null,null,"float"]
["AO-17","d1034",null,null,null,"float"]
["AO-18","d1036",null,null,null,"float"]
["AO-19","d1038",null,null,null,"float"]
["AO-20","d1040","100-500°","Substrate Temp Limit Setpoint",null,"float","Temp Limit"]
["AO-21","d1042","100-500°","Foreline Temp Limit Setpoint",null,"float","Temp Limit"]
["AO-22","d1044",null,null,null,"float"]
["AO-23","d1046",null,null,null,"float"]
["AO-24","d1048",null,null,null,"float"]
["AO-25","d1050","0或1","Bais RF Enable","按配置","float","0=Substrate heater mode ,1=Bais RF mode"]
["AO-26","d1052","0或1","Grid TC Enable","按配置","float","1=Grid TC"]
["AO-27","d1054","0或1","Lift  Servo Enable","按配置","float","0=Lift Pin ,1=Lift  Servo"]
["AO-28","d1056","0-100","Lift  Servo Auto speed","RT","float","mm/s"]
["AO-29","d1058","0-10","Lift  Servo manual speed","UI","float","mm/s"]
["AO-30","d1060","100-1000","Lift  Servo Acc  time","RT","float","ms"]
["AO-31","d1062","100-1000","Lift  Servo Dec time",null,"float","ms"]
["AO-32","d1064","-100到0","Lift  Servo CCW limit position",null,"float","mm"]
["AO-33","d1066","0到1000","Lift  Servo CW limit position",null,"float","mm"]
["AO-34","d1068","-10到10","Lift  Servo Correction value",null,"float","mm（只带小数点后一位）"]
["AO-35","d1070","-100到1000","Lift  Servo Target Location","按Wafer位置需求","float","mm（只带小数点后一位）"]
["AO-36","d1072",null,null,null,"float"]
["AO-37","d1074",null,null,null,"float"]
["AO-38","d1076",null,null,null,"float"]
["AO-39","d1078",null,null,null,"float"]
["AO-40","d1080",null,null,null,"float"]
["AO-41","d1082",null,null,null,"float"]
["AO-42","d1084",null,null,null,"float"]
["AO-43","d1086",null,null,null,"float"]
["AO-44","d1088",null,null,null,"float"]
["AO-45","d1090",null,null,null,"float"]
["AO-46","d1092",null,null,null,"float"]
["AO-47","d1094",null,null,null,"float"]
["AO-48","d1096",null,null,null,"float"]
["AO-49","d1098",null,null,null,"float"]

{"sheet":"AI","index":3,"n_rows":51,"n_cols":7,"rows_kept":51,"cut":false,"hidden":false,"merged":[[10,6,13,6]]}
["Node No. ","ID","Range","Device Name","Logic note","date type","Remark"]
["AI-00","d2000","0-10T","Process pressure","unit:mtorr","float","Process pressure"]
["AI-01","d2002","0-760T","Chamber pressure","unit:mtorr","float"]
["AI-02","d2004","0-760T","Foreline pressure","unit:mtorr","float"]
["AI-03","d2006"]
["AI-04","d2008","0-4000","MFC1 Flow",null,"float","MFC"]
["AI-05","d2010","0-4000","MFC2 Flow",null,"float","MFC"]
["AI-06","d2012","0-4000","MFC3 Flow",null,"float","MFC"]
["AI-07","d2014","0-4000","MFC4 Flow",null,"float","MFC"]
["AI-08","d2016","0-4000","MFC5 Flow",null,"float","MFC"]
["AI-09","d2018","-200-1300°","Coolant Inlet Temp",null,"float","2组只有1组\n数据有效"]
["AI-10","d2020","-200-1300°","Coolant Outlet Temp",null,"float"]
["AI-11","d2022","-200-1300°","Substrate Control TC Temp",null,"float"]
["AI-12","d2024","-200-1300°","Substrate Monitor TC Temp",null,"float"]
["AI-13","d2026",null,null,null,"float"]
["AI-14","d2028","0-100%","Throttle Valve Real Position",null,"float","Throttle valve only"]
["AI-15","d2030","0-4T","Throttle Valve Real Pressure",null,"float"]
["AI-16","d2032",null,null,null,"float"]
["AI-17","d2034",null,null,null,"float"]
["AI-18","d2036",null,"Heartbeat FB",null,"float"]
["AI-19","d2038",null,null,null,"float"]
["AI-20","d2040",null,null,null,"float"]
["AI-21","d2042","00~59","Second","秒","float"]
["AI-22","d2044","00~59","Minute","分","float"]
["AI-23","d2046","00~23","Time","时","float"]
["AI-24","d2048","00~31","Day","日","float"]
["AI-25","d2050","01~12","Month","月","float"]
["AI-26","d2052","00~99","Year","年","float"]
["AI-27","d2054",null,null,null,"float"]
["AI-28","d2056",null,null,null,"float"]
["AI-29","d2058",null,null,null,"float"]
["AI-30","d2060","-200-1300°","Foreline Control TC Temp",null,"float","TC temp"]
["AI-31","d2062","-200-1300°","Foreline Monitor TC Temp",null,"float","TC temp"]
["AI-32","d2064",null,null,null,"float"]
["AI-33","d2066",null,null,null,"float"]
["AI-34","d2068",null,null,null,"float"]
["AI-35","d2070","-200-1300°","Grid TC Temp",null,"float","TC temp"]
["AI-36","d2072","-200-1300°","CHB Wall Control TC Temp",null,"float","TC temp"]
["AI-37","d2074","-200-1300°","CHB Wall Monitor TC Temp",null,"float","TC temp"]
["AI-38","d2076",null,null,null,"float"]
["AI-39","d2078",null,null,null,"float"]
["AI-40","d2080",null,"NC_Error_Code",null,"float","定位模块错误代码"]
["AI-41","d2082",null,"Lift Servo current value","mm","float"]
["AI-42","d2084",null,null,null,"float"]
["AI-43","d2086",null,null,null,"float"]
["AI-44","d2088",null,null,null,"float"]
["AI-45","d2090",null,null,null,"float"]
["AI-46","d2092",null,null,null,"float"]
["AI-47","d2094",null,null,null,"float"]
["AI-48","d2096",null,null,null,"float"]
["AI-49","d2098",null,null,null,"float"]

{"sheet":"HW interlock","index":4,"n_rows":15,"n_cols":16,"rows_kept":15,"cut":false,"hidden":false,"merged":[[0,0,0,2],[0,4,0,5],[14,0,14,2],[1,0,2,2]]}
["CONDITION"]
[null,null,null,"DO-4","DO-5","ROBOT","DO-37",null,"DO-14","DO-15","DO-16","DO-17","DO-18","DO-23","DO-24","D0-47"]
[null,null,null,"Slit Door Open","Slit Door Close","Arm Extend Enable","Substrate Heater On","Generator interlock","MFC1 Valve","MFC2 Valve","MFC3 Valve","MFC4 Valve","MFC5 Valve","Chamber purge valve","Chamber vent valve","CHB Wall  Heater On"]
["EFEM DI","DI-43","EFEM Side Panel Closed","T1","T1"]
[null,"DI-0","Lid Closed","T2","T2",null,"T1","T1"]
[null,"DI-6","Slit Door Open Pos",null,null,"T1"]
[null,"DI-2","PM VAC SW",{"$nulls":4},"T2"]
[null,"DI-7","Slit Door Close Pos",{"$nulls":4},"T3"]
[null,"DI-24","Source Fan 1",{"$nulls":4},"T4"]
[null,"DI-25","Source Fan 2",{"$nulls":4},"T5"]
[null,"DI-4","LE OT SW Alarm",null,null,null,"T2=0"]
[null,"DI-29","GB Interlock  Alarm",{"$nulls":5},"T1=0","T1=0","T1=0","T1=0","T1=0","T1=0","T1=0"]
[null,"DI-30","GB Door SW Alarm",{"$nulls":5},"T2=0","T2=0","T2=0","T2=0","T2=0","T2=0","T2=0"]
[null,"DI-31","CHB Wall OT SW Alarm",{"$nulls":12},"T1"]
["Logic",null,null,"If T1*T2=1 it is enable","If T1*T2=1 it is enable","If T1*T2=1 it is enable","If T1*T2=1 it is enable","If T1*T2*T3*T4*T5=1 it is enable","If T1*T2=1 it is enable","If T1*T2=1 it is enable","If T1*T2=1 it is enable","If T1*T2=1 it is enable","If T1*T2=1 it is enable","If T1*T2=1 it is enable","If T1*T2=1 it is enable","If T1=1 it is enable"]

{"sheet":"PLC interlock","index":5,"n_rows":23,"n_cols":28,"rows_kept":23,"cut":false,"hidden":false,"merged":[[0,0,0,1],[22,0,22,1],[1,0,2,1]]}
["CONDITION"]
[null,null,"DO-4","DO-5","DO-37",null,"DO-0","DO-1","DO-6","DO-7","DO-8","DO-9","DO-10","DO-11","DO-14","DO-15","DO-16","DO-17","DO-18","DO-23","DO-24","DO-25","AO-02","AO-03","AO-04","AO-05","AO-06","D0-47"]
[null,null,"Slit Door Open","Slit Door Close","Substrate Heater On","Generator Power ON","Soft Pumping Valve","Fast Pumping Valve","Lift Pin Up","Lift Pin Down","Guide Pin Small Lifter Up","Guide Pin Small Lifter Down","Guide Pin Medium Lifter Up","Guide Pin Medium Lifter Down","MFC1 Valve","MFC2 Valve","MFC3 Valve","MFC4 Valve","MFC5 Valve","Chamber purge valve","Chamber vent valve","Process gas final valve","MFC1 Flow Setpoint","MFC2 Flow Setpoint","MFC3 Flow Setpoint","MFC4 Flow Setpoint","MFC5 Flow Setpoint","CHB Wall  Heater On"]
["DI-14","ARM Not Extend to PM",null,"T1"]
["DI-43","EFEM Side Panel Closed","T1","T2"]
["DI-0","Lid Closed","T2","T3","T1",null,"T1","T1",{"$nulls":6},"T1","T1","T1","T1","T1",null,null,"T1","T1","T1","T1","T1","T1"]
["DI-1","PM ATM SW","T3"]
["DI-2","PM VAC SW",{"$nulls":12},"T2","T2","T2","T2","T2",null,null,null,"T2","T2","T2","T2","T2"]
["DI-3","Cooling Water Flow SW",null,null,"T2"]
["DI-7","Slit Door Close Pos",{"$nulls":4},"T2","T2",{"$nulls":6},"T3","T3","T3","T3","T3",null,null,"T2","T3","T3","T3","T3","T3"]
["DI-15","Generator Hardware Interlock",null,null,null,"T1"]
["DI-48","MFC1 Pressure",{"$nulls":12},"T4",{"$nulls":7},"T4"]
["DI-49","MFC2 Pressure",{"$nulls":13},"T4",{"$nulls":7},"T4"]
["DI-50","MFC3 Pressure",{"$nulls":14},"T4",{"$nulls":7},"T4"]
["DI-51","MFC4 Pressure",{"$nulls":15},"T4",{"$nulls":7},"T4"]
["DI-52","MFC5 Pressure",{"$nulls":16},"T4",{"$nulls":7},"T4"]
["DI-53","N2 Pressure",{"$nulls":17},"T1","T1"]
["DI-22","CDA Pressure","T4","T4",null,null,"T3","T3","T1","T1","T1","T1","T1","T1","T5","T5","T5","T5","T5","T2","T2","T3"]
["DI-04","LE OT SW Alarm",null,null,"T3=0"]
["DI-29","GB Interlock Alarm",{"$nulls":12},"T6=0","T6=0","T6=0","T6=0","T6=0","T3=0","T3=0",null,"T5=0","T5=0","T5=0","T5=0","T5=0"]
["DI-30","GB Door SW Alarm",{"$nulls":12},"T7=0","T7=0","T7=0","T7=0","T7=0","T4=0","T4=0",null,"T6=0","T6=0","T6=0","T6=0","T6=0"]
["DI-31","CHB Wall OT SW Alarm",{"$nulls":25},"T1"]
["Logic",null,"If T1*T2=1 it is enable","If T1*T2*T3=1 it is enable","If T1*T2*T3=1 it is enable","If T1=1 it is enable","If T1=1 it is enable","If T1*T2=1 it is enable","If T1=1 it is enable","If T1=1 it is enable","If T1=1 it is enable","If T1=1 it is enable","If T1=1 it is enable","If T1=1 it is enable","If T1*T2*T3*T4*T5*T6*T7=1 it is enable","If T1*T2*T3*T4*T5*T6*T7=1 it is enable","If T1*T2*T3*T4*T5*T6*T7=1 it is enable","If T1*T2*T3*T4*T5*T6*T7=1 it is enable","If T1*T2*T3*T4*T5*T6*T7=1 it is enable","If T1*T2*T3*T4=1 it is enable","If T1*T2*T3*T4=1 it is enable","If T1*T2=1 it is enable","If T1*T2*T3*T4*T5*T6=1 it is enable","If T1*T2*T3*T4*T5*T6=1 it is enable","If T1*T2*T3*T4*T5*T6=1 it is enable","If T1*T2*T3*T4*T5*T6=1 it is enable","If T1*T2*T3*T4*T5*T6=1 it is enable","If T1=1 it is enable"]

{"sheet":"PM HW interlock draft","index":6,"n_rows":9,"n_cols":8,"rows_kept":9,"cut":false,"hidden":true,"merged":[[0,0,0,1],[0,2,0,7],[8,0,8,1],[1,0,2,1]]}
["Condition"]
[null,null,"DO-32","DO-33","DO-34","DO-48","DO-16","DO-15"]
[null,null,"MFC1 valve  ","MFC2 valve","MFC3 valve","Process gas final valve","RPS enable","Heater  Enable"]
["DI-44","UE on Chamber SW","T1","T1","T1","T1","T1","T1"]
["DI-38","PM VAC SW","T2","T2","T2","T2","T2"]
["DI-12","Slit Door Close Pos","T3","T3","T3","T3"]
["DI-41","PM Foreline VAC SW","T4","T4","T4","T4"]
["DI-46","Cooling water flow SW",{"$nulls":4},"T3"]
["Logic",null,"If T1*T2*T3*T4=1 it is enable.","If T1*T2*T3*T4=1 it is enable.","If T1*T2*T3*T4=1 it is enable.","If T1*T2*T3*T4=1 it is enable.","If T1*T2*T3=1 it is enable.","If T1=1 it is enable."]

{"sheet":"PM PLC interlock draft","index":7,"n_rows":6,"n_cols":3,"rows_kept":6,"cut":false,"hidden":true,"merged":[[0,0,0,1],[5,0,5,1],[1,0,2,1]]}
["Condition"]
[null,null,"DO-16"]
[null,null,"RPS enable"]
["DI-41","PM Foreline VAC SW","T1"]
["DI-46","Cooling water flow SW","T2"]
["Logic",null,"If T1*T2=1 it is enable."]