1.修改放到aligner后，发送夹指令

VirgoRT/Devices/EFEM/EfemAction.cs

@@ -737,7 +737,7 @@ namespace VirgoRT.Devices.YASKAWA
         {
             Type = EfemOperation.ClearError;
 
-            IsBackground = true;
+            //IsBackground = true;
         }
 
         public override void Execute()

VirgoRT/Modules/Schedulers/SchedulerBuffer.cs

@@ -133,7 +133,9 @@ namespace VirgoRT.Modules.Schedulers
             {
                 var wafer = WaferManager.Instance.GetWafer(Module, i);
 
-                if (wafer.IsEmpty || wafer.NextSequenceStep > wafer.ProcessJob.Sequence.Steps.Count)  // wafer.NextSequenceStep already increased after wafer arrive
+                if (wafer.IsEmpty ||
+                    wafer.ProcessJob == null || wafer.ProcessJob.Sequence == null ||
+                    wafer.NextSequenceStep > wafer.ProcessJob.Sequence.Steps.Count)  // wafer.NextSequenceStep already increased after wafer arrive
                     continue;
 
                 if(i == 0)

VirgoRT/Modules/Schedulers/SchedulerEfemRobot.cs

@@ -146,7 +146,7 @@ namespace VirgoRT.Scheduler
 
         public bool IsAligned()
         {
-            if (_entity.EFEMType == EfemEntity.EfemType.BrooksEFEM)
+            if (_entity.EFEMType == EfemEntity.EfemType.BrooksEFEM || _entity.EFEMType == EfemEntity.EfemType.BeamSUNWAY)
             {
                 if (_timerDelay.IsRunning && _timerDelay.ElapsedMilliseconds > _paramCoolingTime * 1000)
                 {