Commit History

Author SHA1 Message Date
  JET-YDB\JET-YANGDB f92e4e963f 1.修改efem界面,把Aligner1 改成 Aligner,buffer改成cooling 2 days ago
  JET-GZX 18f93e94f4 fix bug of placing wafers 1 week ago
  intern04 d3a5b3c320 add EfemRobotArmType control 3 weeks ago
  JET-YDB\JET-YANGDB 5b5945bffa 1.把系统配置中文改成英语 1 month ago
  JET-YDB\JET-YANGDB e07f607f6f 提交代码 2 months ago