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@@ -15,7 +15,7 @@
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<config default="LP1,LP2,EfemRobot,EFEM,Aligner1,Buffer,PMA,PMB,Flipper" name="InstalledModules" description="Installed modules" max="" min="" paramter="" tag="" unit="" visible="false" type="String" />
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<config default="LP1,LP2,EfemRobot,EFEM,Aligner1,Buffer,PMA,PMB,Flipper" name="InstalledModules" description="Installed modules" max="" min="" paramter="" tag="" unit="" visible="false" type="String" />
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<config default="2" name="MaxInternalWaferCount" nameView="Max Internal wafer count" description="Max Internal wafer count" max="25" min="1" paramter="" tag="" unit="" visible="false" type="Integer" />
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<config default="2" name="MaxInternalWaferCount" nameView="Max Internal wafer count" description="Max Internal wafer count" max="25" min="1" paramter="" tag="" unit="" visible="false" type="Integer" />
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<!--<config default="30" name="DefaultCoolingTime" nameView="Default Cooling Time" description="Default Cooling Time" max="300" min="1" paramter="" tag="" unit="s" type="Integer" />-->
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<!--<config default="30" name="DefaultCoolingTime" nameView="Default Cooling Time" description="Default Cooling Time" max="300" min="1" paramter="" tag="" unit="s" type="Integer" />-->
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- <config default="Default" name="LogFilePath" nameView="LogFilePath" description="Log File Path" max="" min="" paramter="" tag="" unit="" type="String" />
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+ <config default="Default" name="LogFilePath" nameView="LogFilePath" description="Log File Path" max="" min="" paramter="" tag="" unit="" visible="false" type="String" />
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<config default="true" name="RecipeFolderByType" nameView="Recipe File Saved In Folder Process or Clean" description="Recipe file saved in process or clean folders" max="0" min="0" paramter="" tag="" unit="" type="Bool" visible="false"/>
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<config default="true" name="RecipeFolderByType" nameView="Recipe File Saved In Folder Process or Clean" description="Recipe file saved in process or clean folders" max="0" min="0" paramter="" tag="" unit="" type="Bool" visible="false"/>
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<config default="false" name="IsIgnoreCDAPressure2Alarm" nameView="IsIgnoreCDAPressure2Alarm" description="Is Ignore CDAPressure2 Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="false"/>
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<config default="false" name="IsIgnoreCDAPressure2Alarm" nameView="IsIgnoreCDAPressure2Alarm" description="Is Ignore CDAPressure2 Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="false"/>
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<config default="0" name="ChamberType" nameView="Chamber Mode" description="0=>VirgoMask,1=>VirgoR" max="10" min="0" paramter="" tag="" unit="" type="Integer" visible="false"/>
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<config default="0" name="ChamberType" nameView="Chamber Mode" description="0=>VirgoMask,1=>VirgoR" max="10" min="0" paramter="" tag="" unit="" type="Integer" visible="false"/>
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@@ -65,9 +65,9 @@
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<!--EFEM-->
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<!--EFEM-->
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<configs name="EFEM" nameView="EFEM">
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<configs name="EFEM" nameView="EFEM">
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- <config default="30" name="HomeTimeout" nameView="Home Timeout" description="Home Timeout" max="300" min="1" paramter="" tag="" unit="s" type="Integer" />
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+ <config default="60" name="HomeTimeout" nameView="Home Timeout" description="Home Timeout" max="300" min="1" paramter="" tag="" unit="s" type="Integer" visible="false" />
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<config default="60" name="MotionTimeout" nameView="Motion Timeout" description="motion time out" max="600" min="1" paramter="" tag="" unit="s" type="Integer" />
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<config default="60" name="MotionTimeout" nameView="Motion Timeout" description="motion time out" max="600" min="1" paramter="" tag="" unit="s" type="Integer" />
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- <config default="20" name="AlignerTimeout" nameView="Aligner Timeout" description="aligner time out" max="600" min="1" paramter="" tag="" unit="s" type="Integer" />
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+ <config default="20" name="AlignerTimeout" nameView="Aligner Timeout" description="aligner time out" max="600" min="1" paramter="" tag="" unit="s" type="Integer" visible="false" />
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<config default="0" name="AlignAngle" nameView="Aligner Angle" description="" max="360" min="0" paramter="" tag="" unit="" type="Double" visible="false"/>
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<config default="0" name="AlignAngle" nameView="Aligner Angle" description="" max="360" min="0" paramter="" tag="" unit="" type="Double" visible="false"/>
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<config default="127.0.0.1:13000" name="IPAddress" nameView="IP Address" description="EFEM IP and Port;default 10.0.0.100:13000" max="" min="" paramter="" tag="" unit="" type="String" visible="false"/>
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<config default="127.0.0.1:13000" name="IPAddress" nameView="IP Address" description="EFEM IP and Port;default 10.0.0.100:13000" max="" min="" paramter="" tag="" unit="" type="String" visible="false"/>
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<config default="true" name="CheckSideDoorOnEAPMap" nameView="CheckSideDoorOnEAPMap" description="Check side door on EAP map" max="" min="" paramter="" tag="" unit="" type="Bool" visible="false"/>
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<config default="true" name="CheckSideDoorOnEAPMap" nameView="CheckSideDoorOnEAPMap" description="Check side door on EAP map" max="" min="" paramter="" tag="" unit="" type="Bool" visible="false"/>
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@@ -498,7 +498,7 @@
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<config default="5" name="ManualSpeed" nameView="Lift Servo Manual Speed" description="Lift Servo manual speed" max="30" min="0" paramter="" tag="" unit="mm/s" type="Double" />
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<config default="5" name="ManualSpeed" nameView="Lift Servo Manual Speed" description="Lift Servo manual speed" max="30" min="0" paramter="" tag="" unit="mm/s" type="Double" />
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<config default="30" name="SoftUpLimit" nameView="Lift Servo Soft Up Limit" description="Lift Servo Soft Up Limit" max="50" min="-50" paramter="" tag="" unit="mm" type="Double" />
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<config default="30" name="SoftUpLimit" nameView="Lift Servo Soft Up Limit" description="Lift Servo Soft Up Limit" max="50" min="-50" paramter="" tag="" unit="mm" type="Double" />
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<config default="-30" name="SoftDownLimit" nameView="Lift Servo Soft Down Limit" description="Lift Servo limit position" max="50" min="-50" paramter="" tag="" unit="mm" type="Double" />
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<config default="-30" name="SoftDownLimit" nameView="Lift Servo Soft Down Limit" description="Lift Servo limit position" max="50" min="-50" paramter="" tag="" unit="mm" type="Double" />
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- <config default="300" name="AccDecSpeedTime" nameView="Lift Servo Acc-Dec Speed Time" description="Lift Servo Acc-Dec Speed Time" max="1000" min="100" paramter="" tag="" unit="ms" type="Double" />
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+ <config default="300" name="AccDecSpeedTime" nameView="Lift Servo Acc-Dec Speed Time" description="Lift Servo Acc-Dec Speed Time" max="1000" min="100" paramter="" tag="" unit="ms" type="Double" visible="false" />
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<config default="0" name="Position1" nameView="Lift Servo Position1" description="Lift Servo Position1" max="1000" min="-100" paramter="" tag="" unit="mm" type="Double" />
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<config default="0" name="Position1" nameView="Lift Servo Position1" description="Lift Servo Position1" max="1000" min="-100" paramter="" tag="" unit="mm" type="Double" />
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<config default="0" name="Position2" nameView="Lift Servo Position2" description="Lift Servo Position2" max="1000" min="-100" paramter="" tag="" unit="mm" type="Double" />
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<config default="0" name="Position2" nameView="Lift Servo Position2" description="Lift Servo Position2" max="1000" min="-100" paramter="" tag="" unit="mm" type="Double" />
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<config default="0" name="Position3" nameView="Lift Servo Position3" description="Lift Servo Position3" max="1000" min="-100" paramter="" tag="" unit="mm" type="Double" />
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<config default="0" name="Position3" nameView="Lift Servo Position3" description="Lift Servo Position3" max="1000" min="-100" paramter="" tag="" unit="mm" type="Double" />
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@@ -908,7 +908,7 @@
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<config default="5" name="ManualSpeed" nameView="Lift Servo Manual Speed" description="Lift Servo manual speed" max="30" min="0" paramter="" tag="" unit="mm/s" type="Double" />
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<config default="5" name="ManualSpeed" nameView="Lift Servo Manual Speed" description="Lift Servo manual speed" max="30" min="0" paramter="" tag="" unit="mm/s" type="Double" />
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<config default="30" name="SoftUpLimit" nameView="Lift Servo Soft Up Limit" description="Lift Servo Soft Up Limit" max="50" min="-50" paramter="" tag="" unit="mm" type="Double" />
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<config default="30" name="SoftUpLimit" nameView="Lift Servo Soft Up Limit" description="Lift Servo Soft Up Limit" max="50" min="-50" paramter="" tag="" unit="mm" type="Double" />
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<config default="-30" name="SoftDownLimit" nameView="Lift Servo Soft Down Limit" description="Lift Servo limit position" max="50" min="-50" paramter="" tag="" unit="mm" type="Double" />
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<config default="-30" name="SoftDownLimit" nameView="Lift Servo Soft Down Limit" description="Lift Servo limit position" max="50" min="-50" paramter="" tag="" unit="mm" type="Double" />
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- <config default="300" name="AccDecSpeedTime" nameView="Lift Servo Acc-Dec Speed Time" description="Lift Servo Acc-Dec Speed Time" max="1000" min="100" paramter="" tag="" unit="ms" type="Double" />
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+ <config default="300" name="AccDecSpeedTime" nameView="Lift Servo Acc-Dec Speed Time" description="Lift Servo Acc-Dec Speed Time" max="1000" min="100" paramter="" tag="" unit="ms" type="Double" visible="false" />
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<config default="0" name="Position1" nameView="Lift Servo Position1" description="Lift Servo Position1" max="1000" min="-100" paramter="" tag="" unit="mm" type="Double" />
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<config default="0" name="Position1" nameView="Lift Servo Position1" description="Lift Servo Position1" max="1000" min="-100" paramter="" tag="" unit="mm" type="Double" />
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<config default="0" name="Position2" nameView="Lift Servo Position2" description="Lift Servo Position2" max="1000" min="-100" paramter="" tag="" unit="mm" type="Double" />
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<config default="0" name="Position2" nameView="Lift Servo Position2" description="Lift Servo Position2" max="1000" min="-100" paramter="" tag="" unit="mm" type="Double" />
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<config default="0" name="Position3" nameView="Lift Servo Position3" description="Lift Servo Position3" max="1000" min="-100" paramter="" tag="" unit="mm" type="Double" />
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<config default="0" name="Position3" nameView="Lift Servo Position3" description="Lift Servo Position3" max="1000" min="-100" paramter="" tag="" unit="mm" type="Double" />
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