添加Account中的控制， 按要求修改config配置内容

VirgoRT/Config/System.sccfg

@@ -78,8 +78,8 @@
     <config default="1" name="EfemRobotArmType" nameView="EFEM robot arm type" description="EFEM robot arm type，1=Double arm 2=Single arm" max="300" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
 		<config default="false" name="AutoUnlockAfterUnload" nameView="auto unlock after unload" description="auto unlock after unload" max="" min="" paramter="" tag="" unit="" type="Bool" visible="false"/>
 
-		<config default="false" name="IgnoreWaterFlowError" nameView="Ignore water flow alarm" description="Ignore water flow alarm" max="" min="" paramter="" tag="" unit="" type="Bool" />
-    <config default="false" name="IgnoreIonizerError" nameView="Ignore Ionizer alarm" description="Ignore Ionizer alarm" max="" min="" paramter="" tag="" unit="" type="Bool" />
+		<config default="false" name="IgnoreWaterFlowError" nameView="Ignore Water Flow Alarm" description="Ignore water flow alarm" max="" min="" paramter="" tag="" unit="" type="Bool" />
+    <config default="false" name="IgnoreIonizerError" nameView="Ignore Ionizer Alarm" description="Ignore Ionizer alarm" max="" min="" paramter="" tag="" unit="" type="Bool" />
 		<config default="false" name ="VerifyWaferExistenceAtferRetract" nameView="Auto Verify Wafer existance after retract robot arm" description="Auto Verify Wafer existance after retract robot arm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="false"/>
 
 		<config default="40" name="DelayTimeBeforeLiftDown" nameView="Delay Time before lift down" description="Delay Time before lift down" max="600" min="0" paramter="" tag="" unit="second" type="Integer" visible="false"/>
@@ -104,7 +104,7 @@
 			<config default="0" name="WaferPlacementParityFlag" nameView="Parity Flag for wafer placement" description="0： all slot； 1：Odd slot; 2: Even slot。"  max="10" min="0" paramter="" tag="" unit="" type="Integer" visible="false"/>
       <config default="true" name="HasMapFunction" nameView="HasMapFunction" description="Has map function" max="0" min="0" paramter="" tag="" unit="" visible="false"  type="Bool" />
       <config default="true" name="HasLoadFunction" nameView="HasLoadFunction" description="Has load/unload function" max="0" min="0" paramter="" tag="" unit="" visible="false"  type="Bool" />
-      <config default="false" name="EnableAutoUnloadFoup" nameView="EnableAutoUnloadFoup" description="Enable Auto Unload Foup" max="0" min="0" paramter="" tag="" unit="" visible="true"  type="Bool" />
+      <config default="false" name="EnableAutoUnloadFoup" nameView="EnableAutoUnloadFoup" description="Enable Auto Unload Foup" max="" min="" paramter="" tag="" unit="" visible="true"  type="Bool" />
 		</configs>
 	</configs>
 
@@ -124,35 +124,35 @@
 		<config default="100" name="GasFlowPressureAlarmRange" nameView="Gas Flow Pressure Alarm Range" description="" max="760000" min="0" paramter="" tag="" unit="sccm" type="Double" visible="false"/>
 		<config default="60" name="GasFlowPressureAlarmTime" nameView="Gas Flow Pressure Alarm Time" description="" max="3600" min="0" paramter="" tag="" unit="second" type="Double" visible="false"/>
 		<config default="true" name="EnableThrottleValve" nameView="Enable Throttle Valve" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" visible="false"/>
-		<config default="150" name="ChamberHeaterSetPointLimit" nameView="Chamber Heater Set Point Limit" description="" max="500" min="0" paramter="" tag="" unit="" type="Integer" />
-		<config default="140" name="ForeLineHeaterSetPointLimit" nameView="ForeLine Heater Set Point Limit" description="" max="500" min="0" paramter="" tag="" unit="" type="Integer" />
-		<config default="120" name="CheckSubstrateTempTimeout" nameView="Check Substrate Temp Timeout" description="" max="3600" min="0" paramter="" tag="" unit="" type="Integer" />
+		<config default="150" name="ChamberHeaterSetPointLimit" nameView="Chamber Heater Set Point Limit" description="" max="500" min="0" paramter="" tag="" unit="°C" type="Integer" />
+		<config default="140" name="ForeLineHeaterSetPointLimit" nameView="ForeLine Heater Set Point Limit" description="" max="500" min="0" paramter="" tag="" unit="°C" type="Integer" />
+		<config default="120" name="CheckSubstrateTempTimeout" nameView="Check Substrate Temp Timeout" description="" max="3600" min="0" paramter="" tag="" unit="s" type="Integer" />
 		<config default="90" name="CheckATMTimeout" nameView="Check ATM Timeout" description="" max="3000" min="0" paramter="" tag="" unit="s" type="Integer" />
 		<config default="1" name="VentTimeDelay" nameView="Vent Time Delay" description="" max="3000" min="0" paramter="" tag="" unit="s" type="Integer" />
-		<config default="780000" name="ChamberBasePressureThreshold" nameView="Chamber Base Pressure Threshold" description="" max="1000000" min="0" paramter="" tag="" unit="mtorr" type="Double" />
+		<config default="780000" name="ChamberBasePressureThreshold" nameView="Chamber Base Pressure Threshold" description="" max="1000000" min="0" paramter="" tag="" unit="mTorr" type="Double" />
 		<config default="120" name="ChamberBaseTemperatureThreshold" nameView="Chamber Base Temperature Threshold" description="" max="1000" min="0" paramter="" tag="" unit="°C" type="Double" />
 		<config default="10" name="ProcessPressureOffset" nameView="Process Pressure Offset" description="" max="100" min="0" paramter="" tag="" unit="mtorr" type="Double" visible="false"/>
 		<config default="7500" name="ChamberVolume" nameView="Chamber Volume" max="100000" min="0" paramter="" tag="" unit="mL" visible="false" type="Double" />
 		<config default="25" name="GasTemperature" nameView="Gas Temperature" max="1000" min="-1000" paramter="" tag="" unit="℃" visible="false" type="Double" />
 		<config default="9" name="TargetPressureInMFCVerification" nameView="MFC verification target pressure" max="100" min="0" paramter="" tag="" unit="Torr" visible="false" type="Double" />
 		<config default="180" name="GasFlowTimeInMFCVerification" nameView="MFC verification gas flow time" max="1000" min="0" paramter="" tag="" unit="second" visible="false" type="Double" />
-		<config default="0" name="PinDownDelayTimePick" nameView="Pick Delay Time before pin down" description="" max="120" min="0" paramter="" tag="" unit="s" type="Integer" />
-		<config default="0" name="PinDownDelayTimePlace" nameView="Place Delay Time before pin down" description="" max="120" min="0" paramter="" tag="" unit="s" type="Integer" />
+		<config default="0" name="PinDownDelayTimePick" nameView="Pick Delay Time Before Pin Down" description="" max="120" min="0" paramter="" tag="" unit="s" type="Integer" />
+		<config default="0" name="PinDownDelayTimePlace" nameView="Place Delay Time Before Pin Down" description="" max="120" min="0" paramter="" tag="" unit="s" type="Integer" />
 		<config default="0" name="LiftPinPositionAfterPlace" nameView="Lift Pin Position After Place wafer, 0, Down, 1, Middle, 2, Up" description="" max="5" min="0" paramter="" tag="" unit="" type="Integer" visible="false"/>
 		<config default="Strip" name="ChamberLabel"  nameView="Chamber Label" description="Chamber label" max="" min="" paramter="" tag=""  unit="" type="String" visible="false"/>
 		<config default="30" name="MaxDeviationInMFCVerification" nameView="MFC verification max deviation（%）" max="100000" min="0" paramter="" tag="" unit="%" visible="false" type="Double" />
-		<config default="150" name="WallHeaterSetPointLimit" nameView="Wall Heater Set Point Limit" description="" max="500" min="0" paramter="" tag="" unit="" type="Integer" />
-		<config default="false" name="EnableWallHeater" nameView="Enable Chamber Wall Heater" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
-		<config default="false" name="EnableGridHeater" nameView="Enable Chamber Grid Heater" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
+		<config default="150" name="WallHeaterSetPointLimit" nameView="Wall Heater Set Point Limit" description="" max="500" min="0" paramter="" tag="" unit="°C" type="Integer" />
+		<config default="false" name="EnableWallHeater" nameView="Enable Chamber Wall Heater" description="" max="" min="" paramter="" tag="" unit="" type="Bool" />
+		<config default="false" name="EnableGridHeater" nameView="Enable Chamber Grid Heater" description="" max="" min="" paramter="" tag="" unit="" type="Bool" />
 		<config default="0" name="LiftPinMode" nameView="LiftPin Mode" description="liftpin: 0-cylinderliftpin，1-single axis servo liftpin 2-double Axis servo liftpin 4-two double Axis servo liftpin" max="99" min="0" paramter="" tag="" unit="" type="Integer" visible="false"/>
 		<config default="PortU" name="BrooksPortName" nameView="Brooks EFEM Port Name" description="Brooks EFEM Port Name of PMA" max="" min="" paramter="" tag="" unit="" type="String" visible="false"/>
 		<config default="false" name="EnableResetError" nameView="Enable Reset Chamber Error by Click Reset Button" description="" max="1" min="0" paramter="" tag="" unit="" type="Bool" visible="false"/>
     <config default="false" name="ScrubberIsInstalled" nameView="Is Scrubber Installed"  description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" visible="false"/>
     <config default="5" name="LiftUpDownTimeout" nameView="Lift Up Down Timeout" description="Lift up/down time out" max="99999" min="1" paramter="" tag="" unit="second" type="Integer" visible="false" />
 
-    <config default="30" name="SubstrateTemperatureTCTMDiff" nameView="Substrate Temperature TC TM Diff" description="" max="500" min="1" paramter="" tag="" unit="" type="Integer" visible="true"/>
-    <config default="30" name="ForelineTemperatureTCTMDiff" nameView="Foreline Temperature TC TM Diff" description="" max="500" min="1" paramter="" tag="" unit="" type="Integer" visible="true"/>
-    <config default="30" name="CHBWallTemperatureTCTMDiff" nameView="CHB Wall Temperature TC TM Diff" description="" max="500" min="1" paramter="" tag="" unit="" type="Integer" visible="true"/>
+    <config default="30" name="SubstrateTemperatureTCTMDiff" nameView="Substrate Temperature TC TM Diff" description="" max="500" min="1" paramter="" tag="" unit="°C" type="Integer" visible="true"/>
+    <config default="30" name="ForelineTemperatureTCTMDiff" nameView="Foreline Temperature TC TM Diff" description="" max="500" min="1" paramter="" tag="" unit="°C" type="Integer" visible="true"/>
+    <config default="30" name="CHBWallTemperatureTCTMDiff" nameView="CHB Wall Temperature TC TM Diff" description="" max="500" min="1" paramter="" tag="" unit="°C" type="Integer" visible="true"/>
 
 		<configs name="MFCVerification" nameView="MFC Verification" visible="false">
 			<config default="7500" name="ChamberVolume" nameView="Chamber Volume" max="100000" min="0" paramter="" tag="" unit="mL"  visible="false" type="Double" />
@@ -201,11 +201,11 @@
 			<config default="1" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
 			<config default="COM14" name="Port" nameView="Port" description="serial port name of RFG" max="" min="" paramter="" tag="" unit="" type="String" />
 			<config default="192.168.10.21:502" name="IPAddress" nameView="IP Address" description="EFEM IP,default 127.0.0.1:502" max="" min="" paramter="" tag="" unit="" type="String" />
-			<config default="500" name="PowerAlarmRange" nameView="Power Alarm Range" description="" max="1000" min="0" paramter="" tag="" unit="" type="Double" />
-			<config default="10" name="PowerAlarmTime" nameView="Power Alarm Time" description="" max="10" min="0" paramter="" tag="" unit="" type="Double" />
-			<config default="1" name="ReflectPowerAlarmRange" nameView="Reflect Power Alarm Range" description="" max="1000" min="0" paramter="" tag="" unit="" type="Double" />
-			<config default="1" name="ReflectPowerAlarmTime" nameView="Reflect Power Alarm Time" description="" max="10" min="0" paramter="" tag="" unit="" type="Double" />
-			<config default="3000" name="PowerRange" nameView="Power Range" description="" max="30000" min="0" paramter="" tag="" unit="" type="Double" />
+			<config default="500" name="PowerAlarmRange" nameView="Power Alarm Range" description="" max="1000" min="0" paramter="" tag="" unit="W" type="Double" />
+			<config default="10" name="PowerAlarmTime" nameView="Power Alarm Time" description="" max="10" min="0" paramter="" tag="" unit="s" type="Double" />
+			<config default="1" name="ReflectPowerAlarmRange" nameView="Reflect Power Alarm Range" description="" max="1000" min="0" paramter="" tag="" unit="W" type="Double" />
+			<config default="1" name="ReflectPowerAlarmTime" nameView="Reflect Power Alarm Time" description="" max="10" min="0" paramter="" tag="" unit="s" type="Double" />
+			<config default="3000" name="PowerRange" nameView="Power Range" description="" max="30000" min="0" paramter="" tag="" unit="W" type="Double" />
 			<config default="1" name="Coefficient" nameView="Coefficient" description="" max="10" min="0" paramter="" tag="" unit="" type="Double" visible="false"/>
 			<config default="false" name="EnablePulsingFunction" nameView="Enable Pulsing Function" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" visible="false"/>
 			<config default="false" name="EnableReflectPower" nameView="Enable Reflect Power" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" visible="false"/>
@@ -213,7 +213,7 @@
 			<config default="1" name="PowerRegulationFactor" nameView="Power Regulation Factor" description="" max="10" min="0" paramter="" tag="" unit="" type="Integer" visible="false"/>
 			<config default="1000" name="RfPowerAlarmRange" nameView="RF Power Alarm Range" description="" max="10000" min="0" paramter="" tag="" unit="" type="Integer" visible="false"/>
 			<config default="3000" name="RfPowerAlarmTime" nameView="RF Power Alarm Time" description="" max="10000" min="0" paramter="" tag="" unit="" type="Integer" visible="false"/>
-			<config default="3" name="RFTurnOnTimeout" nameView="RF Turn On Timeout" description="" max="10" min="0" paramter="" tag="" unit="S" type="Integer" />
+			<config default="3" name="RFTurnOnTimeout" nameView="RF Turn On Timeout" description="" max="10" min="0" paramter="" tag="" unit="s" type="Integer" />
 			<config default="false" name="EnableCalibration" nameView="Enable calibration" max="" min="" paramter="" tag="" unit="" visible="false" type="Bool"/>
 			<config default="100#100;200#200;" name="CalibrationTable" nameView="Calibration table" max="" min="0" paramter="" tag="" unit="" visible="false" type="String" />
 			<config default="" name="GeneratorSerialNumber" nameView="Generator serial number" max="" min="0" paramter="" tag="" unit="" type="String" visible="false"/>
@@ -224,7 +224,7 @@
 			<config default="" name="CalibrationTableDetail" nameView="Calibration table detail" max="" min="0" paramter="" tag="" unit="" visible="false" type="String" />
 		</configs>
 		<configs name="match" nameView="Source Match" >
-			<config default="false" name="EnableMatch" nameView="Enable Source Match" description="enable match or not" max="1" min="0" tag="" unit="" type="Bool" />
+			<config default="false" name="EnableMatch" nameView="Enable Source Match" description="enable match or not" max="" min="" tag="" unit="" type="Bool" />
 			<config default="1" name="MFG" nameView="MFG" description="Manufacturer, 1:AdTec; 2:Comet;3:Revtech" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
 			<config default="1" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
 			<config default="COM15" name="Port" nameView="Port" description="serial port name of match" max="" min="" paramter="" tag="" unit="" type="String" />
@@ -278,11 +278,11 @@
 			<config default="1" name="MfcScaleFactor" nameView="MFC Scale Factor" description="Scale factor" max="10" min="0" tag="" unit="sccm" type="Double" />
 			<config default="100" name="DefaultSetPoint" nameView="Default Set Point" description="default setpoint" max="1000" min="0" tag="" unit="sccm" type="Integer" visible="false"/>
 			<config default="1" name="FlowRegulationFactor" nameView="Flow Regulation Factor" description="flow regulation factor" max="10" min="0" tag="" unit="sccm" type="Integer" visible="false"/>
-			<config default="true" name="MfcEnableAlarm" nameView="MFC Enable Alarm" description="" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
+			<config default="true" name="MfcEnableAlarm" nameView="MFC Enable Alarm" description="" max="" min="" paramter="" tag="" unit="" type="Bool" />
 			<config default="10" name="MfcAlarmRange" nameView="MFC Alarm Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
-			<config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
+			<config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="" max="60" min="0" paramter="" tag="" unit="s" type="Integer" />
       <config default="10" name="MfcWarningRange" nameView="MFC Warning Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
-      <config default="10" name="MfcWarningTime" nameView="MFC Warning Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
+      <config default="10" name="MfcWarningTime" nameView="MFC Warning Time" description="" max="60" min="0" paramter="" tag="" unit="s" type="Integer" />
 		</configs>
 		<configs name="MfcGas2" nameView="MFC Gas2" >
 			<config default="true" name="Enable" nameView="Enable" description="Enable gas 2 or not" tag="" unit="" type="Bool" />
@@ -291,11 +291,11 @@
 			<config default="1" name="MfcScaleFactor" nameView="MFC Scale Factor" description="Scale factor" max="10" min="0" tag="" unit="sccm" type="Double" />
 			<config default="100" name="DefaultSetPoint" nameView="Default Set Point" description="default setpoint" max="1000" min="0" tag="" unit="sccm" type="Integer" visible="false"/>
 			<config default="1" name="FlowRegulationFactor" nameView="Flow Regulation Factor" description="flow regulation factor" max="10" min="0" tag="" unit="sccm" type="Integer" visible="false"/>
-			<config default="true" name="MfcEnableAlarm" nameView="MFC Enable Alarm" description="" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
+			<config default="true" name="MfcEnableAlarm" nameView="MFC Enable Alarm" description="" max="" min="" paramter="" tag="" unit="" type="Bool" />
 			<config default="10" name="MfcAlarmRange" nameView="MFC Alarm Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
-			<config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
+			<config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="" max="60" min="0" paramter="" tag="" unit="s" type="Integer" />
       <config default="10" name="MfcWarningRange" nameView="MFC Warning Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
-      <config default="10" name="MfcWarningTime" nameView="MFC Warning Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
+      <config default="10" name="MfcWarningTime" nameView="MFC Warning Time" description="" max="60" min="0" paramter="" tag="" unit="s" type="Integer" />
 		</configs>
 		<configs name="MfcGas3" nameView="MFC Gas3" >
 			<config default="true" name="Enable" nameView="Enable" description="Enable gas 3 or not" tag="" unit="" type="Bool" />
@@ -304,11 +304,11 @@
 			<config default="1" name="MfcScaleFactor" nameView="MFC Scale Factor" description="Scale factor" max="10" min="0" tag="" unit="sccm" type="Double" />
 			<config default="100" name="DefaultSetPoint" nameView="Default Set Point" description="default setpoint" max="1000" min="0" tag="" unit="sccm" type="Integer" visible="false"/>
 			<config default="1" name="FlowRegulationFactor" nameView="Flow Regulation Factor" description="flow regulation factor" max="10" min="0" tag="" unit="sccm" type="Integer" visible="false"/>
-			<config default="true" name="MfcEnableAlarm" nameView="MFC Enable Alarm" description="" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
+			<config default="true" name="MfcEnableAlarm" nameView="MFC Enable Alarm" description="" max="" min="" paramter="" tag="" unit="" type="Bool" />
 			<config default="10" name="MfcAlarmRange" nameView="MFC Alarm Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
-			<config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
+			<config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="" max="60" min="0" paramter="" tag="" unit="s" type="Integer" />
       <config default="10" name="MfcWarningRange" nameView="MFC Warning Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
-      <config default="10" name="MfcWarningTime" nameView="MFC Warning Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
+      <config default="10" name="MfcWarningTime" nameView="MFC Warning Time" description="" max="60" min="0" paramter="" tag="" unit="s" type="Integer" />
 		</configs>
 		<configs name="MfcGas4" nameView="MFC Gas4" >
 			<config default="true" name="Enable" nameView="Enable" description="Enable gas 4 or not" tag="" unit="" type="Bool" />
@@ -317,11 +317,11 @@
 			<config default="1" name="MfcScaleFactor" nameView="MFC Scale Factor" description="Scale factor" max="10" min="0" tag="" unit="sccm" type="Double" />
 			<config default="100" name="DefaultSetPoint" nameView="Default Set Point" description="default setpoint" max="1000" min="0" tag="" unit="sccm" type="Integer" visible="false"/>
 			<config default="1" name="FlowRegulationFactor" nameView="Flow Regulation Factor" description="flow regulation factor" max="10" min="0" tag="" unit="sccm" type="Integer" visible="false"/>
-			<config default="true" name="MfcEnableAlarm" nameView="MFC Enable Alarm" description="Mfc Enable Alarm" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
+			<config default="true" name="MfcEnableAlarm" nameView="MFC Enable Alarm" description="Mfc Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" />
 			<config default="10" name="MfcAlarmRange" nameView="MFC Alarm Range" description="Mfc Alarm Range" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
-			<config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="Mfc Alarm Time" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
+			<config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="Mfc Alarm Time" max="60" min="0" paramter="" tag="" unit="s" type="Integer" />
       <config default="10" name="MfcWarningRange" nameView="MFC Warning Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
-      <config default="10" name="MfcWarningTime" nameView="MFC Warning Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
+      <config default="10" name="MfcWarningTime" nameView="MFC Warning Time" description="" max="60" min="0" paramter="" tag="" unit="s" type="Integer" />
 		</configs>
 		<configs name="MfcGas5" nameView="MFC Gas5" >
 			<config default="true" name="Enable" nameView="Enable" description="Enable gas 5 or not" tag="" unit="" type="Bool" />
@@ -330,36 +330,36 @@
 			<config default="1" name="MfcScaleFactor" nameView="MFC Scale Factor" description="Scale factor" max="10" min="0" tag="" unit="sccm" type="Double" />
 			<config default="100" name="DefaultSetPoint" nameView="Default Set Point" description="default setpoint" max="1000" min="0" tag="" unit="sccm" type="Integer" visible="false"/>
 			<config default="1" name="FlowRegulationFactor" nameView="Flow Regulation Factor" description="flow regulation factor" max="10" min="0" tag="" unit="sccm" type="Integer" visible="false"/>
-			<config default="true" name="MfcEnableAlarm" nameView="MFC Enable Alarm" description="Mfc Enable Alarm" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
+			<config default="true" name="MfcEnableAlarm" nameView="MFC Enable Alarm" description="Mfc Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" />
 			<config default="10" name="MfcAlarmRange" nameView="MFC Alarm Range" description="Mfc Alarm Range" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
-			<config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="Mfc Alarm Time" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
+			<config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="Mfc Alarm Time" max="60" min="0" paramter="" tag="" unit="s" type="Integer" />
       <config default="10" name="MfcWarningRange" nameView="MFC Warning Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
-      <config default="10" name="MfcWarningTime" nameView="MFC Warning Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
+      <config default="10" name="MfcWarningTime" nameView="MFC Warning Time" description="" max="60" min="0" paramter="" tag="" unit="s" type="Integer" />
 		</configs>
 		<configs name="Pump" nameView="Pump" >
-			<config default="30" name="LeakRate" nameView="Leak Rate" description="" max="756000" min="0" paramter="" tag="" unit="mTorrPerMin" type="Double" />
-			<config default="180" name="LeakCheckPumpingTime" nameView="Leak Check Pumping Time" description="" max="3000" min="0" paramter="" tag="" unit="" type="Integer" />
-			<config default="180" name="LeakCheckWaitTime" nameView="Leak Check Wait Time" description="" max="3000" min="0" paramter="" tag="" unit="" type="Integer" />
+			<config default="30" name="LeakRate" nameView="Leak Rate" description="" max="756000" min="0" paramter="" tag="" unit="mTorr" type="Double" />
+			<config default="180" name="LeakCheckPumpingTime" nameView="Leak Check Pumping Time" description="" max="3000" min="0" paramter="" tag="" unit="s" type="Integer" />
+			<config default="180" name="LeakCheckWaitTime" nameView="Leak Check Wait Time" description="" max="3000" min="0" paramter="" tag="" unit="s" type="Integer" />
 			<config default="150" name="PumpBasePressure" nameView="Pump Base Pressure" description="" max="756000" min="0" paramter="" tag="" unit="mTorr" type="Integer" />
-			<config default="120" name="PumpTimeLimit" nameView="Pump Time Limit" description="" max="3000" min="0" paramter="" tag="" unit="" type="Double" />
+			<config default="120" name="PumpTimeLimit" nameView="Pump Time Limit" description="" max="3000" min="0" paramter="" tag="" unit="s" type="Double" />
 			<config default="5" name="PumpValveDelay" nameView="Pump Valve Delay" description="" max="3000" min="0" paramter="" tag="" unit="s" type="Integer" />
 		</configs>
 		<configs name="Purge" nameView="Purge" >
 			<config default="3" name="PurgeCycleCount" nameView="Purge Cycle Count" description="" max="30" min="0" paramter="" tag="" unit="times" type="Double" />
-			<config default="700000" name="PurgeVentPressure" nameView="Purge Vent Pressure" description="" max="760000" min="0" paramter="" tag="" unit="mtorr" type="Double" />
-			<config default="10" name="PurgePumpPressure" nameView="Purge Pump Pressure" description="" max="760000" min="0" paramter="" tag="" unit="mtorr" type="Double" />
-			<config default="60" name="PurgeVentTimeLimit" nameView="Purge Vent Time Limit" description="" max="3600" min="0" paramter="" tag="" unit="second" type="Double" />
-			<config default="60" name="PurgePumpTimeLimit" nameView="Purge Pump Time Limit" description="" max="3600" min="0" paramter="" tag="" unit="second" type="Double" />
-			<config default="10" name="PurgeVentStableTime" nameView="Purge Vent Stable Time" description="" max="600" min="0" paramter="" tag="" unit="second" type="Double" />
-			<config default="10" name="PurgePumpStableTime" nameView="Purge Pump Stable Time" description="" max="600" min="0" paramter="" tag="" unit="second" type="Double" />
+			<config default="700000" name="PurgeVentPressure" nameView="Purge Vent Pressure" description="" max="760000" min="0" paramter="" tag="" unit="mTorr" type="Double" />
+			<config default="10" name="PurgePumpPressure" nameView="Purge Pump Pressure" description="" max="760000" min="0" paramter="" tag="" unit="mTorr" type="Double" />
+			<config default="60" name="PurgeVentTimeLimit" nameView="Purge Vent Time Limit" description="" max="3600" min="0" paramter="" tag="" unit="s" type="Double" />
+			<config default="60" name="PurgePumpTimeLimit" nameView="Purge Pump Time Limit" description="" max="3600" min="0" paramter="" tag="" unit="s" type="Double" />
+			<config default="10" name="PurgeVentStableTime" nameView="Purge Vent Stable Time" description="" max="600" min="0" paramter="" tag="" unit="s" type="Double" />
+			<config default="10" name="PurgePumpStableTime" nameView="Purge Pump Stable Time" description="" max="600" min="0" paramter="" tag="" unit="s" type="Double" />
 		</configs>
 
     <configs name="HeaterChamber" nameView="Heater Substrate" >
-      <config default="false" name="HeaterEnableTolerance" nameView="Enable Heater Deviation Check" description="" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
-      <config default="200" name="HeaterAlarmRange" nameView="Heater deviation Alarm Range" description="" max="200" min="0" paramter="" tag="" unit="℃" type="Integer" />
-      <config default="10" name="HeaterAlarmTime" nameView="Heater deviation Alarm Time" description="" max="3600" min="0" paramter="" tag="" unit="second" type="Integer" />
-      <config default="100" name="HeaterWarningRange" nameView="Heater deviation Warning Range" description="" max="200" min="0" paramter="" tag="" unit="℃" type="Integer" />
-      <config default="10" name="HeaterWarningTime" nameView="Heater deviation Warning Time" description="" max="3600" min="0" paramter="" tag="" unit="second" type="Integer" />
+      <config default="false" name="HeaterEnableTolerance" nameView="Enable Heater Deviation Check" description="" max="" min="" paramter="" tag="" unit="" type="Bool" />
+      <config default="200" name="HeaterAlarmRange" nameView="Heater Deviation Alarm Range" description="" max="200" min="0" paramter="" tag="" unit="℃" type="Integer" />
+      <config default="10" name="HeaterAlarmTime" nameView="Heater Deviation Alarm Time" description="" max="3600" min="0" paramter="" tag="" unit="s" type="Integer" />
+      <config default="100" name="HeaterWarningRange" nameView="Heater Deviation Warning Range" description="" max="200" min="0" paramter="" tag="" unit="℃" type="Integer" />
+      <config default="10" name="HeaterWarningTime" nameView="Heater Deviation Warning Time" description="" max="3600" min="0" paramter="" tag="" unit="s" type="Integer" />
       <config default="0" name="MonitorTcFeedbackOffset" nameView="Monitor Tc Feedback Offset" description="" max="5" min="-5" paramter="" tag="" unit="℃" type="Double" visible="false"/>
       <config default="0" name="ControlTcFeedbackOffset" nameView="Control Tc Feedback Offset" description="" max="5" min="-5" paramter="" tag="" unit="℃" type="Double" visible="false"/>
       <config name="TempOffsetPoint_1" nameView="Temp Offset Point 1" description="Temp Offset Point 1" unit="degree" type="Integer" max="300" min="0" visible="false"/>
@@ -382,11 +382,11 @@
 			<config name="OffsetValue_9" nameView="Offset Value 9" description="Offset Value 9" unit="degree" type="Double" max="300" min="0" visible="false"/>
 		</configs>
     <configs name="WallHeater" nameView="Heater Wall" >
-      <config default="false" name="HeaterEnableTolerance" nameView="Enable Heater Deviation Check" description="" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
-      <config default="200" name="HeaterAlarmRange" nameView="Heater deviation Alarm Range" description="" max="200" min="0" paramter="" tag="" unit="℃" type="Integer" />
-      <config default="10" name="HeaterAlarmTime" nameView="Heater deviation Alarm Time" description="" max="3600" min="0" paramter="" tag="" unit="second" type="Integer" />
-      <config default="100" name="HeaterWarningRange" nameView="Heater deviation Warning Range" description="" max="200" min="0" paramter="" tag="" unit="℃" type="Integer" />
-      <config default="10" name="HeaterWarningTime" nameView="Heater deviation Warning Time" description="" max="3600" min="0" paramter="" tag="" unit="second" type="Integer" />
+      <config default="false" name="HeaterEnableTolerance" nameView="Enable Heater Deviation Check" description="" max="" min="" paramter="" tag="" unit="" type="Bool" />
+      <config default="200" name="HeaterAlarmRange" nameView="Heater Deviation Alarm Range" description="" max="200" min="0" paramter="" tag="" unit="℃" type="Integer" />
+      <config default="10" name="HeaterAlarmTime" nameView="Heater Deviation Alarm Time" description="" max="3600" min="0" paramter="" tag="" unit="s" type="Integer" />
+      <config default="100" name="HeaterWarningRange" nameView="Heater Deviation Warning Range" description="" max="200" min="0" paramter="" tag="" unit="℃" type="Integer" />
+      <config default="10" name="HeaterWarningTime" nameView="Heater Deviation Warning Time" description="" max="3600" min="0" paramter="" tag="" unit="s" type="Integer" />
       <config default="0" name="MonitorTcFeedbackOffset" nameView="Monitor Tc Feedback Offset" description="" max="5" min="-5" paramter="" tag="" unit="℃" type="Double" visible="false"/>
       <config default="0" name="ControlTcFeedbackOffset" nameView="Control Tc Feedback Offset" description="" max="5" min="-5" paramter="" tag="" unit="℃" type="Double" visible="false"/>
 
@@ -411,11 +411,11 @@
     </configs>
 
     <configs name="ForelineHeater" nameView="Heater Foreline" >
-      <config default="false" name="HeaterEnableTolerance" nameView="Enable Heater Deviation Check" description="" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
-      <config default="200" name="HeaterAlarmRange" nameView="Heater deviation Alarm Range" description="" max="200" min="0" paramter="" tag="" unit="℃" type="Integer" />
-      <config default="10" name="HeaterAlarmTime" nameView="Heater deviation Alarm Time" description="" max="3600" min="0" paramter="" tag="" unit="second" type="Integer" />
-      <config default="100" name="HeaterWarningRange" nameView="Heater deviation Warning Range" description="" max="200" min="0" paramter="" tag="" unit="℃" type="Integer" />
-      <config default="10" name="HeaterWarningTime" nameView="Heater deviation Warning Time" description="" max="3600" min="0" paramter="" tag="" unit="second" type="Integer" />
+      <config default="false" name="HeaterEnableTolerance" nameView="Enable Heater Deviation Check" description="" max="" min="" paramter="" tag="" unit="" type="Bool" />
+      <config default="200" name="HeaterAlarmRange" nameView="Heater Deviation Alarm Range" description="" max="200" min="0" paramter="" tag="" unit="℃" type="Integer" />
+      <config default="10" name="HeaterAlarmTime" nameView="Heater Deviation Alarm Time" description="" max="3600" min="0" paramter="" tag="" unit="s" type="Integer" />
+      <config default="100" name="HeaterWarningRange" nameView="Heater Deviation Warning Range" description="" max="200" min="0" paramter="" tag="" unit="℃" type="Integer" />
+      <config default="10" name="HeaterWarningTime" nameView="Heater Deviation Warning Time" description="" max="3600" min="0" paramter="" tag="" unit="s" type="Integer" />
       <config default="0" name="MonitorTcFeedbackOffset" nameView="Monitor Tc Feedback Offset" description="" max="5" min="-5" paramter="" tag="" unit="℃" type="Double" visible="false"/>
       <config default="0" name="ControlTcFeedbackOffset" nameView="Control Tc Feedback Offset" description="" max="5" min="-5" paramter="" tag="" unit="℃" type="Double" visible="false"/>
 
@@ -441,10 +441,10 @@
 
     <configs name="GridHeater" nameView="Heater Grid" visible="false">
       <config default="false" name="HeaterEnableTolerance" nameView="Enable Heater Deviation Check" description="" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
-      <config default="200" name="HeaterAlarmRange" nameView="Heater deviation Alarm Range" description="" max="200" min="0" paramter="" tag="" unit="℃" type="Integer" />
-      <config default="10" name="HeaterAlarmTime" nameView="Heater deviation Alarm Time" description="" max="3600" min="0" paramter="" tag="" unit="second" type="Integer" />
-      <config default="100" name="HeaterWarningRange" nameView="Heater deviation Warning Range" description="" max="200" min="0" paramter="" tag="" unit="℃" type="Integer" />
-      <config default="10" name="HeaterWarningTime" nameView="Heater deviation Warning Time" description="" max="3600" min="0" paramter="" tag="" unit="second" type="Integer" />
+      <config default="200" name="HeaterAlarmRange" nameView="Heater Deviation Alarm Range" description="" max="200" min="0" paramter="" tag="" unit="℃" type="Integer" />
+      <config default="10" name="HeaterAlarmTime" nameView="Heater Deviation Alarm Time" description="" max="3600" min="0" paramter="" tag="" unit="s" type="Integer" />
+      <config default="100" name="HeaterWarningRange" nameView="Heater Deviation Warning Range" description="" max="200" min="0" paramter="" tag="" unit="℃" type="Integer" />
+      <config default="10" name="HeaterWarningTime" nameView="Heater Deviation Warning Time" description="" max="3600" min="0" paramter="" tag="" unit="s" type="Integer" />
       <config default="0" name="MonitorTcFeedbackOffset" nameView="Monitor Tc Feedback Offset" description="" max="5" min="-5" paramter="" tag="" unit="℃" type="Double" />
       <config default="0" name="ControlTcFeedbackOffset" nameView="Control Tc Feedback Offset" description="" max="5" min="-5" paramter="" tag="" unit="℃" type="Double" />
 
@@ -493,9 +493,9 @@
 		</configs>
     <configs name="TriStateLiftPin2" nameView="Group TriState LiftPin Setting" visible="true">
       <config default="1" name="ServoWorkMode" nameView="Lift Servo Work Mode" description="Lift Servo Work Mode" max="1000" min="0"  paramter="" tag="" unit="" type="Double" visible="false"/>
-      <config default="3" name="OriginSpeed" nameView="Lift Servo Origin speed" description="Lift Servo Origin speed" max="30" min="0"  paramter="" tag="" unit="mm/s" type="Double" />
-      <config default="5" name="AutoSpeed" nameView="Lift Servo Auto speed" description="Lift Servo Auto speed" max="30" min="0"  paramter="" tag="" unit="mm/s" type="Double" />
-      <config default="5" name="ManualSpeed" nameView="Lift Servo manual speed" description="Lift Servo manual speed" max="30" min="0"  paramter="" tag="" unit="mm/s" type="Double" />
+      <config default="3" name="OriginSpeed" nameView="Lift Servo Origin Speed" description="Lift Servo Origin speed" max="30" min="0"  paramter="" tag="" unit="mm/s" type="Double" />
+      <config default="5" name="AutoSpeed" nameView="Lift Servo Auto Speed" description="Lift Servo Auto speed" max="30" min="0"  paramter="" tag="" unit="mm/s" type="Double" />
+      <config default="5" name="ManualSpeed" nameView="Lift Servo Manual Speed" description="Lift Servo manual speed" max="30" min="0"  paramter="" tag="" unit="mm/s" type="Double" />
       <config default="30" name="SoftUpLimit" nameView="Lift Servo Soft Up Limit" description="Lift Servo  Soft Up Limit" max="50" min="-50"  paramter="" tag="" unit="mm" type="Double" />
       <config default="-30" name="SoftDownLimit" nameView="Lift Servo Soft Down Limit" description="Lift Servo  limit position" max="50" min="-50"  paramter="" tag="" unit="mm" type="Double" />
       <config default="300" name="AccDecSpeedTime" nameView="Lift Servo Acc-Dec Speed Time" description="Lift Servo Acc-Dec Speed Time" max="1000" min="100"  paramter="" tag="" unit="ms" type="Double" />
@@ -505,9 +505,9 @@
       <config default="0" name="PosDiff" nameView="Lift Servo Pos Diff" description="Lift Servo Pos Diff" max="5" min="0"  paramter="" tag="" unit="mm" type="Double" />
     </configs>
     <configs name="TriStateLiftPin4" nameView="Double Group TriState LiftPin Setting" visible="false">
-      <config default="5" name="AutoSpeed" nameView="Lift Servo Auto speed" description="Lift Servo Auto speed" max="100" min="0"  paramter="" tag="" unit="mm/s" type="Double" />
-      <config default="2" name="ManualSpeed" nameView="Lift Servo manual speed" description="Lift Servo manual speed" max="10" min="0"  paramter="" tag="" unit="mm/s" type="Double" />
-      <config default="200" name="AccOrDecTime" nameView="Lift Servo Acc or Dec  time" description="Lift Servo Acc or Dec time" max="1000" min="0"  paramter="" tag="" unit="ms" type="Double" />
+      <config default="5" name="AutoSpeed" nameView="Lift Servo Auto Speed" description="Lift Servo Auto speed" max="100" min="0"  paramter="" tag="" unit="mm/s" type="Double" />
+      <config default="2" name="ManualSpeed" nameView="Lift Servo Manual Speed" description="Lift Servo manual speed" max="10" min="0"  paramter="" tag="" unit="mm/s" type="Double" />
+      <config default="200" name="AccOrDecTime" nameView="Lift Servo Acc or Dec  Time" description="Lift Servo Acc or Dec time" max="1000" min="0"  paramter="" tag="" unit="ms" type="Double" />
       <!--<config default="550" name="DecTime" nameView="Lift Servo Dec  time" description="Lift Servo Dec time" max="1000" min="100"  paramter="" tag="" unit="ms" type="Double" />-->
       <config default="-5" name="CCWLimitPosition" nameView="Lift Servo CCW limit position" description="Lift Servo CCW limit position" max="0" min="-100"  paramter="" tag="" unit="mm" type="Double" />
       <config default="16" name="CWLimitPosition" nameView="Lift Servo CW limit position" description="Lift Servo CCW limit position" max="1000" min="0"  paramter="" tag="" unit="mm" type="Double" />
@@ -533,34 +533,34 @@
 		<config default="100" name="GasFlowPressureAlarmRange" nameView="Gas Flow Pressure Alarm Range" description="" max="760000" min="0" paramter="" tag="" unit="sccm" type="Double" visible="false"/>
 		<config default="60" name="GasFlowPressureAlarmTime" nameView="Gas Flow Pressure Alarm Time" description="" max="3600" min="0" paramter="" tag="" unit="second" type="Double" visible="false" />
 		<config default="true" name="EnableThrottleValve" nameView="Enable Throttle Valve" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" visible="false"/>
-		<config default="150" name="ChamberHeaterSetPointLimit" nameView="Chamber Heater Set Point Limit" description="" max="500" min="0" paramter="" tag="" unit="" type="Integer" />
-		<config default="140" name="ForeLineHeaterSetPointLimit" nameView="ForeLine Heater Set Point Limit" description="" max="500" min="0" paramter="" tag="" unit="" type="Integer" />
-		<config default="120" name="CheckSubstrateTempTimeout" nameView="Check Substrate Temp Timeout" description="" max="3600" min="0" paramter="" tag="" unit="" type="Integer" />
+		<config default="150" name="ChamberHeaterSetPointLimit" nameView="Chamber Heater Set Point Limit" description="" max="500" min="0" paramter="" tag="" unit="℃" type="Integer" />
+		<config default="140" name="ForeLineHeaterSetPointLimit" nameView="ForeLine Heater Set Point Limit" description="" max="500" min="0" paramter="" tag="" unit="℃" type="Integer" />
+		<config default="120" name="CheckSubstrateTempTimeout" nameView="Check Substrate Temp Timeout" description="" max="3600" min="0" paramter="" tag="" unit="s" type="Integer" />
 		<config default="90" name="CheckATMTimeout" nameView="Check ATM Timeout" description="" max="3000" min="0" paramter="" tag="" unit="s" type="Integer" />
 		<config default="1" name="VentTimeDelay" nameView="Vent Time Delay" description="" max="3000" min="0" paramter="" tag="" unit="s" type="Integer" />
-		<config default="780000" name="ChamberBasePressureThreshold" nameView="Chamber Base Pressure Threshold" description="" max="1000000" min="0" paramter="" tag="" unit="mtorr" type="Double" />
+		<config default="780000" name="ChamberBasePressureThreshold" nameView="Chamber Base Pressure Threshold" description="" max="1000000" min="0" paramter="" tag="" unit="mTorr" type="Double" />
 		<config default="120" name="ChamberBaseTemperatureThreshold" nameView="Chamber Base Temperature Threshold" description="" max="1000" min="0" paramter="" tag="" unit="°C" type="Double" />
 		<config default="10" name="ProcessPressureOffset" nameView="Process Pressure Offset" description="" max="100" min="0" paramter="" tag="" unit="mtorr" type="Double" visible="false"/>
 		<config default="7500" name="ChamberVolume" nameView="Chamber Volume" max="100000" min="0" paramter="" tag="" unit="mL" visible="false" type="Double" />
 		<config default="25" name="GasTemperature" nameView="Gas Temperature" max="1000" min="-1000" paramter="" tag="" unit="℃" visible="false" type="Double" />
 		<config default="9" name="TargetPressureInMFCVerification" nameView="MFC verification target pressure" max="100" min="0" paramter="" tag="" unit="Torr" visible="false" type="Double" />
 		<config default="180" name="GasFlowTimeInMFCVerification" nameView="MFC verification gas flow time" max="1000" min="0" paramter="" tag="" unit="second" visible="false" type="Double" />
-		<config default="0" name="PinDownDelayTimePick" nameView="Pick Delay Time before pin down" description="" max="120" min="0" paramter="" tag="" unit="s" type="Integer" visible="true"/>
-		<config default="0" name="PinDownDelayTimePlace" nameView="Place Delay Time before pin down" description="" max="120" min="0" paramter="" tag="" unit="s" type="Integer" visible="true"/>
+		<config default="0" name="PinDownDelayTimePick" nameView="Pick Delay Time Before Pin Down" description="" max="120" min="0" paramter="" tag="" unit="s" type="Integer" visible="true"/>
+		<config default="0" name="PinDownDelayTimePlace" nameView="Place Delay Time Before Pin Down" description="" max="120" min="0" paramter="" tag="" unit="s" type="Integer" visible="true"/>
 		<config default="0" name="LiftPinPositionAfterPlace" nameView="Lift Pin Position After Place wafer, 0, Down, 1, Middle, 2, Up" description="" max="5" min="0" paramter="" tag="" unit="" type="Integer" visible="false"/>
 		<config default="Strip" name="ChamberLabel"  nameView="Chamber Label" description="Chamber label" max="" min="" paramter="" tag=""  unit="" type="String" visible="false"/>
 		<config default="30" name="MaxDeviationInMFCVerification" nameView="MFC verification max deviation（%）" max="100000" min="0" paramter="" tag="" unit="%" visible="false" type="Double" />
-		<config default="150" name="WallHeaterSetPointLimit" nameView="Wall Heater Set Point Limit" description="" max="500" min="0" paramter="" tag="" unit="" type="Integer" />
-		<config default="false" name="EnableWallHeater" nameView="Enable Chamber Wall Heater" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
-		<config default="false" name="EnableGridHeater" nameView="Enable Chamber Grid Heater" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
+		<config default="150" name="WallHeaterSetPointLimit" nameView="Wall Heater Set Point Limit" description="" max="500" min="0" paramter="" tag="" unit="℃" type="Integer" />
+		<config default="false" name="EnableWallHeater" nameView="Enable Chamber Wall Heater" description="" max="" min="" paramter="" tag="" unit="" type="Bool" />
+		<config default="false" name="EnableGridHeater" nameView="Enable Chamber Grid Heater" description="" max="" min="" paramter="" tag="" unit="" type="Bool" />
     <config default="0" name="LiftPinMode" nameView="LiftPin Mode" description="liftpin: 0-cylinderliftpin，1-single axis servo liftpin 2-double Axis servo liftpin  4-two double Axis servo liftpin" max="99" min="0" paramter="" tag="" unit="" type="Integer" visible="false"/>
 		<config default="PortV" name="BrooksPortName" nameView="Brooks EFEM Port Name" description="Brooks EFEM Port Name of PMB" max="" min="" paramter="" tag="" unit="" type="String" visible="false"/>
 		<config default="false" name="EnableResetError" nameView="Enable Reset Chamber Error by Click Reset Button" description="" max="1" min="0" paramter="" tag="" unit="" type="Bool" visible="false"/>
     <config default="false" name="ScrubberIsInstalled" nameView="Is Scrubber Installed"  description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" visible="false"/>
     <config default="5" name="LiftUpDownTimeout" nameView="Lift Up Down Timeout" description="Lift up/down time out" max="99999" min="1" paramter="" tag="" unit="second" type="Integer" visible="false"/>
-    <config default="30" name="SubstrateTemperatureTCTMDiff" nameView="Substrate Temperature TC TM Diff" description="" max="500" min="1" paramter="" tag="" unit="" type="Integer" visible="true"/>
-    <config default="30" name="ForelineTemperatureTCTMDiff" nameView="Foreline Temperature TC TM Diff" description="" max="500" min="1" paramter="" tag="" unit="" type="Integer" visible="true"/>
-    <config default="30" name="CHBWallTemperatureTCTMDiff" nameView="CHB Wall Temperature TC TM Diff" description="" max="500" min="1" paramter="" tag="" unit="" type="Integer" visible="true"/>
+    <config default="30" name="SubstrateTemperatureTCTMDiff" nameView="Substrate Temperature TC TM Diff" description="" max="500" min="1" paramter="" tag="" unit="℃" type="Integer" visible="true"/>
+    <config default="30" name="ForelineTemperatureTCTMDiff" nameView="Foreline Temperature TC TM Diff" description="" max="500" min="1" paramter="" tag="" unit="℃" type="Integer" visible="true"/>
+    <config default="30" name="CHBWallTemperatureTCTMDiff" nameView="CHB Wall Temperature TC TM Diff" description="" max="500" min="1" paramter="" tag="" unit="℃" type="Integer" visible="true"/>
     
     <configs name="MFCVerification" nameView="MFC Verification" visible="false">
 			<config default="7500" name="ChamberVolume" nameView="Chamber Volume" max="100000" min="0" paramter="" tag="" unit="mL"  visible="false" type="Double" />
@@ -611,11 +611,11 @@
 			<config default="1" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
 			<config default="COM24" name="Port" nameView="Port" description="serial port name of RFG" max="" min="" paramter="" tag="" unit="" type="String" />
 			<config default="127.0.0.1:502" name="IPAddress" nameView="IP Address" description="EFEM IP,default 127.0.0.1:502" max="" min="" paramter="" tag="" unit="" type="String" />
-			<config default="500" name="PowerAlarmRange" nameView="Power Alarm Range" description="" max="1000" min="0" paramter="" tag="" unit="" type="Double" />
-			<config default="10" name="PowerAlarmTime" nameView="Power Alarm Time" description="" max="10" min="0" paramter="" tag="" unit="" type="Double" />
-			<config default="1" name="ReflectPowerAlarmRange" nameView="Reflect Power Alarm Range" description="" max="1000" min="0" paramter="" tag="" unit="" type="Double" />
-			<config default="1" name="ReflectPowerAlarmTime" nameView="Reflect Power Alarm Time" description="" max="10" min="0" paramter="" tag="" unit="" type="Double" />
-			<config default="3000" name="PowerRange" nameView="Power Range" description="" max="30000" min="0" paramter="" tag="" unit="" type="Double" />
+			<config default="500" name="PowerAlarmRange" nameView="Power Alarm Range" description="" max="1000" min="0" paramter="" tag="" unit="W" type="Double" />
+			<config default="10" name="PowerAlarmTime" nameView="Power Alarm Time" description="" max="10" min="0" paramter="" tag="" unit="s" type="Double" />
+			<config default="1" name="ReflectPowerAlarmRange" nameView="Reflect Power Alarm Range" description="" max="1000" min="0" paramter="" tag="" unit="W" type="Double" />
+			<config default="1" name="ReflectPowerAlarmTime" nameView="Reflect Power Alarm Time" description="" max="10" min="0" paramter="" tag="" unit="s" type="Double" />
+			<config default="3000" name="PowerRange" nameView="Power Range" description="" max="30000" min="0" paramter="" tag="" unit="W" type="Double" />
 			<config default="1" name="Coefficient" nameView="Coefficient" description="" max="10" min="0" paramter="" tag="" unit="" type="Double" visible="false"/>
 			<config default="false" name="EnablePulsingFunction" nameView="Enable Pulsing Function" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" visible="false"/>
 			<config default="false" name="EnableReflectPower" nameView="Enable Reflect Power" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" visible="false"/>
@@ -623,7 +623,7 @@
 			<config default="1" name="PowerRegulationFactor" nameView="Power Regulation Factor" description="" max="10" min="0" paramter="" tag="" unit="" type="Integer" visible="false"/>
 			<config default="1000" name="RfPowerAlarmRange" nameView="RF Power Alarm Range" description="" max="10000" min="0" paramter="" tag="" unit="" type="Integer" visible="false"/>
 			<config default="3000" name="RfPowerAlarmTime" nameView="RF Power Alarm Time" description="" max="10000" min="0" paramter="" tag="" unit="" type="Integer" visible="false"/>
-			<config default="3" name="RFTurnOnTimeout" nameView="RF Turn On Timeout" description="" max="10" min="0" paramter="" tag="" unit="S" type="Integer" />
+			<config default="3" name="RFTurnOnTimeout" nameView="RF Turn On Timeout" description="" max="10" min="0" paramter="" tag="" unit="s" type="Integer" />
 			<config default="false" name="EnableCalibration" nameView="Enable calibration" max="" min="" paramter="" tag="" unit="" visible="false" type="Bool" />
 			<config default="100#100;200#200;" name="CalibrationTable" nameView="Calibration table" max="" min="0" paramter="" tag="" unit="" visible="false" type="String" />
 			<config default="" name="GeneratorSerialNumber" nameView="Generator serial number" max="" min="0" paramter="" tag="" unit="" type="String" visible="false"/>
@@ -634,7 +634,7 @@
 			<config default="" name="CalibrationTableDetail" nameView="Calibration table detail" max="" min="0" paramter="" tag="" unit="" visible="false" type="String" />
 		</configs>
 		<configs name="match" nameView="Source Match" >
-			<config default="false" name="EnableMatch" nameView="Enable Source Match" description="enable match or not" max="1" min="0" tag="" unit="" type="Bool" />
+			<config default="false" name="EnableMatch" nameView="Enable Source Match" description="enable match or not" max="" min="" tag="" unit="" type="Bool" />
 			<config default="1" name="MFG" nameView="MFG" description="Manufacturer, 1:AdTec; 2:Comet;3:Revtech" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
 			<config default="1" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
 			<config default="COM25" name="Port" nameView="Port" description="serial port name of match" max="" min="" paramter="" tag="" unit="" type="String" />
@@ -687,11 +687,11 @@
 			<config default="1" name="MfcScaleFactor" nameView="MFC Scale Factor" description="Scale factor" max="10" min="0" tag="" unit="sccm" type="Double" />
 			<config default="100" name="DefaultSetPoint" nameView="Default Set Point" description="default setpoint" max="1000" min="0" tag="" unit="sccm" type="Integer" visible="false"/>
 			<config default="1" name="FlowRegulationFactor" nameView="Flow Regulation Factor" description="flow regulation factor" max="10" min="0" tag="" unit="sccm" type="Integer" visible="false"/>
-			<config default="true" name="MfcEnableAlarm" nameView="MFC Enable Alarm" description="" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
+			<config default="true" name="MfcEnableAlarm" nameView="MFC Enable Alarm" description="" max="" min="" paramter="" tag="" unit="" type="Bool" />
 			<config default="10" name="MfcAlarmRange" nameView="MFC Alarm Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
-			<config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
+			<config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="" max="60" min="0" paramter="" tag="" unit="s" type="Integer" />
       <config default="10" name="MfcWarningRange" nameView="MFC Warning Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
-      <config default="10" name="MfcWarningTime" nameView="MFC Warning Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
+      <config default="10" name="MfcWarningTime" nameView="MFC Warning Time" description="" max="60" min="0" paramter="" tag="" unit="s" type="Integer" />
 		</configs>
 		<configs name="MfcGas2" nameView="MFC Gas2" >
 			<config default="true" name="Enable" nameView="Enable" description="Enable gas 2 or not" tag="" unit="" type="Bool" />
@@ -700,11 +700,11 @@
 			<config default="1" name="MfcScaleFactor" nameView="MFC Scale Factor" description="Scale factor" max="10" min="0" tag="" unit="sccm" type="Double" />
 			<config default="100" name="DefaultSetPoint" nameView="Default Set Point" description="default setpoint" max="1000" min="0" tag="" unit="sccm" type="Integer" visible="false"/>
 			<config default="1" name="FlowRegulationFactor" nameView="Flow Regulation Factor" description="flow regulation factor" max="10" min="0" tag="" unit="sccm" type="Integer" visible="false"/>
-			<config default="true" name="MfcEnableAlarm" nameView="MFC Enable Alarm" description="" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
+			<config default="true" name="MfcEnableAlarm" nameView="MFC Enable Alarm" description="" max="" min="" paramter="" tag="" unit="" type="Bool" />
 			<config default="10" name="MfcAlarmRange" nameView="MFC Alarm Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
-			<config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
+			<config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="" max="60" min="0" paramter="" tag="" unit="s" type="Integer" />
       <config default="10" name="MfcWarningRange" nameView="MFC Warning Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
-      <config default="10" name="MfcWarningTime" nameView="MFC Warning Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
+      <config default="10" name="MfcWarningTime" nameView="MFC Warning Time" description="" max="60" min="0" paramter="" tag="" unit="s" type="Integer" />
 		</configs>
 		<configs name="MfcGas3" nameView="MFC Gas3" >
 			<config default="true" name="Enable" nameView="Enable" description="Enable gas 3 or not" tag="" unit="" type="Bool" />
@@ -713,11 +713,11 @@
 			<config default="1" name="MfcScaleFactor" nameView="MFC Scale Factor" description="Scale factor" max="10" min="0" tag="" unit="sccm" type="Double" />
 			<config default="100" name="DefaultSetPoint" nameView="Default Set Point" description="default setpoint" max="1000" min="0" tag="" unit="sccm" type="Integer" visible="false"/>
 			<config default="1" name="FlowRegulationFactor" nameView="Flow Regulation Factor" description="flow regulation factor" max="10" min="0" tag="" unit="sccm" type="Integer" visible="false"/>
-			<config default="true" name="MfcEnableAlarm" nameView="MFC Enable Alarm" description="" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
+			<config default="true" name="MfcEnableAlarm" nameView="MFC Enable Alarm" description="" max="" min="" paramter="" tag="" unit="" type="Bool" />
 			<config default="10" name="MfcAlarmRange" nameView="MFC Alarm Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
-			<config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
+			<config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="" max="60" min="0" paramter="" tag="" unit="s" type="Integer" />
       <config default="10" name="MfcWarningRange" nameView="MFC Warning Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
-      <config default="10" name="MfcWarningTime" nameView="MFC Warning Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
+      <config default="10" name="MfcWarningTime" nameView="MFC Warning Time" description="" max="60" min="0" paramter="" tag="" unit="s" type="Integer" />
 		</configs>
 		<configs name="MfcGas4" nameView="MFC Gas4" >
 			<config default="true" name="Enable" nameView="Enable" description="Enable gas 4 or not" tag="" unit="" type="Bool" />
@@ -726,11 +726,11 @@
 			<config default="1" name="MfcScaleFactor" nameView="MFC Scale Factor" description="Scale factor" max="10" min="0" tag="" unit="sccm" type="Double" />
 			<config default="100" name="DefaultSetPoint" nameView="Default Set Point" description="default setpoint" max="1000" min="0" tag="" unit="sccm" type="Integer" visible="false"/>
 			<config default="1" name="FlowRegulationFactor" nameView="Flow Regulation Factor" description="flow regulation factor" max="10" min="0" tag="" unit="sccm" type="Integer" visible="false"/>
-			<config default="true" name="MfcEnableAlarm" nameView="MFC Enable Alarm" description="MFC Enable Alarm" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
+			<config default="true" name="MfcEnableAlarm" nameView="MFC Enable Alarm" description="MFC Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" />
 			<config default="10" name="MfcAlarmRange" nameView="MFC Alarm Range" description="MFC Alarm Range" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
-			<config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="MFC Alarm Time" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
+			<config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="MFC Alarm Time" max="60" min="0" paramter="" tag="" unit="s" type="Integer" />
       <config default="10" name="MfcWarningRange" nameView="MFC Warning Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
-      <config default="10" name="MfcWarningTime" nameView="MFC Warning Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
+      <config default="10" name="MfcWarningTime" nameView="MFC Warning Time" description="" max="60" min="0" paramter="" tag="" unit="s" type="Integer" />
 		</configs>
 		<configs name="MfcGas5" nameView="MFC Gas5" >
 			<config default="true" name="Enable" nameView="Enable" description="Enable gas 5 or not" tag="" unit="" type="Bool" />
@@ -739,36 +739,36 @@
 			<config default="1" name="MfcScaleFactor" nameView="MFC Scale Factor" description="Scale factor" max="10" min="0" tag="" unit="sccm" type="Double" />
 			<config default="100" name="DefaultSetPoint" nameView="Default Set Point" description="default setpoint" max="1000" min="0" tag="" unit="sccm" type="Integer" visible="false"/>
 			<config default="1" name="FlowRegulationFactor" nameView="Flow Regulation Factor" description="flow regulation factor" max="10" min="0" tag="" unit="sccm" type="Integer" visible="false"/>
-			<config default="true" name="MfcEnableAlarm" nameView="MFC Enable Alarm" description="MFC Enable Alarm" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
+			<config default="true" name="MfcEnableAlarm" nameView="MFC Enable Alarm" description="MFC Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" />
 			<config default="10" name="MfcAlarmRange" nameView="MFC Alarm Range" description="MFC Alarm Range" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
-			<config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="MFC Alarm Time" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
+			<config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="MFC Alarm Time" max="60" min="0" paramter="" tag="" unit="s" type="Integer" />
       <config default="10" name="MfcWarningRange" nameView="MFC Warning Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
-      <config default="10" name="MfcWarningTime" nameView="MFC Warning Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
+      <config default="10" name="MfcWarningTime" nameView="MFC Warning Time" description="" max="60" min="0" paramter="" tag="" unit="s" type="Integer" />
 		</configs>
 		<configs name="Pump" nameView="Pump" >
-			<config default="30" name="LeakRate" nameView="Leak Rate" description="" max="756000" min="0" paramter="" tag="" unit="mTorrPerMin" type="Double" />
-			<config default="180" name="LeakCheckPumpingTime" nameView="Leak Check Pumping Time" description="" max="3000" min="0" paramter="" tag="" unit="" type="Integer" />
-			<config default="180" name="LeakCheckWaitTime" nameView="Leak Check Wait Time" description="" max="3000" min="0" paramter="" tag="" unit="" type="Integer" />
+			<config default="30" name="LeakRate" nameView="Leak Rate" description="" max="756000" min="0" paramter="" tag="" unit="mTorr" type="Double" />
+			<config default="180" name="LeakCheckPumpingTime" nameView="Leak Check Pumping Time" description="" max="3000" min="0" paramter="" tag="" unit="s" type="Integer" />
+			<config default="180" name="LeakCheckWaitTime" nameView="Leak Check Wait Time" description="" max="3000" min="0" paramter="" tag="" unit="s" type="Integer" />
 			<config default="150" name="PumpBasePressure" nameView="Pump Base Pressure" description="" max="756000" min="0" paramter="" tag="" unit="mTorr" type="Integer" />
-			<config default="120" name="PumpTimeLimit" nameView="Pump Time Limit" description="" max="3000" min="0" paramter="" tag="" unit="" type="Double" />
+			<config default="120" name="PumpTimeLimit" nameView="Pump Time Limit" description="" max="3000" min="0" paramter="" tag="" unit="s" type="Double" />
 			<config default="5" name="PumpValveDelay" nameView="Pump Valve Delay" description="" max="3000" min="0" paramter="" tag="" unit="s" type="Integer" />
 		</configs>
 		<configs name="Purge" nameView="Purge" >
 			<config default="3" name="PurgeCycleCount" nameView="Purge Cycle Count" description="" max="30" min="0" paramter="" tag="" unit="times" type="Double" />
-			<config default="700000" name="PurgeVentPressure" nameView="Purge Vent Pressure" description="" max="760000" min="0" paramter="" tag="" unit="mtorr" type="Double" />
-			<config default="10" name="PurgePumpPressure" nameView="Purge Pump Pressure" description="" max="760000" min="0" paramter="" tag="" unit="mtorr" type="Double" />
-			<config default="60" name="PurgeVentTimeLimit" nameView="Purge Vent Time Limit" description="" max="3600" min="0" paramter="" tag="" unit="second" type="Double" />
-			<config default="60" name="PurgePumpTimeLimit" nameView="Purge Pump Time Limit" description="" max="3600" min="0" paramter="" tag="" unit="second" type="Double" />
-			<config default="10" name="PurgeVentStableTime" nameView="Purge Vent Stable Time" description="" max="600" min="0" paramter="" tag="" unit="second" type="Double" />
-			<config default="10" name="PurgePumpStableTime" nameView="Purge Pump Stable Time" description="" max="600" min="0" paramter="" tag="" unit="second" type="Double" />
+			<config default="700000" name="PurgeVentPressure" nameView="Purge Vent Pressure" description="" max="760000" min="0" paramter="" tag="" unit="mTorr" type="Double" />
+			<config default="10" name="PurgePumpPressure" nameView="Purge Pump Pressure" description="" max="760000" min="0" paramter="" tag="" unit="mTorr" type="Double" />
+			<config default="60" name="PurgeVentTimeLimit" nameView="Purge Vent Time Limit" description="" max="3600" min="0" paramter="" tag="" unit="s" type="Double" />
+			<config default="60" name="PurgePumpTimeLimit" nameView="Purge Pump Time Limit" description="" max="3600" min="0" paramter="" tag="" unit="s" type="Double" />
+			<config default="10" name="PurgeVentStableTime" nameView="Purge Vent Stable Time" description="" max="600" min="0" paramter="" tag="" unit="s" type="Double" />
+			<config default="10" name="PurgePumpStableTime" nameView="Purge Pump Stable Time" description="" max="600" min="0" paramter="" tag="" unit="s" type="Double" />
 		</configs>
     
     <configs name="HeaterChamber" nameView="Heater Substrate" >
-      <config default="false" name="HeaterEnableTolerance" nameView="Enable Heater Deviation Check" description="" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
-      <config default="200" name="HeaterAlarmRange" nameView="Heater deviation Alarm Range" description="" max="200" min="0" paramter="" tag="" unit="℃" type="Integer" />
-      <config default="10" name="HeaterAlarmTime" nameView="Heater deviation Alarm Time" description="" max="3600" min="0" paramter="" tag="" unit="second" type="Integer" />
-      <config default="100" name="HeaterWarningRange" nameView="Heater deviation Warning Range" description="" max="200" min="0" paramter="" tag="" unit="℃" type="Integer" />
-      <config default="10" name="HeaterWarningTime" nameView="Heater deviation Warning Time" description="" max="3600" min="0" paramter="" tag="" unit="second" type="Integer" />
+      <config default="false" name="HeaterEnableTolerance" nameView="Enable Heater Deviation Check" description="" max="" min="" paramter="" tag="" unit="" type="Bool" />
+      <config default="200" name="HeaterAlarmRange" nameView="Heater Deviation Alarm Range" description="" max="200" min="0" paramter="" tag="" unit="℃" type="Integer" />
+      <config default="10" name="HeaterAlarmTime" nameView="Heater Deviation Alarm Time" description="" max="3600" min="0" paramter="" tag="" unit="s" type="Integer" />
+      <config default="100" name="HeaterWarningRange" nameView="Heater Deviation Warning Range" description="" max="200" min="0" paramter="" tag="" unit="℃" type="Integer" />
+      <config default="10" name="HeaterWarningTime" nameView="Heater Deviation Warning Time" description="" max="3600" min="0" paramter="" tag="" unit="s" type="Integer" />
       <config default="0" name="MonitorTcFeedbackOffset" nameView="Monitor Tc Feedback Offset" description="" max="5" min="-5" paramter="" tag="" unit="℃" type="Double" visible="false"/>
       <config default="0" name="ControlTcFeedbackOffset" nameView="Control Tc Feedback Offset" description="" max="5" min="-5" paramter="" tag="" unit="℃" type="Double" visible="false"/>
 
@@ -792,11 +792,11 @@
 			<config name="OffsetValue_9" nameView="Offset Value 9" description="Offset Value 9" unit="degree" type="Double" max="300" min="0" visible="false"/>
 		</configs>
     <configs name="WallHeater" nameView="Heater Wall" >
-      <config default="false" name="HeaterEnableTolerance" nameView="Enable Heater Deviation Check" description="" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
-      <config default="200" name="HeaterAlarmRange" nameView="Heater deviation Alarm Range" description="" max="200" min="0" paramter="" tag="" unit="℃" type="Integer" />
-      <config default="10" name="HeaterAlarmTime" nameView="Heater deviation Alarm Time" description="" max="3600" min="0" paramter="" tag="" unit="second" type="Integer" />
-      <config default="100" name="HeaterWarningRange" nameView="Heater deviation Warning Range" description="" max="200" min="0" paramter="" tag="" unit="℃" type="Integer" />
-      <config default="10" name="HeaterWarningTime" nameView="Heater deviation Warning Time" description="" max="3600" min="0" paramter="" tag="" unit="second" type="Integer" />
+      <config default="false" name="HeaterEnableTolerance" nameView="Enable Heater Deviation Check" description="" max="" min="" paramter="" tag="" unit="" type="Bool" />
+      <config default="200" name="HeaterAlarmRange" nameView="Heater Deviation Alarm Range" description="" max="200" min="0" paramter="" tag="" unit="℃" type="Integer" />
+      <config default="10" name="HeaterAlarmTime" nameView="Heater Deviation Alarm Time" description="" max="3600" min="0" paramter="" tag="" unit="s" type="Integer" />
+      <config default="100" name="HeaterWarningRange" nameView="Heater Deviation Warning Range" description="" max="200" min="0" paramter="" tag="" unit="℃" type="Integer" />
+      <config default="10" name="HeaterWarningTime" nameView="Heater Deviation Warning Time" description="" max="3600" min="0" paramter="" tag="" unit="s" type="Integer" />
       <config default="0" name="MonitorTcFeedbackOffset" nameView="Monitor Tc Feedback Offset" description="" max="5" min="-5" paramter="" tag="" unit="℃" type="Double" visible="false"/>
       <config default="0" name="ControlTcFeedbackOffset" nameView="Control Tc Feedback Offset" description="" max="5" min="-5" paramter="" tag="" unit="℃" type="Double" visible="false"/>
 
@@ -821,11 +821,11 @@
     </configs>
 
     <configs name="ForelineHeater" nameView="Heater Foreline" >
-      <config default="false" name="HeaterEnableTolerance" nameView="Enable Heater Deviation Check" description="" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
-      <config default="200" name="HeaterAlarmRange" nameView="Heater deviation Alarm Range" description="" max="200" min="0" paramter="" tag="" unit="℃" type="Integer" />
-      <config default="10" name="HeaterAlarmTime" nameView="Heater deviation Alarm Time" description="" max="3600" min="0" paramter="" tag="" unit="second" type="Integer" />
-      <config default="100" name="HeaterWarningRange" nameView="Heater deviation Warning Range" description="" max="200" min="0" paramter="" tag="" unit="℃" type="Integer" />
-      <config default="10" name="HeaterWarningTime" nameView="Heater deviation Warning Time" description="" max="3600" min="0" paramter="" tag="" unit="second" type="Integer" />
+      <config default="false" name="HeaterEnableTolerance" nameView="Enable Heater Deviation Check" description="" max="" min="" paramter="" tag="" unit="" type="Bool" />
+      <config default="200" name="HeaterAlarmRange" nameView="Heater Deviation Alarm Range" description="" max="200" min="0" paramter="" tag="" unit="℃" type="Integer" />
+      <config default="10" name="HeaterAlarmTime" nameView="Heater Deviation Alarm Time" description="" max="3600" min="0" paramter="" tag="" unit="s" type="Integer" />
+      <config default="100" name="HeaterWarningRange" nameView="Heater Deviation Warning Range" description="" max="200" min="0" paramter="" tag="" unit="℃" type="Integer" />
+      <config default="10" name="HeaterWarningTime" nameView="Heater Deviation Warning Time" description="" max="3600" min="0" paramter="" tag="" unit="s" type="Integer" />
       <config default="0" name="MonitorTcFeedbackOffset" nameView="Monitor Tc Feedback Offset" description="" max="5" min="-5" paramter="" tag="" unit="℃" type="Double" visible="false"/>
       <config default="0" name="ControlTcFeedbackOffset" nameView="Control Tc Feedback Offset" description="" max="5" min="-5" paramter="" tag="" unit="℃" type="Double" visible="false"/>
 
@@ -851,10 +851,10 @@
 
     <configs name="GridHeater" nameView="Heater Grid" visible="false">
       <config default="false" name="HeaterEnableTolerance" nameView="Enable Heater deviation Check" description="" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
-      <config default="200" name="HeaterAlarmRange" nameView="Heater deviation Alarm Range" description="" max="200" min="0" paramter="" tag="" unit="℃" type="Integer" />
-      <config default="10" name="HeaterAlarmTime" nameView="Heater deviation Alarm Time" description="" max="3600" min="0" paramter="" tag="" unit="second" type="Integer" />
-      <config default="100" name="HeaterWarningRange" nameView="Heater deviation Warning Range" description="" max="200" min="0" paramter="" tag="" unit="℃" type="Integer" />
-      <config default="10" name="HeaterWarningTime" nameView="Heater deviation Warning Time" description="" max="3600" min="0" paramter="" tag="" unit="second" type="Integer" />
+      <config default="200" name="HeaterAlarmRange" nameView="Heater Deviation Alarm Range" description="" max="200" min="0" paramter="" tag="" unit="℃" type="Integer" />
+      <config default="10" name="HeaterAlarmTime" nameView="Heater Deviation Alarm Time" description="" max="3600" min="0" paramter="" tag="" unit="s" type="Integer" />
+      <config default="100" name="HeaterWarningRange" nameView="Heater Deviation Warning Range" description="" max="200" min="0" paramter="" tag="" unit="℃" type="Integer" />
+      <config default="10" name="HeaterWarningTime" nameView="Heater Deviation Warning Time" description="" max="3600" min="0" paramter="" tag="" unit="s" type="Integer" />
       <config default="0" name="MonitorTcFeedbackOffset" nameView="Monitor Tc Feedback Offset" description="" max="5" min="-5" paramter="" tag="" unit="℃" type="Double" />
       <config default="0" name="ControlTcFeedbackOffset" nameView="Control Tc Feedback Offset" description="" max="5" min="-5" paramter="" tag="" unit="℃" type="Double" />
 
@@ -903,11 +903,11 @@
 		</configs>
     <configs name="TriStateLiftPin2" nameView="Group TriState LiftPin Setting" visible="true">
       <config default="1" name="ServoWorkMode" nameView="Lift Servo Work Mode" description="Lift Servo Work Mode" max="1000" min="0"  paramter="" tag="" unit="" type="Double" visible="false"/>
-      <config default="3" name="OriginSpeed" nameView="Lift Servo Origin speed" description="Lift Servo Origin speed" max="30" min="0"  paramter="" tag="" unit="mm/s" type="Double" />
-      <config default="5" name="AutoSpeed" nameView="Lift Servo Auto speed" description="Lift Servo Auto speed" max="30" min="0"  paramter="" tag="" unit="mm/s" type="Double" />
-      <config default="5" name="ManualSpeed" nameView="Lift Servo manual speed" description="Lift Servo manual speed" max="30" min="0"  paramter="" tag="" unit="mm/s" type="Double" />
+      <config default="3" name="OriginSpeed" nameView="Lift Servo Origin Speed" description="Lift Servo Origin speed" max="30" min="0"  paramter="" tag="" unit="mm/s" type="Double" />
+      <config default="5" name="AutoSpeed" nameView="Lift Servo Auto Speed" description="Lift Servo Auto speed" max="30" min="0"  paramter="" tag="" unit="mm/s" type="Double" />
+      <config default="5" name="ManualSpeed" nameView="Lift Servo Manual Speed" description="Lift Servo manual speed" max="30" min="0"  paramter="" tag="" unit="mm/s" type="Double" />
       <config default="30" name="SoftUpLimit" nameView="Lift Servo Soft Up Limit" description="Lift Servo  Soft Up Limit" max="50" min="-50"  paramter="" tag="" unit="mm" type="Double" />
-      <config default="-30" name="SoftDownLimit" nameView="Lift Servo Soft Down limit" description="Lift Servo  limit position" max="50" min="-50"  paramter="" tag="" unit="mm" type="Double" />
+      <config default="-30" name="SoftDownLimit" nameView="Lift Servo Soft Down Limit" description="Lift Servo  limit position" max="50" min="-50"  paramter="" tag="" unit="mm" type="Double" />
       <config default="300" name="AccDecSpeedTime" nameView="Lift Servo Acc-Dec Speed Time" description="Lift Servo Acc-Dec Speed Time" max="1000" min="100"  paramter="" tag="" unit="ms" type="Double" />
       <config default="0" name="Position1" nameView="Lift Servo Position1" description="Lift Servo Position1" max="1000" min="-100"  paramter="" tag="" unit="mm" type="Double" />
       <config default="0" name="Position2" nameView="Lift Servo Position2" description="Lift Servo Position2" max="1000" min="-100"  paramter="" tag="" unit="mm" type="Double" />

VirgoUI/Models/Utility/EndPoint/EndPointView.xaml

@@ -6,7 +6,7 @@
              xmlns:deviceControl="clr-namespace:Aitex.Core.UI.DeviceControl;assembly=MECF.Framework.UI.Core"
              xmlns:controls="http://OpenSEMI.Ctrlib.com/presentation"
              mc:Ignorable="d" IsEnabled="{Binding PageEnabled}"
-             d:DesignHeight="800" d:DesignWidth="1250" Background="#669ACC">
+             d:DesignHeight="800" d:DesignWidth="1250" BorderBrush="{DynamicResource Table_BD}">
     <Grid>
 
         <Grid.RowDefinitions>